38 Quick Guide to Precision Measuring Instruments

Quick Guide to Precision Measuring Instruments

Surftest (Surface Roughness Testers)
JIS B 0601: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Terms, denitions, and surface texture parameters
JIS B 0632: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Metrological characterization of phase-correct lters
JIS B 0633: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Rules and procedures for the assessment of surface texture
JIS B 0651: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Nominal characteristics of contact (stylus) instruments
Feed device
Column
Probe (pickup)
Probe
Stylus
Workpiece
Fixture
Base
Measuring loop
Transducer
Measure-
ment
prole
Stylus tip
Reference
line
Reference
guide skid
Nominal
texture
suppression
Primary
prole
AD
converter
Prole
lter
Parameter
evaluation
according to
JIS B 0601
Amplier
Feed
device
Workpiece
surface
Measure-
ment
loop
Appea-
rance
Drive Unit
Z-axis Signal Transfer Unit
Input/Output Input/Output
Quantized
measure-
ment
prole
Quantized
measure-
ment
prole
A prole lter is a phase-correct lter without phase delay (cause of prole
distortion dependent on wavelength).
The weight function of a phase-correct lter shows a normal (Gaussian)
distribution in which the amplitude transmission is 50% at the cutoff
wavelength.
Nominal Characteristics of Contact (Stylus) Instruments
Data Processing Flow
Surface Proles
Metrological Characterization
of Phase Correct Filters
Surface prole
on the real surface
Measured
prole
Quantized
prole
Primary prole
Primary prole
parameters
Roughness prole Waviness prole
Roughness
prole parameters
Waviness
prole parameters
Low-pass lter
of cutoff value s
High-pass lter
of cutoff value c
Band-pass lter that passes wavelengths
between cutoff values c and f
Measurement
AD conversion
Suppresses irrelevant geometry of the surface such as
inclination of a at feature and curvature of a cylindrical
feature using the least squares method.
Denition: Prole that results from the
intersection of the real surface and
a plane rectangular to it.
Denition: Locus of the center of the stylus tip
that traces the workpiece surface.
Denition: Data obtained by quantizing
the measured prole.
JIS B 0651: 2001 (ISO 3274: 1996)
JIS B 0632: 2001
(ISO 11562: 1996)
60 60 60
90 90 90
R
2

m
R
5

m
R
1
0

m
R
2

m
R
5

m
R
1
0

m
Stylus Shape
A typical shape for a stylus end is conical with a spherical tip.
Tip radius: rtip = 2 m, 5 m or 10 m
Taper angle of cone: 60, 90
In typical surface roughness testers, the taper angle of the stylus end is 60 unless
otherwise specied.
Static Measuring Force
Measuring force at the mean position of a stylus: 0.75mN
Ratio of measuring force variations: 0N/m
Standard characteristic value: Static measuring force at the mean position of
a stylus
Note 1: The maximum value of static measuring force at the average position of a stylus is to be
4.0mN for a special structured probe including a replaceable stylus.
Nominal radius of
curvature of stylus tip:
m
Static measuring force at
the mean position of
stylus: mN
Toleranced ratio of static
measuring force
variations: mN/m
2
5
10
0.75
0.75 (4.0)
Note 1
0.035
0.2
Maximum sampling length
mm
c
mm
s
m
c/s
Relationship between Cutoff Value and
Stylus Tip Radius
The following table lists the relationship between the roughness prole cutoff
value c, stylus tip radius rtip, and cutoff ratio c/s.
Note 1: For a surface with Ra>0.5m or Rz>3m, a signicant error will not usually
occur in a measurement even if rtip= 5m.
Note 2: If a cutoff value ls is 2.5m or 8m, attenuation of the signal due to the mechanical ltering effect
of a stylus with the recommended tip radius appears outside the roughness prole pass band. Therefore,
a small error in stylus tip radius or shape does not affect parameter values calculated from measurements.
If a specic cutoff ratio is required, the ratio must be dened.
Maximum rtip
m
Note 1
Note 2
Note 2
0.08
0.25
0.8
2.5
8
2.5
2.5
2.5
8
25
0.5
0.5
0.5
1.5
5
30
100
300
300
300
2
2
2
5
10
JIS B 0601: 2001 (ISO 4287: 1997)
50
100
s c f
A
m
p
lit
u
d
e
t
r
a
n
s
m
is
s
io
n
%
Wavelength
Roughness prole Waviness prole
Primary Prole
Prole obtained from the measured prole by applying a low-pass lter
with cutoff value s.
Roughness Prole
Prole obtained from the primary prole by suppressing the longer
wavelength components using a high-pass lter of cutoff value c.
Waviness Prole
Prole obtained by applying a band-pass lter to the primary prole to
remove the longer wavelengths above f and the shorter
wavelengths below c.
Denition of Parameters
R
p
Sampling length
Amplitude Parameters (peak and valley)
Maximum peak height of the primary prole Pp
Maximum peak height of the roughness prole Rp
Maximum peak height of the waviness prole Wp
Largest prole peak height Zp within a sampling length
JIS B 0601 : 2001
(ISO 4287 : 1997)
Sampling length
R
v
Maximum valley depth of the primary prole Pv
Maximum valley depth of the roughness prole Rv
Maximum valley depth of the waviness prole Wv
Largest prole valley depth Zv within a sampling length
R
p
Sampling length
R
z
R
v
Maximum height of the primary prole Pz
Maximum height of the roughness prole Rz
Maximum height of the waviness prole Wz
Sum of height of the largest prole peak height Zp and the
largest prole valley depth Zv within a sampling length
In Old JIS and ISO 4287-1: 1984, Rz was used to indicate the
ten point height of irregularities. Care must be taken because
differences between results obtained according to the existing and
old standards are not always negligibly small. (Be sure to check whether the
drawing instructions conform to existing or old standards.)
Mean height of the primary prole elements Pc
Mean height of the roughness prole elements Rc
Mean height of the waviness prole elements Wc
Mean value of the prole element heights Zt within a sampling
length
m
m
Pc, Rc, Wc = Zt
i
i = 1
1
Sampling length
Z
t
1
Z
t
2Z
t
3
Z
t
4
Z
t
5
Z
t
6
Total height of the primary prole Pt
Total height of the roughness prole Rt
Total height of the waviness prole Wt
Sum of the height of the largest prole peak height Zp and the
largest prole valley depth Zv within the evaluation length
Evaluation length
Sampling
length
R
t
R
z
R
z
R
z

Primary prole Primary prole

39 Quick Guide to Precision Measuring Instruments
JIS B 0601: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Terms, denitions, and surface texture parameters
JIS B 0632: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Metrological characterization of phase-correct lters
JIS B 0633: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Rules and procedures for the assessment of surface texture
JIS B 0651: 2001 Geometric Product Specications (GPS) Surface Texture: Prole method Nominal characteristics of contact (stylus) instruments
m
m
PSm, RSm, WSm = X
Si
i = 1
1
Amplitude Parameters (average of ordinates)
Arithmetical mean deviation of the primary prole Pa
Arithmetical mean deviation of the roughness prole Ra
Arithmetical mean deviation of the waviness prole Wa
Arithmetic mean of the absolute ordinate values Z(x) within a
sampling length
l
l
Pa, Ra, Wa = Z(x) dx
0
1
ln
Pmr(c), Rmr(c), Wmr(c) =
Ml(c)
Ra
75
= Z(x) dx
ln
ln
0
1
Rz
JIS
=
5
Zp
1
+Zp
2
+Zp
3
+Zp
4
+Zp
5
+ Zv
1
+Zv
2
+Zv
3
+Zv
4
+Zv
5
with l as lp, lr, or lw according to the case.
with l as lp, lr, or lw according to the case.
Root mean square deviation of the primary prole Pq
Root mean square deviation of the roughness prole Rq
Root mean square deviation of the waviness prole Wq
Root mean square value of the ordinate values Z(x) within a
sampling length
Skewness of the primary prole Psk
Skewness of the roughness prole Rsk
Skewness of the waviness prole Wsk
Quotient of the mean cube value of the ordinate values Z(x) and
the cube of Pq, Rq, or Wq respectively, within a sampling length
The above equation denes Rsk. Psk and Wsk are dened in a similar
manner. Psk, Rsk, and Wsk are measures of the asymmetry of the probability
density function of the ordinate values.
Kurtosis of the primary prole Pku
Kurtosis of the roughness prole Rku
Kurtosis of the waviness prole Wku
Quotient of the mean quartic value of the ordinate values Z(x)
and the fourth power of Pq, Rq, or Wq respectively, within a
sampling length
The above equation denes Rku. Pku and Wku are dened in a similar
manner. Pku, Rku, and Wku are measures of the sharpness of the probability
density function of the ordinate values.
Spacing Parameters
Mean width of the primary prole elements PSm
Mean width of the roughness prole elements RSm
Mean width of the waviness prole elements WSm
Mean value of the prole element widths Xs within a sampling
length
Sampling length
Xs2 Xs1 Xs3 Xs4 Xs5 Xs6
Hybrid Parameters
Root mean square slope of the primary prole Pq
Root mean square slope of the roughness prole Rq
Root mean square slope of the waviness prole Wq
Root mean square value of the ordinate slopes dZ/dX within a
sampling length
dZ (x)
dx
dZ (x)
dx
dZ (x)
dx
dZ (x)
dx
dZ (x)
dx
l
l
Pq, Rq, Wq = Z
2
(x)dx
0
1
Rq
3
lr
Rsk = Z
3
(x)dx
0
1
lr
1
Rq
4
lr
Rku = Z
4
(x)dx
0
1
lr
1
Curves, Probability Density Function,
and Related Parameters
Material ratio curve of the prole (Abbott-Firestone curve)
Curve representing the material ratio of the prole as a function of
section level c
Sampling length
0 20 40 60 100
Rmr(c),%
Mean Line
c
Material ratio of the primary prole Pmr(c)
Material ratio of the roughness prole Rmr(c)
Material ratio of the waviness prole Wmr(c)
Ratio of the material length of the prole elements Ml(c) at a
given level c to the evaluation length
Section height difference of the primary prole Pdc
Section height difference of the roughness prole Rdc
Section height difference of the waviness prole Wdc
Vertical distance between two section levels of a given material
ratio
0 10 20 30 40 50 60 70 80 90 100
Rmr0 Rmr
c1
c0
R

c
Rc = c(Rmr1) c(Rmr2); Rmr1<Rmr2
Relative material ratio of the primary prole Pmr
Relative material ratio of the roughness prole Rmr
Relative material ratio of the waviness prole Wmr
Material ratio determined at a prole section level Rc (or Pc or
Wc), related to the reference section level c0
Mean line
Evaluation length Amplitude density
Pmr, Rmr, Wmr = Pmr(c1), Rmr(c1), Wmr(c1)
where c1 = c0 Rc(or Pc or Wc)
c0 = c(Pm0, Rmr0, Wmr0)
Probability density function
(prole height amplitude distribution curve)
Sample probability density function of the ordinate Z(x) within the
evaluation length
JIS Specic Parameters
Ten-point height of irregularities, Rz
JIS
Sum of the absolute mean height of the ve highest prole peaks
and the absolute mean depth of ve deepest prole valleys,
measured from the mean line within the sampling length of a
roughness prole. This prole is obtained from the primary prole
using a phase-correct band-pass lter with cutoff values of lc
and ls.
Z
p
3
Z
p
2
Z
p
4
Z
p
5Z
p
1
Sampling length
Z
v
3
Z
v
1Z
v
2
Z
v
5
Z
v
4
Symbol
RzJIS82
RzJIS94
Used prole
Surface prole as measured
Roughness prole derived from the primary prole using
a phase-correct high-pass lter
Arithmetic mean deviation of the prole Ra
75
Arithmetic mean of the absolute values of the prole deviations
from the mean line within the sampling length of the roughness
prole (75%). This prole is obtained from a measurement prole
using an analog high-pass lter with an attenuation factor of
12db/oct and a cutoff value of c.

Sampling Length for Surface

Roughness Parameters JIS B 0633: 2001 (ISO 4288: 1996)
Procedure for determining a sampling
length if it is not specied
Estimate Ra, Rz, Rz1max, or RSm according
to recorded waveforms,visual inspection, etc.
No
No
No
Yes
Yes
Yes
Has a shorter sampling
length been tried?
Fig.1 Procedure for determining the sampling length of an aperiodic prole
if it is not specied
Does the measured
value meet the condition
of Table 3?
Change the sampling
length so as to
meet the condition
of Table 3
Fig.2 Procedure for determining the sampling length of a periodic prole
if it is not specied
Estimate the sampling length from an
estimated value and Tables 1 to 3
Estimate RSm from
a measured roughness prole
Estimate the sampling length from
an estimated value and Table 3
Measure the parameter according
to the nal sampling length
Measure RSm according to the estimated
value of the sampling length
Measure Ra, Rz, Rzlmax, or RSm according to
the estimated value of the sampling length
Measure the parameter according
to the nal sampling length
Change to a shorter
sampling length
Change to a longer
or shorter sampling
length
Does each measured
value meet the parameter range
of Table 1, 2, or 3?
Does each measured
value meet the parameter range
of Table 1, 2, or 3?
Table 1: Sampling lengths for aperiodic prole roughness
parameters (Ra, Rq, Rsk, Rku, Rq), material ratio curve,
probability density function, and related parameters
Table 2: Sampling lengths for aperiodic prole roughness
parameters (Rz, Rv, Rp, Rc, Rt)
Table 3: Sampling lengths for measurement of periodic roughness
prole roughness parameters and periodic or aperiodic
prole parameter Rsm
1) Rz is used for measurement of Rz, Rv, Rp, Rc, and Rt.
2) Rzlmax only used for measurement of Rzlmax, Rvlmax, Rplmax, and Rclmax.
Sampling length lr
mm
0.08
0.25
0.8
2.5
8
Rz
Rz1max
m
(0.025) <Rz, Rz1max0.1
0.1 <Rz, Rz1max0.5
0.5) <Rz, Rz1max10
10 <Rz, Rz1max50
50 <Rz, Rz1max200
Evaluation length ln
mm
0.08
0.25
0.8
2.5
8
Sampling length lr
mm
0.08
0.25
0.8
2.5
8
Ra
m
(0.006) <Ra0.02
0.02 <Ra0.1
0.1) <Ra2
2 <Ra10
10 <Ra80
Evaluation length ln
mm
0.08
0.25
0.8
2.5
8
Sampling length lr
mm
0.08
0.25
0.8
2.5
8
Rsm
m
0.013 <Rsm0.04
0.04 <Rsm0.13
0.13) <Rsm0.4
0.4 <Rsm1.3
1.3 <Rsm4
Evaluation length ln
mm
0.08
0.25
0.8
2.5
8