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13 e Flyer Microstructured Surfaces Web

Micro- and nanostructured surfaces can fulfill a variety of optical and non-optical functions. They can enhance light trapping in solar cells, light outcoupling in LEDs, and control light direction in displays, daylighting, and lighting. The Fraunhofer Institute for Solar Energy Systems develops micro- and nanostructures through modeling, lithography, replication, and characterization. They assist customers in optimizing structures for applications and new functionalities.

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24 views

13 e Flyer Microstructured Surfaces Web

Micro- and nanostructured surfaces can fulfill a variety of optical and non-optical functions. They can enhance light trapping in solar cells, light outcoupling in LEDs, and control light direction in displays, daylighting, and lighting. The Fraunhofer Institute for Solar Energy Systems develops micro- and nanostructures through modeling, lithography, replication, and characterization. They assist customers in optimizing structures for applications and new functionalities.

Uploaded by

marina890416
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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F R AUNHOF E R I NS T I T UT E F OR S OL AR E NE R GY S YS T E MS I S E

MICRO- AND NANO-


STRUCTURED SURFACES
Micro- and nanostructured surfaces can
fulfll a variety of different functions. An
important application feld is photon
management in optical systems.
In solar cells, micro or nano scale structures
lead to effcient light trapping, enhanced
incoupling and improved radiation
conversion. In light sources they enhance
light outcoupling and homogenity. In
daylighting and artifcial lighting elements
they defect light in the desired direction.
In display applications they are used for
antirefection, polarization management,
light control or defned scattering.
Micro- and nanostructures also play a role
in modifying non-optical properties, such
as the wettability, adhesion or the surface
friction coeffcient.
The advantage of microstructured surfaces
is that they can be replicated inexpensively
in mass production by processes such as
hot embossing, injection molding, casting
or nanoimprint lithography. For example,
many kilometers of microstructured flms
can be manufactured by means of UVrepli-
cation in a roller embossing process.
The Fraunhofer Institute for Solar Energy
Systems ISE advances the fundamental
understanding of the optics of micro-
structured components, modeling, design,
production as well as replication and
characterization of large-area micro- and
nanostructures.
With our wide-ranging expertise, we
assist customers to optimally usemicro-
and nanostructures in optical and non-
optical applications and to exploit new
functionalities.
1 Near feld calculation of a micro
prism array. The color scheme shows the
intensity distribution, the white arrows
depict the Poynting vectors.
2 In our interference lithography
laboratory areas of up to 1.2 x 1.2 m
can be structured homogeneously.
3 SEM image of a hexagonal grating
fabricated via interference lithography.
This grating has a period of 8 m and a
height of 9 m.
Fraunhofer Institute for
Solar Energy Systems
Heidenhofstrasse 2
79110 Freiburg
Germany
Phone +49 761 4588-0
Fax +49 761 4588-9000
www.ise.fraunhofer.de
Dr Benedikt Blsi
Phone +49 761 4588-5995
[email protected]
Dr Hubert Hauser
Phone +49 761 4588-5992
[email protected]
June 2013
1 2 3
Replication
Microstructures are of particular interest
when they can be produced cost effectively
and in large quantities using micro-
replication processes. We evaluate various
replication techniques, each suitable for
distinct applications.
One option is electroplating to fabricate
multiple metal copies of one master
structure (so-called shims). These shims can
be used e. g. in hot embossing or injection
molding processes. They also can be used
to pattern UV-curing materials, which is
even possible in roll-to-roll processes.
Direct replications from a photoresist or
a metallic tool are possible in fexible,
transparent or opaque materials (soft
embossing) by using silicone materials.
Structures made from such resilient mate-
rials enable special surface functionalities
(e. g. the gecko effect) or can be used for
further processing steps.
In nanoimprint lithography (NIL)high-reso-
lution etching masks can bestructured in a
high-throughput process. We developed a
roller-NIL tool that allows the patterning of
such etching masks on uneven, stiff, brittle
and opaque substrates (e. g. multicrystal-
line silicon) on large areas in a continuous
process.
Modeling and Design

We make use of various modeling tools
covering the entire range of optical effects
from wave to ray optics. The objectives are
to understand the optical characteristics
of micro- and nanostructured materials
and to design components or systems with
customized functionalities. To this end we
provide comprehensive knowledge on the
potentials and limitations of the different
modeling approaches, the selection of
suitable tools and optimized combinations
of simulation methods.
Interference Lithography
In interference lithography, ultraviolet laser
beams are split, expanded and superim-
posed. A pattern of light and dark areas,
the so-called interferogram, is formed in
the superposition plane. The interferogram
is used to expose photoresist, which
is selectively etched in the subsequent
development step. A surface relief structure
results.
With interference lithography we are capa-
ble of producing customized, seamless mi-
cro- and nanostructures on areas of up to
1.2 x 1.2 m. Depending on requirements,
the structure details can be as small as
100nm or as large as 100 m. We provide
periodical or stochastical arrangements of
structures as well as parabolic, binary or
prismatic structure profles. In addition, we
can combine different structure geometries
and dimensions in one master structure.
4 Roller-NIL-setup for rigid substrates.
5 Metal nanoparticles produced by NIL
and lift off (mask not competely removed).
6 Imprinted silicon wafer.
5
Characterization
One important aspect of characterizing
micro- and nanostructures is measuring
their geometry. We provide different
measurement methods:
n atomic force microscopy (AFM)
n scanning electron microscopy (SEM)
n optical microscope
For optically functional surfaces itisimpor-
tant to characterize their optical behaviour.
Here a combination of different measure-
ment methods is required to ensure a
comprehensive evaluation of structured
samples. At Fraunhofer ISE we are able to
combine several methods:
n spectrometry
n photogoniometry
n spectral ellipsometry
Customized Structures for Clients
Clients beneft from more than ffteen years
of experience in developing customized
structures. Our services range from model-
ing of production processes and optical
functions through to the manufacture and
characterization of micro- and nanostruc-
tured surfaces. We can provide the whole
process chain or just one single part.
6 4

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