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Development of Phased-Array Ultrasonic Testing Probe

Seiichi Kawanami*1 Masaaki Kurokawa* 1
Masaru Taniguchi*2 Yoshihisa Tada*2

Phased-array ultrasonic testing was developed for nondestructive evaluation of power plants. Phased-array UT
scans and focuses an ultrasonic beam to inspect areas difficult to inspect by conventional UT. We developed a highly
sensitive piezoelectric composite, and designed optimized phased-array UT probes. We are applying our phased-
array UT to various parts of power plants.

method by referring to the fabrication technique of

1. Introduction the piezoelectric composite which is the key element
Prevention of trouble is a matter of vital impor- in the probe, probe design considerations, and ex-
tance, particularly in the operation of nuclear and amples of practical applications of this testing
other power plants. With the increase in plant life, method.
assessment of the remaining life of plant components
has become an important subject. 2. Phased-array UT method
Nondestructive inspection is an essential testing 2.1 Principle of operation and features
method for the safe, long-term operation of plants. A conventional UT probe consists of a single piezo-
Ultrasonic testing (UT) is generally used to inspect electric element, while that for phased-array UT has
the piping systems and pressure vessels of power multiple piezoelectric elements. Each piezoelectric
plants. The UT method shows satisfactory capabili- element is independently controlled in its S/R timing
ties in detecting and sizing (evaluation of the size of to synthesize a waveform for control of ultrasonic-
defect) of defects in the portions which have simple wave beams.
geometry and allow ultrasonic waves to propagate The electronic scanning shown in Tabl e 1 is an ex-
able
smoothly. However, this method is not suitable for ample of scanning made by delaying the sending
testing of parts such as stainless steel castings that timing of the right-hand side piezoelectric element.
do not allow easy propagation of ultrasonic waves, or The table shows that the composite wave front in-
complex geometry parts that do not allow the testing clines to the right side, as a result of which the beam
probe to scan freely. can be transmitted in a similar way to ordinary angle
As an advanced UT method, research on phased- probe. With regard to the electronic focusing, com-
array UT technology is being conducted worldwide. posite wave front is focused on a given point by
Because ultrasonic-wave beams of the phased-array delaying the beam transmitting timing of the piezo-
UT can be electronically controlled, it is possible to electric elements located in the middle of array,
detect defects even in the complex geometry parts by resulting in a similar effect to that given by a focus-
electronically scanning, and also to enhance the space ing probe. In this way, the phased-array UT method
resolution by focusing the beam. makes it possible to freely change the angle of inci-
This paper describes the development of the probe dence and the position of focusing of the ultrasonic
as the basic technology for the phased-array UT beam, and is thus expected to be used to inspect areas

Table 1 Principle and feature of phased-array UT

Method Electronic scanning Electronic focusing
Delay time setting Delay time setting
Delay
Multiple piezoelectric Delay
Piezoelectric composite
composites Advance Advance
Imaginary ultrasonic Imaginary ultrasonic wave
wave propagation propagation
Control principle Composite
wave front
Composite wave front
Ultrasonic wave
incidence direction Focusing point of ultrasonic wave

Probing speed increases as a result of minimization Space resolution (detecting ability) is improved by
Features of difficult-to-inspect areas by scanning at various ultrasonic-wave beam focusing.
angles of refraction and by electronic scanning.

*1 Takasago Research & Development Center, Technical Headquarters Mitsubishi Heavy Industries, Ltd.
*2 Kobe Shipyard & Machinery Works Technical Review Vol.38 No.3 (Oct. 2001)
122

to which the conventional UT method is not appli-

PC for control of Phased-array Phased-array UT instrument
cable. UT instrument
2.2 System composition
Fig
Fig.. 1 shows the composition of the phased-array
UT system. Fundamentally, the system is composed
of (1) phased-array UT probe, (2) phased-array UT
instrument (for control of probe transmitting and re-
ceiving signals), and (3) personal computer for control
of the phased-array UT instrument. For automatic
probing, this system may incorporate a scanner to let
the probe scan and a scanner driver to control the
scanner. This light-weight system is also suitable for Phased-array UT probe
field inspection.
2.3 Applications of phased-array UT Fig. 1 Composition of phased-array UT system
The first major application of the phased-array UT
is inspection of complex geometry parts. When con-
Oscillating direction Piezoelectric
ventional UT is used, the inspecting areas must be (depth direction) ceramic structure
Detail
scanned entirely with the probe. If the inspecting area
includes any portion having a straight part that is
too short to probe, such a difficult-to-probe portion
has to be omitted from inspection. However, such con-

Direction of
thickness
ventionally difficult portions can be inspected by
Resin
using the beam scanning function of the phased-ar- Electrode
ray UT instead of scanning with probe. (an element of phased-array) Horizontal direction
The second application is inspection of parts made Fig. 2 Structure of piezoelectric composite
of high-noise materials such as stainless steel cast-
ings and weldings. Coarse grain crystals contained are made of piezoelectric ceramics such as lead
in these parts deflect and scatter the ultrasonic waves zirconate titanate (PZT). When a piezoelectric com-
and lower the propergation. By focusing an ultrasonic- posite is fabricated so that the thin structures made
wave beam on these parts, the defect echo level is of piezoelectric ceramics are set in array as shown in
made clear and the signal-to-noise ratio is improved. Fig
Fig.. 2 , and compacted into a composite by filling resin,
In addition to the above, when piezoelectric ele- the effects will be as follows:
ments of a phased-array UT probe are divided into (1) Resin filled between piezoelectric structures acts
groups, speed of inspection can be increased by switch- as damping material to reduce the pulse duration
ing each group electrically instead of scanning with of the ultrasonic waves, improving resolution in the
probe. direction of depth.
(2) Oscillation in the direction of thickness becomes
3. Development of high-performance probe for
predominant and suppresses the resonance in the
phased-array UT
horizontal direction, minimizing useless radiations
As mentioned above, phased-array UT is expected and improving directivity.
to be used to inspect parts which conventionally are (3) Decrease in acoustic impedance improves match-
difficult to inspect. Unlike the conventional UT, the ing and signal-to-noise ratio.
probe for phased-array UT has special parameters (4) Mechanical Q value ( Q m : an index representing
such as scanning range and focusing range of ultra- the damping characteristics of piezoelectric com-
sonic-wave beams and its performance depends posite) becomes smaller, expanding the band width.
largely on the number and size of piezoelectric ele- In preparation for the design of an excellent piezo-
ments. The basic technology developed by Mitsubishi electric composite such as that described above, the
Heavy Industries, Ltd. (MHI) for phased-array UT oscillation characteristics were evaluated by the fi-
probes is described below. nite element method.
3.1 Structure of highly sensitive piezoelectric com- The essential parameters in the design of piezo-
posite electric composites are PZT volume factor and Young’s
Improvement of the characteristics of ultrasonic- modulus of resin filler. The shape of PZT structure is
wave piezoelectric composite is considered to be the also considered to have an influence on the mutual
first task for enhancement of the performance of interference in the horizontal direction.
phased-array UT. Conventional piezoelectric elements To e v a l u a t e t h e d a m p i n g c h a r a c t e r i s t i c s , t h e

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Technical Review Vol.38 No.3 (Oct. 2001)
 123

SR lithography
SR light
Au mask Pouring PZT slurry PZT slurry
PMMA
photoresist
Si substrate Resin die

Etching Sintering PZT

Ni electroforming Filling resin

Ni plating
Resin

Fig. 4 SEM of piezoelectric composite Ni die

Part of Ni die fabricated by the LIGA process (array of
20 X 20 μm, 500 μm high Ni structures) is shown.
Molding resin die
Ni die Polishing, fixing electrodes and
polarizing The synchrotron radiation (SR) rays used as the X-
Resin die Electrodes ray source have sufficient intensity and directivity
Injection and
to shape a three-dimensional structure with a high
drawing
aspect ratio of several hundreds μm in depth to sev-
Fig. 3 Production process of piezoelectric composite
The process from step (1) to (4) is called the LEGA pro- eral μm in width.
cess. Fig.. 3 shows a schematic of the piezoelectric com-
Fig
oscillating transient response of the piezoelectric posite production process. The grooves corresponding
composite was analyzed by applying impulse potential. to PZT structures are shaped for photoresist (photo-
The analyses have revealed the following charac- sensitive material) by irradiation of SR light. The die
teristics: is made by plating the photoresist with Ni. The Ni-
(1) The Q m reaches its lowest level when the volume plated die is used to cast a resin mold. Piezoelectric
factor of composite is 25%; it is equivalent to about ceramic slurry is poured in the resin mold and solidi-
one half that of the Q m of a conventional PZT trans- fied to the shape of PZT structures, and then sintered.
ducer. Finally, resin is poured in the skeleton of the PZT
(2) The Q m value levels off when the aspect ratio is structures to fill up the space in it, and is then solidi-
over 10. For fabrication of an approx. 5 MHz pi- fied to complete a piezoelectric composite.
ezoelectric composite, it will require a This research work was carried out under the guid-
three-dimensional microfabrication technique to ance of Prof. Susumu Sugiyama, Department of
shape a structure about 200 μm high and about Science and Technology (Robotics), Ritsumeikan Uni-
20 μm wide. versity, and using the university’s SR light source
As the pulse duration of transmitting and receiv- facility (AURORA) for completion of the piezoelectric
ing ultrasonic waves decreases with Q m value, composite by the LIGA process. Fig Fig.. 4 shows a photo-
favorable oscillating characteristics are obtained. micrograph of a Ni die for piezoelectric composite
From the results of the analysis mentioned above, trial-fabricated using the LIGA process.
the PZT structures constituting a piezoelectric com- The Q m value of the prototype piezoelectric com-
posite must be a microscopic structure with a high posite is found to be as low as about 50% that of a
aspect ratio of several tens μm in width to several single-structure PZT transducer. The superiority of
hundreds μm in height. As it was difficult to shape the piezoelectric composite over PZT transducers in
such a microscopic structure by conventional tech- oscillating characteristics was also confirmed by ex-
niques such as dicing, the LIGA process periments.
(Lithographie, Galbanoformung, Abformung) for high- 3.2 Design and fabrication of probes
accuracy microfabrication technique was employed for For practical application of the phased-array UT,
the production of piezoelectric composite. it is important to design a probe which is suited to
The LIGA process is a microfabrication technique the portion of the pipes and vessels to be inspected.
developed in early ’80s by The Nuclear Research Cen- The design procedures used for it are as follows:
ter, Karlsruhe, Germany. It is a combination of the To start with, the inspection conditions including
processes of X-ray lithography (exposure) to shape the focusing radius of ultrasonic-wave beam, focus-
deep grooves, electroforming (plating) and molding. ing position, scanning range, etc. are determined for
Mitsubishi Heavy Industries, Ltd.
Technical Review Vol.38 No.3 (Oct. 2001)
124

mm mm
0.0 0.0
15.0 15.0
Depth direction
30.0 30.0

Sound pressure level

45.0 45.0
60.0 60.0
75.0 75.0
90.0 90.0
105.0 Focusing point 105.0 AU
120.0 120.0 mm
-30.0 -14.0 2.0 18.0 34.0 50.0 -30.0 -14.0 2.0 18.0 34.0 50.0
Horizontal direction Horizontal direction
(a) 16-channel probe (b) 32-channel probe
Fig. 5 Results of acoustic numerical analysis
Difference in distribution of sound field by the number of probe channels is shown.

(a) For SUS castings (b) For small-diameter piping (with shoe)
Fig. 6 Appearance of various phased-array probes
Typical phased-array probes designed and fabricated are shown.

the intended inspection area. These conditions may specting curved portion of nozzle stub on pressure ves-
be obtained from the indication of drawings if the in- sels, high-speed inspection on piping and other
spect area is relatively simple in structure, or by the purposes have been fabricated.
ray trace simulation method in the case of complex
geometry parts. 4. Flaw detection tests
The array parameters of the inspection conditions Flaw detection tests with the phased-array UT
are computed from the array parameter calculation probes which have been specially fabricated were con-
equation, and the parameters are used to analyze the ducted on a mock-up test piece. The object of the tests
sound field of phased-array to ensure that the ultra- was to inspect the welding of piping and nozzle stub.
sonic-wave beam is adequate. When it has been Due to the presence of nozzle stub and weld reinforce-
confirmed that the beam is adequate, the probe is fab- ment of weld, this area does not provide a sufficient
ricated according to the array parameters. length of straight portion for UT probe scanning from
Fig
Fig.. 5 shows an example of analysis of sound fields. the nozzle stub side. Therefore, this area has been
In this instance, sound fields of ultrasonic-wave inaccessible in ultrasonic tests. To solve this problem,
beams of 16-channel and 32-channel probes are ana- a small-sized phased-array UT probe was fabricated
lyzed with refraction angle of 30 O and focusing depth to scan this area with ultrasonic-wave beam. The in-
of 90 mm. According to Fig. 5, the 32-channel probe spection conditions in the area were 8.7 mm for
forms a satisfactory ultrasonic-wave beam, while the focusing depth, 2.0 mm for focusing diameter and 35 O
beam of the 16-channel probe is not intense at the to 71 O for angle of refraction for scanning. Fig
Fig.. 7 shows
point of focusing and carries side lobes. In this case, the result of the test conducted on the mock-up test
the 32-channel probe needs to be selected. UT probes piece which has an EDM slit to the depth of 10% of
are fabricated according to the array parameters the wall thickness. This figure produced by a method
which have been determined as mentioned above. known as S scope displays the area corresponding to
Fig
Fig.. 6 shows typical phased-array probes used to in- the angle of refraction of the phased-array UT. When
spect stainless steel castings and small-diameter the image of the groove profile is superimposed on
pipings. In addition to these, probes suitable for in- this figure, it becomes obvious that a 10%-deep slit

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Technical Review Vol.38 No.3 (Oct. 2001)
 125

has been distinctly detected in the vicinity of the weld. Phased-array UT probe
In addition to the above-mentioned UT probe for ap- Probe shoe
plication to complex geometry parts, another UT probe
suitable for inspection of the curved portion of pres-
surizer nozzle stub is now being devised.
Nozzle stub Piping
For inspection of stainless steel castings, a T/R
(different transmitting and receiving elements) mode
type phased-array UT probe has been developed.
Stainless steel castings, as mentioned previously, are Signal from defect
materials containing coarse grain crystals which be- Ultrasonic-wave beam
o
(angle of refraction: 35 to 71 )
come a source of high noise on the inspection signals.
Fig. 7 Result of mock-up test using phased-array UT
Attempts to reduce the noise were made by focusing An example of probing wave pattern of phased-array UT on
the ultrasonic-wave beam and by devising the T/R mock-up test piece having an EDM slit is shown.
mode type phased-array UT probe. It is now likely
that use of this probe will make it possible to dis- in the inspections of elbow parts and nozzle stub welds
tinctly detect an EDM slit to a depth of 10% of the in actual plants for verification of their effectiveness.
wall thickness of a 75 mm-thick cast test piece. MHI intends to continue to design other types of UT
probe suitable for inspection of pipings and pressure
5. Conclusion
vessels different in shape and size and, at the same
MHI has developed a phased-array ultrasonic test- time, to improve the UT flaw detection technology by
ing method that permits scanning and focusing of making use of the advantages of phased-array UT
ultrasonic-wave beams for the purpose of inspecting method. These efforts of MHI will enhance the per-
the complex geometry parts and the parts made of formance of the current phased-array UT technology,
high-noise materials which have been difficult with especially in its flaw detecting ability and size-deter-
the conventional UT method. Specifically, the follow- mining ability in various fields of practical
ing technologies have been established: applications.
(1) Fabrication of high-sensitive piezoelectric compos-
ite by utilizing microfabrication technique References
(2) Establishment of optimal designing procedures (1) Sugiyama, S., Application of Micromachining to Sensors, J.
using sound field analysis IEEE Japan Vol. 117 No. 12 (1997) pp.828-831
(2) Bley, P. et al., The LIGA Process: A Microfabrication
Furthermore, the newly developed UT probes were Technology, FED Journal Vol. 5, No. 1 (1994)
actually used to inspect the complex geometry parts (3) Saneyoshi, J. et al., A Technical Handbook of Ultrasonic
of piping and the parts made of stainless steel cast- Testing (A Newly-rivised edition), The Nikkan Kogyo
Shinbun, Ltd. (1985) pp.368-369
ings, and this demonstrated that they were applicable
(4) Birks, A., Non Destructive Testing Handbook, second edition,
to the inspection of the parts for which conventional v. 7, Part 3: Tests with closely positioned transducers, ASNT
UT methods have been unusable. publication
Currently, MHI uses the phased-array UT probes

Mitsubishi Heavy Industries, Ltd.

Technical Review Vol.38 No.3 (Oct. 2001)