NanoPure

PRESSURE
REGULATOR

Lion Hygienic Materials Co., Ltd

NanoPure is a brand of Gas Delivery Total Solu�on, belongs to King Lai Group,
who was founded 1991 in Taiwan and expanded produc�on facility in Kunshan,
Jiangsu Province, China. Supplying tubing/piping and fi�ng materials service for
Semiconductor, FPD, LED and Photovoltaic industries, the core idea of NanoPure
is providing "High purity materials" with high quality components for gas delivery
applica�ons.

Gas supply and delivery is always the topic to study in Semiconductor processing.
To ensure the accuracy of the processing, the purity of gas sources is the vital factors.
Keeping the purity while the gas has been transferred into processing tools is highly
monitored by process engineers.
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Introduc�on

NanoPure is composed of people NanoPure aims to provide the highest quality products, so the quality control and
who are specialist in stainless steels uniformity are essen�al points to promise customers. In the mean�me, we do put
fabrica�on. By making sure the emphasis on the details of products such as dimension and tolerance which are
selec�on of finest materials, we important for quality control and therefore remain the high yield rate for assembly.
provide finest products. The key Opera�onal packages can be followed according to the customer's instruc�on,
point is how to control the quality the ranging from normal tandard clean package to Ultra High Purity clean room
of materials which makes big difference package.
of welding quality while installing or
welding assembly. There will be the
poten�al impurity or inclusion in
welding process. Therefore, electropolish NanoPure considers every single key processing during the fabrica�on.
is the solvable process for increasing
reliability of stainless steel to against Our goal is keeping con�nually improvement to reach customers’sa�sfac�on!
corrosion gases.
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• Pressure regula�ng
• Atmospheric pressure control

• Spring，dome，air loaded

• Working pressure up to 4350 psig (300bar)

• Working temperature -40°F to 165°F / -40°C to 74°C

Types of Regulators
There are two types of pressure regulators

• Pressure-reducing regulators with spring or dome loading

• Back-pressure regulators with spring or dome loading

How a Pressure Regulator Works

A pressure regulator has a sensing element (piston or diaphragm) which, on one side, is subjected
to a load force (FS) created by a spring (as shown below) or a gas pressure. On the other side, the
sensing element is subject to the force (F) of the system fluid.

The func�on of a pressure-reducing regulator is The func�on of a back-pressure regulator is to

to reduce a pressure and to keep this pressure as keep inlet pressure below a set pressure. This
constant as possible while the inlet pressure and means the regulator can either open in case of
the flow may vary. excess pressure or close when the pressure
drops below a desired pressure.

This is accomplished by the fluid force (F) being This is accomplished by the fluid force (F)
equal to or slightly lower than load force (FS) being equal to or slightly lower than load
causing the poppet to open. force (FS) causing the poppet to close.
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Components

Every pressure regulator has three common design components:

• Loading mechanism (spring, dome, or combina�on spring and dome)
• Sensing mechanism (diaphragm or piston)
• Controlling mechanism (poppet)

Loading Mechanism
The loading mechanism is the component of the regulator that balances the force or pressure.

Spring-Loaded Dome-Loaded

In a spring-loaded regulator, a coil spring In a dome-loaded regulator, a gas is fed into

is used to generate a load (FS ) against the the dome chamber above the sensing
sensing mechanism. mechanism at a pressure equal to or slightly
above the required outlet pressure.

The amount of spring force or load can be

adjusted by turning the handle or adjus�ng This volume of gas is used like a spring.
screw of the regulator. The dome pressure (Fd ) is typically supplied
by a second regulator called a pilot regulator.
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Combina�on Spring- and Dome-Loaded

The spring- and dome-loaded mechanisms can be used in combina�on

with one another. The resul�ng effect provides the func�on of a
differen�al pressure regulator. This regulator is designed to control
pressure which is the sum of a reference
pressure (provided by the dome)
and a bias pressure (provided by the spring).

Components

Sensing Mechanisms
The sensing mechanism is the component separa�ng the spring/dome
force and the fluid force. It senses changes in pressure and allows the
regulator to react and to try to restore the original set pressure.

• Diaphragm Sensing • Piston Sensing

The diaphragm is a large, flat piece of material A piston is a cylindrical metal component
usually made of an elastomer, PTFE, or metal which is generally used to regulate higher
depending on the applica�on. A diaphragm control pressures than a spring-loaded
is normally used for low control-pressure regulator with a diaphragm. They are also
applica�ons in spring loaded regulators and more resistant to damage caused by
in all dome loaded regulators. pressure spikes.
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Controlling Mechanisms

The controlling mechanism, also known as a poppet, acts to reduce

a high inlet pressure to a lower outlet pressure. There are two designs
used in RHPS regulators.

• Balanced Poppet • Unbalanced Poppet

In a balanced poppet design, the In an unbalanced poppet design, the inlet

area on which the inlet pressure acts pressure provides the majority of the shutoff
is reduced due to the orifice through force. Unbalanced poppets are generally used
the poppet and balancing O-ring. in small regulators or larger regulators in low-
The advantages of this design are a pressure applica�ons.
reduced seat load, less sensi�vity to
SPE,and the ability to have a larger
seat for more flow.

• Tes�ng

Every regulator is factory tested with nitrogen or air. Shell tes�ng is performed to a
requirement of no detectable leakage with a liquid leak detector.

• Cleaning and Packaging

Cleaning and packaging to ensure compliance with product cleanliness requirements
stated in ASTM G93 Level C is available

• Oxygen Service Hazards

For more informa�on about hazards and risks of oxygen enriched systems, requirements
stated in CGA G4.1 is available.
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GR 1000
Metal Diaphragm Type

Specifications Advantages

Opera�ng
・ Design proof pressure = 150% maximum rated ・Designed to reduce contamina�on and
pressure provide accurate regula�on of any corrosive,
Inlet =500 PSIG (35 bar) non-corrosive or toxic gas.
Outlet = 0-25, 0-60, 0-100, 0-150, 0-250, 0-500PSIG ・Metal to metal diaphragm to body seal
(0-1.7, 0-4.1, 0-7, 0-10, 0-17.2bar,0-35)
Inlet = 3500 PSIG (241 bar) assures minimum inboard and outboard
Outlet = 0-25, 0-60,0-100, 0-150, 0-250 ,0-500 PSIG leakage
(0-1.7, 0-4.1, 0-7, 0-10, 0-17.2bar,0-35) ・Panel moun�ng available
Op�on: Inlet = 300 bar (4350 PSI) ・300 series SS bonnet
・Leakage = internal bubble-�ght ・Cleaning: CGA 4.1 and ASTM G93
・Helium test = ≤ 1 x 10-9 atm cc/sec ・Pressure ra�ng per criteria of ANSI/ASME
・Temperature = -15°F to +165°F(-26°C to +74°C) B31.3
・Flow capacity: Inlet 3500 PSIG (240 bar) = Cv 0.09
Inlet 500 PSIG (35 bar) = Cv 0.25
・Body = 316L SST
・Diaphragm = Hastelloy-C
・Inlet: 40 Micron Filter 316 SS
・Connector = NPT, SWG, Cylinder connector
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GR1000 Series Regulator Drawing

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GR1000 Series Regulator Flow Charts

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Ordering Information

1 2 3 4 5 6 7 8 9 10 11 12
Series Inlet Body Outlet Port Seat Por�ng Port Gauge Gauge Cylinder Panel
No Pressure Material Pressure Size Material No Type Inlet Outlet Connector
GR1000 HP 6L 3 1 P 3 1 0 0 C P

1.Series: GR1000 6. Seat Material 10. Gauge (Outlet)

P = PCTFE (HP Only) 0 = Without Gauge
T = TFE V3 = -30-0-30psig/bar
2. Inlet Pressure
V1 = -30-0-100psig/bar
HP = 3500 Psig (241 bar)
1 = 0-160psig/bar
LP = Inlet 500 Psig (35bar) 7. Por�ng
3 = 0-300psig/bar
HHP=4350psi (300bar) 1 = 2P
4 = 0-600psig/bar
2 = 3P (Gauge Port 1/4”)
3. Body Material 3 = 4P (Gauge Port 1/4”)
4 = 5P (Gauge Port 1/4”)
6L= 316L SS
5 = 6P (Gauge Port 1/4”)
11. Cylinder Connector
4. Outlet Pressure C = CGA (Only 1/4”)
1 = 0-25Psig(0-1.7bar)
8. In & Out Port Type O = Other
2 = 0-60Psig(0-4.1bar)
1 = NPT
3 = 0-100Psig(0-7bar)
2 = PT
4 = 0-150Psig(0-10bar)
3 = SWG
5 = 0-250Psig(0-17.2bar) 12. Panel
6 = 0-500Psig(0-35bar) 9. Gauge (Inlet) P = Panel
X = Without Gauge
5. In & Out Port Size 5 = 0-4000psig/bar
6 = 0-6000psig/bar
1 = 1/4”
2 = 3/8”
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GR 2000
Metal Diaphragm Type

Specifica�ons Advantages

Opera�ng
・Design proof pressure = 150% maximum rated ・ Designed to reduce contamina�on and
pressure provide accurate regula�on of any corrosive,
Inlet =500,3500 PSIG (35,207 bar) non-corrosive or toxic gas
Outlet = 0-25, 0-60, 0-100, 0-150, 0-200
・ Metal to metal diaphragm to body seal
(0-1.7, 0-4, 0-7, 0-10, 0-14 bar)
assures minimum inboard and outboard
・Leakage = internal bubble-�ght leakage
・ Helium test = ≤ 2 x 10-8 atm cc/sec ・ Panel moun�ng available
・Temperature = -15°F to +165°F
・ 300 series bonnet
(-26°C to +74°C)
・ Cleaning: CGA 4.1 and ASTM G93
・ Flow capacity: Cv 1.0
・ Body = 316L SST ・ Pressure ra�ng per criteria of ANSI/ASME
・Diaphragm = Hastelloy-C B31.3
・ Seat = PTFE , PCTFE
・Connector = NPT , SWG
Pressure Regulator NanoPure 11
GR2000 Series Regulator Drawing
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Pressure Regulator NanoPure
GR2000 Series Regulator Flow Charts
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Ordering Informa�on

1 2 3 4 5 6 7 8 9 10
Series Inlet Body Outlet Port Seat Por�ng Port Gauge Gauge
No Pressure Material Pressure Size Material No Type Inlet Outlet
GR2000 HP 6L 3 1 P 3 1 X X

1.Series: GR2000 5. In & Out Port Size 9. Gauge (Inlet)

1 = 1/2” X = Without Gauge
2 = 3/4” 5 = 0-4000psig/bar
2. Inlet Pressure
HP = 3500 Psig (241 bar) 6. Seat Material 10. Gauge (Outlet)
LP = Inlet 500 Psig (35bar) P = PCTFE (HP Only) X = Without Gauge
T = TFE V3 = -30-0-30psig/bar
V1 = -30-0-100psig/bar
3. Body Material
7. Por�ng 1 = 0-160psig/bar
6L= 316L SS
1 = 2P 2 = 0-200psig/bar
2 = 3P (Gauge Port 1/4”)
4. Outlet Pressure 3 = 4P (Gauge Port 1/4”)
1 = 0-25Psig(0-1.7bar)
2 = 0-60Psig(0-4bar)
8. In & Out Port Type
3 = 0-100Psig(0-7bar)
1 = NPT
4 = 0-150Psig(0-10bar)
2 = SWG
5 = 0-200Psig(0-14bar)
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GR 3000
Metal Diaphragm Type

Specifica�ons

Opera�ng Advantages
Inlet =500 PSIG (35 bar)
・ Designed to reduce contamina�on and
Outlet = 0-25, 0-60, 0-100, 0-150, 0-200
provide accurate regula�on of any
(0-1.7, 0-4.2, 0-7,0-10.5,0-14 bar)
corrosive, non-corrosive or toxic gas
・Design proof pressure = 150% maximum rated pressure
・ Metal to metal diaphragm to body seal
・Leakage = internal bubble-�ght
assures minimum inboard and outboard
・Helium test = design to meet ≤ 2 x 10-8 atm cc/sec
leakage
・Temperature = -15°F to +165°F(-26°C to +74°C)
・ 300 Series bonnet
・Flow capacity: Cv 1.8
・ Cleaning: CGA 4.1 and ASTM G93
・Body = 316L SST
・Pressure ra�ng per criteria of ANSI/ASME
・Diaphragm = Hastelloy-C
B31.3
・Seat = PTFE , PCTFE
・Inlet: 40 Micron Filter 316 SS
・Connector = NPT, SWG , Flange , Tube Stub
Pressure Regulator NanoPure 15
GR3000 Series Regulator Drawing
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Pressure Regulator NanoPure
GR3000 Series Regulator Flow Charts
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Ordering Informa�on

1 2 3 4 5 6 7 8 9
Series Inlet Body Outlet Port Seat Por�ng Port Gauge
No Pressure Material Pressure Size Material No Type
GR3000 HP 6L 3 1 T 3 1 1

1.Series: GR3000 5. In & Out Port Size 8. In & Out Port Type
1 = 1/2” 1 = NPT
2 = 3/4” 2 = SWG
2. Inlet Pressure
LP = Inlet 500 Psig (35bar) 3 = Tube Stubs
HP = 3500 Psig (241 bar)
6. Seat Material
T = TFE
3. Body Material 9. Gauge (Outlet
6L = 316L SS 7. Por�ng X = Without Gauge
1 = 2P V3 = -30-0-30psig/bar
4. Outlet Pressure 2 = 3P (Gauge Port 1/4”) V1 = -30-0-100psig/bar
1 = 0-160psig/bar
1 = 0-25Psig(0-1.7bar)
2 = 0-200psig/bar
2 = 0-60Psig(0-4.1bar)
3 = 0-100Psig(0-7bar)
4 = 0-150Psig(0-10.3bar)
5 = 0-200Psig(0-13.8bar)
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GR 4000
Metal Diaphragm Type

Specifications Applica�on
Opera�ng
・ High pressure gas cylinders for specialty and
Inlet =3500 PSIG (241 bar)
industrial gases used with analyzers, lasers,
Outlet = 0-25, 0-60, 0-100, 0-200,0-250 and laboratory applica�ons.
(0-1.7, 0-4.1, 0-7, 0-14 , 0-17.2bar)
・ Provides a con�nuous, accurate outlet
Op�on Inlet =4350 PSIG (300 bar) pressure regardless of inlet pressure
・ Design proof pressure: fluctua�ons.
150% maximum rated pressure
・ Metal-to-metal diaphragm to body seal
・ Leakage = internal bubble-�ght diaphragms are convoluted for greater
・ Helium test = ≤ 2 x 10 atm 8cc/sec
accuracy and sensi�vity
・ Temperature = -15°F to +165°F(-26°C to +74°C)
・ Flow capacity: Cv: 0.05
・ Body = 316L SST
・ Diaphragm = Hastelloy-C
・ Seat = PCTFE
・ Inlet: 40 Micron Filter 316 SS
・ Connector = NPT, SWG , Cylinder connector
Pressure Regulator NanoPure 19

GR4000 Series Regulator Drawing

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GR4000 Series Regulator Flow Charts

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Ordering Information

1 2 3 4 5 6 7 8 9 10
Series Inlet Body Outlet In & Out Seat Porting In & Out Inlet Outlet
No Pressure Material Pressure Port Size Material No Port Type Gauge Gauge
GR4000 HP 6L 3 1 T 1 3 1 1

1.Series: GR4000 7. Por�ng Porting

1 = 2P No
2 = 3P
2. Inlet Pressure Port
Type
HP = 3500 Psig (241 bar)
HP = 4350 Psig (300bar) 8. In & Out Port Type
1 = NPT
2 = SWG
3. Body Material
6L = 316L SS

9. Gauge (Inlet)
4. Outlet Pressure 1 = 6000psi
1 = 0-25Psig(0-1.7bar) 2 = 4000psi
Inlet 2 = 0-60Psig(0-4.1bar)
Pressure
3 = 0-100Psig(0-7bar)
4 = 0-200Psig(0-14bar)
10. Gauge (Outlet)
5 = 0-250Psig(0-17bar)
X = Without Gauge
V3 = -30-0-30psig/bar
5. In & Out Port Size V1 = -30-0-100psig/bar
1 = 0-160psig/bar
1 = 1/4”
2 = 0-200psig/bar
3= 0-300psi/bar

6. Seat Material
T = TFE
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UR 1000
High Purity Tied & Non-Tied
Diaphragm Type

Specifica�ons Applica�ons

Opera�ng ・ 1/4" point-of-use(Op�on 1/2”)

・Inlet Pressure : ・ Gas cabinet
250,600 or 3500 psig / 17,41.4 or 241bar ・ Regula�on of specialty gases
・Outlet Pressure: Ranges ・ Crystal growing
0-25, 0-60, 0-100, 0-150, 0-250 psig ・ Diffusion Furnaces
(0-1.7, 0-4, 0-7, 0-10, 0-17.2 bar) ・ Tied diaphragm or Non-�ed design
・Design Proof Pressure: 150% of maximum rated ・ Metal-to-metal diaphragm to body seal
・ Inboard Leak Rate: 1 x 10-9 atm cc/sec He for high leak integrity
・ Opera�ng Temperature: ・10 Ra μin / 0.25 μin internal surface finish
PCTFE: -40°F to 160°F / -40°C to 71°C ・Cleaning: CGA 4.1 and ASTM G93
TFE: -40°F to 160°F / -40°C to 71°C
Vespel: -40°F to 350°F / -40°C to 177°C
・Flow Capacity
Cv = 0.09 (3500 psig / 241 bar)
Cv = 0.15 (600 psig / 41.4 bar)
Cv = 0.25 (250 psig / 17.2 bar)
・Body: 316L or 316L VAR
・Diaphragm: Hastelloy R

・Seat: PCTFE / TFE or Vespel

・Spring: SS 316 or Hastelloy
R

・Finish Ra: 5 μin、10 μin、25 μin

・Connec�ons: F or M face seal fi�ng /Tube stubs
Pressure Regulator NanoPure
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UR1000 Series Regulator Drawing

 Pressure Regulator NanoPure
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UR1000 Series Regulator Flow Charts

 Pressure Regulator NanoPure 25

Ordering Informa�on

1 2 3 4 5 6 7 8 9 10 11 12
Series Inlet Body Diaphragm Outlet Por�ng In & Out Seat Gauge Gauge
Finish Poppet Panel
No Pressure Material Type Pressure No Port Size Material Inlet Outlet

UR1000 HP 6L FB N 6L 3 A M4 P 0 0

1. Series: UR1000 7. Outlet Pressure 10. Seat Material

1 = 0-25 psig(0-1.7bar) P = PCTFE
2. Inlet Pressure 2 = 0-60 psig(0-4bar) T = TFE (LP Only)
HP = 3500 Psig (241 bar) 3 = 0-100 psig(0-7bar) V = Vespel
LP = 600 Psig (41bar) 4 = 0-150 psig(0-10bar)
LL = 250 Psig (17 bar) 5 = 0-250 psig(0-17.2bar) 11. Gauge (Inlet)
0 = Without Gauge
3. Body Material 8. Por�ng No 5 = 0-4000psig/bar
6L= 316L A = 2P (Figure A)
B = 3P (Figure B ) 12. Gauge (Outlet)
6V= 316L VAR
C = 4P ( Figure C) 0 = Without Gauge
Gauge Port all 1/4” M face seal V3 = -30-0-30psig/bar
4.Finish Ra V1 = -30-0-100psig/bar
FA = 5 μin (EP) 9. Body In & Out Port Size 1 = 0-160psig/bar
FB = 10 μin (EP) 2 = 0-200psig/bar
BA = 25 μin MM4 = 1/4” M Face Seal
FF4 = 1/4” F Face Seal
MM8 = 1/2” M Face Seal
5. Diaphragm Type FF8 = 1/2” F Face Seal
N = Non-�ed diaphragm MF4 = IN: 1/4” M Face Seal
T = Tied diaphragm Out: 1/4” F Face Seal
FM4 = IN: 1/4” F Face Seal
Out: 1/4” M Face Seal
6. Poppet MF8 = IN: 1/2” M Face Seal
6L = 316L SS Out: 1/2” F Face Seal
HT = Hastelloy R Trim
FM8 = IN: 1/2” F Face Seal
Out: 1/2” M Face Seal
TT4 = 1/4” Tube Stubs
TT8 = 1/2” Tube Stubs
 Pressure Regulator NanoPure
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URA 1000
sub-atmospheric pressure

Specifica�ons Applica�ons
OPERATING PARAMETERS
・ Vacuum pressure control
・ Inlet :120 / 600 / 3500 psig 8.3 / 41.4 / 241 bar
・ Toxic gas analysisValve manifold boxes
・ Outlet: 50 mm Hg absolute - 15 psig / 1.0 bar
Gas cabinets
50 mm Hg absolute - 30 psig / 2.1 bar
50 mm Hg absolute - 60 psig / 4.1 bar ・ Semiconductor manufacturing
50 mm Hg absolute - 100 psig / 6.9 bar ・ Nega�ve bias for controlling vacuum and low
・ posi�ve pressures
・Design Proof Pressure: 150% of max rated
・ Finish Ra: 10 μin / 25 μin
・Inboard Leak Rate: <1x10-9 atmcc/sec He
・Opera�ng Temperature: ・ Metal-to-metal diaphragm to body seal for
high leak integrity
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Teflon Seat: -40°F to 160°F / -40°C to 71°C ・ Hastelloy® trim op�on is available
・Flow Capacity:
Cv =0.24(120psig/8.3bar)
Cv =0.15(600psig/41.4bar)
Cv =0.09(3500psig/241bar)
・Body: 316L SS or 316L VAR SS
・Valve Seat: Teflon or PCTFE
・Diaphragm: Hastelloy R C-22
・Valve Stem, Spring, and Valve: SS 316L or Hastelloy C-22
R

・Finish Ra: 5 μin 、10 μin、25 μin

・Connec�ons: F or M Face Seal or Tube stubs
・Cleaning: CGA 4.1 and ASTM G93
Pressure Regulator NanoPure 27

URA1000 Series Regulator Drawing

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URA1000 Series Regulator Flow Charts

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Ordering Informa�on

1 2 3 4 5 6 7 8 9 10 11

Series Inlet Body Finish Outlet Poppet Por�ng In & Out Seat Gauge Gauge
No Pressure Material Pressure No Port Size Material Inlet Outlet

URA1000 HP 6L FB 4 6L A 4M P 0 0

1. Series: URA1000 6. Poppet 9. Seat Material

6L = 316L SS P = PCTFE
HT = Hastelloy Trim
R

2. Inlet Pressure: T = PTFE

HP = 3500 Psig (241 bar)
MP = 600 Psig (41.4 bar) 7. Port No: 10. Gauge (Inlet)
LP = 120 Psig (8.3 bar) A = 2 Port (Figure A ) 0 = Without Gauge
B = 3 Port (Figure B） 1 = 0-150 Psig/bar
3. Body Material C = 4 Port (Figure C） 2 = 0-600 Psig/bar
Gauge Port all 1/4” M face seal 3 = 0-4000 psig/bar
6L= SS 316L
6V = SS 316L VAR
8. In & Out Port Size 11. Gauge (Outlet)
4. Finish Ra TT4 = 1/4” Tube Stubs 0 = Without Gauge
FA = 5 μin (EP) MM4 = 1/4” M Face Seal V3 = -30-0-30psig/bar
FB = 10 μin (EP) FF4 = 1/4” F Face Seal V1 = -30-0-100psig/bar
BA = 25 μin MF4 = In 1/4” M Face Seal 1 = 0-160psig/bar
Out 1/4” F Face Seal
FM4 = In 1/4” F Face Seal
5. Outlet Pressure: Out 1/4” M Face Seal
1 = 50 mm Hg absolute MF8 = In 1/2” M Face Seal
-15 psig / 1.0 bar Out 1/2” F Face Seal
2 = 50 mm Hg absolute FM8 = In 1/2” F Face Seal
- 30 psig / 2.1 bar Out 1/2” M Face Seal
3 = 50 mm Hg absolute MM8 = 1/2” M Face Seal
- 60 psig / 4.1 bar FF8 = 1/2” F Face Seal
4 = 50 mm Hg absolute
- 100 psig / 6.9 bar
 Pressure Regulator NanoPure
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URH 2000
Pressure Reducing Regulators

Specifica�ons Applica�ons

・Inlet Pressure : ・ High flow purging systems

・ 1/4”, 1/2" point-of-use
3500,100 or 600 psig / 241,7 or 41bar ・ Regula�on of specialty gases
・Outlet Pressure:
100 mm Hg absolute - 15 psig, ・ Semiconductor manufacturing
3-30, 3-60, 4-100, 4-150 psig, Features and Benefits
100 mm Hg absolute - 1.0 bar, ・ Compact, hand-loaded and pressure reducing
0.21 - 2.1, 0.21- 4.1, 0.28-6.9, ・ Low internal volume
0.28-10.3 bar ・ Smooth unobstructed flow path for complete
・ Inboard Leak Rate:<1x10-9 atmcc/sec He purging
・ Opera�ng Temperature: ・ Absolute pressure range model is available
Vespel Seat: -40°F to 300°F / -40°C to 149°C ・ Excellent leak integrity is created by metal-to-
PCTFE Seat: -40°F to 140°F / -40°C to 60°C metal diaphragm to body seal
Teflon, Seat: -40°F to 160°F / -40°C to 71°C
・ Flow Capacity: Cv =0.5
・ Body: SS 316L / SS 316L VAR
・ Diaphragm: Hastelloy C-22
・ Parts: SS 316
・ Valve Seat:
・ Vespel: 3500 psig / 241 bar
・ PCTFE: 1000 psig / 69.0 bar:
・ Teflon or PFA: 600 psig / 41.4 bar
・ Finish Ra: 5 μin 、10 μin 、25 μin
・ Connec�ons: For M Face Seal, Tube stubs
・ Cleaning: CGA 4.1 and ASTM G93
Pressure Regulator NanoPure
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URH2000 Series Regulator Drawing

 Pressure Regulator NanoPure
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URH2000 Series Regulator Flow Charts

Pressure Regulator NanoPure
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Ordering Informa�on

1 2 3 4 5 6 7 8 9 10 11 12

Series Inlet Body Diaphragm Outlet Por�ng In & Out Seat Gauge Gauge
Finish Poppet
No Pressure Material Type Pressure No Port Size Material Inlet Outlet

URH2000 HP 6L FA N 6L 2 A 4M P 0 0

1. Series: URH2000 8. Por�ng: 11. Gauge (Inlet)

A = 2 Port (Figure A) 0 = Without Gauge
2. Inlet Pressure B = 3 Port (Figure B) 1 = 0 – 600 psig/bar
HP = 3500 Psig (241 bar) C = 4 Port (Figure C) 2 = 0 – 1000 Psig Bar
MP = 1000 Psig (69.0 bar) Gauge Port all 1/4” M face seal 5 = 0-4000psig/bar
LP = 600 Psig (41.4 bar)

3. Body Material 9. In & Out Port Size 12. Gauge (Outlet)

6L= SS 316L TT4 = 1/4” Tube Stubs 0 = Without Gauge
6V = SS 316L VAR TT8 = 1/2” Tube Stubs V3 = -30-0-30psig/bar
MM4 = 1/4” M Face Seal 1 = 0 -30 psig/bar
4. Finish Ra FF4 = 1/4” F Face Seal 2 = 0 – 60 psig/bar
FA = 5 μin (EP) MF4 = In 1/4” M Face Seal 3 = 0 – 100 psig/bar
FB = 10 μin (EP) Out 1/4” F Face Seal 4 = 0 – 160 psig/bar
BA = 25 μin FM4 = In 1/4” F Face Seal
Out 1/4” M Face Seal
5. Diaphragm Type MF8 = In 1/2” M Face Seal
N = No Tied Diaphragm Out 1/2” F Face Seal
T = Tied Diaphragm FM8 = In 1/2” F Face Seal
Out 1/2” M Face Seal
6. Poppet MM8 = 1/2” M Face Seal
6L = 316L SS FF8 = 1/2” F Face Seal
HT = Hastelloy Trim
R

7. Outlet Pressure 10. Seat Material

1 = 100 mm Hg absolute V = Vespel
- 15 psig / 1 bar P = PCTFE
2 = 100 mm Hg absolute T = PTFE
- 30 Psig / 2 bar
3 = 0 - 30 psig (0 - 2.1 bar)
4 = 0 - 60 psig (0 - 4.1 bar)
5 = 0 -100 psig (0 - 6.9 bar)
6 = 0 -150 psig (0 - 10.3 bar)
 Pressure Regulator NanoPure
34

UR 2000
High Purity Tied & Non-Tied
Diaphragm Type

Specifica�ons Applica�ons

Opera�ng ・Bulk Specialty Gas Systems (BSGS)

Inlet = 150,1000,2000 psig / 10.3, 69.0, 138 bar ・1/2" point-of-use
Outlet = 0-25, 0-60, 0-100, 0-150, 0-200 PSIG ・ Tool hookups
(0-1.7, 0-4, 0-7, 0-10, 0-14 bar) ・Gas cabinets
・Design Proof Pressure: 150% of maximum rated ・Designed for high flow, bulk specialty gas
・ Inboard Leak Rate: <1 x 10-9 atm cc/sec He ・Posi�ve shut-off seal, �ed diaphragm or
・Opera�ng Temperature: Non-�ed design.
-40°F to 160°F / -40°C to 71°C
・Metal-to-metal diaphragm to body seal
・Flow Capacity: Cv=1.2
for high leak integrity .
・Body: 316L & 316L VAR ・CGA 4.1 and ASTM G93
・Diaphragm: Hastelloy R
・Seat: PCTFE or TFE, Vespel
・Spring: SS 316 or Hastelloy R
・Seat Retainer: 316 SS
・Poppet: 316 SS or Hastelloy C-22
・Valve Seat: TFE, Vespel, PCTFE
・Remaining Parts: 316 SS
・Finish Ra : 5 μin 、 10 μin 、25 μin
・Connec�ons: F or M Face Seal, Tube stubs
Pressure Regulator NanoPure
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UR2000 Series Regulator Drawing
 Pressure Regulator NanoPure
36

UR2000 Series Regulator Flow Charts

Pressure Regulator NanoPure
37

Ordering Informa�on

1 2 3 4 5 6 7 8 9 10 11 12

Series InletInlet Body Body

Series
Finish
Diaphragm
Diaphragm
Poppet
Poppet
OutletOutlet
Valve InPor�ng
& Out SeatSeat Gauge
Port NoGauge
& Gauge Gauge
No Pressure
No Pressure Material
Material Type
Type Pressure
Pressure seat Size
No MaterialInletGuge Size
Material Outlet
Inlet Outlet
UR2000 HP 6L FA N 6L 3 B M8 P 0 0

1. Series: UR2000 7. Outlet Pressure 10. Seat Material

1= 0-30 psig (0-2 bar) P = PCTFE
2= 0-60 psig (0-4 bar) T = TFE
2. Inlet Pressure 3= 0-100 psig (0-7 bar) V = Vespel
LP= 150 psig (10.3 bar) 4= 0-150 psig (0-10 bar)
MP= 1000 psig (69 bar)
HP= 2000 psig (138 bar) 8. Por�ng 11. Gauge (Inlet)
A = 2P (Figure A) 0 = Without Gauge
3. Body Material B = 3P (Figure B) 1 = 0-3000psig/bar
6L= 316L C = 4P (Figure C) 2 = 0-3000psig/bar
6V= 316L VAR Gauge Port all 1/4” M face seal

12. Gauge (Outlet)

4. Finish Ra 9. In & Out Size
0 = Without Gauge
FA = 5 μin (EP) TT16 = 1" Tube Stubs
V3 = -30-0-30psig/bar1/4”
FB = 10 μin(EP) TT12 = 3/4" Tube Stubs
V1 = -30-0-100psig/bar 1/4”
BA = 25 μin TT8 = 1/2" Tube Stubs
1 = 0-160psig/bar 1/4”
TT6 = 3/8" Tube Stubs
2 = 0-200psig/bar 1/4”
MM4 = 1/4" M Face Seal
5. Diaphragm Type
FF4 = 1/4" F Face Seal
N = Non Tied Diaphragm
MM8 = 1/2" M Face Seal
T = Tied Diaphragm
FF8 = 1/2" F Face Seal
MM12 = 3/4" M Face Seal
6. Poppet FF12 = 3/4" F Face Seal
6L=316L MF4 = In 1/4" M Face Seal
H=Hastelloy R Out 1/4" F Face Seal
FM4 = In 1/4" F Face Seal
Out 1/4" M Face Seal
MF8 = In 1/2" M Face Seal
Out 1/2" F Face Seal
FM8 = In 1/2" F Face Seal
Out 1/2" M Face Seal
 Pressure Regulator NanoPure
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UR 3000
High Purity Tied & Non-Tied
Diaphragm Type

Speci�ications Applications
Opera�ng ・ High flow in-line regulator excellent
Inlet Pressure: 250 psig / 17.2 bar for purging
Outlet Pressure Ranges: ・ Smooth unobstructed flow path for
0-30, 0-60, 0-100psig / 0-2.1, 0-4.1, 7, 0-6.9 bar complete purging
・Design Proof Pressure: 150% maximum rated
・ Posi�ve shut-off seal with posi�on
・Inboard Leak Rate: < 1 x 10 -9atm cc/sec He
・Opera�ng Temperature: able bonnet
-40°F to 160°F / -40°C to 71°C ・ Excellent leak integrity is created by
・Flow Capacity: Cv = 1.8 metal-to-metal diaphragm to body seal
・Decaying Inlet Characteris�c 2.7 per 100 psig / ・ Meets CGA 4.1 and ASTM G93
0.19 per 6.9 bar
・Body: 316L & 316L VAR Electropolish
・Diaphragm: Hastelloy
・Seat: PCTFE or TFE
・Spring: 316SS or Hastelloy R

・Seat Retainer: SS 316

・Finish Ra: 5 μin 、10 μin、25 μin
・Connec�ons: Female or male face seal
fi�ng Tube stubs
Pressure Regulator NanoPure 39
UR3000 Series Regulator Drawing
 Pressure Regulator NanoPure
40
UR3000 Series Regulator Flow Charts
Pressure Regulator NanoPure
41

Ordering Information

1 2 3 4 5 6 7 8 9 10
Series Body Outlet In & Out Seat Por�ng Gauge
Series Body Diaphragm In & Out
Por�ng Port Seat Gauge
No Outlet
Material
Finish Pressure Poppet Size Material No
Outlet Outlet
No Material Pressure Type No Port Size Material

UR3000 6L 3 FB N 6L A RC P 0

1. Series: UR3000 6. Poppet 9. Seat Material

6L = 316L P = PCTFE
HT = Hastelloy Trim T = TFE
2. Body Material
6L= 316L
6V= 316L VAR 7. Port No 10. Gauge (Outlet)
A = 2P (Figure A)
B = 3P (Figure B) X = Without Gauge
3. Outlet Pressure C = 4P (Figure C) V3 = -30-0-30psig/bar
1 = 0-30 psig(0-2bar) Gauge Port all 1/4” M face seal V1 = -30-0-100psig/bar
2 = 0-60 psig(0-4bar) 1 = 0-160psig/bar
3 = 0-100 psig(0-6.8bar)
4 = 0-150 psig(0-10bar) 8. Body In & Out Port Size
TT12 = 3/4" Tube Stubs
4. Finish Ra TT8 = 1/2" Tube Stubs
FA = 5 μin (EP) MM8 = 1/2" M Face Seal
FB = 10 μin(EP) FF8 = 1/2" F Face Seal
BA = 25 μin MM12 = 3/4" M Face Seal
FF12 = 3/4" F Face Seal
MF8 = IN 1/2" M Face Seal Gauge
5. Diaphragm Type Out 1/2" F Face Seal Inlet
N = Non-�ed diaphragm
T = Tied diaphragm FM8 = IN 1/2" F Face Seal
Out 1/2" M Face Seal
MF12 = IN 3/4" M Face Seal
Out 3/4" F Face Seal
FM12 = IN 3/4" F Face Seal
Out 3/4" M Face Seal
 Pressure Regulator NanoPure
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UR 4000
2 Stage
Metal Diaphragm Type

Specifica�ons Applica�on
Opera�ng
・ Gas cabinets
Inlet =3500 PSIG (35 bar)
・ Semiconductor manufacturing
Outlet = 0-25, 0-100, 0-150 0-200PSIG
(0-1.7, 0-7, 0-10 0-14bar) ・ Research labs
・ Design proof pressure:150% maximum rated pressure ・10 Ra μin / 25 μin surfaces
・ Leakage = internal bubble-�ght ・ Full internal Electropolish is available
・ Helium test = ≤ 4 x 10-9 atm cc/sec ・ Metal-to-metal
・ Temperature =-15°F to +165°F (-26°C to +74°C) ・ Tied diaphragm or Non-�ed design
・ Flow capacity: Cv: 0.05 ・ CGA 4.1 and ASTM G93
・ Body = 316L or 316L VAR Electropolish
・ Diaphragm = Hastelloy -C
R

・ Seat = PCTFE
・ Finish Ra: 5 μin 、10 μin 、25μin
・ Connector = F or M face seral fi�ng Tube stubs
Pressure Regulator NanoPure 43
UR4000 Series Regulator Drawing
44
Pressure Regulator NanoPure

UR4000 Series Regulator Flow Charts

Pressure Regulator NanoPure
45

Ordering Informa�on

1 2 3 4 5 6 7 8 9 10
Series Body Diaphragm Outlet In & Out Seat Por�ng Gauge Gauge
Material Finish Port Size
No Type Pressure Material No (Inlet) (Outlet)

UR4000 6L N FB 3 RA P 1 X X

1. Series: UR 4000 6. In & Out Port Size 9. Gauge (Inlet)

MM4 = 1/4" M Face Seal X = Without Gauge
FF4 = 1/4" F Face Seal 5 = 0-4000psig/bar
2. Body Material
MM8 = 1/2" M Face Seal
6L = 316L
FF8 = 1/2" F Face Seal 8. Por�ng No
6V = 316L VAR
MF4 = IN 1/4" M Face Seal A= 2p (Figure A)
Out 1/4" F Face Seal B= 3P (Figure B)
3. Diaphragm Type
N = Non-�ed diaphragm FM4 = IN 1/4" F Face Seal C = 4P (Figure C)
T = Tied diaphragm Out 1/4" M Face Seal Gauge Port all 1/4” M face seal
MF8 = IN 1/2" M Face Seal
Out 1/2" F Face Seal 10. Gauge (Outlet)
4. Finish Ra
FA = 5 μin (EP) FM8 = IN 1/2" F Face Seal X = Without Gauge
FB = 10 μin(EP) Out 1/2" M Face Seal V3 = -30-0-30psig/bar
BA = 25 μin TT4 = 1/4" Tube Stubs V1 = -30-0-100psig/bar
TT8 = 1/2" Tube Stubs
1 = 0-160psig/bar
5. Outlet Pressure 7. Seat Material
1 = 0-30Psig (0-2bar) P = PCTFE
2 = 0-60Psig (0-4bar) T = TFE
3 = 0-100Psig (0-7bar)
4 = 0-200Psig (0-14bar)
 Pressure Regulator NanoPure
46

LR 1000
Low Pressure High Flow
Diaphragm Type

Specifica�ons Applica�ons
Opera�ng
Inlet Pressure 500 psig / 35 bar ・Purging, blanke�ng, high flow ,
Outlet Pressure Ranges Heat trea�ng and shielding gases
0-25,0-50,0-100,0-150,0-250 psig ・Performs well at very low pressure
(0-1.7,0-2.5,0-6.9,0-10.3,0-17,2 bar) Differen�als such as Dewar supplied
・Design Proof Pressure:150% of rated pressure processes
・Design Burst Pressure:400% of rated pressure
・Mul�-drop breathing air sta�ons
・Leakage
・Diaphragm sensing provides greater
Internal: Bubble-�ght
external: < 2 x 10-8 atm cc/sec He accuracy and sensi�vity
・Flow Capacity: Cv: 5 ・Cleaning: CGA 4.1 and ASTM G93
・Body, Bonnet, Back Cap: SS 316L
・Main Valve Seat: Buna-N, Viton
・O-ring: Buna-N, Viton
・Diaphragm: Gylon
・Opera�ng Temperature:
-15°F to 165°F / -25°C to 75°C
Pressure Regulator NanoPure
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LR1000 Series Regulator Drawing

 Pressure Regulator NanoPure
48

LR1000 Series Regulator Flow Charts

Pressure Regulator NanoPure
49

Ordering Informa�on

1 2 3 4 5 6 7 8
Series Body Outlet Port Seat Por�ng Gauge Grade
No Material Pressure Size Material No

LR1000 6L 3 1 T 3 1 1

1. Series: LR 1000 5. Seat Material

T = TFE
2. Body Material
6L = 316L SS 6. Por�ng
1 = 2P
3. Outlet Pressure
2 = 3P (Gauge Port 1/4NPT)
1: 0-25 (0-1.7bar)
3 = 3P (Gauge Port 1/4” Face Seal)
2: 0-50 (0-3.5bar)
3: 0-100 (0-7bar)
4: 0-150 (0-10.3bar) 7. Gauge
5: 0-250 psig (0-17.2 bar) X = No Gauge
V3 = -30-0-30psig/bar
V1 = -30-0-100psig/bar
4. In & Out Port Size
1 = 0-160psig/bar
1 = 1” NPT
2 = 0-200psig/bar
2 = 1” SWG
3 = 0-300psig/bar
3 = 1” M Face Seal
4 = 1” F Face Seal
5 = 1.25” Tube Stub 8. Grade
6 = 1.5” Tube Stub 1. BA
7 = 15A Pipe Stub 2. EP
8 = 20A Pipe Stub
 Pressure Regulator NanoPure
50

LR 2000
Low Pressure High Flow
Diaphragm Type

Specifica�ons Applica�ons
・Maximum Inlet Pressure ：300 psig / 20.7 bar ・Purging, blanke�ng, high flow heat trea�ng
・Outlet Pressure Ranges： and shielding gases performs well at very low
0-25, 0-50, 0-100, 0-150, 0-250 psig 0-1.7, pressure differen�als such as Dewar-supplied
0-3.4, 0-6.9, 0-10.3, 0-17.2 bar processes mul�-drop breathing air sta�ons.
・Design Proof Pressure: ・Diaphragm sensing provides greater accuracy
150% maximum rated Leakage: Bubble-�ght and sensi�vity.
・Opera�ng Temperature ：-10°F to 165°F /
-23°C to 74°C
・Flow Capacity ：Cv=10

Contact Materials
・Body, Bonnet, Back-cap: 316L Stainless Steel
・Main Valve Seat: Buna-N 90, Ethylene Propylene 80 or Viton
R

・Rings: Buna-N, Viton R

・Diaphragm: Gylon R

・Remaining Parts: 300 Series Stainless Steel

・Cleaning: CGA 4.1 and ASTM G93
Pressure Regulator NanoPure 51
LR2000 Series Regulator Drawing
 Pressure Regulator NanoPure
52

LR2000 Series Regulator Flow Charts

Pressure Regulator NanoPure
53

Ordering Informa�on

1 2 3 4 5 6 7 8
Series Body Outlet Port Seat Por�ng Gauge Grade
No Material Pressure Size Material No

LR2000 6L 3 1 T 3 1 1

1. Series: LR 2000 5. Seat Material

T = TFE
2. Body Material
6L = 316L SS 6. Por�ng
1 = 2P
3. Outlet Pressure 2 = 3P (Gauge Port 1/4”)
1= 0-25 (0-1.7bar) 3 = 3P (Gauge Port 1/4” Face Seal)
2= 0-50 (0-2.5bar)
3= 0-100 (0-7bar) 7. Gauge
4= 0-150 (0-10.3bar) X = No Gauge
5= 0-250 psig (0-17.2bar)
V3 = -30-0-30psig/bar
4. In & Out Port Size V1 = -30-0-100psig/bar
1 = 0-160psig/bar
1 = 2” Tube Stub
2 = 0-300psig/bar
2 = 2.5” Tube Stub
3 = 3” Tube Stub
4 = 25A Pipe Stub 9. Grade
5 = 32A Pipe Stub 1. BA
2. EP
6 = 40A Pipe Stub
7 = 50A Pipe Stub
8 = 65A Pipe Stub
9 = 80A Pipe Stub
 Pressure Regulator NanoPure
54

GB1000
Relief / Backpressure
Regulators

Specifica�ons Advantages

・Controlled Pressure Ranges： ・GB - Series is a compact, lightweight single

0-25, 0-50, 0-100, 0-250 psig -stage regulator for specialty, flammable, and
0-1.7, 0-3.4, 0-6.9, 0-17.2 bar industrial gases. Diffusion-resistant metal.
・Design Proof Pressure： diaphragm seal ensures gas purity and integrity.
150% maximum rated ・General purpose
・Leakage ・Reduces contamina�on and provides accurate
Internal: Bubble-�ght regula�on of non-corrosive and corrosive
External: Design to meet < 2 x 10-8 atm
gases.
cc/sec He
・Convoluted metal-to-metal sealed diaphragm
・Opera�ng Temperature:
・Close pressure differen�al betweencrack and
-15°F to 165°F / -26°C to 74°C
reseat.
・Flow Capacity: Cv = 0.30
・Body: 316 Stainless Steel ・Economically priced
・Seat Retainer: PEEK ・Panel moun�ng is standard
・O-Ring: Viton, Kalrez ・Bubble-�ght shutoff at all resea�ng
・Diaphragm, Filter, Spring: 316 Stainless Steel
・Remaining Parts: 316 Stainless Steel
・Cleaning: CGA 4.1 and ASTM G93
Pressure Regulator NanoPure
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GB1000 Series Regulator Drawing
 Pressure Regulator NanoPure
56

GB1000 Series Regulator Flow Charts

Pressure Regulator NanoPure
57

Ordering Informa�on

1 2 3 4 5 6 7 8 9
Series Inlet Body Outlet Port Seat Por�ng Gauge Grade
No Pressure Material Pressure Size Material No

GB1000 1 6L 3 1 T 3 X 1

1. Series: GB 1000 6. Seat Material

T = TFE
2. Inlet Pressure:
1=300 Psig (21bar)
7. Por�ng
1 = 2P
3. Body Material
2 = 3P (Gauge Port 1/4”)
6L = 316L SS

4. Outlet Pressure 8. Gauge

1 = 0-25 (0-1.7bar) X = No Gauge
2 =0-50 (0-2.5bar) V3 = -30-0-30psig/bar
3 = 0-100 (0-7bar) V1 = -30-0-100psig/bar
4 = 0-150 (0-10.3bar) 1 = 0-160psig/bar
5 = 0-250 psig (0-17.2) 2 = 0-300psig/bar

5. In & Out Port Size 9. Grade

1 = 1/4” NPT 1. BA
2 = 1/4” SWG 2. EP
3 = 3/8” SWG
 Pressure Regulator NanoPure
58

GB2000
Relief / Backpressure
Regulators

Specifica�ons Applica�on

・Controlled Pressure Ranges ・Pump discharge pressure control

0-25, 0-50, 0-125, 0-200, 0-250psig ・High flow capacity
0-1.7, 0-3.4, 0-8.6, 0-13.8 ,0-17.2bar ・Close pressure differen�al between
・Design Proof Pressure: 150% maximum rated crack and reseat
・Leakage: Bubble-�ght ・Bubble-�ght shutoff at all resea�ng
・Opera�ng Temperature: -20°F to 165°F / -29° pressures
C to 74°C ・Large diaphragm provides maximum
・Flow Capacity: Cv=5.0 sensi�vity
・Body, Bonnet, Back-cap：316 Stainless Steel ・Four control pressure ranges
・Main Valve Seat：Buna-N or Viton
・Diaphragm: Gylon, Viton
・O-Rings: Buna-N or Viton
・Remaining Parts: 300 Series Stainless Steel
・Cleaning: CGA 4.1 and ASTM G93
Pressure Regulator NanoPure 59

GB2000 Series Regulator Drawing

 Pressure Regulator NanoPure
60
GB2000 Series Regulator Flow Charts
Pressure Regulator NanoPure 61

Ordering Informa�on

1 2 3 4 5 6 7 8 9
Series Inlet Body Outlet Port Seat Por�ng Gauge Grade
No Pressure Material Pressure Size Material No
GB2000 1 6L 3 1 T 1 X 1

1. Series: GB 2000 5. In & Out Port Size 8. Gauge

1 = 1” NPT X = No Gauge
2. Inlet Pressure: 2 = 1” SWG V3 = -30-0-30psig/bar
1= 300 Psig (21bar) 3 = 1.25” Tube Stub V1 = -30-0-100psig/bar
4 = 1.5” Tube Stub 1 = 0-160psig/bar
3. Body Material 2 = 0-300psig/bar
6L = 316L SS
6. Seat Material
T = TFE
9. Grade
4. Outlet Pressure
1= 0-25 (0-1.7bar)
7. Por�ng 1. BA
1 = 2P 2. EP
2= 0-50 (0-2.5bar)
3= 0-100 (0-7bar) 2 = 3P (Gauge Port 1/4”)
4= 0-150 (0-10.3bar)
5= 0-250 psig (0-17.2bar)
 Changeover System NanoPure
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CH 1000A Series
・ Maximum inlet pressure: 3500 psig / 241 bar
・ Four delivery pressures from:
85/115, 135/165, 185/215, 235/265 psig
5.9/7.9, 9.3/11.4, 12.8/14.8, 16.2/18.3 bar
・Designed to provide a con�nuous flow of gas for
applica�ons requiring stored gas supplies
・Based on GR-1000 Series
・Design Proof Pressure :150% of maximum opera�ng
・Leak Rate:
Internal: Bubble-�ght
External: Designed to meet ≤ 2 x 10-8 atm cc/sec He
・ Opera�ng Temperature: -40°F to 165°F / -40°C to 74°C
・ Flow Capacity: Cv = 0.06
・ Moun�ng bracket is standard

Advantages
・ CO2 for �ssue and cell culture incubators supply
・Shielding and laser assist gases in metal fabrica�on
・Analyzer carrier gas
・Laser cu�ng assist gas
Changeover System NanoPure
63

Automa�c Changeover Regulators and Systems Drawings

 Changeover System NanoPure
64

CH 1000B Series

・ Maximum inlet pressure: 3500 Kg / 241 bar

・ Four delivery pressures from:
0-25, 0-50, 0-100, 0-150 psig
0-1.7, 0-3.4, 0-6.9, 0-10.3 bar
・ Designed to provide a con�nuous flow of gas for
applica�ons requiring stored gas supplies
・ Based on GR-1000 Series
・ Design Proof Pressure :150% of maximum opera�ng
・ Leak Rate
Internal: Bubble-�ght
External: Designed to meet ≤ 2 x 10-8 atm cc/sec He
・ Opera�ng Temperature:
-40°F to 165°F / -40°C to 74°C
・ Flow Capacity: Cv = 0.06
・ Moun�ng bracket is standard

Advantages

・ CO2 for �ssue and cell culture incubators supply

・ Shielding and laser assist gases in metal fabrica�on
・ Analyzer carrier gas
・ Laser cu�ng assist gas
Changeover System NanoPure
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Automa�c Changeover Regulators and Systems Drawings

 Changeover System NanoPure
66

Specifica�ons

CHS 1000 Series Advantages

・ Maximum inlet pressure: 3500 psig / 241 bar ・ CO2 for �ssue and cell culture
・ Four delivery pressures from: incubators supply
85/115, 135/165, 185/215, 235/265 psig
・ Shielding and laser assist gases in
5.9/7.9, 9.3/11.4, 12.8/14.8, 16.2/18.3 bar
metal fabrica�on
・Designed to provide a con�nuous flow of gas for
applica�ons requiring stored gas supplies ・ Analyzer carrier gas
・Based on GR-1000 Series ・ Laser cu�ng assist gas
・Design Proof Pressure :150% of maximum opera�ng
・Leak Rate:
Internal: Bubble-�ght
External: Designed to meet ≤ 2 x 10-8 atm cc/sec He
・Opera�ng Temperature:
-40°F to 165°F / -40°C to 74°C
・Flow Capacity: Cv = 0.06
・Moun�ng bracket is standard
Changeover System NanoPure
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Automatic Changeover Regulators and Systems Drawings
 Changeover System NanoPure
68

Automatic Changeover Regulators and Systems Drawings

Changeover System NanoPure
69

Ordering Informa�on

CH1000A 1 6L A 1 1
Inlet Body Number of Outlet Pressure In & Out
Pressure Material Pressure Port Size
（Psig） regula�ng Psig Bar
Series No
1 85/115 5.9/7.9 1 1/4”
A 2 2 135/165 9.3/11.4
1 3500 6L 316L 2 3/8”
B 3 3 185/215 12.8/14.8
4 235/265 16.2/18.3

CH1000B 1 6L 1 1
Inlet Body Outlet Pressure In & Out
Pressure Material Port Size
（Psig） Psig Bar
Series No 1 0-25 0-1.7
2 0-50 0-3.4 1 1/4”
3500 6L 316L 3 2 3/8”
0-100 0-6.9
4 0-150 0-10.3

CHS1000 1 6L A 1
Inlet Outlet Pressure In & Out
Pressure Body
Psig Material Psig Bar Port Size

Series No 1 85/115 5.9/7.9

1 3500 6L 316L
2 135/165 9.3/11.4 1 1/2"
3 185/215 12.8/14.8
4 235/265 16.2/18.3

1
 Lion Hygienic Materials Co., Ltd
No.22 Lufeng west road, Kunshan,
Jiangsu, P. R. China
Tel: 86-512-5767 1815
Fax: 86-512-5787 1472
Email: [email protected]
www.kl-nanopure.com

Copyright 2017 Lion Hygienic Materials Co., Ltd. All rights reserved. 2018/5 revision- ① .