MicroTorr: Ambient Inline Purifiers

MicroTorr Features

MicroTorr Purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining A
model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different
customer applications, while maintaining impurity removal to part-per-Trillion (ppt) levels. Optional valves and a 0.003m
particle filter are available as well as custom subsystem configurations.

Product Highlights
Reliability: Delivery of Ultra-High-Purity (UHP) gas for
uncompromised process consistency and yield improvement.
Inorganic active purification media means protection from
hydrocarbon release.

Performance: State of the art purification technology, low pressure

drop, and long lifetimes.

Environmentally Friendly: Most MicroTorr media are factory

regenerable, minimizing potentially hazardous waste generation.

Quality: Hardware assembly made of 316L stainless steel. All units

are Helium leak checked, pressure tested, and analytically tested
to part-per-trillion (ppt) levels.

Certified: CE certification according to Pressure Equipment

Directive (PED)

Support: Lifetime estimation and regeneration service available

through the SAES Pure Gas Global Support Network.
 CLEAN, RELIABLE GAS

To select a Purifier Part Number Example

Choose: Isolation
Size Media Particle Filter Final Part Number
Purifier Size Valves
Purification Media MC1- 302 F V MC1-302FV
Optional 0.003m Particle Filter (F)
MC3000- 902 F MC3000-902F
Optional Inlet and Outlet Isolation Valves (V)

Purifier Sizes
Maximum Maximum Face-to-Face with
Average Flow Connection Diameter Face-to-Face
Model Flow Pressure valves
(slpm) Type (inches [mm]) (inches [mm])
(slpm) (psig) (inches [mm])
MC1 5 0.5 1,000 1/4" VCR 1.5 [38.1] 3.31 [84.1] 8.91 [226.3]
MC45 10 1.5 1,000 1/4" VCR 1.5 [38.1] 4.5 [114.3] 10.10 [256.5]
MC50 10 1.5 1,000 1/4" VCR 1.5 [38.1] 5.0 [127] 10.60 [269.2]
MC190 50 5 250 1/4" VCR 2.0 [50.8] 8.2 [208.3] 13.80 [350.5]
MC200 50 5 250 1/4" VCR 2.0 [50.8] 6.3 [160] 11.90 [302.3]
MC400 60 9 250 1/4" VCR 3.0 [76.2] 8.2 [208.3] 13.80 [350.5]
MC450 / FT400 75 10 250 1/4" VCR 3.0 [76.2] 7.94 [201.7] 13.54 [343.9]
MC500 100 12 250 1/4" VCR 2.0 [50.8] 12.5 [317.5] 18.10 [459.7]
MC700 120 25 250 1/4" VCR 3.0 [76.2] 10.0 [254.0] 15.6 [396.2]
MC2525 300 80 250 1/4" VCR 4.0 [101.6] 17.3 [439] 23.2 [589]
MC1500 250 40 250 1/2" VCR 3.0 [76.2] 18.2 [462.3] 28.84 [732.5]
MC2550 500 80 250 1/2" VCR 4.0 [101.6] 17.6 [447] 28.2 [716]
MC3000 500 80 250 1/2" VCR 4.0 [101.6] 20.0 [508.0] 30.64 [778.3]
MC4500 1,000 200 250 1/2" VCR 6.0 [152.4] 27.64 [702.6] 38.3 [972.8]
MC9000 1,000 300 250 1/2" VCR 6.0 [152.4] 39.34 [999.7] 50.00 [1270.0]
MC14K 2,000 1,000 250 3/4" VCR 6.0 [152.4] 50.8 [1290] 67.1 [1705]

High Pressure Purifiers

HP190 50 5 1,000 1/4" VCR 2.0 [50.8] 8.2 [208.3] 13.80 [350.5]
HP400 60 9 1,000 1/4" VCR 3.0 [76.2] 8.2 [208.3] 13.80 [350.5]
HP700 120 25 1,000 1/4" VCR 3.0 [50.8] 10.0 [254.0] 15.6 [396.2]
HP3000 500 80 1,000 1/2" VCR 3.9[100.1] 20.0 [508.0] 28.9 [756]
SP70 40 1.5 3,000 1/4" VCR 2.0 [50.8] 5.00 [127.0] 10.60 [270.0]
SP300 200 10 3,000 1/4" VCR 2.0 [50.8] 15.00 [381.0] 20.60 [524.0]
SP600 400 15 3,000 1/4" VCR 2.0 [50.8] 25.00 [635.0] 30.60 [778.0]
LEADING EDGE MATERIALS
FOR LEADING EDGE
APPLICATIONS
Purification Media
Common Gases Media All Gases Purified Impurities Removed Regenerable

H2O, H2, CO2, O2, CO to < 100 ppt;

N2 N2, Ar, He, Kr, Ne, Xe, CH4, C2H6, C3H8, SF6,
902 Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
Ar, He, Kr, Ne, Xe Fluorocarbons
Metals < 1 ppbV
H2O, CO2, O2, CO to < 100 ppt;
H2 904 H2, D2, H2/Inert Mixtures Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
Metals < 1 ppbV
H2O, CO2 to < 100 ppt;
O2, CDA 203 N2, Ar, He, Kr, Ne, Xe, H2, D2, CDA, O2, N2O Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
(Clean Dry Air or Metals < 1 ppb
Compressed Dry Air)
906 CDA, O2, N2O H2O, CO, CO2, NMHC to < 1 ppb, Metals < 1 ppbV Yes

NH3, C2H7N, C2H8N2, C2H4, C3H6, CH3SiH3, GeH4,

NH3 702 H2O, O2, CO2, NMHCs, Metals to < 1 ppb Yes
SF6, H2/SiH4 mixtures

H2O, H2, O2, CO to < 100 ppt;

804 CO2 Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
Metals < 1 ppbV
CO2
H2O < 100 ppt;
805 CO2 Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
Metals < 1 ppbV
H2O, CO2 to < 100 ppt;
203 N2, Ar, He, Kr, Ne, Xe, H2, D2, CDA, O2, N2O Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
O2 Metals < 1 ppb

906 CDA, O2, N2O H2O, CO, CO2, NMHC to < 1 ppb, Metals < 1 ppbV Yes

Application Specific
Media All Gases Purified Impurities Removed Regenerable
Media

Dryer Only 202 N2, Ar, He, Kr, Ne, Xe, H2, D2, CDA, O2, CO2, N2O H2O to < 1 ppb Yes

H2O, CO2 to < 100 ppt;

Dryer and AMC
203 N2, Ar, He, Kr, Ne, Xe, H2, D2, CDA, O2, N2O Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt, Yes
Removal
Metals < 1 ppb
Organics, Acids, Refractory Compounds to < 1 ppt; Bases < 5 ppt,
AMC Removal Only 403 N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2, CO2 No
Metals < 1 ppb
N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2, CO2, C2H2,
Organic Removal Only 404 Organics < 1 pptV Yes
C3H6, C2H4, NH3
HCl, Cl2, B2H6, BCl3, CClH3, CO2, GeCl4, GeH4,
H2S, H2Se, HBr, N2O, NF3, NO, SiCl4, SiF4, SiH2Cl2,
Corrosive Gases 302 H2O, Metals to < 1 ppb No
SiHCl3, SO2, CHClF2, BF3, N2O, NF3, NO, SiCl4,
SiF4, SiH2Cl2, SiHCl3, SO2

Arsine and Phosphine 502 AsH3, PH3 H2O, O2 to < 1 ppb, Metals < 1 ppbV No

Oxygen Conversion
503 H2, Ar, He, N2, CO2 with 1% O2 O2 to < 1 ppm N/A
(De-Oxo)

Carbon Monoxide (CO) 602 CO H2O, O2, CO2, Acids, Bases, Organics, Refractories, Metals < 1 ppbV No

Silane (SiH4) 802 SiH4 H2O, O2, CO, CO2, Sulphur compounds, Metals removal < 1 ppb No
 ENVIRONMENTALLY FRIENDLY
SOLUTIONS

MicroTorr Options
Regeneration
Many MicroTorr purifiers can be sent back to the SAES Pure Gas factory for regeneration. Regeneration minimizes hazardous waste and is an
environmentally friendly solution. All specified impurities are removed during the regeneration process. After regeneration the purifier will have the same
lifetime as a new purifier.

How long is the lifetime?

MicroTorr Purifiers are designed for the maximum lifetime to reduce the frequency of purifier change-out and provide customers with the highest cost
of ownership possible. In general the lifetime is 1 year with standard 5N (99.999%) quality gas, at the average flow rating of the purifier. To attain an
application specific lifetime calculation please consult SAES Pure Gas, with your flow rate and inlet impurity information.

0.003m Particle Filter (F)

This sintered metal particle filter is located inside the purifier at the outlet. The particle filter is optimized for a low pressure drop.

Inlet and Outlet Isolation Valves (V)

The isolation valves provides for a simple installation and minimizes the risk of exposing the purifier to atmosphere during installation. See the Purifier
Sizes table for the length of each model with or without the isolation valves.

Diameter

Face-Face length

Face-Face length with inlet/outlet isolation valves

Dual Purifier Manifold

The purifiers can flow individually or in parallel. Each purifier can be isolated so it can be replaced or sent to the SAES Pure Gas factory for regeneration.
The Manifold includes a backing plate to easily mount the assembly. Inlet and outlet connections are both on top for a simple installation.

3 Valve Bypass Piping

Allows the user to bypass and isolate the purifier for replacement or regeneration. Purifier is removed without any valves attached.

5 Valve Bypass Piping

Allows the user to bypass and isolate the purifier for replacement or regeneration. Purifier is removed with inlet and outlet valves attached.

SAES Pure Gas SAES Pure Gas is ISO9001 certified 2016 SAES Pure Gas. Printed in USA. All rights
4175 Santa Fe Road reserved. MICROTORR is a registered trademark of

San Luis Obispo, CA, 93401, USA SAES Pure Gas, Inc.
ISO 9001:2008 SAES Pure Gas reserves the right to change or modify
Phone: +1 805-541-9299
product specifications at any time without notice.
E-mail: [email protected]
Website: www.saespuregas.com