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Mems Descriptive Question and Answers Jntu Anantapur

The document discusses Microelectromechanical systems (MEMS) and microfabrication techniques. It contains the following: 1. Questions about the advantages of miniaturization, integrated circuit fabrication, block diagrams of MEMS microsensors, definitions of MEMS, evaluations and comparisons of microelectronics and microsystems, micromachining, chemical vapor deposition, wet and dry etching, chemical etch stops, surface micromachining, definitions of sensors and actuators, and micro accelerometers. 2. Descriptions of micromachining as the microfabrication techniques used to produce MEMS and microsystems products like microsensors and actuators. Chemical vapor deposition is explained with

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403 views

Mems Descriptive Question and Answers Jntu Anantapur

The document discusses Microelectromechanical systems (MEMS) and microfabrication techniques. It contains the following: 1. Questions about the advantages of miniaturization, integrated circuit fabrication, block diagrams of MEMS microsensors, definitions of MEMS, evaluations and comparisons of microelectronics and microsystems, micromachining, chemical vapor deposition, wet and dry etching, chemical etch stops, surface micromachining, definitions of sensors and actuators, and micro accelerometers. 2. Descriptions of micromachining as the microfabrication techniques used to produce MEMS and microsystems products like microsensors and actuators. Chemical vapor deposition is explained with

Uploaded by

Sai kiran
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as DOCX, PDF, TXT or read online on Scribd
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III B.

Tech - I Semester – Mid Term Examinations- I – September - 2017

Sub: MEMS & Microsystems Branch: ECE

Time: 90 Mints ( DESCRIPTIVE SCHEM OF EVOLUTION ) Max. Marks: 30

HALL TICKET NO:

1 (a) List any four advantages of Miniaturization

Ans: (i) Small systems tend to move or stop more quickly due to low mechanical inertia. It
is thus is ideal for precision movement and for rapid actuation
(ii)Miniaturized systems encounter less thermal distortion and mechanical vibration due to
low mass.
(iii) Miniaturized devices are particularly suited for biomedical and aerospace applications
due to their minute sizes and weight
(iv) Less material requirements mean low cost of production and transportation
[2 MARKS]

(b) (i) Explain IC fabrication with neat sketch ? [6


MARKS]

Ans:
(ii) Draw the block diagram for MEMS as a Micro sensor [2 MARKS]

Ans:

2 (a) Define MEMS

Ans: MEMS :Micro Eletro Mechanical System.Any engineering system that performs electical and
mechanical with components in micrometers is a MEMS (1 µm=(1/10) of human hair = 0.001mm)

(OR)

Micro-electromechanical systems (MEMS) is a process technology used to create tiny integrated


devices or systems that combine mechanical and electrical components. They are fabricated
using integrated circuit (IC) batch processing techniques and can range in size from a few
micrometers to millimetres. These devices (or systems) have the ability to sense, control and
actuate on the micro scale, and generate effects on the macro scale. [2 MARKS]
(b) (i) Evaluation of MEMS [4 MARKS]

(ii) Comparison of microelectronics and Microsystems [4 MARKS]


3 (a) What do you mean by micromachining?

Ans: The micro fabrication techniques are process related. In micromachining how
these processes can be used either individually or an integrated nature in the manufacture of
mems and Microsystems products such as micro sensors, accelerometers and actuators. The
techniques used to produce these products are called micromachining. [2 MARKS]

(b) Explain chemical vapour deposition with neat diagrams [8 MARKS]


4 (a) Comparison between wet etching and dry etching [2 MARKS]
(b) (i)Explain chemical etch stop techniques [4 MARKS]

(ii)Explain surface micromaching [4 MARKS]


5 (a) Define Sensor and Actuator [2 MARKS]

Sensor

A device that responds to a physical stimulus such as thermal energy electromagnetic energy,
acoustic energy, pressure, magnetism, or motion by producing a signal usually electrical.
Actuator

A mechanism that puts something into automatic action.

(b) Explain Micro accelerometers [8 MARKS]

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