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herbertmg
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You are on page 1/ 15

LIS344AL

MEMS inertial sensor


3-axis ultracompact linear accelerometer

Features
■ Single voltage supply operation
■ ±3.5g full-scale
■ Output voltage, offset and sensitivity are
ratiometric to the supply voltage
■ Factory trimmed device sensitivity and offset LGA 16 (4x4x1.5mm)

■ Embedded self test


■ RoHS/ECOPACK® compliant The LIS344AL is capable of measuring
■ High shock survivability (10000g) accelerations over a maximum bandwidth of
2.0kHz. The device bandwidth may be reduced by
using external capacitances. A self-test capability
Description allows the user to check the functioning of the
The LIS344AL is an ultra compact consumer low- system.
power three-axis linear accelerometer that The LIS344AL is available in Land Grid Array
includes a sensing element and an IC interface package (LGA) and it is guarantee to operate over
able to take the information from the sensing an extended temperature range of -40°C to
element and to provide an analog signal to the +85°C.
external world.
The LIS344AL belongs to a family of products
The sensing element, capable of detecting the suitable for a variety of applications:
acceleration, is manufactured using a dedicated
– Mobile terminals
process developed by ST to produce inertial
sensors and actuators in silicon. – Gaming and virtual reality input devices
– Antitheft systems and inertial navigation
The IC interface is manufactured using a CMOS
– Appliance and robotics.
process that allows high level of integration to
design a dedicated circuit which is trimmed to
better match the sensing element characteristics.

Table 1. Device summary


Order code Temp range, ° C Package Packing

LIS344AL -40°C to +85°C LGA-16 Tray


LIS344ALTR -40°C to +85°C LGA-16 Tape & Reel

December 2007 Rev 1 1/15


www.st.com 15
Content LIS344AL

Content

1 Block diagram and pins description . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5


1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2 Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 7


2.1 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.3 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.4 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3 Functionality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.1 Sensing element . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2 IC Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.3 Factory calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4 Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.1 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4.2 Output response vs. orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

5 Package Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

2/15
LIS344AL List of figures

List of figures

Figure 1. Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5


Figure 2. Pin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Figure 3. LIS344AL electrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Figure 4. Output response vs. orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Figure 5. LGA 16: mechanical data & package dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

3/15
List of tables LIS344AL

List of tables

Table 1. Device summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1


Table 2. Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Table 3. Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Table 4. Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Table 5. Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Table 6. Filter capacitor selection, Cload (x,y,z), . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Table 7. Document revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4/15
LIS344AL Block diagram and pins description

1 Block diagram and pins description

1.1 Block diagram


Figure 1. Block diagram

X+ Routx VoutX
CHARGE S/H
Y+
AMPLIFIER
Z+
Routy
a MUX DEMUX S/H
VoutY

Z-
Y-
X- Routz VoutZ
S/H

SELF TEST REFERENCE TRIMMING CIRCUIT CLOCK

1.2 Pin description


Figure 2. Pin connection

Z
NC
Vdd
Res
NC

Pin 1 Indicator
13 16
1
VoutX 12 1 NC
NC ST
VoutY GND
Y
X NC 9 4 NC
8 5
VoutZ
GND
GND
GND

(TOP VIEW)
DIRECTIONS OF THE (BOTTOM VIEW)
DETECTABLE
ACCELERATIONS

5/15
Block diagram and pins description LIS344AL

Table 2. Pin description


Pin # Pin name Function

1 NC Not connected
2 ST Self Test (Logic 0: normal mode; Logic 1: Self-test mode)
3 GND 0V supply
4 NC Not connected
5 GND 0V supply
6 GND 0V supply
7 GND 0V supply
8 VoutZ Output voltage Z channel
9 NC Not connected
10 VoutY Output voltage Y channel
11 NC Not connected
12 VoutX Output voltage X channel
13 NC Not connected
14 Vdd Power supply
15 Res Connect to Vdd
16 NC Not connected

6/15
LIS344AL Mechanical and electrical specifications

2 Mechanical and electrical specifications

2.1 Mechanical characteristics


All the parameters are specified @ Vdd =3.0 V, T = 25°C unless otherwise noted

Table 3. Mechanical characteristics(1)


Symbol Parameter Test condition Min. Typ.(2) Max. Unit

Ar Acceleration range(3) ±3.5 g


0.100*Vdd - 0.100*Vdd+
So Sensitivity(5) 0.100*Vdd V/g
10% 10%
Sensitivity change vs
SoDr Delta from +25°C 0.01 %/°C
temperature
Voff Zero-g level(4) T = 25°C Vdd/2-15% Vdd/2 Vdd/2+15% V
Zero-g level change vs
OffDr Delta from +25°C ±0.7 mg/°C
temperature
NL Non linearity(5) Best fit straight line ±0.6 % FS
CrossAx Cross-axis(6) ±2 %
Acceleration noise
An Vdd=3.0 V 275 µg/ Hz
density
T = 25°C
Vdd=3.0 V 84 mV
X axis
T = 25°C
Self test output voltage
Vt Vdd=3.0 V 84 mV
change(7)
Y axis
T = 25°C
Vdd=3.0 V -84 mV
Z axis
Sensing element
Fres X, Y, Z axis 2.0 KHz
resonant frequency(8)
Operating temperature
Top -40 +85 °C
range
Wh Product weight 0.040 gram
1. The product is factory calibrated at 3.0 V. The operational power supply range is from 2.7 V to 3.3 V. Voff, So and Vt
parameters will vary with supply voltage.
2. Typical specifications are not guaranteed.
3. Guaranteed by wafer level test and measurement of initial offset and sensitivity.
4. Zero-g level and sensitivity are essentially ratiometric to supply voltage at the calibration level ±8%.
5. Guaranteed by design.
6. Contribution to the measuring output of an inclination/acceleration along any perpendicular axis.
7. “Self test output voltage change” is defined as Vout(Vst=Logic1)-Vout(Vst=Logic0).
8. Minimum resonance frequency Fres=2.0 KHz. Sensor bandwidth=1/(2*π*32 kΩ*Cload), with Cload>2.5 nF.

7/15
Mechanical and electrical specifications LIS344AL

2.2 Electrical characteristics


All the parameters are specified @ Vdd =3.0 V, T=25°C unless otherwise noted

Table 4. Electrical characteristics(1)


Symbol Parameter Test condition Min. Typ.(2) Max. Unit

Vdd Supply voltage 2.7 3.0 3.3 V


Idd Supply current 0.69 mA
Logic 0 level 0 0.8 V
Vst Self Test Input
Logic 1 level 2.0 Vdd V
Output impedance
Rout of VoutX, VoutY, 32 KΩ
VoutZ
Capacitive load
drive(3)
Cload 2.5 nF
for VoutX, VoutY,
VoutZ
1. The product is factory calibrated at 3.0 V.
2. Typical specifications are not guaranteed.
3. Minimum resonance frequency Fres=2 KHz. Device bandwidth=1/(2*π*32 kΩ*Cload), with Cload>2.5 nF.

2.3 Absolute maximum ratings


Stresses above those listed as “Absolute maximum ratings” may cause permanent damage
to the device. This is a stress rating only and functional operation of the device under these
conditions is not implied. Exposure to maximum rating conditions for extended periods may
affect device reliability.

Table 5. Absolute maximum ratings


Symbol Ratings Maximum value Unit

Vdd Supply voltage -0.3 to 6 V


Vin Input voltage on any control pin (ST) -0.3 to Vdd +0.3 V
3000g for 0.5 ms
APOW Acceleration (any axis, powered, Vdd=3.0 V)
10000g for 0.1 ms
3000g for 0.5 ms
AUNP Acceleration (any axis, not powered)
10000g for 0.1 ms
TSTG Storage temperature range -40 to +125 °C
2 (HBM) KV
ESD Electrostatic discharge protection 1.5 (CDM) KV
200 (MM) V

8/15
LIS344AL Mechanical and electrical specifications

This is a Mechanical Shock sensitive device, improper handling can cause permanent
damages to the part
This is an ESD sensitive device, improper handling can cause permanent damages to
the part

2.4 Terminology
Sensitivity describes the gain of the sensor and can be determined by applying 1g
acceleration to it. As the sensor can measure DC accelerations this can be done easily by
pointing the axis of interest towards the center of the Earth, note the output value, rotate the
sensor by 180 degrees (point to the sky) and note the output value again thus applying ±1g
acceleration to the sensor. Subtracting the larger output value from the smaller one, and
dividing the result by 2, will give the actual sensitivity of the sensor. This value changes very
little over temperature (see sensitivity change vs. temperature) and also very little over time.
The Sensitivity tolerance describes the range of Sensitivities of a large population of
sensors.
Zero-g level describes the actual output signal if there is no acceleration present. A sensor
in a steady state on a horizontal surface will measure 0g in X axis and 0g in Y axis whereas
the Z axis will measure 1g. The output is ideally for a 3.0V powered sensor Vdd/2 = 1500
mV. A deviation from ideal 0-g level (1500 mV in this case) is called Zero-g offset. Offset of
precise MEMS sensors is to some extend a result of stress to the sensor and therefore the
offset can slightly change after mounting the sensor onto a printed circuit board or exposing
it to extensive mechanical stress. Offset changes little over temperature - see “Zero-g level
change vs. temperature” - the Zero-g level of an individual sensor is very stable over lifetime.
The Zero-g level tolerance describes the range of Zero-g levels of a population of sensors.
Self test allows to test the mechanical and electric part of the sensor, allowing the seismic
mass to be moved by means of an electrostatic test-force. The Self Test function is off when
the ST pin is connected to GND. When the ST pin is tied at Vdd an actuation force is applied
to the sensor, simulating a definite input acceleration. In this case the sensor outputs will
exhibit a voltage change in their DC levels which is depending on the Supply Voltage
through the device sensitivity. When ST is activated, the device output level is given by the
algebraic sum of the signals produced by the acceleration acting on the sensor and by the
electrostatic test-force. If the output signals change within the amplitude specified inside
Table 3, then the sensor is working properly and the parameters of the interface chip are
within the defined specification.
Output impedance describes the resistor inside the output stage of each channel. This
resistor is part of a filter consisting of an external capacitor of at least 2.5 nF and the internal
resistor. Due to the resistor level, only small inexpensive external capacitors are needed to
generate low corner frequencies. When interfacing with an ADC it is important to use high
input impedance input circuitries to avoid measurement errors. Note that the minimum load
capacitance forms a corner frequency close to the resonance frequency of the sensor. In
general the smallest possible bandwidth for a particular application should be chosen to get
the best results.

9/15
Functionality LIS344AL

3 Functionality

The LIS344AL is an ultra compact low-power, analog output three-axis linear accelerometer
packaged in a LGA package. The complete device includes a sensing element and an IC
interface able to take the information from the sensing element and to provide an analog
signal to the external world.

3.1 Sensing element


A proprietary process is used to create a surface micro-machined accelerometer. The
technology allows to carry out suspended silicon structures which are attached to the
substrate in a few points called anchors and are free to move in the direction of the sensed
acceleration. To be compatible with the traditional packaging techniques a cap is placed on
top of the sensing element to avoid blocking the moving parts during the moulding phase of
the plastic encapsulation.
When an acceleration is applied to the sensor the proof mass displaces from its nominal
position, causing an imbalance in the capacitive half-bridge. This imbalance is measured
using charge integration in response to a voltage pulse applied to the sense capacitor.
At steady state the nominal value of the capacitors are few pF and when an acceleration is
applied the maximum variation of the capacitive load is in fF range.

3.2 IC Interface
The complete signal processing uses a fully differential structure, while the final stage
converts the differential signal into a single-ended one to be compatible with the external
world.
The first stage is a low-noise capacitive amplifier that implements a Correlated Double
Sampling (CDS) at its output to cancel the offset and the 1/f noise. The produced signal is
then sent to three different S&Hs, one for each channel, and made available to the outside.
All the analog parameters (output offset voltage and sensitivity) are ratiometric to the
voltage supply. Increasing or decreasing the voltage supply, the sensitivity and the offset will
increase or decrease linearly. The feature provides the cancellation of the error related to
the voltage supply along an analog to digital conversion chain.

3.3 Factory calibration


The IC interface is factory calibrated for sensitivity (So) and Zero-g level (Voff).
The trimming values are stored inside the device by a non volatile structure. Any time the
device is turned on, the trimming parameters are downloaded into the registers to be
employed during the normal operation. This allows the user to employ the device without
further calibration.

10/15
LIS344AL Application hints

4 Application hints

Figure 3. LIS344AL electrical connection

GND GND Vdd


100nF 10µF
Z

1 Pin 1 indicator
16 15 14 13
Optional
1 12
Vout x
ST Cload X
2 LIS344AL 11
Y
(top view) Optional
3 10
Vout y X
Cload Y
4 9
(TOP VIEW)
5 6 7 8
DIRECTIONS OF THE
Optional DETECTABLE
GND ACCELERATIONS
Vout z
Cload Z

Digital signals

Power supply decoupling capacitors (100 nF ceramic or polyester + 10 µF Aluminum)


should be placed as near as possible to the device (common design practice).
The LIS344AL allows to band limit VoutX, VoutY and VoutZ through the use of external
capacitors. The recommended frequency range spans from DC up to 2.0 kHz. In particular,
capacitors are added at output VoutX, VoutY, VoutZ pins to implement low-pass filtering for
antialiasing and noise reduction. The equation for the cut-off frequency (ft) of the external
filters is in this case:
1
f t = -------------------------------------------------------------------------
2π ⋅ R out ⋅ C load ( x, y, z )
Taking into account that the internal filtering resistor (Rout) has a nominal value equal to 32
kΩ, the equation for the external filter cut-off frequency may be simplified as follows:
5µF
f t = --------------------------------------- [ Hz ]
C load ( x, y, z )

The tolerance of the internal resistor can vary typically of ±20% within its nominal value of 32
kΩ; thus the cut-off frequency will vary accordingly. A minimum capacitance of 2.5 nF for
Cload(x, y, z) is required.

11/15
Application hints LIS344AL

Table 6. Filter capacitor selection, Cload (x,y,z),


Cut-off frequency Capacitor value

1 Hz 5 µF
10 Hz 0.5 µF
20 Hz 250 nF
50 Hz 100 nF
100 Hz 50 nF
200 Hz 25 nF
500 Hz 10 nF

4.1 Soldering information


The LGA package is compliant with the ECOPACK, RoHs and “Green” standard.
It is qualified for soldering heat resistance according to JEDEC J-STD-020C.
Leave “Pin 1 Indicator” unconnected during soldering.
Land pattern and soldering recommendations are available at www.st.com/mems.

4.2 Output response vs. orientation


Figure 4. Output response vs. orientation
X=1.50V (0g)
Y=1.80V (+1g)
Z=1.50V (0g)

Bottom
X=1.50V (0g)
Y=1.50V (0g)
X=1.80V (+1g) X=1.20V (-1g) Top Z=1.20V (-1g)
Y=1.50V (0g) Y=1.50V (0g)
Z=1.50V (0g) Z=1.50V (0g) Top
X=1.50V (0g)
Y=1.50V (0g)
Bottom Z=1.80V (+1g)

X=1.50V (0g)
Y=1.20V (-1g)
Z=1.50V (0g) Earth’s Surface

Figure 4 shows output voltage values of LIS344AL when powered at 3.0 V.

12/15
LIS344AL Package Information

5 Package Information

In order to meet environmental requirements, ST offers these devices in ECOPACK®


packages. These packages have a lead-free second level interconnect. The category of
second Level Interconnect is marked on the package and on the inner box label, in
compliance with JEDEC Standard JESD97. The maximum ratings related to soldering
conditions are also marked on the inner box label. ECOPACK is an ST trademark.
ECOPACK specifications are available at: www.st.com.

Figure 5. LGA 16: mechanical data & package dimensions

Dimensions

Ref.
mm inch Outline and
Min. Typ. Max. Min. Typ. Max. mechanical data
A1 1.500 1.600 0.0591 0.0630
A2 1.330 0.0524
A3 0.160 0.200 0.240 0.0063 0.0079 0.0094
d 0.300 0.0118
D1 3.850 4.000 4.150 0.1516 0.1575 0.1634
E1 3.850 4.000 4.150 0.1516 0.1575 0.1634
L2 1.950 0.0768
M 0.100 0.0039
N1 0.650 0.0256
N2 0.980 0.0386
P1 1.750 0.0689
P2 1.525 0.0600
LGA16L (4x4x1.5mm)
T1 0.400 0.0157
T2 0.300 0.0118
Land Grid Array Package
k 0.050 0.0020

7974136D

13/15
Revision history LIS344AL

6 Revision history

Table 7. Document revision history


Date Revision Changes

17-Dec-2007 1 Initial release.

14/15
LIS344AL

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