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Course Plan MST

This document outlines the course plan and evaluation plan for M436 Microsystem Technology, a 3 credit course taught by Dr. S. M. Kulkarni. The course objectives are to introduce microsystems, MEMS applications and design, and materials processing aspects. Students will develop analytical, design analysis, and CAD software skills. The course covers topics like microsensors, scaling laws, materials, manufacturing, and packaging over 40 hours. Evaluation includes a 50% weighted end semester exam, 20% mid semester exam, and 10% each for quizzes, attendance, and open problems.

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41 views

Course Plan MST

This document outlines the course plan and evaluation plan for M436 Microsystem Technology, a 3 credit course taught by Dr. S. M. Kulkarni. The course objectives are to introduce microsystems, MEMS applications and design, and materials processing aspects. Students will develop analytical, design analysis, and CAD software skills. The course covers topics like microsensors, scaling laws, materials, manufacturing, and packaging over 40 hours. Evaluation includes a 50% weighted end semester exam, 20% mid semester exam, and 10% each for quizzes, attendance, and open problems.

Uploaded by

antony1993
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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0824 2474000 Ext:3656(O)

Email: [email protected]
[email protected]
Web:
http://people.nitk.ac.in/index.php?q=152.html

Dr. S. M. Kulkarni
ME Ph. D MISTE, MAMM, MMRSI

Professor, Mechanical Engineering


National Institute of Technology Karnataka Surathkal
P. O. Srinivasnagar, MANGALORE 575025

Date: 02-01-2012

Course plan and Evaluation plan


1. Course code and Title M436
Microsystem Technology
2. L-T-P and Credits
(3-0-0) 3
3. Prerequisites
Basic Materials
Technology and Mechanics
4. Course InstructorDr. S. M. Kulkarni
5. Teaching Department Mechanical
Engineering
6. Objectives of the course
To introduce the aspects of
Microsystem, system on chip and
system on wafer concepts
To make the students aware of
different applications of MEMS
To acquaint the students about
different areas of MEMS
To make students conversant with
Materials and Processing aspects of
MEMS
To give hands on experience for
students on design of Microsystems
and MEMS software
7. Skill Development of the student
expected from the course
Analytical skills
Design analysis skills
Usage of CAD software for Design
and Analysis of MEMS

8. Course Coverage
Contents

hrs

1.

Overview of Microsystems

2.

Micro sensors and Micro actuators

3.

Scaling Laws for MEMS

4.

Materials for MEMS

5.

Microsystem Manufacturing

6.

Microsystem Design

7.

Microsystem Packaging

2
Total 40

8. References
Tai Ran Hsu, MEMS and Microsystems Design
and Manufacture, Tata McGraw-Hill, 2002 (Text
Book)
Microelectromechanical system Design J. J Allen
Stephen D Centuria, Microsystem Design, Kluwer
Academic Pub, 2003
Material from web
9. Evaluation Plan
Sl. No.

Particulars

Weightage (%)

1
2
3
4
5

End sem
Mid sem
Quizzes
Attendence
Open problem

50%
20%
10%
10%
10%

Total

100%

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