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Mahatma Gandhi Mission'S College of Engineering and Technology

This document contains the course plan for a BioMEMS course taught by Prof. Abhishek Patil. It lists 46 topics to be covered from January 4th to April 12th, including introductions to BioMEMS and dimensional effects, materials commonly used in MEMS like silicon compounds and polymers, fabrication techniques such as lithography and etching, biosensors, drug delivery systems, and packaging. The course aims to provide students with fundamental knowledge of MEMS and microfabrication processes applied to biomedical applications.

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Safwan Shaikh
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50 views

Mahatma Gandhi Mission'S College of Engineering and Technology

This document contains the course plan for a BioMEMS course taught by Prof. Abhishek Patil. It lists 46 topics to be covered from January 4th to April 12th, including introductions to BioMEMS and dimensional effects, materials commonly used in MEMS like silicon compounds and polymers, fabrication techniques such as lithography and etching, biosensors, drug delivery systems, and packaging. The course aims to provide students with fundamental knowledge of MEMS and microfabrication processes applied to biomedical applications.

Uploaded by

Safwan Shaikh
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOCX, PDF, TXT or read online on Scribd
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MAHATMA GANDHI MISSIONS

COLLEGE OF ENGINEERING AND TECHNOLOGY,


KAMOTHE, NAVI-MUMBAI

Course Plan (2015-16)


Semester:VIII (CBGS)

Department:-BME

Course:- BioMEMS

Name of the Faculty Member: - Prof. Abhishek Patil


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Date
04/01/2016
05/01/2016
07/01/2016
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Topics to be covered
Introduction to BioMEMS & Course Plan Introduction
Dimensional effect on engineering systems
Clean room classification
Scaling Laws in Miniaturization MEMS & Micro system products,
Substrates and Wafers,
Properties of Silicon Compounds SiO2, Si3N4, Polysilicon,
Amorphous silicon
Properties of Silicon Compounds SiO2, Si3N4, Polysilicon,
Amorphous silicon
Polymers: Dielectric polymers, Conducting polymers, and
piezoelectric polymers
Polymers: Dielectric polymers, Conducting polymers, and
piezoelectric polymers
Fabrication techniques in MEMS: Bulk micromachining, Surface
micromachining
Fabrication techniques in MEMS: LIGA Cleaning processes: RCA,
Piranha
Deposition processes for metals: e-beam evaporation, thermal
evaporation and DC Sputter
Deposition processes for dielectrics: Physical (RF Sputter) and
Chemical Techniques (CVD: APCVD, LPCVD, PECVD, and
HWCVD).
Deposition processes for dielectrics: Physical (RF Sputter) and
Chemical Techniques (CVD: APCVD, LPCVD, PECVD, and
HWCVD).
Deposition processes for dielectrics: Physical (RF Sputter) and
Chemical Techniques (CVD: APCVD, LPCVD, PECVD, and
HWCVD).
Polymers coating techniques: spinning, spraying and electrodeposition

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Polymers coating techniques: spinning, spraying and electrodeposition


Photolithography: light sources (UV, DUV, and EUV), photoresist
Mask design and fabrication using EBL, dark and bright field photomask, different projection systems in lithography
Detailed study of lithography process, study of fabrication processes
like optical grating structure, SiO2 cantilever , SiNx cantilever and
basics of EBL Etching Processes : Dry (RIE, DRIE) and wet etching
Detailed study of lithography process, study of fabrication processes
like optical grating structure, SiO2 cantilever , SiNx cantilever and
basics of EBL Etching Processes : Dry (RIE, DRIE) and wet etching
Detailed study of lithography process, study of fabrication processes
like optical grating structure, SiO2 cantilever , SiNx cantilever and
basics of EBL Etching Processes : Dry (RIE, DRIE) and wet etching
Doping ion implantation and diffusion
Soft lithography: Micro contact Printing, Imprinting or hot embossing,
and Replica Molding
Surface characterization techniques: AFM, SEM, Profilometer,
Elipsometer, Fluorimeter
Basic block diagram: importance of -TAS Flow techniques in fluidics: pressure driven force, electro-kinematics; electroosmosis,
electrophoresis, dielectrophoresis
Basic block diagram: importance of -TAS Flow techniques in fluidics: pressure driven force, electro-kinematics; electroosmosis,
electrophoresis, dielectrophoresis
Basic block diagram: importance of -TAS Flow techniques in fluidics: pressure driven force, electro-kinematics; electroosmosis,
electrophoresis, dielectrophoresis
Basic block diagram: importance of -TAS Flow techniques in fluidics: pressure driven force, electro-kinematics; electroosmosis,
electrophoresis, dielectrophoresis
Components in -TAS: Micropump, microvalves, microchannels TAS: separation and mixing techniques fabrication of micro-channels:
SU8 channel, glass channel, silicon channel
Components in -TAS: Micropump, microvalves, microchannels TAS: separation and mixing techniques fabrication of micro-channels:
SU8 channel, glass channel, silicon channel
Components in -TAS: Micropump, microvalves, microchannels TAS: separation and mixing techniques fabrication of micro-channels:
SU8 channel, glass channel, silicon channel
Components in -TAS: Micropump, microvalves, microchannels TAS: separation and mixing techniques fabrication of micro-channels:
SU8 channel, glass channel, silicon channel

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Biosensor: definition, block diagram and working Classification


based on the basis of detection techniques: Electric Magnetic, Optical,
Thermal, Mechanical, and Chemical
Biosensor: definition, block diagram and working Classification
based on the basis of detection techniques: Electric Magnetic, Optical,
Thermal, Mechanical, and Chemical
Basic steps involved in the development of biosensors: surface
modification, immobilization, integration with transducer
Examples: (i) Design, fabrication of SiO cantilever for antibody
detection, (ii) Design, fabrication of Optical waveguide biosensor, (iii)
Microfluidics based biosensor
Examples: (i) Design, fabrication of SiO cantilever for antibody
detection, (ii) Design, fabrication of Optical waveguide biosensor, (iii)
Microfluidics based biosensor
Overview of drug delivery systems, Types of drug delivery systems,
Different parts of drug delivery system
MEMS based drug delivery systems: Implantable drug delivery
systems (IDDS), Micro needles and its fabrication, Micro particles for
oral drug delivery
MEMS based drug delivery systems: Implantable drug delivery
systems (IDDS), Micro needles and its fabrication, Micro particles for
oral drug delivery
MEMS based drug delivery systems: Implantable drug delivery
systems (IDDS), Micro needles and its fabrication, Micro particles for
oral drug delivery
MEMS based drug delivery systems: Implantable drug delivery
systems (IDDS), Micro needles and its fabrication, Micro particles for
oral drug delivery
MEMS based drug delivery systems: Implantable drug delivery
systems (IDDS), Micro needles and its fabrication, Micro particles for
oral drug delivery
Importance of packaging, Packaging materials Packaging techniques
Wafer bonding
Importance of packaging, Packaging materials Packaging techniques
Wafer bonding
Importance of packaging, Packaging materials Packaging techniques
Wafer bonding
Importance of packaging, Packaging materials Packaging techniques
Wafer bonding
Revision of the syllabus
Discussion on Solution to University Question papers

Name of the book recommended:


1. Fundamentals of Microfabrication Marc Madou, by, CRC Press, 1997.Gregory Kovacs
2. Fundamentals of BioMEMS and Medical Microdevices, Steven S. Saliterman, (SPIE
Press Monograph Vol. PM153 by Wiley Interscience

Subject In-Charge

Class In-charge

HOD

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