Electron Energy-Loss Spectroscopy Calculation in Finite-Difference Time-Domain Package
Electron Energy-Loss Spectroscopy Calculation in Finite-Difference Time-Domain Package
pubs.acs.org/journal/apchd5
Department of Physics and Astronomy, Department of Electrical and Computer Engineering, and Laboratory for Nanophotonics,
Rice University, 6100 Main Street, Houston, Texas 77005, United States
S Supporting Information
*
simulations with optical excitations.11,2325 A recently published review article by Kociak and Stephan explicitly states
that, despite an implementation for cathodoluminescence (CL)
spectroscopy in FDTD2628 and the EELS implementation in
DGTD,22 there is a clear lack of time-domain numerical
methods for electron-beam spectroscopy calculations.6
In this paper, we propose a novel numerical procedure for
EELS simulations employing a reliable and widely used
commercial package: Lumerical FDTD Solutions.29 This
package implements a high performance 3D solver that oers
a user-friendly environment for solving Maxwells equations
using the FDTD method.30 We benchmark our method by
direct comparison with results from the well-established BEM
method15 for three representative systems: (i) isolated
nanospheres, (ii) nanosphere dimers, and (iii) nanodisks
supported by a substrate. In the particular case of nonpenetrating trajectories for nanospheres, we also compare our
method with analytical results from Mie theory.9,31,32 Finally, in
order to demonstrate the power of this implementation, we
perform EELS calculations for a more complex geometry
consisting of a supported bowtie antenna where experimental
results are available.
METHOD
The theoretical formalism for EELS simulations has been
extensively discussed in the literature (cf. refs 1, 9, and
references therein). The physics of EELS can be understood as
follows: the electric eld produced by an electron moving with
constant velocity v polarizes the nanostructure placed in the
Received: October 30, 2014
Published: February 16, 2015
369
DOI: 10.1021/ph500408e
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Figure 1. Description of the geometry employed to calculate the electron energy-loss spectrum. (a) Schematics showing the electric eld of an
electron moving with velocity v along a straight-line trajectory separated from a metallic nanostructure by the impact parameter b. (b, c) Geometry
0
0
used to calculate the induced electric eld Eind
z (z,) = Ez(z,) Ez (z,) for a nanostructure. Here Ez and Ez represent the z-component of the
electric eld generated by an electric dipole p(z,) at position z in presence and in absence of the metallic nano-object, respectively. (d) FDTD
simulation setup showing (i) the FDTD simulation domain with PML boundary conditions, (ii) the nanostructure geometry, (iii) the electric dipole
source, (iv) the 1D monitor used to record the electric eld along the electron path, and (v) the override meshes used to improve the discretization
for the nanostructure and the electron trajectory.
2
1
+ (r, ) 2 G(r, r , ) = 2 (r r)I
c
c
vEind[re(t ), t ]dt = 0
EELS()d
EELS() =
+ bulk()
(3)
Here,
= z [G(z,z,) G (z,z,)]z , with
G0(r,r,) being the Green tensor for vacuum (to simplify
the notation we have omitted the lateral spatial coordinates x =
b and y = 0 in the arguments of the Green functions and related
quantities). In the derivation of this expression, we have also
used the reciprocity property of the Green tensor G(r,r,) =
GT(r,r,). Interestingly, Gind
zz (z,z,) can be obtained from the
z-component of the electric eld induced at position z, by an
electric dipole of amplitude p(z,) placed at z and oriented
along z-axis
(1)
ind
Gzz
(z,z,)
2 2 2
2
1 c qc /
e 2L
Im
ln
c 2/2
2
c
E[r(t ), ] = 4i
cos (z z)
ind
(z , z , )]dz dz
Im[ Gzz
4e 2
ind
(z , z, ) =
Gzz
ind
1 Ez (z , )
4 2 p(z, )
(z z)
e2
cos
E ind(z , )
dz dz
Im z
p(z, )
(4)
(2)
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ISOLATED NANOSTRUCTURE
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INTERACTING NANO-OBJECTS
Nanoparticle dimers have been extensively studied using
EELS.11,13,2224,37,38 For this reason, they constitute another
ideal system to benchmark our EELS-FDTD method. Here, we
study a dimer of closely spaced (i.e., strongly interacting) silver
nanospheres of diameter a = 160 nm placed in vacuum. The
gap size is xed to g = 5 nm, and we use the dielectric function
for silver tabulated by Palik39 in the BEM calculations and
MCMs t of the later in the FDTD calculations (Supporting
Information, S2). The other simulation parameters are the
same as for the gold nanosphere (cf. Supporting Information,
S3).
Figure 3 shows the results obtained with our EELS-FDTD
method (blue lines) for three dierent impact parameters: b =
372
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(3.5 eV) remains strong and the transverse bonding dipole (2.3
eV) is strengthened. For a penetrating electron trajectory, also
the bulk plasmon mode at 3.8 eV can be excited.11,24 However,
as we mentioned in the Method section we have chosen not to
include the bulk contribution. For the gap center trajectory
(lower spectra), the bonding dipolar dimer mode cannot be
excited and the spectrum is dominated by the antibonding
dipolar LSPR.11,23,24 Incidentally, due to retardation eects the
position of this mode is slightly dierent for the dierent
excitation congurations. This spectral shift has been observed
experimentally for dimers of large nanoparticles.24
SUPPORTED NANOSTRUCTURES
EELS experiments require very thin nonabsorbing substrates to
minimize energy losses. Typical EELS substrates are made of
mica, silica (SiO2), silicon nitride (Si3N4, SiNx), or carbon (C),
and their thickness generally ranges from 5 to 50 nm. Even
though such thin substrates introduce a negligible EELS
background and are often considered to have a negligible eect
on the optical properties of the supported nanostructure (i.e.,
small spectral shift with respect to the free-standing
nanostructure), they can be crucial in some situations.41 For
this reason, we calculate the EELS spectra for gold nanodisks of
diameter a = 50 nm and height h = 15 nm placed on 30 nm
thick substrates of dierent dielectric permittivities: = 1 (freestanding); = 2 (SiO2);42,43 and = 4 (Si3N4).42,44 As in the
case of the isolated sphere, we use the gold dielectric function
tabulated by Johnson and Christy35 in the BEM calculations
and MCMs t of the later in the FDTD calculations
(Supporting Information, S2). The FDTD simulation parameters are the same as in previous cases (cf. Supporting
Information, S3), and the electron velocity is set to = 0.5c
(i.e., 80 keV). The results are shown in Figure 4 for FDTD
(blue lines) and BEM (red lines) for an impact parameter b =
27 nm (in close proximity to the nanodisk). As expected, the
dipolar LSPR (2.3 eV for = 1) red-shifts with increasing
permittivity of the substrate (1.97 eV for = 4). Interestingly, it
has to be noticed a change in the LSPR line shape for = 4.
This eect, along with the spectral shift clearly shows that even
Figure 5. EELS spectra for a gold bowtie antenna calculated with the
EELS-FDTD implementation. Each triangle has a lateral length a = 80
nm, height h = 15 nm, and gap g = 4 nm. The bowtie antenna is
supported by a 30 nm thick SiN substrate. A 2.5 nm chromium
adhesion layer is included. The electron velocity is taken equal to 0.5c
(i.e., 80 keV) in all cases. (a) EELS spectra for edge excitation with
four dierent impact parameters: 2 (blue), 5 (purple), 10 (red), and
15 nm (black; cf. inset). (b) EELS spectra for gap excitation with ve
dierent impact parameters: 0 (blue), 2 (purple), 5 (red), 10 (brown),
and 15 nm (black; cf. inset). (c) EELS maps calculated at (i) 1.27, (ii)
1.68, (iii) 2.17, and (iv) 2.39 eV.
display two LSPRs (i, iv) located at 1.27 and 2.39 eV,
respectively. In this case, dierent impact parameters produce
very dierent intensity ratios for these LSPRs. On the other
hand when electron trajectory crosses the center of the gap
(Figure 5b) the EELS spectrum displays two distinct LSPRs (ii,
iii) at 1.68 and 2.17 eV, respectively, with relative intensities
that are much less dependent on the impact parameter. When
displacing the electron trajectory o-axis, the LSPR at 2.17 eV
(iii) becomes weaker progressively, while the one at 1.68 eV
(ii) remains unchanged. All these results, along with the results
for a single triangular prism (Supporting Information, S8), are
in good agreement with the experimental observations by Yang
and co-workers.10,12 The small discrepancies, mainly in the line
widths, are related to the presence of a thicker Cr adhesion
layer in our calculations, which is known to introduce a
DOI: 10.1021/ph500408e
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Present Address
Notes
ACKNOWLEDGMENTS
The authors thank F. J. Garc a de Abajo for his insight and
stimulating discussions. This work was supported by the Robert
A. Welch Foundation under Grant C-1222, the Cyberinfrastructure for Computational Research funded by NSF under
Grant CNS-0821727, and by the Data Analysis and Visualization Cyberinfrastructure under NSF Grant OCI-0959097.
A.M. acknowledges support from the Welch Foundation under
the J. Evans Attwell-Welch Fellowship for Nanoscale Research,
administrated by the Richard E. Smalley Institute for Nanoscale
Science and Technology (Grant L-C-004).
CONCLUSIONS
We have presented a simple procedure to calculate the energy
loss probability of fast electrons interacting with metallic
nanostructures. Although this method can be implemented
with any Maxwells equation solver we have chosen here to
work with the commercial package Lumerical FDTD
Solutions29 due to the exibility of the FDTD method and
its user-friendly environment. Contrary to most of the wellestablished methods, we have shown that this implementation
can deal with both penetrating and nonpenetrating trajectories
and nanostructures of arbitrary geometries and morphologies,
including substrates and adhesion layers. We have benchmarked our EELS-FDTD implementation by comparing the
results with the well-established BEM method for dierent
representative nanostructures, such as nanospheres, nanoparticle dimers, and a nanodisk supported by a substrate.
Furthermore, we have applied this method to study the EELS
spectrum of a complex system consisting of a supported bowtie
antenna, and we have mapped the LSPR modes of the latter.
Our EELS-FDTD method provides a simple and convenient
approach for the calculation of EELS spectra and maps from
complex nanostructures of arbitrary shape and composition.
ASSOCIATED CONTENT
S Supporting Information
*
REFERENCES
AUTHOR INFORMATION
Corresponding Authors
*E-mail: [email protected].
*E-mail: [email protected].
*E-mail: [email protected].
374
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gold and silver dimers probed by EELS. J. Phys. Chem. C 2014, 118,
54785485.
(39) Palik, E. D., Ed. Handbook of Optical Constants of Solids;
Academic Press: New York, 1985; Vol. 1.
(40) Nordlander, P.; Oubre, C.; Prodan, E.; Li, K.; Stockman, M. I.
Plasmon hybridization in nanoparticle dimers. Nano Lett. 2004, 4,
899903.
(41) Knight, M. W.; Wu, Y. P.; Lassiter, J. B.; Nordlander, P.; Halas,
N. J. Substrates matter: Influence of an adjacent dielectric on an
individual plasmonic nanoparticle. Nano Lett. 2009, 9, 2188.
(42) Baak , T. Silicon oxynitride; a material for GRIN optics. Appl.
Opt. 1982, 21, 10691072.
(43) Gao, L.; Lemarchand, F.; Lequime, M. Refractive index
determination of SiO2 layer in the UV/vis/NIR range: Spectrophotometric reverse engineering on single and bilayer designs. J. Eur. Opt.
Soc. 2013, 8, 13010.
(44) Philipp, H. R. Optical properties of silicon nitride. J. Electrochem.
Soc. 1973, 120, 295300.
(45) Tanaka, M.; Saida, S.; Tsunashima, Y. Film properties of lowk
silicon nitride films formed by hexachlorodisilane and ammonia. J.
Electrochem. Soc. 2000, 147, 22842289.
(46) Vial, A.; Laroche, T. Description of dispersion properties of
metals by means of the critical points model and application to the
study of resonant structures using the FDTD method. J. Phys. D: Appl.
Phys. 2007, 40, 71527158.
(47) Zheng, Y. B.; Juluri, B. K.; Mao, X.; Walker, T. R.; Huang, T. J.
Systematic investigation of localized surface plasmon resonance of
long-range ordered Au nanodisk arrays. J. Appl. Phys. 2008, 103,
014308.
DOI: 10.1021/ph500408e
ACS Photonics 2015, 2, 369375
S1. Lumerical and Matlab scripts for postprocessing and EELS spectrum
computation
S2. Dielectric function of metals: Multicoefficient models in FDTD
S3. Convergence of the EELS spectra: FDTD Lumerical parameters
S4. Computational resource: EELS-FDTD vs BEM vs e-DDA
S5. Penetrating trajectory: Numerical error and workaround
S6. Convergence of the EELS spectra: Electron path meshing
S7. EELS spectra of a bowtie antenna: Substrate effect
S8. EELS spectra of a single gold triangular prism: Effect of the Cr layer
ECE Department
Current address: Department of Chemistry, Northwestern University, Evanston, IL, United States
S1
#
#
#
#
Run th e s c r i p t i n th e f o l d e r c o n t a i n i n g a l l th e s i m u l a t i o n f i l e s named
' s w e e p i i . f s p ' where i i i s th e d i p o l e p o s i t i o n l a b e l .
NB: 'E ' has to be r e p l a c e d by ' E 0 ' when p r o c e s s i n g th e background f i e l d
i n vacuum o r by ' E 0m ' f o r th e background f i e l d i n th e m e ta l .
5
6
7
8
9
## NUMERICAL PARAMETERS ##
N f r e q =100;
# T o ta l number o f f r e q u e n c y / e n e r g y p o i n t s
N mon=501;
# T o ta l number o f m o n i to r p o i n t s ( where E i s r e c o r d e d )
N dip =501;
# T o ta l number o f e l e c t r i c d i p o l e s
10
11
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23
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25
10
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%% NUMERICAL PARAMETERS %%
N f r e q =100;
N mon=501;
N dip =501;
z max=500e 9;
dz=2z max / ( N dip 1) ;
dz2 =2z max / ( N mon1) ;
%
%
%
%
%
%
T o ta l number o f f r e q u e n c y / e n e r g y p o i n t s
T o ta l number o f m o n i to r p o i n t s
T o ta l number o f e l e c t r i c d i p o l e s
2 z max=2z min i s th e m o n i to r l e n g t h [m]
D i s t a n c e between d i p o l e p o s i t i o n s [m]
D i s t a n c e between m o n i to r p o i n t s [m]
26
27
28
29
30
%% VECTOR INITIALIZATION %%
gamma=z e r o s ( N f r e q , 3 ) ;
% L o s s p r o b a b i l i t y o u tp u t v e c t o r [ eV , s , 1/eV ]
I=z e r o s ( N dip , N mon , N f r e q ) ;
% I n t e g r a n d : c o s [ w( zz ' ) / v ] Im [ E i n d /p ]
E i n d=z e r o s ( N dip , N mon , N f r e q ) ; % Im a g i n a r y p a r t o f th e i n d u c e d e l e c t r i c f i e l d [V/m]
S2
31
32
33
34
35
DD=1: N dip ;
MM=1:N mon ;
z d i p=z max+(DD1) dz ;
z mon=z max+(MM1) dz2 ;
% P o s i t i o n s o f th e e l e c t r i c d i p o l e s [m]
% P o s i t i o n s where th e e l e c t r i c f i e l d i s c a l c u l a t e d
[m]
36
37
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41
42
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44
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46
47
48
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50
51
52
...
53
54
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56
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58
59
60
f o r i i =1:1: N freq
% C a l c u l a t i o n o f th e i n t e g r a n d I=c o s [ w( zz ' ) / v ] Im [ E i n d /p ]
f o r j j = 1 : 1 : N mon
f o r kk = 1 : 1 : N dip
I ( kk , j j , i i )=c o s (w( i i ) ( z d i p ( kk )z mon ( j j ) ) /v ) E i n d ( kk , j j , i i ) / p0 ;
end
end
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67
% C a l c u l a t i o n o f th e i n t e g r a l u s i n g th e t r a p e z o i d a l method
gamma ( i i , 1 )=hbar w( i i ) / e ;
% Energy [ eV ]
gamma ( i i , 2 )=e 2 / ( p i hbar w( i i ) 2 ) . . .
t r a p z ( z mon , t r a p z ( z d i p , I ( : , : , i i ) , 1 ) , 2 ) ; % L o s s p r o b a b i l i t y [ s ]
gamma ( i i , 3 )=gamma( i i , 2 ) e / hbar ;
% L o s s p r o b a b i l i t y [ 1 / eV ]
end
68
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79
Figure S1: (a) Lumerical script used for postprocessing the Lumerical FDTD simulations.
The script successively loads the .fsp files for each dipole position, extracts the z-component
of the electric field, and built a 3D matrix containing the imaginary part of the electric field
Im{Ez (z, z , )} along the monitor (z ), for each dipole position (z) and as function of the
frequency (). (b) Matlab script used for computing the energy loss probability EELS ()
from the induced electric field Ezind (z, ) extracted from Lumerical FDTD simulations. It
uses the 3D matrices built with the Lumerical script and eq 4.
S3
Figure S2: Real and imaginary parts of the dielectric permittivity of (a) gold, (b) silver, and
(c) chromium. The squares are the experimental data tabulated by Johnson and Christy S1
and by Palik S2 and the full lines are the MCM fits used in the FDTD simulations.
S4
Table S1: FDTD parameters for: (i) isolated gold S1 nanosphere of diameter a = 160 nm,
(ii) dimer of silver S2 nanoparticles of diameter a = 160 nm and gap g = 5 nm, (iii) gold S1
nanodisk of diameter a = 50 nm, and thickness h = 15 nm on a 30 nm thick Si3 N4 S4,S5
substrate, and (iv) gold S1 bowtie antenna of edge length a = 80 nm, thickness h = 15 nm,
and gap g = 4 nm on a 30 nm thick SiN S6 substrate and 2.5 nm chromium S2 adhesion layer.
FDTD simulation domain
Sim. time
[fs]
Sphere
100
Dimer
100
Disk
100
Bowtie
100
Size
[m]
1
1
1
1
auto
auto
auto
auto
Mesh type
(accuracy)
non-uniform
non-uniform
non-uniform
non-uniform
S6
(5)
(7)
(5)
(5)
Mesh
refinement
conformal 0
conformal 0
conformal 0
conformal 0
Autoshutoff
105
106
105
106
Override mesh
Structure e-path
dx, dy, dz
dz
[nm]
[nm]
2,2,2
2
1.5,2,2
2
2,2,2
2
1.5,2,2
2
Figure S4: (a) EELS-FDTD computational time for each dipole position in 0 z 750 nm
(red dots and blue line). The mean value is 8.61 min (green dashed line), and the median
value is 8.80 min (orange dashed line). (b) Computational time in 0 z 500 nm (red
dots and blue line). The mean value is 4.62 min (green dashed line), and the median value
is 4.53 min (orange dashed line). (c) FDTD, BEM, DDA, and Mie EELS spectra of an
isolated gold nanosphere of diameter a = 160 nm with an impact parameter b = 82 nm and
an electron velocity of 0.5c (i.e., 80 keV). The spectra are calculated with the parameters
given in Table S2.
S7
Table S2 summarizes the statistics of the two FDTD calculations and compares them
to the results obtained using BEM S7 and DDA. S8 BEM uses 100 boundary elements (i.e.,
mesh size of about 2.5 nm) to descretize the profile of the nanoparticle. In DDA, we set
an interdipole distance of d = 0.8 nm, corresponding to about 4.2 million dipoles in the
nanoparticle. The FDTD, BEM, and DDA calculations are performed on 10 Intel Sandybridge E2670 processors (64-bit, 20 MB Cache, 2.6 Ghz) with 40 GB of available memory
(DDR3 1600 MHz).
Table S2: Comparison of the computational resource (time and memory) between FDTD
(two calculations), DDA, and BEM. The EELS spectra are calculated for an isolated gold
nanosphere of diameter a = 160 nm with an impact parameter b = 82 nm, for an energy
range from 1 to 4 eV, and an energy resolution of 15 meV (Figure S4c). The discretization
parameter d corresponds to the minimum volume mesh size (FDTD), the boundary element
size (BEM), and the interdipole distance (DDA). The total time is calculated for each EELS
calculation when the sequences are run in serial. FDTD (a) and (b) refers to the panels (a)
and (b) in Figure S4.
d
[nm]
FDTD (a)
FDTD (b)
DDA
0.8
BEM
2.5
Number of
elements
Number of
sequences
6, 011, 499
750 dipole
Yees cells
positions
1, 642, 560
500 dipole
Yees cells
positions
4, 188, 896
200 energy
dipoles
values
100 boundary 200 energy
elements
values
Average time
per sequence
[min]
Total
comput. time
[h]
Average
memory
[MB]
8.6 2.1
105
2, 874
4.6 0.6
35
1, 659
62 20
> 210
15, 135
6.8 s
25 min
14.50
Due to its partitioning in subcalculations, the total computational time of the EELSFDTD simulation can be drastically reduced by running the subcalculations in parallel (e.g.,
using job arrays). Also, as the nanosphere possesses a symmetry with respect to the z-axis,
the number of calculations, and hence the total computational time, can be reduced by a
factor of 2 (i.e., 375 dipole positions) by using the reciprocity property of the Green tensor.
As it can be seen from Figure S4c and Table S2, EELS-FDTD allows for reaching a better
convergence level at lower computational cost than DDA. Furthermore, it is important to
notice that, in the current conditions, a DDA calculation with a smaller interdipole distance
results in errors and cannot be performed due to the extremely large number of dipoles (over
17 millions for d = 0.5 nm). Also, the number of iterations increases with the magnitude of
the permittivity in DDA, and becomes extremely large for gold in the NIR. This results in
computation time of several hours for each frequency when reaching energies below 2.25 eV.
S8
Figure S5: EELS spectra for a spherical gold S1 nanoparticle of diameter a = 160 nm calculated with the EELS-FDTD implementation at b = 0 nm (i.e., penetrating trajectory). The
electron velocity is taken equal to 0.5c (i.e., 80 keV). The override mesh placed along the
electron trajectory discretizes space for the placement of the electric dipoles. Each electric
dipole are placed at one of these mesh points. (i) When the physical surface of the nanostructure coincides with the override mesh (i.e., when an electric dipole is placed at the NP
surface) the EELS signal is overestimated. This overestimation, introduced by numerical/
computational errors, can be corrected by introducing a slight offset between the surface and
the mesh grid as shown in panels (ii) and (iii).
S9
Figure S6: EELS-FDTD spectra for a gold S1 nanodisk of diameter a = 50 nm and thickness
h = 15 nm placed over a 30 nm thick SiO2 substrate with dielectric permittivity = 2. S5,S9
The impact parameter is fixed to b = 27 nm and the electron velocity is 0.5c (i.e., 80 keV).
Convergence of the calculated EELS spectrum can be achieved by increasing the number of
electric dipoles. This is done by changing the step dz of the override mesh used along the
electron trajectory. (i) Uniform distribution of electric dipoles along the z-axis (dz = 2 nm).
(ii) Uniform distribution of electric dipoles along the z-axis (dz = 1 nm).
S10
Figure S7: EELS spectra for a gold S1 bowtie antenna of edge length a = 80 nm, thickness
h = 15 nm, and gap g = 5 nm on top of a 30 nm thick substrate. We vary the substrate
dielectric permittivity from 1 to 4. The electron velocity is fixed to 0.5c (i.e., 80 keV) in
all the cases. The impact parameter is b = 0 nm (gap center). The bowtie nanostructure
appears to be more sensitive to the presence of the substrate than a single triangular prism
(cf. Figure 4). In addition to a significant red-shift of the LSPRs, an increase of also gives
rise to the appearance of high order modes.
S11
Figure S8: EELS spectra for a single gold S1 triangular prism of edge length a = 80 nm and
thickness h = 15 nm, on top of a 30 nm thick SiN S6 substrate. The nanostructures include a
2.5 nm (blue lines) and 1 nm (red lines) chromium S2 adhesion layer. The electron velocity is
fixed to 0.5c (i.e., 80 keV) in all the cases. (a) Edge excitation b = 15 nm. (b) Apex excitation
b = 15 nm. The impact parameter b is taken as the distance from the prism end in panel
(a) and prism apex in panel (b). The results are in good agreement with the experimental
observations by Yang and co-workers. S10,S11
S12
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(S4) Philipp, H. R. Optical properties of silicon nitride. J. Electrochem. Soc. 1973, 120,
295300.
(S5) B
a
ak, T. Silicon oxynitride; a material for GRIN optics. Appl. Opt. 1982, 21, 1069
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