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Aquavolt+: Precision Moisture Analyzer

The AquaVolt+ is a precision moisture analyzer that provides accurate and calibration-free trace moisture analysis down to very low ppbV levels. It is suitable for a wide range of applications including semiconductor manufacturing, specialty gases, aerospace and military uses. The compact and easy to use device has adjustable outputs, mass flow control, on-line verification capabilities, and reliable electrolytic sensors. It offers flexible configuration, field upgradable software, and a two-year service warranty.

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111 views

Aquavolt+: Precision Moisture Analyzer

The AquaVolt+ is a precision moisture analyzer that provides accurate and calibration-free trace moisture analysis down to very low ppbV levels. It is suitable for a wide range of applications including semiconductor manufacturing, specialty gases, aerospace and military uses. The compact and easy to use device has adjustable outputs, mass flow control, on-line verification capabilities, and reliable electrolytic sensors. It offers flexible configuration, field upgradable software, and a two-year service warranty.

Uploaded by

Doge Captain
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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AquaVolt+

Precision Moisture Analyzer


Industrial Gas Electronic Gas Natural Gas Medical & Aviation Aerospace & Military Glove Box Specialty Gases

Reliable and longstanding staple of the high purity gas industry, the AquaVolt+ provides accurate, calibration-
free technology for trace moisture analysis to very low ppbV. It excels across a range of applications,
among them:
● Semiconductor manufacturing ● Government research and industrial
● Refrigerant gases, such as C3H2F6, CF4, laboratories. Example: DNA research for drug
CH2F2, and CH3F, among others, used to etch development and genetic therapies
polysilicon and for Chemical Mechanical ● Shielding gases for orbital welding
Planarization (CMP) ● Aerospace and military
● Specialty gas applications, including Silane ● Helium and Nitrogen Gases: ~ 0.5 to 1 ppmV
used for wafer deposition and more for tube trailer moisture verification
● Hexafluoroethane (C2F6) for semiconductor ● Pressure Swing Adsorbers (PSAs) used in
tool chamber cleaning, removal of silicon Helium Recovery
dioxide from silicon wafers, and plasma etch ● Mobile cart applications

Well thought out features save space, ease operation, and boost confidence, including:

❑ Compact, flexible footprint: Two analyzers can fit neatly into ONE 19” RACK!

❑ Ease of Use: User-friendly keypad interface, bright vacuum fluorescent display (VFD) and helpful
menu-driven prompts make it simple to specify, to configure, and to start up for your specific
application.

❑ Flash upgradable software: Easily upgrade unit software via RS232 port.

❑ Adjustable outputs: Flexibility to change output scales in the field. No need to replace electronic
components or open the analyzer. Simply open the menu via Mode/Enter key and select Output scale.

❑ Mass Flow Control: Select your sample gas from the main menu and the microprocessor
automatically adjusts the mass flow controller to the proper set point.

❑ On-line verification: Conveniently verify proper cell operation using simple Delta Flow procedure to
check sensor linearity and performance on-line.

❑ Consistency and precision: The reliability and accuracy of MEECO’s time-proven electrolytic
sensors are unique among its peers. When you have been doing something since the early 1950’s,
you approach perfection...
AquaVolt+
Specifications:
Detection Limit (LDL): 35 ppbV

Operating Range (for


0-20 ppmV; for Oxygen, the range is 0-12 ppmV
inert gases):

Accuracy: ±5% of reading or 0.4 ppmV, whichever is greater


In Oxygen: ±20% of reading or 100 ppbV, whichever is greater.

Cell type (P2O5) AILR, AOLR, AHLR

Inert gases, Oxygen, Hydrogen, Clean Dry Air (CDA), Methane, Ethane, Propane, Normal
Gas Matrices Library: Butane, Isobutane, Carbon, and others, including gas mixtures. For other gases, please
consult factory.

*For Oxygen (mixtures) AOLR cell is required, for Hydrogen (mixtures) AHLR cell is required.

Inlet Pressure: 10-3000 psig (0.7 – 207 bar).

Operating
0°C to +60°C (32°F to +140°F), maximum 80% RH non-condensing
(Ambient) Conditions:

Cell: 100 sccm


Flow Rate:
Bypass 1000 sccm
Display unit options: ppmV, ppbV, ºC or ºF dewpoint

Gas Connections: Inlet: 1/4” VCR, Outlet: 1/8” compression. Bypass outlet 1/8” compression

Field Configurable Isolated 0-5 VDC or Isolated Current Output 4-20mA, 0-20mA, or 0-24 mA --
Signal Output:
RS - 232 Communications – Standard

Alarms: Two (2) user-adjustable moisture levels

Electrical: 100 – 240 VAC, 50/60 Hz, 50 watts.

User Interface: 5-key Membrane Keypad. 2-line x 20-character Vacuum Fluorescent Display (VFD).

Weight: 22 lbs. (10.0kg)

Dimensions
7” x 8.19” x 14.66” (17.78 cm x 20.80 cm x 37.24 cm)
(H x W x D):

Mounting Standalone (Optional: 19” Rack Mount (Size: 7”x 19” x 17” (17.8 cm x 20.3 cm x 35.6 cm))

Approval: CE Mark

Service with a Big Smile 😎: The AquaVolt+ comes with a full two-year Certificate of Calibration. The cell can
easily be replaced in the field, with no need to disconnect the unit from the sample stream! Also, spare cells now
have a two-year storage life if kept in their sealed shipment bags.

250 Titus Avenue, Warrington, PA 18976


Phone: +1 215-343-6600
[email protected] ♦ www.meeco.com
4/2021

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