Technical Seminar On Ultrasonic Motors
Technical Seminar On Ultrasonic Motors
ABSTRACT ULTRASONIC MOTOR An u trasoni! motor is a type of electric motor powered by the ultrasonic ibration of a component! the stator! placed a"ainst another component! the rotor or slider dependin" on the scheme of operation #rotation or linear translation$. %ltrasonic motors differ from pie&oelectric actuators in se eral ways! thou"h both typically use some form of pie&oelectric material! most often lead &irconate titanate and occasionally lithium niobate or other sin"le'crystal materials. (he most ob ious difference is the use of resonance to amplify the ibration of the stator in contact with the rotor in ultrasonic motors. %ltrasonic motors also offer arbitrarily lar"e rotation or slidin" distances! while pie&oelectric actuators are limited
by the static strain that may be induced in the pie&oelectric element. )ne common application of ultrasonic motors is in camera lenses where they are used to mo e lens elements as part of the auto'focus system. %ltrasonic motors replace the noisier and often slower micro'motor in this application.
CONTENTS
U trasoni! Motors
Introduction Objectives Structure and Operating Principles of Motor Finite lement !nal"sis Set#$p For The %haracterisation Of The Motor 3
INTRODUCTION * An ultrasonic motor #%S+$ con erts ultrasonic ibrations into linear or rotary motion. * %S+s plays an important role a few markets where the si&e! tor,ue! speed or other re,uirements could not be satisfied by the traditional E+ motor
(he two lar"est markets for %S+s are cameras and automoti e but they are also found in medical e,uipment #+-.s$ and as robotic ser o motors.
* %ltrasonic motors! which ha e superior characteristics like hi"h tor,ue at low speed! absence of ma"netic interference! and compactness in si&e! are "ood candidates for medical applications! automation! robotics! aerospace en"ineerin" and arious other fields. +any different types of ultrasonic motors ha e been proposed up to date 011'051.
* (he stator of an ultrasonic motor that is e2cited by pie&oelectric elements in ultrasonic fre,uency ran"e de elops different kinds of ibrations dependin" on its structure. 3rom the way of creatin" an elliptical motion on the stator! ultrasonic motors were classified into two ma4or "roups! such as standin" wa e and tra elin" wa e types.
* 3urther classifications include mode'con ersion! multi'mode 05!6!71 and mode'rotation types of motors 081 that are suitable for miniaturi&ation and can be manufactured less costly. * %ltrasonic motors are of "reat interest due to the fle2ibility of miniaturi&ation in comparison with con entional electroma"netic motors whose efficiency decreases si"nificantly. Especially in information 5
systems 0/1 and medical industry 0101! compact si&e of these motors makes them find wider applications.
Objective
(he miniaturi&ation of a mechatronic de ice depends on the si&e of the motor e,uipped in the de ice to run it. +iniaturi&ation of con entional electroma"netic motors to se eral millimeters with hi"h efficiency is difficult since a "ear mechanism is re,uired to obtain a hi"h tor,ue from the electroma"netic motor. (his mechanism adds additional mass! olume and comple2ity and also increases the number of components of the system! which decreases the motor system reliability. )n the other hand! pie&oelectric ultrasonic motors are suitable for miniaturi&ation in terms of their compactness and low power consumption. )ur main ob4ecti e is to desi"n! fabricate and characteri&e pie&oelectric ultrasonic motors for micromechatronic de ices. (he approach in desi"nin" these pie&oelectric 5
motors were as followsi. (o simplify the structure includin" the polin" confi"uration of pie&oelectric element used in stator. . (o reduce the number of components in order to decrease the cost and enhance the dri in" reliability. (he desi"ned motors are a multi'mode'sin"le' ibrator e2citation type! which uses two ortho"onal bendin" modes of a hollow cylinder. Since the structure and polin" confi"uration of the acti e pie&oelectric elements used in the stator are simple! these motor structures are ery suitable for miniaturi&ation. +oreo er! a sin"le dri in" source can e2cite two bendin" modes at the same time! thus "enerate a wobble motion. (here are 3 types of ultrasonic motors. (he pie&oelectric stator structure is the same for all of these motors. 9owe er! the dimensions of the motor are reduced by almost 50 percent. Startin" with a 10 mm lon" stator! we reached down to / mm in the last model. (he initial diameter was 2./ mm and it went down to 1.5 mm. .n the final desi"n! the rotor part of the motor had been chan"ed and this resulted in a reduction in the number of components. .n terms of dri in" circuit! a sin"le dri in" source was enou"h to run the motor and a con entional switchin" power supply type resonant :'; circuit was used Structures and Operating Principles of Motors
A s,uare beam has two ortho"onal bendin" modes whose resonance fre,uencies are e,ual to each other. (he first bendin" mode fre,uencies in any direction for circular cylinders are also e,ual to each other. (he stator of the motor combines the circular and s,uare cross'sections. (he outside surface of a hollow metal cylinder was flattened on two sides at 80'de"rees to each other and two uniformly electroded rectan"ular pie&oelectric plates were bonded onto these two flattened surfaces #3i".1 #a$$. (he basic confi"uration of the motor is shown in 3i".1 #b$. Since the stator is symmetric with respect to the 2<'a2is! the area moment of inertia about the principal a2is is on the 2<'a2is. (he area moment of inertia about the other principal a2is is on the y<'a2is. (his causes the stator to ha e two de"enerated ortho"onal bendin" modes! whose resonance fre,uencies are close to each other. (he split of the bendin" mode fre,uencies is due to the partially s,uare=partially circular outside surface of the hollow cylinder. >ri in" one pie&oelectric plate #while short circuitin" the other to "round$ at a fre,uency between the two ortho"onal bendin" mode fre,uencies e2cites both modes! thus! causin" the cylinder to wobble. ?hen the other pie&oelectric plate is dri en at the same fre,uency! the direction of wobble motion is re ersed.
inite Ele!ent "nal#sis . (he beha ior of the free stator was simulated usin" A(.:A finite element software to erify the conceptual operation principle. (ailorin" dimensions of the metal and pie&oelectric ceramics e,uated the two ortho"onal bendin" mode fre,uencies of the stator. (he pie&oelectric plates on the surface of the cylinder were placed in such a way that one pie&oelectric plate can e2cite the two ortho"onal bendin" modes of the stator. 3i".2 #a$ shows the two ortho"onal bendin" mode shapes when only the plate on the 2'a2is #plate @$ was e2cited! while the electrode of the plate A was short'circuited. ?obble motion was "enerated on the cylinder when only one pie&oelectric plate is e2cited at a fre,uency between the two ortho"onal bendin" modes fre,uencies #3i".2 8
#b$$. ?hen the other pie&oelectric plate was e2cited at the same fre,uency! the direction of wobble motion was re ersed.
Set$up for t%e C%aracteri&ation of t%e Motors (he performance of the motors was measured usin" a transient characteri&ation method! which was initially proposed by Bakamura 0111. (he principle of this method is mountin" a load #usually a disk whose moment of inertia is known$ onto the motor! at 61 k9& at 6/ k9& runnin" the motor! and! finally! analy&in" the transient speed obtained as a function of time. +ore e2plicitly! the an"ular acceleration of the motor is calculated from the speed measurement by Bewton<s second law. (he transient tor,ue is then calculated by multiplyin" the an"ular acceleration with the moment of inertia of the load. %sin" this method! the startin" transient response of the motor "i es the speed'tor,ue relation. A load is mounted 10
onto the stator and the motor is then dri en with an A; olta"e. (he position of the rotatin" disk is detected throu"h an optical encoder. (he transient position data were then con erted into olta"e si"nal usin" a fre,uency to' olta"e con erter. Since the output olta"e of the con erter is proportional to the input fre,uency! the speed of the motor was obtained. (he an"ular acceleration of the motor was estimated usin" the deri ati e of the an"ular speed. 3inally! the transient tor,ue was calculated by multiplyin" the an"ular acceleration with the moment of inertia of the rotatin" disk.Structural Croperties and ;haracteristics of the +otors So far! 3 motors were fabricated. (able 1 summari&es the structural properties of these motors. As can be seen from (able 1! there is a "radual reduction in the dimensions and reduction in the total len"th of the whole motor structure.
'st Design (he outside surface of the metal cylinder was "round on two sides at 80'de"rees to each other to obtain two ortho"onal flat surfaces. (he CD( plates! which were electroded uniformly and poled in the thickness direction! were bonded onto the flat ortho"onal surfaces of the 11
cylinder usin" an epo2y. (he rotor was a cylindrical rod and it was pressed by a sprin" usin" a pair of stainless steel ferrules. A picture of this motor can be seen in 3i".3.
As a first step to clarify the beha ior of the stator! the admittance spectra 3i" 3. 1st desi"n when plate @ or A was e2cited. ?hen plate @ was e2cited while short'circuitin" the electrode of plate A to the "round! the stator had two de"enerated bendin" mode resonance fre,uencies around 61.7 and 6/.0 k9&. ?hen plate A was e2cited! the stator showed a similar beha ior.
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(he wobble motion in the @A'plane was also erified by measurin" the ma"nitude of the ibration elocity in 2 and y directions at the same time. A function "enerator #9C33120A$ and a power amplifier #B3/010$ were used to e2cite the stator. Ey e2citin" either plate @ or plate A! the elliptical displacements in 2 and y directions were measured with two laser fiber optic interferometers. 3irst! plate @ was e2cited at fre,uencies of 60.6! 61.5! 62.2! 63! 6/! 65! 65 k9&! with an input olta"e of 112.0 F p'to'p. (he results are plotted in 3i".5 #a$. (he measurements were repeated by e2citin" only plate A and the results are shown in 3i".5
3i".5. Elliptical displacements at fre,uencies 60.6! 61.5! 62.2! 63! 6/! 65 and 65 k9& #a$ when plate @ was e2cited and! #b$ when plate A was e2cited. Elliptical >isplacement when Clate A e2cited 13
60.6 61.5 62.2 >isp.@ 65 65 k9& Elliptical >isplacement when Clate A e2cited 60.6 61.5 62.2 >isp.@ 65 65 k9& (he interestin" points here are: i$ the direction of wobble motion when only plate @ was e2cited was clockwise! and counterclockwise when only plate A was e2cited! ii$ the wobble motion! when only plate @ was e2cited! was almost identical to the wobble motion when only plate A was e2cited at the same fre,uency. .n conclusion! the desi"ned motor can be dri en with a sin"le A; source and e2citin" either plate @ or A! the direction of the rotation can be re ersed. .n terms of load characteristics of the motor! transient speed! tor,ue and efficiency were measured and calculated. A load! a metal disk #50 "$ with a diameter of 3/ mm and moment of inertia #7.5 k"mm2$ was mounted onto the stator. As shown in 3i".5! the steady state speed reached 75 rad=sec in 6 sec. A startin" tor,ue of 1.7 mBm at 120 Folt is similar to other bulk pie&oelectric cylindrical type micro motors in literature and almost one order of ma"nitude hi"her than that of a thin film motor with a similar si&e 012'1/1
1/
(he product of output tor,ue with output speed "i es the output power. A ma2imum power of 50 m? was obtained at a speed of 50 rad=sec and a tor,ue of 1 mBm. (he ma2imum efficiency of 25 G #3i".6$ at 120 F is similar to other bulk cylindrical type micro pie&oelectric motor 01/1.
(nd Design (he principle is the same as the pre ious motor. (he important impro ement is in the reduction of the dimensions of the stator almost by half of the pre ious one. 3abricated motor can be seen in 3i".7.
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Simulation of the stator was performed by A(.:A finite element software to determine the bendin" modes of the structure. (he two ortho"onal bendin" fre,uencies were obser ed at 127 k9& and 132 k9&. E2perimental set' up for measurin" load characteristics is the same as the pre ious one and the results are as follows. (he steady state speed was obtained as 56 rad=sec in 6 sec. A ma2imum tor,ue of 0.76 mBm was obtained. (he motor reached a ma2imum power of /5 m? at a speed of /5 rad=sec. (he ma2imum efficiency was 12 G. (he power of the motor is dependent on the si&e of the pie&oelectric ceramics used. As the thickness and the len"th of the components were reduced! a lower output power was obtained. )rd Design (his motor is the smallest of all three desi"ns. (he diameters of the stator part are the same as that of 2nd motor. 9owe er! the len"th is reduced to / mm and also the rotor part has chan"ed completely. .nstead of a solid metal rod! a sprin" was used as a shaft. 15
(his sprin" acts as a rotor and as a pre'stress element! as well. Apparently! the number of components was minimi&ed. A picture of this motor can be seen in 3i".8.
(he resonance fre,uency of the stator is in the ran"e of 230'2/5 k9&. As the len"th of the ceramic plates reduced down to / mm! the workin" fre,uency increased relati ely. +a2imum tor,ue and power are 0.3 mBm and 25 m?! respecti ely. (able 2 summari&es the important characteristics of all motors. Tab e (. C%aracteristics of t%e !otors
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(o summari&e! (able 3 compares the structural differences of all fabricated motors. (he ob4ecti es to miniaturi&e and to simplify the structure of the proposed motor desi"n were achie ed successfully. Tab e ). Co!parison of t%e designs
Driving Circuit ;urrent trend for dri in" ultrasonic motors consists of usin" switchin" amplifiers. (he reason is that they considerably reduce the heat "enerated by the pie&oelectric element. 3or the 3rd desi"n! a switchin" power amplifier type dri in" circuit was used. +a4or feature of this kind of circuit is that it acts as a olta"e re"ulator. As load re,uirements chan"e! olta"e ariations also occur. (his kind of olta"e re"ulator circuit is capable of establishin" and maintainin" a nearly constant dc output olta"e. A schematic dia"ram of the circuit is shown in 3i". 10.
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Conclusion
(he desi"n! fabrication and characteri&ation of a pie&oelectric ultrasonic micromotor ha e been in esti"ated. (he pie&oelectric motor makes use of two ortho"onal bendin" modes of a hollow cylinder. (he ibratin" element! stator! of the motor consists of a brass tube and two pie&oelectric plates bonded to two flattened surfaces of the tube. (hree different motors were fabricated. .n the first 18
two desi"ns! a solid stainless steel was used as a shaft! a sprin" as a pre'stress and a ferrule to hold the rod and the sprin". +a4or impro ement of the 2nd motor with respect to the 1st one was the reduction in the dimensions of the stator. 3rd motor was the smallest in len"th of all and the shaft was replaced with a sprin". ;onse,uently! miniaturi&ation and simplification of the proposed desi"n were achie ed.All three motors were characteri&ed indi idually. Admittance spectra of the free stators! tor,ue! power and efficiency alues of each motor were presented. >ri in" of the motor was enabled by a switchin" power supply. .t is con entional and cheap.
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