Chap 6
Chap 6
DESIGN RULES
Design rules: restrictions on the mask patterns to increase the probability of successful fabrication.
Patterns and design rules are expressed in l. The types of the most common design rules: * minimum-width rules (valid for a mask pattern of a specific layer): (a). * minimum-separation rules (between mask patterns of the same layer or different layers): (b) resp. (c). * minimum-overlap rules (mask patterns in different layers): (d).
(a) (b)
(c) (d)
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SYMBOLIC LAYOUT
A layout is symbolic when not all mask patterns have full specification: * Single symbols are used to represent elements located in several layers, e.g. transistors, contact cuts. * The length, width or layer of a wire or other layout element might be left unspecified. * Mask layers not directly related to the functionality of the circuit do not need to be specified, e.g. n-well, p-well.
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In
LAYOUT COMPACTION
p/n diffusion polysilicon contact cut V ss V ss metal Symbolic and geometric layout of a CMOS inverter. Out V dd In
EXAMPLE
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V dd
Out 3
ASPECTS OF COMPACTION
Dimension: * 1-dimensional (1D): layout elements only move or shrink in one dimension (x or y). Often sequentially performed first in the x-dimension and then in the y-dimension (or vice versa). * 2-dimensional (2D): layout elements move and shrink simultaneously in two dimensions. Complexity: * 1D-compaction can be done efficiently; 2D-compaction is NP-hard.
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1D COMPACTION: X FOLLOWED BY Y
C D I E F H G E B A C D I F H G E B A C B D I F H G A
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1D COMPACTION: Y FOLLOWED BY X
C D I E F H G B A C B D I E F G E F H D I G A C B H A
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2D COMPACTION
C D I E F H G B A C D E B I F A H G
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x5 x6
x3
x4
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0 v0 0
v1 a v2 v5 a
b v3
a v4
v6 b
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MAXIMUM-DISTANCE CONSTRAINTS
Sometimes the distance of layout elements is bounded by a maximum, e.g. when the user wants a maximum wire width. * A maximum distance constraint gives an inequality of the or form: x j * x i v c ij x i * x j w * c ij. * Consequence for the constraint graph: backward edge
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a b
12
main ()
for (i 1; i n; i i + 1) pi in-degree of vi ; Q fv0 g; while (Q 6= ;) f any element from Q; vi Q Q nfvi g; for each vj such that vi ; vj 2 E f xj maxxj ; xi + dij; pj pj - 1; if (pj 0) Q Q fvj g;
f g
for (i 0; i n; i xi 0; longest-path(G);
i + 1)
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|E|).
15
1 do f ag 0;
i + 1)
while (ag);
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1
17
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19
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CONSTRAINT GENERATION
* The constraint graph is not directly available after layout design. It must be computed. * The set of constraints should be irredundant and generated efficiently.
B A C
* Doenhardt and Lengauer have proposed a method for irredundant constraint generation with complexity O(n log n).
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