ENEE 359a: Digital VLSI Circuits
ENEE 359a: Digital VLSI Circuits
Lecture/s 3-5
Transistors &
CMOS Inverter
SLIDE 1
University of
• Electrons & holes, bands & band gaps,
Maryland
ECE Dept.
insulators, conductors, semiconductors
SLIDE 2 • Silicon crystal lattice & doping
• P/N junction & parasitic capacitance
• n-type/n-channel MOSFET
• Timing analysis of MOSFET, capacitance
• Body effect, series-connected FETs
• CMOS inverter: timing, switching
threshold, transistor sizing
• Dynamic behavior (preview)
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter What Is Conductivity?
Bruce Jacob
University of
Perspective from Band Theory of Solids:
Maryland
ECE Dept. Large band gap (not “Gap Band”) between
valence and conduction bands in insulator
SLIDE 3 material suggests that, at ordinary
temperatures, no electrons can reach
Energy of electrons conduction band (i.e. material won’t conduct)
Conduction Band
Conduction Band
Valence Band Valence Band Valence Band
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Maryland
ECE Dept.
SLIDE 4
Si
14 protons in nucleus
4 valence electrons
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Maryland
ECE Dept.
Si
SLIDE 5
Si Si Si
Shared electrons
of covalent bonds Si
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Silicon Lattice (artistic license exploited)
Maryland
ECE Dept.
Si Si Si Si Si
SLIDE 6
Si Si Si Si Si
Si Si Si Si Si
Si Si Si Si Si
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Silicon Lattice — It is a semiconductor
Maryland
ECE Dept.
Si Si Si Si Si
SLIDE 7
Si Si Si Si Si
Si Si Si Si Si
Hole
Si Si Si SiFree Si
electron
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Semiconductor current: electron/hole flow
Maryland
ECE Dept.
SLIDE 8
Si Si Si Si
Si Si Si Si
Si Si Si Si
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Silicon, Specifically
Bruce Jacob
University of
Perspective from Band Theory of Solids:
Maryland
ECE Dept.
0K 300K
(no electrons in conduction band)
University of
Doping: small % of foreign atoms in lattice
Maryland
ECE Dept.
SLIDE 10
P B
SLIDE 11
Si B Si
Conduction Band
Si
Extra hole energy levels
Valence Band
Addition of acceptor impurities contributes hole energy levels low in the semiconductor band
gap so that electrons can be easily excited from the valence band into these levels, leaving
mobile holes in the valence band. This shifts the effective Fermi level to a point about halfway
between the acceptor levels and the valence band. Electrons can be elevated from the
valence band to the holes in the band gap with the energy provided by an applied voltage.
Since electrons can be exchanged between the holes, the holes are said to be mobile. Holes
are said to be the “majority carriers” for current flow in a p-type semiconductor.
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter N-Type Semiconductor
Bruce Jacob
University of
Maryland Si
ECE Dept. Donor impurity
creates free electron
SLIDE 12
Si P Si
Conduction Band
Si
Valence Band
Addition of donor impurities contributes electron energy levels high in the semiconductor band
gap so that electrons can be easily excited into the conduction band. This shifts the Fermi
level to a point about halfway between the donor levels and the conduction band. Electrons
can be elevated to the conduction band with the energy provided by an applied voltage and
move through the material. Electrons are said to be the “majority carriers” for current flow in an
n-type semiconductor.
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter One Way to Think About It
Bruce Jacob
Acceptor side Donor side
University of
Maryland
ECE Dept.
Conduction Band Conduction Band
SLIDE 13
Extra hole energy levels
Extra electron energy levels
P-type N-type
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
Acceptor side Donor side
University of
Maryland
ECE Dept.
Conduction Band Conduction Band
SLIDE 14
Extra hole energy levels
Extra electron energy levels
P-type N-type
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
Acceptor side
University of
Maryland
ECE Dept.
Conduction Band
Donor side
SLIDE 15
Extra hole energy levels
Conduction Band
Valence Band
Diode
P-type N-type
silicon silicon
p-n junction
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
University of
DEPLETION REGION
Maryland
ECE Dept.
SLIDE 16
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
University of
DEPLETION REGION
Maryland
ECE Dept.
SLIDE 17
University of
DEPLETION REGION
Maryland Negative Positive
ECE Dept. ion ion
SLIDE 18
Mobile Mobile
hole electron
depletion region
University of
DEPLETION REGION
Maryland
ECE Dept.
SLIDE 19
two plates of
a capacitor
Cj
Parasitic capacitance: Built-in junction potential:
C j0 N A N D
C j = ------------------------
- φ 0 = φ T ⋅ ln ----------------
Vd m n2
i
1 – ------
φ0
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
University of
BIAS EFFECT on DEPLETION REGION
Maryland
ECE Dept.
SLIDE 20
Equilibrium
P N
depletion region
Conduction Band
Extra hole energy levels
Conduction Band
Valence Band
University of
BIAS EFFECT on DEPLETION REGION
Maryland
ECE Dept.
SLIDE 21
Forward Bias
P N
depletion region still exists
Conduction Band
Conduction Band
Extra hole energy levels
Valence Band
Valence Band
P-side is made more positive relative to N-side, making it “downhill” to move an electron
across the junction. Electron on N-side can fill a vacancy (“hole”) on P-side & move from
hole to hole to the left to positive terminal (hole “moves” right).
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The P/N Junction
Bruce Jacob
University of
BIAS EFFECT on DEPLETION REGION
Maryland
ECE Dept.
SLIDE 22
Reverse Bias
P N
depletion region increases in size
until new potential = applied bias
Conduction Band
Extra hole energy levels
Valence Band
Conduction Band
P-side is made more negative relative
to N-side, making it “uphill” to move an
electron across the junction. Applied
voltage impedes the flow of N-region Extra electron energy levels
electrons across the p/n junction. Initial
transient electron flow is left to right; it
stops when potential (widening depletion Valence Band
region) equals the applied voltage.
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
MOS Transistor, reverse-biased:
University of
Maryland
ECE Dept.
SLIDE 23
PN N-Doped
Junction Region
[mobile electrons]
P-Doped
Region
n [mobile holes]
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
MOS Transistor, reverse-biased:
University of
Maryland
ECE Dept.
SLIDE 24
VDD VDD
N-Doped
P-Doped
Regions
Region
[donor electrons]
[acceptor holes]
VSS
n n
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
MOS Transistor, reverse-biased:
University of
Maryland
ECE Dept.
SLIDE 25
VDD VDD
Insulator
(gate oxide)
VSS
n n
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
NMOS Transistor with gate:
University of
Maryland
ECE Dept.
0
SLIDE 26
+ +
Conductor
Insulator
(gate oxide)
0
n n
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
NMOS Transistor with bias voltages:
University of
Maryland
ECE Dept.
0
SLIDE 27
0 +
Conductor
Insulator
(gate oxide)
0
n n
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
NMOS Transistor with bias voltages:
University of
Maryland
ECE Dept.
+
SLIDE 28
0 +
Gate
(conductor)
Insulator
(gate oxide)
0
n n
CURRENT
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
NMOS Transistor, two views:
University of
Maryland
ECE Dept. Length
SLIDE 29
Width
TOP
VIEW
SLIDE 30
VSS
n channel n
Gate Gate
Source Drain Source Drain
0 0 0 V>0
V>0 V>0
Electron Flow
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
PMOS Transistor with bias voltages:
University of Gate
Maryland
ECE Dept. Drain Source
SLIDE 31
VDD
p channel p
Gate Gate
Drain Source Drain Source
0 VDD 0 V<VDD
V>0 V>0
Electron Flow
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Transistors
Bruce Jacob
MOS Transistors:
University of Gate Gate
Maryland
ECE Dept. Source Drain Source Drain
SLIDE 32
VSS VDD
n channel n p channel p
NMOS PMOS
Gate Gate
Substrate Substrate
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter 0.25 µm transistor (Bell Labs)
Bruce Jacob
University of
Maryland
ECE Dept.
SLIDE 33 Silicide
Poly
Gate
oxide
University of Gate
Maryland
ECE Dept.
SLIDE 34
n+ n+
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter MOS Behavior
Bruce Jacob VSource VGate VDrain
University of Gate
Maryland
ECE Dept.
SLIDE 35
n+ n+
VS = 0V VG = 0.5V VD = 0V
Charge Density
Gate
Oxide
SLIDE 36
n+ n+
VS = 0V VG = 1V VD = 0V
Charge Density
Gate
University of Gate
Maryland
ECE Dept.
SLIDE 37
n+ n+
VS = 0V VG = 1V VD = 0.001V
ε ox W
dielectric constant
electron mobility
I DS = µ n ------- ----- ( V GS – V T )V DS
t ox L
oxide thickness
V(y) VGS – V(y)
1V
0.75V
VDS
y (channel) y (channel)
University of Gate
Maryland
ECE Dept.
SLIDE 38
n+ n+
VS = 0V VG = 1V VD = 0.15V
electron mobility ε ox W
dielectric constant
University of Gate
Maryland
ECE Dept.
SLIDE 39
n+ n+
VS = 0V VG = 1V VD = 0.25V
1 ε ox W 2
I DS = --- µ n ------- ----- ( V GS – V T )
2 t ox L
V(y) VGS – V(y)
VDS 1V
0.75V
y (channel) y (channel)
University of Gate
Maryland
ECE Dept.
SLIDE 40
n+ n+
VS = 0V VG = 1V VD = 0.35V
1 ε ox W 2
I DS = --
- µ ------
- ----
- ( V – V T ) ( 1 + λ V DS )
2 n t ox L GS
length modulation factor
V(y) VGS – V(y)
effective channel length decreases over this range, effective gate potential
VDS 1V is not sufficient to create inversion layer
0.75V
0.65V
y (channel) y (channel)
University of
Values for generic 0.5 µm process:
Maryland
ECE Dept. ε ox
k’ (transconductance) = µ n ------- VT
SLIDE 41 t ox
University of X 10-4
Maryland 2.5
ECE Dept. VGS = 2.5V
SLIDE 42 2
Linear dependence
VGS = 2.0V
1.5
ID (A)
1 VGS = 1.5V
0
0 0.5 1 1.5 2 2.5
VDS (V)
NMOS transistor, 0.25um, Ld = 0.25um, W/L = 1.5, VDD = 2.5V, VT = 0.4V
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter PMOS I-V Plot
Bruce Jacob l All polarities of all voltages and currents are reversed
University of -2 VDS (V) -1 0
Maryland
ECE Dept. 0
SLIDE 43
VGS = -1.0V -0.2
ID (A)
-0.6
VGS = -2.0V
-0.8
VGS = -2.5V
-1 X 10-4
SLIDE 44
V C
–t ⁄ τ
v out(t) = ( 1 – e )V τ = RC
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Capacitances
Bruce Jacob VSource VGate VDrain
University of Gate
Maryland
ECE Dept.
SLIDE 45
n+ n+
Gate is
capacitor
p (bulk)
Depletion Regions are capacitors
WLε ox Aε si I ⋅ τc
C gate = ----------------- C SC = ---------- C diff = -----------
t ox t si V th
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Body Effect
Bruce Jacob VSource > 0 VGate VDrain
University of Gate
Maryland
ECE Dept.
SLIDE 46
n+ n+
p (bulk/body)
output
A #A
GNDeffective for #A
B #B
University of
Maryland
ECE Dept.
SLIDE 48
input
GND VDD
NMOS output PMOS
N-Well
Cut line
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter CMOS Inverter Layout II
Bruce Jacob
University of VDD
Maryland
ECE Dept. +
SLIDE 49
tub ties
a out transistors
a out
GND
University of Rp
Maryland
ECE Dept.
SLIDE 50
VDD Vin = 0
CL
Rp
Vout
VDD
CL (load)
Rn
Vin = VDD
CL
Rn
Vin (V)
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter CMOS Inverter: Current
Bruce Jacob NMOS off
PMOS res
University of 2.5
Maryland NMOS sat
ECE Dept. PMOS res
SLIDE 52 2
Vin (V)
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Properties of CMOS
Bruce Jacob
University of
• Full rail-to-rail swing -> high noise
Maryland
ECE Dept.
margins
SLIDE 53
• Logic levels not dependent upon the relative device
sizes -> transistors can be minimum size -> ratioless
• Always a path to Vdd or GND in steady state -> low
output impedance (output resistance in kΩ Ω range) ->
large fan-out (albeit with degraded performance)
• Extremely high input resistance (gate of MOS
transistor is near perfect insulator) -> nearly zero
steady-state input current
University of
Maryland
ECE Dept.
SLIDE 54
Fan-out
Fan-in
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Aside:is capacitance all bad?
Bruce Jacob
Slows down output … Bigger capacitor,
University of more charge to
Maryland change voltage
ECE Dept. => SLOWER
SLIDE 55
University of W 2W
Maryland
ECE Dept.
L L
SLIDE 56 Source
Drain
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Long MOSFETs
Bruce Jacob poly Short S Long S
University of metal
Maryland
ECE Dept.
active
SLIDE 57
G G
n-well
via D
D
S
G
Really Long
D
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Wide MOSFETs
Bruce Jacob poly Narrow S Wide S
University of metal
Maryland
ECE Dept.
active G G
SLIDE 58
n-well
via G D D
Really Wide D
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Transistor Sizing II
Bruce Jacob
University of
Resistance of MOSFET:
Maryland
ECE Dept.
1 L
R n = ---------------------------------------------- -----
µ n C ox ( V GS – V Tn ) W
SLIDE 59
(units [A/V2])
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Transistor Sizing II
Bruce Jacob
University of
nFET vs. pFET
Maryland
ECE Dept.
1
R n = ------------------------------------- W
β n = µ n C ox -----
SLIDE 60
β n ( V DD – V Tn ) Ln
β p = µ p C ox -----
1 W
R p = ----------------------------------------
β p ( V DD – V Tp ) Lp
µn
----- = r Typically
µp (2 .. 3)
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Switching Point
Bruce Jacob
University of
Where Vin = Vout
Maryland
ECE Dept. NMOS off
PMOS res
SLIDE 61 2.5 NMOS sat
PMOS res
2
1.5
Vout (V)
NMOS sat
PMOS sat
1
Vin (V)
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Switching Point
Bruce Jacob
University of
At all points IDSn = IDSp (drain currents)
Maryland
ECE Dept.
At switching point, Vin = Vout = Vsp
SLIDE 62
βn 2 βp 2
------ ( V SP – V Tn ) = ------ ( V DD – V SP – V Tp )
2 2
βn
------ ⋅ V Tn + ( V DD – V Tp )
βp
V SP = -------------------------------------------------------------
βn
1 + ------
βp
metal2
VDD
pdiff
PMOS (4/.24 = 16/1)
NMOS (2/.24 = 8/1)
metal1-diff via
ndiff
GND
metal2-metal1 via
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter The Result II (Wp = 3Wn)
Bruce Jacob
VDD
University of
Maryland PMOS
ECE Dept.
1.125/0.25
SLIDE 64
1.2µm
=2λλ
Out
In
Metal1
Polysilicon
NMOS
0.375/0.25 GND
50%
Input
Waveform time
tpHL tpLH
Vout
90%
50%
Signal slopes
10%
Output
Waveform tf tr time
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Switching Delay
Bruce Jacob
VDD VDD
University of
Maryland
ECE Dept. Rp
SLIDE 66 CL VOUT VOUT
CL CL
Rn
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Switching Delay
Bruce Jacob
VDD VDD
University of
Maryland
ECE Dept. Rp
SLIDE 67 CL VOUT VOUT
CL CL
Rn
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Pair
Bruce Jacob
VDD
University of
Maryland PMOS
ECE Dept.
1.125/0.25
SLIDE 68
1.2µm
=2λλ
Out
In
Metal1
Polysilicon
NMOS
0.375/0.25 GND
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Inverter Pair
Bruce Jacob
Vout
University of
Maryland
ECE Dept. Vout
SLIDE 69 2.5V
Vh
Vth
Vtl
Vl
Output
Waveform
UNIVERSITY OF MARYLAND
ENEE 359a
Lecture/s 3-5
Transistors &
CMOS Inverter Dynamic Power Dissipation
Bruce Jacob
University of
VDD VDD
Maryland
ECE Dept. Rp
SLIDE 70 Ctot VOUT VOUT
CL CL
Rn
Q Ctot V DD ⋅ C tot
I avg = ------------ = ------------------------
T T
2
C tot ⋅ V DD 2
P avg = V DD ⋅ I avg = ------------------------ = C tot ⋅ V DD ⋅ f CLK
T
UNIVERSITY OF MARYLAND