VLSI Bitboy
VLSI Bitboy
i. Wafer preparation ii. Photolithography iii. Oxidation iv. Contacts and Metallization v. Source
and drain formation vi. Isolation
. Wafer preparation: This process involves preparing the silicon wafer, which serves as the base
material for the CMOS IC. The wafer is cleaned and polished to remove any impurities and
defects. I
ii. Photolithography: In this process, a series of masks are used to define the patterns on the
wafer. A photosensitive material called photoresist is applied to the wafer, and then exposed to
UV light through a mask. The exposed areas of the photoresist become soluble and are removed,
leaving behind the desired pattern.
iii. Oxidation: Oxidation is the process of growing a thin layer of silicon dioxide (oxide) on the
wafer's surface. This layer acts as an insulator and protects the underlying silicon. It is typically
grown by exposing the wafer to oxygen or steam at high temperatures.
iv. Contacts and Metallization: Contacts are small openings made in the oxide layer to allow
electrical connections to be made to the underlying silicon. Metallization involves depositing a
layer of metal (usually aluminum or copper) on the wafer's surface to form interconnects
between different components of the IC.
v. Source and drain formation: The source and drain regions are formed by selectively doping the
silicon substrate with impurities. These regions are responsible for controlling the flow of current
in the CMOS transistors. The doping process is typically done using a technique called diffusion
or ion implantation.
vi. Isolation: Isolation is the process of electrically isolating different components on the IC to
prevent unwanted interactions. This is achieved by creating a barrier between components using
techniques such as shallow trench isolation (STI) or local oxidation of silicon (LOCOS).
10 Differentiate between i. Diffusion and Ion implantation ii. Positive Photoresist and negative
photoresist iii. Projection printing and contact printing iv. OPC and No OPC
i. Diffusion and Ion implantation: - Diffusion is a process in which impurities are introduced into a
semiconductor material by heating the material in the presence of the impurity source. The
impurities diffuse into the material and create regions with different electrical properties. - Ion
implantation, on the other hand, is a process in which high-energy ions are accelerated and then
implanted into the semiconductor material. This process allows for precise control over the
depth and concentration of the implanted ions.
ii. Positive Photoresist and negative photoresist: - Positive photoresist is a type of photoresist
that becomes soluble in a developer solution when exposed to light. When the resist is exposed
to light, the exposed areas become soluble and can be removed, leaving behind the desired
pattern. - Negative photoresist, on the other hand, is a type of photoresist that becomes insoluble
in a developer solution when exposed to light. When the resist is exposed to light, the exposed
areas become cross-linked and cannot be removed by the developer solution, leaving behind the
desired pattern.
iii. Projection printing and contact printing: - Projection printing is a lithography technique in
which a mask pattern is projected onto the wafer using lenses or mirrors. This allows for
high-resolution patterning over a large area. - Contact printing, on the other hand, is a lithography
technique in which the mask pattern is in direct contact with the wafer surface. This technique is
typically used for small-scale patterning and may result in lower resolution compared to
projection printing.
iv. OPC and No OPC: - OPC stands for Optical Proximity Correction, which is a technique used in
lithography to compensate for the optical and process effects that can distort the printed
pattern. OPC involves modifying the mask pattern to account for these effects and improve the
final pattern fidelity. - No OPC refers to the absence of Optical Proximity Correction. In this case,
the mask pattern is not modified to compensate for the optical and process effects, which may
result in reduced pattern fidelity and increased process variations.
Pass transistors are transistors that are used to pass or transmit signals from one point to
another in a circuit. They can be either nMOS or pMOS transistors. The limitation of pass
transistors is that they have different characteristics when passing 1s and 0s. nMOS transistors
pass 0s well but 1s poorly, while pMOS transistors pass 1s well but 0s poorly. If the source
voltage of an nMOS transistor drops below a certain threshold, the transistor cuts off. Similarly, if
the source voltage of a pMOS transistor drops below a certain threshold, the transistor cuts off.
This means that nMOS transistors can only pull up to within a threshold voltage of the power
supply voltage, while pMOS transistors can only pull down to within a threshold voltage above
ground. This limitation can be overcome by using a transmission gate, which is a combination of
an nMOS and a pMOS transistor connected in parallel. The transmission gate can transmit both
strong 0s and strong 1s without any signal degradation. It can be used as a multiplexing element,
an analog switch, or a latch element.
12. Show how a Transmission gate overcomes the limitation of Pass transistors.
13. Consider an nMOS in a 180nm process with W/L =4/2λ (i.e., 0.36/0.18 µm. In this process,
the gate oxide thickness is 40 Å and mobility of electrons is 180 cm2/Vs at 70oC . The threshold
voltage is 0.4 V. Plot Ids vs Vds for Vgs= 0, 0.3, 0.6, 0.9, 1.2, 1,5 & 1.8V) Given: 180nm process,
µn = 180 cm2/Vs at 70oC , Vt= 0.4V, tox= 40 Å .
16. Explain the following terms with respects MOSFETs: i. Channel length modulation ii. Body
effect iii. Velocity saturation iv. Mobility degradation v. Subthreshold conduction vi. Tunneling vii.
Junction leakage
● Definition: Channel length modulation refers to the phenomenon where the effective
channel length of a MOSFET is reduced as the drain-to-source voltage (Vds) is increased.
This occurs due to the formation of a depletion region near the drain, which reduces the
length of the channel. As a result, the current flowing through the transistor increases
with increasing Vds in the saturation region.
● Definition: The body effect, also known as the back-gate effect, refers to the change in
threshold voltage (Vt) of a MOSFET due to the voltage applied to the body or substrate.
When a voltage is applied to the body, it creates an electric field that affects the channel
region, altering the threshold voltage. The body effect can impact the performance and
characteristics of the MOSFET.
● Definition: Velocity saturation occurs when the velocity of charge carriers (electrons or
holes) in the channel region of a MOSFET reaches a maximum value and does not
increase further with increasing electric field. This saturation of carrier velocity is due to
scattering mechanisms within the semiconductor material. Velocity saturation limits the
maximum achievable current in a MOSFET and affects its overall performance.
● Definition: Mobility degradation refers to the reduction in carrier mobility (the ability of
charge carriers to move through a material) in the channel region of a MOSFET. This
degradation occurs when the charge carriers bounce against the surface of the channel
due to the vertical electric field created by the gate voltage. The reduced mobility leads to
a decrease in current flowing through the transistor and can impact its I-V
characteristics.
V. Subthreshold Conduction:
VI. Tunneling:
● Definition: Junction leakage refers to the leakage current that occurs at the pn junctions
in a MOSFET. This leakage current is caused by the reverse biasing of the pn junctions
and can increase with temperature. Junction leakage can contribute to the overall
leakage current of the transistor and affect its power consumption and performance.
17. Draw the circuit for the following using i. 2 input NAND gate ii. 2 input XOR gate iii. 2 input
XNOR gate
18. Explain general logic gate using pullup and pull-down networks being in series and parallel.
21. Implement 4:1 mux using pass transistors and transmission gates.
22. Write the transistor level circuit for the tristate inverter and explain the operation with the
help of the truth table.
23. Explain VLSI Design flow with the help of neat flow chart.