02 Whole
02 Whole
by
Suranan Anantachaisilp
2015
i
Declaration of Authorship
I, Suranan Anantachaisilp, declare that this thesis titled, “The Effect of Surface Defects
on the Optical and Electrical Properties of ZnO Nanorods” and the work presented in it
is my own. I confirm that: This work was done wholly or mainly while in candidature
for a co-tutelle research degree at this University and the Mahidol University.
Where any part of this thesis has previously been submitted for a degree or any
other qualification at this University and Mahidol University or any other
institution, this has been clearly stated.
Where I have consulted the published work of others, this is always clearly
attributed.
Where I have quoted from the work of others, the source is always given.
With the exception of such quotations, this thesis is entirely my own work.
Where the thesis is based on work done by myself jointly with others, I have
made clear exactly what was done by others and what I have contributed
myself.
Signed:__________________________________________
Suranan Anantachaisilp
Date:____________________________________________
ii
ABSTRACT
This thesis reports on the effect of native point defects on both the NH3 gas
sensing properties and the surface electronic structure of ZnO nanorods. Low
temperature hydrothermal growth at 90°C was utilised to synthesize ZnO nanorods
approximately 55 ± 5 nm in diameter. The type and density of intrinsic surface defects
on the ZnO nanorod was controlled using post growth annealing in O2 gas and Zn vapor
environments. Low voltage cathodoluminescence (CL) spectroscopy confirmed that the
heat treatment process produced different surface defect structures. The as-grown, O2,
and Zn annealed nanorods exhibited broad CL peaks centered at 1.90 eV (YL), 1.70 eV
(RL), and 2.44 eV (GL), which were attributed to O interstitials or LiZn deep acceptors,
acceptor-like VZn complexes, and donor-like VO related centers, respectively.
The first part of this thesis focuses on the influence of deep level surface
defects on NH3 gas response of ZnO nanorods. Electrical and gas sensing measurements
revealed that the NH3 gas sensitivity was 4.1 for the as-grown (YL), 22.6 for O2 anneal
(RL), and 1.4 for Zn vapor anneal (GL) samples. Hydrogen plasma treatment quenched
the RL and inverted the ammonia electrical response due to the incorporation of shallow
hydrogen donors. Changes to the gas sensing response were attributed to a shift in the
ZnO Fermi level position relative to the ammonia gas chemical potential due to the
formation near surface donor or acceptor centers.
In the second part of this thesis the effect of native point defects on the
surface electronic structure of all ZnO nanorod samples was studies utilizing X-ray
photoemission spectroscopy (XPS), X-ray Absorption Near-Edge Structure (XANES),
electron spin resonance (ESR), low voltage CL spectroscopy, sub band gap
photoluminescence (PL) spectroscopy and electrical I-V measurements. Correlative
characterization measurements established that the degree of surface band bending and
surface conductivity is controlled by the amount of adsorbed ambient gas species (O2,
H2O and OH), which is mediated by type and concentration of intrinsic surface point
defects.
The last part of this thesis concentrates on the chemical origin of RL peak
and its optical properties. A wide range of analysis techniques, including PL and CL
iii
ACKNOWLEDGEMENTS
I would never have been able to start and finish my Ph.D. without the
guidance, help and support from Assoc. Prof. Siwaporn Meejoo Smith, Prof. Matthew
Phillips and Prof. Anthony Moon.
I would like to express my sincerest gratitude to my supervisors Prof.
Matthew Phillips and Assoc. Prof. Siwaporn Meejoo Smith for their valuable
suggestions and all important research skills.
I would like to give a special acknowledgements to my co-supervisor Prof.
Anthony Moon for his excellent and kind support. I would also like to extend my thanks
to my co-supervisor Asst. Prof. Tanakorn Osotchan for allowing me to work in his
laboratory and for his advice in this research. My gratitude is also extended to Assoc.
Prof. Prapin Wilairat, my co-supervisor, as well as Dr. Cuong Ton-That for his
comments and suggestions.
I would also like to thanks the external examiners Asst. Prof. Sukkaneste
Tungasmita and Dr. Jedsada Manyam for their valuable time.
I would also like to express my gratitude to Mark Lockrey, Sumin Choi,
Pakorn Pasitsuparoad, Toby Shanley, MAU staffs, my fellow research students and
colleagues in the MAU and SMJ Lab for their help with sample preparation and data
collection, acquisition and analysis, and for contributing a pleasant atmosphere for doing
research.
I would like to acknowledge The Royal Golden Jubilee Ph.D. Program and
Australian Research Council for scholarship and financial support.
Finally, I would like to express my deepest thanks to my parents and two
elder brothers for their understanding, support, and lots of useful advice.
Suranan Anantachaisilp
v
CONTENTS
Page
Declaration of Authorship i
ABSTRACT ii
ACKNOWLEDGEMENTS iv
LIST OF PUBLICATIONS x
LIST OF TABLES xi
LIST OF FIGURES xii
LIST OF SCHEMES xx
LIST OF ACRONYMS xxi
CHAPTER I INTRODUCTION TO ZINC OXIDE 1
1.1 Motivation of the Research 2
1.2 Objectives of the Research 4
1.3 Thesis Outline 5
CHAPTER II OPTICAL, ELECTRICAL, AND GAS SENSING 6
PROPERTIES OF ZnO AND ITS SYNTHESIS: LITERATURE REVIEWS
2.1 Physical and Chemical Properties of ZnO 6
2.1.1 Crystal Structure 7
2.1.2 Electronic Band Structure 8
2.1.3 Defect Chemistry 9
2.1.3.1 Vacancies 12
2.1.3.2 Interstitials 14
2.1.3.3 Antisites 15
2.1.3.4 Impurities 15
2.1.3.5 Formation Energies and Processes of 16
Native Defects
2.2 Optical Properties and Processes in ZnO 19
2.2.1 Excitons 20
vi
CONTENTS (cont.)
Page
2.2.2 Radiative Recombination 21
2.2.2.1 Near Band Edge Emission 21
2.2.2.2 Defect-Related Deep Level Emission 22
2.2.2.2.1 Green Luminescence 24
2.2.2.2.2 Yellow Luminescence 25
2.2.2.2.3 Red Luminescence 25
2.2.3 Temperature-Dependence Luminescence 26
2.3 Electrical Properties of ZnO 26
2.3.1 Ohmic Contacts to ZnO 27
2.3.2 Schottky Contacts to ZnO 28
2.4 Gas Sensing Properties of ZnO 28
2.4.1 Gas Sensor Characteristics 29
2.4.1.1 Sensitivity 29
2.4.1.2 Selectivity 29
2.4.1.3 Response Time and Recovery Time 30
2.4.2 Gas Sensing Mechanisms of ZnO 31
2.4.2.1 Oxidative Gas 32
2.4.2.2 Reductive Gas 33
2.4.2.2.1 Ammonia Gas 34
2.5 Synthesis of ZnO Nanostructures 34
2.5.1 High Temperature Approaches 35
2.5.2 Low Temperature Approaches 35
2.5.2.1 Hydrothermal Growth 35
CHAPTER III CHEMICALS AND EXPERIMENTAL DETAILS 38
3.1 Chemicals and Instruments 38
3.2 Sample Preparation 38
vii
CONTENTS (cont.)
Page
3.2.1 ZnO Nanostructures Growth 39
3.2.1.1 Seed Layer Deposition 39
3.2.1.2 Hydrothermal Growth 40
3.2.2 Post Growth Processing 40
3.2.2.1 Annealing 40
3.2.2.2 Hydrogen Plasma Treatment 41
3.3 Scanning Electron Microscopy (SEM) 42
3.4 X-Ray Diffraction (XRD) 43
3.5 Cathodoluminescence Spectroscopy (CL) 44
3.6 Photoluminescence Spectroscopy (PL) 46
3.7 Synchrotron Light Experiments 46
3.7.1 X-Ray Photoelectron Spectroscopy (XPS) 47
3.7.2 X-Ray Absorption Near Edge Spectroscopy (XANES) 47
3.8 Electrode Deposition and Gas Sensor Device Assembly 48
3.9 Current Voltage Characteristic Measurement 49
3.10 Gas Sensing Measurement 49
3.10.1 Gas Measurement System 50
3.10.2 Designed experimental procedures 51
CHAPTER IV TAILORING DEEP LEVEL SURFACE DEFECTS IN ZnO 53
NANORODS FOR HIGH SENSITIVITY AMMONIA GAS
SENSING
4.1 Summary 53
4.2 Introduction 53
4.3 Experimental Section 55
4.3.1 Synthesis of ZnO Nanorods and Post-Growth 55
Processing
viii
CONTENTS (cont.)
Page
4.3.2 Analysis Techniques 55
4.3.3 Fabrication of ZnO Nanorods Gas Sensor and Gas 56
Sensing Measurement
4.4 Results and Discussion 56
4.5 Conclusions 66
CHAPTER V THE SURFACE ELECTRONIC STRUCTURE OF ZnO 68
NANORODS: THE ROLE OF SURFACE DEFECTS
5.1 Summary 68
5.2 Introduction 68
5.3 Experimental Section 69
5.4 Results and Discussion 71
5.5 Conclusions 83
CHAPTER VI NATURE OF RED LUMINESCENCE IN OXYGEN 84
TREATED HYDROTHERMALLY GROWN ZINC OXIDE
NANORODS
6.1 Summary 84
6.2 Introduction 84
6.3 Experimental Section 85
6.3.1 Preparation and Post Growth Processing of ZnO 85
Nanorods
6.3.2 Characterization of Hydrothermally Grown ZnO 86
Nanorods
6.3.2.1 Cathodoluminescence 86
6.3.2.2 Photoluminescence 86
6.3.2.3 X-ray Absorption Near Edge 87
Spectroscopy (XANES)
6.3.2.4 Electron Spin Resonance 87
ix
CONTENTS (cont.)
Page
6.4 Results and Discussion 87
6.5 Conclusions 99
CHAPTER VII CONCLUSIONS 100
REFERENCES 102
x
LIST OF PUBLICATIONS
Conference Presentations
S. Anantachaisilp, S.M. Smith, C. Ton-That, T. Osotchan, A.R. Moon, M.R. Phillips,
ZnO Nanowires with Enhanced Sensitivity for Ammonia Gas Sensing at Room
temperature by Regulating Deep Level Surface Defects. 2014 MATERIALS
RESEARCH SOCIETY Fall Meeting & Exhibit, Boston, Massachusetts. November 30-
December 5, 2014.
LIST OF TABLES
Table Page
1.1 Summary of ammonia gas sensor applications Taken from Timmer et al. 3
2.1 General physical and chemical properties of ZnO 6
2.2 Bound exciton peak energies (eV) in ZnO 24
2.3 Summary of hydrothermal growth of ZnO nanostructures and their morphology 36
3.1 List of Chemicals 38
3.2 List of Instruments 39
5.1 The relative percentage of the integrated intensity of the OI, OII and OIII peaks 77
from the O1s XPS emission for the as-grown, Zn annealed and O2 annealed
specimens.
xii
LIST OF FIGURES
Figures Page
2.1 Unit cells of ZnO crystal structures: (a) cubic rocksalt (B1), (b) cubic 8
zinc blende (B3), and (c) hexagonal wurtzite (B4). Zn atoms are
represented in gray whereas O atoms are represented in black.
(a) The calculation of ZnO band structure using the HSE hybrid 9
2.2 functional. The valence-band maximum energy is at zero. (b) Hexagonal
ZnO band structure and symmetries. The valence band splits into three
sub-bands; A, B, and C resulting from the effects of crystal-field splitting
and spin-orbit coupling.
2.3 Illustration of point defects in ZnO crystal structures: (a) Zinc vacancy 12
ܸ , (b) Oxygen vacancy ܸை , (c) Zinc interstitial ܼ݊ , (d) Oxygen
interstitial ܱ , (e) Zinc antisite ܼ݊ை , (f) Oxygen antisite ܱ and (g)
Substitutional impurity at a zinc site e.g. ݅ܮ , ݑܥ or ݈ܣ .
2.4 Calculated defect formation energy for ZnO native point defects in (a) 13
Zinc-rich conditions and (b) Oxygen-rich conditions.
2.5 Calculated ZnO native point defects formation energies as a function of 18
Fermi-level position in both Zn-rich (left) and O-rich (right) conditions.
Valence band maximum locates at the zero of Fermi level. Different slope
represents different charge state.
2.6 Thermodynamic transition levels for ZnO native point defects. 19
2.7 Characteristic ZnO luminescence spectrum presenting the near band edge 21
peak (NBE) and the broad deep level emission (DL).
2.8 Schematic diagram of the radiative recombination mechanisms. 23
2.9 Characteristic current-time sensing peak of ZnO nanorods annealed in O2 30
atmosphere response to ammonia gas.
2.10 Schematic diagram of oxygen adsorption on the ZnO surface; n = 1 or 2 32
and s = 1or 2. (Adapted from Kim et al.)
xiii
Figures Page
2.11 Schematic diagram of the oxidative gas sensing mechanism on ZnO. 33
surface. (Green area is the depletion layer.)
2.12 Schematic diagram of the reductive gas sensing mechanism on ZnO 33
surface. (Green area is the depletion layer.)
2.13 Schematic diagram of ammonia gas sensing mechanism on the ZnO 34
surface; n = 1 or 2 and s = 1or 2.
3.1 Photograph of Teflon Lined Autoclave used as a reactor in hydrothermal 40
growth.
3.2 Photograph of Lindberg Blue Mini-mite Tube Furnace. 41
3.3 Photograph of plasma chamber showing the overall setup. 42
3.4 Penetration range of the primary electron beam with the origin of 43
electrons, x-rays and light.
3.5 Schematic of CL experimental setup. 45
3.6 (a) Twelve fingers of the interdigitated electrode (shown in gray). (b) Gas 50
sensor device comprised of ZnO sensing layer (light gray square),
aluminum electrodes (gray), polycarbonate board (outermost square) with
conduction line (black line), and connection wires (black dot).
3.7 Gas flow controller unit diagram; input channels are shown in dash lines 51
and output channels are shown in solid lines.
3.8 Homebuilt gas measurement system; dot line represents shortcut path 52
when the dry measurement starts.
xiv
Figures Page
4.1 (a) SEM images of as-grown ZnO ۦ0001ۧ nanorods on a sapphire substrate 57
and (b) PXRD patterns of as-grown, O2 and Zn atmosphere annealed ZnO
nanorods exhibiting the wurtzite crystal structure. The change in the
relative intensity of the diffraction peaks arises from a slight reorientation
of the nanorods relative to the substrate after thermal annealing.
4.2 SEM images of ZnO nanorods after annealing in (a) O2 and (b) Zn 58
atmosphere.
4.3 (a) Normalized CL spectra collected from Zn annealed, as-grown, and O2 59
atmosphere annealed ZnO nanorods at 5 kV, 80 K, scan area = 50 ȝm ×
43 ȝm, and beam current of 0.2 ± 0.02 nA. The ratio of raw intensities of
GL, YL, and RL centered at 2.44, 1.90, and 1.70 eV, respectively, is
0.057:0.204:1. All spectra were normalized to the DL peaks. (b) Room
temperature IíV characteristics of the Zn annealed, as-grown, and O2
atmosphere annealed ZnO nanorods measured under an ambient
atmosphere.
4.4 N K-edge XANES spectra of Nitrogen implanted ZnO crystal and ZnO 61
nanoparticles, and as grown, O2, and Zn atmosphere annealed ZnO
nanorods.
4.5 CL spectra collected from O2 atmosphere annealed and H plasma of O2 62
annealed ZnO nanorods at 5kV, 80K. The spectra were normalized to the
maximum intensity peaks.
4.6 Room temperature I-V characteristic of the Argon atmosphere annealed 64
ZnO nanorod gas sensor.
xv
Figures Page
4.7 Sensitivity as a function of measurement time for (a) as-grown, (c) O2, (e) 65
Zn, and (g) H plasma after O2 annealed ZnO nanorod sensors and
sensitivity as a function of ammonia gas concentration for (b) as-grown,
(d) O2, (f) Zn, and (h) H plasma after O2 annealed ZnO nanorods sensors
at room temperature. Labels in the bottom right corner of (b), (d), (f), and
(h) indicate the signature luminescence (YL, RL, GL, and RL
suppression) exhibited by ZnO nanorods employed in the fabrication of
each gas sensor.
5.1 SEM images of the as-grown hydrothermal ZnO nanorod ensemble 71
containing a high density of uniform hexagonal <0001> nanorods
50 ± 5 nm in diameter. The oblique nanorod growth habit promotes
multiple contact of the sidewalls providing good electrical conductivity
across the ensemble.
5.2 Typical 5 kV CL spectra collected from as-grown, O2 atmosphere and Zn 72
vapor annealed ZnO nanorods at 80K, a scan area = 50 Pm x 43 Pm and
beam current of 0.2±0.02nA, showing yellow (YL) at 1.90 eV, green (YL)
at 2.44 eV and red (RL) at 1.70 eV.
5.3 presents a log I vs log V showing the 1000x and 100x increase in the 73
measured current after Zn vapor and O2 annealing respectively.
5.4 (a) ESR spectra of the as-grown and O2 annealed ZnO nanorods. Two 74
main paramagnetic ESR signals at g # 2.01 and 1.96 are assigned to singly
ionized surface oxygen vacancy defects and localized donors,
respectively. (b) ESR spectrum following Zn vapor annealing showing a
significant intensity increase is g # 2.00 line after the appearance of a
broad green CL emission centered at 2.44 eV and a pronounced shoulder
in the valence band photoemission spectrum ~ 3 eV below the Fermi level.
xvi
Figures Page
5.5 The O1s XPS spectra for YL, RL and GL ZnO nanorod samples are 76
shown in Figures 5.5(a), 5.5(b) and 5.5(c) respectively. The XPS profiles
are all curve fitted into three peaks at 530.5 eV (Peak OI), 532.0 eV (Peak
OII) and 532.7 eV (Peak OIII). Peak OI results from O2- ions fully co-
ordinated by Zn and O atoms in the fully stoichiometric wurtzite crystal
structure, peak OII is due to either O2- ions in the vicinity of VO defects
and peak OIII arises from oxygen in strongly bound adsorbed gases,
specifically H2O and O2 molecules.
5.6 Valence band X-ray Photoemission Spectroscopy (VB-XPS) spectra 80
taken from the as-grown, O2 anneal and Zn vapor anneal ZnO nanorod
samples are presented in Figure. 5.6(a). The VB-XPS spectra for all three
samples consist of two dominant near edge peaks one centered at ~ 5 eV
ascribed to O 2p related states the other ~ 7 eV attributed to hybridized
Zn 4s + O 2p states. The leading edge of the valence band photoemission
showing the pronounced shoulder around 3 eV below the Fermi level that
forms after Zn vapour annealing is shown in Figure 5.6(b).
5.7 Downward band bending on the as-grown ZnO nanorod due to electron 81
accumulation and its decrease following O2 annealing using the valence
band photoemission spectroscopy results in Figure 5.6 (a) and 5.6 (b).
5.8 Comparison of continuous-wave 532 and 405 nm sub band gap laser 82
excitation PL spectra at 300 K for ZnO nanorods as-grown and annealed
in O2 gas. The sub band gap excited spectra reveal a common broad OL
emission at 1.95 eV except for the O2 annealed sample illuminated with
blue light which emits a broad RL around 1.83 eV indicated a different
defect structure.
xvii
Figures Page
6.1 SEM image of the as-grown <0001> ZnO nanorod ensemble, showing 88
that the low temperature hydrothermal growth treatment produced a high
density of uniform hexagonal <0001> nanorods approximately 55 nm in
diameter orientated at different angles to the normal direction of the
substrate.
6.2 Typical cathodoluminescence spectra collected with 5 kV, IB = 0.2 ± 90
0.02 nA and scan area = 50 Pm u43 Pm. Fig 6.2a ZnO nanorods before
(“as-grown”) and after annealing at 650 qC in O2 gas for 30 minutes,
showing the creation of the red luminescence (RL) peak centered at
1.78 eV with a FWHM = 0.69 eV. Fig 6.2b illustrates rapid quenching of
the RL following exposure to a mild hydrogen plasma indicating that the
RL relates to an acceptor-like center as hydrogen is a donor in ZnO.
Fig 6.2c. RL spectrum at 15 K showing the peak red shifted to 1.69 eV
and narrowing of the FWHM to 0.57 eV. The assignment of the RL to
transition metal impurities is ruled out because of the absence of fine
structure arising from internal 3d transitions.
6.3 Normalized RL intensity versus excitation power (5 kV x IB) at 80 K (a) 91
and 300 K (b). The absence of a blue peak shift with increasing beam
current eliminates the assignment of the RL to donor acceptor pair
recombination transitions.
6.4 Plot of log (ICL) versus log (IB) at 80 K (a) and 300 K (b) with IB in nA. 92
The gradient, n, is the power law exponent in the relationship, ICL v IBn.
The nNBE ~ 1 is expected for excitonic recombination. The nRL ~ 0.8 is
higher than expected for a lattice coupled defect most likely due to a high
concentration of RL centers.
xviii
Figures Page
6.5 CL intensity versus temperature at 80 K for the RL (a) and NBE (b) with 94
300 K with 5 kV, IB = 0.2 ± 0.02 nA and scan area = 50 Pm u 43 Pm.
The red shift and narrowing of the RL with decreasing temperature is
consistent with configuration coordinate model for radiative
recombination. The blue shift and appearance of phonon replicas as the
temperature approaches 93 K is expected for excitonic emission with the
bandgap shrinkage. The intensity of the RL and NBE exhibits “negative”
thermal quenching with increasing temperature.
6.6 The plot of the RL peak position and peak width as a function of 96
temperature are shown in Figure 6.6a and Figure 6.6b. Figure 5.6c
displays the RL intensity dependence on temperature. With decreasing
temperature from 300 K to 93 K a typical thermal response relationship
with an activation energy of EA = 78.8 meV is found. However,
increasing the temperature from 93 K to 300 K “negative” thermal
quenching is observed arising from the presence of shallow levels that
fill with carriers at low temperature during electron beam excitation and
depopulate with rising temperature increasing the luminescence
intensity.
6.7 CL spectra at 80 K of the NBE and RL before and after thermal annealing 97
in O2 are shown in Figure 6.7a with corresponding CL spectra in
Figure 6.7b. Figure 6.7a reveals emission due to donor bound exciton
around 3.36 eV and peaks at 3.32 and 3.26 eV ascribed to the presence
of acceptors in either DAP or free-to-bound transitions. No
interrelationship between the 3.32 and 3.26 eV NBE peaks and the RL
in the CL spectra is observed. Additionally there is no correlation
between the free-to-bound NBE and RL peaks and nitrogen as confirmed
in the N kD XANES results in Figure 6.9.
xix
Figures Page
6.8 The temperature dependence of the DoX and peaks at 3.32 and 3.26 eV 98
are shown in Figure 6.8. The data show the usual red shift of the DoX
with increasing temperature as the band gap widens due to lattice
expansion and the electron-phonon effect. The absence of a
corresponding shift of the 3.32 and 3.26 eV peaks between 7 and 100 K
indicates that free carriers are involved in the recombination process
providing thermal energy (kbT) which offsets the band gap red shift. This
result suggests that these emission peaks arise from free-to-bound
transition rather than a DAP recombination process.
6.9 XANES spectra around the N energy from the “as-grown” and O2 99
annealed samples, as well as from ZnO nano-particles implanted with
nitrogen, are shown in Figure 6.9. The results show that no nitrogen is
present in both the “as-grown” and O2 annealed samples.
xx
LIST OF SCHEMES
Schemes Page
4.1 The alteration of the ZnO Fermi level position owing to near surface acceptor 66
and donor
xxi
LIST OF ACRONYMS
A0 Neutral acceptor
BB Band bending
BX Bound exciton
CB Conduction band
CC Configurational coordinate
CCD Charge-coupled device
CL Cathodoluminescence
GL Green luminescence
I-V Current-Voltage
xxii
LO Longitudinal optical
OL Orange luminescence
PL Photoluminescence
RL Red luminescence
S Sensitivity
sccm standard cubic centimetres per minute
SEM Scanning electron microscopy
TEY Total electron yield
TFY Total fluorescence yield
UV Ultra-violet
VB Valence band
YL Yellow luminescence
University of Technology Sydney Introduction / 1
CHAPTER I
INTRODUCTION TO ZnO
Table 1.1: Summary of ammonia gas sensor applications Taken from Timmer et al.19
Require Temperature
response range Remarks
Application Detection limit time
Environmental
Monitoring ambient condition 0.1 ppb to >200ppm20 Minutes 0-40 °C Reduce environmental pollution
Measure in stables 1 to >25 ppm21 ~ 1 min 10-40 °C Protect livestock animals and farmers
Automotive
Measure NH3 emission from 4->200 g/min22 Seconds Up to 300 °C NH3 emission is not regulated at this
vehicles (concentration time
Passenger cabin air control unknown) ~1 s 0-40 °C Automotive air quality sensor mainly
50 ppm23 aim on NOX and CO levels21
Detect ammonia spill Seconds Up to 600 °C Control Urea injection in SCR NOX
1-100 ppm24 reduction
Chemical
Leakage alarm 20->1000 ppm23, 25 Minutes Up to 500 °C Concentrations can be very high at
Medical NH3 plants and can even be explosive
Breath analysis 50-2000 ppb11, 13 ~ 1 min 20-40 °C Diagnosis of peptic ulcer cause by
bacteria, small gas volumes
The surface electronic structure of all samples with different types of defects
are also studied in order to understand the mechanisms of gas adsorption as well as the
interactions between native point defects and ambient gas species. These provide more
information about the role of surface point defects which are useful for gas sensor
applications.
The O2 annealed ZnO sample emitted red luminescence (RL) provides the
highest NH3 gas sensitivity and the chemical origin of RL is still under debate, the
chemical origin of this peak and its optical properties were comprehensively studied.
Suranan Anantachaisilp Introduction/ 4
Suranan Anantachaisilp Literature Review/ 6
CHAPTER II
OPTICAL, ELECTRICAL, AND GAS SENSING PROPERTIES OF
ZnO AND ITS SYNTHESIS: LITERATURE REVIEWS
and the nonpolar m faces. These different properties have significant effects on the ZnO
nanostructures growth processes.
Figure 2.1: Unit cells of ZnO crystal structures: (a) cubic rocksalt (B1), (b) cubic zinc
blende (B3), and (c) hexagonal wurtzite (B4). Zn atoms are represented in gray whereas
O atoms are represented in black.29
The benefits of its wide band gap are high breakdown voltages, ability to sustain large
electric fields, low noise enervation, and high temperature and high power operation.29
Figure 2.2: (a) The calculation of ZnO band structure using the HSE hybrid functional.
The valence-band maximum energy is at zero. (b) Hexagonal ZnO band structure and
symmetries. The valence band splits into three sub-bands; A, B, and C resulting from
the effects of crystal-field splitting and spin-orbit coupling.31-32
Due to the effects of crystal-field splitting and spin-orbit coupling, the
valence band of ZnO is split into three sub-band states; A, B, and C (Figure 2.2b). The
A and C sub-bands have ߁ symmetry while the B posses ߁ଽ symmetry.32 The valence
band order of these three sub-bands is ߁ -߁ଽ -߁ which is consistent with߂௦ .33 The
energetic differences of these sub-bands are ߂ ൌ ͶǤͻܸ݉݁ and ߂ ൌ Ͷ͵Ǥܸ݉݁.32
The electronic band structure depends on temperature and pressure. The
band gap at ī point expands with decrease in temperature. The band gap temperature
dependence can be described by the following empirical relationship.34
D் మ
ܧ ሺܶሻ ൌ ܧ ሺܶ ൌ Ͳሻ െ (2.1)
்ାE
where ܧ ሺܶሻ is the energy gap at temperature ܶ, ܧ ሺܶ ൌ Ͳሻ is the energy gap at 0 K, D
and E are the temperature coefficients for which D = ͷǤͲͷ ൈ ͳͲିସ eV K-1 and E = -900 K
for temperature up to 300 K.35
of these materials is essential for their development and improvement.36 Like other
semiconductors, the applications of ZnO also depend upon the control of defects as well
as their associated charge carriers. Before studying ZnO defects and the effect of the
defects on its properties in depth, it is important to know the basic of crystal lattice
defects or imperfections. Defects in materials can be classified by their dimension.37
3D-Defects
The 3-dimensional defects; volume or bulk defects, are the aggregation of
atoms or vacancies. This type of defect can be categorized into 4 classes by their size
and effect on the materials properties. First are precipitates, small particles distributed
in the lattice through solid state reaction increasing the strength of materials. Dispersants
are a second type of volume defects. They are larger particles which can be large
precipitates, grains, or polygranular particles distributed in the microstructure.
Inclusions are another type of 3-dimensional defects which are extraneous particles or
large precipitate particles with undesirable components in microstructure. The last type
of bulk defects are voids or pores which are gases bubbles or clustering of vacancies in
solid state, decreasing the materials strength.
2D-Defects
Interfaces or planar defects are called 2-dimensional defects. This type of
defects are caused by the distortion in a crystal across the plane divided into 2 main
types; stacking fault and grain boundary.
A stacking fault is usually found in close packed structures - face centre
cubic (FCC) and hexagonal closed pack (HCP). It occurs due to the change in stacking
sequence over a few atomic planes. In the FCC structure, the normal arrangement
ABCABCABC can be changed to ABCAB_ABC causing by stacking fault. The pattern
ABABABAB of HCP arrangement is broken into ABABA_AB which also known as a
stacking fault.
A grain boundary is another type of planar defects. The interface of small
crystallites or grains are called as grain boundaries. The atoms in the boundary regions
are often in poor arrangement causing an irregular growth to the solid during
crystallization. They are generally found in polycrystalline materials and have a
significant effect on the mechanical properties of materials.
University of Technology Sydney Literature Review / 11
1D-Defects
The 1-dimensional defects; dislocations or line defects, are the deviation of
an entire row of lattice points row from a perfect pattern; they are usually undesirable.
and always act as electrical defects in semiconductors and optical materials. Line defects
consist of two major types; edge dislocation and screw dislocation.
An edge dislocation happens when an extra half-plane of atoms terminates
in the midway of a crystal causing the distortion in the adjacent planes of atoms. In order
to preserve the arrangement of crystal planes on both sides, the extra plane breaks and
joins bonds around the edge of the terminating plane. In this type of dislocation, the
Burgers vector; the magnitude and direction of distortion in the crystal lattice, is
perpendicular to the dislocation line.
A screw dislocation is more difficult to visualize. It is formed by a similar
method as the edge dislocation but in a helical path. Unlike an edge dislocation, the
Burgers vector is parallel to the dislocation line.
0D-Defects
Point defects are defined as 0-dimensional defects since they disturb the
crystal structure at only one point or around one lattice point. Point defects can be
divided into two groups which are intrinsic defects and extrinsic defects. Intrinsic
defects in a pure material consist of vacancies, interstitials as well as antisites. On the
other hand, extrinsic defects are initiated by another host atom or impurity atom called
substitutional or impurities. In semiconductors, point defects play an important role on
their various electronic and optical properties. Defects have been investigated for
several decades in bulk semiconductors; however, their role in nanostructured materials
is the subject of recent research. In particular, the impact of surface defects on the
physical properties of nanostructures requires further investigation owing to the small
length scales and large surface-to-volume ratio.27 Despite its simple formula, ZnO has
very rich defect chemistry38 with native vacancy and interstitial point defects and
inadvertently included impurities such as hydrogen and lithium being the major centres.
Moreover in nanostructured ZnO, as established in this thesis, surface point defects have
a major effect on its electronic and optical properties.
Suranan Anantachaisilp Literature Review/ 12
Figure 2.3: Illustration of point defects in ZnO crystal structures: (a) Zinc vacancy ܸ ,
(b) Oxygen vacancy ܸை , (c) Zinc interstitial ܼ݊ , (d) Oxygen interstitial ܱ , (e) Zinc
antisite ܼ݊ை , (f) Oxygen antisite ܱ and (g) Substitutional impurity at a zinc site e.g.
݅ܮ , ݑܥ or ݈ܣ .
2.1.3.1 Vacancies
A vacancy is an intrinsic defect which is formed when some
atoms are missing from their normal lattice sites in crystal. In all crystalline materials,
vacancies mostly appear in high concentration. They also have an effect on the atoms
migration in the crystal lattice.30 They can diffuse through the lattice after filling by
neighbouring atoms. The surrounding crystal structure needs to be stabilized to avoid
vacancy collapse. The common vacancies in ZnO are zinc (ܸ ) and oxygen (ܸை )
vacancies where zinc and oxygen atoms are absent from the ZnO lattice, respectively
(Figure 2.3a and b). Furthermore, they are the most prevalent defects in ZnO.
University of Technology Sydney Literature Review / 13
Figure 2.4: Calculated defect formation energy for ZnO native point defects in (a)
Zinc-rich conditions and (b) Oxygen-rich conditions.39
Zinc vacancies (ܸ ) electronic structure in ZnO can be
modelled by utilizing molecular orbital theory. ܸ involves four O dangling bonds and
six electrons. The absence of a Zn atom in ZnO lattice makes ܸ an acceptor. It can
receive up to two additional electrons. ܸ is much easier to form in n-type than p-type
ZnO due to the very high formation energies in p-type ZnO.34 In an oxygen-rich
condition, ܸ is the dominant species among other point defects in n-type ZnO.
ି ଶି
Between the three charge state configurations;ܸ , ܸ , and ܸ , the most favourable
ଶି
ܸ species is ܸ because of its lowest formation energy as shown in Figure 2.4(b).
According to a first principle calculation, 0/1- and 1-/2- charge states transitions of ܸ
deep acceptors exist at 0.1-0.2 eV and 0.8-1.2 eV above the valence band maximum,
respectively.29, 33, 40-41 Consequently, a transition from the conduction band or a shallow
donor to the ܸ deep acceptor would emit luminescence in the range of 2.2-2.6 eV,
which is green. Thus the green luminescence is typically attributed to ܸ .33, 42-43
Suranan Anantachaisilp Literature Review/ 14
2.1.3.2 Interstitials
An interstitial is also an intrinsic defect where an atom occupies
an interstitial site; a lattice site on which an atom does not normally appear. Interstitials
are moderately unusual defects since they are high energy defects. In most crystalline
materials, the interstitial sites are quite small in size and rarely have a bonding
configuration.30 Zinc (ܼ݊ ) and oxygen (ܱ ) interstitials are regular interstitials in ZnO
which are shown in Figure 2.3c and d.
A Zinc interstitial (ܼ݊ ) is a shallow donor defect which can
occupy in both tetrahedral and octahedral sites in the wurzite ZnO. However, it is more
stable at the octahedral site because of fewer geometrical constraints.34 In n-type ZnO,
ܼ݊ has a high formation energy even under zinc-rich conditions (Figure 2.4a). By
comparison, the formation energy of ܼ݊ଶା is much lower in p-type ZnO resulting in a
possible source of charge compensation in p-type ZnO.53 ܼ݊ also has a very low
migration barrier of 0.57 eV making it is unstable and highly mobile at room
temperature.35, 42 In addition, ܼ݊ generally form complexes with impurities due to its
high formation energy and mobility.
University of Technology Sydney Literature Review / 15
interstitial site for interstitial impurities. Due to the small size of interstitial sites, large
atoms are regularly substitutional whereas small atoms frequently fill in interstitial
sites.30 If the impurities have different charges from that of host lattice ion, the excess
charge is compensated by a paired vacancy or interstitial via a charge compensation
mechanism to maintain overall charge neutrality. In semiconductors, impurities play an
important role on most of engineering properties especially electrical properties by
introducing donor or acceptor levels in the band gap. The substitutional atoms with a
different charge from the host semiconductor serve as electron donors or acceptors. In
order to control ZnO conductivity, donor and acceptor impurities have been doped into
ZnO. The common shallow donor impurities which have been doped into ZnO are
aluminium (Al), gallium (Ga), indium (In), fluorine (F) and hydrogen (H). Lithium (Li),
sodium (Na), copper (Cu) and nitrogen (N) are some examples of acceptor impurities
usually doped in ZnO. Figure 2.3g shows the diagram of a substitutional impurity at a
zinc site in ZnO lattice e.g. ݅ܮ , ݑܥ or ݈ܣ .
The impurities introduced into ZnO create new energy levels in
the band gap which associated with excitons bound to impurities. The new energy levels
can be observed by the additional luminescence peaks. For instance, the fine structure
luminescence centred at around 2.4 eV is introduced by copper impurities; the yellow-
orange luminescence centred at 2.1 eV is related to excitons bound to lithium impurities
at a zinc site (݅ܮ ሻ.54-55
2.1.3.5 Formation Energies and Processes of Native Defects
Native point defects have a strong effect on electrical and optical
properties of a semiconductor and, of course, on ZnO. In order to succeed in the use of
ZnO devices applications, it is important to understand how the defects are incorporated
into ZnO. The formation energies and their processes, transition between charge states
as well as migration, allow us to predict point defect concentrations and know their
incorporation during growth and processing. The formation energies and electronic
structure of native point defects in ZnO; ܸ , ܸை , ܼ݊ , ܱ , ܼ݊ை , and ܱ , were calculated
by Janotti et al.35 and Kohan et al.33 using a first principle, plane-wave pseudopotential
technique with a supercell approach. Under thermodynamic equilibrium and no defect-
defect interaction, the concentration of point defects (ܿ) depends upon its formation
energy ( ܧ ) which can be calculated by the following equation:
University of Technology Sydney Literature Review / 17
ா
ܿ ൌ ܰ௦௧௦ ቀെ ቁ (2.2)
ಳ ்
where ܰ௦௧௦ is the number of sites in the crystal where the defect can take place, ݇ is
the Boltzmann constant, and ܶ is the temperature. According to equation 2.2, the defects
with high formation energies rarely form while the defects with the low formation
energies form in high equilibrium concentration. For a point defect in charge state (q),
the formation energy is computed as
ܧ ሺݍሻ ൌ ܧ௧௧ ሺݍሻ െ ݊ Ɋ െ ݊ை Ɋை െ ܧݍி (2.3)
where ܧ௧௧ ሺݍሻ is a total energy of a system, ݊ and ݊ை are the number of zinc and
oxygen atoms, Ɋ and Ɋை are zinc and oxygen chemical potentials, and ܧி is the Fermi
energy.
The chemical potential is related to the growth conditions; Zn-
rich, O-rich or in between. Ɋ is equal to Ɋሺ௨ሻ in a Zn-rich condition and Ɋை is also
equal to its bulk chemical potential (Ɋைሺ௨ሻ ) in an O-rich condition. In intermediate
ratios between zinc and oxygen, both Ɋ and Ɋை are less than their bulk chemical
potential (Ɋሺ௨ሻ and Ɋைሺ௨ሻ ). Note that Zn and O chemical potentials are in
equilibrium with ZnO: Ɋ +Ɋை < Ɋை .
The intrinsic point defects, in general, have low formation
energies; therefore, they usually form during growth processes. The formation energies
of ZnO native points defects; ܸ , ܸை , ܼ݊ , ܱ , ܼ݊ை , and ܱ , are presented in Figure
2.5. These formation energies and charge transition levels were calculated from first
principles.
Most of defects are electrically active. They typically produce
levels in the semiconductors band gap including transitions between different charge
states in the same defect.56 The energy levels of defects in different charge states can
also be calculated from first principles derived from the formation energy calculation.
The defect transition levels ᖡሺݍȀݍǯሻin the calculations are defined as the Fermi-level
positions for which the formation energies of q and q’charge states are equal. ᖡሺݍȀݍǯሻ
can be calculated by equation 2.4.
ƍ
ா ሺ Ǣாಷ ୀሻିா ሺ Ǣாಷ ୀሻ
ᖡሺݍȀݍǯሻ ൌ (2.4)
ǯି
Suranan Anantachaisilp Literature Review/ 18
where ܧ ሺܦ Ǣ ܧி ൌ Ͳሻ is the defect ܦin the charge state ݍformation energy when ܧி ൌ
Ͳ.
Figure 2.5: Calculated ZnO native point defect formation energies as a function of
Fermi-level position in both Zn-rich (left) and O-rich (right) conditions. Valence band
maximum is located at the zero of Fermi level. Different slopes represent different
charge states.35
The thermodynamic transition levels for native point defects in ZnO are
demonstrated in Figure 2.6. These thermodynamic transition levels relate to thermal
ionization energies. A shallow level is the transition level to which the defect is
thermally ionized at room temperature; by contrast, a deep level is the transition level
that it is not ionized at room temperature. For shallow centres, they can happen in two
cases. First, they happen when the transition level in the band gap is located near the
band edges; valence-band maximum or conduction-band minimum. Another occurs
when the transition level is a resonance in the conduction or valence band. Notably,
some of transition levels ᖡሺݍȀݍǯሻcannot be observed in optical spectroscopy
experiments.
Migration of native point defects in the crystal lattice is also important to
study since it provides a key to understanding how point defects are incorporated during
growth and processing as well as providing self-diffusion and impurity diffusion
University of Technology Sydney Literature Review / 19
models. These diffusions are often moderated by native defects. Equation 2.5 show the
calculation of the activation energy for self-diffusion (ܳሻ which is the summation of the
formation energy of the defect that mediates the self-diffusion ( ܧ ) and its migration
energy barrier (ܧ ).57
ܳ ൌ ܧ ܧ (2.5)
Figure 2.6: Thermodynamic transition levels for ZnO native point defects.35
2.2.1 Excitons
The exciton is formed by the electrostatic Coulomb attraction between a free
excited electron and a hole. The attractive force between an electron and a hole is
defined as the exciton binding energy (ܧ ). The exciton binding energy or ionization
energy can be calculated by equation 2.6 utilizing a hydrogen-like model.59
ೝ כ ర
ܧ ൌ (2.6)
ଶ¾మ ఌమ మ
where ݊ is the quantum number (݊ = 1 corresponding to exciton at ground state), ݉ כis
the reduced mass of the electron-hole pair, ݁ is the elementary charge, ¾ is the reduced
Plank’s constant, and ߝ is the dielectric constant.
ZnO has a large exciton binding energy of 60 meV; hence it has a
significantly high percentage of excitons at room and higher temperatures. This also
leads to the high emission efficiency of ZnO based devices.
University of Technology Sydney Literature Review / 21
Figure 2.7: Characteristic ZnO luminescence spectrum presenting the near band edge
peak (NBE) and the broad deep level emission (DL).
NBE emission in ZnO is dominated by free and bound exciton emission (FX, D0X, A0X)
along with LO phonon replicas because of the very large and stable exciton binding
enrgy of 60 meV. This leads to a decrease in the recombination energy gap (E = Eg-EX)
as presented in Figure 2.8c. The bound exciton recombination exhibits a variety of
different sharp exciton lines, around 40 μeV in width, and usually observed at low
temperature. At higher temperature, these peaks are broader and merge at room
temperature. Their photon energies are characteristic for each defect with a narrow
energy range between 3.348 and 3.374 eV. The sharp lines are labeled as I lines. Since
there are 12 transitions, the lines are labeled from I0 to I11 previously used by Renolds
et al.60 There is a number of the assignment of the I lines as shown in Table 2.2 but their
assignment is still controversial.
In addition, the energy recombination gap can be more reduced
by free to bound (Figure 2.8d and e), donor-acceptor pair (Figure 2.8f), and some point
defects or transition metal impurity (Figure 2.8g).
2.2.2.2 Defect-Related Deep Level Emission
The point defects with deep levels in ZnO typically produce a
broad luminescence band in the visible range located between 2.9 eV and 1.5 eV in the
emission spectra. These deep level luminescence emissions are commonly observed as
green, yellow as well as red luminescence. There are a number of assignments of the
defect-related luminescence bands including native defects and impurities with point
defects such as oxygen and zinc vacancies (VO and VZn), zinc interstitial (Zni),
substitutional lithium on zinc site (LiZn) and etc. For example, the GL band in ZnO was
assigned as a transition from oxygen vacancy (VO) to the valence band and the YL band
at 1.96 eV is attributed to substitutional lithium on a zinc site (LiZn) in ZnO.61 Although
the defect-related bands have been assigned in articles, a conclusion on the emission
origin is still under debate.
University of Technology Sydney Literature Review / 23
where ܵ is a sensitivity of gas sensor at a particular concentration of gas, ܴ and ܫ are
the resistance and current of the sensor when exposed to air (baseline resistance and
current), where ܴ and ܫ are the resistance and current when exposed to the analyte gas.
ܫ and ܫ are shown in Figure 2.9. A high value of ܵ is high in sensitivity.
2.4.1.2 Selectivity
Selectivity demonstrates how well sensor recognizes one gas
amongst others. In general, one semiconducting gas sensor can detect more than one
gas; therefore, it exhibits poor selectivity. Under the same operating conditions, analyte
gas is always desired to provide higher sensitivity than other interfering gases. With the
coexistence of interfering gases in the atmosphere, the selectivity of the sensor can be
described by equation 2.8.
ௌ௦௧௩௧௬௧௦
݈ܵ݁݁ܿ ݕݐ݅ݒ݅ݐൌ (2.8)
ௌ௦௧௩௧௬௬௧௦
Suranan Anantachaisilp Literature Review/ 30
where (gas) are free gases, (ads) are species adsorbed on the ZnO surface and ݁ ି are
electrons contributed by ZnO.
When oxygen gas molecules adsorb onto ZnO surface, they trap electrons
from the ZnO conduction band leading to an increase in resistance (a decrease in
conductivity). Meanwhile, the depletion layer (space-charge layer) is formed as shown
in Figure 2.10. The depletion layer is a deficient carriers region because of the electron
trapping by adsorbed oxygen species. The general depletion thickness (space-charge
thickness or Debye length) is approximately 30 nm for undoped ZnO.131
After the depletion layer is formed, ZnO gas sensor is subsequently exposed
to an analyte gas which can be either oxidative or reductive. The response to oxidative
or reductive gases can be detected by measuring the resistance or conductivity of ZnO
gas sensing materials. Oxidative and reductive gases provide different contributions.
Figure 2.11: Schematic diagram of the oxidative gas sensing mechanism on ZnO
surface.107 (Green area is the depletion layer.)
Figure 2.12: Schematic diagram of the reductive gas sensing mechanism on ZnO
surface.107 (Green area is the depletion layer.)
Suranan Anantachaisilp Literature Review/ 34
Figure 2.13: Schematic diagram of ammonia gas sensing mechanism on the ZnO
surface; n = 1 or 2 and s = 1or 2.
in recent decades due to their potential for scale-up of production, commercial feasibility
and low energy-consumption.133
Growth of well-controlled ZnO nanostructures can be carried out by a
variety of methods, including both high-temperature and low-temperature approaches.
formation needs an alkaline solution since divalent metal ions do not hydrolyse in acidic
solutions. Both KOH and NaOH are the most common alkali compound utilized in the
formation of ZnO nanostructures. For hydrothermal synthesis of ZnO nanostructures,
Zinc nitrate [Zn(NO3)2] and hexamethylenetetramine (C6H12N4) are generally used.
Zn2+ ions are produced by Zn(NO3)2. HMT is believed to act as a weak base but the
exact function of HMT during the growth is still unclear. It should slowly hydrolyze in
the water solution and gradually produce OH-.
The following is the possible formation process of ZnO nanostructures by Zn(NO3)2 and
HMT:153
C6H12N4 + 6H2O ļ 4NH3 + 6HCHO (2.16)
H2O + NH3 ļ OH- + Nସା (2.17)
Zn2+ + 4NH3 ļ [Zn(NH3)4]2+ (2.18)
Zn2+ + 2OH- ļ Zn(OH)2 or Zn(NH3)42+ + 2OH- ļ Zn(OH)2(NH3)4 (2.19)
Zn(OH)2 / Zn(OH)2(NH3)4 ĺ ZnO + H2O (2.20)
SEM images of ZnO nanorods grown on Si
substrates with different ZnO seed layers: (a)
plane view of ZnO nanorod arrays grown on ZnO-
A seed layer; (b) plane view of ZnO nanorod
arrays grown on ZnO-B seed layer; and (c) plane
view of ZnO nanorod arrays grown on ZnO-C
seed layer.156
Suranan Anantachaisilp Experimental Details/ 38
CHAPTER III
CHEMICALS AND EXPERIMENTAL DETAILS
In this chapter, the synthesis of ZnO nanorods and post growth processes
are described. The experimental techniques utilized in this research to characterize
morphology, crystal structure, optical, electrical, and gas sensing properties of ZnO
nanorods will also be outlined.
100sccm flow rate for 30 minutes. All samples were annealed in the Lindberg Blue
Mini-mite Tube Furnace (Figure 3.2). The maximum annealing temperature of the
furnace is 1100oC. Annealing process can be done under vacuum or controlled gaseous
environments.
during inelastic scattering of the primary electron beam providing topology information
of the sample surface while high energy backscattered electrons bounce out of the
sample after beam collides with sample nucleus giving the composition information. X-
rays and light assign element concentration and defect information, respectively.
Figure 3.4: Penetration range of the primary electron beam with the origin of
electrons, x-rays and light.159
nȜ = 2d · sinT (3.1)
active pixel area with acquisition range of 200 to 1100 nm with 5 nm in a spectral
resolution. The active pixel area of Hamamatsu S7011-1007 CCD sensor is 1044 ȋ 124.
The sensor was placed inside a head of a Hamamatsu C7021 detector. The light was
dispersed by an Oriel MS 257 1»4m monochromator with a 1200 lines/mm grating. The
spatial resolution of this set up is 0.1 nm over a 53 nm range.
helium cold stage was also used for cooling to 5K for collecting high resolution CL
spectra. Finally, Peak-O-Mat program was utilized to do curve fitting and data analysis.
XANES, the oxidation state as well as element coordination number in a material, and
the elements site symmetry can be determined. In addition, the conduction band of the
materials information is also provided by XANES since it is probing empty states. The
X-ray photon energy is scanned over the core levels energy of primary elements in the
samples. The electrons are excited from their levels and the holes are then generated.
Subsequently, the electrons in a higher energy state recombine to the vacancy and
release the energy in the form of photons or excite the electrons from a higher state to
form Auger electrons.
XANES spectra cover over hundreds of electron volts above the core
absorption edge. The peaks in an oscillatory fine structure shape in XANES spectra
relate to the transitions of internal electrons between core levels. The oscillations in the
XANES spectrum reflect a standing wave formation causing scattering between the
photoelectron and neighbouring atoms.
XANES implemented in the Total Fluorescence Yield (TFY) and Total
Electron Yield (TEY) mode was performed around the N K-edge. The incident X-ray
beam was linearly polarized and perpendicular to the substrate surface. The photon
energy scale was calibrated against the Au 4f7/2 peak at 84 eV from a clean gold film in
electrical contact with samples.
Figure 3.6: (a) Twelve fingers of the interdigitated electrode (shown in gray). (b) Gas
sensor device comprised of ZnO sensing layer (light gray square), aluminum electrodes
(gray), polycarbonate board (outermost square) with conduction line (black line), and
connection wires (black dot).
University of Technology Sydney Experimental Details / 51
SW1 SW2
Input
PLC
Output
MFC1 MFC2
SV
Figure 3.7: Gas flow controller unit diagram; input channels are shown in dash lines
and output channels are shown in solid lines.
where S is a gas sensitivity, ܫ is a current response at each ammonia concentration, and
ܫ is an average current response at the first measurement period (base line period)
Vacuum pump
Pressure gate
Exhaust
MFC
1
Solenoid
Sensor
Analyte Valve, SV chamber
MFC
Carrier reservoir Waste
2
gas reservoir
Water
Figure 3.8: Homebuilt gas measurement system; dotted line represents the shortcut path
when the dry measurement starts.
University of Technology Sydney Gas Sensing Properties/ 53
CHAPTER IV
TAILORING DEEP LEVEL SURFACE DEFECTS IN ZnO
NANORODS FOR HIGH SENSITIVITY AMMONIA GAS SENSING
4.1 Summary
The influence of deep level surface defects on electrical and gas sensing
properties of ZnO nanorod NH3 (g) sensors was studied. ZnO nanorods 50í60 nm in
diameter were synthesized via low-temperature hydrothermal growth at 90 °C on
sapphire substrates. The as-grown nanorods exhibited a cathodoluminescence (CL) peak
centered at 1.90 eV (YL), attributed to LiZn deep acceptors or O interstitials. Subsequent
annealing in O2 at 1 atm and Znvap at 650 °C produced broad CL peaks centered at 1.70
eV (RL) and 2.44 eV (GL), respectively. The RL and GL have been ascribed to acceptor-
like VZn and donor-like VO related centers, respectively. Electrical and gas sensing
measurements established that the NH3 gas response sensitivity was 22.6 for O2 anneal
(RL), 1.4 for Znvap anneal (GL), and 4.1 for the as-grown (YL) samples. Additionally,
treatment in H-plasma quenched the RL and inverted the NH3 electrical response due to
the incorporation of H donors. Changes in the gas sensing response are explained by a
shift in the position of the ZnO Fermi level relative to the chemical potential of NH3 gas
due to the creation of near surface donor or acceptors. These data confirm that ZnO
nanorods arrays can be tailored to detect specific gas species.
4.2 Introduction
Zinc oxide (ZnO) has attracted great attention over the past few decades to
enable applications in optical devices, piezoelectric devices, solar cells, and gas
sensors.2, 4, 161 In general, the gas sensing can be measured by monitoring changes in the
surface electrical conductance of ZnO upon exposure, owing to the electron transfer
between the ZnO surface and target gas molecules.162 Because of their high surface area,
ZnO nanostructures such as nanoparticles, nanowires,16, 162-163
nanorods,164-165 and
Suranan Anantachaisilp Gas Sensing Properties/ 54
nanotubes166 are fabricated and used as gas sensors having a significantly higher
sensitivity in comparison to those using ZnO microcrystal thin films.165 A number of
researchers have confirmed that then sensitivity of these high surface area ZnO gas
sensors is strongly dependent on their operating temperature;115, 165, 167-168 i.e., the higher
the temperature, the higher the sensitivity. Accordingly, nanostructured ZnO materials
have been extensively reported as highly sensitive gas sensors when operating between
150 and 400 °C15, 163, 169-1705, or at above 400 °C.115, 171 Recently, room temperature gas
sensing devices composed of ZnO nanorods were developed to detect: H2 gas at a lowest
concentration of 150 ppm,165 alcohol gas at concentrations down to 0.5 ppm,172 and NH3
gas at concentrations of 300173 and 500 ppm.174 Here the gas sensing mechanism that
governs the ZnO surface conductivity has been attributed to low-temperature surface
reactions, involving adsorbed molecular or atomic oxygen as well as hydroxyl groups.
Several works have indicated that the electrical response can be significantly improved
in ZnO nanorods by controlling their nanostructural properties specifically their
morphology, particle size, and surface area17, 165 as well as the carrier concentration.15-
16, 18
Moreover, recent experimental and theoretical studies have shown that the surface
defect chemistry of ZnO nanorods has a significant effect on the sensitivity to different
gas species. Additionally, it has been suggested that the sensing capabilities of ZnO can
be improved by incorporating dopants such as Al, Sn, and Fe into the ZnO structure to
generate point defects that serve as catalysts enhancing the electron transfer between
ZnO and molecular gas169 or to stabilize oxygen vacancies.169-170 The exact role of these
surface defects on the surface conductivity remains controversial; however, a number
of models have been suggested, such as providing reactive sites for oxygen adsorption,
inducing surface band bending, and varying the carrier concentration by acting as donors
or acceptors.15-16, 163, 169 This research focuses on the systematic introduction of different
types of surface point defects in ZnO nanorods through controlled growth and thermal
processing in oxidizing (O2) and reducing (Zn vapor) atmosphere. The ZnO nanorods
arrays were formed on sapphire substrates without the use of a catalyst via a low-
temperature (90 °C) hydrothermal growth technique. Scanning cathodoluminescence
(CL) spectroscopy and imaging is a useful technique for studying surface defects in
semiconducting materials with high spatial resolution. Surface defects in the ZnO
nanorods were characterized by measuring low-temperature CL spectra at low
University of Technology Sydney Gas Sensing Properties/ 55
collection system. Measurements of electrical and gas sensing were carried out with a
6157A electrometer (Keithley Co, Ltd.).
Figure 4.1: (a) SEM images of as-grown ZnO ۦ0001ۧ nanorods on a sapphire substrate
and (b) PXRD patterns of as-grown, O2 and Zn atmosphere annealed ZnO nanorods
exhibiting the wurtzite crystal structure. The change in the relative intensity of the
diffraction peaks arises from a slight reorientation of the nanorods relative to the
substrate after thermal annealing.
Suranan Anantachaisilp Gas Sensing Properties/ 58
Figure 4.2: SEM images of ZnO nanorods after annealing in (a) O2 and (b) Zn
atmosphere.
Figure 4.3a highlights the CL spectra of the Zn vapor annealed, as-grown,
and O2 annealed ZnO nanorods at 80 K, which exhibit predominantly green
luminescence (denoted as GL), yellow luminescence (denoted as YL), and red
luminescence (denoted as RL) centered at 2.44, 1.90, and 1.70 eV, respectively. In order
to probe defects on the nanorod surface, CL spectra were collected at a low acceleration
voltage of 5 kV where the maximum photon generation depth is approximately 37 nm
using the CASINO simulation code.177 The CL spectra clearly show that each ZnO
sample exhibits a specific broad signature luminescence band, reflecting the different
types of DL defects at the ZnO surface following growth and postgrowth annealing. The
University of Technology Sydney Gas Sensing Properties/ 59
results in Figure 4.3a indicate that the hydrothermally synthesized ZnO nanorods
produce a visible emission corresponding to YL. On the other hand, annealing the as-
grown ZnO nanorods under an oxidative atmosphere resulted in ZnO producing RL,
whereas annealing under Zn vapor led to ZnO producing GL. These CL data confirm
that different DL types of point defect can be incorporated into the ZnO nanorods using
controlled gas atmosphere heat treatment.
Figure 4.3: (a) Normalized CL spectra collected from Zn annealed, as-grown, and O2
atmosphere annealed ZnO nanorods at 5 kV, 80 K, scan area = 50 ȝm × 43 ȝm, and
beam current of 0.2 ± 0.02 nA. The ratio of raw intensities of GL, YL, and RL centered
at 2.44, 1.90, and 1.70 eV, respectively, is 0.057:0.204:1. All spectra were normalized
Suranan Anantachaisilp Gas Sensing Properties/ 60
to the DL peaks. (b) Room temperature IíV characteristics of the Zn annealed, as-
grown, and O2 atmosphere annealed ZnO nanorods measured under an ambient
atmosphere.
The point defects formation reactions upon annealing the as-grown ZnO
nanorods under oxygen and Zn vapor atmosphere are given in equation 4.1 and 4.2. In
addition, the intensity ratio of near-band-edge (NBE) to DL emissions at approximately
3.3 eV was increased after annealing, especially in Zn atmosphere annealed ZnO
nanorods, suggesting that defect concentrations were lowered by thermal annealing.
ଶି
ܱଶሺ௦ሻ ܼܱ݊ ՜ ܼܱ݊ሺ௦ሻ ܸ ʹ݄ା (4.1)
ܼ݊ሺ௦ሻ ܼܱ݊ ՜ ܼܱ݊ሺ௦ሻ ܸைଶା ʹ݁ ି (4.2)
The production of YL from the hydrothermally grown ZnO nanorods was
also observed and systematically studied by photoluminescence.79 It was also suggested
that the PL yellow emission was due to the presence of OH groups or Zn(OH)2 on the
surface of ZnO nanorods rather than oxygen interstitials. It has been shown that the YL
in hydrothermally grown ZnO could be related to deep LiZn acceptors.55, 83 Notably,
adsorption of OH groups on the ZnO surface is favourable under hydrothermal
treatments, and the chemical origin of YL produced by hydrothermally grown ZnO
could be different than those obtained by other preparation methods.
From the CL spectra (Figure 4.3a), the appearance of RL due to annealing
in an oxygen atmosphere indicates the generation of a different type of point defect at
the ZnO nanorod surface. It should be highlighted that the shift of YL to RL upon
oxidative annealing was in excellent agreement with Djurisic’s report, 79 suggesting that
RL originates from zinc vacancy defects. The red and orange-red emissions were
previously assigned as originating from oxygen interstitials (Oi),80, 82 zinc vacancies
(VZn),79 and substitutional nitrogen defects on oxygen sites.178 Our view is that the RL
is related to VZn or VZn related complex due to a surface chemical reaction where the
O2(g) reacts with the ZnO surface removing a Zn atom and creating a VZn and ZnO
vapor as shown in equation 4.1. This assignment is consistent with theoretical
calculations40 that VZn with the lowest formation energy can be easily formed in O-rich
ZnO. Electron paramagnetic resonance (EPR) and X-ray absorption spectroscopies were
employed to probe the presence of nitrogen defects. No EPR hyperfine signal
corresponding to nitrogen was observed. X-ray absorption near-edge structure
University of Technology Sydney Gas Sensing Properties/ 61
(XANES) spectra at the N K-edge (Figure 4.4) were collected from the as-grown and
annealed ZnO nanorods and compared with nitrogen-implanted ZnO nanoparticles and
bulk ZnO crystals. These data confirm the absence of N in the ZnO nanorods studied in
this work. To elucidate the chemical nature of the defect involved in the RL, the O2
atmosphere annealed ZnO was subjected to a hydrogen plasma treatment, causing the
RL to completely quench (Figure 4.5).
Figure 4.4: N K-edge XANES spectra of Nitrogen implanted ZnO crystal and ZnO
nanoparticles, and as grown, O2, and Zn atmosphere annealed ZnO nanorods.
The RL suppression can be explained by the passivation of VZn by hydrogen
donors through the formation of either (VZníH) or (HíVZníH) complexes.179 These
results suggest that the RL may originate from either VZn or a VZn-related center,
consistent with an assignment by Wang et al.180
The presence of the GL after annealing in a zinc-rich atmosphere is evidence
of a creation of another different type of defect type at the ZnO nanorod surface (see
equation 4.2). It is widely agreed that GL at around 2.5 eV is initiated from singly
ionized oxygen vacancies (ܸைା ), neutralܸை , or Vo-related centers.181-183 Recently it has
suggested that this emission may be due to VZn centers;184 however, none of the
Suranan Anantachaisilp Gas Sensing Properties/ 62
experimental results in this work support this assignment in our low temperature grown
hydrothermal ZnO nanorods.
Figure 4.3b reveals the currentívoltage (IíV) characteristics, under an
ambient air atmosphere, of ZnO nanorod gas sensors fabricated from the as-grown, O2,
and Zn atmosphere annealed ZnO. The electrical conductivity of the samples
substantially increases after annealing, particularly in a Zn-rich atmosphere. In addition,
the maximum current (measured at 1.0 V) obtained from the as-grown ZnO based device
was 3.34 nA. In comparison, an approximately 100- and 1000-fold enhancement in
current resulted after annealing in O2 and Zn vapor atmosphere, respectively. It is
important to note that only a 20- fold enhancement in current was found following
annealing in an Ar atmosphere under identical conditions to the O2 and Zn vapor heat
treatments (Figure 4.6). This observation conclusively shows that the increase in
conductivity following O2 and Zn atmosphere annealing was the result of modification
to the surface defect chemistry with thermally induced improvement in the crystallinity
of the ZnO nanorods playing only a minor role.
sensors under practical operating conditions. Note that all IíV curves in Figure 4.3 show
linear characteristics indicating good Ohmic behavior, which is ideal for sensor
applications. The NH3 gas response data (Figure 4.7) were collected in five
measurement cycles, with higher concentrations of gas being employed in subsequent
runs. The gas sensor was purged with air prior to each measurement cycle. The NH3
response sensitivity (S) can be determined using the expression ܵ ൌ ܫ Ȁܫ , where ܫ is
the current measured during NH3 gas flow and ܫ is the baseline current (air flow) before
exposure. From Figure 4.7, it was found as expected that the sensitivity was enhanced
when NH3 gas concentration increased from 20 to 100 ppm for all samples. Variation in
gas sensing properties of ZnO with different defect types (YL, RL, and GL) was
observed. At 100 ppm of NH3 gas, the highest sensitivity was observed from the sensor
fabricated from the O2 annealed ZnO (S = 22.6; RL) in comparison to the as-grown
nanorods (S = 4.1; YL) and the Zn vapor annealed ZnO (S = 1.4; GL). Although the
sensitivity of the as-grown nanorod-based sensor is relatively low, it is ca. 50 times
higher than the room temperature NH3 gas sensor based on hydrothermally grown ZnO
nanorods previously reported by Ang et al.,174 measured at 500 ppm (when S was
calculated by the same equation above). The sensitivity of O2 atmosphere annealed ZnO
based device was found to be ca. 280 times higher than that reported by Ang et al.174
More importantly, the NH3 gas sensitivity of hydrothermally grown oriented ZnO
nanorod arrays (S < 8.5)185 sensor at a temperature of 250 °C with a gas concentration
of 200 ppm was not significantly higher than our ZnO nanorod device operating at room
temperature. Possible surface reactions related to the NH3 gas response sensitivity of
sensors fabricated by the ZnO nanorods having particular DL defect emission are given
as follows.
ି
ܱଶሺ௦ሻ ݁ ି ՞ ܱଶሺௗ௦ሻ ; T < 150 °C (4.3)
ି
Ͷܰܪଷሺ௦ሻ ͵ܱଶሺௗ௦ሻ ՞ ܪଶ ܱሺ௦ሻ ʹܰଶሺ௦ሻ ͵݁ ି (4.4)
The observed increase in electrical conductivity of the ZnO nanowires is
generally ascribed in the literature to the following surface chemistry model. Under air
flow, O2 molecules are absorbed on the ZnO surface and convert to oxygen ions through
depletion of electrons from the conduction band of ZnO, equation 4.3, lowering its
electrical conductivity.164-165, 186-187
Upon exposure to NH3 gas, the increase in the
electrical conductivity response of the ZnO gas sensor (ܫ ) is attributed to surface
Suranan Anantachaisilp Gas Sensing Properties/ 64
reactions between NH3 with adsorbed oxygen ions. This process induces desorption of
the surface O2 as shown in equation 4.4, resulting in electrons being released back to the
ZnO conduction band subsequently reverting the electrical conductivity toward the
initial pre-NH3 exposure levels. This particular model, however, is inconsistent with the
CL spectroscopy analysis of the ZnO surface defects in this work. It is widely reported
in both theoretical188 and experimental189 studies that surface oxygen vacancies enhance
the adsorption of O2 via a dissociative adsorption process. Accordingly, the ZnO
nanorod sample annealed in Zn vapor with the high Vo concentration, as evidenced by
the strong GL, should exhibit the highest coverage of adsorbed O2 and consequently the
highest sensitivity to the NH3 gas. Conversely, the ZnO nanorod specimen annealed in
O2 with its VZn-rich surface, as indicated by the strong RL, should display a lower
sensitivity. However, the NH3 sensitivity results shown in Figure 4.7 reveal exactly
opposite behavior with the RL sample exhibiting the greatest NH3 sensitivity and the
GL sample the weakest. Significantly, RL samples exposed to H-plasma exhibited a
negative electrical response (Figure 4.7g,h). Given these data, an alternate model
involving annealing induced shifts of the Fermi level position of the ZnO nanorod is
presented to explain the NH3 conductivity and its relationship to the ZnO surface defect
chemistry.
Figure 4.6: Room temperature I-V characteristic of the Argon atmosphere annealed
ZnO nanorod gas sensor.
University of Technology Sydney Gas Sensing Properties/ 65
Figure 4.7: Sensitivity as a function of measurement time for (a) as-grown, (c) O2, (e)
Zn, and (g) H plasma after O2 annealed ZnO nanorod sensors and sensitivity as a
function of ammonia gas concentration for (b) as-grown, (d) O2, (f) Zn, and (h) H plasma
after O2 annealed ZnO nanorods sensors at room temperature. Labels in the bottom right
corner of (b), (d), (f), and (h) indicate the signature luminescence (YL, RL, GL, and RL
suppression) exhibited by ZnO nanorods employed in the fabrication of each gas sensor.
Suranan Anantachaisilp Gas Sensing Properties/ 66
Both bulk and nanostructured ZnO are n-type due to an autodoping process
inducing the inadvertent incorporation of intrinsic donors, such as H, Zni, and Vo as well
as their complexes that push the Fermi level (EF) toward the conduction band.40 Charge
will flow either to or from the ZnO surface and the adsorbed NH3 gas species, depending
on the position of the ZnO EF compared with chemical potential (ECP) of the adsorbed
NH3 gas.105, 190 If the EF is below the NH3 ECP, then charge with be transferred from
the gas species to the surface and vice versa for EF above the NH3 ECP. Accordingly,
annealing ZnO in O2 atmosphere produces VZn acceptors lowering the EF toward
valence below ECP, promoting electrons to move from the NH3 to the ZnO nanorod and
increasing the surface conductivity. Conversely, the generation of Vo donors by
annealing in Zn vapor raises EF toward the conduction band above ECP, causing
electrons to shift from the ZnO to the adsorbed NH3 and decreasing the surface
conductivity. Additionally, the negative electrical response (Figure 4.7g) following
hydrogen plasma treatment of the O2 anneal sample clearly confirms this alternate
model. The hydrogen in ZnO always acts as a donor.94, 191
Consequently, H
incorporation via the hydrogen plasma treatment pushes the EF toward the conduction
band above the NH3 chemical potential, leading to electron flow in the opposite
direction.
Scheme 4.1: The alteration of the ZnO Fermi level position owing to near surface
acceptor (RL: VZn) and donor (RL suppression: Hydrogen) after post growth processes.
4.5 Conclusions
In summary, the low temperature (90 °C) growth technique employed in the
preparation of ZnO nanorods in sensor devices shows great promise as an alternative
University of Technology Sydney Gas Sensing Properties/ 67
method to the existing high temperature routes due to its simplicity, application to
temperature sensitive substrates, energy efficiency, and reproducibility in obtaining
nanostructured ZnO for room temperature NH3 sensor applications. CL spectroscopy
confirmed that post-growth-controlled atmosphere heat treatment can be used to
mediate the Fermi level position of the ZnO nanorods through the creation of acceptor
or donor native near surface defects, which governs the sign and magnitude of the
electrical response to NH3 gas. Specifically a room temperature NH3 sensitivity of S =
22.6 was achieved by heating in O2 atmosphere at 650 °C that was 5 times greater than
S for as-grown ZnO nanorods. The reported findings on the inter-relationship between
surface point defects, electrical properties, and gas sensing properties of nanostructured
ZnO will facilitate the development of future, low cost, high-sensitivity, room
temperature gas sensor devices tailored for specific applications.
Suranan Anantachaisilp Surface Electronic Structure / 68
CHAPTER V
THE SURFACE ELECTRONIC STRUCTURE OF ZnO
NANORODS: THE ROLE OF SURFACE DEFECTS
5.1 Summary
The effect of native point defects on the surface electronic structure of low
temperature (90 qC) hydrothermally grown ZnO nanorods is investigated using X-ray
photoemission spectroscopy (XPS), X-ray Absorption Near-Edge Structure (XANES),
electron spin resonance (ESR), low voltage cathodoluminescence spectroscopy, sub
band gap photoluminescence spectroscopy as well as electrical I-V measurements. The
as-grown surface defect structure was altered by controlled atmosphere annealing at
650ºC in both O2 gas and Zn vapor environments. From the correlative characterization
measurements it is established that the degree of surface band bending and surface
conductivity is controlled by amount of adsorbed ambient gas species (O2, H2O and
OH), which is mediated by type and concentration of intrinsic surface point defects.
Specifically a direct relationship is established between peaks at 532.0 eV and 532.7 eV
in O1s XPS spectra attributed to presence of surface oxygen vacancies and oxygen in
adsorbed gas species. Singly ionized oxygen vacancies are confirmed to be stable on the
ZnO nanorod surface producing (i) a pronounced shoulder feature in the valence band
XPS spectra around 3 eV below the Fermi level, (ii) a strong broad green CL peak
positioned at 2.43 eV (300K) and (iii) an intense ESR line at g # 2.01 (10 K).
5.2 Introduction
A key attraction of ZnO relates to it useful and interesting surface electronic
properties, which are significantly enhanced in ZnO nanostructures with their extreme
surface-to-volume ratios.192-195 Gas – solid interfacial chemical reactions can produce
either a low conductivity surface electron depletion layer or a high conductivity surface
electron accumulation layer via physisorption and chemisorption of ambient or target
University of Technology Sydney Surface Electronic Structure/ 69
gas species on the ZnO surface. For instance, electron acceptor O2 gas molecules can
capture electrons from the bulk creating a negative surface charge above an electron
depletion layer with corresponding upward band bending. Conversely electron donor
gas species such as water vapor molecules and hydroxyl groups can cause the opposite
effect and accordingly form an electron accumulation layer with downward band
bending. In typical semiconductors the type of surface adsorbed gas depends on the bulk
electrical properties: n – type, acceptor surface states with upward band bending and
p – type, donor surface states with downward band bending.196-197 However, both
upward and downward band bending has been reported for bulk and nanostructured ZnO
despite being a naturally n-type semiconductor.196-200 This behaviour has been attributed
to variation in the type and density of native defects on the ZnO surface which affects
the adsorption efficiency of different ambient gas species.143, 197-208 To understand these
gas - surface mechanisms in detail, ZnO nanorod surfaces have been modified using
controlled atmosphere annealing techniques by design to produce surfaces with different
distributions of native point defect.202, 209-214 A range of complementary spectroscopy
techniques have been used to investigate interactions between native ZnO point defects
and ambient gas species to establish their effect on the surface optical and electrical
properties of ZnO nanorods.
ZnO nanorods was not changed by the post-growth heat treatment. The size and shape
as well as the crystal structure of as-grown and annealed ZnO nanorods were
characterized using field-emission scanning electron microscopy (FE-SEM) and powder
X-ray diffraction (XRD) respectively.
Electrical I-V curve measurements were conducted using a 6157A
electrometer (Keithley Co, Ltd). Aluminum electrodes consisting of pattern of 12
interdigitated fingers 900 μm length with 100 μm spacing, were deposited onto the
surface ZnO nanorod ensemble using a thermal evaporation technique.
Cathodoluminescence (CL) spectra were measured using a FEI Quanta 200
scanning electron microscope equipped with a retractable diamond machined parabolic
mirror light collector and a liquid nitrogen (80 K) cold stage. CL spectra were collected
using an Ocean Optics QE6500 optical spectrometer 300-1000 nm with a spectral
resolution of 0.9 nm. In all CL measurements, the accelerating voltage of the electron
beam was 5 kV, corresponding to a maximum CL generation depth of around 37 nm.
All CL spectra were corrected for the total response of the light collection system.
X-ray photoemission spectroscopy (XPS) and X-ray Absorption Near-Edge
Structure (XANES) were performed on the soft X-ray spectroscopy beamline at the
Australian Synchrotron. In photoemission experiments, the energy of incident X-ray
photon was adjusted to achieve a similar photoelectron kinetic energy with a ~ 3 nm
probing depth. The O1s spectra were acquired at hv = 650 eV, while the valence band
spectra were acquired at hv = 150 eV. XANES was implemented in the Total
Fluorescence Yield (TFY) mode around the O K-edge. The photon energy scale was
calibrated against the Au 4f7/2 peak at 84 eV from a clean gold film in electrical contact
with the samples. For each measurement, several scans were registered on the same spot
in order to monitor x-ray beam damage; no significant changes within the measurement
time (approximately 10 minutes) were detected.
Electron Spin Resonance (ESR) analysis was carried out at 10 K using a
Bruker Elexys E500 cw X-band ESR spectrometer equipped with an Oxford ITC605
temperature controller. All presented ESR spectra were measured using a power of
2.0 mW at a frequency of 9.4 GHz and modulation amplitude of 5.0 G.
The photoluminescence (PL) spectra were recorded using a home-built
confocal microscope with 500 nm resolution. Optical excitation was implemented using
University of Technology Sydney Surface Electronic Structure/ 71
continuous-wave blue (O = 405 nm) and green (O = 532 nm) lasers through a high
numerical aperture (NA = 0.9) objective. The PL signal was collected using the same
objective and sent to a Princeton Instruments, 300 lines/nm grating spectrometer. The
PL signal was measured using an Excelitas SPCM-AQRH-14Avalanche Photo Diode.
A dichoric mirror was used in all measurements to filter out the laser excitation
emission, and a band-pass filter was employed to select only the defect emission. The
measurements were done at room temperature and were corrected for system response.
Figure 5.1 shows SEM images of the as-grown hydrothermal ZnO nanorod ensemble
containing a high density of uniform hexagonal <0001> nanorods 50 ± 5 nm in diameter.
The oblique nanorod growth habit promotes multiple contact of the sidewalls providing
good electrical conductivity across the ensemble.
Suranan Anantachaisilp Surface Electronic Structure / 72
Differences in the surface defect structure are also evidenced by the I-V
results (Figure. 4.3(b)) which reveal large changes in the surface conductivity between
the three sample types. The low current observed in the as-grown samples arises from
the chemisorption of oxygen molecules which capture electrons forming charged
oxygen species (ܱଶି ሻand creating a resistive surface depletion layer.202, 204-206 After
annealing in Zn vapor a three orders of magnitude increase in the measured I-V current
was observed (Figure 5.3). This result is consistent with a high surface coverage of water
molecules and hydroxyl groups that release electrons to the ZnO nanorod surface
producing and electron accumulation layer, increasing the electrical conductivity.202, 204,
218-220
Here chemisorbed and physisorbed ambient water molecules efficiently bond and
dissociate on Zn sites at surface oxygen vacancies218 which renders the ZnO nanorod
surface hydrophilic. Lastly the O2 annealed nanorods produced a two orders of
magnitude current increase from the as-grown result due to the change in the type and
density of surface defect gas adsorption sites. This result emphasizes the effect of the
competitive nature of the oxygen and water vapor surface adsorption and its dependence
on the surface defect chemistry.
Figure 5.3 presents a log I vs log V showing the 1000x and 100x increase in the
measured current after Zn vapor and O2 annealing respectively.
Suranan Anantachaisilp Surface Electronic Structure / 74
4
ESR Intensity (a.u.)
g = 2.00
2
-2
-4
-6
and zinc vacancies (ܸ୬ ି )223 as well as conduction band states related to shallow donor
impurities, such as H224 and Ga, In and Al.225 Centers involving ଶା
୧ and H can be ruled
out as these defects have high thermal mobilities in ZnO.226-227 Consequently in ZnO
nanostructures ଶା
୧ and H should easily diffuse to the surface and expelled during high
temperature heat treatment. Furthermore since there was no change in the intensity of
ି
g = 1.96 with O2 annealing ି
୧ and ܸ୬ can be excluded as well leaving Ga, In and Al
shallow donor impurities as the most likely chemical origin of the g = 1.96 ESR line.
The weak g # 2.01 signal has been attributed to singly ionized surface
oxygen vacancies ܸା in photo-ionization experiments,228 however, its assignment
remains controversial. In this work it was found that the intensity of the ESR line around
g # 2.02 increased significantly after the ZnO nanorods were annealed in Zn vapor
(Figure 5.4(b)). This result provides compelling support for the assignment of the
g = 2.02 line to surface ܸା since it is expected that Znvap annealing will cause strong
gas-solid surface reduction reactions that create oxygen vacancies as substantiated by
the presence of strong GL band in the CL analysis (Figure 5.2). Although the ܸା is
theoretically predicted to spontaneously transform to either a doubly ionized ܸଶା center
or a neutral ܸை by either emitting or capturing an electron respectively,40 the correlative
surface characterization results in this work strongly suggest that ܸା center is
energetically stable at the surface of ZnO nanorods.
The O1s XPS spectra for RL, GL and YL ZnO nanorod samples presented
in Figure 5.5. These XPS data were all curve fitted into three peaks using a pseudo-
Voigt function with a consistent set of peak position and FWHM curve fitting
parameters at 530.5 eV (Peak OI), 532.0 eV (Peak OII) and 532.7 eV (Peak OIII). Peak
OI is ascribed to O2- ions surrounded by fully co-ordinated by Zn and O atoms in the
fully stoichiometric wurtzite crystal structure, peak OII is related to either O2- ions in the
vicinity of VO defects or OH groups and peak OIII is attributed to oxygen in strongly
bound adsorbed gases, specifically H2O and O2 molecules.188, 229-232
The relative
Suranan Anantachaisilp Surface Electronic Structure / 76
percentage for each of these three peaks for the as-grown, Zn annealed and O2 annealed
specimens are as follows: as-grown OI – 31%, OII 41% and OIII 28%; O2 anneal OI –
38%, OII 38% and OIII 24%; and Zn vapour anneal - OI – 18%, OII 51% and OIII 31% (as
shown in table 5.1).
II
Peak I
Peak II
I Peak III
III
Peak I
Peak II
III Peak III
Intensity (a.u.)
II
Peak I
Peak II
Peak III
III
Table 5.1 The relative percentage of the integrated intensity of the OI, OII and OIII peaks
from the O1s XPS emission for the as-grown, Zn annealed and O2 annealed specimens.
effective density of states [= 2.94 × 1018 cmí3 for ݉ כൌ ͲǤʹͶ݉ ], ne is the bulk carrier
density and e, T and kb all have their usual meaning. The EBEcutoff was found using the
intersection of extrapolated linear fits to the leading edge of valence band photoemission
and the photoemission background as shown in Figure 5.6(b). Using typically reported
literature values for the electron density in ZnO nanowires, ne = ~ 1 x 1017 cm-3,237
surface band bending values of - 0.42 ± 0.02V and - 0.24 ± 0.02V for the as-grown and
O2 annealed samples respectively. These negative values indicate downward band
bending due to surface electron accumulation on the ZnO nanorod, which is attributed
University of Technology Sydney Surface Electronic Structure/ 79
to adsorbed water molecules and hydroxyl groups (Figure. 5.7.). Less downward band
bending after O2 annealing indicates a smaller amount of negative charge transfer to the
surface by a reduced number of adsorbed water molecules and hydroxyl groups on the
ZnO nanorods due to the change in the surface defect chemistry.
Thermally induced changes in ne during O2 annealing can be dismissed
because heating at elevated temperatures should produce a reduction in ne either through
the loss of H or Zni donors because of their high mobility or via the formation of
compensating acceptor defects. Both these processes would cause a corresponding
increase in the degree of band bending rather than a decrease. Given this, the decrease
in negative band bending after O2 annealing is attributed to a reduction in the number
of adsorbed water and hydroxyl donors as established with the I-V results. However, it
is important to note that the I-V data was collected under ambient conditions with both
physisorbed and chemisorbed molecules on the ZnO nanorods whereas the XPS
measurements are taken under ultra high vacuum conditions were physisorbed species
are pumped away leaving strongly bound chemisorbed species.
Heating in zinc vapor produced a strong shoulder feature in the VB-XPS
spectra around ~ 3eV below the EF with a shift of the VB photoemission onset to ~ 1 eV
below the EF (Figure. 5.6(b)). These results together with the corresponding CL data
showing strong GL as well as the ESR results and the O 1s XPS data unequivocally
confirm the presence of electron populated surface oxygen vacancy states above the
valence band following Zn vapor annealing. The corresponding strong ESR signal
indicates that these centers must be paramagnetic singly ionized surface oxygen
vacancies. The presence of surface oxygen vacancies is also supported by the observed
broadening of the O 2p + 4 s and O 2p states due to lattice disordering (Figure. 5.6(b)).
Suranan Anantachaisilp Surface Electronic Structure / 80
(a) Zn3d
Zn anneal
as-grown
O2 anneal
Intensity (a.u.)
hQ = 160 eV
Zn4s + O2p EF
O2p
16 14 12 10 8 6 4 2 0
Binding Energy (eV)
Figure 5.6 Valence band X-ray Photoemission Spectroscopy (VB-XPS) spectra taken
from the as-grown, O2 anneal and Zn vapor anneal ZnO nanorod samples are presented
in Figure. 5.6(a). The VB-XPS spectra for all three samples consist of two dominant
near edge peaks one centered at ~ 5 eV ascribed to O 2p related states the other ~ 7 eV
attributed to hybridized Zn 4s + O 2p states. The leading edge of the valence band
photoemission showing the pronounced shoulder around 3 eV below the Fermi level
that forms after Zn vapour annealing is shown in Figure 5.6(b).
University of Technology Sydney Surface Electronic Structure/ 81
Figure 5.7 Downward band bending on the as-grown ZnO nanorod due to electron
accumulation and its decrease following O2 annealing using the valence band
photoemission spectroscopy results in Figure 5.6 (a) and 5.6 (b).
Suranan Anantachaisilp Surface Electronic Structure / 82
Normalised PL Intensity
0.8
0.6
0.4
0.2
1.6 1.7 1.8 1.9 2.0 2.1 2.2 2.3
Energy (eV)
Figure 5.8 Comparison of continuous-wave 532 and 405 nm sub band gap laser
excitation PL spectra at 300 K for ZnO nanorods as-grown and annealed in O2 gas. The
sub band gap excited spectra reveal a common broad OL emission at 1.95 eV except for
the O2 annealed sample illuminated with blue light which emits a broad RL around
1.83 eV indicated a different defect structure.
peaks. Although it is highly likely that the RL and OL sub band gap emission bands
relate to native acceptor centers involving VZn or Oi defects respectively, the assignment
of these PL peaks to specific defects requires further work. Nevertheless, the sub-band
gap laser PL results confirm that O2 annealing changes the defect structure of the ZnO
nanorods through the formation surface VZn related centers. The presence of these
centers could account for the observed decrease in the magnitude of negative band
bending.
5.5 Conclusions
Optical and electrical characterization studies of ZnO nanorods before and
after annealing in O2 gas and Zn vapor have confirmed that the surface electronic
structure can be bespoke for specific sensor applications. These correlative spectroscopy
measurements reveal clear evidence of direct interrelationship between the electronic
properties of the ZnO nanorod surface and its surface defect structure. In particular, the
role of intrinsic point defects on the physisorption and chemisorption of water molecules
and hydroxyl groups which, through charge transfer mechanisms, govern both the
surface band bending effects and the surface conductivity. Additionally O1s XPS
spectra established that the number of adsorbed water and hydroxyl species on the ZnO
nanorod is directly proportional to the concentration of surface oxygen vacancies. An
important result of these studies is compelling experimental evidence for the existence
of stable singly ionized oxygen vacancies (ܸைା ) at the ZnO nanorod surface.
Furthermore, it was shown that (i) a broad green CL peak centered at 2.43 eV, (ii) an
intense ESR line at g # 2.01 and (iii) a pronounced shoulder in the valence band X-ray
photoemission spectra ~ 3.0 eV below the Fermi level, can all be attributed to centers
involving surface ܸைା centers.
Suranan Anantachaisilp Red Luminescence / 84
CHAPTER VI
NATURE OF RED LUMINESCENCE IN OXYGEN TREATED
HYDROTHERMALLY GROWN ZINC OXIDE NANORODS
6.1 Summary
A strong broad red luminescence (RL) peak centered at 1.69 eV
(FWHM = 0.57 eV) at 15K [1.78 eV (FWHM = 0.69 eV) at 300 K] is formed in ZnO
nanorods hydrothermally grown at low temperature following thermal annealing at
650°C for 30 minutes in an O2 gas environment. The optical properties of this peak were
comprehensively studied using a range of characterization techniques, including
photoluminescence and cathodoluminescence spectroscopy, X-ray absorption near edge
spectroscopy and electron paramagnetic resonance spectroscopy. With decreasing
temperature the RL peak position red shifted and its FWHM became narrower in
accordance with the configuration coordinate model. Using these results, the RL has
been assigned to highly lattice coupled VZn-related acceptor-like centers. No correlation
was found between the observed red luminescence and nitrogen impurities.
6.2 Introduction
Of particular importance is the luminescence of ZnO with optical emission
that spans the ultra-violet, visible and near infrared spectral range. In the ultra-violet the
emission is dominated by radiative near band edge (NBE) recombination mechanisms
including, free and bound excitons as well as free-to-bound and donor acceptor pair
transitions involving shallow defects. While deep level defects produce broad emission
peaks via a variety of recombination and internal mechanisms in the green (~2.5 eV and
2.3 eV) 181-183, 216, yellow (~2.1 eV) 55, 79, 83, orange (~1.9 eV) 80 and red (1.7 eV) 79, 82,
178
at 300 K.
Despite considerable research effort unequivocal assignment of these
luminescence peaks to specific dopants, impurities as well as defects and their
University of Technology Sydney Red Luminescence / 85
complexes has not been realized up to now. Nevertheless there is general agreement that
oxygen (VO) and zinc (VZn) vacancies and interstitials (Oi and Zni) play a major role in
these luminescence processes in undoped ZnO. To date most optical characterisation
studies have focused on the green luminescence and to a lesser extent the yellow and
orange emission in ZnO. However, there is currently growing interest in the red
luminescence (RL) for a number of reasons. First it has been recently suggested that the
RL could be a signature emission for N acceptors in ZnO [13] which is of importance
to the development of stable p-type material. However, RL has also been attributed to
zinc vacancies (VZn) 79, 180, oxygen interstitials (Oi) 80, 82, oxygen vacancies (VO) 238 as
well as the Zni-VO complex or VZnVO di-vacancies.88 Second gas sensor studies have
revealed a significant enhancement in the electrical sensitivity of the ZnO surface to
specific target gases, such as NH3, when RL dominates the luminescence spectrum.113
Finally the second-order correlation [g2(0)=0.1] of photons in the red-orange spectral
range confirming single photon emission in ZnO has been recently reported.215, 239
In this work the temperature and power density dependence of the RL in
ZnO have been systematically investigated using cathodoluminescence spectroscopy.
These data have been compared to ESR and photoluminescence NBE spectroscopy
results as well as ESR and XANES data. Collectively these correlative studies indicate
that the RL is associated with highly lattice coupled ܸ -related acceptor –like radiative
recombination centers.
were employed as received with no further purification. The as-grown nanorod samples
were annealed at 650°C for 30 minutes in O2 gas environment. Hydrogen plasma
treatment was conducted at a sample temperature of 100 qC using a mild 10 W hydrogen
radio-frequency plasma for 20 minutes with 10 sccm H2 flow rate.
6.3.2.1 Cathodoluminescence
The cathodoluminescence (CL) spectra were collected using a
FEI Quanta 200 scanning electron microscope equipped with the option of either an
Ocean Optics QE6500 system or a Hamamatsu S7011-1007 CCD sensor. The Ocean
Optics QE65000 system provides CL collection from 300-1000 nm with a spectral
resolution of 0.9 nm. CL was collected by a diamond machined parabolic mirror
positioned above the sample with an aperture to facilitate transmission of the electron
beam. In temperature resolved experiments, the sample was placed on a liquid helium
cold stage with the temperature varying from approximately12 K to 300 K. In all CL
experiments, the accelerating voltage of the electron beam was 5 kV which corresponds
to a maximum photon generation depth of around 37 nm.177 The electron beam current
was varied from around 0.013 nA to 2.54 nA in power-density measurements. All CL
spectra were corrected for the total response of the light collection system
6.3.2.2 Photoluminescence
High resolution PL was done utilizing the fourth harmonic
generation (266 nm) of a Nd:YAG laser. A monochromator with a 1200 lines/mm
grating (spectral resolution 0.2 meV) was used to disperse the emitted light. In
temperature resolved experiments, the PL measurements were performed in a liquid
helium bath cryostat allowing measurements from 7K to 300 K. A HeCd Laser with the
325 nm emission line and an output power of 36 mW was used to excite the ZnO
samples above the band gap. The emitted light was dispersed by a Spex-1404 double
monochromator (spectral resolution 50 μeV) and detected by a bi-alkali photodetector.
University of Technology Sydney Red Luminescence / 87
Figure 6.1: SEM image of the as-grown <0001> ZnO nanorod ensemble, showing that
the low temperature hydrothermal growth treatment produced a high density of
uniform hexagonal <0001> nanorods approximately 55 nm in diameter orientated at
different angles to the normal direction of the substrate.
Figure 6.2a shows before and after annealing CL spectra at 300 K from the
“as-grown” and O2 heat treated nanorod films. The “as-grown” sample exhibits a ultra-
violet peak centered at 3.17 eV arising from a number of highly overlapped thermally
broadened LO-phonon replicas of the free exciton (FX) emission. A broad orange peak
positioned at 1.99 eV is also observed in the as-grown nanorods which has been
previously attributed to Li acceptors 240 and Oi related centers 215. After annealing in O2
at 900 qC the NBE emission increases in intensity by a factor of 5 due to a thermally
induced improvement in the quality of the ZnO nanorods following a reduction in the
number of point and extended defects that provide non-radiative recombination
pathways. Additionally and more significantly the O2 heat treatment created a strong,
highly symmetric red luminescence at 1.78 eV and FWHM of 0.69 eV. Figure 6.2b
shows that this emission was found to rapidly quench following exposure to a mild H2
plasma strongly suggesting that the chemical origin of the RL is related to acceptor-like
centers as hydrogen is a well-known donor in ZnO. The accompanying large increase
in the NBE could indicate that the RL centre acts as an efficient competitive
recombination channel to the NBE, however, further H passivation of non-radiative
pathways cannot be ruled out. At 15 K the RL peak position, see Figure 6.2c, slightly
red shifts to 1.69 eV and the FWHM narrows to 0.57 eV, which can be interpreted by a
University of Technology Sydney Red Luminescence / 89
241
configurational coordinate (CC) model . Furthermore the absence of any fine
structure in the peak at 15 K eliminates the assignment of the observed RL to transition
metal impurities, such as Fe, Co and Ni, which exhibit characteristic sharp features due
to internal 3d transitions 242-243. The presence of a broad emission at 2.5 eV has been
attributed to surface and bulk VO centers at 5 K 179, 215. In addition at 15 K the NBE blue
shifts revealing a structured UV emission at 3.31 eV. This peak and its phonon replicas
have been attributed to acceptors in ZnO involved in donor acceptor pairs and free-to-
bound acceptor transitions as well as to excitons bound to structural or surface or
defects. 244-245
CL spectra as a function of electron beam excitation current at 80 K and
300 K normalized at the maximum of the RL peak are shown in Figure 6.3a and 6.3b
respectively. The RL does not exhibit a blue shift with increasing power-density a
typical hallmark characteristic of the donor acceptor pair (DAP) recombination
mechanism. The CL intensity versus electron beam current displays a power-law
dependence on beam current with ICL v IBn. Log (ICL) versus log (Ib) plots at 300 K
using the data in Figure 6.4a and 6.4b provide power law exponent: nRL = 0.74 ± 0.03
and nNBE = 1.22 ± 0.04 at 80 K, and nRL = 0.81 ± 0.02 and nNBE = 1.08 ± 0.09 at 300 K.
The linear excitation power dependence of the NBE is expected as the
excitonic recombination rate is faster than the carrier injection rate by the energetic
electron beam. The nRL values are larger than expected for typical phonon-coupled
defect transitions which are typically around n ~ 0.5 because of the longer radiative
relaxation times. However, the slightly high n value of the RL could possibly be
explained by either a high RL defect concentration or possibly increased RL emission
due to excitation via an energy exchange mechanism involving the relaxation of free
excitons 240.
Suranan Anantachaisilp Red Luminescence / 90
Figure 6.3: Normalized RL intensity versus excitation power (5 kV x IB) at 80 K (a) and
300 K (b). The absence of a blue peak shift with increasing beam current eliminates the
assignment of the RL to donor acceptor pair recombination transitions.
where E(0K) = 1.66 eV and Į = 0.296 ± 0.009 meV / K in agreement with the CC
model. The FWHM of the RL can be expressed below derived from the CC model.246
߱
ܯܪܹܨሺܶሻ ൌ ܣǤ ඨܿ ݄ݐ ൨
ʹ݇ ܶ
The vibrational energy of the excited state, ߱, for the RL was found to be
34.7 ± 0.6 meV, where FWHM(0) is the peak width approaching 0 K.
Figure 6.4: Plot of log (ICL) versus log (IB) at 80 K (a) and 300 K (b) with IB in nA. The
gradient, n, is the power law exponent in the relationship, ICL v IBn. The nNBE ~ 1 is
expected for excitonic recombination. The nRL ~ 0.8 is higher than expected for a lattice
coupled defect most likely due to a high concentration of RL centers.
The CL intensity (ICL) versus temperature dependence for RL is presented
in Figure 6.6c for temperatures decreasing from 300 to 93 K following the usual thermal
quenching relationship
University of Technology Sydney Red Luminescence / 93
ܫሺͲሻ
ܫ ሺܶሻ ൌ
െܧ
ͳ ݔ݁ܣቀ ቁ൨
݇ ܶ
where EA is the activation energy for thermal quenching and A is a constant. An
activation energy of EA = 78.8 ± 5.1 meV was obtained from an Arrhenius plot (not
shown) using the data in Figure 6.6c which is most likely due to thermal quenching of
competitive non-radiative recombination centers. Remarkably a different ICL versus
temperature profile is observed when heating from 93 to 300 K compared to cooling
from 300 to 93 K. Specifically with increasing temperature a faster thermal quenching
of the luminescence is observed followed by an anomalous increase in ICL at around
180 K then further decay to 300 K. This thermal behavior can be explained by the
presence of competitive charge traps that are created during the O2 thermal annealing
process. These traps capture carriers at low temperature which are subsequently released
with further heating and recombine radiatively producing an increase in intensity of the
247
RL . The existence of excess carriers arising from thermal depopulation of charge
traps filled at low temperature is also evidenced by a corresponding “negative” thermal
quenching of the NBE as shown in Figure 6.4a and 6.4b.
The RL has been ascribed to both singly ionized N on an oxygen site, ܰைି
178 ଶି 180
and a doubly ionized zinc vacancy,ܸ . Although the chemical origin of the
ionized acceptor is different in these two models, the underlying luminescence
mechanism is the same. Here, the electron at a singly (doubly) ionized acceptor, ିܣ
(ܣଶି ) is photoexcited creating an electron in the conduction band, ݁ , and a neutral
(singly ionized) acceptor, ܣ ( ) ିܣwhich induces a large lattice dilation, producing a
strong Jahn-Teller distortion. The excited ܣ ( ) ିܣradiatively relaxes to ܣ( ିܣଶି ), via
capture of a conduction band electron, generating RL due to the Stokes shift caused by
the Jahn-Teller distortion. The excitation and relaxation cycles for singly and doubly
ionized acceptors are given below.
Figure 6.5: CL intensity versus temperature at 80 K for the RL (a) and NBE (b) with
300 K with 5 kV, IB = 0.2 ± 0.02 nA and scan area = 50 Pm u 43 Pm. The red shift and
narrowing of the RL with decreasing temperature is consistent with configuration
coordinate model for radiative recombination. The blue shift and appearance of phonon
replicas as the temperature approaches 93 K is expected for excitonic emission with the
bandgap shrinkage. The intensity of the RL and NBE exhibits “negative” thermal
quenching with increasing temperature.
It is important to note that in CL the recombination energy provides the
excitation energy for these processes. CL spectra of the NBE (Figure 6.7a) show three
peaks, the first at 3.36 eV ascribed to a donor bound exciton, DoX, and two others
positioned at 3.32 and 3.26 eV. The latter two peaks have been attributed to nitrogen
acceptors in DAPs 32 by other works, however, this assignment in our ZnO nanorod is
implausible as no nitrogen was detected using high sensitivity chemical analysis, as
University of Technology Sydney Red Luminescence / 95
discussed below. The corresponding CL spectra shown in (Figure 6.7b) reveal an anti-
correlation between the intensity of the RL and the NBE peaks at 3.32 and 3.26 eV. It is
also noteworthy that the peak position of these two NBE peaks is fixed as the
temperature increases from 7 to 100 K (Figure 6.8a and 6.8b) despite the red shift of the
DoX with the increase in the band gap due to electron-phonon scattering and lattice
expansion. The absence of a thermal shift can be accounted for by a free-to-bound
transition (FBT) not a DAP recombination mechanism. In FBT recombination at
temperatures from 7 to 100 K the thermal energy of the free carrier, kbT, roughly offsets
the red shift of the bandgap with increasing temperature with ܧி் ൌ ܧ െ ܧ ݇ ܶ,
where ܧி் is the position of the FBT peak and ܧ is the ionization energy of the
acceptor.
ZnO nanrods exposed to a mild nitrogen plasma show a well-defined set of
N kD peaks in the Total Fluorescence Yield (TFY) XANES spectroscopy results
(Figure 6.9) which are clearly absent in the as-grown and O2 anneal samples. TFY mode
was select to collect XANES data from the entire volume of the nanowire ensemble.
These results strongly suggest that the concentration of N in the ZnO nanorods studied
in this work is extremely low and consequently the RL at 1.76 eV and the NBE peaks
at 3.32 and 3.26 eV are all not related to recombination centers involving N. Electron
Spin Resonance (ESR) spectroscopy results are shown in Figure 5.4(a). No ESR
hyperfine signal corresponding to nitrogen was detected. Two very weak resonances at
g ~ 1.96 and g ~ 2.01 with similar intensities are observed before and after annealing in
O2. These ESR lines, attributed to shallow donor impurities and singly ionized surface
oxygen vacancies respectively215, clearly have no connection with the appearance of the
RL following O2 annealing and the RL has no correlated ESR resonance over the range
ଶି
of measured g-values supporting its assignment to the non-paramagnetic ܸ center.
Suranan Anantachaisilp Red Luminescence / 96
Figure 6.6: The plot of the RL peak position and peak width as a function of temperature
are shown in Figure 6.6a and Figure 6.6b. Figure 5.6c displays the RL intensity
dependence on temperature. With decreasing temperature from 300 K to 93 K a typical
thermal response relationship with an activation energy of EA = 78.8 meV is found.
However, increasing the temperature from 93 K to 300 K “negative” thermal quenching
is observed arising from the presence of shallow levels that fill with carriers at low
temperature during electron beam excitation and depopulate with rising temperature
increasing the luminescence intensity.
University of Technology Sydney Red Luminescence / 97
Figure 6.7: CL spectra at 80 K of the NBE and RL before and after thermal annealing in
O2 are shown in Figure 6.7a with corresponding CL spectra in Figure 6.7b. Figure 6.7a
reveals emission due to donor bound exciton around 3.36 eV and peaks at 3.32 and
3.26 eV ascribed to the presence of acceptors in either DAP or free-to-bound transitions.
No interrelationship between the 3.32 and 3.26 eV NBE peaks and the RL in the CL
spectra is observed. Additionally there is no correlation between the free-to-bound NBE
and RL peaks and nitrogen as confirmed in the N kD XANES results in Figure 6.9.
Suranan Anantachaisilp Red Luminescence / 98
Figure 6.8: The temperature dependence of the DoX and peaks at 3.32 and 3.26 eV are
shown in Figure 6.8. The data show the usual red shift of the DoX with increasing
temperature as the band gap widens due to lattice expansion and the electron-phonon
effect. The absence of a corresponding shift of the 3.32 and 3.26 eV peaks between 7
and 100 K indicates that free carriers are involved in the recombination process
providing thermal energy (kbT) which offsets the band gap red shift. This result
suggests that these emission peaks arise from free-to-bound transition rather than a
DAP recombination process.
Figure 6.9: XANES spectra around the N kĮ energy from the “as-grown” and O2
annealed samples, as well as from ZnO nano-particles implanted with nitrogen, are
shown in Figure 6.9. The results show that no nitrogen is present in both the “as-grown”
and O2 annealed samples.
6.5 Conclusions
A strong broad red luminescence (RL) centered at 1.69 eV
(FWHM = 0.57 eV) at 15K and 1.78 eV (FWHM = 0.69 eV) at 300 K is formed in ZnO
nanorods following thermal annealing at 650°C for 30 minutes in an O2 gas
environment. The optical properties of this peak were comprehensively studied using a
range of characterization techniques, in particular photoluminescence and
cathodoluminescence spectroscopy. Using these results, the RL has been assigned to
highly lattice coupled VZn-related acceptor-like centers. No correlation was found
between the RL and nitrogen impurities.
Suranan Anantachaisilp Conclusions / 100
CHAPTER VII
CONCLUSIONS
The main aim of this thesis was to investigate the effect of deep level surface
point defects on optical and electrical properties, gas sensing properties and the surface
electronic structure of ZnO nanorods. Additionally, the emission properties of red
luminescence at 1.78 eV were systematically characterized as a function of temperature
and excitation density to gain a deeper insight into its chemical origin. These key finding
of this research are summarized below.
ZnO nanorods were successfully grown by low temperature (90 °C)
hydrothermal method. The various types of surface point defects were also
systematically introduce into ZnO nanorods by thermal treatments in oxidative and
reductive environments. The low temperature growth technique employed in the
preparation of ZnO nanorods in sensor devices shows great promise as an alternative
method to the existing high temperature routes due to its simplicity, application to
temperature sensitive substrates, energy efficiency, and reproducibility in obtaining
nanostructured ZnO for room temperature NH3 gas sensor applications. CL
spectroscopy confirmed that post-growth-controlled atmosphere heat treatment can be
used to mediate the Fermi level position of the ZnO nanorods through the creation of
acceptor or donor native near surface defects, which governs the sign and magnitude of
the electrical response to NH3 gas. Specifically a room temperature NH3 gas sensitivity
of S = 22.6 was achieved by heating in O2 atmosphere at 650 °C that was 5 times greater
than S for as-grown ZnO nanorods. The reported findings on the inter-relationship
between surface point defects, electrical properties, and gas sensing properties of
nanostructured ZnO will facilitate the development of future, low cost, high-sensitivity,
room temperature gas sensor devices tailored for specific applications.
Optical and electrical characterization studies of ZnO nanorods before and
after annealing in O2 gas and Zn vapor have confirmed that the surface electronic
structure can be bespoke for specific sensor applications. These correlative spectroscopy
measurements reveal clear evidence of direct interrelationship between the electronic
University of Technology Sydney Conclusions / 101
properties of the ZnO nanorod surface and its surface defect structure. In particular, the
role of intrinsic point defects on the physisorption and chemisorption of water molecules
and hydroxyl groups which, through charge transfer mechanisms, govern both the
surface band bending effects and the surface conductivity. Additionally O1s XPS
spectra established that the number of adsorbed water and hydroxyl species on the ZnO
nanorod is directly proportional to the concentration of surface oxygen vacancies. An
important result of these studies is compelling experimental evidence for the existence
of stable singly ionized oxygen vacancies (ܸைା ) at the ZnO nanorod surface.
Furthermore, it was shown that (i) a broad green CL peak centered at 2.43 eV, (ii) an
intense ESR line at g # 2.01 and (iii) a pronounced shoulder in the valence band X-ray
photoemission spectra ~ 3.0 eV below the Fermi level, can all be attributed to centers
involving surface ܸைା centers.
A strong broad red luminescence (RL) centered at 1.69 eV
(FWHM = 0.57 eV) at 15K and 1.78 eV (FWHM = 0.69 eV) at 300 K is formed in ZnO
nanorods following thermal annealing at 650°C for 30 minutes in an O2 gas
environment. The optical properties of this peak were comprehensively studied using a
range of characterization techniques, in particular photoluminescence and
cathodoluminescence spectroscopy. Using these results, the RL has been assigned to
highly lattice coupled VZn-related acceptor-like centers. No correlation was found
between the RL and nitrogen impurities.
Suranan Anantachaisilp References / 102
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