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MPX2200D

The MPX2200 and MPX2201 series are silicon piezoresistive pressure sensors that provide a highly accurate and linear voltage output directly proportional to applied pressure. The sensor uses a silicon diaphragm with integrated strain gauges and resistors to measure pressure. It is temperature compensated from 0 to 85°C, has a pressure range of 0 to 200 kPa, and linearity of ±0.25%. The sensor outputs a voltage that corresponds to applied differential or absolute pressure and is suitable for applications like pump controllers, robotics, and medical diagnostics.

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0% found this document useful (0 votes)
27 views9 pages

MPX2200D

The MPX2200 and MPX2201 series are silicon piezoresistive pressure sensors that provide a highly accurate and linear voltage output directly proportional to applied pressure. The sensor uses a silicon diaphragm with integrated strain gauges and resistors to measure pressure. It is temperature compensated from 0 to 85°C, has a pressure range of 0 to 200 kPa, and linearity of ±0.25%. The sensor outputs a voltage that corresponds to applied differential or absolute pressure and is suitable for applications like pump controllers, robotics, and medical diagnostics.

Uploaded by

George Luiz
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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SEMICONDUCTOR TECHNICAL DATA by MPX2200/D


  
 !"   
 !  ! Motorola Preferred Device

 "  


The MPX2200 and MPX2201 series device is a silicon piezoresistive pressure sensor
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
providing a highly accurate and linear voltage output — directly proportional to the
(TYPICAL)
applied pressure. The sensor is a single monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation. They are designed
for use in applications such as pump/motor controllers, robotics, level indicators, medical
diagnostics, pressure switching, barometers, altimeters, etc.
Features
• Temperature Compensated Over 0°C to + 85°C
• Patented Silicon Shear Stress Strain Gauge
• ± 0.25% Linearity (MPX2200D)
• Easy to Use Chip Carrier Package BASIC CHIP
• Available in Absolute, Differential and Gauge Configurations CARRIER ELEMENT
CASE 344–15, STYLE 1
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone
pressure sensor chip. DIFFERENTIAL
VS PORT OPTION
3 CASE 344C–01, STYLE 1

THIN FILM NOTE: Pin 1 is the notched pin.


TEMPERATURE 2
X–ducer Vout+
SENSING COMPENSATION
AND PIN NUMBER
ELEMENT 4
CALIBRATION Vout–
1 Gnd 3 VS
CIRCUITRY
2 +Vout 4 –Vout

GND
Figure 1. Temperature Compensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE


The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 7

Motorola Sensor Device Data 1


 Motorola, Inc. 1997
     
MAXIMUM RATINGS
Rating Symbol Value Unit
Overpressure(8) (P1 > P2) Pmax 400 kPa
Burst Pressure(8) (P1 > P2) Pburst 2000 kPa
Storage Temperature Tstg – 40 to +125 °C
Operating Temperature TA – 40 to +125 °C

OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristics Symbol Min Typ Max Unit
Pressure Range(1) POP 0 — 200 kPa
Supply Voltage VS — 10 16 Vdc
Supply Current Io — 6.0 — mAdc
Full Scale Span(3) MPX2200A, MPX2200D, MPX2201D VFSS 38.5 40 41.5 mV
MPX2201A 37.5 40 42.5
Offset(4) MPX2200A, MPX2200D Voff –1.0 — 1.0 mV
MPX2200A – 2.0 — 2.0
MPX2201A – 3.0 — 3.0
Sensitivity ∆V/∆P — 0.2 — mV/kPa
Linearity(5) MPX2200D — – 0.25 — 0.25 %VFSS
MPX2200A – 1.0 — 1.0
MPX2201D – 0.5 — 0.5
MPX2201A – 2.0 — 2.0
Pressure Hysteresis(5) (0 to 200 kPa) — — ± 0.1 — %VFSS
Temperature Hysteresis(5) (– 40°C to +125°C) — — ± 0.5 — %VFSS
Temperature Effect on Full Scale Span(5) TCVFSS –1.0 — 1.0 %VFSS
Temperature Effect on Offset(5) TCVoff –1.0 — 1.0 mV
Input Impedance Zin 1300 — 2500 Ω
Output Impedance Zout 1400 — 3000 Ω
Response Time(6) (10% to 90%) tR — 1.0 — ms
Warm–Up — — 20 — ms
Offset Stability(9) — — ± 0.5 — %VFSS

MECHANICAL CHARACTERISTICS
Characteristics Symbol Min Typ Max Unit
Weight, (Basic Element Case 344–15) — — 2.0 — Grams
Common Mode Line Pressure(7) — — — 690 kPa
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

2 Motorola Sensor Device Data


     
LINEARITY
Linearity refers to how well a transducer’s output follows
LEAST SQUARES FIT
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating EXAGGERATED

RELATIVE VOLTAGE OUTPUT


nonlinearity: (1) end point straight line fit (see Figure 2) or (2) PERFORMANCE
CURVE STRAIGHT LINE
a least squares best line fit. While a least squares fit gives LEAST
the “best case” linearity error (lower numerical value), the DEVIATION
SQUARE
calculations required are burdensome. DEVIATION
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s END POINT
specified pressure sensor linearities are based on the end STRAIGHT LINE FIT
point straight line method measured at the midrange
pressure.
OFFSET

0 50 100
PRESSURE (% FULLSCALE)
Figure 2. Linearity Specification Comparison

ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION


Figure 3 shows the output characteristics of the MPX2200 The effects of temperature on Full Scale Span and Offset
series at 25°C. The output is directly proportional to the dif- are very small and are shown under Operating Characteristics.
ferential pressure and is essentially a straight line.

40 VS = 10 Vdc
TA = 25°C
35 P1 > P2
TYP
OUTPUT (mVdc)

30
SPAN
25 MAX RANGE
20 (TYP)
15
10
MIN
5
0
–5 OFFSET
kPa 0 25 50 75 100 125 150 175 200
PSI 7.25 14.5 21.75 29
PRESSURE
Figure 3. Output versus Pressure Differential

SILICONE GEL DIFFERENTIAL/GAUGE SILICONE GEL ABSOLUTE


DIE COAT DIE STAINLESS STEEL STAINLESS STEEL
DIE COAT

ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ
METAL COVER DIE METAL COVER
P1 P1

ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ
EPOXY EPOXY
WIRE BOND CASE WIRE BOND CASE

ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉÉ
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT
DIE
BOND
LEAD FRAME ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ ABSOLUTE ELEMENT
DIE
BOND
P2 P2
Figure 4. Cross–Sectional Diagrams (Not to Scale)

Figure 4 illustrates an absolute sensing die (right) and the teristics and internal reliability and qualification tests are
differential or gauge die in the basic chip carrier (Case based on use of dry air as the pressure media. Media other
344–15). A silicone gel isolates the die surface and wire than dry air may have adverse effects on sensor perfor-
bonds from the environment, while allowing the pressure sig- mance and long term reliability. Contact the factory for in-
nal to be transmitted to the silicon diaphragm. formation regarding media compatibility in your application.
The MPX2200 series pressure sensor operating charac-

Motorola Sensor Device Data 3


     
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor tial pressure applied, P1 > P2. The absolute sensor is de-
as the Pressure (P1) side and the Vacuum (P2) side. The signed for vacuum applied to P1 side.
Pressure (P1) side is the side containing the silicone gel The Pressure (P1) side may be identified by using the
which isolates the die from the environment. The differential table below:
or gauge sensor is designed to operate with positive differen-

Part Number Case Type Pressure (P1) Side Identifier


MPX2200A MPX2200D 344–15– Stainless Steel Cap
MPX2200DP MPX2201DP 344C–01 Side with Part Marking
MPX2200AP MPX2200GP MPX2201GP 344B–01 Side with Port Attached
MPX2200GVP 344D–01 Stainless Steel Cap
MPX2200AS MPX2200GS 344E–01 Side with Port Attached
MPX2200GVS 344A–01 Stainless Steel Cap
MPX2200ASX MPX2200GSX MPX2201GSX 344F–01 Side with Port Attached

ORDERING INFORMATION
MPX2200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
D i T
Device Type O i
Options C
Case Type
T Order Number Device Marking
Basic Element Absolute, Differential Case 344–15 MPX2200A MPX2200A
MPX2200D MPX2200D
Ported Elements Differential Case 344C–01 MPX2200DP MPX2200DP
MPX2201DP MPX2201DP
Absolute, Gauge Case 344B–01 MPX2200AP MPX2200AP
MPX2200GP MPX2200GP
MPX2201GP MPX2201GP
Gauge Vacuum Case 344D–01 MPX2200GVP MPX2200GVP
Absolute, Gauge Stove Pipe Case 344E–01 MPX2200AS MPX2200A
MPX2200GS MPX2200D
Gauge Vacuum Stove Pipe Case 344A–01 MPX2200GVS MPX2200D
Absolute, Gauge Axial Case 344F–01 MPX2200ASX MPX2200A
MPX2200GSX MPX2200D
MPX2201GSX MPX2201D

4 Motorola Sensor Device Data


     
PACKAGE DIMENSIONS

NOTES:
C 1. DIMENSIONING AND TOLERANCING PER ASME
POSITIVE Y14.5M, 1994.
R PRESSURE (P1)
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
M
16.00 (0.630).

B –A– INCHES MILLIMETERS


DIM MIN MAX MIN MAX
A 0.595 0.630 15.11 16.00
N B 0.514 0.534 13.06 13.56
PIN 1 1 2 3 4 L C 0.200 0.220 5.08 5.59
D 0.016 0.020 0.41 0.51
–T– F 0.048 0.064 1.22 1.63
SEATING G 0.100 BSC 2.54 BSC
PLANE J 0.014 0.016 0.36 0.40
J POSITIVE G
L 0.695 0.725 17.65 18.42
PRESSURE F M 30_ NOM 30_ NOM
(P1)
D 4 PL N 0.475 0.495 12.07 12.57
0.136 (0.005) M T A M R 0.430 0.450 10.92 11.43

STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT

CASE 344–15
ISSUE W

NOTES:
PORT #2
VACUUM C A 1. DIMENSIONING AND TOLERANCING PER ANSI
PRESSURE Y14.5M, 1982.
(P2) POSITIVE 2. CONTROLLING DIMENSION: INCH.
PRESSURE
(P1) INCHES MILLIMETERS
DIM MIN MAX MIN MAX
PIN 1 A 0.690 0.720 17.53 18.28
–B– V B 0.245 0.255 6.22 6.48
C 0.780 0.820 19.81 20.82
1 2 3 4
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
K K 0.345 0.375 8.76 9.53
S N 0.300 0.310 7.62 7.87
R 0.178 0.186 4.52 4.72
S 0.220 0.240 5.59 6.10
N J G V 0.182 0.194 4.62 4.93

R F STYLE 1:
PIN 1. GROUND
D 4 PL 2. + OUTPUT
SEATING –T– 3. + SUPPLY
PLANE 0.13 (0.005) M T B M
4. – OUTPUT

CASE 344A–01
ISSUE B

Motorola Sensor Device Data 5


     
PACKAGE DIMENSIONS — CONTINUED

NOTES:
SEATING –T– –A– 1. DIMENSIONING AND TOLERANCING PER ANSI
PLANE Y14.5, 1982.
U 2. CONTROLLING DIMENSION: INCH.
R L
H INCHES MILLIMETERS
DIM MIN MAX MIN MAX
A 1.145 1.175 29.08 29.85
N PORT #1 B 0.685 0.715 17.40 18.16
POSITIVE –Q– C 0.305 0.325 7.75 8.26
PRESSURE D 0.016 0.020 0.41 0.51
(P1) F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
H 0.182 0.194 4.62 4.93
B J 0.014 0.016 0.36 0.41
K 0.695 0.725 17.65 18.42
1 2 3 4 L 0.290 0.300 7.37 7.62
PIN 1 N 0.420 0.440 10.67 11.18
K
–P– P 0.153 0.159 3.89 4.04
Q 0.153 0.159 3.89 4.04
0.25 (0.010) M T Q S S R 0.230 0.250 5.84 6.35
S 0.220 0.240 5.59 6.10
J F U 0.910 BSC 23.11 BSC
C G
D 4 PL
0.13 (0.005) M T S S Q S
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT

CASE 344B–01
ISSUE B

–A– NOTES:
V 1. DIMENSIONING AND TOLERANCING PER ANSI
U Y14.5M, 1982.
PORT #1
R W L 2. CONTROLLING DIMENSION: INCH.
H INCHES MILLIMETERS
PORT #2 PORT #1 DIM MIN MAX MIN MAX
PORT #2
VACUUM POSITIVE PRESSURE A 1.145 1.175 29.08 29.85
N (P2) (P1) B 0.685 0.715 17.40 18.16
C 0.405 0.435 10.29 11.05
–Q– D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
SEATING B SEATING
H 0.182 0.194 4.62 4.93
PLANE PLANE
J 0.014 0.016 0.36 0.41
1 2 3 4
PIN 1 K 0.695 0.725 17.65 18.42
K L 0.290 0.300 7.37 7.62
–P– N 0.420 0.440 10.67 11.18
–T– –T– 0.25 (0.010) M T Q S S P 0.153 0.159 3.89 4.04
Q 0.153 0.159 3.89 4.04
J F R 0.063 0.083 1.60 2.11
C G S 0.220 0.240 5.59 6.10
U 0.910 BSC 23.11 BSC
D 4 PL V 0.248 0.278 6.30 7.06
0.13 (0.005) M T S S Q S W 0.310 0.330 7.87 8.38

STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT

CASE 344C–01
ISSUE B

6 Motorola Sensor Device Data


     
PACKAGE DIMENSIONS — CONTINUED

NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
–A– Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
U
SEATING
–T– PLANE
INCHES MILLIMETERS
L DIM MIN MAX MIN MAX
R PORT #2 H A 1.145 1.175 29.08 29.85
VACUUM POSITIVE B 0.685 0.715 17.40 18.16
(P2) PRESSURE C 0.305 0.325 7.75 8.26
(P1)
D 0.016 0.020 0.41 0.51
N F 0.048 0.064 1.22 1.63
–Q– G 0.100 BSC 2.54 BSC
H 0.182 0.194 4.62 4.93
J 0.014 0.016 0.36 0.41
K 0.695 0.725 17.65 18.42
B L 0.290 0.300 7.37 7.62
N 0.420 0.440 10.67 11.18
P 0.153 0.159 3.89 4.04
1 2 3 4 Q 0.153 0.158 3.89 4.04
K R 0.230 0.250 5.84 6.35
PIN 1 S 0.220 0.240 5.59 6.10
S U 0.910 BSC 23.11 BSC

C F
–P– G STYLE 1:
J 0.25 (0.010) M T Q S PIN 1. GROUND
D 4 PL 2. + OUTPUT
0.13 (0.005) M T S S Q S 3. + SUPPLY
4. – OUTPUT

CASE 344D–01
ISSUE B

NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
PORT #1 C A Y14.5M, 1982.
POSITIVE
PRESSURE BACK SIDE 2. CONTROLLING DIMENSION: INCH.
(P1) VACUUM
(P2) INCHES MILLIMETERS
DIM MIN MAX MIN MAX
A 0.690 0.720 17.53 18.28
B 0.245 0.255 6.22 6.48
–B– V C 0.780 0.820 19.81 20.82
4 3 2 1 D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
PIN 1
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
K 0.345 0.375 8.76 9.53
K N 0.300 0.310 7.62 7.87
S R 0.178 0.186 4.52 4.72
S 0.220 0.240 5.59 6.10
V 0.182 0.194 4.62 4.93
N J G
STYLE 1:
R F PIN 1. GROUND
D 4 PL 2. + OUTPUT
SEATING 3. + SUPPLY
PLANE –T– 0.13 (0.005) M T B M 4. – OUTPUT

CASE 344E–01
ISSUE B

Motorola Sensor Device Data 7


     
PACKAGE DIMENSIONS — CONTINUED

–T– NOTES:
C 1. DIMENSIONING AND TOLERANCING PER
A ANSI Y14.5M, 1982.
–Q–
E U 2. CONTROLLING DIMENSION: INCH.

INCHES MILLIMETERS
DIM MIN MAX MIN MAX
A 1.080 1.120 27.43 28.45
B 0.740 0.760 18.80 19.30
C 0.630 0.650 16.00 16.51
N D 0.016 0.020 0.41 0.51
V B E 0.160 0.180 4.06 4.57
F 0.048 0.064 1.22 1.63
R G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
PORT #1 K 0.220 0.240 5.59 6.10
PIN 1
POSITIVE –P– N 0.070 0.080 1.78 2.03
PRESSURE P 0.150 0.160 3.81 4.06
(P1) 0.25 (0.010) M T Q M 4 3 2 1 Q 0.150 0.160 3.81 4.06
S R 0.440 0.460 11.18 11.68
S 0.695 0.725 17.65 18.42
K U 0.840 0.860 21.34 21.84
V 0.182 0.194 4.62 4.92
J F
G
STYLE 1:
D 4 PL PIN 1. GROUND
0.13 (0.005) M T P S Q S 2. V (+) OUT
3. V SUPPLY
4. V (–) OUT

CASE 344F–01
ISSUE B

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
Mfax is a trademark of Motorola, Inc.
How to reach us:
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8 ◊ Motorola Sensor DeviceMPX2200/D


Data
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