Mechanism of Alkali Metal Compounds-Promoted Growth of Monolayer Mos: Eutectic Intermediates
Mechanism of Alkali Metal Compounds-Promoted Growth of Monolayer Mos: Eutectic Intermediates
Peng Wang, 1 Jiayu Lei, 1 Jiafan Qu, 1 Shengyong Cao, 1 Hu Jiang, 1 Mengci He,1
Hongyan Shi, 1,2 Xiudong Sun, 1,2 Bo Gao, 1,2,* and Wenjun Liu 3
030006, China
China
*E-mail: [email protected]
T (°C)
680
4 20 12 Time (min)
Figure S1. Temperature programming process used for MoS 2 growth. The CVD
system was purged with 300 sccm Ar (99.999% purity) for 4 min. The furnace was
heated from room temperature to 680 °C in 20 min, and MoS 2 was synthesized at
680 °C for 12 min under atmospheric pressure. After growth, the system was quickly
nm
0.65 nm
10 μm
μm
Figure S2. (a) AFM image of a monolayer MoS 2 flake on SiO 2/Si substrate and (b)
the height profile along the blue line in (a). The thickness of the MoS 2 layer is 0.65
Intensity (a.u.)
Intensity (a.u.)
A1g
A1g
Figure S3. Typical Raman spectra of MoS 2 flakes grown (a) with and (b) without
promoter. The frequency differences between E 12g and A1g modes were 19-20 cm -1,
indicating monolayer.
NaOH Na2SO4 NaCl EDTA-4Na
E12g E12g
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
E12g E12g 20 μm 20 μm
25 μm 25 μm
A1g A1g
A1g A1g
360 380 400 420 360 380 400 420 360 380 400 420 360 380 400 420
Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1)
CH3COONa
1
C6H5Na3O7 KH2PO4 KI
E2g
40 μm E12g E12g 45 μm
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
1 40 μm 30 μm
E2g
360 380 400 420 360 380 400 420 360 380 400 420 360 380 400 420
Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1)
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
20 μm 1 25 μm 20 μm
E12g
E 2g E12g
A1g
A1g A1g A1g
360 380 400 420 360 380 400 420 360 380 400 420 360 380 400 420
Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1) Raman shift (cm-1)
Figure S4. Raman spectra and optical images (inset) of MoS 2 synthesized with Na-,
K-, Li-based alkali metal compounds as promoter. All materials show promoting
effect for monolayer MoS 2 growth. More details of the Raman peaks are shown in
Table S1.
Table S1. Parameters of E 12g and A1g modes extracted from Figure S4.
It can be seen that all of the frequency difference between the two characteristic
Figure S5. Large-area optical images of as-grown MoS 2 associated with alkali metal
compounds, while the insets show the images from control experiments without alkali
Intensity (a.u.)
Intensity (a.u.)
26.2 cm-1
50 μm 50 μm
360 390 420 360 390 420
-1
Raman shfit (cm ) Raman shift (cm-1)
MgCl2 ZnCl2
MgCl2 ZnCl2
21.7 cm-1
Intensity (a.u.)
Intensity (a.u.)
26.3 cm-1
50 μm 50 μm
360 390 420 360 390 420
Raman shfit (cm-1) Raman shfit (cm-1)
26.3 cm-1
Intensity (a.u.)
Intensity (a.u.)
50 μm 50 μm
360 390 420 360 390 420
-1
Raman shift (cm ) Raman shift (cm-1)
PbI2 AlCl3
PbI2 AlCl3
20.4 cm-1
Intensity (a.u.)
Intensity (a.u.)
25.2 cm-1
50 μm 50 μm
360 390 420 360 390 420
Raman shift (cm-1) Raman shfit (cm-1)
Figure S6. Optical images and corresponding Raman spectra of MoS2 when using
non-alkali metal salts as promoters. Inhomogeneous and irregular MoS 2 flakes were
obtained on the substrates. All of those non-alkali metal salts did not show promoting
effect for MoS 2 growth.
100
1.0
Weight (%)
60
0.5
40
20
0.0
0
0 200 400 600 800 1000
Temperature (°C)
Figure S7. TG-DTG curves of pure MoO 3 in Ar with a temperature ramping rate of
10 ℃/min.
● ■ MoO3
(a) (b) ◆MoO2
● SiO2
Intensity (a.u.)
★ K2MoO4
◆ ◆
★
◆
★◆
◆ ◆ ◆ ■★
30 μm
200 400 600 800 1000
Raman shift (cm-1)
(c) (d)
30 μm
Energy (keV)
Figure S8. Two-step growth experiment using KCl as promoter. (a) Eutectic
intermediates synthesized from MoO 3 and KCl. The corresponding Raman spectra
and EDS are shown in (b) and (d), respectively. There are multiple Raman peaks for
MoO 3-x and K 2MoO 4 from eutectic intermediates.1 From EDS, we did not observe
peak of chlorine. The high volatile metal oxychlorides are not a constituent
component of the intermediates after high temperature annealing. (c) Triangular MoS 2
flakes were obtained after the substrate with randomly distributed eutectic particles
was loaded back to CVD system for sulfurization. Impurities are marked by red arrow
lines as references. The location of the formed MoS 2 flakes does not match eutectic
particles.
Intermediate products Intermediate products
synthesized by ZnCl2 synthesized by Cu(NO3)2
Intensity (a.u.)
Intensity (a.u.)
40 μm 40 μm
300 600 900 300 600 900
Raman shift (cm ) -1 Raman shift (cm-1)
A1g A1g
After sulfurization After sulfurization
Intensity (a.u.)
Intensity (a.u.)
ZnCl2 E1
2g
Cu(NO3)2
E1
2g
40 μm 40 μm
360 380 400 420 360 380 400 420
Raman shift (cm-1) Raman shift (cm-1)
Figure S9. Two-step growth experiment using ZnCl 2 and Cu(NO 3)2 as promoter was
tringle flakes were obtained after sulfurization. Moreover, the optical images after
50 μm 50 μm
E12g E12g
A1g
Intensity (a.u.)
Intensity (a.u.)
A1g
Figure S10. MoS2 growth with NaNO 3 at lower temperature. We still got triangular
MoS2 flakes, but dense, small and thick compared to those at 680 ℃.
Table S2. Thermodynamic data and the Gibbs free energy
LiOH
Li 5288, 5299 -1054.69 -781.314 -1848.871 -1448.324
LiCl
NaOH
NaNO3
Na 52510 -1049.418 -785.3 -1592.201 -806.342
CH3COONa
Na2SO4
NaCl
KOH
KCl
KBr
K KI 462~4929 -1010.291 -1072.928 -1384.913 -941.232
KH2PO4
KNO3
CuCl 2
Cu 70014, 71015 -1293.085 -1031.818 -1664.327 -387.878
Cu(NO3) 2
Mg MgCl 2 75016 -1095.241 -832.692 -2089.795 -1305.73
72617
Ca CaCl 2 -1082.454 -821.922 -1879.856 -1108.806
726±318
Al AlCl 3 74020
Two main reactions may occur between alkali metal molybdates and sulfur. ΔG S2 and
The negative value of Gibbs free energy (ΔG) in each equation imply the reaction can
occur positively. The eutectic point is significantly low for alkali metal molybdates
with molybdenum oxide. Eutectic intermediates are at melting state at growth
temperature and have high mobility on SiO 2/Si. So they tend to collide with each
other and joint together to promoter MoS 2 growth in the presence of sulfur vapor.
Eutectic points of non-alkali metal molybdates and molybdenum oxides are higher
than growth temperature, except for AgF. There are more nuclei and hence dense
flakes, along with smaller size and more layers. We think that decomposable AgF into
pure silver, rather than silver molybdates, did not catalyze triangular MoS 2 growth.
Figure S11. MoS2 growth at 800 ℃ associated with ZnCl 2 (left) and Cu(NO 3)2 (right),
respectively. A large amount of white fibrous silicon sulfide with pungent smell was
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