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X-Ray Lithography: Dr. Gargi Raina VIT 2011

X-ray lithography uses X-rays to transfer geometric patterns onto substrates. An X-ray mask contains patterns made of materials with different absorption coefficients. Errors can occur from X-ray shadowing during the transfer process. The absorption coefficient of a material depends on its density, atomic number, and the wavelength of X-rays used.

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29 views3 pages

X-Ray Lithography: Dr. Gargi Raina VIT 2011

X-ray lithography uses X-rays to transfer geometric patterns onto substrates. An X-ray mask contains patterns made of materials with different absorption coefficients. Errors can occur from X-ray shadowing during the transfer process. The absorption coefficient of a material depends on its density, atomic number, and the wavelength of X-rays used.

Uploaded by

Govarthanan
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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X-Ray Lithography

Dr. Gargi Raina VIT 2011


Structure of X-ray Mask

X-Ray Shadowing errors

Dr. Gargi Raina VIT 2011


X-ray Absorption of materials

Absorption Coefficient ∝ ρΖ4λ3

where ρ is density of material


Z is Atomic Number
λ is range of wavelengths

Dr. Gargi Raina VIT 2011

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