BST, S&I, and EI

Lab Manual
S.No. Experiment Page No.

1 Design a MEMS Cantilever Beam and compare between 1

Point Load & Surface Load
2 MEMS Capacitance 11

3 Pressure Sensor 15

4 MEMS Comb Drive Actuator 19

I
LAB 1: MEMS CANTILEVER

AIM:

To model a MEMS Poly-Silicon cantilever using COMSOL and simulate the stress
and deflection caused due to:
 Boundary load
 Point Load
Modeling Instructions

A. To Simulate Boundary Load

1. At COMSOL start-up screen, select: Model Wizard  3D (Space

Dimension).

2. Select Physics: Structural Mechanics  Solid Mechanics (solid)  Select

Study  Stationary.

1
3. Select Geometry and change ‘Length unit’ to µm (micrometer).

4. Right Click ‘Geometry’  Select ‘Block’.

 5. Enter the Block Dimensions  Click ‘Build Selected’ / ‘Build All Objects’. **

Width 20 µm
Depth 100 µm
Height 5 µm

*Build Selected* builds and displays the current geometrical object in consideration along with all the objects above it in the
Geometry list.

*Build All Objects* builds all the geometrical objects added to the model and displays them.

6. To add material for our geometrical component: Select ‘Add Materials’

from top ribbon menu or Right click ‘Materials’ under ‘Model Builder’ panel
and select ‘Add Materials’  ‘MEMS’  ‘Semiconductors’  ‘Poly-Si’ 
‘Add to Component 1’.
7. Right-click ‘Solid Mechanics’  ‘Fixed Constraint’. Click ‘Boundary 2’ or
rotate block and select ‘Boundary 5’. Here we proceed by selecting
‘Boundary 5’ of the block.

(Or)

8. After selecting ‘Boundary 5’ click the symbol shown below, to get default
view back.


9. ‘Solid Mechanics’‘Boundary Load’Select top surface of block
(Boundary 4).

10. Enter the value of force = 10 Newton

We fill the row for z-axis as: -10

[The negative sign implies that force is acting downwards]
11. Build Mesh.

12. Compute and you’ll get Stress Plot.


13. To get Displacement Plot : In ‘Model Builder’, under ‘Results’ right click
‘Stress’ and click ‘Surface’ – You’ll see ‘Surface 2’ : Click Replace
Expression  Solid Mechanics  Displacement  Total Displacement
 Click ‘Plot’


  Change color of legend to distinguish between plots.

** If you want separate plots and not on same Graphic display, then don’t create ‘Surface 2’ rather ‘Replace Expression’ in
‘Surface 1’ itself.

Case:

 Keep the force constant and vary the ‘Depth to 150, 175 and 200.
Note down the stress and displacement in each case.

B. To Simulate Point Load

Same us above with a few added steps:
 After creating ‘Block 1 (blk1)’, right click ‘Geometry’  select ‘More Primitives’
 click ‘Point’.
 We want to position the ‘Point’ (i) along the center – [x-axis] (ii) near the
end of the block [y-axis] and (iii) exactly on the surface – [z-axis]. So
accordingly enter the coordinate values in the ‘Point’ settings window.

x 10 µm x: 10 µm = Half of Width
y 5 µm
z: 5 µm = Height of Block
z 5 µm
 Right click ‘Solid Mechanics’  ‘Points’  select ‘Point Load’.
 Zoom in the block and select the point created i.e. select Point 5.

Select this point

 In the ‘Point Load’ settings window, locate ‘Force, F p’. In the z edit field
type -10.

 Repeat above steps in ‘To Simulate Boundary Load’ to get displacement

and stress plots.

Expected Result for point load stress:

BRIEF REPORT
 To generate report of your simulation: Under ‘Model Builder’ panel right click
‘Report’ and select ‘Brief Report’.
 In the ‘Report’ settings window, change ‘Output format’ from ‘HTML’
to ‘Microsoft Word’.
 Click ‘Browse’ to choose your destination path. After entering desired
filename click ‘Save’.
 In the ‘Report’ settings window, click ‘Write’

Write

Change to Microsoft Word

LAB 2: MEMS PARALLEL PLATE CAPACITOR

AIM:

To simulate capacitance of a MEMS parallel plate capacitor using COMSOL.

Figure 1: Parallel Plate Capacitor Geometry.

Figure 2: Meshed Final Geometry

Expected Result:

Figure 3: Surface Capacitance

Modeling Instructions

From the File menu, choose New.

NEW
1 In the New window, click the Model Wizard button.

MODEL WIZARD
1 In the Model Wizard window, click the 3D button.
2 In the Select physics tree, select AC/DC>Electrostatics (es).
3 Click the Add button.
4 Click the Study button.
5 In the tree, select Preset Studies>Stationary.
6 Click the Done button.

GEOMETRY 1
1 In the Model Builder window, under Component 1 (comp1) click Geometry 1.
2 In the Geometry settings window, locate the Units section.
3 From the Length unit list, choose µm.
Block 1 (blk1)
1 In the Model Builder window, under Component 1 (comp1)> right click Geometry 1 and add
Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 100.
4 In the Depth edit field, type 100.
5 In the Height edit field, type 2.
6 Click the Build All button.
7 Click the Zoom Extents button on the Graphics toolbar.

Block 2 (blk2)
1 Right click Block 1 and click Duplicate.
2 In the Block settings window, locate the Position section.
3 In the z edit field, type 10.
4 Click the Build All button.
5 Click the Zoom Extents button on the Graphics toolbar

Block 3 (blk3)
1 Right click Block 2 and click Duplicate.
2 In the Block settings window, locate the Size section.
3 In the Height edit field, change the value to 8.
4 Locate the Position section.
5 In the z edit field, type 2.
6 Click the Build All button.
7 Click the Zoom Extents button on the Graphics toolbar

The model geometry is now complete.

MATERIALS
On the Home toolbar, click Add Material.

ADD MATERIAL
1 Go to the Add Material window.
2 In the tree, select MEMS>Semiconductors>Si – Polycrystalline Silicon.
3 In the Add material window, click Add to Selection.
4 Select Domains 1 & 3 only (i.e. the capacitor plates)
5 In the tree, select Built-In>Air.
6 In the Add material window, click Add to Selection.
7 Select Domain 2 only (i.e. the dielectric).

ELECTROSTATICS (ES)

Terminal 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Terminal.

2 Select the entire upper plate as terminal i.e. Boundaries 7, 8, 9, 10, 13, 16.

3 Locate Terminal type and select Voltage. In the Voltage edit field, type 5 (applying 5 volts).

Ground 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Ground.

2 Select the entire upper plate as ground i.e. Boundaries 1, 2, 3, 6, 11, 14.

Then in Home toolbar click Build Mesh and then click Compute to obtain Results.

RESULTS

Surface 1
1 In the Model Builder window, under Results> Electric Potential> right click Multislice and
choose disable.

2 Under Results>right click Electric Potential>add Surface.

3 In the Surface settings window locate and click this symbol. Type in the search bar ‘capacitance’
and add ‘es.C11 – Capacitance from the options in the list. Click ‘Plot’ to obtain Capacitance plot.

Change the dielectric material from Air to Glass (or any other desired medium) and note down the
change in capacitance.
has been reduced from 88 nm to around 50 nm.
LAB 3: PRESSURE SENSOR

AIM:

To model a MEMS pressure sensor using COMSOL.

Figure 1: Pressure Sensor geometry.

Figure 2: Meshed Final Geometry

Expected Result:

Figure 3: Surface Temperature

Modeling Instructions

From the File menu, choose New.

NEW
1 In the New window, click the Model Wizard button.

MODEL WIZARD
1 In the Model Wizard window, click the 3D button.
2 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid).
3 Click the Add button.
4 Click the Study button.
5 In the tree, select Preset Studies>Stationary.
6 Click the Done button.
 GEOMETRY 1
1 In the Model Builder window, under Component 1 (comp1) click Geometry 1.
2 In the Geometry settings window, locate the Units section.
3 From the Length unit list, choose µm.

Cylinder 1 (cyl1)
1 In the Model Builder window, under Component 1 (comp1)> right click Geometry 1 and add
Cylinder
2 In the Cylinder settings window, locate the Size and Shape section.
3 In the Radius edit field, type 100.
4 In the Height edit field, type 10.
5 Click the Build Selected button.
6 Click the Zoom Extents button on the Graphics toolbar.

The model geometry is now complete.

MATERIALS
On the Home toolbar, click Add Material.

ADD MATERIAL
1 Go to the Add Material window.
2 In the tree, select MEMS>Semiconductors>Poly-Si.
3 In the Add material window, click Add to Component.
SOLID MECHANICS (SOLID)

Fixed Constraint 1
1 In the Model Builder window, under Component 1 (comp1)> right click Solid Mechanics (solid)
and add Fixed Constraint.
2 Select only the curved surface of the cylinder i.e. Boundary 1, 2, 5, 6 only.

Boundary Load 1
1 In the Model Builder window, under Component 1 (comp1)> right click Solid Mechanics (solid)
and add Boundary Load.
2 Select Boundary 1 only.
3 In the Boundary Load settings window, locate Force and choose Load type as Pressure.
4 In the Pressure edit field enter p = 100e-6 (i.e. 100 micro Pascals)

Then under Home click Build Mesh and then click Compute to obtain Displacement plot under
Results.

Case:

 Keep Height constant (=10) and compute displacement for Radius = 150, 175 & 200 µm.

 Keep Radius constant (=100) and compute displacement for Height = 12, 16 & 20 µm.
LAB 4: MEMS COMB-DRIVE ACTUATOR

AIM:

To model a MEMS Comb-Drive Actuator using COMSOL.

Figure 1: Comb-Drive Actuator Geometry.

Figure 2: Meshed Final Geometry

Expected Result:

Figure 3: Surface Total Displacement (µm)

Modeling Instructions

From the File menu, choose New.

NEW
1 In the New window, click the Model Wizard button.

MODEL WIZARD
1 In the Model Wizard window, click the 3D button.
2 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid) and click
Add. Then select AC/DC>Electrostatics (es).
3 Click the Add button.
4 Click the Study button.
5 In the tree, select Preset Studies>Stationary.
6 Click the Done button.
GEOMETRY 1
1 In the Model Builder window, under Component 1 (comp1) click Geometry 1.
2 In the Geometry settings window, locate the Units section.
3 From the Length unit list, choose µm.

Block 1 (blk1)
1 In the Model Builder window, under Component 1 (comp1)> right click Geometry 1 and add
Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 100.
5 In the Height edit field, type 2.
6 Locate the Position section.
7 In the z edit field, type -4.
8 Click the Build All button.
9 Click the Zoom Extents button on the Graphics toolbar.

Block 2 (blk2)
1 Right click Geometry 1 and add Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 10.
5 In the Height edit field, type 6.
6 Locate the Position section.
7 In the z edit field, type -2.
8 Click the Build All button.
9 Click the Zoom Extents button on the Graphics toolbar.

Block 3 (blk3)
1 Right click Geometry 1 and add Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 140.
5 In the Height edit field, type 14.
6 Locate the Position section.
7 In the y edit field, type -10.
8 In the z edit field, type -6.
9 Click the Build All button.
10Click the Zoom Extents button on the Graphics toolbar.
Block 4 (blk4)
1 Right click Geometry 1 and add Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 100.
5 In the Height edit field, type 2.
6 Locate the Position section.
7 In the z edit field, type 4.
8 Click the Build All button.
9 Click the Zoom Extents button on the Graphics toolbar.

Block 5 (blk5)
1 Right click Geometry 1 and add Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 100.
5 In the Height edit field, type 2.
6 Locate the Position section.
7 In the y edit field, type 20.
8 Click the Build All button.
9 Click the Zoom Extents button on the Graphics toolbar.

Block 6 (blk6)
1 Right click Geometry 1 and add Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 10.
5 In the Height edit field, type 10.
6 Locate the Position section.
7 In the y edit field, type 120.
8 In the z edit field, type -4
9 Click the Build All button.
10Click the Zoom Extents button on the Graphics toolbar.
 The model geometry is now complete.

MATERIALS
On the Home toolbar, click Add Material.

ADD MATERIAL
1 Go to the Add Material window.
2 In the tree, select MEMS>Semiconductors>Si – Polycrystalline Silicon.
3 In the Add material window, click Add to Component.
4 In the tree, select Built-In>Air.
5 In the Add material window, click Add to Component.
MATERIALS

Air (mat2)
1 In the Model Builder window, under Component 1 (comp1)>Materials click Air (mat2).
2 Select Domain 1 only.
All other domains use Si – Polycrystalline Silicon as the material.

Material: Air Material: Si – Silicon

ELECTROSTATICS (ES)

Electric Potential 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Electric Potential.

2 Select Boundaries 22 & 23 only and in the Electric Potential edit field, type 50 (applying 50 volts).

Ground 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Ground.

2 Select Boundary 19 only.

Force Calculation 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Force Calculation.

2 Select Domains 2, 3, 4, 5, 6 only (i.e. only block of air is excluded).

3 In the Force Calculation settings window, locate Force name edit field and type fes.
SOLID MECHANICS (SOLID)

1 In the Model Builder window, under Component 1 (comp1)> select Solid Mechanics (solid).

2 In the Solid Mechanics settings window, delete domain 1. Domain 1 is the block of air and air is
not a solid, so it cannot be included in the Physics of Solid Mechanics.

Fixed Constraint 1
1 In the Model Builder window, under Component 1 (comp1)> right click Solid Mechanics (solid)
and add Fixed Constraint.
2 Select Boundaries 6, 9, 12, 31 only.

Boundary Load 1
1 In the Model Builder window, under Component 1 (comp1)> right click Solid Mechanics (solid)
and add Boundary Load.
2 Select Boundaries 7, 14, 19, 20, 21, 22, 23 only.
3 In the Boundary Load settings window, locate Force and select FA as User defined.
4 In the x edit field, type es.nTx_fes.
5 In the y edit field, type es.nTy_fes.
6 In the z edit field, type es.nTz_fes.

Then under Home toolbar click Build Mesh and then click Compute to obtain Results.

RESULTS

Surface 1
1 In the Model Builder window, under Results>Stress (solids)> select Surface 1

2 In the Surface settings window locate and click this symbol and choose Solid
Mechanics> Displacement>solid.disp – Total Displacement. Click ‘Plot’ to obtain
Displacement plot.

Scale Factor: As seen in the Graphics window, the two combs appear to intersect each other.
To handle this we need to change the Scale Factor so the combs just touch each and not
appear to cross.

3 In Results>Stress (solids)>Surface 1> select Deformation.

4 Under Deformation settings window, locate and tick Scale factor.

5 In the Scale factor edit field, type 18000. This value may vary from user to user. For
this simulation, by trial and error, value of 18000 was found to be appropriate.

Before Scaling After Scaling

Player 1
1 On the Results toolbar, choose Player.

2 In the Player settings window, locate Animation Editing and choose Sequence type: Dynamic
data extension and Cycle type: Linear.

3 Locate Playing and tick Repeat.

4 In the Graphics window, click Play to play animation and click Stop to stop animation.

Player Frame: 0 – (yz plane)

Player Frame: 25 – (yz plane)