Electronic Pressure Measurement

Ultra High Purity Transducer, Ex nA ic Models WUC-10, WUC-15 and WUC-16

WIKA Datasheet WUC-1X

Applications
Semiconductor, flat panel display and photovoltaic industry Specialty and bulk gas distribution systems (Gas Sticks, Gas Panels, VMBs)

Special Features
Compact design ATEX and IECEx Zone 2 approval FM Class 1 Div 2 Groups A,B,C,D Ingress protection NEMA 4 (IP 67) with side access zero point adjustment Excellent EMC stability Active temperature compensation RoHS compliant

Fig. left Transducer WUC-10, Single End Fig. center Transducer WUC-15, Flow Through Fig. right Transducer WUC-16, Modular Surface Mount

Standard Features
Compact The ultra compact design of the WUC-1X meets the smallest product footprint requirements. The space saving design easily replaces competitive transducers, making it the perfect fit for new equipment and retrofit projects. Our flow through (WUC-15) and surface mount (WUC-16) series transducers are specifically designed and manufactured to sustain torsion applied stresses often incurred during installation. The special design of our thin film sensor eliminates the risk of sensor signal error due to influenced loads at the pressure connection or welded joints. Versatile The highest materials of construction ensure that every WUC-1X series transducer is well suited for use in corrosive or non-corrosive medias. Additionally, because every WUC-1X series transducer comes standard with NEMA4, ATEX, IECEx and FM certifications, it can be confidently installed in indoor or outdoor systems as well as in non-flammable or potentially flammable areas. The sealed side access zero point adjustment prevents entry of moisture when used outdoors. The transducers non-incendive ATEX, IECEx and FM approvals for potentially flammable environments provide essential safeguards for life and product safety. Carrying a T6 temperature class designator, WUC-1X series transducers easily meet the measurement requirements for low, spontaneous ignition temperature medias such as phosphine (PH3) and silane (SiH4). Reliable Active temperature compensation reduces the transducers impact to changing temperatures and provides for safer operations in purge-vent cycling of high Joule-Thomson effect gases. The hermetically sealed design of the transducers zero point potentiometer protects against unintentional change as well as prevents entry of moisture when used outdoors. The transducers thin film sensors are made of 2.4711/UNSR 30003 to ensure high corrosion resistance and excellent hysteresis characteristics. The remaining wetted components are made from 316L VIM/VAR stainless steel. Prior to final assembly, all wetted parts are electropolished and cleaned using the latest techniques and industry standards. Individual testing of each transducer guarantees compliance with the requirements for leak integrity, overpressure stability, accuracy, and particles levels according to the applicable and relevant SEMI standards.

WIKA Datasheet WUC-1X 8/2013

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Specifications

Models WUC-10, WUC-15 and WUC-16 WUC-16 WUC-10 / WUC-15

350 25 750 6200 500 36 1100 7400 1000 70 2100 8000 250 17 500 4800 1500 2000 100 145 3000 4200 10500 10500 3000 225 6600 10500 5000 360 10000 10500

Pressure ranges psi 30 60 100 160 bar 2 4 7 11 Over pressure safety 1) psi 120 120 210 320 psi 1800 1800 2200 2600 Burst pressure 1) Other pressure ranges and pressure units (e.g. MPa, kg/cm2) on request 1) 1 psi = 0.069 bar Measuring principle Metal thin film sensor Materials nWetted parts Pressure Connection 316L VIM/VAR Pressure sensor 2.4711 / UNS R30003 nCase 304 SS

Particle test 0.1 m Particle 0.1 ptc / ft according to Semi E49.8 Inboard helium leak test < 1 x 10-9 mbar l/sec (atm STD cc/sec) according to Semi F1 Surface finish Electropolished, typical Ra 0.13 m (RA 5); max. Ra 0.18 m (RA 7) according to Semi F19 Dead volume cm3 WUC-10 < 1.5, WUC-15 < 1, WUC-16 < 1 Permissible Medium Special gas / Vapour / Liquid Power supply U+ U+ in VDC 10 ... 30 with output signal 4 ... 20 mA / DC 0 ... 5 V 14 ... 30 with output signal DC 0 ... 10 V Signal output and RA in Ohm 4 ... 20 mA, 2-wire RA (U+ 10 V) / 0.02 A maximum ohmic load RA 0 ... 5 V, 3-wire RA > 5 k 0 ... 10 V, 3-wire RA > 10 k Power Pi W 1 % of span -5 up to +3.5 (via potentiometer) Current output signal Adjustability zero % of span -2 up to +5 (via potentiometer) Voltage output signal Response time (10 ... 90 %) ms 300 Insulation voltage VDC 500 Accuracy % of span 0.2 ( 0.4 with pressure ranges 2 bar) RSS (Root Sum Squares) incl. Linearity, Hysterisis, non-repeatability % of span 0.5 2) (1.0 2) with pressure ranges 2 bar) 2) Including non-linearity, hysteresis, zero point and full scale error (corresponds to error of measurement per IEC 61298-2) Non-linearity % of span 0.1 ( 0.15 for pressure ranges 2 bar) (BFSL) according to IEC 61298-2 Hysteresis % of span 0.14 Non-repeatability % of span 0.12 % of span 0.25 typ. (at reference conditions) 1-year stability Permissible temperature of without Approval T4 T5 T6 nMedium -20...+100C -4...+212F -20...+85C -4...+185F -20...+60C -4...+140F -20...+40C -4...+104F nAmbience -20...+85C -4...+185F -20...+85C -4...+185F -20...+60C -4...+140F -20...+40C -4...+104F nStorage -40...+100C -40...+212F -40...+100C -40...+212F -40...+100C -40...+212F -40...+100C -40...+212F Related temperature range -20 ... +80 C / -4 ... +176 F (active compensated) Temperature coefficients within related temperature range (active compensated): nmean TC of zero % of span 0.1 / 10 K nmean TC of range % of span 0.15 / 10 K RoHS-conformity Yes (not with bayonet connector) CE-conformity nPressure equipment directive 97/23/EC nEMC directive 2004/108/EC, EN 61 326 Emission (Group 1, Class B) and Immunity (industrial locations) nDirective ATEX of equipment 94/9/EC intended for use in potentially explosive atmospheres Ex-protection ATEX & IECEx Category 3) 3G (for transducers with Ex-marking) Ignition protection type II 3G Ex nA ic IIC T4/T5/T6 Gc (for transducer with Ex-marking) FM FM; Nonincendive for use in Class I, Div. 2, Groups A, B, C, D and Class I, Zone 2, Group IIC, Hazardous (Classified) Locations
3)

Read the operating conditions and safety-relevant data in the operating instruction in any case WIKA Datasheet WUC-1X 8/2013

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Specifications
Assembly and packing area Packaging Shock resistance Vibration resistance Wiring protection Short-circuit Reverse polarity Weight g

Models WUC-10, WUC-15 and WUC-16

Clean room class 5 according to ISO 14644 Double bagging according to SEMI E49.6 500 (1.5 ms) 0.35 mm (10 - 58 Hz) / 5 g (58.1 - 2000 Hz) S+ towards U- (short-time) U+ towards UApprox. 0.1 according to IEC 60068-2-27 according to IEC 60068-2-6

kg

Signal output and allowed load

4 ... 20 mA, 2-wire Current output (2-wire) 4 ... 20 mA: RA (U+ 10 V) / 0.02 A Voltage output (3-wire) 0 ... 5 V: RA > 5 k 0 ... 10 V: RA > 10 k with RA in Ohm and U+ in Volt

permitted range

Electrical connections
Bayonet connector, 4-pin Circular connector M12x1, 4-pin Flying leads, 3m Sub-D HD connector, 15-pin

2-wire 3-wire Wire gauge Diameter of cable

U+ = A U+ = A -

U- = D U- = D S+ = B

U+ = 1 U+ = 1 -

U- = 3 U- = 3 S+ = 4

U+ = red U- = black

U+ = 7

U+ = red U- = black S+ = brown U+ = 7 0.22 mm2 (AWG 24) 4.8 mm NEMA 4 (IP 67) (IP 54)

U- = 5 U- = 12 U- = 5 S+ = 2 U- = 12

Ingress Protection per IEC 60 529

NEMA 4 (IP 67)

NEMA 4 (IP 67)

The ingress protection classes specified only apply while the pressure transmitter is connected with female connectors that provide the corresponding ingress protection. Page 3 of 10

WIKA Datasheet WUC-1X 8/2013

Dimensions in inch [mm] WUC-10

Bayonet connector

1/4 Swivel Female Face Seal

Process connection variants

1/4 Weld Stub

1/4 Swivel Male Face Seal

1/4 T-Connector, Weld Stub

zero point adjustment

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WIKA Datasheet WUC-1X 8/2013

Dimensions in inch [mm] WUC-15

Bayonet connector

1/4 Fixed Male Face Seal 1/4 Fixed Male Face Seal

zero point adjustment

Process connection variants

1/4 Swivel Female Face Seal 1/4 Swivel Female Face Seal 1/4 Swivel Male Face Seal 1/4 Swivel Male Face Seal

1/4 Fixed Male Face Seal High Flow Through 1/4 Fixed Male Face Seal High Flow Through only available with pressure ranges up to 25 bar / 300 psi

1/4 Swivel Femal Face Seal 1/4 Swivel Male Face Seal

WIKA Datasheet WUC-1X 8/2013

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Process connection variants WUC-15

1/4 Fixed Male Face Seal 1/4 Swivel Female Face Seal 1/4 Fixed Male Face Seal 1/4 Swivel Male Face Seal

1/4 Fixed Male Face Seal 1/4 Weld Stub

1/4 Weld Stub 1/4 Weld Stub

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WIKA Datasheet WUC-1X 8/2013

Dimensions in inch [mm] WUC-16

Process connection variants
MSM C 1 1/8

zero point adjustment

WIKA Datasheet WUC-1X 8/2013

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 Field No. Code Feature

Type 0 Process connection: single end 5 Process connection: flow through 1 6 Process connection: surface mount Signal Output A 4 ... 20 mA, 2-wire F 0 ... 10 V, 3-wire 2 G 0... 5 V, 3-wire Dampening 3 Z Without Unit B bar p psi K kg/cm2 4 ? Other Absolute or relative pressure G gauge V compound 5 A absolute Pressure Range 320 0...2 bar gauge -1...+1 bar gauge 340 0...4 bar gauge -1...+3 bar gauge 370 0...7 bar gauge -1...+6 bar gauge 410 0...10 bar gauge -1...+9 bar gauge 416 0...16 bar gauge -1...+15 bar gauge 425 0...25 bar gauge 440 0...40 bar gauge 460 0...60 bar gauge 510 0...100 bar gauge -1...+100 bar gauge 0...1500 psia 516 0...160 bar gauge -1...+160 bar gauge 525 0...250 bar gauge -1...+250 bar gauge 540 0...400 bar gauge 380 -1...+7 bar gauge 426 -1...+25 bar gauge 441 -1 ...+40 bar gauge 461 -1 ...+60 bar gauge 471 -1...+70 bar gauge 339 0...4 kg/cm2 gauge 359 0...6 kg/cm2 gauge 398 0...10 kg/cm2 gauge 439 0...40 kg/cm2 gauge 459 0...60 kg/cm2 gauge 498 0...100 kg/cm2 gauge 520 0...200 kg/cm2 gauge

WUC-1X Smart Codes for Custom Order Configurations

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WIKA Datasheet WUC-1X 8/2013

 Field No. Code Feature

Pressure range continued 321 0...30 psig 0...30 psia 335 0...50 psia 341 0...60 psig 30 InHg...+45 psi 0...60 psia 369 0...100 psig 0...100 psia 411 0...160 psig 0...160 psia 417 0...250 psig 0...250 psia 421 0...300 psig 0...300psia 434 0...500 psig 0...500 psia 469 0...1000 psig 0...1000 psia 514 0...2000 psig -30 InHg...+2000 psi 0...2000 psia 521 0...3000 psig -30 InHg...+3000 psi 0...3000 psia 534 0...5000 psig 0...5000 psia 331 -30 InHg...+30 psi 351 -30 InHg...+60 psi 379 -30 InHg...+100 psi 412 -30 InHg...+160 psi 418 -30 InHg...+250 psi 422 -30 InHg...+300 psi 436 -30 InHg...+500 psi 6 470 -30 InHg...+1000 psi Process connection 70 Original fixed male nut (9/16-UNF) (FSFM) 71 Original swivel male nut SS4-VCR-4 (FSM) 72 Original female union nut S-VCR-1 (FSF) VN weld stub WR T-connector (1 version) WE MSM C 1 SQ 7 WF MSM W 1 Outlet process connection ZZ Without 70 Original fixed male nut (9/16-UNF) (FSFM) 71 Original swivel male nut SS4-VCR-4 (FSM) 72 Original female union nut S-VCR-1 (FSF) VN weld stub 8 ?? Other

WUC-1X Smart Codes for Custom Order Configurations (continued)

WIKA Datasheet WUC-1X 8/2013

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 Field No. Code

WUC-1X Smart Codes for Custom Order Configurations (continued)

Feature
Electrical connection M4 Circular connector M12x1, 4-pin DL Cable w/free ends O4 4-Pin bayonet connector 9 TX 15-pin high density Sub-D plug Cable length Z Without E 3 m 10 ? Other Approvals N ATEX and IECEx II 3G Ex nA ic IIC T4/T5/T6 Gc and FM Class 1 Div. 2 Group A, B, C, D 11

A dditional order info YES NO 12 1 Z quality certificates 13 Z T without

Order Code:

WUC-1

*Additional order details

10 11

12 13*

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2013 WIKA Instrument, LP. All Rights Reserved. The specifications given in this document represent the state of engineering at the time of publishing. We reserve the right to make modifications to the specifications and materials.

WIKA Datasheet WUC-1X 8/2013

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WIKA Instrument, LP 1000 Wiegand Boulevard Lawrenceville, GA 30043-5868 Tel: 888-WIKA-USA 770-513-8200 Fax: 678-739-2569 E-Mail: [email protected] www.wika.com/uhp