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T77a MM Non Epi Thk-Params

This document contains test results from wafers in a fabrication lot including transistor and circuit parameters. It includes measurements of threshold voltage, drive current, capacitance values and more. SPICE parameters for the process are also provided for use in circuit simulation.

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43 views

T77a MM Non Epi Thk-Params

This document contains test results from wafers in a fabrication lot including transistor and circuit parameters. It includes measurements of threshold voltage, drive current, capacitance values and more. SPICE parameters for the process are also provided for use in circuit simulation.

Uploaded by

avrman
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as TXT, PDF, TXT or read online on Scribd
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*

*
MOSIS WAFER ACCEPTANCE TESTS
*
*
RUN: T77A (MM_NON-EPI_THK-MTL)
VENDOR: TSMC
* TECHNOLOGY: SCN018
FEATURE SIZE: 0.18 microns
*
Run type: SKD
*
*
*INTRODUCTION: This report contains the lot average results obtained by MOSIS
*
from measurements of MOSIS test structures on each wafer of
*
this fabrication lot. SPICE parameters obtained from similar
*
measurements on a selected wafer are also attached.
*
*COMMENTS: DSCN6M018_TSMC
*
*
*TRANSISTOR PARAMETERS
W/L
N-CHANNEL P-CHANNEL UNITS
*
* MINIMUM
0.27/0.18
* Vth
0.49
-0.51 volts
*
* SHORT
20.0/0.18
* Idss
573
-258
uA/um
* Vth
0.51
-0.50 volts
* Vpt
4.8
-5.4 volts
*
* WIDE
20.0/0.18
* Ids0
20.7
-9.3 pA/um
*
* LARGE
50/50
* Vth
0.42
-0.41 volts
* Vjbkd
3.2
-4.3 volts
* Ijlk
<50.0
<50.0 pA
*
* K' (Uo*Cox/2)
173.5
-35.2 uA/V^2
* Low-field Mobility
412.01
83.59 cm^2/V*s
*
*COMMENTS: Poly bias varies with design technology. To account for mask
*
bias use the appropriate value for the parameters XL and XW
*
in your SPICE model card.
*
Design Technology
XL (um) XW (um)
*
----------------------- -----*
SCN6M_DEEP (lambda=0.09)
0.00
-0.01
*
thick oxide
0.00
-0.01
*
SCN6M_SUBM (lambda=0.10)
-0.02
0.00
*
thick oxide
-0.02
0.00
*
*
*FOX TRANSISTORS
GATE
N+ACTIVE P+ACTIVE UNITS
* Vth
Poly
>6.6
<-6.6 volts
*
*
*
*PROCESS PARAMETERS
N+
P+
POLY N+BLK PLY+BLK
M1
M2 UNITS
* Sheet Resistance
6.8 7.6 7.9
60.0 317.7
0.08 0.08 ohms/sq
* Contact Resistance
10.2 10.5 9.6
4.96 ohms
* Gate Oxide Thickness 41
angstrom
*
*PROCESS PARAMETERS
M3 POLY_HRI
M4
M5
M6
N_W
UNITS
* Sheet Resistance
0.08 1043.6
0.08
0.08
0.01
936
ohms/sq

* Contact Resistance 9.82


*
*COMMENTS: BLK is silicide block.
*
*
*CAPACITANCE PARAMETERS N+ P+ POLY
ITS
* Area (substrate)
955 1175 103
/um^2
* Area (N+active)
8431
/um^2
* Area (P+active)
8143
/um^2
* Area (poly)
/um^2
* Area (metal1)
/um^2
* Area (metal2)
/um^2
* Area (metal3)
/um^2
* Area (metal4)
/um^2
* Area (metal5)
/um^2
* Area (r well)
940
/um^2
* Area (d well)
/um^2
* Area (no well)
129
/um^2
* Fringe (substrate)
205 231
/um
* Fringe (poly)
/um
* Fringe (metal1)
/um
* Fringe (metal2)
/um
* Fringe (metal3)
/um
* Fringe (metal4)
/um
* Fringe (metal5)
/um
* Overlap (N+active)
835
/um
* Overlap (P+active)
770
/um
*
*
*
*CIRCUIT PARAMETERS
* Inverters
K
* Vinv
1.0
* Vinv
1.5
* Vol (100 uA)
2.0
* Voh (100 uA)
2.0
* Vinv
2.0
* Gain
2.0

14.88

19.38

21.28

ohms

M1 M2 M3 M4 M5 M6 R_W D_N_W M5P N_W UN


33 14 8 6 5 3

119

119 aF

54 19 13 10 9 8

aF
aF

65 17 10 7 5 4

aF

35 14 9 6 5

aF

35 14 9 6

aF

37 15 9

aF

37 14

aF

37

1045

aF
aF

564

aF
aF

41 35 28 21 14 16

aF

63 39 29 23 20 18

aF

53 34

22 20

aF

51 35 27 24

aF

53 34 30

aF

59 39

aF

62

aF
aF
aF

UNITS
0.74
0.78
0.08
1.63
0.82
-24.85

volts
volts
volts
volts
volts

* Ring Oscillator Freq.


* D1024_THK (31-stg,3.3V)
* DIV1024 (31-stg,1.8V)
* Ring Oscillator Power
* D1024_THK (31-stg,3.3V)
* DIV1024 (31-stg,1.8V)
*
*COMMENTS: DEEP_SUBMICRON
*
*
*
*
*

299.29 MHz
363.37 MHz
0.07 uW/MHz/gate
0.02 uW/MHz/gate

T77A SPICE BSIM3 VERSION 3.1 PARAMETERS


*
*SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8
*
* DATE: Oct 15/07
* LOT: T77A
WAF: 2007
* Temperature_parameters=Default
.MODEL CMOSN NMOS (
LEVEL
+VERSION = 3.1
TNOM
= 27
TOX
+XJ
= 1E-7
NCH
= 2.3549E17
VTH0
+K1
= 0.5791729
K2
= 2.347381E-3
K3
+K3B
= 0.0296254
W0
= 1E-7
NLX
+DVT0W = 0
DVT1W = 0
DVT2W
+DVT0
= 1.293377
DVT1
= 0.4136424
DVT2
+U0
= 289.4363878
UA
= -1.26189E-9
UB
+UC
= 6.702821E-11 VSAT
= 1.645963E5
A0
+AGS
= 0.4538766
B0
= 8.032151E-8
B1
+KETA
= -0.0172443
A1
= 8.874766E-4
A2
+RDSW
= 108.4122516
PRWG
= 0.5
PRWB
+WR
= 1
WINT
= 0
LINT
+XL
= 0
XW
= -1E-8
DWG
+DWB
= -8.578555E-9 VOFF
= -0.0948017
NFACTOR
+CIT
= 0
CDSC
= 2.4E-4
CDSCD
+CDSCB = 0
ETA0
= 1.761713E-3
ETAB
+DSUB
= 0.0147215
PCLM
= 1.8713443
PDIBLC1
+PDIBLC2 = 1.417694E-3
PDIBLCB = -0.1
DROUT
+PSCBE1 = 3.596688E10
PSCBE2 = 2.92179E-8
PVAG
+DELTA = 0.01
RSH
= 6.8
MOBMOD
+PRT
= 0
UTE
= -1.5
KT1
+KT1L
= 0
KT2
= 0.022
UA1
+UB1
= -7.61E-18
UC1
= -5.6E-11
AT
+WL
= 0
WLN
= 1
WW
+WWN
= 1
WWL
= 0
LL
+LLN
= 1
LW
= 0
LWN
+LWL
= 0
CAPMOD = 2
XPART
+CGDO
= 8.35E-10
CGSO
= 8.35E-10
CGBO
+CJ
= 9.51199E-4
PB
= 0.8
MJ
+CJSW
= 1.960953E-10 PBSW
= 0.8
MJSW
+CJSWG = 3.3E-10
PBSWG = 0.8
MJSWG
+CF
= 0
PVTH0 = -4.526939E-3 PRDSW
+PK2
= 1.930915E-3
WKETA = -5.333761E-4 LKETA
+PU0
= -3.6211047
PUA
= -4.50812E-11 PUB
+PVSAT = 1.654692E3
PETA0 = 8.419221E-5
PKETA
*
.MODEL CMOSP PMOS (
LEVEL
+VERSION = 3.1
TNOM
= 27
TOX
+XJ
= 1E-7
NCH
= 4.1589E17
VTH0
+K1
= 0.5839475
K2
= 0.0199931
K3
+K3B
= 4.2718556
W0
= 1E-6
NLX
+DVT0W = 0
DVT1W = 0
DVT2W
+DVT0
= 0.5851487
DVT1
= 0.2713811
DVT2
+U0
= 112.3925529
UA
= 1.426724E-9
UB
+UC
= -1E-10
VSAT
= 1.010482E5
A0
+AGS
= 0.3156768
B0
= 4.919304E-7
B1
+KETA
= 0.0266792
A1
= 0.3861198
A2
+RDSW
= 198.9661513
PRWG
= 0.5
PRWB
+WR
= 1
WINT
= 0
LINT
+XL
= 0
XW
= -1E-8
DWG
+DWB
= -6.419295E-9 VOFF
= -0.0945858
NFACTOR
+CIT
= 0
CDSC
= 2.4E-4
CDSCD

=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=

49
4.1E-9
0.3698438
1E-3
1.593114E-7
0
0.0282303
2.349626E-18
2
5E-6
0.3193704
-0.1971138
1.972669E-8
-3.909162E-9
2.1860065
0
6.028975E-5
0.21557
0.8082945
0
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-12
0.3736523
0.1338441
0.1338441
-0.6554852
2.317E-3
9.327954E-24
-3.320264E-4

=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=

49
4.1E-9
-0.3883026
0.1582733
1.039112E-7
0
0.1
1.162223E-21
1.5319217
1.450502E-6
0.4331546
-0.4961116
2.941711E-8
-2.683527E-8
1.9436984
0

+CDSCB
+DSUB
+PDIBLC2
+PSCBE1
+DELTA
+PRT
+KT1L
+UB1
+WL
+WWN
+LLN
+LWL
+CGDO
+CJ
+CJSW
+CJSWG
+CF
+PK2
+PU0
+PVSAT
*

=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=

0
3.193738E-4
-4.376991E-6
5.497672E10
0.01
0
0
-7.61E-18
0
1
1
0
7.7E-10
1.158375E-3
2.135911E-10
4.22E-10
0
1.286966E-3
-0.9519736
50

ETA0
PCLM
PDIBLCB
PSCBE2
RSH
UTE
KT2
UC1
WLN
WWL
LW
CAPMOD
CGSO
PB
PBSW
PBSWG
PVTH0
WKETA
PUA
PETA0

=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=

1.410905E-4
0.9293749
-1E-3
5.678848E-10
7.6
-1.5
0.022
-5.6E-11
1
0
0
2
7.7E-10
0.8489941
0.8
0.8
1.676533E-5
0.0132836
-3.28033E-11
6.807097E-5

ETAB
PDIBLC1
DROUT
PVAG
MOBMOD
KT1
UA1
AT
WW
LL
LWN
XPART
CGBO
MJ
MJSW
MJSWG
PRDSW
LKETA
PUB
PKETA

=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=

-2.481252E-4
3.269404E-3
0
0.010994
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-12
0.4112418
0.3294677
0.3294677
7.499672
-2.943003E-3
1E-21
-3.901329E-3

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