TM4000Plus/ TM4000 Specifications Hitachi Tabletop Microscope

■ Specifications
Item TM4000Plus         TM4000
■Optional accessories
Camera navigation system
TM4000 / TM4000 Plus
Magnifications ×10 - ×100,000 (Photographic magnification＊1) Energy Dispersive X-ray Spectrometer (EDS)
×25 - ×250,000 (Monitor display magnification＊2) Three-dimensional image display/measurement function Hitachi map 3D
Accelerating voltage 5 kV、10 kV、15 kV
■Installation conditions
Image signal Backscattered electron Backscattered electron
Item               Description
Secondary electron
Mix（Backscattered electron＋ Room temperature 15-30 ℃ (△t=within ±2.5℃ / h or less) WE STAND BY YOU.
Secondary electron） Humidity - 70% RH (no condensation)
Power supply Singlep hase AC100-240 V
Vacuum mode BSE: Conductor/Standard/ BSE：Standard/
(main unit) (fluctuations in voltage: ±10%）
  Charge-up reduction Chaege-up reduction

TM4000 Series
SE: Standard/ ＊Another power souce for PC is required.

 Charge-up reduction
■Installation layout（Main unit：Motorized stage）
Mix: Standard/
  Charge-up reduction 270
Power supply
Image mode (BSE) Normal / Shadow 1/ Shadow 2/ TOPO Diaphragm
single phase

144
AC100-240 V（±10%）
pump
Sample stage traverse X：40 mm, Y：35 mm 50/60 Hz,500 VA
Grouding 100 ohm or less
Maximum sample size 80 mm (diameter), 50 mm (thickness)
Electron gun Pre-centered cartridge tungsten filament
Signal detection High-Sensitivity 4-segment High-Sensitivity 4-segment
system BSE detector BSE detector
High-Sensitivity Low-
Main unit PC
Vacuum SE detector (UVD)

800 or greater
Display

614
Auto image- Auto start, Auto focus, Auto brightness
adjustment function
2,560 × 1,920 pixels, 1,280 × 960 pixels, 640 × 480 pixels Keyboard
image data saving
Image format BMP、TIFF、JPEG
Data display Micron marker, micron value, magnification,
date and time, image number and comment,

210
WD (Working Distance), accelerating voltage, 200 330
or greater
vacuum mode, image signal, image mode
1,200 or greater
Evacuation system Turbo molecular pump: 67 L /s x 1 unit
(vacuum pump) Diaphragm pump: 20 L / min x 1 unit unit ： mm
Recommended table size：1,200×800 mm or more
withstand load：100 kg or more
Operation help Raster rotation, Magnification presets (3 steps),
functions Image shift (±50 μm ＠ WD6.0 mm） ＊1 Defined at photo size of 127 mm×95 mm（4"×5" picture size）
＊2 Defined at display size of 317 mm×238 mm
Safety functions Over-current protection function, built-in ELCB ＊Please make room for more than 200 mm to the left side of a main unit
 and put it the closest to the center position of the table.
■Required PC and monitor specifications ＊A table with caster is not suitable to put a main unit of TM4000 Series on.
＊Please put a diaphragm pump under the table.
Item Specifications ＊Periodical maintenance is required for this apparatus.
＊Powercables, earth terminal and table should be prepared by users.
OS Windows® 10（64bit） ＊TM4000 Series is not approved as a medical device.
CPU Intel®processor, Number of cores:4, ＊Dedicated mentors, teachers who received the operation training of the instrument are required
 at compulsory schools.
Clocl Speed:3.0 GHz(equivalent or higher) ＊It is advisable not to install or relocate the instrument by yourselves.
＊When relocating the system, please contact in advance the sales department that handles your
Memory device HDD, DVD-ROM Drive
 account or a maintenance service company designated by Hitachi.
Display resolution 1,920 × 1,080 pixels ＊Screen shows simulated image.
＊Windows® is a resistered trademark of U.S.Microsoft Corp. in U.S.A. and other countries.
＊Intel Ⓡ is a resistered trademark of Intel Corp. or its affilated companies in the United States
■Size/weight  and/or other countries.
Item Description
Main unit (motorized stage) 330 (width) × 614 (depth) × 547 (height), 52kg
Main unit (manual stage) 330 (width) × 617 (depth) × 547 (height), 52kg
Diaphragm pump 144 (width) × 270 (depth) × 216 (height), 5.5kg ＊This logo is the trademark of Hitachi High-Technologies Corporation throughout the world.

Notice: For correct operation, follow the instruction manual when using the instrument.
Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest
technologies and products for our customers.
Copyright (C) Hitachi High-Technologies Corporation 2017 All rights reserved.

/global/em/

For technical consultation before purchase, please contact:[email protected]

HTD-E249 2017.8
C OMPACT ,P OWERFUL ,I NNOVATIVE ! TM4000 Series

The Future
of Tabletop
Microscopes
is Here!
The T M4000
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fe ature s innovation
inn ovati on
and cutting - e d g e te chn
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Hitachhi TM
M4000
4000 and T M4000Plus .

Easy and intuitive operation for data acquisition,

reporting , and ever ything in between.

Cutting-edge electron optics

for high-image resolution and qualit
quality.

Compact and efficient design

allows installation almost anywher
anywhere .
＊Screen include a image processed by option.
 Quick and
Qu ck a Easy
nd E asy Observe samples and acquire images in just mi nutes! Collect data and generate reports quickly and effectively.

The TM4000 Series provides a solution for SEM users to easily obtain high-quality data and quickly (thickness) can be accomodated. Environmentally friendly and efficient vacuum system allows for short
generate reports for a very efficient workflow. Sample sizes of up to 80 mm (diameter) and 50 mm pump-down times and high sample throughput.

Generate reports easily

Data collection to report generation

1 Mount sample No need to sputter coat or use vapor deposition 2 Initiate observation
on stage
with "Report Creator"
In typical systems, this would be required for
analysis of non-conductive materials

1 Click the start button 2 Auto start procedure is activated 3 Image displayed at low magnificaiton
for easy and quick navigation
Sample:Watch
Sample:Watch

Simply select images and a template

Start to finish in just under 3 minutes to generate customized reports

Automation, Observation, and Elemental Analysis Easy operation with use of Camera Navi.*
Imaging switch Easy
with just and click operation
Automatically collect multiple data types with a single click! Optical image helps you navigate to the region
of interest and supports observation with the MAP function
Mixed images
Backscattered electron image Secondary electron image (backscattered electron images
(compositional information) (surface morphology) ※ ＋secondary electron images)

＊Optional

Sample:Watch

Elemental
analysis
Easy Maintenance
Rapid acquisition of element maps
Easy
maintenance Equipped with oil free vacuum pump and
replaceable cartridge filament.
MIX Au Al Ni

Pre-centered cartridge
Equipped with diaphragm filament makes it
Sample:Watch pumps that need no oil. simple to replace.

3 ＊The secondary electron image can only be observed in TM4000Plus.

4
 The TM4000Plus advances the EM field with
TM4000 Series Highly versitile design TM4000Plus
TM4000P us the unmatched ability to observe SE,BSE,
and mixed images under low vacuum conditions.

The TM4000 Series gives users the freedom to optimize various operating conditions including beam
condition (accelerating voltage), acquired electron signal type, magnification, and more.
The Superior High-Sensitivity Low-Vacuum SE Detector（TM4000Plus）
The TM4000Plus equips the high-sensitivity low-vacuum SE detector.
Therefore, an image of SE information is possible to obtain due to detecting the excited light.

5 kV Accelerating voltage 10 kV Accelerating voltage 15 kV Accelerating voltage

Principle
OBJ. Lens Primary electron beam
Low-vacuum
SE detector
BSE
Detector

bias ele
electrode

Exciting
HV Gas molecules
light
Positive Ion
G as
m i ficati on
A mpl
-e

SE

BSE
Image signal: Secondary electron Sample: Image signal: Mix Sample: Rat bronchus Image signal: Mix Sample: Ceramic Sample
Magnification: 3,000x Copper crystals Magnification: 7,000x Magnification: 500x

Image signal: Backscattered electron Sample: Image signal: Backscattered electron Sample: Image signal: Backscattered electron Sample:
Magnification: 10,000x Magnetic head Magnification: 10,000x Ball grid array (BGA) Magnification: 15,000x Mast cell Image signal: Secondary electron Sample: Image signal: Secondary electron Sample:
Magnification: 1,000x Factional film Magnification: 3,000x Powder medicine

Detection Signals X -ra ys

(element information Pr imar y electr o n
used in EDS) beam
It is possible to observe multiple signals in TM4000 Series. Backscattered
electron
Backscattered electron image (BSE) (compositional Secondary electron
information)
: Provides compositional information (surface morphology)

Secondary electron image (SE)

Image signal: Mix Sample: Resin foam Image signal: Secondary electron Sample: Image signal: Mix Sample:Honey bee
Magnification: 200x Magnification: 10,000x Bacillariophyta Magnification: 25x
: Provides surface rich information In typical instruments,
the secondary electron image can only be acquired under
high-vacuum conditions but with the TM4000Plus,
Accelerating Voltage the observation of SE information under low vacuum is
easily achieved. Electron
scattering area S ample
The TM4000 Series features three beam conditions to chose from depending on the information
desired from the sample. Differences in image appearance by changing accelerating voltage to 5 kV,
BSE SE
10 kV, and 15 kV are shown below."

Accelerating Voltage 5 kV 10 kV 15 kV

Resolution Low high

Image information Surface internal

Backscattered
electron signal Low High
Magnification: 500x Magnification: 500x Sample: Sticky notes

5 6
 Options
Op t io
ons
Three-dimensional models allow Options
Opt ons
Simple operation and large detection
height measurements area enables high-speed data acquisition.

The TM4000 Series offers multiple EDS systems to choose from based on application and budget.
Two classes of detectors are available: a low-cost 10-mm 2 detector and a large-sized 30-mm 2
3D construction
and measurements Hitachi map 3D detector, both of which are compact design and do not require LN2.

A 3-dimensional model can be generated without sample tilting

using 4-segment backscattered electron detector.
Quantax 75
Simple, intuitive
operation
Detection area:
2
30 mm

・ High-speed colorized X-ray mapping

with easy operation.
・Local spectra observation at specified locations
made simple.
・Hypermap function for spot analysis, line analysis,
and mapping results in a single acquisition.

Sample configuration in combination ＊ Screen shows simulated image

with a TM4000 series instrument

Dual mode display

Multilateral data visualization is made possible
by displaying simultaneous result of spot
analysis or line analysis while performing
elemental mapping in real time.

Hitachi map 3D software overview 

specification

■ Hitachi map 3D functions ■ PC installation requirements

Spot analysis Live deconvolution to
Item          Description Item      Description
®
Spectrum displayed in real time, allowing
separate overlapping elements
Import function Automatic select and read function of four-elements image data Windows versions Windows 7, 8, .x 10 (x64 or x32)

Measurement Depth accuracy less than ±20％ (reference) Processor Quadcore processor easy visualization of elemental composition Allows spectra with overlapping peaks to be separated
performance Measurement performance varies depending on calibration accuracy,
RAM memory 8 GB or more for a targeted ROI. and visually mapped in real time.
the condition/type of specimen, the observation mode,
and the observation condition. Graphic board Open GL 2.0 or Direct 3D 9.0c
Detectable angle range ±50°(reference)
HDD free space 800 MB or more
Measurement Section profile display extracted between any points ■ Si
function Other 1 free USB port
on the three-dimensional image ■W
Distance of X and Y, length and angle measurements between Windows ® is a resistered trademark of U.S.Microsoft Corp.
two points, Surface area and Volume in U.S.A. and other countries.
Distance of X,Y and Z, length and many other measurements
Si Si
between 2 points specified on section profile
Simple profile roughness and surface roughness measurement
Baseline offset (straight, curve), leveling and multiple offset
Cutting surface, Color contour line, Bird's-eye view and pseudo color display
Layout, Template and image composition from multiple images functions

Three-dimensional Rotation, zoom-in and multiple rendering process

display function Animation record function of observation screen

Output function Report, Image: RDF, RTF, PNG, JPG, GIF, TIF, BMP, EMF W W
Three-dimension image/movie: SUR, 3MF, STL, WRL, TXT, X3D/WMV, AVI

7 8
 Options
Op t io
ons Simple operation and large detection area enables high-speed data acquisition.

Aztec series
Quantax75 specification (Made by Oxford Instruments (UK)) AZtecOne specification (Made by Oxford Instruments (UK))

■ Detector ■ Detector
Item                   Description Item            AZtecOne AZtecOneGO
Detector type Silicon drift detector (SDD) Detector type Silicon drift detector (SDD)
・ Icons arranged in order of procedural flow Detector area 30 mm 2
Detection area 30 mm 2
10 mm 2

 make operation easy. Energy resolution 148 eV (Cu-Kα)   Energy resolution 158 eV（Cu-Kα） 151 eV（Cu-Kα）
(Mn-Kα: equivalent of 129 eV or less) (Mn-Kα: equivalent of 137 eV) (Mn-Kα: equivalent of 129 eV)
・ Spectrum-fitting functionality allows easy Detection element B5∼Cf98 Detection element B 5∼U92
 observation of element superposition. Cooling method 2-stage thermoelectric (peltier) cooling Thermal cycle Detector cool down on demand
(without fan and LN₂ free) Cooling method 2-stage thermoelectric
・ The TruMap feature allows elements with Energy channel 4,096 channel (2.5 eV/ch at minimum) Cooling (without fan and LN2 free)
 overlapping peaks to be properly separated ■ Software ■ Software
 and displayed (AZtecOne). Item                   Description Item            AZtecOne AZtecOneGO
Sample configuration in combination ＊ Screen shows simulated image Qualitative analysis Auto / manual Spectrum display Scaling display in horizontal and vertical directions;
with a TM4000 series instrument Quantitative analysis Standardless quantitative analysis, normalized to 100% KLM markers displayed
Analysis mode Object mode (including point, rectangle, ellipse and polygon) Qualitative analysis Auto / manual
Line scan Quantitative analysis Standardless quantitative analysis, normalized to 100%
Hypermap (mapping, spot analysis, line analysis) Image acquisition 2,048×1,536、1,024×768、512×384 1,024×768、512×384
Basic
AZtecOneGO Advanced
AZtecOne Element mapping Maximum map image resolution 1,600x1,200
Rainbow map
Online deconvolution
Element mapping Resolution: select from Resolution: select from
1,024,512, 256, or 128 pixels 256, or 128 pixels
Detectable elements: Up to 80 elements
Report preparation features Templates for printing may be prepared MixMap: 7 or more
Detection area: Detection area: PDF、Microsoft® Word、Excel Line scan Arbitrary line positions and directions may be specified; the color
2 2
1 0 mm 30 mm of line displays for each element may be changed Lines may be
■ Size/weight
superposed on scanning images; line-scan spectrum displays
Item                   Description
Point & ID (Beam control) Number of points that may be selected: over 1,000
Example of mapping analysis High-precision and multifaceted TruMap function
ction
tii Detector 100(width) × 45(depth) ×120(height) mm, 1.45 kg
Rectangular, elliptical, or freehand-drawn regions
In addition to standard spectrum acquisition, the The TruMap feature allows multi-element spectra to be ■ Installation conditions of arbitrary sizes may be specified
TruMap        Yes   No
system allows spectra for user-specified regions to be properly separated and background subtracted in real Item                   Description
Assistance Operating guide functionality
Power supply Single-phase AC, 100/240 V 50/60 Hz
reconstructed from mapping data. The selected region time, resulting in a precise elemental map with no Data management Managed separately for each project
Report preparation Templates for printing may be prepared. Can produce printed
may be defined as a point, rectangle, ellipse, or region image contamination due to overlapping peaks. features versions of spectra, data-acquisition conditions, comments,
bound by a user-drawn freehand curve. and other content
Mg K（1.26KeV） As L（1.30KeV）
Spectra may be exported to BMP, TIFF, JPEG, text formats
Typical Map Reports in Microsoft® Word 2013 format may be exported

■ Size/weight
Item                   Description
Detector 145 (width) × 150 (depth) × 200 (height) mm, 2.7 kg
Analyzer unit 290 (width) × 260 (depth) × 330 (height) mm, 10 kg

■ Installation conditions
Item                   Description
TruMap Power supply (AZtecOne) Single-phase AC, 100-240 V, 50/60 Hz, 400 VA

AZtecEnergy specification for TM3030 series (Made by Oxford Instruments (UK))

Sample: ■ Detector ■ Software
Sulfide ore
Item                   Description Item                   Description
Item       
Detector type Silicon drift detector (SDD) Spectrum display Scaling display in horizontal and vertical directions;
Detection area 30 mm 2 KLM markers displayed
Energy resolution 158 eV（Cu-Kα） Qualitative analysis Auto / manual
(Mn-Kα: equivalent of 137 eV) Quantitative analysis Standardless quantitative analysis,
Detection element B5∼U 92 normalized to 100%
Image acquisition 64-8,192 pixels

AZtec Energy Miniscope Edition

Multi-featured Thermal cycle Detector cool down on demand

analysis
Detection area: Cooling method 2-stage thermoelectric (peltier) cooling Element mapping Resolution: 64-4,096 pixels
2
30 mm (without fan and LN2 free) Number of detectable elements: Up to 80
MixMap: 7 or more possible
■ Size/weight
Line scan Arbitrary line positions and directions may be specified;
The AZtec Energy system offers advanced analytical functionality and flexible configurations with Item                   Description
Item        the color of line displays for each element may be changed
d particle
ability to automate analysis via a monitorized stage. The Aztec Energy enables wide-area mapping and ti l analysis
l i Detector 145 (width) × 150(depth) × 200 (height) mm, 2.7 kg Lines may be superposed on scanning images;
Analyzer unit 290 (width) × 260 (depth) × 330 (height) mm, 1.0 kg line-scan spectrum displays
Point & ID (Beam control) Number of points that may be selected: over 1,000
Wide-area mapping option: AZtec Large Area Mapping Rectangular, elliptical, or freehand-drawn regions
of arbitrary sizes may be specified
The Aztec Mapping software automatically acquires data for multiple specified regions to produce a single combined set of mapping information.
Report preparation Templates for printing may be prepared. Can produce printed
features versions of spectra, data-acquisition conditions, comments,
and other content Spectra may be exported to BMP, TIFF,
JPEG, text formats Reports in Microsoft® Word 2013
format may be exported
Options TruMap (TruLine), AZtec Large Area Mapping, AZtec Feature, etc,
* For more information, please contact your Hitachi vendor.
Magnification: ■ Installation conditions
7 view 400× per view segment Item                   Description
Item       
segments Power supply (AZtecEnergy) Single-phase AC, 100-240 V, 50/60 Hz, 1.5 kVA
Sample: Cross section
(2.2 mm) of resin case for
electronic component

48 view segments (17.6 mm)

9 10