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Manipal University Jaipur: Department of Mechanical Engineering

This document provides details about an introductory course on Micro Electro Mechanical Systems (MEMS) including the course code, semester, faculty, topics to be covered, and lecture plan. Over the course of 55 lectures, students will learn about the basic concepts, design, fabrication processes, and applications of MEMS. Key topics include scaling laws, microfabrication techniques like lithography and etching, electronics and sensors in MEMS, microactuation methods, metrology tools, microrobotics, microfluidics, and hands-on software exercises using Comsol. The goal is to introduce students to the multidisciplinary field of MEMS.

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Arjit Goswami
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61 views

Manipal University Jaipur: Department of Mechanical Engineering

This document provides details about an introductory course on Micro Electro Mechanical Systems (MEMS) including the course code, semester, faculty, topics to be covered, and lecture plan. Over the course of 55 lectures, students will learn about the basic concepts, design, fabrication processes, and applications of MEMS. Key topics include scaling laws, microfabrication techniques like lithography and etching, electronics and sensors in MEMS, microactuation methods, metrology tools, microrobotics, microfluidics, and hands-on software exercises using Comsol. The goal is to introduce students to the multidisciplinary field of MEMS.

Uploaded by

Arjit Goswami
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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MANIPAL UNIVERSITY JAIPUR

School of Automobile, Mechanical and Mechatronics

DEPARTMENT OF MECHANICAL ENGINEERING


Course Name: Introduction to Micro Electro Mechanical Systems
Course Code: ME1552
Program & Semester: Mechanical Engineering III year/ V semester
Number of Contact Hours: 4/week
Faculty (s): Dr. (Prof.) N.N. Sharma
Ms. Priyanshu Sharma
Course Coordinator: Dr. (Prof.) N.N. Sharma
Lecture Plan:
Topics to be covered
S. No.

Introduction: Need of MEMS, Historical developments, Advantages of miniaturization,


L1-L2
Examples and their explanations, difference between VLSI and MEMS,
Basic Concepts of MEMS Design and Fabrication: Example of Dielectrophrosis, system on
L3-L6 a chip, next generation MEMS, Top to Down technology, Micromachining- surface, bulk and
LIGA (introduction), Material in MEMS
Scaling Laws: Scaling in Geometry, Rigid body dynamics, Electrostatic forces, Paschen
L7-L9
Effect, Electromagnetic forces, Fluid Mechanics and in Heat transfer
L10 QUIZ NO 1
Microfabrication Processes I: Sand to wafer, Ckralski method, Float Zone method, Polishing
L11-L13
and finishing of wafer, Heat balance in CZ method.
Microfabrication Processes II: Wafer level processing: RCA cleaning, Wafer identification,
Silicon crystallography, Material in MEMS, Wafer level processing, oxidation(wet and dry),
L14-L24 DG model, doping, ion implantation, thin film deposition, PVD, CVD, Epitxy, thick film
deposition, lithography, itching, DRIE, Hstops, LIGA
CASE STUDIES,
L25 QUIZ NO 2
L26-L28 Electronics in MEMS: diodes and transistors
Microactuatars: Electrostatic, piezoelectric, thermal(shape memory alloys) chemical
L29-L35 Microsensors: Methods in mechanical microsensors, microaccelerometer, micropressure
sensors , microgyroscope,
Metrology in MEMS: Scanning electron microscopy, scanning tunnel microscopy, atomic
L36-L38
force microscopy
Microrobots: Introduction, definition, classification, drive principles, piezo-impact drive
L39-L41
actuation, piezo and electromagnetic based actuation
Microfluidics: Definition, Advantages, Dimensionless numbers, Models, Micro fluidic
L42-L48
pumping, Electrokinetic driven flows, electroosmosis, electrophoresis, Dielectrophrosis
L49-L55 Software: Comsol- learning and hands-on exercise.

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