Doc. No. & Rev.

EHS-00007 R8
Hard copy of this document, if not marked “CONTROLLED” in red,
is by definition uncontrolled and may be out of date.

Standard Operating Procedure

for
Confined Space Entry

REVISION
Rev DCN No. Change Summary Release DCN Document
No. Date Initiator Owner
8 DCN1666 Updated document for clarity. Clarified 2-8-19 D. T.
contractor’s responsibility to provide rescue Greenlee Diamond
team or service.

Prior revision history, if applicable, is available from the Document Control Office.

SUNY Poly Confidential

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 Entry Procedures for Confined Spaces EHS-00007 R8

1. PURPOSE
1.1 The purpose of this procedure is to establish minimum rules to protect the
health and safety of SUNY Polytechnic Institute (SUNY Poly) employees,
staff, students, tenants or contractors required to enter confined spaces to
work, clean, repair, inspect or perform other duties.

1.2 This procedure is not intended to provide the basis for establishing more
detailed entry and work procedures for permit required confined spaces.
The procedures used will depend on the scope of work, size of space,
material and equipment to be used in the space.

1.3 Although this procedure describes specific safety steps to be taken for
entry into permit required confined spaces, it is not intended to prevent the
use of any additional measures that may be deemed necessary for a
particular situation. Each situation must be reviewed on an individual basis
by the responsible Supervisor.

1.4 This procedure is not intended to list the confined spaces that are
associated with tenant owned and operated equipment or tools.

2. SCOPE
2.1 This program establishes the minimum requirements for entering confined
spaces at the SUNY Poly sites including, but not limited to, the Albany
campus and Kiernan Plaza. Tenant employees, contractors and sub-
contractors may comply with their own organization’s program provided
that it meets and/or exceeds the minimum requirements set forth in this
procedure.

2.2 This program applies to SUNY Poly site employees, tenant employees,
contractors and sub-contractors who may be entering confined spaces on,
but not limited to, the Albany campus and Kiernan Plaza site.

2.3 SUNY Poly employees, tenant employees, contractors and sub-

contractors will be notified of the requirement to follow this program and
are required to comply with the restrictions and limitations imposed upon
them by SUNY Poly during confined space activities.

3. DEFINITIONS
3.1 A confined space is defined by OSHA as a space that:

3.1.1 Is large enough for a worker to enter and perform work;

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3.1.2 Has limited or restricted entrances or exits; and

3.1.3 Is not designed for continuous employee occupancy.

3.2 A permit required confined space (PRCS) is a confined space that, in

addition to the above, poses any one or more of the following hazards:

3.2.1 Potentially hazardous atmosphere;

3.2.2 Potential engulfment of a worker;

3.2.3 An internal configuration, such as a tapered floor, which could cause a

worker to become trapped.

3.2.4 All manholes on the SUNY Poly Albany campus and Kiernan Plaza
property are PRCS.

3.3 A potentially hazardous atmosphere is defined as any atmosphere that

could cause death, incapacitation, injury, or acute illness, impairment of
ability to self rescue, and would include any of the following:

3.3.1 An atmosphere with a build-up of flammable gases or vapors in excess of

10% of the LEL;

3.3.2 Excessive airborne combustible dust;

3.3.3 An oxygen deficient (less than 19.5%) or an oxygen enriched (greater than
23.5%) atmosphere;

3.3.4 Atmospheres containing acutely toxic contaminants at a concentration

level greater than the permissible exposure limit (PEL) or the threshold
limit value (TLV).

4. PERSONNEL ROLES AND RESPONSIBILITES

Personnel who are involved with routine permit confined space entry will
perform one of the three roles. These roles are:

 Authorized Entrant(s) - Person(s) physically entering the confined

space

 Attendant - Person(s) monitoring on the outside

 Entry Supervisor - Person supervising activities which require

confined space entry

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4.1 Authorized Entrants are personnel who enter permit spaces to perform
work. In addition to safely performing the assigned task within the permit
space, their responsibilities are to:

4.1.1 Know the hazards associated with the permit space and their effects,

4.1.2 Properly use the equipment required for entry,

4.1.3 Maintain a continuous means of communication with the attendant,

4.1.4 Alert the attendant in the event of an emergency, and

4.1.5 Evacuate the space if an emergency occurs.

4.2 Attendants are personnel stationed outside the permit space to monitor
the conditions in and around the space and the authorized entrants. They
additionally coordinate rescue efforts in the event of an emergency. Their
specific responsibilities are to:

4.2.1 Know the hazards associated with the permit space and their effects,

4.2.2 Maintain an accurate account of the authorized entrants,

4.2.3 Remain at their assigned station until relieved by another attendant or until
the permit space entry is complete and authorized entrants have exited
the space,

4.2.4 Monitor conditions in and around the permit space,

4.2.5 Contact the entry supervisor who will summon rescue and applicable
emergency services in the event of an emergency,

4.2.6 Perform continuous monitoring of the space,

4.2.7 Perform non-entry rescue procedures, and

4.2.8 Perform appropriate measures to prevent unauthorized personnel from

entering the permit space.

4.3 Entry Supervisors are personnel who supervise activities, which require
confined space entry. Their responsibilities are to:

4.3.1 Know the hazards associated with the permit and their effects,

4.3.2 Verify that the safeguards required by the permit have been implemented,

4.3.3 Terminate entry and cancel the permit when the entry operations have
been completed or a condition arises that is not allowed under the entry
permit,

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4.3.4 Remove personnel who are not authorized to enter the permit space
during entry operations, and

4.3.5 Determine, when appropriate, that the entry operation is performed

consistent with the requirements of the permit space entry procedures and
that acceptable entry conditions are maintained.

5. HAZARDS
5.1 The potential hazards which may be encountered in permit required
confined spaces are the following:

5.1.1 A lack of or excess oxygen, which may cause asphyxiation or increased

fire hazard.

5.1.2 Flammable gases or liquids in excess of their lower explosive limit (LEL).

5.1.3 Toxic gases, vapors and liquids in excess of their threshold limit values
(TLV's).

5.1.4 Injury caused by direct contact with corrosive or dermatitis producing

chemicals.

5.1.5 Physical hazards, such as slipping and falling.

5.1.6 Electric shock from portable lights and tools.

5.1.7 Inability to readily get into or out of the space due to the location and/or
size of openings.

6. ENTRY REQUIREMENTS
6.1 All individuals associated with a permit required confined space entry shall
be properly trained in safe entry and rescue procedures, use of protective
equipment, and instructed as to the hazards they may encounter.

6.2 The entry supervisor is responsible for assuring that the workers are
properly instructed as stated above for each job requiring confined space
entry.

6.3 Entry into permit required confined spaces shall be by written entry permit
(EHS-00007-F1), issued and approved by ERT/EHS. The purpose of the
entry permit is to ensure that a checklist of precautions has been reviewed
prior to entry. This permit describes:

 The work to be done

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 Time and date

 Nature of space
 Inspection checklist
 Protective and rescue equipment requirements
 Approvals for entry

6.4 This permit is an authorization, and approval in writing certifying that all
existing hazards have been evaluated and necessary protective measures
have been taken to ensure the safety of the entrant.

6.5 The space shall be emptied, flushed or otherwise purged of flammable,

injurious or incapacitating materials as much as possible.

6.6 The confined space shall be isolated by:

6.6.1 A hard barricade able to withstand at least 200lbs of lateral force.

6.6.2 Disconnecting, blinding, or blocking off any piping, lines or vents which
may convey flammable, injurious or incapacitating materials into the
space, and

6.6.3 De-energizing and locking or tagging out any machinery, mixers or

agitators.

6.6.4 All items above which have been disconnected, blanked, capped, blocked
off or turned off, shall be identified with a Lock Out/Tag Out "DANGER' tag
which shall not be removed until the entrants are out of the space and the
work complete.

6.7 The air in the space shall be tested for contaminants listed below. The
space shall be tested prior to entry and periodically while an entrant is in
the space:

6.7.1 Flammable or combustible vapors using a combustible gas meter.

6.7.2 Oxygen deficiency or excess using a properly calibrated oxygen meter.

6.7.3 Toxic or corrosive contaminants using a suitable meter. The choice of test
will depend on whether the space contained any particular corrosive or
toxic chemicals or whether any such chemical will be used during entry
operations, such as cleaning.

6.7.4 Tests shall be performed by a qualified person who has been trained in
proper sampling methods, correct interpretation or results, and proper
calibration and limitations of test instruments.

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6.7.5 ERT/EHS will issue a Confined Space Permit sign (signed and dated)
when this permit has been issued. This sign will be posted for the duration
of the work. The purpose of this signage is for passerby’s to be aware the
area is a Confined Space (entry by permit only) and for other employees
to know this permit has been approved and signed off by ERT/EHS.

6.7.5.1 Upon completion of the work, the contractor or supervisor will either return
this sign to the NFE Security Control Center or ERT/EHS. This will notify
ERT/EHS the work is complete and the time will be noted on the permit.

7. VENTILATION
7.1 Proper and adequate ventilation of the space with safe respirable air shall
be required if one or more of the following conditions exist or could exist
during the course of the work:

7.1.1 Flammable or combustible vapors are present above 10% of the LEL.

7.1.2 Combustible dusts are present.

7.1.3 Toxic or corrosive contaminants are present above the TLV.

7.1.4 The oxygen concentration is below 19.5% or above 21.5%.

7.1.5 Toxic or other contaminants which:

7.1.5.1 Have no rated TLV, or

7.1.5.2 Cannot be accurately determined to be present with field testing

instruments.

7.2 Oxygen shall not be used to ventilate a confined space.

7.3 Equipment used for ventilation shall be suitable for the atmosphere which
is being ventilated. When flammable contaminants are present, only
equipment designed for use in hazardous locations shall be employed.
Sources of ignition shall be eliminated.

8. PROTECTIVE EQUIPMENT REQUIREMENTS

8.1 Appropriate protective equipment for eyes, ears, head, hands, feet and
body shall be provided to the entrant prior to entry.

8.2 If necessary, the appropriate respiratory equipment shall be provided by

the entrant’s organization, provided they are listed under their
organization’s Respiratory Protection Program.

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8.3 The use of approved respiratory protection with separate air supply shall
be required when one or more of the following conditions exists, or could
exist during confined space operations:

8.3.1 Flammable or combustible vapors greater than 10% of the LEL.

8.3.2 Oxygen content below 19.5% or above 21.5%.

8.3.3 Toxic or corrosive contaminant above the TLV.

8.4 Approved safety belts or harnesses and safety lines shall be provided.
Lines shall be at least 1/2 inch in diameter, 2,000 pound test, and long
enough to be secured outside the entry opening.

8.5 Approved rescue equipment shall be pre-positioned near the entrance

prior to the entry into the confined space. This is to cut down on the
response time should a rescue be required.

8.6 An effective means of communication between employees inside a

confined space and a standby employee ("buddy") shall be provided and
used whenever:

8.6.1 The use of respiratory equipment is required, or

8.6.2 The employees inside the space are out of sight of the "buddy".

8.7 In spaces which require lighting and there exists the potential for
flammable vapors above the LEL, lighting shall be explosion proof and
rate for hazardous locations.

9. PERSONNEL REQUIREMENTS
9.1 Only trained personnel shall be utilized for confined space operations.

9.2 The "buddy system" shall be employed whenever an employee is inside a

permit required confined space. At least one employee shall stand by
outside the space to provide assistance in case of emergency. This
person shall remain in visual contact or have direct communication with
the employee inside the space and have no other duties except to provide
assistance in case of an emergency.

9.3 The permit required confined space work team shall have at least one
person who is trained in CPR. This person must remain outside the space
and be immediately available.

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10. SPECIAL REQUIREMENTS FOR PERMIT REQUIRED

CONFINED SPACE OPERATIONS
10.1 If the concentration of flammables or combustibles exceeds 20% of the
LEL, entry into a confined space shall "NOT" be made and existing
operations shall be terminated if this condition occurs during the entry.
Workers shall leave the space immediately. Approved ventilation shall be
used to lower the concentration to 10% LEL and the source eliminated.

10.2 Sources of ignition are prohibited within the confined space, except where
hot work is required. A separate "Hot Work Permit (EHS-00029-F1)" is
required whenever the use of flame, arc or spark, such as welding or
cutting, is necessary.

10.3 Whenever oxygen consuming equipment, such as torches are used, or

welding is performed, adequate local exhaust venting shall be provided.

10.4 When required, the standby employee, as well as the employee in the
space, shall be equipped with appropriate respiratory protective
apparatus, including an independent source of breathing air. The
equipment must be available for immediate use.

10.5 Periodic testing of air in confined spaces shall be performed with sufficient
frequency to assure that dangerous air contaminants and/or oxygen
deficiency (or excess) does not occur during confined space operations.

11. TRAINING
11.1 Authorized Entrants, Attendants, Entry Supervisors, and rescue team or
service must receive formal training concerning their roles and
responsibilities. Formal training ensures that they have acquired the
understanding, knowledge, and skills necessary to perform their assigned
duties. Training for each authorized person is provided:

11.1.1 Before personnel are assigned duties outlined in this plan,

11.1.2 When their assigned duties change, and/or

11.1.3 When there is a change in a permit space that creates hazards of which
affected personnel have not been informed.

11.2 Each Authorized Entrant, Attendant and Entry Supervisor receives

refresher training annually in confined space entry procedures. ERT
members shall also receive annual training on the use, care, maintenance
and inspection of Personal Fall Arrest System.

11.3 Training records are maintained by the EHS Department.

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12. RESCUE AND EMERGENCY SERVICES

12.1 Contractors are responsible for providing rescue and emergency services
and equipment for its employees confined space entry work that meets
regulations such as 1910.146.

12.2 SUNY Poly ERT will provide rescue and emergency services for SUNY
Poly staff confined space entry contingent on a 10 (ten) day advance
notification, duration of the work and availability of ERT staffing.

12.3 A method of communication such as telephone or radio must be in place

between the Attendant and Entry Supervisor during a confined space
entry. If multiple confined space entries are performed, sufficient
emergency personnel must be available to perform simultaneous rescues
at each entry location.

12.4 Requests for emergency services must be made by telephone or two-way

radio directly to the Entry Supervisor. The Entry Supervisor will then
contact Security at 78600 or 518-437-8600 who will contact the ERT for
assistance.

12.5 In accordance with OSHA regulations (29 CFR 1910.146), an emergency

rescue drill, including emergency responders and authorized personnel,
will be performed annually at the facility.

12.6 During this annual training the ERT are evaluated in terms of proficiency
with rescue-related tasks and equipment, and if they function appropriately
while rescuing entrants from a permit-required confined space.

13. CONTRACTOR ENTRY COORDINATION

13.1 The SUNY Poly ERT or EHS Department shall coordinate entry into a
permit-required confined space, which may involve Authorized Entrants
from more than one contractor. The ERT or EHS Department must
understand the hazards of the work to be performed by all Authorized
Entrants and ensure that the activities of one contractor or sub-contractor
do not endanger employees of another.

13.2 Before a contractor begins work in a confined space, the site project
coordinator will:

13.2.1 Inform the contractor that the workplace contains permit-required confined
spaces and that entry into such spaces is allowed only through
compliance with a Confined Space Entry Program meeting the
requirements of 29 CFR 1910.146;

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13.2.2 Review and approve the contractor’s Confined Space Entry Program;

13.2.3 Ensure that contractor personnel have received the required confined
space entry training as required by 29 CFR 1910.146.

13.2.4 Submit training certifications for both the entrant and attendant at the
Work Permit Meeting, along with the Work Authorization Permit and
Confined Space Permit.

13.2.5 Ensure the contractor monitors the space prior to and during entry, and
completes a confined space entry permit form EHS-00007-F1;

14. ASSOCIATED DOCUMENTS

14.1 EHS-00007-F1 - Confined Space Entry Permit

15. APPENDIX
Appendix A – SUNY Poly Confined Space Inventory

Appendix B – SUNY Poly Confined Space Sign

Appendix C – Procedure for Entering the Automated Material Handling

System (AMHS) Confined Spaces

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Appendix A – SUNY Poly Confined Space Inventory

Prior to entry to any of the spaces listed below, a Confined Space Entry Permit EHS-00007-F1
and an air survey must be completed. No one shall access these spaces without both a permit
and a survey.

EHS No. Equipment ID * Building/Room/Area PRCS Description

BGY1 N/A Bulk Gas Yard N2 Generator Stacks (LINDE)
BGY2 N/A Bulk Gas Yard N2 Generator Stacks (LINDE)
BGY3 N/A Bulk Gas Yard N2 Generator Stacks (LINDE)
BGY4 N/A Bulk Gas Yard N2 Generator Stacks (LINDE)
BGY5 Underground Trench between SiH4
N/A SiH4/H2 Pad and H2 pad

EHS No. Equipment ID * Building/Room/Area PRCS Description

CB1 CUB-UPW-IONX-3 CUB Polisher A Tank
CB2 CUB-UPW-IONX-4 CUB Polisher B Tank
CB3 CUB-UPW-IONX-2 CUB Spare Polisher Vessel
CB4 CUB UB-108 Waste DI Water Storage w/N2 Blanket
* Treatment/Drum wash Tank 1
CB5 CUB UB-108 Waste DI Water Storage w/N2 Blanket
* Treatment/Drum wash Tank 2
CB6 CUB UB-108 Waste
* Treatment/Drum wash 35% Calcium Chloride Tank
CB7 CUB UB-108 Waste
CAU-03 Treatment/Drum wash 25% Sodium Hydroxide Tank
CB8 CUB UB-108 Waste
SUL-03 Treatment/Drum wash 50% Sulfuric Acid Tank
CB9 * CUB FW Influent Tank
CB10 * CUB Reaction Tank 1
CB11 * CUB Reaction Tank 2
CB12 * CUB Reaction Tank 3
CB13 * CUB Reaction Tank 4
CB14 * CUB UPW Tank
CB15 T-701 CUB RO Permeate Tank
CB16 * CUB AW Influent Tank
CB17 * CUB AW Off Spec Tank
CB18 * CUB AW Monitoring Tank
CB19 * CUB pH Adjust Stage 1 Tank
CB20 * CUB pH Adjust Stage 2 Tank
CB21 * CUB Sludge Tank
CB22 * CUB Activated Carbon Filter A Tank
CB23 * CUB Activated Carbon Filter B Tank

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CB24 * CUB Activated Carbon Filter C Tank

CB25 T-801 CUB Raw Water Tank
CB26 * CUB Primary Mixed Bed A Tank
CB27 * CUB Primary Mixed Bed B Tank
CB28 * CUB Primary Mixed Bed C Tank
CB29 * CUB Lead Mixed Bed A Tank
CB30 * CUB Lead Mixed Bed B Tank
CB31 * CUB Lag Mixed Bed A Tank
CB32 * CUB Lag Mixed Bed B Tank
CB33 * CUB (By Column A6) Trench Entrance
CB34 NFX RO Permeate Tank w/N2
* CUB Expansion Blanket
CB35 T-1.1 CUB Expansion Equalization Tank
CB36 T-6.1 CUB Expansion Sludge Tank
CB37 T-2.1 CUB Expansion FW Treatment
CB38 T-3.1 CUB Expansion FW Treatment
CB39 T-4.1 CUB Expansion FW Treatment
CB40 CAU-04 / T-9.1 CUB Expansion 25% Sodium Hydroxide
CB41 T-8.1 CUB Expansion 35% Calcium Chloride
CB42 N/A
CUB UB-110 Trench Entrance
CB43 U-CH-05 CUB Level 2 Chiller
CB44 U-CH-06 CUB Level 2 Chiller
CB45 U-CH-02 CUB Level 2 Chiller
CB46 U-CH-03 CUB Level 2 Chiller
CB47 U-CH-04 CUB Level 2 Chiller
CB48 U-CH-01 CUB Level 2 Chiller
CB49 U-HWB-01 CUB- 201 Boiler Room Boiler
CB50 U-HWB-02 CUB-201 Boiler Room Boiler
CB51 U-HWB-03 CUB-201 Boiler Room Boiler
CB52 * CUB Roof (SE Corner) Strobic Fan 1
CB53 * CUB Roof (SE Corner) Strobic Fan 2

EHS No. Equipment ID * Building/Room/Area PRCS Description

CM1 CESTM Fire Sprinkler Shut-
N/A Off Valve Room Neutralization Pit
CM2 EF-1 CESTM Roof Strobic Fan
CM3 EF-2 CESTM Roof Strobic Fan
CM4 EF-3 CESTM Roof Strobic Fan

EHS No. Equipment ID * Building/Room/Area PRCS Description

ES1 A Electrical Substation Under Transformers Under Main

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Building 13.8K Gear

ES2 Under Transformers Under Main
B Electrical Substation 13.8K Gear

EHS No. Equipment ID * Building/Room/Area PRCS Description

G1 1 CESTM (NWS) Generator (by Fuller Rd)
G2 2 Bulk Gas Yard Generator (CUB)
G3 3 NFSX Generator
G4 4 Bulk Gas Yard Generator (NFC)
G5 5 Bulk Gas Yard Generator (NFN)
G6 6 Jose Marti Drive Generator (NFE)
G7 7 NFX-1 Generator
G8 8 NFX-2 Generator (Data Center)
G9 9 NFX-3 Generator (Data Center)

EHS No. Equipment ID * Building/Room/Area PRCS Description

HPM1 Manhole 2 1- Fire Water Collection
N/A HPM 104 Pit
HPM2 Manhole 3 2 - Fire Water
N/A HPM 104 Collection Pit
HPM3 Manhole 4 3 - Fire Water
N/A HPM 104 Collection Pit
HPM4 Manhole 1 4 - Fire Water Collection
N/A HPM 105A- Solvent Room Pit
HPM5 N/A HPM 105B Manhole 5

EHS No. Equipment ID * Building/Room/Area PRCS Description

C1 NFC UPW Storage UPW Storage Tank
Tank NFC- WWT/N-150 “NFC UPW Storage Tank”
C2 * NFC N-418 Acid Cabinet Scrubber 02
C3 * NFC N-419 Acid Cabinet Scrubber 07
C4 * NFC 3rd Floor Acid Scrubber-04
C5 * NFC 3rd Floor Acid Scrubber-05
C6 * NFC 3rd Floor Base Scrubber-03
C7 HWB 4 NFC N-310B Boiler N-HWB-4
C8 HWB 5 NFC N-310B Boiler N-HWB-5
C9 ET-5 NFC N-310B Red Expansion Tank
C10 N/A NFC N-156 Crawl Space
C11 N/A N-134 Electrical Room Manhole
C12 N/A N-166 Storage Manhole
C13 N-CEF-2 NFC Roof Strobic Fan
C14 N-CEF-3 NFC Roof Strobic Fan
C15 * NFC Roof Solvent Exhaust Scrubber

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(Munters VOC Abatement)

Equipment

EHS No. Equipment ID * Building/Room/Area PRCS Description

E1 NFE 1029- Electrical Room Pressure Expansion Tank
XT-2 Mechanical Room
E2 LEF-1 NFE Roof Strobic Fan
E3 LEF-2 NFE Roof Strobic Fan
E4 LEF-3 NFE Roof Strobic Fan

EHS No. Equipment ID * Building/Room/Area PRCS Description

N1 * NFN DI Water Room Calcium Chloride Tank
N2 DIW-T100 NFN DI Water Room Raw Water Tank
N3 DIW-T102 NFN DI Water Room Filtered Water Tank
N4 T401 NFN DI Water Room Ultra Pure Water Tank T401
N5 T301 NFN DI Water Room Ultra Pure Water Tank DIW T301
N6 T201 NFN DI Water Room Humidification Tank DIW T201
N7 * NFN N-127 DI Water Mixed Bed A
N8 * NFN N-127 DI Water Mixed Bed B
N9 * NFN N-127 DI Water Mixed Bed C
N10 * NFN N-127 DI Water Mixed Bed D
N11 N2-SL-T-01 NFN WWT Level 1 Mixed Sludge Storage Tank
N12 T-01 NFN WWT I Level 1 Fluoride Waste Tank
N13 T-3.1 NFN WWT I Level 1 Effluent Equalization Tank
N14 N2-AW-T-04 NFN WWT I Level 1 1st Stage pH Tank
N15 N2-AW-T-05 NFN WWT I Level 1 2nd Stage pH Tank
N16 N2-AW-T-01 NFN WWT I Level 1 Acid Waste Lift Tank
N17 N2-AW-T03 NFN WWT II Level 2 Emergency Tank
N18 N2-AW-T-02 NFN WWT II Level 2 Equalization Tank
N19 N2-SUL-T-01 NFN WWT II Level 2 50% Sulfuric Acid Tank
N20 N2-CAU-T-01 NFN WWT II Level 2 25% Sodium Hydroxide Tank
N21 NFN WWT L2
Dock NFN WWT II Level 2 Dock Under Hydraulic Lifting Dock Lift
N22 * NFN 135 Electrical Room Manhole
N23 * NFC N-166 Storage Manhole
N24 SA-1 NFN Penthouse Acid Scrubber SA-1
N25 SA-2 NFN Penthouse Acid Scrubber SA-2
N26 SA-3 NFN Penthouse Acid Scrubber SA-3
N27 SC-1 NFN Penthouse Cabinet EXH Scrubber SC-1
N28 SB-1 NFN Penthouse Base Scrubber SB-1
N29 SB-2 NFN Penthouse Base Scrubber SB-2
N30 SEF 1 NFN Low Roof Solvent Exhaust Fan

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(West Side)
N31 NFN Low Roof
SEF 2 (West Side) Solvent Exhaust Fan
N32 N-HWB-1 NFN N-214/N-225 Boiler N-HWB-1
N33 N-HWB-2 NFN N-214/N-225 Boiler N-HWB-2
N34 N-HWB-3 NFN N-214/N-225 Boiler N-HWB-3
N35 ET-5 NFN N-214/N-225 Heating Hot Water Expansion Tank
N36 NFN N-116
N-ET-4 Process Support Room Red Tank (West End)
N37 Entrance A NFN Interstitial NFN AMHS Tunnel (Lean-to) West
N38 Entrance B NFN Interstitial NFN AMHS Tunnel (Lean-to) East
N39 Entrance C NFN Low Roof NFN AMHS Tunnel (Tunnel )
N40 Entrance D NFN Low Roof NFN AMHS Tunnel (Vestibule)

EHS No. Equipment ID * Building/Room/Area PRCS Description

S1 NFS 168 Fire Sprinkler
Shut-Off Valve Trench Entrance
S2 * NFS Roof Strobic Fan 1
S3 * NFS Roof Strobic Fan 2
S4 * NFS Roof Strobic Fan 3
S5 * NFS Roof Strobic Fan 4

EHS No. Equipment ID * Building/Room/Area PRCS Description

SX1 EF-01 NFSX Roof Exhaust Fan
SX2 EF-02 NFSX Roof Exhaust Fan
SX3 EF-03 NFSX Roof Exhaust Fan
SX4 EF-04 NFSX Roof Exhaust Fan

EHS No. Equipment ID * Building/Room/Area PRCS Description

X1 Water Vault NFX (North Side) Square city water vault
X2 NFX (Level 4.5 West)- 502
SCE-1 Mechanical Penthouse Scrubber Cabinet Exhaust
X3 GEF-6 NFX Roof- 501 Strobic Fan
X4 GEF-7 NFX Roof- 501 Strobic Fan
X5 AEF-1 NFX 305- Scrubber Deck Acid Exhaust Fan
X6 AEF-2 NFX 305- Scrubber Deck Acid Exhaust Fan
X7 SA-1A NFX 305- Scrubber Deck Acid Exhaust Scrubber
X8 GEF-1 NFX 311- General Exhaust General Exhaust Fan
X9 GEF-2 NFX 311- General Exhaust General Exhaust Fan
X10 GEF-3 NFX 311- General Exhaust General Exhaust Fan
X11 NFX-UPW-T-1200 NFX 108- UPW Polish UPW Tank with N2 Blanket
X12 X-UPW-1X-1204-A NFX 108- UPW Polish Lead Mixed Bed

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X13 X-UPW-1X-1204-B NFX 108- UPW Polish Lead Mixed Bed

X14 X-UPW-1X-1204-C NFX 108- UPW Polish Lead Mixed Bed
X15 X-UPW-1X-1206-A NFX 108- UPW Polish Lag Mixed Bed
X16 X-UPW-1X-1206-B NFX 108- UPW Polish Lag Mixed Bed
X17 X-UPW-1X-1206-C NFX 108- UPW Polish Lag Mixed Bed
X18 FW-T-5A NFX 130- PCW/Tank Waste Tank
X19 FW-T-5B NFX 130- PCW/Tank Waste Tank
X20 AW-T-6A NFX 130- PCW/Tank Waste Tank
X21 AW-T-6B NFX 130- PCW/Tank Acid Waste Tank
X22 F 1-A NFX 130- PCW/Tank PCW Filter Housing
X23 F 1-B NFX 130- PCW/Tank PCW Filter Housing
X24 NFX 141- Process
PV-T-2 Mechanical PVAC Holding Tank
X25 NFX Level 2 (West Side by
Rm 237- Chemical Mix Access to Dampers and
* Room) Instrumentation

Equipment ID Building/Room/Area EHS Miscellaneous

N-FB-3 NFC Material Lift Chemical Material Lift
N-DB-1 NFN HPM Corridor Chemical Dumbwaiter
N-250 Service Lift (NFN
N-DB-2 WWT Material Lift) Chemical Material Lift
X-FE-2 NFX 136 Chemical Elevator
* TBD- Assigned by Facilities/Equipment Owner
N/A – Equipment ID assignment not required

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Appendix B – SUNY Poly Confined Space Sign

After ERT/EHS signs off on the Confined Space Permit, they will issue this sign
(signed and dated by ERT/EHS) to be posted in the area of the work. Upon
completion of the work, the contractor or supervisor will either return this sign to
the NFE Security Control Center or ERT/EHS. This will notify ERT/EHS the work
is complete and the time will be noted on the permit.

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APPENDIX C

Procedure for Entering the Automated Material Handling System

(AMHS) Confined Spaces

The AMHS system by Muratec is an automated overhead track system that moves
wafers between the NFN and NFX Fabs using rail mounted vehicles (robots) to carry
the FOUPs. This area is treated as a permit required confined space due to the fall
hazard, mechanical hazards, and electrical hazards. Under normal conditions, there are
no atmospheric hazards in this space. This document describes the specific hazards
and procedures for entering these confined spaces to access the AMHS.

C1 DEFINITIONS
Air Doors - Air doors open to allow robots carrying wafers access out of and into the
NFN and NFX cleanroom. There are two sets of air doors in NFN Tunnel and two sets
in NFX (Figure 1).

Figure 1. Air Doors

Air Door Controller: Used to control and reset the air doors. Located in the NFN tunnel
right of entry door along the wall (Figure 2).

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Figure 2. Air Door Controller

Automated Material Handling System (AMHS) – An automated overhead track

system (Muratec) with robot vehicles that carry FOUPs to and from the NFN and NFX
Fabs by crossing into “dirty” spaces via the NFN-NFX link. For working on the AMHS in
NFX, electrical and mechanical hazard must be mitigated, and an elevated work
platform or ladder must be used since the ceiling tiles are not rated to support an
employee’s weight.
In NFN, the AMHS has three separate accessible areas, each with its own hazards
(See Figure 3):

 Lean-to: Opens down to the cleanroom stocker via an opening in the floor with a
16’ drop. Accessible through two access doors (east and west) on NFN 3 rd floor
near freight elevator. A key is needed for lean-to access. Fire doors are located
between the Lean-to and tunnel area.
o Hazards: Fall hazard into stocker, mechanical hazard (e.g., pinch points,
getting struck by robot), electrical hazard
o Required PPE: fall protection gear, hard hats, safety glasses

 Tunnel: Located between the lean-to and vestibule, this area allows access to
the air doors in NFN, and contains the air door controller. The tunnel is accessed
from the NFN roof and is located next to the 3rd floor freight elevator in NFN.
Rooftop is accessed on the 3rd floor north wall, east of the elevator. A key is
needed for roof and room access.

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o Hazards: Mechanical, electrical

o Required PPE: hard hats, safety glasses

 Vestibule: Area where the FOUP-carrying robots enter from the NFN-NFX link.
Fire doors are located between the vestibule and tunnel area. The vestibule is
accessed through the vestibule exterior door via the roof from the 3rd floor of NFN
(next to Lean-to East door). A key is needed for access.
o Hazards: Fall when working 6 feet from the link opening, mechanical,
electrical hazard
o Required PPE: Fall restraint system when working 6 feet from the opening,
hard hats, safety glasses

Figure 3. NFN AMHS Space - North side of NFN 3rd floor

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Automation Stop Flags: Used as safety devices to prevent workers from being struck
by the robot and should be installed in front of and behind area to be worked (Figure 4).
They are stored in NFX and in the Tunnel when not in use.
The flags are installed by:
 Lift Flag
 Rotate it parallel to track
 Insert top into track inner space
 Rotate perpendicular
 Drop into track
 Leave there for duration of needed work.

Figure 4. Automation Stop Flag

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Fire Doors – A door with a fire resistance rating to help reduce the spread of fire or
smoke. Two sets of fire doors are located in NFN and two sets of fire doors are located
in NFX. Resetting the fire doors require fall protection in the NFX ceiling, safety glasses
and hard hats. See Figures 5 and 6.

Figure 5. Fire Doors in NFX Link Area

Figure 6. Fire Doors in NFN Tunnel Area

Graphical User Interface - (GUI): This is the Murata computer interface that posts
Alarms, monitor track status, and can reset most Murata software systems. Operators
and maintenance uses this for feedback on track system status. The locations for these
terminals are at the stockers: GTA02, CTA01, CNA10, and GNA01.

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Robot/Vehicles – Automated carriers that hold MACs/FOUPs at times containing

wafers and transport them along a track system between NFN and NFX Fabs (Figure
7).

Figure 7. Robot or OHV (bump and proximity sensors)

C2. PROCEDURE TO OBTAIN ACCESS TO NFN AMHS

CONFINED SPACES
C2.1 IBM, , or Equipment support EST and Murata FSE to notify each other of
need to access the NFN AMHS. IBM or EST will assist Murata FSE with
AMHS maintenance/recovery activity. Buddy system to be used and
posted signage observed.

C2.2 Go to Security Officer at NFE Security Control Center and request the
“AMHS Murata Confined Space Key Sign-out Sheet” (see last page of this
appendix).

C2.3 If the activities to be performed are listed on that sheet, complete the
information required on the sheet (Date, Name, which activity you are
performing that is listed by number and time the key is signed out). Sign
the key out and proceed to the AMHS access door.

C2.4 If the activity you intend to perform is NOT listed on the “AMHS Murata
Confined Space Key Sign-out Sheet”:

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C2.4.1 And it is a planned work activity, the Confined Space Permit must be
submitted along with the Work Authorization Permit to the morning permit
meetings 3 days prior to the work being performed (Refer to CFM-00004
for full details).

C2.4.2 And it is an emergency/required entry, the requestor (e.g., Murata, EST)

must fill out the Confined Space Entry Permit (EHS-00007-R4) submit the
completed permit to the SUNY Poly Security Officer located in NFE
Security Control Center (in emergencies).

C2.5 Security Officer will notify ERT/EHS of Confined Space Permit who will
meet the requestor at NFE Security Control Center.

C2.6 Sign out the access key for the NFN Lean-To, NFN Vestibule, NFN Tunnel
and NFN roof door.

C2.7 Requestor and ERT/EHS will proceed to the NFN tunnel to review
confined space procedure and safety requirements prior to accessing
area. Once safety requirements are met, ERT/EHS will sign the permit
and requestor may proceed with work. Safety requirements include, but
are not limited to:

 Locking out and tagging out electrical system

 Installing automation stop flags

 Wearing hard hats, safety glasses, and fall protection equipment where
required (always in the Lean-to; and 6 feet from opening in Vestibule).

C2.8 Once completed with task, wipe down and HEPA-vacuum area of work.

C2.9 Return Murata NFN Vestibule, Lean-To, Tunnel and Roof access keys to
SUNY Poly Security Control Center when completed work in these
spaces.

C3. SPECIFIC TASKS & PROCEDURES

Due to mechanical, electrical, and fall hazards, the AMHS NFN Tunnel,
Vestibule, and Lean-to areas have been identified as permit-required
confined spaces. However, for the following tasks, the Tunnel will be
reclassified as a non-permit confined space once the hazards have been
mitigated by personnel (e.g., Murata Service Engineers and ESTs) who
have been trained to work with the Murata AMHS for the tasks identified in
this document.

Any maintenance or activities performed beyond what is described below

(e.g., that require approaching robots or working on live electrical or

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mechanical items on the track/robot system) should be performed by

trained Murata personnel who must adhere to the safety requirements
located in the vendor safety procedures and manuals.

C3.1 Air Door and Stranded Robot Recoveries

TUNNEL

The NFN Tunnel contains electrical and mechanical hazards if in proximity

to the track. These hazards are mitigated by prohibiting the employee
within 3 feet of the track (stay outside the taped area). The long term
solution is to have a proximity sensor/light curtain type device that will shut
down the track if it senses anything in proximity. For recovering air doors
or robot, the worker should not have to cross into the path of the robot. If
crossing or working in the path of the robot is required, then automation
stop flags should be installed.

LEAN-TO: Fall protection is always required when entering this space.

VESTSIBULE: If one enters within 6 feet of the opening to the link area
below, fall protection is required.

C3.1.1 Get appropriate EST personnel guide traffic around work and tooling as
needed.

C3.1.2 Obtain a trained assistant (attendant), and the AMHS remote control
pendant from NFN stocker control room or stocker in NFX cleanroom.

C3.1.3 Using the GUI, identify the locations of robots on the track and idle the
robots in place.

C3.1.4 Follow procedure in Section 2 to obtain the key from Security and with a
hardhat and safety glasses, access appropriate door.

C3.1.5 Enter a few feet and look for the stranded robot or air doors. Do not cross
into the track pathway staying at least 3 feet away from the track.

C3.1.6 To recover the robot:

1) Locate the robots. If they need to be moved in order to reset the

door, point the remote control pendant and input the correct
sequence to enable communication, move the robot, and/or reset
the robot/system, if required.

2) If the robot will not reset with the pendant, try resetting the
controller.

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3) If the robot is still down, put the track down, lock the area, and call
Murata Service.

C3.1.7 To reset the air doors, determine if the door is past the outer stop limit
sensor. If so, the door must be manually raised to the other side of the
sensor.

C3.1.7.1 Set the door in manual by:

 Opening the door to the Door Controller panel

 Place the door in manual
 Raise the door up past the sensors
 If that does not work, cycle the door breaker, repeat the last 2 steps

C3.1.8 If the problem is not fixed, try resetting the controller and re-try the above.
If problem still cannot be fixed, leave system down and call Murata
Service.

C3.1.9 Once the door is reset and/or the robot has been recovered, return the
system to normal, close the panel, lock the outer Tunnel door, and return
the key to Security in NFE. Set the door in automatic and home after
recovery of position error.

C3.2 Fire Door Recoveries – Vestibule and Lean-To

LEAN-TO: Fall protection is always required when entering this space.

VESTSIBULE: If one enters within 6 feet of the opening to the link area
below, fall protection is required.

Fire doors will close for 3 reasons: Fire, Test, and Mechanical Failure.
When the fire doors are closed, the tool is unable to operate robots into
this area, however, there may be a robot stopped in this space. Flags can
be used to stop the robots from passing into this area while resetting the
fire doors if the track was to be reset before the work is done. These flags
are also good indicators to others that work is being done on parts of the
system.

Fire Doors can be reset with power on or off. To place hands on the fire
doors to move it, one will need to kneel due to the space height.
Appropriate EST personnel should assist and guide traffic around work
and tooling, as needed. NOTE: Fire safety systems should only be reset
once the cause of the issue is discovered and resolved.

C3.2.1 Obtain 1 attendant (EST).

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C3.2.2 Obtain the keys to the door from Security following procedure in Section 2.

C3.2.3 Enter space with hard hat, safety glasses, and fall protection. The
attendant should be positioned at the door and maintain communication
with the entrant.

C3.2.4 Approach fire door and place hand on central part of fire door’s outer edge
(Figure 8).

C3.2.5 Slide each of the doors to outside until the magnets grab the door again.

C3.2.6 Once both doors are reset, leave the space, close and lock the door.

C3.2.7 Restart the AMHS and clear errors if any.

Figure 8. Fire Doors

C4. PROCEDURE TO OBTAIN ACCESS TO NFX AMHS DROP

CEILING
C4.1 The NFX side of the AMHS unit is not a permit required confined space.
However, safety and notification procedures must still be followed due to
the mechanical and electrical hazards of the overhead track units, use of
ladders or elevated work platforms used to remove ceiling tiles to access
the AMHS unit, and potential for equipment or tools falling on
items/personnel below (Figure 9).

C4.2 IBM, , EST and/or Murata FSE to notify each other of need to access the
NFX AMHS blocked in ceiling area at the entry to NFX. IBM or EST will
assist Murata FSE with AMHS maintenance/recovery activity. Buddy
system to be used and observe posted signage. The area will need

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barricades or traffic managers with the ceiling open and workers on

ladders or elevated work platforms.

Figure 9. NFX Drop Ceiling

C5. RESETTING FIRE DOORS - NFX CEILING PROCEDURES

Fire doors will close for 3 reasons: Fire, Test, mechanical failure. Due to
the mechanical, electrical, and fall hazard identified, hazards must be
mitigated by following these procedures. Doors can be reset with track
power on or off. Resetting the fire doors is a mechanical operation which
does not require going fully above the tiles. If going above the tiles, fall
protection is required. An 8 foot ladder is needed to remove or move tiles.
To place hands on the fire doors, a 10 foot ladder is recommended.

Any maintenance or activities performed beyond what is below (e.g., that

require approaching robots or working on live electrical or mechanical
items on the track/robot system) must be performed by trained Murata
personnel who must adhere to the safety requirements located in the
vendor safety procedures and manuals.

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When the fire doors close (due to error or alarms), the tool is unable to
operate robots into this area, however, there may be a robot stopped
above this space. Automation stop flags can be used to stop the robots
from passing into this area while resetting the fire doors if the track is reset
before the work is done. These flags are also good indicators to others
that work is being done on parts of the system.

C5.1 Get appropriate EST personnel to help assist you and guide traffic around
ladders and opening.

C5.2 Climb on ladder under the panel to be moved

C5.3 Remove the ceiling tile under the fire door to be reset (Figure 10-11).

C5.4 Place hand on central part of fire door’s outer edge.

C5.5 Slide door to outside until the magnets grab the door again.

C5.6 Once all 4 doors are reset, replace ceiling tiles and restart the AMHS.

C5.7 Fire safety systems should only be reset once the cause of the issue is
discovered and resolved.

Figure 10 & 11. NFX Link Fire Door Set- Ceiling Tiles Removed

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C6. MANUALLY RESET THE OVER HEAD GUIDED VEHICLES

(ROBOTS) – NFX CEILING PROCEDURES
C6.1 Obtain 1 assistant (EST).

C6.2 Obtain a ladder.

C6.3 Cordon off area around tile to be lifted.

C6.4 The assistant should monitor the area before tiles are removed.

C6.5 Remove the ceiling tile under the stranded robot.

C6.6 Once the robot is spotted, point the remote control pendant and input the
correct sequence to enable communication and reset the robot/system.

C6.7 If the problem is fixed, replace the tiles, leave the area.

C6.8 If the problem is not fixed, try resetting the controller. If problem still
cannot be fixed, leave system down and call Murata.

C7. TRAINING
C7.1 Prior to entering these spaces to perform any of these tasks, the
employee must be trained by SUNY Poly EHS on the hazards of this
space and these procedures.

C7.2 Employees entering these spaces to perform any of these tasks must have
confined space entry training, fall protection training, and electrical
safety/LOTO training.

C7.3 Refresher training should be taken annually or if an employee is observed

to be in non-compliance with the procedures.

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AMHS Murata Confined Space Key Sign-out Sheet

The key to access the AMHS can be signed out without a confined space permit to
individuals who have been trained for the following activities listed in EHS-00007
Confined Space Entry Procedures, Appendix C - Procedure for Entering the Automated
Material Handling System (AMHS) Confined Spaces:
1. Air Door Recoveries in NFN Tunnel
2. Stranded Robot Recoveries in NFN Tunnel
3. Stranded Robot Recoveries in NFN Vestibule
4. Stranded Robot Recoveries in NFN Lean-to
5. Fire Door Recoveries in Vestibule
6. Fire Door Recoveries in Lean-to
For any other activities not listed above, a Confined Space Entry Permit will need to be
completed and ERT/EHS called.

Date Name Activity Key Out Time Key Return Time

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