COMSOL Notes - Akshansh
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Akshansh ChaudharyCOMSOL Notes - Akshansh
Uploaded by
Akshansh ChaudharyCOMSOL Multiphysics Notes, First Edition
Copyright 2013 Akshansh
ALL RIGHTS RESERVED.
Presented by:
Akshansh Chaudhary
Graduate of BITS Pilani, Dubai Campus
Batch of 2011
Course content by:
Dr. Anand Kumar
Then Faculty, BITS Pilani, Dubai Campus
Layout design by:
AC Creations 2013
The course content was prepared during Spring, 2014.
More content available at: www.Akshansh.weebly.com
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Point Load
Starting Interface -
Idea:
Starting with cantelever
Design a beam
Leave the second side free of the beam
COMSOL: MEMS Notes Akshansh Chaudhary
COMSOL: MEMS Notes Akshansh Chaudhary
Next, select the measurement unit and other dimensions as given
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Now, rotate the model and select one of the sides of length 5. Next, click on + button on the toolbox
at the side.
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COMSOL: MEMS Notes Akshansh Chaudhary
This makes the diagram colored
A strip tells the amount of stress and the details on that.
Which figure has the max stress - we get to know from the figure
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We find that the free end has maximum displacement
COMSOL: MEMS Notes Akshansh Chaudhary
Note:
We can know the properties of material we are using. Here we are using copper. So, click on it to see
its properties.
Save the file.
COMSOL: MEMS Notes Akshansh Chaudhary
Boundary LOAD
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The total displacement is, as shown in the diagram.
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By observation, it is lesser, as compared to point load.
Save the file again.
COMSOL: MEMS Notes Akshansh Chaudhary
Changes
Now,
Change 1
Changing the values in geometry and seeing the deflection in that case.
COMSOL: MEMS Notes Akshansh Chaudhary
Change 2
Now, change the thickness (height) of the model and for small values, check which is the smallest
value, giving the maximum deflection and is able to tolerate as well.
COMSOL: MEMS Notes Akshansh Chaudhary
EXTRA
Displaying moving details of how the figure was getting modified
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Joule Heating Method for Actuator
We want to see how the temperature varies in our work piece when it is made as per the
specifications.
Idea :
S1) Make a 3d Figure. For that, make a workplane under geometry tab. Then, add rectangles as per
the dimension. Next, go to Work plane option and click on Extrude. That makes it 3D.
S2) Add Material. Go to Material library and select Poly-Si.
MEMS>Semiconductor>Poly-Si
S3) Select Joule Heating in Physics.
Model 1 - Right Click> Add Physics
Heat Transfer> Electromagnetic Heating> Joule Heating (jh)
S4) Now, start adding the properties to the work piece.
S5) Do meshing of the object
S6) Compute
Objective - To model Joule heating of a micro actuator using COMSOL Joule heating module
COMSOL: MEMS Notes Akshansh Chaudhary
COMSOL: MEMS Notes Akshansh Chaudhary
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COMSOL: MEMS Notes Akshansh Chaudhary
Then, go to Union and click Buld all.
Next, Extrude the 2D image we made.
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COMSOL: MEMS Notes Akshansh Chaudhary
Analysis of Circular diaphragm in micro
pressure sensor and find the deflection
We have to make a disk (or a thin cylinder)
Now, apply pressure at its top and analyze the figure we get.
Initial steps - 3D > Solid Mechanics (solid) > Stationary
Select cylinder in Geometry and take the following dimensions -
Now,
Select the material Poly-Si
Next,
Click on Solid Mechanics.
Right click and add Fixed Constraint.
COMSOL: MEMS Notes Akshansh Chaudhary
Now, once the base is set, we need to add load over the top or bottom.
For that use Boundary load option.
COMSOL: MEMS Notes Akshansh Chaudhary
Next, go to Mesh and Build All.
Finally, Study 1 > Compute.
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Now, to see the total displacement,
Stress> Surface
Then, Click on Plot.
COMSOL: MEMS Notes Akshansh Chaudhary
Similarly, the dimensions of the disk can be changed and we can see for different values.
Done!
COMSOL: MEMS Notes Akshansh Chaudhary
Making a Capacitor
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COMSOL: MEMS Notes Akshansh Chaudhary
Microgripper
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Note: Force also has to be given only at the top and bottom. Not in the middle.
COMSOL: MEMS Notes Akshansh Chaudhary
COMSOL: MEMS Notes Akshansh Chaudhary
In Force calculation, the force has to be added in the specified part:
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MICROGRIPPER: Scale Changing
Micro gripper was used in Micro scale.
Now, change it to different scales and measure the difference in deflection.
We see that the only change needs to be done in the scaling factor.
The scaling needs to be increased to see the same effect of gripping.
Original Scale : um
Case 1:
Changing scale to mm
Case 2:
Changing the scale to cm
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Case 3:
Changing scale to inch
Note: Displacement is independent of scaling.
OBSERVATION 1:
Constant:
Material - Si (c )
Table 1: Shows the amount of scaling that needs to be done in order to get the gripping action at the
corner.
Dimension Scaling
Displacement (m)
Mm
4e12
6.0617*10^-13
Cm
4e13
6.0614*10^-14
In
9e13
2.3865*10^-14
OBSERVATION 2:
Now, keeping um as standard displacement, changing the values of voltage to get the same
displacement at other scales.
Constant:
Material: Silicon
Reference - um
o Scaling - 4e9
o Displacement - 6.0617*10^-10 m
COMSOL: MEMS Notes Akshansh Chaudhary
Table 2: Shows the value of the voltage for each scale, giving the same displacement as in
micrometer scale.
Dimension Displacement (m) Voltage value (V)
Mm
Cm
In
6.0617*10^-13
6.0617*10^-11
50
1.3639*10^-10
75
6.053*10^-10
158
6.0614*10^-14
6.0617*10^-12
50
5.455*10^-11
150
6.0617*10^-10
500
2.3865*10^-14
9.546*10^-12
100
8.5914*10^-11
300
6.03333*10^-10
795
OBSERVATION 3:
Now changing the material of the micro gripper and observing the displacement.
Constant:
Dimension: um
Middle layer: Air
Table 3: Shows the displacement of the micro gripper with different materials.
Material
Displacement (m)
Si ( c )
6.0617*10^-10
Poly-Si
5.1787*10^-10
Glass (quartz)
1.0616*10^-9
GaAs
1.189*10^-9
SiO2
1.1665*10^-9
COMSOL: MEMS Notes Akshansh Chaudhary
Scaling Problem: We have a cylinder (tube) and fluid flowing through it.
Now, when the dimensions of the tube is changed, note the pressure drop.
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Surface option. (instead of Solid)
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Note: In case you get the error saying, "Error: Maximum number of Newtonian Iterations
reached" change the mesh amount from NORMAL TO EXTREMEMLY COARSE.
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Radius is 5um
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On changing the dimensions to 10um and 20um, we have this pressure.
(it decreases, as expected)
Radius is doubled (10um now)
So, by formula, Pressure is inversely proportional to the square of radius.
So, as radius is doubled, pressure is becoming 1/4 times.
COMSOL: MEMS Notes Akshansh Chaudhary
COMSOL: MEMS Notes Akshansh Chaudhary
MICRO MIXER
Model - 3D
Physics - Laminar Flow
Property - Stationary
Make the model.
