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Mems Ass - Ques

This document contains 5 assignments related to the subject of Micro Electro Mechanical Systems (MEMS). It provides a list of questions for each assignment covering topics such as torsional deflection, stress-strain relations, micro actuators, sensor types, MEMS fabrication processes, materials used in MEMS, and applications of technologies like piezoelectric sensors and micromirrors. The assignments are for a 7th semester Electrical and Electronics Engineering student studying MEMS at T.J.S. Engineering College in Chennai, India.

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geetha
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154 views

Mems Ass - Ques

This document contains 5 assignments related to the subject of Micro Electro Mechanical Systems (MEMS). It provides a list of questions for each assignment covering topics such as torsional deflection, stress-strain relations, micro actuators, sensor types, MEMS fabrication processes, materials used in MEMS, and applications of technologies like piezoelectric sensors and micromirrors. The assignments are for a 7th semester Electrical and Electronics Engineering student studying MEMS at T.J.S. Engineering College in Chennai, India.

Uploaded by

geetha
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOCX, PDF, TXT or read online on Scribd
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T.J.S.

ENGINEERING COLLEGE
TJS Nagar, Kavaraipettai, Chennai 601206
DEPARTMENT OF ELECTRICAL AND ELECTRONICS
ENGINEERING
ASSIGNMENT QUESTION

Staff Name GEETHA.V Designation Asst. Prof


Subject Name MICRO ELECTRO Subject Code
EE6007
MECHANICAL SYSTEM
Sem/Year VII/IV Branch/ Section EEE

ASSIGNMENT-1

1. Discuss on Torsional deflection


2. Give the relation between stress and strain in brief with relevant diagram.
3. Explain the Torsional deflection
4. Illustrate the functional relationship between the actuating element and the
transduction unit in a Micro actuator.
5. Describe the energy domains of sensors and actuators.
6. Give short notes on diffusion process used in MEMS industry

ASSIGNMENT-2

1. Explain the working of Electrostatic rotary micro motor with neat diagram
2. Explain about comb drive device
3. Explain about thermal actuator
4. Describe the pull in effect of parallel plate actuators.
5. With suitable diagram, explain the working principle of parallel plate capacitor and
the equilibrium position of electrostatic actuator under bias.
6. SMA

ASSIGNMENT-3

1. Discuss about the properties of the materials used in the fabrication of piezoelectric
sensors.
2. Demonstrate the working and fabrication process of surface micro machined
piezoresistive pressure sensor.
3. Examine the need of flow rate sensor. Demonstrate the working and fabrication
process of piezoelectric flow rate sensor.
4. Explain the working principle of tactile sensor array with neat diagram.
5. Stress in flexural cantilevers.

ASSIGNMENT-4

1. Describe about the rules of anisotropic etching in Complex Structures.


2. Explain about material selection criterion for two layer process.
3. Summarize the steps involved in LIGA process with relevant diagrams.
4. Explain in detail about surface micromachining cantilever beam.
5. Compare and contrast first pass and second pass of micro motor fabrication process.
TJSEC/EEE/MEMS/AP
ASSIGNMENT-5

1. Explain in detail about PDMS with case study.


2. Discuss about the Optical MEMS from micromirrors to complex systems.
3. Analyze the fabrication steps in Parylene surface micro machined pressure sensor.
4. Explain how micromirror technology is applied in scanning electron micrograph.
5. Examine the top and cross-sectional view of Parylene surface micro machined
membrane with integrated metal resistors.

FACULTY HOD PRINCIPAL

TJSEC/EEE/MEMS/AP

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