Butt Weld
Butt Weld
Sizes 1/2 to 10
W W W . M K S I N S T . C O M
Vacuum Technology
Series 23
Table of Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
Elbows
90 Elbow
45 Elbow
90 Elbow
45 Elbow
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
with Tangents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
with Tangents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
Tees
Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
Reducing Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
Concentric Reducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
End Cap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Tubing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Ball Socket
Weld Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Weld Stub with Viton O-Ring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Braided Metal Hose
Short Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Long Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Numerical Listing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
HPS Series 23
www.mksinst.com
Introduction
HPS Series 23 is a family of buttweld vacuum fittings manufactured by MKS Instruments, Inc. They are designed to be
used in conjunction with the full line of ISO-Universal, ISO-KF
and CF UHV flanges, and are easily welded to the flanges or
each other during on-site installation. All components are
made of type 304 stainless steel and are specifically prepared for use in high vacuum process or UHV applications.
Applications
Vacuum buttweld fittings are designed to be used in any vacuum applications where minimizing the number of sealed
joints is critical.
Semiconductor wafer fabrication areas for remote installations and below a raised floor
Permanent house vacuum lines
CAD Drawings
Component Construction
The Series 23 components are constructed of 304 or 304L
welded, drawn, and annealed stainless steel tubing. (316L is
available on request.) For most vacuum process applications,
this provides the best combination of the following critical features:
Low outgassing under vacuum
Chemically resistant
Annealed for consistent leak free welding
Minimized corrosion concentration points
Good availability
Cost consistent with the above requirements
Ordering Information
To obtain delivery, technical, or applications information,
contact MKS Instruments, Inc., HPS Products at
(800) 345-1967 (US only) or (303) 449-9861. Or visit our
website at www.mksinst.com.
Installation
Series 23 Fittings are designed to be welded using techniques preferred for vacuum applications. These techniques
include internal (socket type) welding and external butt welding. The most commonly used type of weld for high vacuum
applications is a TIG (Tungsten Inert Gas) fusion weld, preferably without filler rod. For the best results, remove components from packaging in clean conditions during installation.
Handle the components with clean gloves and equipment in
the absence of any fibers, fingerprint oils, or other greases. If
these precautions are taken, the weld is more likely to be
leak free and the integrity of the vacuum surface will remain
intact and ready for use.
HPS Series 23
www.mksinst.com
90 Elbow
in.
Price
OD
OD
Wall
Thickness
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
0.75
1.13
1.52
2.25
3.00
3.75
4.50
6.00
6.00
9.00
Mech.
Polish
1002390050
1002390075
1002390100
1002390150
1002390200
1002390250
1002390300
1002390401
1002390400
1002390600
45 Elbow
in.
Price
OD
Wall
Thickness
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
0.31
0.47
0.62
0.93
1.24
1.56
1.86
2.49
2.49
3.75
A
OD
in.
OD
Wall
Thickness
0.75
1.00
1.50
2.00
2.50
3.00
4.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.083
.083
1.42
2.06
2.94
4.06
5.19
6.31
8.31
8.31
12.60
0.29
0.56
0.69
1.06
1.44
1.81
2.31
2.31
3.60*
OD
Price
Part Number Standard
Mech.
Finish
Polish
1002390WT075
1002390WT100
1002390WT150
1002390WT200
1002390WT250
1002390WT300
1002390WT401
1002390WT400
1002390WT600
in.
OD
Wall
Thickness
0.75
1.00
1.50
2.00
2.50
3.00
4.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.083
.083
0.76
1.19
1.63
2.31
3.00
3.69
4.81
4.81
7.33
0.30
0.56
0.69
1.07
1.44
1.82
2.33
2.33
3.60
B
A
B
Price
Part Number Standard
Mech.
Finish
Polish
1002345WT075
1002345WT100
1002345WT150
1002345WT200
1002345WT250
1002345WT300
1002345WT401
1002345WT400
1002345WT600
Add MP to the part number for mechanically polished fittings, e.g., 1002345WT100MP. All elbows have an industry standard radius of 1.5 times the OD.
* Tangents are welded on.
HPS Series 23
www.mksinst.com
Mech.
Polish
4-Way Cross
in.
A
OD
OD
Wall
Thickness
Part Number
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.065
.083
0.75
1.88
1.88
2.25
3.00
3.00
3.25
3.88
5.00
100234X050
100234X075
100234X100
100234X150
100234X200
100234X250
100234X300
100234X400
100234X600
Price
Tee
in.
A
OD
OD
Wall
Thickness
Part Number
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.065
.065
.065
.065
.065
.065
.065
.065
.083
0.75
1.88
1.88
2.25
3.00
3.00
3.25
3.88
5.00
10023T050
10023T075
10023T100
10023T150
10023T200
10023T250
10023T300
10023T400
10023T600
Reducing Tee
Price
in.
Wall Thickness
OD
W2
OD
W1
1.00 X 0.50
1.00 X 0.75
1.50 X 0.50
1.50 X 0.75
1.50 X 1.00
2.00 X 0.50
2.00 X 0.75
2.00 X 1.00
2.00 X 1.50
2.50 X 0.75
2.50 X 1.50
2.50 X 2.00
3.00 X 0.75
3.00 X 1.50
3.00 X 2.00
3.00 X 2.50
4.00 X 0.75
4.00 X 1.50
4.00 X 2.00
6.00 X 0.75
6.00 X 1.50
6.00 x 4.00
W1
W2
.065
.065
.065
.065
.065
.065
.065
.065
065
.065
.065
.065
.065
.065
.065
.065
065
.065
.065
.083
.083
.083
.065
.065
.065
.065
.065
.065
.065
.065
065
.065
.065
.065
.065
.065
.065
.065
065
.065
.065
.065
.065
.083
Part Number
1.88
1.88
2.25
2.25
2.25
3.00
3.00
3.00
3.00
3.00
3.00
3.00
3.25
3.25
3.25
3.25
3.88
3.88
3.88
5.00
5.00
5.00
1.00
2.00
1.25
2.25
2.25
1.50
2.50
2.50
2.50
2.75
2.75
3.25
3.00
3.00
3.50
3.25
3.50
3.50
3.50
4.50
4.50
4.88
10023100RT050
10023100RT075
10023150RT050
10023150RT075
10023150RT100
10023200RT050
10023200RT075
10023200RT100
10023200RT150
10023250RT075
10023250RT150
10023250RT200
10023300RT075
10023300RT150
10023300RT200
10023300RT250
10023400RT075
10023400RT150
10023400RT200
10023600RT075
10023600RT150
10023600RT400
Price
HPS Series 23
www.mksinst.com
Concentric Reducer
in.
OD
OD
OD
Wall
Thickness
Part Number
1.00 X 0.75
1.50 X 0.75
1.50 X 1.00
2.00 X 1.00
2.00 X 1.50
2.50 X 1.50
2.50 X 2.00
3.00 X 1.50
3.00 X 2.00
3.00 X 2.50
4.00 X 2.00
4.00 X 2.50
4.00 X 3.00
6.00 X 3.00
6.00 X 4.00
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.083
1.37
2.38
2.38
2.38
2.38
2.38
2.38
3.63
3.63
3.63
3.63
3.63
3.63
9.00
9.00
10023100CR075
10023150CR075
10023150CR100
10023200CR100
10023200CR150
10023250CR150
10023250CR200
10023300CR150
10023300CR200
10023300CR250
10023400CR200
10023400CR250
10023400CR300
10023600CR300
10023600CR400
End Cap
Price
in.
OD
OD
Wall
Thickness
Part Number
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
.065
.065
.065
.065
.065
.065
.065
.065
0.25
0.31
0.38
0.50
0.75
1.00
1.25
1.50
10023C050
10023C075
10023C100
10023C150
10023C200
10023C250
10023C300
10023C400
Tubing
Price
in.
OD
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
4.00
6.00
8.00
10.00
OD
* Lengths are cut to customer specifications. Add a $50.00 per cut charge to the price.
10 foot lengths are available with no cutting charge.
**Add MP to the part number for mechanically polished tubing, e.g., 100314300MP.
100314300
100314301
100314303
100314305
100314306
100764506
100764508
100764510
100764511
100764516
100764520
100764525
in.
OD
1.50
2.00
3.00
OD
HPS Series 23
www.mksinst.com
Wall
Coupling
Thickness
Size
.065
.065
.065
50/30
75/50
102/75
Part Number
2.01
2.51
2.02
2.20
3.20
4.40
100003446
100003448
100003929
Price
OD
1.50
2.00
3.00
OD
in.
Wall
Coupling O-Ring
Thickness
Size
Size
.065
.065
.065
50/30
75/50
102/75
2-224
2-232
2-240
Part Number
2.01
2.51
2.02
2.20
3.20
4.40
100003447
100003449
100003930
Price
in.
Wall Thickness
.065
OD
OD
Static Bend
Radius
Part Number
0.75
0.75
0.75
1.00
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.00
2.50
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
2.50
2.50
2.50
3.00
3.00
3.00
5.00
5.00
5.00
6.00
6.00
6.00
7.50
7.50
7.50
8.75
8.75
8.75
10.00
10.00
10.00
10.00
20.00
40.00
10.00
20.00
40.00
10.00
20.00
40.00
10.25
20.25
40.25
10.25
20.25
40.25
10.25
20.25
40.25
10.25
20.25
40.25
100006287
100006288
100006289
100006290
100006291
100006292
100006293
100006294
100006295
100006296
100006297
100006298
100006299
100006300
100006301
100006302
100006303
100006304
100006305
100006306
100006307
Price
in.
Wall Thickness
.065
OD
OD
Static Bend
Radius
Part Number
0.75
0.75
0.75
1.00
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.00
2.50
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
2.50
2.50
2.50
3.00
3.00
3.00
5.00
5.00
5.00
6.00
6.00
6.00
7.50
7.50
7.50
8.75
8.75
8.75
10.00
10.00
10.00
10.50
20.50
40.50
12.00
22.00
42.00
12.00
22.00
42.00
12.25
22.25
42.25
13.25
23.25
43.25
13.25
23.25
43.25
13.45
23.45
43.45
100006313
100006314
100006315
100006316
100006317
100006318
100006319
100006320
100006321
100006322
100006323
100006324
100006325
100006326
100006327
100006328
100006329
100006330
100006331
100006332
100006333
Price
HPS Series 23
www.mksinst.com
Numerical Listing
100003446
10023150RT050
100003447
10023150RT075
100003448
10023150RT100
100003449
100003929
10023200CR100
100003930
10023200CR150
100006287
10023200RT050
100006288
10023200RT075
100006289
10023200RT100
100006290
10023200RT150
100006291
100006292
10023250CR150
100006293
10023250CR200
100006294
100006295
10023250RT075
100006296
10023250RT150
100006297
10023250RT200
100006298
100006299
10023300CR150
100006300
10023300CR200
100006301
10023300CR250
100006302
100006303
10023300RT075
100006304
10023300RT150
100006305
10023300RT200
100006306
10023300RT250
100006307
100006313
10023400CR250
100006314
10023400CR300
100006315
100006316
10023400RT075
100006317
10023400RT150
100006318
10023400RT200
100006319
100006320
1002345050
45 Elbow, 0.50"
100006321
1002345050MP
100006322
1002345075
45 Elbow, 0.75"
100006323
1002345075MP
100006324
1002345100
45 Elbow, 1.00"
100006325
1002345100MP
100006326
1002345150
45 Elbow, 1.50"
100006327
1002345150MP
100006328
1002345200
45 Elbow, 2.00"
100006329
1002345200MP
100006330
1002345250
45 Elbow, 2.50"
100006331
1002345250MP
100006332
1002345300
45 Elbow, 3.00"
100006333
1002345300MP
1002345400
45 Elbow, 4.00"
10023100CR075
1002345400MP
1002345401
45 Elbow, 4.00"
10023100RT050
1002345401MP
10023100RT075
1002345600
45 Elbow, 6.00"
1002345600MP
10023150CR075
10023150CR100
HPS Series 23
www.mksinst.com
1002345WT075
1002390WT100MP
1002345WT075MP
1002390WT150
1002345WT100
1002390WT150MP
1002345WT100MP
1002390WT200
1002345WT150
1002390WT200MP
1002345WT150MP
1002390WT250
1002345WT200
1002390WT250MP
1002345WT200MP
1002390WT300
1002345WT250
1002390WT300MP
1002345WT250MP
1002390WT400
1002345WT300
1002390WT400MP
1002345WT300MP
1002390WT401
1002345WT400
1002390WT401MP
1002345WT400MP
1002390WT600
1002345WT401
1002390WT600MP
1002345WT401MP
1002345WT600
10023C050
1002345WT600MP
10023C075
10023C100
100234X050
10023C150
100234X075
10023C200
100234X100
10023C250
100234X150
10023C300
100234X200
10023C400
100234X250
100234X300
10023T050
Tee, 0.50"
100234X400
10023T075
Tee, 0.75"
100234X600
10023T100
Tee, 1.00"
10023T150
Tee, 1.50"
10023600CR300
10023T200
Tee, 2.00"
10023600CR400
10023T250
Tee, 2.50"
10023T300
Tee, 3.00"
10023600RT075
10023T400
Tee, 4.00"
10023600RT150
10023T600
Tee, 6.00"
10023600RT400
1002390050
90 Elbow, 0.50"
100314300MP
1002390050MP
100314301
1002390075
90 Elbow, 0.75"
100314301MP
1002390075MP
100314303
1002390100
90 Elbow, 1.00"
100314303MP
1002390100MP
100314305
1002390150
90 Elbow, 1.50"
100314305MP
1002390150MP
100314306
1002390200
90 Elbow, 2.00"
100314306MP
1002390200MP
100764506
1002390250
90 Elbow, 2.50"
100764506MP
1002390250MP
100764508
1002390300
90 Elbow, 3.00"
100764508MP
1002390300MP
100764510
1002390400
90 Elbow, 4.00"
100764510MP
1002390400MP
100764511
1002390401
90 Elbow, 4.00"
100764511MP
1002390401MP
100764516
1002390600
90 Elbow, 6.00"
100764516MP
1002390600MP
100764520
100764520MP
1002390WT075
100764525
1002390WT075MP
100764525MP
1002390WT100
HPS Series 23
www.mksinst.com
(303) 449.9861
(800) 345.1967 (in USA)