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Electronic Devices 05-08-2014: BITS Pilani, K K Birla Goa Campus

This document summarizes key points about semiconductor materials and silicon wafers. It discusses how silicon replaced germanium as the most important semiconductor material due to its properties and abundance. The document also describes the crystal structure of silicon, including its unit cell and common crystal planes such as (100) and (111). It provides an overview of how silicon crystals are grown from metallurgical to electronic grade silicon and cut into wafers for integrated circuit fabrication.

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Jeswin Eldho
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24 views

Electronic Devices 05-08-2014: BITS Pilani, K K Birla Goa Campus

This document summarizes key points about semiconductor materials and silicon wafers. It discusses how silicon replaced germanium as the most important semiconductor material due to its properties and abundance. The document also describes the crystal structure of silicon, including its unit cell and common crystal planes such as (100) and (111). It provides an overview of how silicon crystals are grown from metallurgical to electronic grade silicon and cut into wafers for integrated circuit fabrication.

Uploaded by

Jeswin Eldho
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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Electronic Devices

Lecture 2
05-08-2014

BITS Pilani, K K Birla Goa Campus


BITS Pilani, K K Birla Goa Campus
Periodic Table

BITS Pilani, K K Birla Goa Campus


Semiconductor materials

• If we look at the periodic table, the element


semiconductors, such as silicon (Si) or germanium
(Ge), can be found in column IV of the table.

• In the early 1950s, Ge was the most important


semiconductor material, but, since the early 1960s,
Si has played a major role and virtually displaced
Ge as the main material for semiconductor material

BITS Pilani, K K Birla Goa Campus


Semiconductor materials
• The reasons of that are:
– Better properties at room temperature
– High-quality silicon dioxide (SiO2) can be
grown thermally.
– Si is second only to oxygen in great quantity.
– Devices made from Si cost less than any other
semiconductor material
– Silicon technology is by far the most advanced
among all semiconductor technologies.

BITS Pilani, K K Birla Goa Campus


Significance of Si

1. Easily oxidized to form SiO2, a high quality electrical


insulator

2. Oxide layer provides an excellent barrier layer for the


selective diffusion steps needed in integrated-circuit
fabrication

3. Abundant element in nature, providing the possibility of a


low-cost starting material

4. Wider bandgap than Ge and operate at higher


temperature than Ge
BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
Crystal structures

BITS Pilani, K K Birla Goa Campus


Unit cell

BITS Pilani, K K Birla Goa Campus


Cubic unit cell

BITS Pilani, K K Birla Goa Campus


FCC structure

BITS Pilani, K K Birla Goa Campus


Miller Indices

BITS Pilani, K K Birla Goa Campus


BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
Crystallographic Notation

Miller Indices Notation Interpretation


(hkl) crystal plane
{hkl} equivalent planes
[hkl] crystal direction
<hkl> equivalent directions
h: inverse x-intercept of plane
k: inverse y-intercept of plane
l: inverse z-intercept of plane
(h, k and l are reduced to 3 integers
having the same ratio.)

BITS Pilani, K K Birla Goa Campus


Crystallographic Planes

_
(632) plane (001) plane (221) plane

BITS Pilani, K K Birla Goa Campus


Crystallographic Planes

BITS Pilani, K K Birla Goa Campus


Crystal Growth CZ Method

BITS Pilani, K K Birla Goa Campus


Crystal Growth Until Device Fabrication

BITS Pilani, K K Birla Goa Campus


Metallurgical grade silicon - MGS
Electronic Grade Silicon - EGS

BITS Pilani, K K Birla Goa Campus


Crystallographic Planes of Si Wafers

 Silicon wafers are usually cut along a {100} plane with a flat or notch to orient the
wafer during integrated-circuit fabrication.
 The facing surface is polished and etched yielding mirror-like finish.

BITS Pilani, K K Birla Goa Campus


Crystallographic Planes of Si

Unit cell:

View in <111> direction

View in <100> direction View in <110> direction

BITS Pilani, K K Birla Goa Campus

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