Solutions for

large area coating.

Engineers and pioneers.
Over the years, the demands on glass have changed, from simple
protection to design and comfort and then to high-performance func-
tional elements with sophisticated optoelectronic coatings, dedicated
to energy efficiency, optical appearance and a comfor­table lifestyle.
As a leading technology partner for thin-film coatings, Bühler develops
and manufactures vacuum deposition equipment for a broad range
of applications.

2 Bühler Leybold Optics large area coating

 Bühler Leybold Optics – milestones at a glance:

1980 Leybold introduced the first silver-based, high-rate-sputtered Low-E coating.

1981 Leybold installed the first architectural glass coater capable of handling
Jumbo size (6.0 x 3.3 m²) glass panes.
1986 Leybold introduced the first industrial-scale coater for depositing special
high-tech coatings, such as ITO and SiO 2.
1987 Leybold installed the first vertical coater for automotive glazing with a carrier
transport system at NIPPON SHEET GLASS, Japan.
1995 Leybold installed the world’s largest, in terms of production capacity,
architectural glass coating lines at GLAS TRÖSCH AG, France, and VEGLA,
Germany, with annual production capacities of 8 million m² each.
2008 Leybold Optics installed the first Apollon system (today LEYBOLD OPTICS
GLC series H) – the world’s fastest Jumbo size glass coater.
2010 Leybold Optics installed a vertical inline TCO coater with integrated effusion
cells for a 100 MW CIGS production facility.
2012 Bühler Leybold Optics installed the first industrial scale vertical glass coater
for electrochromic layers in an architectural application.
2013 Bühler Leybold Optics installed China’s largest Triple Low-E
coating system.

Bühler Leybold Optics large area coating 3

Bühler solutions for glass coating.
Stronger than ever before.
As an important step toward expanding the Advanced Materials divi-
sion within Bühler with a strategic focus on environmentally friendly
and energy-saving technology, Leybold Optics was acquired in May
2012. With this acquisition, Leybold Optics became part of a family-
owned conglomerate of specialists and technology partners for plant,
equipment and services for manufacturing advanced materials and for
processing basic foods. Not only does Bühler now hold the leading
market position in the field of aluminum die casting, transforming grain
into flour and feeds, and making pasta and chocolate, but also
in vacuum thin-film coating.

Within Bühler, we are stronger than ever and in an even better position
to drive our most modern coating solution, process expertise and
1st class service and thus keep our leading role in optical thin-film
vacuum deposition equipment. Over the next few years, we want to
­focus on our existing expertise in emerging markets with our most
eco-friendly coating solution and an outstanding cost-performance ra-
tio. Additionally, we will invest in high-class technology for developed
markets to provide new applications.

We are centering our efforts on ensuring our customers’ success by

improving our core component technologies with a strong focus on
cost of ownership. Our advances, for example in architectural layer
stack design, aim not only for performance and reliability but also for
cost efficiency.

Every year we spend a significant amount on basic research and

app­lied development to further improve our technology with regard to
quality and precision, sustainability, serviceability and the ecological
footprint of our design and systems.

Sincerely yours

Antonio Requena
Managing director
Bühler Alzenau GmbH
Leybold Optics

4 Bühler Leybold Optics large area coating

 Bühler Leybold Optics large area coating 5
Technology that brings you a step ahead.
Bühler cathode technology.

Although Bühler Leybold Optics is active in developing all different fields of coating technologies, for ex-
ample PECVD or evaporation methods, magnetron sputtering is still the technology of choice in large area
coating. The company offers all relevant sputtering methods, including DC, DC pulsed (uni- and bipolar),
MF and HF with rotatable and planar cathodes for the deposition of metallic, semiconducting and
insulating films at high sputter rates.

Bühler cathode systems Exotic and hazardous materials

– – Single and double planar cathodes Bühler has built up extensive expertise in handling exotic
– – Single and double rotatable cathodes target materials. Providing a safe design to work with po-
– – Moving target planar cathodes tentially toxic or flammable materials is crucial for estab-
lishing a safe, reliable and responsible working environ-
Depending on the machine platform, Bühler cathodes are ment.
available as horizontal drop-in and side-mounted or verti-
cal hinged versions. Bühler is always dedicated to creating the best solution
for the requested process. Please challenge us.

Bühler Leybold Optics top-pumping

cathodes ensure process stability with
optimized footprint characteristics.

Customer benefits – – Top-pumping versions of all Bühler planar and

– – Optimized magnetic configurations for excellent rotatable cathodes available
uniformity and utilization – – Advanced target moving system for extended
– – Optimized double planar geometry that allows the utilization of crucial materials in a given layer stack
use of two standard single planar targets in parallel – – Easy and quick maintenance

6 Bühler Leybold Optics large area coating

Whether rotary or planar geometry, Bühler
creates efficient solutions, such as double planar
cathodes that can be equipped in standard
GLC series H coating compartments using
two full-size standard single targets.

Bühler Leybold Optics large area coating 7

Technology portfolio for large area coating.
Vacuum deposition equipment at a glance.

LEYBOLD OPTICS GLC series H LEYBOLD OPTICS GLC 2000V

The LEYBOLD OPTICS GLC series H architectur- The LEYBOLD OPTICS GLC 2000V glass coating
al glass coating machine is available for substrate machine is specifically designed for architectural
widths of 2,590 and 3,300 mm, respectively, and applications, but can be perfectly used for every
can be flexibly configured to specific production large area coating process, especially where preci-
needs. sion, special materials and particle impact on the
substrate make the difference.
The LEYBOLD OPTICS GLC series H sets the
benchmark for high throughput production with Maximum substrate sizes of 3,210 x 2,000 mm² can
optimized transport characteristics, while ensuring be processed on a carrier. The LEYBOLD OPTICS
the highest flexibility for the production mix and GLC 2000V can be equipped with substrate heat-
the substrate batch configuration. ing to conduct challenging processes with excellent
results.

8 Bühler Leybold Optics large area coating

Bühler offers state-of-the-art solutions for thin-film applications.
Technologies with high throughput for large-sized glasses or specialized
coaters for the high-tech and telecommunications industry.

LEYBOLD OPTICS GLC series V LEYBOLD OPTICS DIS series V

The LEYBOLD OPTICS GLC series V is a versatile The LEYBOLD OPTICS DIS series V, a highly flex-
vertical inline glass coating machine that is intend­- ible platform for multi-chamber, vertical inline-sput-
ed for challenging TCO processes with heated sub- ter machines, is optimized for the classic display
strates, available in +/- 7° tilted versions. coating applications, such as touch screen panels,
ITO coatings for color filter products or anti-reflec-
The LEYBOLD OPTICS GLC series V can also be tion coatings on substrates of up to Gen 10 (3,130 x
used optimally for all metallic sputter applications 2,880 mm²). Highest target utilization through
where low particle impact is mandatory. The sub- move-target technology, lowest particle impact via
strate sizes can be flexibly configured ranging from a completely contact-free carrier transport system
300 x 300 mm² up to 1,400 x 1,400 mm². and minimized footprint with a rotation chamber
concept for substrate return are just a few of the
features that make LEYBOLD OPTICS DIS series V
unique in the display world.

Bühler Leybold Optics large area coating 9

LEYBOLD OPTICS GLC series H.
Flexible production solution with excellent quality.

Energy conservation is a key element to save resources, to contribute to a stable climate and to ensure
economic growth. The ever rising demand for high performance optical layer stacks and the multiplicity of
different layer characteristics require a flexible, reliable and highly productive machine concept. LEY-
BOLD OPTICS GLC series H is the first choice for the architectural glass industry when high throughput
and excellent quality of coating layers are required.

Loading Washing Entrance Area Process Area

The LEYBOLD OPTICS GLC series H glass coating plat- The sophisticated design and the proven choice of high-
form from Bühler leaves nothing to be desired. Its modu- quality equipment ensure reliability at low investment
lar design concept covers all current glass formats and costs and optimal cost of ownership for coated glass
coating processes – from anti-reflective coatings to Low-E, production. Especially when it comes to maintenance,
solar control and other advanced functional coatings. LEYBOLD OPTICS GLC series H sets the benchmark
State-of-the-art technology “made in Germany” without for the shortest downtime and optimized workflow
compromises in quality and performance make this sys- management.
tem the ideal solution for producing functional coatings
for state-of-the-art architectural glazing with the highest Applications:
precision, stability and throughput. – – SLE/DLE/TLE coatings
– – Low-E sun coatings
– – Solar control coatings
– – AR and mirror coatings

10 Bühler Leybold Optics large area coating

 Customer benefits: – – High uptime and fast maintenance cycles
– – The system saves target material and maintenance – – Extended campaign times
time and yields highest utilization – – Hydraulic lids for L-, B- and T-chambers
– – Stable processes and excellent gas separation with (available as an option)
fewer TMPs and less power consumption – – Flexible PLC approach
–– High rates of reactive sputtering with lowest target oxi- (Beckhoff, Siemens, Allen-Bradley)
dation and decreased overall process gas consumption

Process Area Exit Area Quality Inspection Unloading

Substrate specification: The LEYBOLD OPTICS GLC series H provides the highest degree of freedom,
allowing configuration of the machine to individual production needs.

LEYBOLD OPTICS GLC LEYBOLD OPTICS GLC

2590H 3300H
(US size) (Jumbo size)

Maximum width 2,590 mm 3,300 mm

Maximum length 4,200 mm 6,100 mm

Extended length 5,400 mm 7,800 mm

Thickness range 2–19 mm 2–19 mm

Cut sizes 300 x 800 mm² 300 x 800 mm²

Bühler Leybold Optics large area coating 11

Bühler Leybold Optics flexible drive system can be adapted to fit the customer’s
individual product mix with regard to the minimum glass length.

LEYBOLD OPTICS GLC series H.

High performance technology for glass coatings.

LEYBOLD OPTICS GLC series H offers highest flexibility, material and hence the cost of ownership of the coat-
extended production capacity, accuracy and high-per- er. By reducing the gap down to 30 mm, the amount of
formance process results. With its advanced concepts wasted target material can be lowered significantly com-
for minimizing costs, LEYBOLD OPTICS GLC series H pared to the competitor’s solution with a 100 mm gap.
contributes to the economic success of glass manufac-
turing. On top of saving target material, the LEYBOLD OPTICS
GLC series H minimizes the time for cleaning, extends
Advanced gap management the overall campaign time and provides more stable plas-
Managing the gap between two consecutive substrates ma conditions by avoiding large process gas pressure
or batches has a major impact on the utilization of raw fluctuations in the larger gap phases.

Bühler Leybold Optics

advanced gap management
saves target material and
minimizes the necessary
cleaning efforts by reliably
reducing the gap between
LEYBOLD OPTICS coater Competition’s coater
30 mm gap 100 mm gap two consecutive glass panes
down to 30 mm.

wasted target material wasted target material

12 Bühler Leybold Optics large area coating

LEYBOLD OPTICS GLC series H – flexible production range:

5-zone system 3-zone system

Mean Mean
Mechanical Production Product-mix Mechanical Production Product-mix
product-mix product-mix
cycle time capacity capacity cycle time capacity capacity
cycle time cycle time
[sec] p.a. [mm²]* p.a. [mm²]* [sec] p.a. [mm²]* p.a. [mm²]*
[sec]** [sec]**

LEYBOLD 20 12.6 21.6 12.2 60 4.2 61.1 4.2

OPTICS GLC
2590H 45 5.6 45.9 5.6 90 2.8 98.4 2.7

LEYBOLD 30 18.0 33.2 16.8 60 9.0 63.4 8.6

OPTICS GLC
3300H 45 12.0 48.4 11.3 90 6.0 155.6 4.2

* Assumptions: 8,040 production hours p.a. / 100 % loading factor / 95 % system uptime / 99 % product yield
** Product-mix: 10 % SLE-Sun / 40 % SLE / 30 % DLE / 20 % TLE

Technical information:

Key figures of the system Options (examples)

– – Annual production capacity: – – symmetric control
Standard 2.8–18 million m² – – Hydraulic chamber lids
– – Fastest mechanical cycle times: 20 sec US size / – – Flexible roller distance
28 sec Jumbo size – – Ion source pretreatment
– – Campaign time: 3–4 weeks as standard – – Top-pumping cathodes
– – Standard coating uniformity: Down to ± 1.0 % – – Service valve
–– Champion results for uniformity: Rotary ± 0.5 % /
Planar ± 0.6 % on Jumbo size Process environment
– – Improved process stability through 850 mm wide
Bühler series – layer stacks compartment design
90 %
– – O utstanding gas separation
UV Visible Near Infrared – – 5 -, 7- or 9-fold trim gas distribution to ideally
80 %
suit your process needs
70 %
– – R educed process gas consumption due to
60 %
3 LE
advanced gas flow
50 % – – Management close to the substrate surface
40 %

30 %
Process results for triple silver Low-E
20 % Transmittance VIS (tempered) 75 %
Neutral appearance
10 % -4 ≤ a* ≤ 0
-5 ≤ b* ≤ -1
0%
0 500 1000

3LE – Triple Low-E LES – Low-E sun

2LE – Double Low-E SC – Solar control
1LE – Single Low-E A-LE – Automotive Low-E

Bühler Leybold Optics large area coating 13

LEYBOLD OPTICS GLC 2000V.
High temperature vertical inline coating.

The ever-growing demand for particle-free coatings on large area substrates, combined with substrate
heating for challenging materials and layer stacks, is setting the pace for future equipment manufactur-
ing. LEYBOLD OPTICS GLC 2000V is a process technology for electrochromic window coatings and any
other application in the field of large area coating.

LEYBOLD OPTICS GLC 2000V from Bühler is the most The revolutionary chamber design with opening tracks
modern inline vertical glass coating machine on the allows for an optimized maintenance procedure and con-
market today. tributes to the overall efficiency of this high-performance
production solution.
Although initially designed for the challenging application
of electrochromic window coatings, this machine perfectly Applications:
fits any application in the field of large area coating. Sub- – – TCO coatings (ITO, AZO, etc.)
strate heating of up to 350 °C with excellent temperature – – SLE/DLE/TLE coatings
uniformity, advanced transport features and high-perfor- – – Low-E sun coatings
mance process environments are just a few of LEYBOLD – – Solar control coatings
OPTICS GLC 2000V’s highlights. – – AR and mirror coatings

Customer benefits – – Vertical chambers can be completely opened

– – Lowest particle impact due to vertical system on a rail track system
configuration – – Fast maintenance due to excellent accessibility
– – Excellent temperature control over the substrate – – Designed for highest precision and the use
surface of special target materials

14 Bühler Leybold Optics large area coating

 LEYBOLD OPTICS GLC 2000V

Technical information:

Key figures of the system – – Up to five positions for optical measuring

– – Substrate size (length/width): 3.21 m / 2.0 m over the glass width
– – Substrate temperature: Up to 350 °C on the
substrate Process environment
– – Standard coating uniformity: Down to ± 1.5 % – – Unique cathode lid design for excellent
accessibility and easy maintenance
Options (examples) – – Contact-free magnetic carrier guiding on top
– – Thermoscanner for complete substrate – – Adjustable conductance tunnel width
temperature mapping
– – Carrier for multiple small substrates

Bühler Leybold Optics large area coating 15

LEYBOLD OPTICS GLC series V.
Unique tilted design for challenging processes.

This flexible vertical inline sputter coater is specially designed for upright or +/- 7° tilted operation and
substrate heating up to 350 °C. The LEYBOLD OPTICS GLC series V is a technical milestone for challeng-
ing processes like transparent conductive oxides for electronic or optical applications. The system is
the first choice for high-performance low-particle impact production with excellent coating layer quality.

LEYBOLD OPTICS GLC series V from Bühler is a versa- retain dust from potentially hazardous sputter material
tile inline coating machine for all vertical sputter process- from emitting into the production facility.
es. The tilted design option is extremely beneficial when
it comes to reducing particle impact or even for utiliz- The LEYBOLD OPTICS GLC series V family, ranging from
ing gravity to hold a substrate in a 7° tilted carrier during 400V to the 1700V, is suitable for all TCO and metal coat-
process. ings.

The carrier can be designed to hold multiple small sub- Applications:

strates, like smartphone displays, or single substrates – – Anti-reflective coatings
with a size of up to 1,400 x 1,400 mm². The system can – – TCO coatings
be equipped with a housed carrier return track to avoid – – Touch panel products
particle impact from the surrounding atmosphere or to

Customer benefits –– Low particle impact on the substrate

– – Versatile platform for a broad range of thanks to 7° tilted design
substrate sizes –– Optional housed carrier

16 Bühler Leybold Optics large area coating

LEYBOLD OPTICS
GLC 1400V

Technical information:

Key figures of the system Options

– – Individual cathode length: 400 to 1,700 mm – – Optional substrate pretreatment: Linear ion source
– – Substrate sizes: From 300 x 300 mm² – – Multiple substrates carrier design
up to 1,400 x 1,400 mm²
– – Substrate thickness: Depending on carrier design Process environment
– – Coating technology: DC planar move-target / – – Carrier design straight upward, +7° or -7° tilted
MF rotary cathodes – – Hinged cathodes for easy and fast maintenance
– – Substrate heating: Up to 350 °C on the substrate
– – TCO materials: ITO, AZO and many more
– – Single glass carrier design

Bühler Leybold Optics large area coating 17

LEYBOLD OPTICS DIS series V.
A powerful solution for all display applications.

Highest target utilization, lowest particle yield, and a straightforward way of exchanging the targets:
LEYBOLD OPTICS DIS series V is Bühler’s production solution for the display industry. The system can
process large substrates in sizes of up to Gen 10 (2.88 m x 3.13 m). Depending on the requirements, a
contact-free transport system is available, using magnetic linear motor drives. Excellent quality of the
coating layers is a key benefit of the LEYBOLD OPTICS DIS series V.

LEYBOLD OPTICS DIS series V initial design is rooted footprint, as the return track can also be equipped with
deeply in the display industry, where particle impact is cathodes and heaters. These unique features make this
making the difference. With a one-sided load and unload production solution a smart choice for every vertical in-
module and a carrier rotation module at the end of the line sputter application that requires substrate heating
system, this machine is perfectly designed for clean-room and excellent process results, like TCO or carbon coatings.
applications, as the LEYBOLD OPTICS DIS series V can
be set up in a gray room, accessing the clean room only Applications:
with its loading module. – – AR coatings for LCD products
– – ITO coatings for color filters
Another major advantage of this approach is the folded – – Touch panel products
design of the machine, which allows for an optimized

Customer benefits – – Flexible multi-chamber tool

– – Excellent target utilization – – Easy and fast maintenance
– – Lowest particle contamination – – Optimized target exchange
– – High production capacity – – Optimized footprint

18 Bühler Leybold Optics large area coating

LEYBOLD OPTICS
DIS 2000V

Technical information:

Key figures of the system Options

– – Flexible mechanical cycle time: – – Planar cathodes with extended utilization
Starting from 22 sec by moving target technology
– – Substrate sizes: Gen 5 up to Gen 10 – – Magnetic linear motor for reduced particle
– – Substrate thickness: 0.4– 5.0 mm impact during transport
– – Coating technology: DC planar move-target /
MF rotary cathodes Process environment
– – Substrate heating: Up to 350° C on the substrate – – Multi-zone heating elements for optimized
– – Optional substrate pretreatment: Linear ion source temperature uniformity
– – TCO materials: ITO, AZO and many more – – Separate gas distribution zones
– – Hinged cathodes for easy maintenance

Bühler Leybold Optics large area coating 19

LEYBOLD OPTICS GLC series H lab.
Flexible solutions and excellent quality.

Cost efficiency, excellent quality of the coating layers, and an outstanding process versatility are the key
features of this R&D lab-coater concept. The chosen target width of 878 mm is a balanced measure between
R&D process development and the transferability of the results onto the large scale.

The transferability of research and development results LEYBOLD OPTICS GLC series H lab is a dedicated large
to large-scale production is the key for business success. area coating R&D system with a geometry perfectly bal-
anced between material economics and process result
Bühler Leybold Optics delivers equipment for substrate transferability.
sizes ranging from as small as eye glasses up to sub-
strate sizes of 39.6 m². For research & development re- Applications
quirements, Bühler offers solutions that help to master – – R&D tool for multiple processes in architectural
the challenge of scaling up processes from small equip- and automotive glass
ment to production scale systems. – – Low-E/AR/color filter coatings
– – Co-sputtering for new material combinations

Customer benefits – – Substrate heating for challenging coating processes

– – Highest cost efficiency and materials
– – Flexible layer stack through multi-path concept – – Ion source for substrate pretreatment
– – Material mixing by means of co-sputtering (e.g. for acrylic substrates)
with variable ratio

20 Bühler Leybold Optics large area coating

 Leybold Optics GLC series H lab

Technical information:

Key figures of the system Options

– – Substrate length: 1,000 mm –– Ion beam source for substrate etching and deposition
– – Substrate width: 500 mm – – Optical inline measurement device
– – Substrate thickness: 3 –19 mm – – Active gas separation
– – Special thickness: 0.2 –3.0 mm with
carrier plate Process environment
–– Uniformity: +/- 1 % in center area – – Substrate heating up to 250 °C
of 400 x 400 mm² – – Hot sputter position

Bühler Leybold Optics large area coating 21

Bühler upgrades, retrofits and services.
Field-proven state-of-the-art design.

As a partner of the industry, Bühler Leybold Optics is committed to delivering the best solution for the
customer. Sometimes this is not a new coater, but an intelligent upgrade that utilizes your existing coat-
ing solution and reshapes it to be capable of satisfying today’s process requirements.

Bühler offers all process-related services, such as: Customers can rely on the extensive process know-how
– – L ayer stacks for the different fields of of Bühler experts and the group’s global presence in
large area coatings more than 140 countries. 90 affiliates and branch offices
– – D evelopment of new layer stacks according worldwide make Bühler available to its customers when-
to specific customer requests ever needed.
– – S imulation support
(optical, mechanical, thermal and magnetic properties)
– – Process start-up at customer site Customer benefits
– – Low initial investment for upgrades and retrofits
– – Proven solutions for glass coating machines
– – Improved quality and throughput of retrofitted
production systems

Global presence of Bühler

NorTH ameriCa EUROPE AsiA

3 Manufacturing sites 11 Manufacturing sites 9 Manufacturing sites

10 Sales and service sites 43 Sales and service sites 38 Sales and service sites

SOUTH ameriCa Middle East & AFRICA

2 Manufacturing sites 2 Manufacturing sites

11 Sales and service sites 17 Sales and service sites

22 Bühler Leybold Optics large area coating

Bühler services ensure that the systems will remain productive and operate reliably in the long term.

Bühler Leybold Optics large area coating 23

 B ÜHLE R FU 12345 de Apr il 2015 2000 DF

Bühler Alzenau GmbH

Siemensstrasse 88
D-63755 Alzenau
Germany
T + 49 (0) 6023 500-0
F + 49 (0) 6023 500-150
[email protected]
www.buhlergroup.com