IEEE TRANSACTIONS O N SONICSAXD ULTRASONICS, VOL. SU-18, NO.

3, JULY 1971 155

Mechanical Filters-A Review of Progress

ROBERTA. JOHNSON, MEMBER, IEEE, MANFRED BORNER, AKD MASASIII KONKO, MEMBER, IEEE

Abstract-This paper isareview of electromechanicalbandpass 0

-
filter, resonator, and transducer development. Filter typesdiscussed
include intermediate and low-frequency configurations composed of
rod, disk,and flexure-barresonatorsandmagnetostrictiveferrite g
and piezoelectricceramictransducers. The resonators and trans-
ducers areanalyzed in terms of theirdynamicandmaterial char- 2 2o
acteristics. The paper also includes methods of realizingattenuation 2
poles at real and complex frequencies. The last section is a look at
future 30

IXTRODUCTIOX 1 I I I l I I 1
100 2W 300 500 1 OW 2000 30W 5ooo
F R E G U E N C Y (Hz1
ORE T H A N 20 years h a w passed since the first
Fig. 1. Improvementinphonograph design through the use of
practical mechanical filters were introduced by filter design metl~ods[61.
Adler [ l ] ,Roberts [2], andDoelz [3]. These
fibers met an existing need for greater selectivity in the
IF stages of AM and SSB receiversdesignedforvoice n m / FLEXURE (F"

communication. Rlodern receivers and telephone commu-

nication equipments carry not only voice but data mes-
sages as well,thusrequiring lower passband ripple and
well-definedandstablepassbandlimits. I n addition,
greaterselectivityand lon.er loss areoftenrequired.
Mcchanic:~l filter development has kept pace with the
demands of communication engineers.
For
instance,
filtershavingpassband-~,ipplerequirements of 0.5 d B
or less or 60/3-dB bandwidthratios of 1.3/1 arenot
unusual.Packagesizehasalsoheenreduced;a10-pole
filter can be designed into a l-c1n3 package. In addition,
the lower frequency limits of mechanical filters are now
in the audio rangr; the upper limit is t h a t of an AT-cut
crystal. Although the mechanical filter was conceived in
the U S , a great' amount of cleyelopmental work is now
being conductet1in Europe and .Japan.
Early interestintheuse of 111cchanical elementsto
providepasshandcllaracteristicsresultedfromthe de-
velopnlent, of the electrical bandpass filter by Campbell
and Wagner in 1917 [4].A number of patents relating
tospring-masssystcms [ 5 ] were filed soonafter,b ut FREOUENCY -
themostsignificant work in terms of practicaldeyices Fig. 2. Distributedelemrmt mecllanicnl filtcr (Mnson, 1941).
wasd oneb yMaxfieldandHarrison on phonograph

filter shown in Fig. 2 [TI.Pome of the significant, features

M:~nuscripl rrceivetl .J:ln11:ly F, 1971. of this design included
the use of piezoelectric
trans-
R . A . Jnhnson is w i t h the Collins
R adioCompany, Newport ducers,distributed-Flementllalf-wavelength resonators,
Bcnch, Calif.
M. F3iirner iswithAEG-Telefunken Rescarcl1 Institute, Ulm; and an attenuation-pole-producing coupling element.
Crrmnny. Just a fev7 years later, the first practical IF mechan-
M. Iconno is with theDcpartmcnt, of ElectricalEngineering,
Pnm:lgata
University,
Yonemws, Japan. ical
filter,
shown
Fig.
in 3(a)! was
developed by Adler.
156 IEEE TR.INSACTIONS O N S O S I C S A N D ULTRASONICS, JULY 1971

STATIC
CAPACITY COUPLING
TRANSDUCER COUPLING REGION
COIL Wi R E

ELECTRODE
PAIR

This fi1tc.r Inrltle w e of l d f - m r c l c n g t h platw coupled hy

short small-tli:unctrr wires. The plate resonators can be
representcc1 bp p:~raIlel tuned circuits, the coupling wires
by seriw inclurtors, as shon-n in the electrical equivalent
circuit of Fig.3 (b). The nickel end platesact’ a.: magnet.o-
strictive input and output transducers.
T h e frcqucncp response cllaracteristics are monotonic,
that is there a r c no finite attenuation poles. Adler’s filter
is typic:ll of most modernmcchanicalf iltersin that
distrihutetlp arameterr esonators arc coupledthrough
nonrcsorlnnt lincs. ‘I‘here is a striking similarity betmeen
theplnte-\\-ircfilter a n t ! the latest t;vi)c of mech:anical
filter, thc n~onolithicor q u a r t z mechanic:zl filter shown in
Fig. 4(:~’l.
uset1 modes are theone-nodal circle (-50-200
T h e quartz nlcclmlical filter cleveloped by Beaver and kHz) and the two-circle mode (200-600 kIIzl. The
Sykcs [S1 and K:‘:lkaza~:l [91 makesuse of the cnergy- resonators are coupled h>- small-diameter w i r e t h t :11’(’
t,rapping concept; whcre standing w a ~ ware set 11p under
?pot n.cltlcrl around the circumftwnce of the disks. As a
eacheloctrode pair. 111 t h e regionshetn.ecn the elec- rwult of the yery complex displacement at the ctlgc of
trodes, tllc, acoustic, x i v c clcc‘ays oxponcntinlly, the
the tlisk, the coupling mode is a con1hinat)ion of extension
electro(]ctl rc,gions act like r(~sonntOrs, andthen on-
and flexure and is,therefore,very difficult to analyze.
clcctrodcd regions actlikecoupling clcmcnts. T h e elec- The earliest designs made u w of small-diameter odd-
t,ric:il cyuivnlcnt circnit of t I 1 v platc-n-i1,c and the quartz
nun1l)er quarter-wawlengtll iron-nickel alloy transducers.
mechanirnl filtcxr sllonn in Fig. 4(b) are itlentical except Latclr dcsigns, such 5 s tllat shown in Fig. 5 ( a ) , use onc-
t,llat in the plate-wire case the input and output capac- half and full-wawlcngth ferrite transducers.
itors are replaced by coils. The monolithic filter also has
Ferrite transducers are also used on the rod-wire filt,er
monotonic frequency responsec haracteristics. A con-
shown inFig. 5(h’l. Thetorsionalrod-wirefilterwas
structionsimilartothat of themonolithicfilters rle-
developedindepcndcntly hy BiirnerinGerrnnny [lZ],
scribed abore 11as been used byBornerandSchussler [ 131, and Tanaka in .Japan [l41 ; the Tanaka design
uses Langeyin metal alloy/ceramic transducers in place
BASICFILTER STRCCTURES of the ferrite.. Thecylindricalrodresonatorsarede-
signed to vihratein R half-marclengthtorsionalmode
Monotortic Designs at frequencies up t o 250 kHz and in a half-wavelength
Adler’s tlevclopn~cntof the plate-wire mechanical filter longitudinal mode when t he
f ilters
are
d esigned to
was soon followed by Doelz’s disk-wire filter [ 111,shown operate at 4.55 kHz. Use of the torsional mode results in
in Fig. 5 ( a ) . The disk-wire filter makes use of flexural longitudinal coupling between resonators, whereas a t 455
modes of vibration of the disk resonators. The two most kHz the coupling involvesbendingorflexure.
JOHKSON et d . : REVIEW' O F MECHANICAL FILTERS 157

Use of a wiretoconnectthetransducertotheend
14@ r
resonator, as shown in Fig. 5 ( h ) , results in a reduction of 12c t -- -
spurious or unwanted responses, particularly if it is
nttacl~td a t :I 11od:d point of thestrongest,u nwanted
modes. This technique, which is often usedon disk-wire
2 GC

1'- -l- ---- - -

filters, rcsults in r1)urious modes being suppressod more U

t 4@
than 60 dB, as shown in Fig. 6 ( a ) . Incontrasttothe
excellcntspuriousresponse rc>jection of thetorsional
- . - - o : 2 200 400 G@@ 8W l0U0
rod-wirefilteris the response [Fig. Gcb)] of therod-
neckfilter of Fig. 7 ( a ) , which is drivenin a similar FREOUENCY :kHz,

manner, but, i.4 subject) to bro:ld banclwidthh n(1ing (:L)

modes.
T h e rocl-ncrk fi1tc.r was tlcwloped hy Roberts [2] a t
the same time the disk-wirefilter was beingdeveloped.
The basic clcl-ign concept is that of coupling h alf-
wavelength t ol,sionnl or lorrgituclinal resonators with
c ~ u : ~ r t e r - w : ~ r c l ( ~n~c l~~kt sl ~:T. l l c , two m j o r probltwls of
the early designs were the easily excited spurious bend-
ing modes [ l 51, :~ndthedifficultyinconstruct,ionand
tuning due to h i n g turned out of a single rod. In adtli-
t,ion, a t lon.er frcquencicu like 100 kHz, the filters become
extremelylong. In oulcrto reduce t h e length,Tanakn.
developed tllc folrlccl line filter show1 in Fig. 7(h). T h c
resonators vihrntt: in n I~alf-n-:~wlength l ongitudinal
mode and are coupled hy relatively large-diamctcr short
wires. The usc of 1ongitutlin:ll-mode Langevintrans-
ducers plus the rcduced ovcrall length rcsults in :L greater
rejection of unwanted moden. Like the rod-wireand
foldeddesigns,thedisk-wirefilterhas a relatively low
spurious response levc.1.
All four filters discussed so far operate at'frequcncies
above 50 k H z . With the exception of some work reported
hy MaPon and Konno, tllcre was littleactivit,y a t fre-
quencies hclow 50 kHz hefore 1960.. One of thefirst
practical tlesigns was that of Mason and Thurston [ 161,
who used antisymmetric mode flexural resonators coupled
in t,orsion as sllon-11 inFig. 8 ( a ) . Theantisymmetric
mode makes this clesign less susceptibletornicrophonic
excitation. A more widrly used design is the symmetrical
mode filtershowninFig. 8 h ) . Work by Iconno [ 171,
[IS], Y,zkuwa [19], andAlhsmeier[ 20], h w e made
this a w r y practical tleyice in thefrequency range of
300 Hz to 30 kHz. The symmetric-mode filter is driven
hy pictzoelectric-ceramic transducers. The coupling wires
:m attached to tlx resonators at the nodal points, which
resuks in torsional coupling.Thistype of filter is w r y
sensitive to chngcs in t,he position of the coupling wires
so c o n d e r a h l e care is taken in manufacturing to ensure
that bending modes are not propagated. The microphonic
problenl has been solved, in part, by supporting the filter
with high-damping silicon-ruhher supports.
Ina dditiontotheflexural-har/wirelorn-frequency
mechanicalfilters, a considerableamount of work has
been done in ,Japan on the development of tuning-fork I
mechanical filters [21], such as those shown in Fig. 9 ( a ) (h)
and ( b ) . The three-prongfilter is interesting in that it Pig. 8. Low-frcqrlrnry meehnnicnl filters. (a) Antisymmet.ric
acts like a coupled two-resonator filter, thus providing a mode [161. (b) Fundamental mode [181.
158 IEEE TRANSACTIONS ox SONICS ASD ULTRASONICS, JULY 1971

(b)
Fig. 9. Tuning fork mechanical filters. (a) U-shapedcoupling
type. (b) Two-pole three-prongtype.

greateramount of selectivit'ythan a simpletwo-prong

device. The tuning fork and flexural-bar filters are widely
used in Japan for remote and automatic control, selective
callingandpaging,t elemetry,m easuringinstruments.
and pilot and carrier signal pickup.
v
ATTENUATION

Finite Attenuation Poles.

By usingasmanyas 15 rcsonntors,highlyselective resonators as iuclc~penclcntlyconsidered by B6rner [25]
mechanical filters of the bar-wire, disk-wire, and folded- and .Johneon [26]. Bijmer'sfiltershowninFig. ll(a)
resonatortypes are realizable.A lthoughtheresultant makes use of l~nlf-~~:~velengtll torsional-mode resonators
passband amplitude and delay responses are sat'isfactory ant1 extensionalmode-couplingelements. Thedisk-wire
for voice communication, therippleamplitudeand clif- filter of Fig. 11 (1)) is compos(d of flexuralmodedisks
ferentialdelayvariationsmay beexcessive whendata and basicnlly extensional mode-coupling elements. When
are to he transmitted. By making use of finite-frequency thespacingbetween the resonators is suchthatt he
attenuationpoles, fen-er resonatorsareneeded,thereby hridging wire is less than one-half of an acoustic wave-
reducingthed ifferentialdelay, size, cost,and,most length long, theidealt ransformer of Fig. l l ( c )a c t s
often, the pwsband ripple. like a simple one-to-one transformer and an attenuation
One of thef irstp ractical del-ices t o realizefinite pole is realized on the high-frequencyside of the filter
attenuation poles was the crystal-plate filter with cnpac- passband.Thiscanbeunderstoodbyconvertingthe T
itive hridging [X!], [23], shown in Fig. lO(a). Although network, composccl of thetwoadjacentresonator cou-
t,he platcconfigurationwasdescribedinhdler'sbasic plingwires(inductors) and thebridgingwire, to its T
patent [24], the itlea of usingquartzandcapacitive equivalent circuit,. The inductor in series with the center
bridgingwas new. Connectingthecapacitorfromthe resonatorproducesanilnpedancezero,whichresultsin
top electrode of the input plate to the bottom electrode an attenuation pole above the filter passhand, as shown
of the output plate is the sameas adding a phase inverter in Fig. l l ( d ) .
across the out,put terminals of the equivalent circuit of When the bridging n-ire is hctwecn one-half and a full-
Fig. lO(h) and results in a pair of attenuation poles as wa~elcngthlong, the transformer in the electrical equiv-
shown in Fig. lO(c) . The phase inverter adjacent t o the alent circuit acts like a phase inverter and an attenuation
couplingclementrepresents the 180-dcg phaseshift' be- polc is realized below the filterpassband. An alternate
tween resonators at the lowest nntural nlotle of the me- method of realizingthephaseinversionintherod-wire
chanicals ystem.T heresonatorsv ihrate in alength- filter is ehoxm in Fig. l1 (a) by the dashed lines. In this
extensionmodc ( 3 ' ' - S or -18.5' - S ) orfaceshear case,o ut-of-phaseregions of thealternateresonators
mode (CT) andare coupled throughso-calledPoisson arecoupled.Asimilarmcthod is usedwithdisk-wire
coupling.Although t h e x filters have been designed and filterswhereone of thealternatedisksvibrates in a
builtw ithmorethantworesonators,m ostc urrently diametermode(rathertllan a nodal-circlemode),the
manufacturedfiltersare de.4gnecl as 455-kHz 2 poles t,hreeadjacent diPk wiresbeingconnected to in-phase
in cascade for use in SS13 and FM receivers. sectors, and the bridging mire to an out-of-phase portion
Theuse of wires to couplemechanicallyalternate of the resonator [27].
JOHNSON et al.: REVIEW OF MECHAXICAL FILTERS 159

m
TABLE I
POLE
ATTENUATION FOR VARIOUS

LOCATIOXS
CONFIGURATIONS
BRIDQING
~ ____
-.
. .. ..-

Direct (1 : 1) Inverted ( - 1 : 1)

One resonator Vpper stopband pole Lower stopband

pole
Two resonators
Delay correction Upper
and lower
stopband poles

l
ATTENUATION
50 -

m
0
I

z 40 -
0

FREQUENCY - 3
30 -
(d) U

Fig. 11. Singlr-rrsonntora constir bridging. (a) Rod-wire, 1251. -

20
(h) Disk-wire (Johnson, 19664). (c) Electrical erlnivalcnt circuit.
(cl) Frrqurncy response.

10 -
If a high degree of selectivityisneededbothabove
andbelowthefilterpassband,acouplingwirecanbe
used t o bridgetworesonatorsproducinga,symmetrical 454
456 455 457 458 459 460

pair of attenuation poles. This type of design is subject FREOUENCY (kHz)

t o beingahletorealizeap haseinverterw itheach

Fig. 12. Frequency responsc of :L double-diskbridging mechani-
bridging wirc. When no phase inversion takes place, the cal filter.
resultantfrequencyresponseis less selectivethanthe
monotonic case but delay compensation due to right-half
planeattenuationpolcs is possible(seeTable I ) . The
moat common method used to realize the phase inverter,
in the ease of therod-wirefilter, is tospaceadjacent
rcvonators a quar.ter-wavelengtl1apart,whichresultsin
thehridgingwirebeingthree-quarters of awavelength
long. The advantages of the quartcr-wavelength coupling
are that thc resonators are all tuned t o thecenterfre- Fig. 13. hlrvhanical filter with wire bridging across two rrsona-
tors(CollinsRadio).
quency of thefilterand,i naddition,t hecouplingis
relatively insensitive to variations in mire length.
I n order to maint,ain a small package size, the coupling convertedto a X network conlposed of twonegative
wire length between disk resonators is usually less than inductors and one positive inductor, all having the same
one-eighth of awavelength.A t 455 kHz,duetothe absolute value [29]. As an example, thelorn-pass network
thickness of eachdiskbeing on the order of a quarter- of Fig. 14(h), whichmay be a Cauer-typefilter [30],
wavelength,s imple tm-0-disk bridgingresultsinsym- can be converted ttohe
bandpass
double-resonator
metricalfinite-nttrnuatiol1 poles. Fig. 12 showsthefre- bridging topology al1on.n in Fig. 14(c). Theuse of tloublc
quencyresponse of the 12-diskfiltershowninFig. 13. (coincident) polcs rcsults in a physicallysgnmetrical
Notethatthepassbandrippleisquite low. This is in mechanicalconfiguration, ~ h i c hishelpfulinreducing
part due to the fact that the disk-wire well as as the rod- nmnufacturing costs. Thc short coupling wire length be-
wire finite-pole filters are designed with modern insertion- tween resonators, a,s shown in Fig. 13, not only decreases
loss techniques. Included in the design method are trans- the package size but, increases t'he strength of the filter.
formationssuchasthatshowninFig. 14(a) where a The ahilit,y of the structure to withstand high ehork and
low-pass or bandpass ladder network is converted to an vibration levels is also due t o the coupling wires being
equivalentbridgedform [28]. Because of thenarrow- located away from the centroid of t'he st'ructure.
160 lEEE TR4NSACTIONS ON SONICS A N D ULTRASONICS, JULY 1971

(b)

F2 i-q y 7 j
1

(C)

Fig. 15. Multiple-modefinite pol? configuration. (a) Disk-wire.

(p) Simplified electrical cquirn,lcnt circuit.( c) Platc-typr dc-
slpn.

(c)
Fig. 14. Double
bridgingtrnnsformntions. (n,) Gcnmnl trnns-
formation. (h) Lorv-pass prototypr. (c) Fmal hridging-wire
bandpass electrical equivalent circllit,

have beendesigned to makeuse of spuriousmodes of

vibrationtocontrolstophandselectivity.Althoughthe
theory was notunderstooduntilrecently [31], i t was

8
foundthatb yvaryingthecoupling-wireorientation
around the circumference of the disks the slope of one
side of the responsecould be increased a t t h e expense
of the other side. For inst'ance, in Fig. 15(a) each disk
has a natural resonance near-frequency P I in the pass-
band. Each disk also has a natural resonance (actually
two as well as many others at different frequencies) near
F2
F1
x
F , abovethefilterpassband.Making use of thesim- (1))
plifiedequivalentcircuitshowninFig. 1 5 ( b ) , me see Fig. 16. Multiple resonant modc filters. (a) Disk-wire design. ( b )
that an attenuation pole is produced a t F , between F1 Lom-frcquencyflexural hnr.
and F,. Thisresults inasteeperresponseabove the
filter passband, which can be controlled by varying the quencyrwponseequivalenttoafour-resonatordesign.
couplingwireorientat,ion,w hichinturncontrolsthe The soIidnodallinescorrespond to tJhe highcst natural
effect of resonator Fa.The same technique has been used mode.
in the design of plate filters [32] D-here the length and I n t h e case of low-frequency filters, a similar kchnique
widthdimensionscontrolthefrequencies Fl and F2 as can beused where the corner of aflexural barcan be
shown in Fig. 15 ( c ) . removed to producetwonaturalmodesbydestroying
By removingas egmentf romthe edge of a disk Fymmetry of the nloments of inertia. An example of this
rrsonator, two controllablediametermodescorrespond- type of resonator is shown in Fig. 16(b) where the arrows
ingto each pair of degeneratemodescanbeproduced show the displacement directions of the two modes [37].
[33]. This technique has beenused to design a variety Fig. 17 shows anearlyfilterthatmakes use of this
of multiplemodefilters 1341-[36], most of whichare technique to obtain a total of six natural resonances as
still only laboratory models. An example of this type of well as additional attenuation poles [38]. -4large variety
designis showninFig. 16(a). Thisp articularf ilter of devices h a w been designed using this method, includ-
employsone-circleone-diametermodes of vibration,as ing a t,hrce-resonancetwo-attenuationpolefilter con-
well as piezoelectricceramictransducersandhas a fre- structedfrom a single bar [39].
JOHNSON e t al.: 161

+(-----l
REVIEW OF >IECIIA~-IC.ILFILTEHS

D 0
I 2 4 3 5 6

ATTEYUATION I
U-
l 1
FREOUEVCY
-l%
-.,,

(C)
-
1 Q21

Fig. 18. Two-port two-mode disk rcsonntor. (a) Driving point

'

imprdancc modc.1. ( h ) Disk nodal patterns. (c) Single-mode b o -

port cquivnlrnt circuit.

11010gy) i = 1. Tllc resonator could be :I rod or bar

vibratingin a flexural andalongitudinal mode or, as
s1~on.n in Fig. 1 8 ( b ) , a disk vibrating in x two-diameter
flexure Inode and a single-circle flcsurc motlc. If ordy
one of themotles,but tn.0 point:: on the disk a r e con-
sidered, theforce-vclocityrelationsllips can IK found
from the schenlatic diagram of Fig. 1 8 ( c ) . I n gcneral, n
resonatorhaving 31 ports and S nat11ral rno(1es ran be
descrihctl b y the matrix equation
.v
211 = [ZI I1 211 = c
,
-1
dJkhj2i. (2)

of ortlcr 111 ancl

I n ( 2 j , v ] and f ] arc column n~nt~,icci.:
zl,l is nn element in the X X A1 Z matrix. A gcncmlized
equiralentcircuit I m e d on (21 is shown in Fig. 19.
a

162 IEEE TRANSACTIOSS ON SONICS AND ULTRASONICS, JULY 1971

bymakinguse of alinearcombination of independent fM

waves that satisfythedifferentialequations of motion I

andboundaryconditionsonthemajorsurfacesofthe
diskas well as approximately satisfying boundary con-
ditions on thelateralsurfaces[43].Cnliketheexact
solutions that are expected when analyzing an electrical
network, solutions for frequency and equivalent mass of
a mechanical resonator are only as good as the number
of higllcr ordcr ~vaves that' are taken into account. The
greaterthenumber of '17'aves, the more accuratelythe
boundaryconditionscanhesatisfied.
The earliest work on finding the equivalent mass of a
thickdiskresonator was pcrformed by Sharmaforthe l
case of axisymmetric mode3 [44].T hisa nalysis was "1

based on the nlethod of finding the cquivalent mass by 1

dividingthetot>xlkineticenergyinthesystem(disk) I

by one-half of the square of the velocity in a specified

directionatj a point on thedisk[45]. This sametech-
nique couplcd with that of Onoe's 1431 has been used to
calculate the equivalmt mass of disks vihrating in both
synmctricandnonsymmetricmodes[46].Examples of
equivalent mass versusposition on thesurface of the
diskareshowninFig. 20 for twoadjacentvibration
motlcs. Note that the equivalent mass at the disk edge
( T = 1.0)is lomcr inthecase of theadjacentt wo-
diameterone-circle mode than thetwo-circlemode. As
a rule, the loner the impedance of a mode, the broader
is its coupledresponse andthemore
H,
difficult it is t o
= s.s + H , = S.c C.s S = sinh CY
suppress. I€, = c.c + H 7 =
S S S = sin CY
Within the frequencyrange of interest (50-600 kHz)
in the case of disk-wirefilters,therearevariousother H , = C %- 1 H, = s - S C = cosh a
unwantedmodespresentsuch asradialandconcentric
shear modes. These can often be troublesome in the case
H , = C.C -4- 1 + B, = c c c =cos CY

of widebandfilterdesignswhere the modessometimes H, S . C - C.S H,, = C - C

fall in the range of the paszband.These particular modes, CY* = ( p A / K ) w 2 1 4 I ( C y 2 / ( j W 1 * ) = (p-4K)1'z/j.

called contour modes because they involve no tran- -verse
(flexural)vibration but only a changeintheshape or I n ( 3 ) , wllich relates to Fig. 21 ( a ) , I< reprcxntsthe
contour of a disk,havestudiedbyOnoe[47]. product of Young's modulus times the moment of inertia
of the crosssection of thebar,and A , and l are,re-
Bar Resonators and CouplingElements spectively, the density, cross sectional area, and length of
Flexural-moderesonatorsarealsoused a t low fre- the bar.
quencies. In thc 500-Hz-to-50-kHz frequency range, the Using ( 3 ) , we can represent :I flexural-mode resonator
resonators are in the form of bars suchasthose shown by the equivalent circuit, shown in Fig. 21. This equiva-
inFig. 8. Analysis of the resonantfrequencies of thick lentcircuitrepresents a one-resonatortwo-portsystem
flexural-barresonatorshasbeenperformedbyMason similartothatshown inFig. 1 8 ( c ) . Note that in this
[45] andNiiser [48]. If theresonator is treatedasa case therepresentation(whereforceisanacrossvari-
thin bar, equations similar to those describing a trans- able) is used resulting in a dual formulation where the
missionline can 1)c writtcn :LT; [ 1.51, [49] resonator is represented by a series-tuned circuit. Inacldi-

- II,(cu/l)

IZ,
Hlo(jwlz/Kaz)
Hi(jwl/Ka)
 163
JOHNSON e t d.: REVIEW OF 41ECHASIC.4L FILTERS

G -

C-

0-

0-

0- 1 l I I I
a 7 4 6 8 10
R A D I A L POSITION ir.
(a)

'\

(a)

tion, the two ports or points on the resonator are actually

represented in the equivalent, circuit by four ports, two
for linear motion and two for rotation. As in the earlier
-E;yjq

F1

"1

(b)
disk case, a general equivalent circuit canbe drawn with- Fig. 22. (a) Longitudinal bar-rcsonntor wire-coupling element
out difficultybyparallelc onnectingnetworks of the (case of zcro rotation). (b) r equivalent circuit.
form shown in Fig. 21(b) [49]. Konno'sn ormalized
function E is similar to the 4 function of (2) when the The ABCD matrix of (4) canbetransformedto a
impressedbendingmomentsareequalto zero. y matrix,which,inturn,can be used to calculate
Theequivalentc ircuits of Fig. 21(b) and (3) are and y b of thea-equiwtlentcircuit of Fig. 22 ( h ) . We
veryusefulinthecase of arod-wirefilterwherethe find t h a t
rod resona.tor vibrates in anextensionalm ode [50].
Fig. 22(a) shows a couplingwireattachedtotheends Y, = ~(Iww[(H~ +m/&] (5)
of two rcsonators. The coupling wire is driven in flexure, Y, = - j(Ka3/uZ3)(I17/H3) .
butthere is norotation of the wire a t t h e pointas of
contact with the resonator, i.e., O1 = e2 = 0. After some The couplingwire actsas a quarter-wavelengthline
minipulation of 131 me canwrite when 116 = 0. I n this caw, we w e from (5) t h a t g a = -yb
~~ ~~~ ~ ~~ . __
 164 IEEE TRANSACTIONS O N S O N I C S A N D ULTRASONICS, JULY 1971
andfrom (4) after somemanipulationthat [50]

An analysis of an extensional-mode resonator or cou-

pling wire is somewhatless difficult,than thatof a flexural
element. A rod or wire vibrating in an extensional mode
acts as asimpletransmissionlineand, t.hus, can be
describedby the ABCD matrix
1- 1,' I=;i- cos ( D l ) i ~sin, (p/): rJ!r2
1 (7) N I .-SPAN C

LF,.~ L j(sin (PO/Z,,) cos ( P I ) A FREOUtNCY = 455 L H I

where
modulus.
= W dzj antl Z o = (9
Exteltsional-motleresonators
da). I!: is Young's
and coupling y o
COLD W O R K ~ 33'.

40 +An 1R 0
elements h v e been d escribed
icnonsitlernble
detail
in [l41 : L n d [30].
Resonator Xaterials
Bccause of transduccr bandwidth limitations, the pres-
ence of unwantedmodes of vibration and competition
with 7,C' andceramicfilters,therntio of 1)andn-irlth to
centerf requencyinthe case of nxxllarlicalf iltersis Be or Ti also improvesthe Q of the resonators,which
usually less than 10percentbutmorecommonlyabout mayvaryfrom 10 000 t o 25 000, dependingonthe
I percent.Thissmallfractionalbandwidthrequiresthe amount of cold working and precipitation hardening. A
resonators to have a temperature coefficient of frequency value of 20 000 is typicalformostapplicationsand
of 1-10 ppm/"C, a corresponding low aging rate, and a cawesonly a smalla mount of loss a tt h ep a s b a n d
Q value of at least10 000. edgcs of a 1 percent, f1xctional h n d w i d t h filter. F o r in-
The major contribution to the variation of frequency stance, the response of a 3-kHz bandwidth filter at 200
in :Lmetallic alloy with temperature is the change in the kHz is practically that of a lossless network.
stiffllcss or Young's nlodult1s of the material. Iron-nickcl TT'hen adjustedforthebestt emperaturecoefficient,
alloys that contain either27 or 44 percent Xi hare a low- thc resonatorfrequency Fhifts havelittle effecton the
passband ripple. The pni;s~)antl-ripple variation mill, for
temperature coefficient. of stiffness I m t are relntively 1111-
the most part, bedetermined by thecharacteristics of
stn1)le withregard to changes of thepercentage of Ki.
Byaddingcl~romium, the stahilitycan heimprovccl the transducer.
consider:lbly, but the aging charactctristics and Q values TRASFI)T:CERS
A S D TR.4iXSI)CCER RI.ATEIZIAIS
of t t m e so-callecl Elinvnr materials are not acceptable.
The addition of titanium or beryllium t o the Fe-Ni-Cr Transducer Configurations
improves h t h agingand (2 antl, inaddition,nlakesit T h e most. n-itlely used transducers h a m been t h e sirn-
possible to vary the tcmpcrature coefficient of resonant' plcmngnctostrictiveferriterod transducer (Fig. 5) : m 1
frequency material by cohl work and lleat treating [51]. the 1,anger-in ceralnic-nlc4nl alloy transtlllcer [Fig. 7 (b) ]
In order t o obtain a low tcnlpcrature coefficient, thc forfrcqucncies above 60 kHz andthec ompositr or
Fe-hTi-Cr and BC or Ti nmterial is f i r z t solutionan- sanclnic.l~-typc~ of ccr:~mic-rnetnlt~ranstiuca~r: I t lorn frc-
ne:ilc[l, thcw qncrrcllc~(1,and tllen cold worked 15-50 per- quenciw (Fig 8). Altllough thcnc are the most popular,
cent. Kext,the rnatcri:d isprecipitationhartlcncd (A? filt'ers arcIx3ing manufacturetl that use longitadinal mode
is precipitated from a supcwaturated solution by the BC ceramic rock;,iron-nickel alloy wires, and various q u : ~ r t e
or T i ) by heat treatment at 40Oo-675"C for a t least two crystal cuts.
hours.Theamount of roltl ~ o r ka nd temperature time An electron~ecl~a~~icnltranatlucer, regarcllcss of the
determinesthetemperature coefficient. of thematerial. type,c an be char:lcterizccl by its resonantf requency,
Fig. 23(a) and(b) showtemperature curves of Ther- coupling coefficient, and static rcnctancc. As an example,
malast 5409 (Be) and Xi-Span C (Ti) after having lxen thc nlagnetostrictivc ferrite tr:mducer shown i n Fig. 24
acljudcd for best temperature coefficiont. Both materials can bedefined by the mechanical reuonant frequency f l
s 50 Hz Over a tempera-
S ~ O Wfl,ccluency shifts of 1 ~ than (actuallythe mechanical resonancewiththeelectrical
turerange of 100°C a t 500 kHz. terminals open circuited)! the electromechnnical coupling
The addition of Be or T i has the cffcct of reducing coefficient, whichrelatestheelectricalandmechanical
the aging rateto leas than 1 X lo-' ppnl/week or approsi- parameters. and the inductnnce of the transducer coil L1.
matcly 25 IIz : I t 500 k H z over a period of 10 years. The If thet,ransducer is directlyatt'achcdtotheendreso-
 165

.1530.106
40 - 2c 20 40 60 80
TtMPERATU9E lDCl

(a)

nafor, it affects the repon:ult frequency of the comhina-

tion in direct proportion t o its relative equivalent mass.
I n t h e case of the electronwchanical coupling coefficient,
i t is importantthatit be constantbecause itdircctly
determines the transformation of the electrical terminat'-
ing rePistance into a mechanical termination t h a t must be
matchedto the nwchanicalimpetlance of the filter. In
most applications, the elcctricd inductallre is resonated
with a c:lpncitor, which is u d for temperature compen-
sation in critical c:lscs.
T l ~ c tfilterdesignerhastlle task of finding t h e most
stnhle transducer that will, in addition, propc!rly match
the clcctrical and n1cchanic:tl network.<. Thisinvolves
cl10041lg :L~ n a t c ~ i n lw i t h:l st:~l)lccoupling coefficient
firstand then :I configurntioll that retluco~ the trans-
ducer cquiv:~lcnt111:is t o a minimum so as to recluce thc
frcqu(~ncyshift n.it11 tcw~pcwture.Thib c m hc clone 1)y
decreasing t h r tliamctcr of tho frrritv roc1 o r the tlliclmcsb
of tho ctbramic in n 1,angevin tlxnsclucer. The sim reduc-
tion is,inturn,limited by tlwsensitivity of the coil
orstaticcapacity, or inthc c:\sc of ~ ~ i d e - b n n r l ~ ~ i r l t h
filtersb ythef actthat,inthelimit, the electrical
inductol.-c:1pacitor corn1)inations actually become the end
resonators.

Mngnetostrirtive Ferrite Transducers

T h c most widely used filtertransducermaterialis a
cobalt-ruhstit~~tc.tliroll-nic1;c.l ferrite,which w : ~ . ? spe-
cially tlevclopotf for use in elect,romerhanical filters [fi2].
Addition of 0.6 percent cobalt results in a highly stable
coupling coefficient, whereas 1.0 percent cobalt results in
n very small variation of frequency fl with temperature.
Fig.25 shows the variation of coupling coefficient ant1
frcqucmcy f. with change in tclnperat,ure for B practical
drsipn at 200 kHz [53]. I n order to be able t o reduce
the effect of thetransducerontheend resonator fre-
quency, optin~um vnluc~ of pcrmancnt magnet bias and
coil dimensionsmust be chosen so as to maximize t'he
coupling coc.fficicnt. The coupling coefficicnt of 10 per-
cent shown inFig. 2.5, whichistypicalf or R n-ell-
designed trnnsduccr,isalso thr limitingralue of the
filter fractionalbandwidtll. The coupling coefficientyaria-
166 IEEE TR4NS.4CTIONS O X SONICS A N D ULTR.%SONICS: JULY 1971

transducers. The barium-titanate material used in early 3000X10~ 6r

designs suffered from large changes in coupling coefficient
and frequency with temperature, which, in turn, resulted
inlargepassband-ripplevariationswithtemperature.
Thedevelopment of lcad-zirconate-titanate (PZT)ma-
terials [ 5 5 ] , which show vastlyimprovedtemperature
charact,eristics, has madeitp ossibleforp iezoelectric
ceramicmaterialsnotonlytocompetewith,butina
number of cases t o replace: magnetostrictive f errite
transducers. 3CCOX
-40 +40

Theprincipaladvantage of thepiezoelectricceramic TEMPERATURE l°Cl

is itsexcellentelectromechanicalcoupling coefficient. (a)

Whereas a bar-typeferritetransducerhas a coupling
232,-

coefficient of 10 percent, a side-plated barof temperature-

stablepiezoelectricceramichas a coupling coefficient
between l 5 and 25 percent.Thehighercoupling coeffi- c I

cientt hereforemakes it possible tousealninimum

amount of ceramicmaterialascomparedtoahighly
temperature-stablemetald iskalloyinthedesign of
composite end resonator/transducer assemblies. In addi-
t'ion, the higher electrical Q of the piezoelectric material
resultsin lower filterinsertion loss anditsg reater
1 I I
inherentlinearityresultsin lower intermodulationdis- - 40 0 *40 +EO
tortion.Fig. 26 shows thevariation of frequencyand TEhlPERATURE 1%)

coupling with temperature for the case of a PZT ceramic (b)

thathasacoupling coefficient kIz3of approximately 23
Fig. 26. Characteristirs of PZT-type piezoelectric transducers
perccnt. (Murata). (a) Frequcncyvariation. (b) Coupling Coefficient
T h e mostwidelyused of the ceramictransducers is variation with rhsnge of trmprrxture.
the Langcrin type, which is in the form of a rod com-
posed of a ceramic disk sandwiched between two metal are excited by composite ceramic/metal alloy transducers.
alloy rods, Fig. 7 (b) . The high planar coupling coefficient I n addition,the high electromechanicalcoupling coeffi-
of a thindisk,whichisontheorder of 25-40 percent cient of theceramicmakes it possible to designvery
(forstablematerials),andtheLangevinconfiguration stablew ide-bandwidth (10-20 perc,ent)low-frequency
make it possible t o design resonator/transducerassem- filters of this t>ype.
blies that have high mechanical Q and good temperature A great deal of analytical work has been accomplished
characteristics with onlya small reduction in the coupling in ,Japan in the area of describing the electromechanical
coefficient [54]. Development' of this type of transducer characteristics of conlpositeb endingtransducerreso-
for filter applicationswa.s started approximately 15 years nators. Konno's and Kusakabe's published work on this
ago by Tanaka [l41 and Tagawa 1561 in .Japan. Because particular subject alone totals more than 200 pages and
of the instability and low Q of most bontling materials includestwistedbars, mass loadedbars,andbarsthat
such as epoxy,coupledwith the fact that the bond has vibrate in nondcgenerate modes, as well as simple bars
a.n appreciable thickness, the ceramic/metal alloy attnch- driven with ceramic plates that only partially cover the
mentprohlcmisone of importance andhaasrequireda upper and lower surfaces [59]. 9 very detailed analysis
great deal of effort in its solution. of afullycoveredbarhasbeenachievedbyOkamoto
Inthepast few years,therehashem a consider-
et al. [GO], and is summarized in [ 191.
ableamount of analyticalwork clone inGermany on

Langevin-typetransducers [54], [57] and [as]. This

~
LOOKIXG
TO THE FUTURE
workincludesequationsthatdescribethevariation of W e will look at the nest few years based on the direc-
coupling, frequency, Q, and temperature coefficient with tion of ourpresenttechnology.T herewillbebreak-
changesintherelativethicknessandposition of the throughs of course such as the monolithic filter of some
ceramicdiskandhas been appliedtosome n c w filter years ago, hut these are difficult to predict, even if one is
types at' 45.5 kHz. playing an active part in the development. Some of the
One of the m o d importantCharacteristics of piezo- moreprctlictahleareasaresizereduction, an expanded
electric. transtluccrs is thecapability of operatingin use of lan--frequencyfilters, animprovement of delay
variousmodes of vihration,as m 1 1 asusein a large andripplecharacteristics,therealization of multireso-
nunlhcr of mechanical configur 1011s. a t' natormonolithicfilterswithfiniteattenuationpoles,as
A good examplc i3 shon-11in Fig. 8 where flexure modes well as variousin~proverncnt,~inthediscreteelement
JOHNSON et al.: REVIEW OF MECKINICAL FILTERS 167

mechanical filter as a result of the large amount of effort

being expended on monolithic filters.

Size Reduction
In terms of mcch:mical filters, size reduction is still a
relatively uncsplorcd technology. In the case of disk-wire
mechanical filtcm a size reduction from 5.0-1.3 cm3 was
madewithrelativelylittleeffortandnobreakthroughs
in t,ecImology othclr than thc use of a lower order mode of
vibrat'ion. By making use of ceramictransducersand
small diameter disks the volume can be reduced by 2 : l
without a great deal of difficulty. ilt the present time, the
longitudinal-mode bar, flexural-coupling rod design inde-
pendentlydevelopedby Biirner [54] andIionno [IS],
(seeFig. 27) is packagedin less than 1 cm".Although
it may be somewhat more difficult (in comparisonwith
thc tlisk-wirefilter)toreducethesize of thisdesign
because of the fixed length of the resonators, it is pos- Fig. 27. I\ilininture 155-kHz rod-wire met.hnnicnl filter ( l cn?).
sible to do so by decreasingthediamctcr of the rods,
butonlytothepoint where flexuralmodes bcconle a
problem. Discrete element filters such as the disk or rod
types actually have an advantage over monolithic struc-
tures(Fig. 28) in that relativelylargep latingsur-
faces are not needed to reduce both the filter impedance
level and the effects of straycapacity.Diskand rod-
type filters are low-impctlancedevicesbecause of the
high dicllectric constant of PZT transducer materials, or
in the case of magnetostrictivefcrrites,the ure of IOTY- Fig. 25. Eight-pole monolithic clunrtz mec,hnnic:Il filtcr
turn coils. In addition, only t,wo transducers are needed.
resonator?pacing is conmlonly 0.025 cm rcgnrdless of
filter hnndwiclth! and none of the volume is usecl for. the
p1lrpow of rr(1ucing rrbflections from a boul1cl:iry ant1 very
littlc is u w ( 1 for support.
I t n111rt l)e Fait1tl1:lt tllcre arc :1ls0 some basic limita-
tions :IS t o hen, nn:~llTW ran hilt1 a discrete component
mechnnic~:~lfilter. One: of co~~rr;c',isthat of fnhricating
theparts antl nw~tnhlingthen1 withoutcwessivcfre-
rlucncy shifta ntlI ni>coupling. A wcond limit:ltion, as
w e ' tli.srusscc1 earlicr,is t h a t of spurious no dos due t o
having to fix one of thetlimcnsionsthustlrcrcasingthe
frequency spacing of nearbyhcnding modes 1541. & h -

athcv size-retlllction linlitntion relates to the nonlinearity

of the transtluccr and resonator nlaterinls a. a function
of size. Y:lkuma has matlc a very interc,sting comparison
of ferrite co ~' einductors,p iezoclcctricceramics,n ickel
alloys,a ntlq uartz,s howing the relationshipbetween
various loss factors and minimumsizefor a specific s o n ~ eof the wi(1e variety of filters k i n g manufactured
handwiclth filter [61]. A final consideration is the three- byFujitsu 1,td. IIosta pplications of low-frequency
dimensionalshape of mostdiscreteelementmechanical mechanicalfiltersinvolveselectingsingletones,which
filters, which not only prevents the use of planar manu- inturnmeans t h a t onlyoneotrworesonators at'e
facturing proccsscs butu ltimatelymay be themost needed. Therefore, the selectivity is dependent solely on
seriousvolume-rccluctionlimitation. resonatorsthat are coupled totheexternalmounting
structure. This results in lower resonator Q and micro-
Low Frequencies phonicresponsesduetoexternalvibrations.
T h e large amount of development work on
low- The microphonicsproblemhas been solved t o some
frequency filters in Japan will most probably be felt in degree by the use of highly damped supports. This has
ot8herparts of theworld.Fig. 29 shows, for example, made it, possible to use funclamental modes of vibration,
168 IEEE TIL\NS.KTIORTS ON BONICS A N D ULTRASONICS, JULY 1971
0.9538

Arf-l

l98 200 202 204

FREOUENCY !kHz)

uuuuuuuuuuu

12
1 1 L I
I
0
\ I
200 207 W 204
L

c
~ , 7 L < / ’ :x4<,,;;:,
,,,7/,;<<<; n >;,’.:,,’; a

3
-Oo2i r’ FREOUENCY (kHz1
z

U
c

(l>1
Fig. 30. Mcasurcd ( a ) stopbnndamplitudea nd ( h ) passband
response of a high-performancerod-wiremechanirnlfilter that
emplavs douhlo rcsonatorbridging of thetypeshown in Fig. l 199 2008 ~
14 (Tclrfunkcn).
FREUUZNCY i k H r )

which redurc both the complexity of thefilterandits

physical size. T h e problem of minimizing unwanted out-
puts due t o impulse noise may be solved to some degree
h y the use of H-shaped resonators [ G 2 ] . Thistypc of
filter consists of two idcnticnl vertical masses connected
by a flexible web (the horizontalelcment of the H ) . -4
piezoelectricceramic transducercausesthe web to flex computer-niclctl tuning tt~chniques, which have also been
and the masses torotate. Each mass is supported near rcportc(1 1)s Ynno [68]. In ortlcr to further improve the
its centroid, thus preventing the ~ r c hfrom flexing when excellentresponse of voice chmnel filters, it will be
subjected t o n shock impulse through the support.. A advantageous in some c a s c ~ t o ~ n auks e of on-line com-
detailed analysis of the frequencyresponse chnracterist’ics putersinthefactory.T he tlevelop~nent of practical
of this device hns hccn macle by Konno [631. computcr-a..,~isted tuning methodsm ay result from work
presently h i n g done on quartz monolithicmechanical
I n p - o v e n ~ e n ot j Delny and Passband Ripple filters.
I t ispossihlc tointornally delay equnlize a ~ n e c h a n -
icnl Incider filter by making use of bridgingu-ires C2.51.
Quartz Jlonolithic Allechanirnl Filters
This 1x1s p m w l t o hc a ~ o r ypracticaln wthotl [G$], Inmuch t h e s:tnlc n’ay 11s the t l i m t t c elenltwt me-
[65). This ticsign ia h a w 1 on the mc of very exact chanicalfiltwmay benefit from monolithicmechanic:d
clllar.tcr-~~avelength long coll1)ling nircs. No frequency filtertccllnology, R number of concepts ,such :Mac!onstic
acljustnlcnts arc ncctlctl nftcrassembling the pretuned hridging will he applied t o themonolithicfilter. A t the
ro.mn:ltor.q:, in the case of chnnnclfilterswithpairs of present timc,attenuation poles arer ealizedin t,wo-
attt~n~lntion poles (Fig. 30 :~nd[ M ]) andinthe case resonator str11ctarcs throughcapacitivebridging.T he
of rllanncl filtcrs n-it11 tlrl:zy equalization (Fig. 31). tn-o-resonatorsections :ire capacjt,ivelycoupled t o form
Anothcr practical method is t o w e mechanical resonators n multiwronnntfiltcrhaving a somewhat equal-ripple
ancl couplingclomrntsin a n electricallatticestructure response [SS]. It is pmhnhle that exact, designs with four
in much t h e same way :E quartz resonators are usetl [67]. or more re.sonators 1wr plate ant1 electricalbridging
T h e work onlattice filter,? has resultedinsomenew will soon hccome availal~le.
JOHNSON et al.: REVIEW OF MECHAXICALFILTERS

It has alrezttly been shown thatthickness modes can

bc trapped in much the same way as the shearing modes
[ 7 0 ] ,w hich leads us to suspect that other new configura-
tions will be dcvelopcd in the next, few ye:~rs.
A large amount of technology has been devoted t o the
nlonolithicmechanicalfiltermanufacturing process^ for
inst:lnce in :~reas such as the w e of a laser to vary the
couplingbetweenelectrode p i r s and thefahrication of
extremelyflatandparallelcrgstdblanks. It is certain
that this work will continue for a long period of time and
shoultl he app1ic:tt)lc to nmhnnical filtertechnology in
gencr:~l.

neve1opwcnts in (Ithe/. C’orcntries

c a l dcvelopnent~outside of ,Japan, West
~ h ~ l ~ a n ifiltcr
Germany, and thc Is. S. llas1 )rimarily bccn concen-
trated on distributed linc, filters of the type shon.11 in
Fig. 7 ( a ) . This has Ileen the case in Great Britain [71],
Poland [ 721, the USSR [ 731, and East’ Germany, where
they have becn Innnufnctureclforsome years. Recent
papers publiwhctl in Englnnd have reflected an interest in
transducer dcaign [74] antllow-frequencyflexure mode
resonators 1751. A study of flexure modes in mechanical
filtcrsisalsoasubject of interesti nCzechoslovakia
[ E ] .At this time, channel filters of t h e configuration of
Fig. 511)) arc manufacturedinE astGennany (200
kHz) [771 antli nCzechoslovakia (64-108 kHz) [78].

[31 M . L. Doclz and J. C. Ra,thnwny, “How to use mechnnicnl

I-I.’ filters,” Electronics, vol. 26, Mar. 1953: pp. 138-142.

I41 ( i . A . C:lmpbell, ”Physicnl theory of the rlectric ~vavc-filter,”

B e l l S y s t . Yech. J., vol. 1, Nov. 1922, pp. 1-32.

151 R . V . L. Hartleg, “Frequency selective transmission system,”

L.S. Pntcmt 1654 123, Dec. 1927.

I61 J . 1’. Mnxfield and H. C. Hnrrkon, “Methods of high qunlity

rcvording and rt,producing of music and speech based on k l e -

phoneresearch,” Bell S y s t . Tech. J., vol. 5, July IWG, pp.

493-523.

[TI JV. 1’. Mason, “W:lve transmission network,” U S . Patent

2345491. Mar. 1944.

[SI R . A . Sykrs and W. D. Beavcr, “High frequency monolitllic

filtexs with possible application to singlc freclucwcy a n d sin-

gle sideband u s ~ , ”Proc. Annu. Fwquencv Control Sum-

p o s i ~ mApr., 1966, pp. 28S-308.

[91 l’. Nnkaznwa, “High frequency crystal t ~ l ~ ~ ~ t r o n ~ c c . lfil-

~n~~ic~al
ter,” PTOC.A ~ t n u Frequency
, Control Sgrmposirtrn, Bpr. 1962,
o n . 373-300.

Ovt. 1952.
1121 31. Btimvr. E , Tict,icl, ant[ H. Olln.;orgc. “hlcclrnnisrhefilter
fiir die nnc.hriclrtentcrhnik,” T e k j z l n k e u J.; vol. 31, June
1958. IIP. 105-114.
[l31 31. K j r n c r : E. Diirre, a n d I€. Schiislrr, “RI(~ll:lniscl1r
Tekfunken J., vol. 36, h h y 1933, pp.
I~~i~wc.iten-\~:u~~tliilter,”
272-280.
[l41 T. Tanaka Rntl T. Inoguchi. “Studies on electronics materials
a n d their npplic:~tion.;,” Division of Elrctronics Mntr,ri:ils.
Inslitule for Chemical Research, Kyoto Univ., Kyoto, Japan,
1959, p1J. 22-25.
170 IEEE TRANSACPIOSS ON SONICS A N D ULTRASONICS, JULY 1971
L431 M. Onoe and T. Yano,“Analysis of flexural vibrations of a polfilter,” Diplom-Arbeit, Institut fiir HF-Technik und HF-

circular disk,” ZEEE Trans. Sonics Ultrason., vol. SU-15, Physik der
Technischcn Hochschule Karlsruhe,
Munich,

JuI~ 1968, pp. 182-185. Germany, 1%.

1441 R. L. Sharma.“Enuivalentcircuit of a resonant. finitr,. iso- l661 H. Schiisler.“Filternlitmechanischen resonatoren.” Bull.

tronic.elastic’circular disk.” ~, J- . Acoust. Soc. Am‘er.. vol. 28. Schweizerischer Electrotechn. Verein (Zurich), Ma;. 1969,
x o t . - i 9 5 6 , pp. 1153-1158. pp. 216-222.
L451 W. P. Mason, Electromechanicnl Tramducers and Wave Fil- 1671 R. il. Johnson, “New single sidchand mechanical filters,” 19’70
ters. NewYork:VanNostrand, 1948, pp. 291-297. WESC‘ON Tech. Papers, Aug. 1970, pp. 1-10,
1461 E. Frymover, J. Klovstad,and R. A. Johnson,“Equivalent I681 K. Shibayama,“Elcctromechanical filters,” Eleclron. C o m -
mass of a thickvibratine disk.” unoublished. mun. Jap., vol. 48, Kov. 1965, pp. 6 6 7 2 .
1471 M. O I ~ K“Contourvibrations’
, of i$otropiccircularplates,” 1691 H. Yoda, Y. Xakazama, and N. Kobori,“ Highfrcqucncy
J . A C O ~ L S .S OC. AWLET., vol. 28, N O V . 1056, pp. 11561162. crystal monolithic (HCM) filters,” Proc. 2Srd Annu. Symp.
I481 J. NIscr, “Exakt,e t)rrcchnung dcr biegcresonanzen rechtecki- Freguency Control, May 1969,. pp. 76-92.
ger und zylindrischer stLbe,” Bochfreq.und Elektroakust., 1701 S . Fujishima, S. Xosnka, and I. Ishiyama, “10 MC ceramic
vol. 74, 1965, pp. 30-36. filters h y trappedenergy modes,” Proc. A C O I L S ~ .Soc. Jap.,
L491 M. Konno and H. Naknmura, "Equivalent, elcctrirnl nrtwork h’ov. 1966,p. 3.
for the transversely vibrating uniform bar,” J . Acoust. SOC. L711 W. Struszynski, “h thcorcticalanalysis of thetorsional
Amer., vol. 38, Oct. 1965. pp. 614422. electron-mechanicalfilters,” MarconiRev.,3rdquart., vol.
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