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LP101012.201 Proc16

The document is a manual for the Process Eye 1.6 product. It provides contact information for sending feedback about the manual and invites users to comment on any errors or omissions. It also lists the table of contents for the manual, which covers topics like installation, operation, and recipes.
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0% found this document useful (0 votes)
14 views

LP101012.201 Proc16

The document is a manual for the Process Eye 1.6 product. It provides contact information for sending feedback about the manual and invites users to comment on any errors or omissions. It also lists the table of contents for the manual, which covers topics like installation, operation, and recipes.
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 233

Process

Eye 1.6
Manual

LP101012 Rev 2.01


October 2000
As part of our continuous product improvement policy, we are always
pleased to receive your comments and suggestions about how we should
develop our product range. We believe that the manual is an important part
of the product and would welcome your feedback particularly relating to any
omissions or inaccuracies you may discover.

You can send your comments to:-

MKS Instruments, Spectra Products


Cowley Way
Weston Road
Crewe, Cheshire
CW1 6AG
United Kingdom

+44 (0) 1270 250150 Tel.


+44 (0) 1270 251939 Fax.

In North America you can send your comments to:-

MKS Instruments, Spectra Products


380 Woodview Ave.
Morgan Hill
CA 95037
USA

(408) 778-6060 Office


(408) 776-8575 Fax
1-800-VAC CHECK

http://www.spectra-rga.com

Windows and Windows 95 are trademarks of the Microsoft Corporation.


All other brand or product names are trademarks or registered trademarks of
their respective companies.
Contents

Contents ..........................................................................................i

Errata and addenda ...................................................................... a

Section 1. Introducing Process Eye 1.6........................................ 1


1.1. Process Eye 1.6 Help Manual ......................................................... 1

1.2. Introduction.................................................................................... 1
1.2.1. Process Eye 1.6 .................................................................... 1
1.2.2. Overview .............................................................................. 2
1.3. Getting Help................................................................................... 2

1.4. About This Manual ........................................................................ 2


1.4.1. Text Conventions ................................................................. 3
1.4.2. Keyboard Conventions......................................................... 3
1.4.3. Mouse Conventions.............................................................. 3
1.5. Definitions...................................................................................... 4

Section 2. Installation.................................................................... 7
2.1. Initial Checks ................................................................................. 7
2.1.1. Unpacking ............................................................................ 7
2.1.2. Making backup disks............................................................ 7
2.2. Overview........................................................................................ 8
2.2.1. Instrument Architecture......................................................... 8
2.3. PC to Control Unit Connection ...................................................... 9
2.3.1. RS232................................................................................... 9
2.3.2. RS422................................................................................. 10

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page i
2.3.3. RS485 ................................................................................. 11
2.4. Four Port Serial Card.................................................................... 11
2.4.1. Ports and Addresses............................................................ 12
2.4.2. Card Description................................................................. 12
2.4.3. Setting the physical address................................................ 13
2.4.4. Choosing the configuration ................................................ 15
2.5. Configuring Windows95 .............................................................. 16

2.6. Installing Process Eye .................................................................. 24

2.7. Installation 95............................................................................... 24


2.7.1. Running INSTALL............................................................. 24
2.8. Installation NT.............................................................................. 29
2.8.1. System requirements .......................................................... 30
2.8.2. Before you install ............................................................... 30
2.8.3. Running INSTALL............................................................. 30
2.8.4. Serial port usage ................................................................. 36
2.8.5. PC based analog and digital I/O ......................................... 37
2.9. Configuring Process Eye .............................................................. 37
2.9.1. Quick Start.......................................................................... 38
2.9.2. One Microvision Plus ......................................................... 39
2.9.3. Two Microvision Plus Units............................................... 41
2.9.4. One Microvision Plus using RS485.................................... 44
2.9.5. Microvision Plus with a Comms Card................................ 48
2.10. Detailed Configuration ............................................................... 51
2.10.1. Setup................................................................................. 51
2.10.2. Ports.................................................................................. 53
2.10.3. Connect............................................................................. 57
2.11. Download ................................................................................... 58

2.12. Default Settings .......................................................................... 59

Section 3. Operation ................................................................... 61


3.1. Start Up ........................................................................................ 61

3.2. Filament Warning......................................................................... 62

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page ii
3.3. Select Mode ................................................................................. 63

3.4. Using Help ................................................................................... 65

3.5. Access Levels............................................................................... 66


3.5.1. Configuring access levels................................................... 67
3.5.2. Access level features .......................................................... 68
3.6. Running a Recipe ......................................................................... 69

3.7. Running Data Acquisition Recipes .............................................. 70


3.7.1. Bar Graph Display.............................................................. 72
3.7.2. Peak Jump Display ............................................................. 74
3.7.3. Display Edit........................................................................ 74
3.8. Trends .......................................................................................... 78
3.8.1. Add trend............................................................................ 79
3.8.2. Edit trend............................................................................ 79
3.8.3. Delete trend ........................................................................ 79
3.8.4. Trend settings ..................................................................... 80
3.8.5. Channels............................................................................. 80
3.8.6. Modify display ................................................................... 81
3.8.7. y-axis .................................................................................. 82
3.8.8. Key ..................................................................................... 85
3.9. Alarm Event Viewer .................................................................... 86

3.10. Recall Stored Data ..................................................................... 86


3.10.1. Selecting scans ................................................................. 87
3.10.2. Edit recall display.............................................................. 88
3.10.3. Add recall data trend ........................................................ 88
3.10.4. Edit recall data trend ........................................................ 88
3.10.5. Delete recall data trend..................................................... 88
3.10.6. Print .................................................................................. 88
3.10.7. Comment .......................................................................... 88
3.10.8. Exit ................................................................................... 88
3.10.9. Stepping through files ...................................................... 89

Section 4. Recipes ........................................................................ 91


4.1. Recipe types ................................................................................. 91

4.2. Adding Recipes ............................................................................ 92

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LP101012 Rev 2.00 Page iii
4.3. Copying Recipes .......................................................................... 93

4.4. Recipe Setup................................................................................. 93


4.4.1. Bar Graph Scan Configure ................................................. 94
4.4.2. Peak Jump Scan Configure................................................. 97
4.4.3. Disk Store Settings ........................................................... 100
4.4.4. Trigger Settings ................................................................ 104
4.4.5. Hold Settings .................................................................... 106
4.4.6. Background Settings......................................................... 107
4.4.7. Baseline Settings .............................................................. 109
4.4.8. Action Channel Settings ................................................... 110
4.4.9. End of Scan Actions ......................................................... 112
4.4.10. Start and End of Recipe .................................................. 121
4.4.11. Bar Graph Display Settings ............................................ 123
4.4.12. Peak Jump Display Settings ........................................... 127
4.4.13. Faraday Calibrate Settings.............................................. 131
4.4.14. Multiplier Calibrate Settings .......................................... 132
4.4.15. Leak Check Settings ....................................................... 134
4.4.16. Analog Settings .............................................................. 136
4.4.17. Set Access....................................................................... 138
4.5. Edit Display................................................................................ 139

4.6. Add Trend .................................................................................. 140


4.6.1. Edit Trend......................................................................... 146
4.6.2. Delete Trend ..................................................................... 147
4.7. Delete Recipe ............................................................................. 147

Section 5. RGA Operations...................................................... 149


5.1. Filaments .................................................................................... 149

5.2. Degas.......................................................................................... 149

5.3. Leak Check................................................................................. 151


5.3.1. Running a leak check recipe............................................. 151
5.3.2. Edit settings ...................................................................... 152
5.4. Analog ........................................................................................ 156

5.5. Analog Settings Dialog Box....................................................... 158

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LP101012 Rev 2.00 Page iv
5.6. Instrument Tuning...................................................................... 160
5.6.1. Setting the resolution........................................................ 162
5.7. Utilities....................................................................................... 164
5.7.1. Build baseline................................................................... 164
5.8. Preferences ................................................................................. 165
5.8.1. Miscellaneous................................................................... 166
5.8.2. Disk header....................................................................... 167
5.8.3. Software switches............................................................. 169
5.8.4. RVC settings .................................................................... 170
5.9. Copying Recipes Between PCs.................................................. 171

Section 6. DDE Links ................................................................ 173


6.1. Introducing DDE........................................................................ 173

6.2. DDE Commands ........................................................................ 174

Section 7. Macros ...................................................................... 177


7.1. Introducing Macros .................................................................... 177
7.1.1. Macro Types..................................................................... 177
7.1.2. Recipe Macros.................................................................. 177
7.1.3. Reminder Macro............................................................... 177
7.1.4. Startup Macro................................................................... 178
7.1.5. Shutdown Macro .............................................................. 178
7.1.6. Hidden Macro................................................................... 178
7.2. Anatomy of a Recipe Macro ...................................................... 179

7.3. Writing a Macro ......................................................................... 180

7.4. Macro Function Extensions ....................................................... 181


7.4.1. Functions .......................................................................... 181
7.5. Subroutines ................................................................................ 184
7.5.1. Data Subroutines .............................................................. 184
7.5.2. Alarm Subroutines............................................................ 185
7.5.3. RVC Control Subroutines ................................................ 186
7.5.4. Input/Output Subroutines ................................................. 186

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LP101012 Rev 2.00 Page v
7.5.5. Recipe control Subroutines............................................... 186
7.5.6. Display control ................................................................. 187
7.5.7. Disk Subroutines .............................................................. 189
7.5.8. NT I/O Subroutines .......................................................... 189
7.5.9. Miscellaneous ................................................................... 190
7.6. Macro Variables ......................................................................... 190
7.6.1. Read Only Variables......................................................... 190
7.6.2. Read/Write Variables ....................................................... 191

Appendix A. Glossary of Vacuum Terms............................... 193

Appendix B. Interpretation of Data ........................................ 199

Appendix C. Cracking Pattern Table ..................................... 205

Appendix D. Software Versions............................................... 207

Appendix E. Version 1.64......................................................... 209


E.1 Overview...................................................................................... 209

E.2 E-mail .......................................................................................... 209


E.2.1 Configuration ..................................................................... 210
E.3 Sending E-mail from a Recipe..................................................... 212
E.3.1 Sending E-mail using the Macro Language ....................... 212
E.4 Multiple Calibrations ................................................................... 213

E.5 High resolution timing ................................................................. 214

E.6 Miscellaneous additions............................................................... 214

Document Data.......................................................................... 217

Index........................................................................................... 219

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page vi
Errata and addenda

19 Oct. 2000
Rev 2.10
MKS Instruments name change only.

This page is deliberately left blank.

Errata and addenda


Process Eye 1.6 Manual
LP101012 Rev 2.01 Page a
This page is deliberately left blank.

Errata and addenda


Process Eye 1.6 Manual
LP101012 Rev 2.01 Page b
Section 1.
Introducing Process Eye 1.6
This paper manual has been generated from the Process Eye 1.6 Help
Manual reference LP105004 Rev 2.00 which is a paperless manual run on
the Windows Help Viewer. Some of the formating has been changed but the
text has not been altered, for this reason the section below makes little sense.

1.1. Process Eye 1.6 Help Manual


Document Title: Process Eye 1.6 Help Manual
Document Reference: LP105004
Current Issue: Rev 2.00
Issue Date: 1 June 2000

We have always endeavoured to provide comprehensive and accurate


manuals to accompany our entire range of instruments, using the most up to
date Word Processing software to produce printed manuals. However, with
evermore stringent standards in cleanrooms and laboratories the use of
paper, even cleanroom paper, is at best frowned upon if not banned
altogether.

This is a paperless form of the manual which was shipped with your
software package and is based on the original manual:
LP101012 Rev 1.10
August 1998

1.2. Introduction
1.2.1. Process Eye 1.6
This manual has been written to accompany the Process Eye version 1.6
software package.
Process Eye 1.6 is designed to operate with Spectra Microvision Plus RGA
control units and HPQ-2 instruments. It will not operate with any other
control unit in the Spectra range.
Process Eye 1.6 will only run under the Windows 95 operating system, no
other version of Windows is suitable.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 1
1.2.2. Overview
The Process Eye package is designed to monitor partial pressures and,
optionally, analog and digital inputs in a production environment where it is
essential to observe and record the current status of the process, while
simultaneously reviewing historical events in both the current and archived
runs. In addition complex comparisons, including statistical comparisons,
may be made in real time.

The data acquisition is fast and covers a wide dynamic range of pressures so
that some or all of the partial pressures, along with analog and digital inputs,
can be measured and stored while only data of interest is displayed.

The package is designed to be configured by the process engineer who can


set up a number of pre-set configurations called “recipes” for various
production requirements which can then be selected by an operator with a
single click on a named button.

1.3. Getting Help


We are always pleased to provide assistance where we can. If you are
experiencing any difficulties or need help please feel free to call your local
Spectra facility and ask for the Customer Support Group. Please have the
following information ready so that our technical staff may help you quickly
and effectively:

the serial numbers of the analyser, Microvision Plus or HPQ-2 control unit;
each of these numbers begins with the letters “LM”

the Process Eye software version number; this is written on the floppy disk
which the software came on and can also be found on screen by selecting
Help | About from the menu bar in the Process Eye - Select Mode window.

1.4. About This Manual


This manual was originally written to support version 1.60 Process Eye
software, although, the information will be applicable to later 1.6 versions.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 2
1.4.1. Text Conventions
As far as possible Process Eye uses a format and conventions common to
other Windows software packages. The following text formatting
conventions are used throughout this manual:

Italic type
Windows terms. You can refer to your Windows manual for more
information

Bold type
names on buttons
names of file menus
Words or characters you should type. Example if the manual instructs you to
type cd spectra you type the lowercase letters cd followed by a space and
the lowercase letters spectra.
names within dialog boxes
names of keys on the keyboard

1.4.2. Keyboard Conventions


Function key names are written in uppercase letters. Example, the Control
key is written CTRL, the Escape key ESC.

Where keys need to be pressed simultaneously the + sign is used. Example


ALT+F1 means hold down the ALT key while pressing the F1 key.

Where keys are pressed in sequence commas are used. Example: SPACE,
C, D would mean press the SPACEBAR then press C then press D.

Where one of the four arrow keys is referred to the appropriate symbol is
used enclosed in parentheses. Example, up arrow is written (↑).

1.4.3. Mouse Conventions


Process Eye uses both left and right mouse buttons and we assume the
mouse is configured in the standard manner.

Point
Position the mouse pointer so that it rests on the object to which you have
been instructed to point.

Click

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 3
Press then immediately release the left mouse button without moving the
mouse.

Double Click
Press then immediately release, press again then immediately release the left
mouse button without moving the mouse.

Right click
Press then immediately release the right mouse button without moving the
mouse.

Drag
Point to the object to be moved, press and hold down the left mouse button
whilst moving the mouse to reposition the object.

1.5. Definitions
Below are descriptions of some of the common terms used in this manual.
Bar Graph
A histogram display of a scan measuring partial pressures for consecutive
masses anywhere within in the mass range of the instrument.
Peak Jump
A histogram display of a scan measuring partial pressures for between one
and fifteen non-consecutive masses. It may optionally include the
measurement of analog and digital inputs.
Trend
This is a plot of the partial pressure, total pressure, analog input, digital input
or user defined (Action) channel with time.
Scan Parameters
These refer to the fundamental scan settings and determine the range within
which data will be acquired. It is not possible to view at any time data which
does not fall within the Scan Parameter envelope. This includes masses,
pressure ranges and duration of acquisition. The Scan Parameters are defined
when a recipe is created (Added/Copied/Edited) and cannot be altered
during a recipe run.
Start-up Options
There are some parameters which can automatically perform certain
functions each time the process is run. The Start-up Options include:-
waiting for a Trigger to become true, prompting the user before turning on
the filament etc. They are defined when a recipe is created

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 4
(Added/Copied/Edited) and cannot be altered when the recipe is running.
Display Parameters
These parameters define how the scanned data is to be displayed. Default
settings are defined when the recipe is created and they may be altered
during the run. They include Axis type (Log/Lin), X and Y axis ranges time
window in Trend etc.
Recipe
A Recipe consists of the Scan Parameters, start-up options and the Display
Parameters.
Access Levels
This is the basis of the Process Eye security system which by using
passwords allows three levels of access to the various features.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 5
This page is left blank on purpose.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 6
Section 2.
Installation
2.1. Initial Checks
This section deals with installing and configuring the Process Eye 1.6
software and how to connect RGA control units to your PC. You should
refer to the control unit manual for details of how to install the analyser into
your vacuum chamber and how to connect up the analyser and control unit.
Please follow each part of this section carefully and only skip those parts
which do not specifically apply to your particular system. If you have any
questions or experience any difficulties, please feel free to contact your local
Spectra facility where help is available.

2.1.1. Unpacking
When you receive your equipment carefully check each item before
removing the wrapping to ensure that no physical damage has occurred
during shipment. Also make sure all items have been received by checking
against the enclosed packing slip.

If there has been obvious damage during shipment or if there are items listed
on the packing slip as shipped which are not in the box, immediately contact
your local sales/service representative.

Most insurance claims for shipment damage must be placed within 7 days
from the date of delivery - in WRITING. So don't delay Check it out !!.

The Process Eye 1.6 software is supplied on five High Density 3.5 inch
floppy disks. The disks are shipped in clear plastic wallets held in the white,
three ring manual binder. So, you should have found them on your way to
this point in the manual.

2.1.2. Making backup disks


Before you do anything else you should generate backup disks from the
program disks supplied. To do this use the MS-DOS DISKCOPY utility or
Windows Explorer (or any other method you are familiar with) to make a
copy of the original disks. Keep the original disks in a safe place and only

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 7
use the copies.

2.2. Overview
This section is designed to give an overall picture of the complete Process
Eye system.

2.2.1. Instrument Architecture


The complete Process Eye 1.6 system has four basic elements:

Analyser
This is the part which fits into the vacuum chamber.

Control Unit
The Microvision Plus or HPQ-2 electronic unit containing the power
supplies, including the RF power supply, and data acquisition system which
plugs directly onto the analyser and connects to the PC via a serial cable

Control Unit Power Supply


An external mains power supply provides low voltage power to the
Microvision Plus or HPQ-2 control unit, alternatively power may be
provided by an RVC1A.

Computer
This is the PC which runs the Process Eye 1.6 software.

In this manual any references to the Microvision Plus control are equally
applicable to the HPQ-2 control unit. Where there are differences these will
be explained.

The minimum requirements for running Process Eye 1.6 with a single RGA
control unit are listed in the table below. This is however only the minimum
requirement and the overall performance of Windows 95 and hence Process
Eye 1.6 can be improved considerably by increasing the specification of the
PC. Multi-headed systems are likely to require a higher specification PC,
please contact your local Spectra facility for advice.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 8
Component Description
Microprocessor Pentium 100
RAM 16MB
Hard Disk Required with at least 20MB of free space
Video Standard VGA 640 x 480 16 colour
Microsoft Windows Windows 95. True Type fonts installed.
Mouse A mouse is required.
Serial Port Required to connect the control unit to the PC.

2.3. PC to Control Unit Connection


The Microvision Plus control unit connects to the PC using a serial interface
which may be RS232, RS422 or RS485.

2.3.1. RS232
CAUTION
You must only use RS232 cables supplied with the equipment. We cannot
guarantee that other manufacturers cables will work correctly in Spectra
RGA systems.

If you must use an RS232 cable not supplied with the equipment then use
the cable supplied as an extension to your cable ENSURING THE CABLE
SUPPLIED WITH THE EQUIPMENT IS PLUGGED INTO THE PC.

Most PCs are supplied with 2 serial ports called Com1 and Com2. The
connectors for Com1 and Com2 are usually positioned on the rear of the PC
and may be either 9-way or 25-way male D-type connectors. At the time of
writing most PCs now seem to have a 9 way D-Type for Com1 and a 25 way
D-Type for Com2. If you have a problem identifying these connectors you
should refer to the documentation supplied with your PC or contact the PC
manufacturer or distributor directly. Often Com1 is used to connect the
mouse leaving Com2 free to connect peripheral devices. If a bus mouse is
used both Com1 and Com2 will be free to connect peripheral devices.

If you are running a single Process Eye head you would normally use one of
the standard serial ports (Com1 or Com2) on the PC. If they are both being
used already then you will need to fit a 4 port serial card.

If you are configuring a two headed system then you can use the built-in
ports Com1 and Com2 for the Process Eye control units if you are using a

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 9
bus mouse otherwise, you will need to fit a 4 port serial card.

If you are running three or more RGA heads you are going to have to fit at
least one or maybe two 4 port serial cards in your PC.

If you do need to install a four port serial card you should do so now before
proceeding to install the software. Once you have installed the 4 port serial
card you will need to configure Windows 95 before you install the Process
Eye 1.6 software, please see section Error! Reference source not found..

The PC to control unit connection is made using the serial cables supplied
with the instrument. The standard cable to connect a Microvision Plus to the
PC is a 9-way D plug to 9-way D socket RS232 cable and a 25-way D
socket to 9-way D plug RS232 cable is available as an option. In all cases
the standard cable length is 3 metres (9 feet) longer cables are available on
request, please contact your local Spectra facility.

Once you have connected the PC to the Microvision Plus control unit(s)
using the serial cable(s) make a note of the port(s) you have used, you will
need this information later.

2.3.2. RS422
RS422 is a differential serial interface allowing greater transmission distance
than RS232. If you are using RS422 you will need to use a 4 port serial card
which has been configured for RS422 operation regardless of the number of
Microvision Plus units being connected. The 4 port serial card used for
RS422 is the same card used for RS232 BUT it is configured very
differently. The RS422 serial cable is not the same as the RS232 cable and
the two are not interchangeable.

The PC to RGA control unit connection is made using the RS422 serial
cable supplied with the instrument. The RS422 cable to connect a
Microvision Plus to the PC uses a 9-way D plug to 9-way D socket. Connect
the 9 way D-plug to the 9 way D-socket labelled RS422 / 485 on the rear of
the Microvision Plus. The standard cable length is 2 metres (6 feet) longer
cables are available on request, please contact your local Spectra facility.

Once you have connected the PC to the Microvision Plus control unit(s)
using the serial cable(s) make a note of the port(s) you have used, you will
need this information later.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 10
2.3.3. RS485
Process Eye 1.6 and Microvision Plus control units support multi-drop
RS485 interface. With this system a theoretical maximum 30 Microvision
Plus units may be daisy-chained together using RS485 cables and connected
to a single RS485 port.

You must used an RS485 card supplied by Spectra, we cannot guarantee


other manufacturers cards will work satisfactorily in Process Eye systems.
you must use RS485 cables supplied by Spectra and these cables are not
interchangeable with RS232 or RS422 cables. As more control units are
added to the RS485 port the overall performance of the system will degrade
since all data from all control units is multiplexed down a single cable. If
you intend to connect more than 16 Microvision Plus control units to a
single RS485 port please contact your local Spectra facility for advice.

The PC to Microvision Plus connection is made using the RS485 serial cable
supplied with the instrument. The RS485 cable uses a 9-way D plug to 9-
way D socket. Connect the 9 way D-socket to the 9 way D-plug on the
interface card. Connect the other end of the cable to the 9 way D-socket
labelled RS422 / 485 on the rear of the Microvision Plus.

Connect the second RS485 cable to the 9 way D-plug labelled RS422 / 485
on the rear of the first Microvision Plus. Connect the other end of the cable
to the 9 way D-socket labelled RS422 / 485 on the rear of the second
Microvision Plus. Carry on in this way until all the Microvison Plus units are
connected. The last Microvision Plus unit will only have one RS485 cable
connected to it.

The standard RS485 cable length is 2 metres (6 feet) longer cables are
available on request, please contact your local Spectra facility.

The RS485 card will be supplied with its own manual and will be correctly
configured for your system.

2.4. Four Port Serial Card


This section of the manual details the 4 port serial card which maybe
supplied as part of systems using an RS232 or RS422 serial interface. This
section does not apply to systems using RS485, such systems use a different
type of serial interface card.

Process Eye 1.6 Manual


LP101012 Rev 2.00 Page 11
If you are using Com1 or Com2 you can skip this section.

2.4.1. Ports and Addresses


Before describing the 4 port serial card it is worth explaining a little about
the physical address of a port and its logical name.

Each port is identified by a unique base address and an IRQ number which
can be “shared” between ports. This information constitutes the physical
address of a port and is configured on our 4 port serial card by setting
jumpers. The possible settings for base address and IRQ selection are listed
in the following tables.

Logical names take the form of COM1, COM2 etc. and are used by the PC
as a short hand to refer to a physical address (base address and IRQ). In the
IBM PC and compatible computers a traditional relationship exists for
COM1 to COM4 which is shown in the table below. The relationship is not
physically fixed and it is quite possible to change the physical address
allocated to any of these logical names using software. In fact the Configure
program supplied with Process Eye 1.6 allows you to do this and assign
logical names to the 4 extra ports on our serial card.

Port Address IRQ


Com 1 03F8h to 03FFh 4
Com 2 02F8h to 02FFh 3
Com 3 03E8h to 03EFh 4
Com 4 02E8h to 02EFh 3

2.4.2. Card Description


The 4 port serial card (sometimes referred to as a Comms Card) has been
designed to enable Spectra RGA control units to be connected to a PC for
multi headed RGA applications. If you are installing a multi headed Process
Eye system you will almost certainly need to fit a comms card in your PC.
The card has been designed to provide either four RS232 or four RS422
ports. The configuration for the two interface standards is very different and
the card will have been specifically setup for one or the other.

The majority of PCs have two built in serial ports, Com1 and Com2. Com1
is usually used to connect a mouse leaving Com2 free to connect an RGA
control unit in single headed Process Eye system. If both Com1 and Com2
were being used a 4 port serial card would have to be fitted to run a single

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head.

In two headed systems the control units will usually be connected to a 4 port
serial card leaving Com1 for the mouse and Com2 free. If a bus mouse is
used then it is possible to connect the two control units to Com1 and Com2
and not fit a serial card.

The 4 port serial card is a flexible serial interface board which may be set up
in various configurations depending on the application. It should be supplied
correctly configured for your application but before fitting the card it is
worth checking the configuration. All the necessary information for
configuring the card is given in the following section.

The 4 port serial card is populated according to the number of ports


requested, one port is required for each control unit with four ports being
available on a fully populated card. To determine how many ports are fitted
look to see how many of the large 40 pin ICs (IC1, IC7, IC13, IC16) are
fitted, one is required for each port. Also check that these ICs carry the
identification PC16550DN or similar (only the numbers 16550 are
important).

The 4 port serial card will have been set to the requested serial interface
specification, RS232 or RS422. To check this, for RS422 IC5, IC9 and IC11
will not be fitted and links Lk1 to Lk8 will be fitted, otherwise, the board
will be configured for RS232.

Also note the position of the connectors for the four ports on the serial card:

Port 1 PLG 5 mounted on the PCB closest to the edge connector


Port 2 PLG 4 mounted on the PCB furthest from the edge connector
Port 3 fitted to a flying lead connected to PLG 6 on the PCB
Port 4 fitted to a flying lead connected to PLG 2 on the PCB

2.4.3. Setting the physical address


The Physical Address is set by the three jumpers J8, J9 and J13. You should
check against the following tables to ensure the required configuration is
obtained.

Four setting options are available for the address decoding of the four ports.
Jumper J9 is used to select the required option:

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BASE ADDRESS SELECTION (JUMPER J9)
J9 PORT 1 PORT2 PORT 3 PORT 4
no link 03F8 02F8 03E8 02E8
3–4 0280 0288 0290 0298
1–2 02A0 02A8 02B0 02B8
1 - 2 & 3 - 4 03E8 02E8 02A0 02A8

Note that there are 8 bytes per port.

Each of the four ports generates its own IRQ (interrupt request). Under
normal circumstances the four IRQs are “ORed” together (something you
cannot do with propietary serial cards) and connected to a single IRQ line.
Jumper J8 sets which IRQ line is selected. The table below shows the
various options:

PORTS 1 to 4 IRQ SELECT


J8 IRQ
1-2 IRQ 3
3-4 IRQ 4
5-6 IRQ 5
7-8 IRQ 7
9 - 10 IRQ 2

The IRQ setting for Port 1 has the additional capability of connection to IRQ
4 or to the same IRQ as the other ports. This is governed by the setting of
jumper J13:

PORT 1 IRQ SELECT J13


J13 IRQ
1-2 same as ports 2,3 and 4
2-3 IRQ 4

Jumpers: J1, J2, J3, J4, J5, J6, J7, J10, J11, J12, J14 & J15 control the
handshaking lines for the various ports. The setting of these links should not
be altered.

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2.4.4. Choosing the configuration
The configuration you choose will depend on your PC as well as the number
and type of peripheral devices you have connected. The two important
things to note are:

you will have to allocate a Comms Port for each RGA control unit you want
to connect

you need one IRQ for all the RGA control units connected (regardless of the
number) but no other devices must use this IRQ.

The majority of PCs have two built in serial ports usually referred to as Com
1 and Com 2 and use addresses 03F8-03FF and 02F8-02FF respectively. The
interrupt request lines used for Com 1 and Com 2 are IRQ4 and IRQ3
respectively.

Great care should be taken when selecting port numbers (Com1 to Com12)
and IRQ lines since their use may vary from one type of “compatible” PC to
another. Before fitting a 4 port serial card or attempting to install Process
Eye you should be familiar with the configuration of your PC.

Our standard configuration for the 4 port serial card is:

J9 link 3 to 4 which sets


Port 1 address 0280 to 0287
Port 2 address 0288 to 028F
Port 3 address 0290 to 0297
Port 4 address 0298 to 029F

J13 link 1 to 2 which sets Port 1 to the same IRQ as Ports 2 to 4

J8 link 5 to 6 which selects IRQ 5 for the four Ports.

Unless you specified otherwise your serial card will have been supplied with
the above configuration.

The serial card should be installed in accordance with the PC manufacturers


instructions for the installation of plug-in cards. Note that you will need
TWO free slots for each comms card.

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2.5. Configuring Windows95
There is no software available for configuring serial cards under Windows
95. All the configuration can be done via the Windows95 control panel. Step
3 describes configuring one comm. port. For each card step 3 must be
repeated upto 4 times (once for each port).

Select the icon from Control Panel.

At the first page in the Add New Hardware Wizard......


click on the Next> button.

At the second page, select ‘No’ to the question ‘Do you want Windows to
search for your new hardware?’

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and then select Next>.

At the third page select Ports (COM & LPT)

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as the type of hardware to install, and then click on the Next> button.

At the fourth page, select (Standard port types) for the Manufacturer and
Communications Port for the Model

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and then select Next>.

At the fifth page Windows will come up with some likely hardware settings
for the new port, these will most likely be wrong but at this stage they
cannot be changed.

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Just select Next> to accept the settings.

At the sixth and final page...

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click on the Finish button.

You will see the following message;

Select No so that the machine does not re-boot.

Repeat the above steps for each comm. port that you want to add.

Once all the ports are added, all that remains is to configure the correct
settings.

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Select the icon from Control Panel

Select the Device Manager tab at the top of the window and then expand the
Ports (COM & LPT) branch by clicking on the + sign....

For each comm. port that you added in the previous steps, select it and carry
out the following steps.

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Click on the Properties button and select the Resources tab at the top of the
window...

Change the Setting based on: setting to ‘Basic configuration 8’. Once this is
done you will be able to change the Input/Output Range (Base address) and
Interrupt Request (IRQ) settings by double clicking them and selecting the
appropriate values for the configuration of your comms card.

When the settings are correct, click the OK button. The following message
will appear :

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If you still have more ports to configure then choose No and repeat the steps
above. If it is the last port left to configure then you can select Yes and the
machine will shut down.

As long as the settings on the card match the settings that you have entered,
when you reboot the ports will work OK.

2.6. Installing Process Eye


Versions of Process Eye 1.6 exist for both Windows 95 and Windows NT.
Versions are not interchangeable and you must have the correct one for your
operating system. Please refer to the relevant help topic.
Installation 95
Installation NT

2.7. Installation 95
Before installing the Process Eye software you should ensure that any serial
cards required are installed in the PC and configured to run under Windows
95.

2.7.1. Running INSTALL


The SETUP.EXE program is included on program disk 1and should be used
to install Process Eye onto your hard disk. To install Process Eye follow the
procedure listed below:

Run up Windows

Insert program disk 1 in drive A (or B if you prefer)

Choose Run … from the Start Menu available by clicking on the Start
button on the Taskbar.

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Type a:setup (or b:setup if you are using the B drive) or use the Browse …
button to select the file SETUP.EXE

The first page of the Process Eye Setup Wizard will be displayed. Read the
instructions and when you are ready click on the Next> button.

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The second page of the Process Eye Setup Wizard will be displayed where
you may specify the directory in which to install the Process Eye software.
We strongly recommend you to use the default setting of C:\Program
Files\Spectra\Process Eye. When you are ready click on the Next> button.

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The third page of the Process Eye Setup Wizard will be displayed where you
may specify the folder in which to place the Process Eye shortcuts. We
strongly recommend you to use thje default setting of Process Eye D1.6xx.
When you are ready click on the Next> button.

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The fourth page of the setup wizard will be displayed after you have read the
instructions click on the Next> button to begin installing the Process Eye
software.

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You will be prompted by the Insert Disk dialog box to use the other program
disks. It is possible that you will not be required to use all five disks.

When the installation is complete the Configure dialog box will be


displayed. Before you can use Process Eye the configuration procedure
described in section Configuring Process Eye must be completed. You may
wish to configure Process Eye at this stage in which case follow the
instructions in the next section or close the Configuration window by
clicking on the Exit button.

The final page of the setup wizard will be displayed. Click on the Finish
button.

2.8. Installation NT
This Help Topic is a copy of the document LP103021 Rev 1.00 19
November 1998 titled Process Eye 1.61 for Windows NT Manual
Supplement.

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This section should only be used if you are installing Process Eye version
1.61 or later on a Windows NT computer.
This manual must be used in conjunction with the main Process Eye 1.6
Manual reference LP101012 Rev 1.10 or later. The information in this
manual supplement replaces section 2.5 in the main manual.

2.8.1. System requirements


Process Eye V1.61 is designed for Windows NT 4.0 and either SP3 or SP4
must be installed.

A Pentium class IBM compatible PC with 32MB of RAM is recommended.

2.8.2. Before you install


To perform an installation you must be logged on with Administrator rights.
If you are not then log off and log back on as an Administrator. When
Process Eye for NT has been installed it may be operated by any user. We
recommend creating a user with minimum permissions called “RGAUser”
(without the quotes) and a blank password.

You must use “Custom” installation if the PCs serial ports are not to be used
exclusively by the RGA(s) or if PC based Analog or Digital input/output is
required.

The PC must be rebooted before communications may be established with


an RGA (the Config program may be used to set Ports and Instruments but
the "Connect" function will not work until the PC has been rebooted.) The
install program will offer to reboot the PC at the end of the install.

Before installing the Process Eye software you should ensure that any serial
cards required are installed in the PC and configured to run under Windows
NT.

2.8.3. Running INSTALL


The SETUP.EXE program is included on program disk 1and should be used
to install Process Eye onto your hard disk. To install Process Eye follow the
procedure listed below:

1 Run up Windows NT

2 Insert program disk 1 in drive A (or B if you prefer)

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3 Choose Run … from the Start Menu available by clicking on the Start
button on the Taskbar.

4 Type a:setup (or b:setup if you are using the B drive) or use the
Browse … button to select the file SETUP.EXE

The first window in the Process Eye Setup Wizard will be displayed as
shown in below.

5. Once the InstallSheild wizard has been loaded the second window will
be displayed as shown below.

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Read the instructions then click on the Next> button.

6. The third window in the Process Eye Setup Wizard will be displayed as
shown in below.

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Read the installation notes carefully. If your system meets the requirements
specified in the notes click on the Next> button to continue.

7. The fourth window (shown below) in the setup allows you to specify the
directory where the Process Eye software will be stored.

Click on the Browse … to open a standard Choose Directory window.

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We recommend you to use the default directory C:\Program
Files\Spectra\Process Eye

8. The fifth window shown below allows you to choose the type of
installation you wish to perform.

Use “Custom” installation if the PCs serial ports are not to be used
exclusively by the RGA(s) or if PC based Analog or Digital input/output is
required otherwise, use the Typical install.

Click on the Next> button to display the Select Program Folder window. If
you choose Custom install the Select Components window will be displayed
as shown below.

If you have installed a Leda comms. card or an RS485 card un-check the
Override Serial Port Usage check box.

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Click on the Next> button.

9. The Select Program Folder window allows you to change the name of
the folder where Process Eye will be stored. The default setting is
Process Eye for NT which we recommend you keep.

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Click on the Next> button.

The last window of the setup will be displayed. The current setting will be
shown which you may check. Click on the Next> button to continue.

You will be prompted to insert disks 2, 3 and 4 at the appropriate time.

Once the install is complete the Configure dialog box will be displayed.
Follow the instructions in the main Process Eye manual.

You will be prompted to re-boot the PC to complete the installation when


you close the Configure dialog box.

2.8.4. Serial port usage


Serial port usage under Windows NT is a little more complex than under
Windows 3.1 or 95. If the RGA is going to use one of the standard
communication ports (Com1, Com2 etc.) then the NT serial driver needs to
be replaced. This is done automatically in the "Typical" and "Compact"
installations. With the NT serial driver replaced by our own nothing except
the RGA, e.g. a serial mouse can use the ports.

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The "Custom" install allows the option to leave the standard serial ports
under NT's control. If this is selected the RGA(s) must be connected either
via non-standard RS232 communication port(s) such as the “Leda Comms”
Card or via an RS485 card.

2.8.5. PC based analog and digital I/O


If PC based Analog or Digital I/O is required the "Custom" install option
must be used and the "PC Based Analog or Digital I/O" option checked.

Any Macro using PeekPort and/or PokePort must be modified. The


declaration of PeekPort and/or PokePort must be deleted and any references
to PeekPort and/or PokePort replaced by references to NTPeekPort and
NTPokePort respectively.

2.9. Configuring Process Eye


Before you can use Process Eye the system must be configured. The
configuration program is a utility program that allow several important
functions to be performed. Since it should not be necessary to use these
functions regularly they have been kept separate from the Process Eye
application. It is likely that these functions will only be used by a system
administrator for installation, diagnosing and upgrading the system.

The configuration program allows you to easily perform the steps required to
configure the RGA for use on your PC. It is necessary to configure the
Process Eye software so that it is aware of the type and details of the serial
interface which is to be used to communicate with the MicroVision Plus
control unit. It also allows you to connect to a control unit and see the
version numbers and title of the firmware running in the control unit. This is
useful for testing that you have correctly configured the system. A download
facility is also included which allows a new version of the firmware to be
loaded if an upgrade is required.

The firmware in the control unit is comprised of two parts; the Core and the
Application. The core is basically a simple operating system which provides
basic services to the application. Under normal circumstances the core
should not need upgrading. The application may change in the future if new
features are added.

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If you have purchased either a 4 port RS232 or 2 port RS485 card with your
system then the software will automatically be configured to use the factory
default settings for the type of card purchased. You should only need to alter
these settings if they conflict with other hardware installed in your PC.

There are two parts to the configuration. The first is to select the serial port
to be used and then to assign one or more MicroVision Plus control units to
that port. If you are using a RS232 or RS422 serial port then you can only
assign one control unit to it. However, if you are using the multi-drop RS485
then you may assign up to the theoretical maximum of 30 control units.

Note: As more control units are added to the RS485 port the overall
performance of the system will degrade since all data from all control units
is multiplexed down a single cable. When control units are added to a port
the option to create shortcuts is available. Shortcuts may be added to the
Desktop, to the start menu and to the program group.

As part of the RGA Process V1.60 installation process the Configure


program will be run. It will also be installed and an shortcut created so that it
may be run at any time in the future. The program file CONFIG.EXE will be
copied into the install directory for Process Eye.

The following sections describe various standard Process Eye systems and
are intended to allow the user to quickly configure their system. A more
detailed explanation of the configure utility can be found in Detailed
Configuration .

2.9.1. Quick Start


The following sections list the instructions for the various installation
options. Choose the section that describes your installation and then follow
the instructions listed. Perform each step in the order listed unless the
instructions indicate otherwise.

During this process you may need to know the serial numbers of all the
Microvision Plus control units and to which serial port they are connected. If
you are performing a custom configuration you will also need to know the
serial port's IRQ and base address. These settings can be obtained by
checking the serial cards physical configuration (Jumper and/or Switch
settings) against the documentation provided with the Serial card.

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The following instructions assume that the Process Eye software has been
installed using the default sub-directory and program group. If you installed
it in a different location then substitute the appropriate sub-directory and
group names were necessary.

One Microvision Plus


Two Microvision Plus Units
One Microvision Plus using RS485
Microvision Plus with a Comms Card

2.9.2. One Microvision Plus


The following instructions describe the installation of a single Microvision
Plus control unit using one of the standard PC RS232 comms ports, Com1 or
Com2.

Step 1
If Configure is not already running, start Configure from the Start menu.
Configure should be located in Start | Programs | Process Eye V1.61

Step 2
Click on the Ports button in the Setup Panel. If RGAPort1 is listed proceed
to step 4

Step 3
Click on the Add button. In the Name field type RGAPort1 then click on

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the OK button. It is essential that the name begin RGAPort.

Step 4
Click on the Edit button. Select either Standard Com1 or Standard Com2 as
required from the Serial Port list box.

Step 5
Click on the OK button, then click on the Close button.

Step 6
Click on the Instruments button in the Setup panel. If the Instrument panel
contains the serial number of your Microvision Plus then proceed to step 7a
otherwise proceed to 7b

Step 7a
Highlight the serial number by clicking on it.
Click on the Edit button.
Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.
Check the required boxes in the Create shortcut in panel. Shortcuts to run
the selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click the OK button.

Proceed with step 8

Step 7b
Click on the Add button.

Enter the full serial number of the next MicroVision Plus e.g. LM70-
00197001 in the Serial number field.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

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Check the required boxes in the Create shortcut in panel. Shortcuts to run the
selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click on the OK button.

Step 8
Click on the Close button.

Step 9
This step is optional and can be performed at a later stage if required.
Proceed to step 11 to omit the test.

If you have the Microvision Plus connected and powered up then you can
check that you can communicate with it by following these instructions.:-

Click on the Connect button.

Select (click) the serial number of the Microvision Plus to test from the
Instruments panel.

Click on the OK button.

After a few seconds the Connect form will unload and the Connection
details panel on the Configure form will indicate if the connection was
successful. If a connection could be made then details about the Core and
Application version will be displayed.

Step 10
Click on the Disconnect button.

Step 11
Click on the Exit button to close the configure program. The Process Eye
software has now been configured for the Microvision Plus available

2.9.3. Two Microvision Plus Units


The following instructions describe the installation of two Microvision Plus
control units using the standard PC RS232 comms ports, Com1 or Com2.
Com1 and Com2 must be free which usually necessitates using a bus mouse.

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Step 1
If Configure is not already running, start Configure from the Start menu.
Configure should be located in Start | Programs | Process Eye V1.61. The
Configure window will be shown.

Step 2
Click on the Ports button in the Setup Panel. If RGAPort1 and RGAPort2
are listed proceed to step 4

Step 3
Click on the Add button. In the Name field type RGAPort1 then click on
the OK button.
Click on the Add button. In the Name field type RGAPort2 then click on
the OK button.

Step 4
Select RGAPort1 in the Ports panel.
Click on the Edit button. Select Standard Com1 for RGAPort1 from the
Serial Port list box.
Click on the OK button.
Select RGAPort2 in the Ports panel.
Click on the Edit button. Select Standard Com2 for RGAPort2 from the
Serial Port list box.
Click on the OK button.

Step 5

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Click on the Close button.

Step 6
Click on the Instruments button in the Setup panel. Select RGAPort1 from
the Ports panel. If the Instrument panel contains the serial number of the
Microvision Plus connected to that port then proceed to step 7a otherwise
proceed to 7b

Step 7a
Highlight the serial number by clicking on it.
Click on the Edit button.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run
the selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click the OK button.

Proceed with step 8

Step 7b
Click on the Add button.

Enter the full serial number of the next MicroVision Plus e.g. LM70-
00197001 in the Serial number field.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run the
selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

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Click on the OK button.

Step 8
Repeat steps 7 and 8 for RGAPort2.
Click on the Close button.

Step 9
This step is optional and can be performed at a later stage if required.
Proceed to step 11 to omit the test.

If you have the Microvision Plus connected and powered up then you can
check that you can communicate with it by following these instructions.:-

Click on the Connect button.

Select RGAPort1from the Ports panel.

Select the serial number of the Microvision Plus to test from the Instruments
panel.

Click on the OK button.

After a few seconds the Connect form will unload and the Connection
details panel on the Configure form will indicate if the connection was
successful. If a connection could be made then details about the Core and
Application version will be displayed.

Step 10
Repeat Step 9 for RGAPort2.
Click on the Disconnect button.

Step 11
Click on the Exit button to close the configure program. The Process Eye
software has now been configured for the Microvision Plus units available.

2.9.4. One Microvision Plus using RS485


The following instructions relate to configuring one or more Microvision
Plus control units to run on a single multi-drop RS485 port.

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Step 1
If Configure is not already running, start Configure from the Start menu.
Configure should be located in Start | Programs | Process Eye V1.61. The
Configure window will be shown.

Step 2
Click on the Ports button in the Setup Panel. If RGAPort1 is listed proceed
to step 4

Step 3
Click on the Add button. In the Name field type RGAPort1 then click on
the OK button.

Step 4
Click on the Edit button. If you are using the factory default configuration
for the RS485 card then go to step 5a otherwise go to step 5b.

Step 5a
Select RS485 (Factory default) from the Serial Port list box. Proceed to step
6.

Step 5b
Enter the base address as configure on the RS485 card (refer to the RS485
card manual for details)
Enter the IRQ as configure on the RS485 card (refer to the RS485 card
manual for details)

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Set the Baud Rate to 115.2k
Set the Retries to 3
Proceed to step 6

Step 6
Click on the OK button, then click on the Close button.

Step 7
Click on the Instruments button in the Setup panel.
If the Instrument panel contains the serial numbers of the Microvision Plus
units then proceed to step 8a otherwise proceed to 8b

Step 8a
For each serial number listed in the Instrument panel do the following:
Highlight the serial number by clicking on it.
Click on the Edit button.
Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run the
selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click the OK button.

Proceed with step 9

Step 8b
For each Microvision connected to the port do the following.

Click on the Add button.

Enter the full serial number of the next MicroVision Plus e.g. LM70-
00197001 in the Serial number field.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber

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number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run the
selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click on the OK button.

Proceed with step 9.

Step 9
Click on the Close button.

Step 10
This step is optional and can be performed at a later stage if required.
Proceed to step 12 to omit the test.

If you have all the Microvision Plus units connected and powered up then
you can check that you can communicate with each of them by following
these instructions for each Microvision Plus in turn.:-

Click on the Connect button.

Select the serial number of the next Microvision Plus to test from the
Instruments panel.

Click on the OK button.

After a few seconds the Connect form will unload and the Connection
details panel on the Configure form will indicate if the connection was
successful. If a connection could be made then details about the Core and
Application version will be displayed.

Step 11
After the last Microvision Plus has been tested click on the Disconnect
button.

Step 12
Click on the Exit button to close the configure program. The Process Eye
software has now been configured for the Microvision Plus units available.

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2.9.5. Microvision Plus with a Comms Card
The following instructions relate to configuring one or more Microvision
Plus control units connected to a 4 port comms card.

Step 1
If Configure is not already running, start Configure from the Start menu.
Configure should be located in Start | Programs | Process Eye V1.61. The
Configure window will be shown.

Step 2
Click on the Ports button in the Setup Panel. If RGAPort1 through to
RGAPort4 are listed proceed to step 7.

Step 3
Click on the Add button. In the Name field type RGAPort1 then click on
the OK button.

Step 4
Repeat step 3 three more times for RGAPort2 through RGAPort4

Step 5
Select RGAPort1 in the Ports panel.
Click on the Edit button.
Select User defined for RGAPort1 from the Serial Port list box.
Enter the Base address for RGAPort1. Enter the IRQ for RGAPort1.
Select a Baud rate of 9600.
Select a retry count of 3.
Click on the OK button.

Step 6
Repeat step 5 for RGAPort2 through RGAPort4.
Click on the Close button.

Step 7
Click on the Instruments button in the Setup panel.

Step 8
Select RGAPort1 from the Ports panel.
If the Instrument panel contains the serial number of the Microvision Plus
connected to that port then proceed to step 9a otherwise proceed to 9b.

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Step 9a
Highlight the serial number by clicking on it.
Click on the Edit button.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run
the selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click the OK button.

Proceed with step 10

Step 9b
Click on the Add button.

Enter the full serial number of the MicroVision Plus e.g. LM70-00197001
which is connected to that port in the Serial number field.

Enter a meaningful name in the Name (optional) field. Note this is the name
that will appear on the Shortcut used to run up this head. If it is left blank
then the serial number will be used. Typically this will be a tool or chamber
number.

Check the required boxes in the Create shortcut in panel. Shortcuts to run the
selected Microvision Plus can be placed in the 3 locations listed. We
recommend that they should be created on the Desk top, in the Start menu
and in the program group.

Click on the OK button.

Proceed with step 10.

Step 10
Repeat steps 8 and 9 for RGAPort2 through RGAPort4 or until all the

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Microvision Plus units available have been entered.

Step 11
Click on the Close button.

Step 12
This step is optional and can be performed at a later stage if required.
Proceed to step 15 to omit the test.

If you have the Microvision Plus connected and powered up then you can
check that you can communicate with it by following these instructions.:-

Click on the Connect button.

Select RGAPort1from the Ports panel.

Select the serial number of the Microvision Plus to test from the Instruments
panel.

Click on the OK button.

After a few seconds the Connect form will unload and the Connection
details panel on the Configure form will indicate if the connection was
successful. If a connection could be made then details about the Core and
Application version will be displayed.

Step 13
Repeat Step 12 for RGAPort2 through RGAPort4 or until all the
Microvision Plus units available have been tested.

Step 14
Click on the Disconnect button.

Step 15
Click on the Exit button to close the Configure program. The Process Eye
software has now been configured for the Microvision Plus units.

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2.10. Detailed Configuration
When Configure is run the window shown below will be displayed. The two
buttons on the Setup panel, Instruments and Ports, are used to add and
configure ports and instruments. These features are disabled while configure
is connected to a Microvision Plus, the Instruments and Ports buttons will
be grayed out.

You can use the Connect button to attempt to establish a link to a control
unit. When a connection is made details about the control unit will be
displayed in the connection details window. The download and disconnect
features become available if the connect operation is successful and the
Download and Disconnect buttons are no longer grayed out. Once
connected it is possible to connect to another control unit without
disconnecting first. The first control unit will automatically be disconnected
before an attempt is made to connect to another control unit.

The Exit button will close the Configure program. If a connection has been
made with a control unit it will automatically be disconnected before the
program closes down.

2.10.1. Setup
Information relating to the serial ports to be used by Process Eye and the
control units connected to the port(s) is stored in the Windows Registry. The
two buttons in the Setup panel, Instruments and Ports, provide an easy way
to view and configure the Registry settings needed by Process Eye. The

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information is stored in a tree structure similar to the sub directories
structures. You could think of the Ports as folders containing one or more
instruments. The exact number of Ports and allocation of instruments to
ports will depend on how the control units are physically connected. Two
typical structures are described in the examples below:-

Example 1
Here one port is used to connect to 4 instruments. This implies that the 4
instruments are daisy chained together using a RS485 multi drop serial
interface. RGAPort1 will be configured to use a specific IRQ, Base Address,
Baud Rate and Retry count. Each instrument serial number may have an
associated meaningful name.

Process Eye
RGAPort1
LM70-00197001
LM70-00197002
LM70-00197003
LM70-00197004

Example 2
Here two ports are used, each port is connected to one instrument. This
configuration would occur if the PC standard COM1 and COM2 RS232
ports are being used. RGAPort1 would be configured to use COM1 and
RGAPort2, COM2. Note: Only one instrument can be connected a standard
RS232 port. Again each instrument serial number may have an associated
meaningful name.

Process Eye
RGAPort1
LM70-00197004
RGAPort2
LM70-00197003

Ports are given an arbitrary name by which they can be referenced. We


adopt the naming convention of RGAPort1, RGAPort2 etc. Port numbers
allocated should be in sequence and the capitalization of RGAPort is
important.

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Instruments are referenced by their control unit serial numbers. These
numbers are unique and are loaded into the Microvision Plus firmware
during production. The serial number will begin LM70- as this is the
engineering product number for Microvision Plus. The serial number is
printed on a label which is fixed to the outside of the front (front being
closest to the quadrupole analyser) panel. In addition to the serial number
instruments can be allocated a meaningful name during configuration. If this
name is not specified then the Instrument will be identified in Process Eye
shortcuts by its serial number.

HPQ-2 serial numbers begin LM75-

2.10.2. Ports

The Port window is displayed as a result of clicking on the Ports button. All
the available ports are listed in the Port panel. The Edit and Delete buttons
will operate on the port highlighted in the Port panel. A Port is selected by
clicking on it. A double click will select the port and enter the edit mode.

The Add button is used to add a new port definition.

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The Port configuration window will be display as a result of clicking on
either the Edit and Add buttons. When adding a new port to the list a Name
must be supplied. If you are editing, this field displays the selected port
name and it cannot be modified.

The serial port settings can be selected from a list of predefined options or if
these are not applicable then the User defined option may be selected. If the
User defined option is selected then you can enter the Base address, IRQ,
Baud Rate and Retries.

Base address.
The base address is entered in hexadecimal and should match the base
address setting on the serial interface card. The base address should not
conflict with any other card fitted in the PC.

IRQ.
Again the IRQ should match the setting on the serial interface card. It should
not conflict with any other IRQ. The only exception is when a 4 port serial
card is fitted which is designed to share IRQ’s.

Baud Rate.
Generally a baud rate of 9600 is required for 1 head connected to a port. If
more heads are connected then the baud rate should be increased in
accordance with the information below.

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Number of heads Baud Rate
1 9600
2 14.4K
3 19.2K
4 28.8K
5 38.4K
6 57.6K
7 or more 115.2K

Retries
Data is transferred between the PC and the Control Unit using CRC checked
packets. If an error is detected in a packet then it is automatically retried the
preset number of times before raising an error in the PC application. The
number of retries detected normally is very low and we recommend a setting
of 3. In some environments this may need to be increased but if this proves
necessary then the quality of the data link or the general level of electrical
interference in the area should be investigated. The bandwidth of the link
and hence the ability to transfer useful data is reduced as the number of
retries increase.

Instruments

The Instrument window is displayed as a result of clicking on the

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Instruments button. All the available ports are listed in the Port panel and
the associated Instruments for the selected port are listed in the Instruments
panel. To view the instruments associated with a particular port click on the
required port. The Instrument list is then updated automatically.

The Edit and Delete buttons will operate on the Instrument highlighted in
the Instrument panel. An Instrument is selected by clicking on it.

The Add button is used to add a new instrument definition to the selected
port.

The Instrument configuration window will be displayed as a result of


clicking on the Edit or Add buttons. When adding a new Instrument to the
list a serial number must be supplied. If you are editing, this field displays
the selected instrument's serial number and it cannot be modified. The
Instrument configuration window is shown in above.

When adding an Instrument the serial number should be entered into the
Serial Number field. You should enter a meaningful name into the Name
(optional) field. The name should indicate the physical location of the
control unit within your facility e.g. Tool name, Chamber number etc. This
is the name that will be used on the Shortcut which will launch Process Eye
for that control unit.

The Create Shortcut in: panel allows the automatic generation of Shortcuts
to Process Eye for the that specific control unit. We recommend that they are
installed in all three locations.

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2.10.3. Connect

The connect feature allows the user to attempt to communicate with a


control unit and if successful, obtain information about software and
versions currently loaded in the control unit. This is a useful of testing that
all control units and the PC are configured correctly.

When you click on the Connect button the Connect window will be
displayed. To connect to a specific instrument, first click on the Port to
which the Instrument is connected. Then select the required instrument from
the Instrument panel and click the OK button or just double click on the
instrument. After a short delay the Connect window will unload and the
Connection details panel will be updated.

Once a connection has been made it is possible to connect to another


instrument. The connection to the first instrument will automatically be
terminated before the new connection is made. You may disconnect
manually by clicking on the Disconnect button. You can also Download
firmware to the control unit see below.

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2.11. Download

There are two parts to the firmware running in the control unit. The first is
the Core which acts as a simple operating system. This firmware should not
need upgrading except in major software revisions. The Application
firmware however may change more often as new features and performance
enhancements are developed. It is possible to download both types of
firmware using the download facility.

When you click on the Download button the Download Program window
will be displayed. The file to be loaded must be entered in the File Name
field or the Browse facility may be used to locate the required file. Once
selected information about the firmware image is displayed. These should be
checked to see that the file has the correct file type, program and version.

Click on the Ok button to start the download procedure. A progress indicator


will be displayed as the file is downloaded. When complete the instrument
will automatically disconnect and reconnect so that the Connection details in
the main window are updated to display the firmware loaded.

CAUTION
Under no circumstances should the power to the PC or control unit be
interrupted while downloading a new version of the core firmware. If the
power fails then it will be necessary to install new preprogrammed flash
EPROMs in the control unit. We suggest the use of a UPS capable of
maintaining power to both the PC and control unit for a minimum of 15
minutes if this operation is to be performed.

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2.12. Default Settings
The default factory configuration for 4 port RS232 & RS422 Serial cards.

Note the position of the connectors for the four ports on the comms card:
Port 1 PLG 5 mounted on the PCB closest to the edge connector
Port 2 PLG 4 mounted on the PCB furthest from the edge connector
Port 3 fitted to a flying lead connected to PLG 6 on the PCB
Port 4 fitted to a flying lead connected to PLG 2 on the PCB

Connector Base address IRQ


Port 1 280H 5
Port 2 288H 5
Port 3 290H 5
Port 4 298H 5

Default Factory configuration for 2 port RS485 Serial card.

Port 1 is the lower connector on the interface card


Port 2 is the upper connector on the interface card

Connector Base address IRQ


Port 1 280H 5
Port 2 288H 5

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This page is deliberately left blank.

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Section 3.
Operation
3.1. Start Up
This section of the manual deals with running Process Eye 1.6. We assume
that you have successfully installed the Process Eye 1.6 software and have
the eleven factory recipes ready to run. Creating, editing and deleting recipes
is covered in the next section of this manual.

Starting Process Eye depends to some extent on what you did during the
configuration procedure. We have tried to give a degree of flexibility
regarding shortcuts and names.

You may remember the description of the instrument configuration window


where you could give an optional name to the Microvision Plus and specify
where you wished to place shortcuts to start Process Eye for the specified
control unit. It is possible to place shortcuts on the Desktop, in the Program
Group and in the Start Menu.

To start Process Eye from the Desktop double click on the Process Eye icon
for the control unit you wish to start. The icon consists of the Spectra logo
with the name you specified for the control unit underneath the logo. If you
did not specify a name the last eight digits of the control unit's serial number
will be used. Remember, there will be one icon for each instrument you have
installed.

To start Process Eye from the Program Group click on the Start button on
the Taskbar, select Programs | Process Eye then click on the control unit
you wish to start.

To start Process Eye from the Start menu click on the Start button on the
Taskbar then click on the appropriate icon in the Start menu for the control
unit you wish to run.

The Spectra loading window will be displayed then the Select Access Level
window will be displayed, unless this feature has been disabled.

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Select the Access Level by clicking on the relevant radio button then enter
the password for that particular Access Level in the Password box then,
click on the Ok button.

If you are running Process Eye for the first time after installing the software
or the Access Levels feature has not been configured by the Administrator in
Configure Access Level the Password box will not be shown in the Select
Access level window. Access levels are described in Access Levels .

The Select Mode screen will be displayed from where you can access all the
Process Eye features.

3.2. Filament Warning


Initially (if configured in Preferences) a warning box will be displayed
asking you if the pressure is low enough to switch the filament on. If you
click on the Yes button the filament will be switched on, there will be a
delay while the filament warms up, then the filament button and status bar
will indicate that there is a filament on. If you click on the No button the
filament will be left switched off.

A filament must be switched on in order to take any measurements with the

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instrument. The quadrupole analyser is fitted with two filaments only one of
which may be on at any one time. The filament may be switched on or off by
selecting RGA | Filament On from the menu bar or by clicking on the
Filament button or by double clicking on the Filament Status panel in the
bottom left corner of the screen. The filament can also be switched on
automatically when the recipe is run (if it is configured to do so). The
Filament setting in Utilities | Preferences will determine whether Filament
1 or Filament 2 is switched on.

3.3. Select Mode


The Select Mode window is shown below. Click on the different areas of the
picture for an explaination of the control or feature.

Many of the most frequently used functions can be performed by clicking on


the appropriate button on the button bar. The graphic on the button indicates
its function. To help you use the buttons, as you move the mouse pointer
over the button a help box appears next to the pointer which gives the name
of the particular button.

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Exit Button
Click on the Exit button to quit Process Eye. A warning box is displayed to
confirm you wish to close down Process Eye.

Filament Button
Filament button. Click on the Filament button to switch the filament on or
off. The analyser is fitted with two filaments, which one is switched on is
determined by the filament setting in the Utilities | Preferences menu see
Filaments .

Degas Button
The Degas dialog box is opened by clicking on the Degas button. Degassing
the ion source is described in Degas. DO NOT USE THIS FEATURE
UNTIL YOU HAVE READ THAT SECTION.

Add Recipe Button


To add a new recipe click on the Add Recipe button. Adding a recipe is fully
described in Adding Recipes .

Delete Recipe Button


To delete a recipe click on the delete recipe button. Deleting a recipe is
described in Delete Recipe .

Edit Recipe Button


To edit a recipe click on the Edit Recipe button.

Copy Recipe Button


To copy an existing recipe click on the Copy Recipe button. Copy Recipe is
described in Copying Recipes .

Create Baseline Button


Click on this button to open the Create Baseline dialog box. Creating a
baseline is described in Baseline Settings .

Preferences Button
Click on the Preferences button to open the Preferences dialog box as
described in Preferences

View Alarms Button

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This button will be added to the button bar when data are on the screen and
an Alarm Event has occurred. Click on the View Alarms button to display
the Alarms Event Viewer window. See Alarm Event Viewer for more
information.

Access Levels Button


Click on the Access Levels button to display the Select Access Level dialog
box. Access Levels are described in Access Levels.

Help Button
Click on the Help button to enter the Process Eye Help files. The Help
facility is described in Using Help .

Title Bar
The title bar will indicate which head you are connected to. This is very
useful in multi-headed systems.

Menu Bar
All of the Process Eye functions can be accessed from the menu bar. Either
click on the menu item in the menu bar or press ALT + the underlined
character to open the appropriate menu.

Recipe Buttons
Click on the appropriate recipe button to run the required recipe, see
Running a Recipe for more information. Initially there will be eleven recipe
buttons for the eleven factory recipes supplied with Process Eye. If a recipe
button is grayed out you do not have the necessary acces level to run it, see
Access Levels for more information.

Recall Data Button


Click on the Recall Data Button to review data from previous recipe runs.
More details can be found in Recall Stored Data .

Status Bar
The status bar gives information about the current operation of Process Eye.

3.4. Using Help


Process Eye has a comprehensive on-line help system. To access the help
files:

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click on the Help button
or
select Help | Contents from the menu bar
or
press F1 on your keyboard.

When you open Help the contents page will be displayed, click on one of the
green help topics for further information. At any time you may return to the
contents page by clicking on the Contents button at the top of the Help
window.

Click on the Search button to look for help topics by selecting key words.
The Back button allows the user to move backwards through previously
selected help pages. The help page being displayed may be printed out by
clicking on the Print button.

The >> and << buttons allow you to move forwards and backwards through
the help topics.

Click on the Glossary button to display a list of commonly used vacuum


terms.

Users may add their own notes to the help topics by selecting Edit |
Annotate. Type the text you want to associate with the particular help topic
and save it. A green paper clip symbol will be displayed, click on this to
show the user notes.

More information on using help can be found by selecting Help | Using


Help from the menu bar.

Selecting Help | About from the menu bar will cause the About window to
be displayed where the version numbers of the software used in the Process
Eye will be shown.

Note that this document is not the same as the on-line help. This "paperless
manual" is based on the printed manual supplied with the software. We use
the Windows Help format because it is common to all users.

3.5. Access Levels


Access Levels form the basis of Process Eye’s security system. Various

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Process Eye features are available to the three Access levels; Administrator,
User and Maintenance. Put another way certain Process Eye features are not
available to User and Maintenance Access Levels. Recipes may be
configured to only be available to certain Access levels. This is governed by
the settings in the last step of the recipe set up.

Each of the three Access levels can have a password associated with it. With
the Access levels feature enabled (you can disable it) at start up you select at
which Access level you want to enter Process Eye and enter the appropriate
password.

3.5.1. Configuring access levels


Configuring Access Levels is only possible if you have entered Process Eye
with the Administrator Access Level. If you have entered as Maintenance or
User the Configure Access Levels feature will not be available.

To configure the Access Levels:


select Access | Configure Access Levels from the menu bar, the Configure
Access Levels dialog box will be displayed, as shown below.

The Access Levels feature may be disabled by clearing the Enable the
Access level feature check box. When disabled the Select Access Level
window will not be displayed when Process Eye is started.

In the Password box enter a password for each of the three Access levels.
Enter each password a second time in the confirm password box, this helps
eliminate typing errors from the passwords.

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Passwords may be left blank in which case Process Eye may be started
simply by clicking on the OK button in the Select Access level window. The
same password may be used for all three levels. Neither of which is
recommended.

Note that passwords are not case sensitive. Ideally, the person responsible
for the Process Eye system adopts the Access Level of Administrator and
enters the passwords for all three levels. The Administrator then only
discloses the appropriate password to the people using the Process Eye
system.

When all the passwords are entered correctly click on the OK button to
accept the entries and close the Configure Access Levels dialog box.

Click on the Reveal button to display the passwords. Click on the Cancel
button to close the Configure Access Levels dialog box without any entries
or changes being accepted.

Once Process Eye is running you may change the Access level but you will
need the password for the level to which you wish to change.

To change the Access Level:


select Access | Select Access Level from the menu bar
click on the radio button for the level to which you want to change
enter the password in the Password box
click on the OK button.

3.5.2. Access level features


The following is a list of Process Eye features and to which Access Levels
they are available:
Abort Recipe = ADMIN + MAINT
Alarm = ADMIN + MAINT + USER
Baseline = ADMIN
Comment = ADMIN + MAINT + USER
Degas = ADMIN + MAINT
Exit Program = ADMIN
Exit Recipe = ADMIN + MAINT + USER
Filament = ADMIN + MAINT + USER
Help = ADMIN + MAINT + USER
Lockout = ADMIN + MAINT

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Preferences = ADMIN
Print = ADMIN + MAINT + USER
Recipe = ADMIN
RVC = ADMIN
Units = ADMIN

These permissions can be modified. Contact your local Spectra facility for
further information.

3.6. Running a Recipe


This section assumes one or more recipes have been defined. If no recipes
have been defined it will be necessary to add a recipe, as described in
Adding Recipes . If you have just installed Process Eye the eleven factory
recipes will be available.

In the Process Eye Select Mode screen the available recipes will be
displayed as a series of buttons. Only those recipes available to the currently
selected access level will be shown. To run a recipe click on the appropriate
button.

Depending on the type of recipe and the recipe settings the following steps
may be required:
Filament Confirmation:
If the filament is switched off when the recipe is started and Filament On
Confirmation has been selected you will be prompted to confirm that the
pressure is low enough for the filaments to be switched on.
File Name:
If User Defined File Name has been selected you will be requested to enter
the file name under which this data will be stored. A standard Windows
Open dialog box is used to enter the file name.
User Disk Header:
User defined information can be optionally entered if it has been configured
in Preferences and Enabled in the recipe.

If no trigger has been selected the instrument will then run the recipe.
Otherwise, Process Eye will go in to a holding pattern until the trigger is
received and the Trigger warning box will be displayed. Depending on the
recipe settings two buttons may be enabled in the Trigger warning box.
Click on the Force Trigger button to generate a trigger and start the recipe
without waiting for the trigger event defined in the recipe set-up.

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Click on the Abort Recipe button to close the Trigger warning box and
return to the mode select window without running the recipe.

If a start delay has been specified the Start Recipe Delay warning box will
be displayed and the delay will count down. The start recipe delay begins
once the trigger has occurred.

The exact appearance of the screen will depend on the type of recipe and the
parameters defined in the recipe. Details of the Analog Peaks, Leak Check,
Faraday and Multiplier Calibration recipes can be found in section 5 of this
manual. In the following sections details of the data acquisition recipes, Bar
Graph and Peak Jump are given.

3.7. Running Data Acquisition Recipes


The screen will appear as it was saved at the end of the recipe set-up. It can
show either a Bar Chart or a Peak Jump display and any Trend Displays
which may have been specified.

A typical screen when a bar graph recipe is running such as the factory

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recipe Bar and Trend Scan is shown above. Click on each of the nine buttons
on the button bar to see a description of their function.

Abort Process Button


Clicking on the Abort Process button will stop the current recipe and return
you to the Select Mode screen. If the recipe stores to disk completed scans
will be stored and may be recalled. This button changes to the Exit button
when the recipe has finished.

Edit Display Button


None of the settings relating to the acquisition of data may be altered, this is
defined by the recipe. The way the data is displayed, however, can be
changed whilst the recipe is running, if permitted by in the recipe set-up. To
do this click on the Edit Bar Graph button if it’s a Bar Graph recipe or the
Edit Peak Jump button if it is a Peak Jump recipe. The Display dialog box
will be shown. The Bar Graph and Peak Jump display settings are very
similar and the differences are described in Bar Graph Display Settings and
Peak Jump Display Settings. A short cut is to right click in the data display
area you want to edit.

Add Trend Button


Trends are views of the scan data obtained using Bar Graph or Peak Jump.
Each Trend display may have up to fifteen channels displayed and a
maximum of sixteen trends may be added. There are no restrictions on how
many times a partial pressure, total pressure, Action channel, digital or
analog input may be displayed in one or more trends. This allows, for
example, one trend to show partial pressures, another trend to show those
same partial pressures with a background subtracted and yet another trend to
show digital inputs. Clicking on the Add Trend button brings up the Edit
New Trend dialog box where the various settings for the Trend are defined.
This dialog box is the same as the Edit Trend dialog box displayed by
clicking on the Edit Trend button and described in section Trend settings.

Edit Trend Button


To edit a Trend it must either be the currently active window when Edit
Trend is selected (its title bar indicates it is active) or more simply right click
anywhere on the graph. The Edit Trend dialog box will be displayed.

Note that clicking on the trend graph area will cause the Bar Graph or Peak
Jump display to show the data for that particular time. To return the Bar
Graph or Peak Jump to real time either choose Edit and select Live Data or

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double click on the X-axis.
Delete Trend Button
To delete a Trend it must be the currently active window when Delete Trend
is clicked. (Its title bar indicates it is active.)

Print Button
Click on the Print button to print a hard copy of the current display. The Bar
Graph or Peak Jump scan and any Trend displays will all be printed. The
current Printer settings set up in Windows Print Manager will be used.

Comment Button
Click on the Comment button to open the Comment dialog box where you
may type text. This is useful for making notes relating to the current recipe.
The comment is saved with the file and may be viewed or edited when the
data is recalled. Once you have typed in the text click on the Ok button to
close the dialog box. If disk storage has not been enabled the comments will
be temporarily stored but will be overwritten the next time a recipe with no
disk store enable is run.

3.7.1. Bar Graph Display


When a Bar Graph recipe is running the Bar Graph data will be displayed in
a histogram format in its own window below the button bar. This window
may be sized and positioned in the normal way. The bar graph display may
be altered by clicking on the Edit Bar Graph button or right clicking
anywhere on the Bar Graph display and changing the settings in the Bar
Graph Display dialog box.
There are five buttons; Log peak height button, Peak Height Scroll Bar
Button, Mass Scroll Bar Button, Cursor Button and the Grid Button and two
scroll bars Peak Height Scroll Bar and Mass Scroll Bar in the Bar Graph
window which will also affect the display. When you move the mouse
pointer over the button its name will appear in a help box displayed next to
the mouse pointer.

Log peak height button


The log peak height button allows you to change between a logarithmic and
linear Y-axis. With the button depressed a log axis will be displayed
otherwise the axis will be linear.

Peak Height Scroll Bar Button

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Click on the button to enable or disable the peak height scroll bar displayed
next to the Y-axis. When the button is depressed the scroll bar is displayed.

Mass Scroll Bar Button


Click on the Mass Scroll Bar button to enable or disable the mass scroll bar
displayed below the X-axis. When the button is depressed the scroll bar is
displayed.

Cursor Button
Click on the Cursor button to enable or disable the cursor. When the button
is depressed the cursor is enabled and the cursor data will be shown
immediately below the buttons. Initially the cursor data will take the format
Mass ??? = ??.??E??? since there is no data to display. Click on one of the
peaks in the bar graph display and the cursor data will change to show the
mass value and the pressure measurement. Each time the selected mass is
scanned the cursor data will be updated.

Grid Button
Click on the Grid button to enable or disable the Grid. When the button is
depress the Grid is enabled.

Peak Height Scroll Bar


The Peak Height Scroll Bar, when enabled, can be used increase and
decrease the range covered in the Y-axis. Either drag the scroll button or
click on the up or down arrow. If a linear Y-axis is being displayed you will
scroll through successive decades. If a log Y-axis is being displayed the
number of decades will be altered by using the scroll bar with the minimum
displayed decade being fixed.

Mass Scroll Bar


The Mass Scroll Bar can be used to increase or decrease the range of masses
displayed on the X-axis when viewing bar chart scans. Either drag the scroll
button or click on the right or left arrow button. You can only move within
the minimum and maximum mass values set in the Bar Graph Display
settings.

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3.7.2. Peak Jump Display

When a Peak Jump recipe is running the Peak Jump data will be displayed in
its own window below the button bar. This window may be sized and
positioned in the normal way. The peak jump display may be altered by
clicking on the Edit Peak Jump button or right clicking anywhere on the
Peak Jump display and changing the settings in the Peak Jump Display
dialog box. There are four buttons; Log peak height button, Peak Height
Scroll Bar Button, Cursor Button and Grid Button and one scroll bar; Peak
Height Scroll Bar in the Peak Jump window which will also affect the
display. When you move the mouse pointer over the button its name will
appear in a help box displayed next to the mouse pointer.

3.7.3. Display Edit


The Bar Graph or Peak Jump display may be altered by adjusting the
settings in the Display dialog box. Remember, this only alters the display,
the range of masses being scanned is defined in the recipe set up and cannot
be altered. The Bar Graph Display dialog box or Peak Jump Display dialog
box is shown by clicking on the Edit Display button or by right clicking on
the Bar Graph or Peak Jump display. The various settings in the dialog
boxes are described in the following sections. There are some differences

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between Bar Graph and Peak Jump and these are noted.

Display
Live Data:
As each partial pressure is scanned it is updated on the graph. If data is being
recalled from disk then the Live Data option will be grayed out.

Fixed Scan:
Any scan in the range from 1 to Maximum Scans (as defined in step one)
may be viewed. If a scan number is selected that has not yet been scanned,
then, when it is scanned, the display will be updated. If the mouse is clicked
on a Trend display of data then Fixed Scan will be selected with the scan
number at or less than the point of the cursor.

Scan:
If Fixed Scan is selected the Scan: box will be displayed. Click on the up or

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down arrow to select the scan you wish to display or type in the scan
number.
Show Total Pressure
If Show Total Pressure is checked the Total Pressure reading will be
displayed otherwise, it will not be displayed and the screen space will be
used by increasing the length of the y-axis. The Total Pressure will always
be measured at the end of each scan whether it is displayed or not. Note that
total pressure is the sum of the measured partials. If one or more significant
peaks are not measured as part of the scan the total pressure may be
inaccurate.
Modify display
As described in the sections on Background and Baseline (standard
deviation) the measured signals (partial pressure, total pressure, analog
inputs and, for Backgrounds only, digital inputs) may be displayed not in
their “raw” format but modified in one of the following ways.
None:
No modifications (other than any calibration settings) are applied to the data.
Background Subtract:
The appropriate background value is subtracted from the data. This option
will be grayed out if a background has not been selected. Usually a linear y-
axis display with a decade setting close to the decade setting of the data
being displayed is the most appropriate way to view Background Subtracted
data as a negative minimum can be selected.
Background Ratio:
The Data is divided by the selected background data. This option will be
grayed out if a background has not been selected. Usually a linear y-axis
display with a decade setting of E+00 is the most appropriate way to view
Background Ratioed data as the results will be 1.0 or close to 1.0 if the data
tracks the background.
Standard Deviation:
The mean (or average) value at the corresponding scan number of a baseline
file is subtracted from the data and the result is divided by the standard
deviation at that point. Usually a linear y-axis display with a decade setting
of E+00 is the most appropriate way to view Standard Deviation data as a
negative minimum can be selected.

X-Axis (bar graph)


Display First Mass:
The First Mass actually scanned is defined by First Mass set in step one of
Add/Edit recipe. However, the First Mass displayed may be any value from
the First Mass scanned to the Last Mass scanned. The Display First Mass

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must also be less than or equal to the Display Last Mass.
Display Last Mass:
The Last Mass actually scanned is defined by Last Mass set in step one of
Add/Edit recipe. However, the Last Mass displayed may be any value from
the Last Mass scanned to the First Mass scanned. The Display Last Mass
must also be greater than or equal to the Display First Mass.
Minor Ticks:
The distance between major ticks on the x-axis will depend on the resolution
of the screen and the size of the graph. Selecting Minor ticks allow smaller
mass increments to be determined by eye.
Cursor:
When enabled the Cursor feature allows mass identification and precise
readout of the partial pressure. Once enabled, to set the cursor to a particular
mass click on the graph area and drag the cursor until the desired mass is
shown in the area at the top of the graph. Once selected the cursor value will
be updated as new data arrives.
Show Time:
Check the Show Time check box to display the time as part of the x-axis
label. Click on the Real radio button to show the actual time or click on the
Elapsed radio button to show the time elapsed since the start of the recipe.
X-axis (peak jump)
Cursor:
When enabled the Cursor feature allows Channel identification and precise
readout of the partial pressure. Once enabled, to set the cursor to a particular
Channel click on the graph area and drag the cursor until the desired
Channel is shown in the area at the top of the graph. Once selected the
cursor value will be updated as new data arrives.
Show Time:
Check the Show Time check box to display the time as part of the x-axis
label. Click on the Real radio button to show the actual time or click on the
Elapsed radio button to show the time elapsed since the start of the recipe.

Y-axis
Loarithmic:
Sets the Y-axis to be a logarithmic scale. The maximum and minimum
values that can be displayed are set using Max and Min. The largest and
smallest decades that can ever be displayed are set in Utilities | Preferences
by selecting the desired Max Displayed Decade and Min Displayed Decade.
Linear:
Sets the y-axis to be a linear scale. The maximum and minimum values that
can be displayed are set using Max and Min and Decade. The maximum and

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minimum values can be positive or negative and the decade can be anywhere
in the range Max Displayed Decade to Min Displayed Decade.
Min:
Sets the smallest value that can be displayed. If a Logarithmic y-axis has
been selected it will be a pick list of decades (in the range Max Displayed
Decade to Min Displayed Decade). If Linear y-axis has been selected it will
be a text box where the value must be typed. Any value positive or negative
is allowed. This setting is multiplied by the Decade setting to give the actual
minimum. In linear Y-axis, Min must be 1 less than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.
Max:
Sets the largest value that can be displayed. If Logarithmic y-axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade
to Min Displayed Decade). If Linear y-axis has been selected it will be a text
box where the value must be typed, any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
maximum. In linear Y-axis, Max must be 1 greater than Min. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.
Decade:
This is only visible when Linear is selected. It sets the scaling factor applied
to Min and Max, e.g. to display -5.00E-07 to +5.00E-07 set -5 as Min, 5 as
Max and 1E-07 as Decade.
Grid:
Switches on a horizontal grid to assist in visually reading peaks. The values
that have a grid line correspond to where the y-axis is labelled. This in turn
will depend on the resolution of the screen and the size of the graph.
Minor Ticks:
Enables fine horizontal lines to be displayed. The values that have a grid line
will depend on the resolution of the screen and the size of the graph.

Once all the settings are correct click on the OK button to close the Display
dialog box and implement the changes. Clicking on the Cancel button will
close the dialog box without any changes being made.

3.8. Trends
Trends are views of the scan data obtained using Bar Graph or Peak Jump.
Each Trend display may have up to fifteen channels displayed and a
maximum of sixteen trends may be added. There are no restrictions on how

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many times a partial pressure, total pressure, Action channel, digital or
analog input may be displayed in one or more trends. This allows, for
example, one trend to show partial pressures, another trend to show those
same partial pressures with a background subtracted and yet another trend to
show digital inputs.

3.8.1. Add trend


To add a trend click on the Add Trend button or select Live Recipe | Add
Trend from the menu bar. The Edit New Trend dialog box will be
displayed where the various settings for the Trend are defined. This dialog
box is the same as the Edit Trend dialog box displayed by clicking on the
Edit Trend button and is described in section Trend settings.

3.8.2. Edit trend


To edit a Trend it must be the currently active window (its title bar indicates
it is active). Click on the Edit Trend button or select Live Recipe | Edit
Trend from the menu bar or right click anywhere on the data display area.
The Edit Trend dialog box will be displayed, see section Trend settings
for full details.

3.8.3. Delete trend


To delete a Trend it must be the currently active window when the Delete

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Trend button is clicked or Live Recipe | Delete Trend is selected from the
menu bar. (Its title bar indicates it is active.)

3.8.4. Trend settings


When you select Edit Trend the Edit Trend dialog box will be displayed.
Selecting Add Trend will cause the Edit New Trend dialog box to be
displayed. These two dialog boxes are the same and the various parameters
are explained in the following sections.

3.8.5. Channels
The channels section defines what is to be trended. Up to fifteen channels
may be used, the actual number is set in Trend Max Channels in Utilities |
Preferences. By default fifteen channels are set to Trend Maximum
Channels.

Type:
This is a dropdown list box which specifies the source of data for this trend
line. It may be one of the following:

Off will switch the channel off.

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Mass will display as a trend the mass whose value is entered in the Input
box. The mass must be within the mass range being scanned for a bar chart
recipe. For a peak jump recipe the mass must be one to which a channel is
set.

Action will display as a trend one of the action channels defined in the
recipe. If the recipe does not define any action channels then Action will not
be available. Selecting Action in the Type box will cause the Input box to
display all the available action channels as a dropdown list, click on the
required one to select it.

Total will display a trend of the sum of all the partials in this scan.

Analog, where xxx is the (optional) analog input channel number, will show
the analog input.

Digital, where xxx is the (optional) digital input channel number, will show
the digital input.

Generally you would choose Analog and Digital inputs to be displayed on a


different trend as they usually have widely varying values compared to
partial and total pressure signals.

3.8.6. Modify display


As described in the sections on Background and Baseline (standard
deviation) the measured signals (partial pressure, total pressure, analog
inputs and, for Backgrounds only, digital inputs) may be displayed not in
their “raw” format but modified in one of the following ways.
None:
No modifications (other than any calibration settings) are applied to the data
Background Subtract:
The appropriate background value is subtracted from the data. This option
will be grayed out if a background has not been selected. Usually a linear y-
axis display with a decade setting close to the decade the data is at is the
most appropriate way to view Background Subtracted data as a negative
minimum can be selected.
Background Ratio:
The Data is divided by the selected background data. This option will be
grayed out if a background has not been selected. Usually a linear y-axis
display with a decade setting of E+00 is the most appropriate way to view

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Background Ratioed data as the results will be 1.0 or close to 1.0 if the data
tracks the background.
Standard Deviation:
The mean value at the corresponding scan number of a baseline file is
subtracted from the data and the result is divided by the standard deviation at
that point. Usually a linear y-axis display with a decade setting of E+00 is
the most appropriate way to view Standard Deviation data as a negative
minimum can be selected.

3.8.7. y-axis
Label:
Define the label to be displayed next to the y-axis. Type in the label you
require or leave it set to the default of Torr. If you delete the label and leave
the Label: box empty the trend’s x-axis will extend to utilise the extra space
saved by having no y-axis label.

Logarithmic:
Sets the Y-axis to be a logarithmic scale. The maximum and minimum
values that can be displayed are set using Max and Min. The largest and
smallest decades that can ever be displayed are set in Utilities | Preferences
by selecting the desired Max Displayed Decade and Min Displayed Decade.

Linear:
Sets the y-axis to be a linear scale. The maximum and minimum values that
can be displayed are set using Max and Min and Decade. The maximum
and minimum values can be positive or negative and the decade can be
anywhere in the range Max Displayed Decade to Min Displayed Decade.

Min:
Sets, the smallest value that can be displayed. If Logarithmic y-axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade
to Min Displayed Decade). If Linear y-axis has been selected it will be a text
box where the value must be typed. Any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
minimum. In linear Y-axis, Min must be 1 less than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.

Max:
Sets the largest value that can be displayed. If Logarithmic y-axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade

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to Min Displayed Decade). If Linear y-axis has been selected it will be a text
box where the value must be typed. Any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
maximum. In linear Y-axis, Max must be 1 greater than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.

Decade:
This is only visible when Linear is selected. It sets the scaling factor applied
to Min and Max, e.g. to display -5.00E-07 to +5.00E-07 set -5 as Min, 5 as
Max and 1E-07 as Decade.

Grid:
Switches on a horizontal grid to assist in visually reading peaks. The values
that have a grid line correspond to where the y-axis is labelled. This in turn
will depend on the resolution of the screen and the size of the graph.

Minor Ticks:
Enables fine horizontal lines to be displayed. The values that have a grid line
will depend on the resolution of the screen and the size of the graph.

X-axis
The X-axis is the time axis. There are a number of options not usually
available with RGA software packages that allow, for example, the data to
be displayed as a log time plot enabling pump down times to be predicted,
with time windows as short as seconds or as long as days etc.

Start Time:
The beginning time at which to start displaying data. This is in hours (hh),
minutes (mm), seconds (ss) and, if the Display Days option is checked, days
(dd). The hours minutes and seconds will show in terms of an elapsed time
from when this recipe (data run) was started if the Elapsed Time option is
enabled or as a real 24 hour time if the Real Time option is enabled. The
days, if displayed, are always shown as elapsed days from the recipe start
regardless of which time mode is selected. This is not available if Scroll
Display is enabled.

Time Span:
This is the period of time to be displayed starting at the Start Time. If Scroll
Display is enabled it is the period of time displayed, where start time =
current time. It is defined in hours (hh), minutes (mm), seconds (ss) and, if

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the Display Days option is checked, days (dd). It should always be a positive
number.

Elapsed Time:
When this option is checked the Start Time is defined in terms of time since
the recipe began and the graph will be labelled in the same way. On the
graph, if Display Days is enabled, the days will be displayed as elapsed days
starting at zero.

Real Time:
When this option is checked the Start Time is defined in terms of a real (24
hour) time and the graph will be labelled in the same way. On the graph if
Display Days is enabled the days will be displayed as a true date (e.g.
mm/dd/yy in the USA) The actual format will be that defined in Windows
Date settings found in the Control Panel. Real Time cannot be selected when
a recipe is being defined, only when the recipe is running or when recalling
data from disk.

Scroll Display:
If the Scroll Display box is checked the last scan will always be shown with
the previous scans based on the Time Span setting. Earlier scans will scroll
off the screen. When Scroll Display is checked the Start Time setting is not
available.

Display Days:
If a run is going to last more than 24 hours or, when recalling data, you need
to see the date when the data was stored Display Days may be used to show
either elapsed days since the start of the recipe or the date. On the graph if
Display Days is enabled and the Real Time option is selected then days will
be displayed as a true date (e.g. mm/dd/yy in the USA) The actual format
will be that defined in Windows Date settings found in the Control Panel. If
the Elapsed Time option is selected the days on the graph will be days
elapsed from the start of the recipe. When Display Days is enabled the Start
Time and Time Span have an additional text box for days (dd).

Log Time Axis:


A simple pumpdown is essentially exponential in nature. Selecting the Log
Time Axis option at the same time as the Log y-axis option allows an
exponential function to be shown as a straight line which allows much easier
prediction of when a desired pressure will be achieved. The position of a
point on the Log Time Axis is calculated by taking the Log to base 10 of the

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elapsed time in seconds. If the Gradient function is enabled the gradient will
become dP/dLog10t or dLog10P/dLog10t instead of dP/dt.

Minor Ticks:
The software labels the X-axis at intervals that are round numbers and far
enough apart so that the labels do not overlap. The Minor Ticks option
places ticks between the time labels to assist in visually identifying a time.

3.8.8. Key
The Key function allows identification of the various channels, and a direct
readout of either the signal or of the slope of the signal.

On:
Displays the Key either at the Top of the graph or at the right of it. The
pressures or gradients for all channels will show ?.??E??? until the mouse
pointer is placed on the graph and the left mouse button pressed down, the
cursor will change to a vertical line. As the cursor is dragged the key is
updated. Note that if the left mouse button is released while the cursor is in
the active graph area then the Bar Graph or Peak Jump will be set into Fixed
Scan display with the scan number being the scan that the cursor was on
when the left mouse button was released.

Top:
Causes the Key to be displayed at the top of the graph. It will have no effect
if the Key On is not enabled.

Right:
Causes the Key to be displayed at the right of the graph. It will have no
effect if the Key On is not enabled.

Reading:
The cursor can read either signal intensity or the gradient (slope) of the
graph. To read pressure (or analog or digital signal) select Value. To read the
slope of the graph select Gradient. It is important to note that the gradient
will use the displayed axis value to determine the slope, that is if log X and
log Y-axis have been selected the slope will be based on the Log10 of the
signals. For more details on gradient calculation see Span.

Span:
The gradient is calculated by taking all data points that fall within a user
specified time window. A least squares algorithm is then used to calculate

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the best straight line that fits these data points and the slope of that line is the
gradient that is displayed. The time window is the time defined as the Span.
The Span window will be centred about the cursor position. As at least two
points are required for the slope to be measured if only one point falls within
the Span window the gradient will show as ?.??E???.

Clicking the OK button will save all changes made to the Trend or insert the
new trend if you are adding a trend.

3.9. Alarm Event Viewer


The Alarm Event Viewer is a window which is displayed as a result of an
alarm condition occurring if Show Viewer has been enabled. The top part of
the viewer window tells the user which Event of how many Events is
currently being displayed. The up and down arrows allow the user to scroll
through the alarm events when more than has occurred. The time and date
when the alarm event occurred is displayed as is the step which caused the
alarm. The message associated with the step in the alarm is displayed in the
second part of the window.

The audio tone is switched off by checking the Sound Off check box.

With Auto Update checked the Alarm Event Viewer will be updated if
further alarm conditions occur. If Auto Update is not checked subsequent
alarms can be viewed by using the up and down arrow buttons.

Click on the Hide Alarm Window button to stop displaying the Alarm
Event Viewer window. It can be displayed again by clicking on the View
Alarms button on the button bar. If disk storage was not enabled for the
recipe any alarm events will be stored in a temporary file that will be
overwritten the next time a recipe that has no disk store enabled is run.

3.10. Recall Stored Data


You do not have to have a control unit running or even connected to recall
data. To recall stored data click on the Recall Stored Data button in the
Process Eye Select Mode screen. The Open dialog box will be displayed
which is a standard Windows file select type dialog box.

Select the file to be recalled from the list in the File Name: list box, use the
scroll bar to move through the list. The currently selected file name will be

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shown in the box at the top.

Select the file type, either Bar Graph (*.WBG), Peak Jump (*.PKJ), Baseline
(*.BL) or Zipped (*.ZIP) from the List File of Type: dropdown list box.
The directory can be selected in the Directories: box as can the drive from
the Drives dropdown list box.

If a file with the ZIP extension is chosen the original files will be unzipped
and saved in a directory in the application directory (Process Eye by default)
and recalled from there. When the recall window is closed the files will be
deleted.
Once the required file has been selected click on the OK button or double
click on the filename to display the data.

The Recall Data screen will look very similar to the Live Data screen
displayed whilst the recipe was running. The screen will appear as it did
when the recipe was saved. The two key differences are:
the file name will be displayed in the title bar
there will not be a scan dot in the Bar Graph or Peak Jump display.
The Bar Graph or Peak Jump display will be showing scan number 1 which
will not change until you ask for another scan.
[See also section Stepping through files.]

3.10.1. Selecting scans


Initially the Bar Graph or Peak Jump display will be showing scan number
one. To select another scan to be displayed:
click on the Edit Bar Graph or Edit Peak Jump button
or
select Recall | Edit Bar Graph or Recall | Edit Peak Jump from the menu bar
or
right click anywhere on the Bar Graph or Peak Jump.
The Bar Graph Display dialog box (or Peak Jump Display dialog box) will
be shown. In the Scan: box use the up and down arrows to select the
required scan or type in the required scan number. Click on the OK button to
close the dialog box and display the newly selected scan.
If one or more Trends are displayed in the Recall Data window you may
change the Bar Graph or Peak Jump scan by clicking on the trend at the
point in time for the required scan.
You can also step through the scans with the ↑ (up arrow) and ↓ (down
arrow) keys when the Bar Graph (or Peak Jump) is active and the Y-axis
scroll bar is off.

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3.10.2. Edit recall display
Edit Bar Graph or Edit Peak Jump, depending on the file type, allows the
display to be modified. The data is not changed only the way it is displayed.
Click on the Edit Bar Graph button (or Edit Peak Jump button) and the
Display dialog box will appear. The settings in this dialog box are the same
as those described in Display Edit, please refer to this section.

3.10.3. Add recall data trend


Clicking on the Add Trend button or selecting Recall | Add Trend from the
menu bar will display the Edit Trend dialog box where the settings for the
new trend may be defined. This is described in section Trend settings
earlier in the manual, please refer to this section.

3.10.4. Edit recall data trend


The trend must be the active window before it can be edited, its title bar will
show that it is active. Click on the Edit Trend button or right click anywhere
on the graph or select Recipe | Edit Trend from the menu bar to display the
Edit Trend dialog box which is described in section Trend settings.

3.10.5. Delete recall data trend


To delete a Trend it must be the currently active window when the Delete
Trend button is clicked or Recall | Delete Trend is selected from the menu
bar. (Its title bar indicates it is active.)

3.10.6. Print
Click on the Print button to print a hard copy of the current display. The Bar
Graph or Peak Jump scan and any Trend displays will all be printed. The
current Printer settings set up in Windows Print Manager will be used.

3.10.7. Comment
Click on the Comment button to display the Comment dialog box which
will contain any comment text stored when the file was created. You may
add to or modify the text in the Comment box. Click on the Ok button to
close the dialog box and save the changes.

3.10.8. Exit
Click on the Exit button to return to the Select Mode screen.

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3.10.9. Stepping through files
To help with data review of related files in a sub-directory you can change
the file displayed without loosing the current display settings. Click on a
trend display to make it active then pressing PageUp or PageDown.

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Section 4.
Recipes
This section of the Process Eye manual deals with creating, editing and
deleting recipes.

Any number of recipes may be defined. Process Eye is supplied with eleven
factory recipes which allow you to run some recipes without having to learn
to create them, although this is very easy. Once defined recipes appear as
buttons on the initial (Select Mode) page. To run a recipe simply click that
recipe’s button. If more buttons have been defined than can fit on the Select
Mode page a scroll bar appears to allow access to them all. Recipes are
created by Adding a new recipe, Editing an existing recipe or Copying an
existing recipe and then Editing it. Six types of recipe are available: Bar
Graph, Peak Jump, Analog Peaks, Leak Check, Faraday Calibration and
Multiplier Calibration.

It is not necessary to have a Microvision Plus or HPQ-2 connected to the PC


running Process Eye in order to create recipes (or to recall previously stored
data). To force the program to run in the "Recall" mode it may be started
with a /X on the command line. If no control unit is detected you will be
given the option of running in recall mode.

4.1. Recipe types


There are six types of recipe used in Process Eye. Data acquisition is done
using bar graph and peak jump recipes which are each configured via eleven
wizard style dialog boxes. Faraday and multiplier calibrate recipes are used
to calibrate the Faraday and electron multiplier detectors respectively and
are configured by two dialog boxes. Calibrate Multiplier recipes will not be
available if your control unit is an HPQ-2 or your Microvision Plus does not
have an electron multiplier detector. One of the most common uses for any
RGA is vacuum leak checking. In Process Eye this is done by creating a leak
check recipe using two wizard style dialog boxes. One of the factory recipes
is a leak check recipe so, you do not have to create a recipe before you are
able to start leak checking. The sixth type of recipe is an analog peaks
recipe. Analog peaks is used to assess the condition of the quadrupole
analyzer and make adjustments to the mass alignment and resolution

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settings. Analog recipes are created using two dialog boxes, again one of the
factory recipes in an analog recipe.

4.2. Adding Recipes


From the initial Select Mode page click on the Add Recipes button or select
Recipe | Add Recipe from the menu bar to open the Enter Recipe Details
dialog box, shown below.

Set the following items.


Recipe Type:
This will determine the type of recipe that is created. Click on one of the six
radio buttons; Bar Graph, Peak Jump, Analog Peaks, Leak Check, Multiplier
Calibration or Faraday Calibration.
Recipe Name:
The DOS filename that the Recipe will be saved as. Recipe names cannot
include any of the following characters: forward slash (/), backslash (\),
greater-than sign (>), less-than sign (<), asterisk (*), question mark (?),
quotation mark ("), pipe symbol (|), colon (:), or semicolon (;), and must be
limited to eight characters in length.
Button Label:
This is the text that will appear on the Recipe button. It may be any text and
up to 34 characters long.

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Select Ok to continue.

You will enter a Wizard style series of dialog boxes which are explained in
the following sections.

4.3. Copying Recipes


An existing recipe may be copied. This is useful if you need to create a
number of recipes with similar settings. To copy a recipe click on the Copy
Recipe button or select Recipes | Copy Recipe from the menu bar. The
Select a Recipe dialog box will be displayed, select a recipe from the list and
click OK or double click the desired recipe. The type of recipe will be
indicated in the Enter Recipe Details dialog box, enter a new unique Recipe
Name and Button Label. Click on the OK button when finished.

4.4. Recipe Setup


When you add or edit recipes you do so by setting or accepting the
parameters in a series of wizard style dialog boxes. Which dialog boxes are
displayed will depend on the type of recipe. There are seventeen set up
dialog boxes in total with a maximum of eleven used to configure any one
recipe (Bar Graph and Peak Jump recipes). When you have configured the
settings in the dialog boxes the previous steps may be reviewed and changed
by moving backwards and forwards through them with the <Back and
Next> buttons. When all settings are correct clicking on the Finish button
will save the recipe or enter the display edit window in the case of Bar
Graph and Peak Jump recipes. Clicking on the Cancel button will close the
recipe create process and none of the settings will be saved.

The following sections describe each of the seventeen set up dialog boxes.
Bar Graph Scan Configure
Peak Jump Scan Configure
Disk Store Settings
Trigger Settings
Hold Settings
Background Settings
Baseline Settings
Action Channel Settings
End of Scan Actions
Start and End of Recipe
Bar Graph Display Settings

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Peak Jump Display Settings
Faraday Calibrate Settings
Multiplier Calibrate Settings
Leak Check Settings
Analog Settings
Set Access

4.4.1. Bar Graph Scan Configure


Used in recipes: Bar Graph

Selecting Bar Graph in the Enter Recipe Details dialog box will bring up
the Bar Graph Scan Configure dialog box, as shown below which contains
a number of sections. Set (or leave at the default setting) the following items.

Scan settings
First Mass:
This is the first mass scanned in the Bar Graph scan. It must be in the range
1 to the maximum mass range of the instrument. In addition the First Mass
must be less than or equal to the Last Mass.

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Last Mass:
The Last Mass scanned in the Bar Graph scan. Masses outside of the range
First Mass to Last mass will not be measured.
Scans:
The Scans defines the maximum number of scans that will be measured and
(optionally) stored to disk. The recipe that is being run may be terminated at
any time (using the “Abort” button) so that fewer scans may be stored. The
data that has been measured so far will be preserved if an Abort is
performed.
Accuracy:
In any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512
readings per point). We recommend accuracy code 3 as a starting point.
Largest Reading:
The hardware and software in Process Eye allows upto six decades of
information to be acquired in one scan. This range may be moved up and
down by selecting the Largest Reading. The smallest valid reading will be
upto six decades lower if a sufficiently high Accuracy has been selected.
Selecting Scan All will cause two gain ranges to be used to give a wider
dynamic range of pressures.
Repeat Recipe:
If the Repeat Recipe check box is checked when the recipe is complete (the
required number of scans have been scanned) the recipe will be re-run after a
short delay of about 2 seconds.
Use Multiplier:
If the optional Electron Multiplier is fitted checking Use Multiplier will
cause it to be selected when the Recipe is run. Changing the detector will
affect the largest peak that can be measured. The multiplier is appropriate for
measuring smaller values of partial pressure.
Slow Scan:
The instrument has two methods of measuring the value of partial pressure
at a mass. It can either scan in small mass increments from -0.5 AMU to +
0.5 AMU about the nominal peak position (Slow Scan) or it can take a single
reading at the nominal peak position. When settling delays are taken into
account the slow scan is about eight times slower than fast scan. Unless it is
essential to scan quickly the slow scan method is recommended as any errors
in Mass Alignment will have no effect in Slow Scan since the highest point
in the peak is determined and used.
HP Scan:

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This is only avaliable if your control unit is an HPQ-2.
Checking HP Scan causes measurements to be made using the High
Pressure mode instrument settings. Otherwise, the RGA mode settings are
used. See section Mode setting (HPQ-2).

Many of the Scan Settings effect the time taken for one scan and/or the
recipe run time. The approximate time for one scan and the entire run are
displayed at the foot of the Scan Settings area. They are updated each time a
parameter changes.
Maximum Inputs
In addition to measuring partial pressures the Process Eye program can
measure and log Analog and Digital signals. The appropriate hardware will
need to be installed to allow Analog and Digital inputs to be enabled. Call
your local Spectra facility for details of supported hardware. Note that
analog and digital signals are measured at the end of the partial pressure scan
and they are only displayed in trend views of the data.
Analog Inputs:
The number of ± 10 Volt (or ± 5 Volt) Analog inputs
Digital Inputs:
The number of TTL compatible Digital inputs
Filament
The mass spectrometer requires a filament to be on before valid readings
may be taken. When a recipe is run the filament selected in Preferences may
be automatically be switched on if is not already on. This option allows the
user to be prompted to confirm that the vacuum system is at a low enough
pressure to switch on the filament without damaging it. This option should
always be enabled unless the "External Trip" input on the rear panel of the
Microvision Plus or HPQ-2 is being used to protect the filaments.
The filament may also be switched on in Start/End of Recipe Actions. If the
filament is to be used to measure a Trigger value it must be switched on
before the recipe starts or, at this point. If, for example, an independent
gauge is used for the (optional) trigger then it may be necessary to leave the
filament off at this point, wait for the external gauge to act as a trigger (e.g.
in a pumpdown) and then use the Start/End of Recipe Actions to turn on the
filament with an optional delay to allow it to settle.
Auto Switch Fil On:
If the Auto Switch Fil On box is checked the Filament will automatically be
switched on when the recipe is run. The user may be asked for confirmation
depending on the setting of the Confirm Fil On check box.
Confirm Fil On:
If the Confirm Fil On box is checked a warning box will be displayed

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before the filament is automatically switched on at the start of a recipe.

When all settings in the Bar Graph Scan Configuration dialog box have
been entered click on the Next> button to open the Disk Store dialog box.
Until the Finish button is clicked you may return to the Bar Graph Scan
Configuration dialog box by clicking on the <Back button.

4.4.2. Peak Jump Scan Configure


Used in recipes: Peak Jump

If Peak Jump is selected in the Enter Recipe Details dialog box the Peak
Jump Scan Configure dialog box will be displayed, as shown below.

Set (or leave at default setting) the following items:


Scan settings
# Channels:
The number of channels defines how many partial pressures will be
measured. It is always in the range 1 to 15 inclusive. Channels higher than
this number are disabled.

Scans:
The Scans defines the maximum number of scans that will be measured and
(optionally) stored to disk. The recipe that is being run may be terminated at
any time (using the Abort button) so that fewer scans may be stored. The
data that has been measured so far will be preserved if an Abort is
performed.

Accuracy:
n any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512
readings per point). We recommend accuracy code 3 as a starting point.

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Largest Peak:
The hardware and software in Process Eye allows upto six decades of
information to be acquired in one scan. This range may be moved up and
down by selecting the Largest Reading. The smallest reading will be upto six
decades lower if a sufficiently high Accuracy has been selected.

Slow Scan:
The instrument has two methods of measuring the value of partial pressure
at a mass. It can either scan in small mass increments from -0.5 AMU to +
0.5 AMU about the nominal peak position (Slow Scan) or it can take a single

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reading at the nominal peak position. When settling delays are taken into
account the slow scan is about eight times slower than fast scan. Unless it is
essential to scan quickly the slow scan method is recommended as any errors
in Mass Alignment will have no effect in Slow Scan since the highest point
in the peak is determined and used.
HP Scan:
This is only avaliable if your control unit is an HPQ-2.
Checking HP Scan causes measurements to be made using the High Pressure
mode instrument setting. Otherwise, the RGA mode settings are used. See
section Mode setting (HPQ-2).
Use Multiplier:
If the optional Electron Multiplier is fitted checking Use Multiplier will
cause it to be selected when the Recipe is run. Changing the detector will
affect the largest peak that can be measured. The multiplier is appropriate for
measuring smaller values of partial pressure.
Repeat Recipe:
If the Repeat Recipe check box is checked when the recipe is complete (the
required number of scans have been scanned) the recipe will be re-run after a
short delay of about 2 seconds.

Many of the Scan Settings effect the time taken for one scan and/or the
recipe run time. The approximate time for one scan and the entire run are
displayed at the foot of the Scan Settings area. They are updated each time a
parameter changes.
I/O
For each enabled channel (set using # Channels) a partial pressure mass is
defined. In addition to measuring partial pressures the Process Eye program
can measure and log Analog and Digital signals. The appropriate (optional)
hardware will need to be installed in order for Analog and Digital inputs to
be enabled. Note that analog and digital signals are measured at the end of
the partial pressure scan and they are only displayed in trend views of the
data.
Analog Inputs:
The number of ± 10 Volt (or ± 5 Volt) Analog inputs.
Digital Inputs:
The number of TTL compatible Digital inputs.
Filament
The mass spectrometer requires a filament on before valid readings may be
taken. When a recipe is run the filament selected in Preferences will
automatically be switched on if is not already on. This option allows the user
to be prompted to confirm that the vacuum system is at a low enough

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pressure to switch on the filament without damaging it. This option should
always be enabled unless the "External Trip" input on the rear panel of the
Microvision Plus or HPQ-2 is being used to protect the filaments.
The filament may also be switched on in Start/End of Recipe Actions. If the
filament is to be used to measure a Trigger value it must be switched on
before the recipe starts or, at this point. If, for example, an independent
gauge is used for the (optional) trigger then it may be necessary to leave the
filament off at this point, wait for the external gauge to act as a trigger (e.g.
in a pumpdown) and then use the Start/End of Recipe Actions to turn on the
filament with an optional delay to allow it to settle.
Switch Filament On:
If the Switch Filament On box is checked the filament will automatically be
switched on when the recipe is run. The user may be asked for confirmation
depending on the setting of the Confirm Fil On check box.
Confirm Filament On:
If the Confirm Fil On box is checked a warning box will be displayed
before the filament is automatically switched on at the start of a recipe.

When all settings in the Peak Jump Scan Configuration dialog box have
been entered click the Next> button to open the Disk Store dialog box. Until
the Finish button is clicked you may return to the Peak Jump Scan
Configuration dialog box by clicking the <Back button.

4.4.3. Disk Store Settings


Used in recipes: Bar Graph, Peak Jump

Step 2 of creating a Bar Graph or Peak Jump recipe is to define the disk
store parameters.

Store To Disk
Do Not Store Any Data:
Checking this option disables disk storing of data. Measured data will be
displayed but it cannot be recalled at a later date. This option would not
normally be used.

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Store Every Scan:
At the end of each scan all partial pressures, the total pressure and any
Analog, Digital or Action channel data will be stored to disk to either the
user entered filename or the Automatically Incrementing filename.

File name
User Specified At Start Of Recipe:
If enabled when the recipe is run the operator will be prompted to enter a
filename using a standard windows filename dialog box.

Automatically Incrementing:

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If this option is enabled when the recipe is run the program will create a
filename using the Base Name and a number which is increased by one with
each file stored to disk.

Define By Chamber Details:


The filename is based on the serial number and chamber details for a
specific PVD sputter system. This is specific to Applied Materials and is not
generally used.

Defined by DDE:
The filename will be defined by the filename parameter associated with the
RUN RECIPE DDE command. e.g. The DDE command:
RUN RECIPE,1,c:\data\head1\run001.wbg
would only store data in a file c:\data\head1\run001.wbg if recipe with
number 1 (in Proc.ini / Procnnn.ini) had Define by DDE as the filename
type. Note that the directory c:\data\head1 must exist before the recipe is run
with the DDE Run Recipe command.

Date and Time (mmddhhmm):


The filename will be created automatically based on the time and date. The
first two characters of the filename will be defined by the month, the second
two by the day, the next two by the hour and the last two by the minutes. For
instance, a Bar Graph recipe started at 9:40 pm on 19th March would have
the filename 03192140.WBG. If the recipe is repeated within a minute,
thereby calling for an identical filename, the user will be prompted to wait
for a minute. We recommend the use of this method of automatically
creating filenames.

Base Name:
When the filename has been set to Automatically Incrementing the program
uses the Base Name as the root of the created file name. For example if a
Base Name of DATA was chosen, the first data file will be named
DATA0000.WBG the second file will be named DATA0001.WBG and so
on.

Be aware of the DOS limitation of eight character filenames. In the above


example a total of 10,000 files are possible (DATA0000.WBG to
DATA9999.WBG). If the base name used seven characters you would only
have a maximum of 10 distinct file names before older file names would be
reused and the data overwriten.

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Directory:
The DOS directory that the automatically created files will be placed in. This
directory must already exist before an attempt to store data is made.

Drives:
The disk drive where the directory for automatically created files is located.

Zip Files:
When the recipe has finished running, the four files relating to it (the data
file (.WBG for Bar Graph recipes .WPJ for Peak Jump recipes), the
information file (.INF), the optional comment file (.TXT) and the optional
alarm event file (.ALM) will be compressed into a single file with the same
name but with the extension .ZIP. The ZIP file uses less disk space than the
normal Process Eye data files and keeps all related files together.

Delete Originals:
Delete Originals is only available when Zip Files: is checked and will cause
the original Process Eye data files to be deleted so that only the ZIP file is
saved.

Options
User Header Enabled:
When a data file is stored to disk, header information is stored at the start of
the file. This information includes such things as the time and date, software
version numbers, number of scans etc. In addition to the information
automatically recorded it is possible to configure the system to prompt the
operator to enter additional fields of information which may later be
accessed if the data file is loaded into a spreadsheet, database or word
processor. To enable the User Header feature first configure the fields in the
Preferences dialog box found in the Utilities menu.

Safe Storage:
When the Safe Storage box is checked the disk file is closed after each scan.
This means that if the computer shuts down say, due to lost of power, the
data stored so far will not be lost. Unless you are running fast scans on a
slow PC we recommend Safe Storage to be enabled as the overhead is very
small.

Selecting Next> will display the Trigger dialog box.

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4.4.4. Trigger Settings
Used in recipes: Bar Graph, Peak Jump

Step three of creating or editing a Bar Graph or Peak Jump recipe is to


configure the Trigger settings. If the Trigger feature is enabled, then, when a
recipe is started, it will initialize and then go into a holding pattern. The
usual reason to do this is to synchronize the start of data storage with an
external event. This becomes vital when multiple data files are to be
combined into a Baseline. When waiting for a trigger condition to become
true the current value and the Trigger point are displayed. There are a
number of Trigger options.

None:
On starting the recipe, scanning and data storage (if enabled) start straight
away.

Partial Pressure:
When selected, the recipe will hold until the partial pressure of the selected
mass is either less than or greater than the programmed value. To toggle
between < (less than) and > (greater than) click on the </> symbol. The
programmed value is in the currently selected units. Enter the mass value in
the Mass: box. The partial pressure will be measured at the same accuracy
and the same scan type (slow or fast) as the Scan Settings for that recipe.

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Analog Input:
If the optional Analog input hardware has been installed, configured and at
least one Analog input has been selected in the Scan Settings then an Analog
Input may be used as a Trigger. The trigger point may be toggled between <
(less than) and > (greater than) by clicking on the </> symbol. If more than
one Analog Input is available the desired one can be selected in the
Channel: box.

Digital Input:
If the optional Digital input hardware has been installed, configured and at
least one Digital input has been selected in the Scan Settings then a Digital
Input may be used as a Trigger. The trigger point may be toggled between
True (>2.4V) and False (<0.8V) by clicking on the True/False text. If more
than one Digital Input is available the desired one can be selected in the
Channel: box.

Time:
When enabled if the time exceeds the programmed value the recipe will
start. The time is defined in twenty four hour format.

Force Trigger Key:


Checking the Force Trigger Key check box will cause the Force Trigger
button to be available in the Trigger panel. The recipe may be started by
clicking on the Force Trigger button when it is in a holding pattern waiting
for the trigger event.

Abort Recipe Key:


Checking the Abort Recipe Key check box will cause the Abort Recipe
button to be available in the Trigger panel. When the recipe is in a holding
pattern waiting for the trigger event the Trigger window will be displayed
and the recipe may be terminated by clicking on the Abort Recipe button.

If you enter a trigger condition that never occurs the only way to exit from
the recipe is to use the Abort Recipe button or the Force Trigger button.
We recommend you to enable the Abort Recipe Key at least until you are
sure your recipe runs satisfactorily.

When the recipe is run Process Eye will go into a holding pattern waiting for
the trigger to occur. During this time the software continuously monitors the
trigger input to ensure a rapid response as soon as the trigger event occurs.

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TIP
The trigger feature only allows a single input to start the recipe. If you want
a more complex series of events such as, mass 28 > 5x10-7 Torr OR mass 18
> 1x10-7 Torr AND digital input 3 true you should create a recipe to
determine the condition. The outcome of this recipe will simply be to start
the main recipe.

Selecting Next> will display the Hold dialog box.

4.4.5. Hold Settings


Used in recipes: Bar Graph, Peak Jump

Step four of creating a Bar Graph or Peak Jump recipe is to define the hold
parameters.

There may be periods during a recipe run when there is no need, or you
don’t want to store data. It is possible to temporarily stop the recipe and let it
continue again based on one of the four parameters defined below.

None:
The Hold function is not used and the recipe will run continuously.

Partial Pressure:
When selected, the recipe will hold while the partial pressure of the selected
mass is either less than or greater than the programmed value. To toggle

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between < (less than) and > (greater than) click on the </> symbol. The
programmed value is in the currently selected units. The partial pressure will
be measured at the same accuracy and the same scan type (slow or fast) as
the Scan Settings for that recipe.

Analog Input:
If the optional Analog input hardware has been installed, configured and at
least one Analog input has been selected in the Scan Settings then an Analog
Input may be used as a Hold parameter. The trigger point may be toggled
between < (less than) and > (greater than) by clicking on the </> symbol. If
more than one Analog Input is available the desired one can be selected in
the Channel box.

Digital Input:
If the optional Digital input hardware has been installed, configured and at
least one Digital input has been selected in the Scan Settings then a Digital
Input may be used as a Hold parameter. The trigger point may be toggled
between True (>2.4V) and False (<0.8V) by clicking on the True/False text.
If more than one Digital Input is available the desired one can be selected in
the Channel box.

Selecting Next> will display the Background dialog box.

4.4.6. Background Settings


Used in recipes: Bar Graph, Peak Jump

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Configuring the background settings is step five of creating or editing a Bar
Graph or Peak Jump recipe. A background is defined in Process Eye as a
data scan or scans that are used to modify either the data being measured or
data previously stored. It is important to realize that it is only the display of
the data that is modified, not the data itself. In fact it is possible to show data
in its raw form and, simultaneously, in its modified state. It is possible to
modify the Bar Graph and Peak Jump scanned data displays and Trend
views. Data may have a background either subtracted from it or ratioed to it.
There are three types of Background data:

Enable Background Subtract and Ratio:


To enable Backgrounds and access the settings Enable Background
Subtract and Ratio must be checked.

Scan Number One of Active Run:


When selected the first scan of data in the current run is used as the
Background data.

Single Scan of Selected File:


A single scan of a file selected using the Browse . . . button is used as the
Background data. To ensure best results it is recommended that a file stored
using a recipe the same as that which is being created is used as the
Background file. To do this create a recipe, store the data file(s) and then use
Edit Recipe to modify it.

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All Scans (Trend) of Selected File:
In this setting each scan in the data has a corresponding scan in the
background file selected using the Browse . . . button. To ensure best results
it is recommended that a file stored using a recipe the same as that which is
being created is used as the Background file. To do this create a recipe, store
the data file(s) and then use Edit Recipe to modify it.

Browse:
This button brings up a standard Windows file dialog box to let the desired
file be selected.

Clicking on the Next> button will display the Baseline dialog box.

4.4.7. Baseline Settings


Used in recipes: Bar Graph, Peak Jump

This is step six of creating or editing a Bar Graph or Peak Jump recipe. A
Baseline is defined in Process Eye as a statistical combination of one or
more data files. A Baseline actually consists of two files, a Mean file and a
Standard Deviation file. To help visualize a Baseline think of a single data
file as a spreadsheet with consecutive rows corresponding to consecutive
scans and readings of the same mass (or Analog or Digital channel) being in
the same column. Multiple data files (spreadsheets) are then placed on top of
one another and by "drilling" down through the sheets a series of numbers
are obtained at each row/column intersection. These numbers are used to
calculate the Mean and Standard Deviations. The Mean file has a default
extension of .BL and the Standard Deviation file uses .SD. The Mean file is

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in the same format as a regular data file and it may be viewed in the regular
way. As a display modify option a Baseline is similar to Background
Subtract and Ratio but the displayed data is now the difference between the
data and the mean file and it is expressed in standard deviations. So if a
particular point on a scan had a value of 2.2 E-06 and the corresponding
Mean and Standard Deviation for that point were 2.1E-6 and 0.05E-06 then
the modified point would have a value of +2.0 Standard Deviations from
(2.2-2.1)/0.05.
However, in addition to acting as a display modifier the modified value can
be used as an alarm. This is a powerful and efficient means of monitoring
abnormal changes in gas or vacuum conditions.

Enable Baseline:
To enable Baseline and access the settings Enable Baseline must be
checked. Once a Baseline has been selected the data (in Bar Graph, Peak
Jump or Trend) may be displayed in terms of standard deviations from the
mean (the linear display with a Display minimum of -10, a maximum of +10
and a decade of E+00 usually gives the clearest display of data in the
“Standard Deviation” display mode.

File Name:
The Browse . . . button allows the required Baseline file to be selected.
Only the .BL file need be selected, the corresponding .SD file will
automatically be used.

Click on the Next> button to display the Action Channels dialog box.

4.4.8. Action Channel Settings


Used in recipes: Bar Graph, Peak Jump

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The seventh step in creating or editing a Bar Graph or Peak Jump recipe is to
configure the action channels. An action channel is a user defined channel
displayed and stored in Process Eye in the same way as a partial pressure.
The action channel will usually be based on one or more partial pressures or
external inputs (analog or digital or even other Action channels). For
example you may wish to display as a trend the ratio of oxygen to nitrogen
so you could set Action Channel 1 to mass 28 / mass 32. In this step we tell
Process Eye the number of action channels we wish to use and then name
them. The condition or calculation for the action channel is defined in the
next step.

Click on the Number of channels dropdown list box then, click on the
required number in the list. In the Channel Name section of the dialog box
there will be one box for each channel. Position the cursor in the box and
type the required name or, leave it set to the default.

If no Action channels have been defined the Save Calculation function in


End of Scan Actions True/False/Always Actions will be disabled.

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Click on the Next> button to display the End of Scan Actions dialog box.

4.4.9. End of Scan Actions


Used in recipes: Bar Graph, Peak Jump

The End of Scan Actions provides Process Eye with one of its most
powerful features where complex conditions may be built up using a wide
variety of parameters. The End of Scan Actions consist of an unlimited
number of steps with each step being based on a condition statement or
calculation. As a result of the condition statement certain actions may take
place. The result of one step may be used as an input to another step
enabling complex condition statements to be constructed. The evaluation of
all the condition statements in all the steps occurs at the end of each scan
when the recipe is running, hence the name, End of Scan Actions. Each
condition statement contains up to three inputs and two operations. Each
input can be for example, a partial pressure reading, a constant, mean,
standard deviation or the result of a previous step. The operation can be a
mathematical or a logic operation. When the defined condition is met or
changes an action will take place. Actions can consist of displaying a
message, enabling an audio alarm, setting a digital output, set the RVC,
switch a filament, starting a recipe or providing a result for another step.

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The steps are evaluated (step 1 first, then step 2 and so on) at the end of each
scan. Note that the second operation and third input of each step are optional
and may be left blank.

Enable actions
Click on the Enable Actions check box to enable the End of Scan Actions
facility.

Delete action step


Click on the Delete This Action Step button to delete the action step. The
Delete This Action Step button is only enabled when the last step is
selected. A warning box will be displayed, click on the OK button to delete
the step.

Enter the condition using up to three inputs and two operations. Click on the
Input 1 dropdown list (click on the down arrow to the right of the Input 1
box) then click on the required input type. The various input types are
described below. Depending on the input type one or two additional boxes
may be displayed below the input box, these are also described below for
each input type.

Click on the Operation dropdown list then, click on the required operation
in the list. The operations are fully described below.

Repeat the above for Input 2.

A second operation and a third input can be added if required.

Each of the three input dropdown lists are identical as are the two operation
dropdown lists.

Inputs
Channel
Select channel from the Input dropdown list box to use a channel input. A
second dropdown list box will be displayed, from which the type of channel
input should be selected and possibly another box, the variable box, will be
displayed below this depending on the type of channel input. From the
second dropdown list box, used to select the type of channel input, see
NOTE below.

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Abs (Std dev from mean)
A number of standard deviations from the mean. Only valid when a baseline
file is loaded for the currently running recipe.

Mean
The average value for the specified input. Only valid when a baseline file is
loaded for the currently running recipe.

Std dev
The standard deviation for the specified input. Only valid when a baseline
file is loaded for the currently running recipe.

Background
The background value for the specified input. Only valid when a background
file is loaded for the currently running recipe.

Gradient
The slope of a curve as a loglog slope defined for a channel for the specified
input. By default the last 10 points are used to define the gradient.

Summation
The sum of the values from the start of the recipe to current scan for the
specified input. By default all scans in the run are included in the summation
calculation.

NOTE
Channel, Abs, mean, std. dev., background, gradient and summation all use
a second dropdown list box where Mass, Total, Action, Analog or Digital
may be selected. They all generate data corresponding to the current scan.
Select Mass to use a partial pressure measurement in which case enter the
mass number in the variable box. For Bar Graph recipes the mass must be
within the mass range being scanned. For peak jump recipes the mass value
must be the same as one of the enabled channels. Select Total to use the total
pressure reading. There will be no variable box when this is selected. Select
Action to use one of the action channels. The variable box will be replaced
with a dropdown list box from which you should select the required action
channel. The number and names of the action channels displayed in this
dropdown list box will depend on the settings in step 7.

Constant
A constant value. The input is a free format so standard and scientific

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formats are valid. i.e. to enter 100 either type 100, 100.00, 1E2, 1.00E+2 etc.

Step Result
The result of a previous step condition. Enter the number of the step in the
variable box.

Variable
Process Eye supports any number of user defined variables. Variables allow
complex condition statements to be built up using more than the three inputs
allowed in a single condition statement. Before a variable can be entered as
an input it must be used to save a result from a prior end of scan action step.
Enter the number of the variable in the variable box. Variables are named 1,
2, 3 etc..

Timer
The number of seconds since a timer was started. Any number of timers are
allowed, enter the timer number in the variable box. If a timer has not been
started it will be given a value of 0.0. Timers are named 1, 2, 3 etc..

Scan Number
The current scan number. This will be 1 the first time a step is evaluated,
two the second time etc. because steps are evaluated at the end of each scan.

Time from start


The time from the start of the recipe in seconds.

Operations
Below we assume the first operation is being used and therefore, being
applied to inputs 1 and 2. The second operation is identical but will, of
course, involve input 3.
There are two types of operations:
Mathematical such as + (add) and - (subtract) which take one or two
numbers as inputs and generate another number as a result
Logical such as > (greater than) and = (equal) which take two numbers as
inputs and generate either true (1) or false (0) as a result.

Some operators such as NOT (invert) and LOG (log base 10) only need a
single input. In these cases the second input will be ignored.

+ Performs the mathematical add function. Adds input 1 to input 2.

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- Performs the mathematical subtract function. Subtracts input 2 from
input 1.

* Performs the mathematical multiply function. Multiplies input 1 by


input 2.

/ Performs the mathematical divide function. Divides input 1 by input


2.

> Greater than. Evaluates whether input 1 is greater than input 2.

< Less than. Evaluates whether input 1 is less than input 2.

>= Greater than or equal to. Evaluates whether input 1 is greater than or
equal to input 2.

<= Less than or equal to. Evaluates whether input 1 is less than or equal
to input 2

= Equal to. Evaluates whether input 1 is equal to input 2.

Take care when using the = (equals) operator. For example do not use Timer
1 = 15 to do something because the first time Timer 1 is evaluated it may
have a value of 14.6 say, the next time it is evaluated it may have a value of
15.6. Instead use Timer 1 > 15 or >= 15.

<> Not equal to. Evaluates whether input 1 is not equal to input 2.

AND Performs the logical AND function. Input 1 AND input 2.

OR Performs the logical OR operation. Input 1 OR input 2.

XOR Performs the logical exclusive OR operation. Input 1 XOR input 2.

NOT Performs the logical invert operation. There is no second input


involved. Invert input 1.

LOG Calculates the logarithm to the base 10 of input 1. There is no input


2.

10^ Takes input 1 and raises it to the power 10. There is no input 2.

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LN Calculates the logarithm to the base e of input 1. There is no input
2.

EXP Takes input 1 and raises it to the power of e. There is no input 2.

Once the condition you have specified is meet you will want some action to
take place. The process of defining the action begins with the Actions When
Condition Changes section of the dialog box and continues with the second
page of the End of Scan Actions dialog box. See Enable Actions for more
details.

Enable Actions
Enable True Actions
Check the Enable True Actions check box to allow the actions to take place
when the condition statement changes from false to true. Once Enable True
Actions is enabled the Set True Actions button will become available (cease
being grayed out).

Enable False Actions


Check the Enable False Actions check box to allow the actions to take place
when the condition statement changes from true to false. Once Enable False
Actions is enabled the Set False Actions button will become available
(cease being grayed out).

Set True Actions


Click on the Set True Actions button to open the second page of the End of
Scan Actions dialog box where the actions to take place when the condition
changes from false to true may be configured.

Set False Actions


Click on the Set False Actions button to open the second page of the End of
Scan Actions dialog box where the actions to take place when the condition
changes from true to false may be configured.

Note that the True and False Actions are only executed when the evaluation
of the step changes from the previous step.

Enable Always Actions


Check the Enable Always Actions check box to allow the actions to take

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place at the end of each scan. Once Enable Always Actions is checked the
Set Always Actions button will become available.

Set Always Actions


Click on the Set Always Actions button to open the second page of the End
of Scan Actions dialog box where the actions to take place at the end of
each scan may be configured.

In the second page of the End of Scan Actions dialog box you set up the
actions you want to take place at the end of each scan if you have clicked the
Set Always Actions button, when the condition statement is true if you have
clicked the Set True Actions button or when the condition statement is false
if you have clicked the Set False Actions button. Whichever of the three
buttons has been used the second page of the dialog box is the same.

Add to Alarm Log


The Alarm Log records all the alarms from the various steps you have set
up. The Alarm Log is a file that can be viewed with the Alarm Event Viewer
window both during a recipe run and when recalling data at a later date.
When the Add to Alarm Log check box is checked the Show/Hide Viewer,
Audio Alarm, Flag on Warning and Message Box options can be used.

Show Viewer
When checked the Alarm Event Viewer window will be displayed as soon

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as an alarm condition occurs. If the Alarm Event Viewer window is already
displayed, it remains so.

Hide Viewer
When checked this hides the Alarm Event Viewer window when an alarm
condition occurs. If the Alarm Event Viewer window is not currently
displayed, it remains so. This option is usually used to clear the Alarm Event
Viewer window when setting false actions.

Audio Alarm
When the alarm condition is true an audio alarm tone will be generated by
the PC if the Audio Alarm check box is checked. The alarm tone is turned
off by checking the Sound Off check box in the Alarm Event Viewer
window.

Flag as Warning
If the Flag as Warning check box is checked the Alarm Event Viewer
window will be shown in yellow rather than red to indicate a warning rather
than an alarm.

Message:
In the Message box enter the text you wish to appear in the Alarm Log and
in the Alarm Event Viewer window displayed as a result of an alarm
condition being true.

Set Digital Output


Check the Set Digital Output check box to use a digital output line when an
alarm occurs. In the box enter the number of the digital output you wish to
use. Click on the dropdown list box and select True to set the output to logic
‘1’ when the alarm occurs or select False to set to output to logic ‘0’ when
an alarm occurs.

Switch Filament
Check the Switch Filament check box to switch the filament on or off. From
the dropdown list box select On or Off as required.

Timer
Check the Timer check box to start or stop a timer. In the box you must
enter the number of the timer (Process Eye allows any number of timers).
The timers are used as inputs in subsequent alarm steps. From the dropdown
list box select Start or Stop as required.

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Save Calculation
Check the Save Calculation check box to store the result of the calculation
done in this step of the end of scan actions in one of the Action channels.
Click on the dropdown list box and select the required Action channel. You
must have enabled at least one Action channel in the previous step of the
recipe set up.

Run Recipe
As an end of scan action you may run another recipe. To do this check the
Run Recipe check box and select from the dropdown list box the recipe you
want to run.

Set Variable
Any number of user defined variables are allowed in Process Eye and they
are used as inputs in the condition statements. In this way complex condition
statements may be built up using more than the three inputs allowed in a
single condition statement. To set a variable check the Set Variable check
box then enter the number of the variable. From the dropdown list box select
one of the items. Selecting Calculation will set the variable to the result of
the condition calculation. The variable may be set to one of the three inputs
or may be used as an incremental or decremental counter by selecting
Increase by 1 or Decrease by 1. Selecting 0.0 will set the variable to zero.

End Recipe
Check the End Recipe check box to terminate the recipe as a result of the
end of scan action step.

Set RVC
Set RVC will only be available when a Remote Vacuum Controller is fitted.
One of the six outputs on the RVC may be set on or off as a result of the End
of Scan Action. Check the Set RVC check box, click on the Output
dropdown list and select the required output (see table below) then, click on
the second dropdown list and select On or Off.

Output Normal Use RVC Skt 1 Contacts


0 Pumps 4 and 12
1 Valve 1 1 and 9
2 Valve 2 2 and 10
3 Alarm 3 and 11
4 Turbo Standby 6 and 14

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5 Heater Jacket 5 and 13

When you have configured all the true actions click on the OK button to
return to the first page of the End of Scan Actions dialog box where you can
configure the next step of the alarm.

4.4.10. Start and End of Recipe


Used in recipes: Bar Graph, Peak Jump

The ninth step of creating or editing a Bar Graph or Peak Jump recipe is to
define the Start and End of Recipe Actions.

Start of Recipe Actions


Switch Filament On:
If the Switch Filament On box is checked the filament will automatically be
switched on when the recipe is run. The user may be asked for confirmation
depending on the setting of the Confirm Fil On check box.

Confirm Filament On:


If the Confirm Fil On box is checked a warning box will be displayed
before the filament is automatically switched on at the start of a recipe.

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Delay (seconds):
Check the Delay (Seconds) check box and enter a value in the range 1 to
32000 seconds. When the recipe is run there will be a delay before the recipe
is run. The Start Recipe Delay window will be displayed showing the time
remaining. If a trigger has been set the delay will start when the trigger event
occurs. A minimum delay of 30 seconds is recommended.

Lockout during run


This is used to stop people altering the display settings or stopping a recipe
while it is running. Check the Lockout during run check box to disable the
buttons on the Process Eye screen and the menu bar while a recipe is
running. This option will only be enabled when Return to Main Display is
checked.

Open Process Valve


This option is only available on systems fitted with a Remote Vacuum
Controller.

Close Process Valve


This option is only available on systems fitted with a Remote Vacuum
Controller.

End of Recipe Actions


Switch Filament Off:
When the recipe has finished the filament will be switched off if the Switch
Filament Off box has been checked.

Return to Main Display:


If the Return to Main Display box is checked when the recipe has finished
the display will return to the Process Eye Select Mode window. Otherwise,
the data screen will remain displayed and the user must select Exit to
continue.

Open Process Valve


This option is only available on systems fitted with a Remote Vacuum
Controller.

Close Process Valve


This option is only available on systems fitted with a Remote Vacuum
Controller.

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Selecting Next> will display the Bar Graph Display dialog box or the Peak
Jump Display dialog box.

4.4.11. Bar Graph Display Settings


Used in recipes: Bar Graph

At this point the data that will be acquired during the scan has been defined.
None of these settings may be changed “on the fly”. The display however is
allowed to be changed at any time. This step allows you to define how the
data will initially be displayed when the recipe runs and when it is recalled
from disk.

Display
Live Data:

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As each partial pressure is scanned it is updated on the graph. If data is being
recalled from disk then the Live Data option will be grayed out.

Fixed Scan:
Any scan in the range from 1 to Maximum Scans (as defined in step one)
may be viewed. If a scan number is selected that has not yet been scanned,
then, when it is scanned, the display will be updated. If you click on a Trend
display of data then Fixed Scan will be selected with the scan number at or
just before the point of the cursor.

Double clicking on the x-axis of the Bar Graph display is a short cut to
switching from Fixed Scan to Live Data.

Scan:
If Fixed Scan is selected the Scan: box will be displayed. Click on the up or
down arrow to select the scan you wish to display or type in the scan
number.

Show Total Pressure


If Show Total Pressure is checked the Total Pressure reading will be
displayed otherwise, it will not be displayed and the screen space will be
used by increasing the length of the y-axis. The Total Pressure will always
be measured at the end of each scan whether it is displayed or not. Note that
total pressure is the sum of the measured partials. If one or more significant
peaks are not measured as part of the scan the total pressure may be
inaccurate.

Modify display
Backgrounds and Baselines (standard deviation) of the measured signals
(partial pressure, total pressure, analog inputs and, for Backgrounds only,
digital inputs) permit data to be displayed not just in their “raw” format but
modified in one of the following ways.

None:
No modifications (other than any calibration settings) are applied to the data.

Background Subtract:
The appropriate background value is subtracted from the data. This option
will be grayed out if a background has not been selected. Usually a linear Y-
Axis display with a decade setting close to the decade the data is at is the
most appropriate way to view Background Subtracted data as a negative

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minimum can be selected.

Background Ratio:
The Data is divided by the selected background data. This option will be
grayed out if a background has not been selected. Usually a linear Y-Axis
display with a decade setting of E+00 is the most appropriate way to view
Background Ratioed data as the results will be 1.0 or close to 1.0 if the data
tracks the background.

Standard Deviation:
The mean (or average) value at a corresponding point of a baseline file is
subtracted from the data and the result is divided by the standard deviation at
that point. Usually a linear Y-Axis display with a decade setting of E+00 is
the most appropriate way to view Standard Deviation data as a negative
minimum can be selected.

X-Axis
Display First Mass:
The First Mass actually scanned is defined by First Mass set in step one.
However, the First Mass displayed may be any value from the First Mass
scanned to the Last Mass scanned. The Display First Mass must also be less
than or equal to the Display Last Mass.

Display Last Mass:


The Last Mass actually scanned is defined by Last Mass set in step one.
However, the Last Mass displayed may be any value from the Last Mass
scanned to the First Mass scanned. The Display Last Mass must also be
greater than or equal to the Display First Mass.

Minor Ticks:
The distance between major ticks on the X-Axis will depend on the
resolution of the screen and the size of the graph. Selecting Minor Ticks
allow smaller mass increments to be determined by eye.

Cursor:
When enabled the Cursor feature allows mass identification and precise
readout of the partial pressure. Once enabled, to set the cursor to a particular
mass click on the graph area and drag the cursor until the desired mass is
shown in the area at the top of the graph. Once selected the cursor value will
be updated as new data arrives.

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Show Time:
Check the Show Time check box to display the time as part of the a-axis
label. Click on the Real radio button to show the actual time or click on the
Elapsed radio button to show the time elapsed since the start of the recipe.

Y-Axis
Logarithmic:
Sets the Y-axis to be a logarithmic scale. The maximum and minimum
values that can be displayed are set using Max and Min. The largest and
smallest decades permitted are set in Utilities | Preferences by selecting the
desired Max Displayed Decade and Min Displayed Decade.

Linear:
Sets the Y-Axis to be a linear scale. The maximum and minimum values that
can be displayed are set using Max and Min and Decade. The maximum and
minimum values can be positive or negative and the decade can be anywhere
in the range Max Displayed Decade to Min Displayed Decade.

Min:
Sets the smallest value that can be displayed. If Logarithmic Y-Axis has
been selected it will be a pick list of decades (in the range Max Displayed
Decade to Min Displayed Decade). If Linear Y-Axis has been selected it will
be a text box where the value must be typed, any value positive or negative
is allowed. This setting is multiplied by the Decade setting to give the actual
minimum. In linear Y-axis, Min must be 1 less than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.

Max:
Sets the largest value that can be displayed. If Logarithmic Y-Axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade
to Min Displayed Decade). If Linear Y-Axis has been selected it will be a
text box where the value must be typed, any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
maximum. In linear Y-axis, Max must be 1 greater than Min. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01.

Decade:
This is only visible when Linear is selected. It sets the scaling factor applied
to Min and Max, e.g. to display -5.00E-07 to +5.00E-07 set -5 as Min, 5 as

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Max and 1E-07 as Decade.

Grid:
Switches on a horizontal grid to assist in visually reading peaks. The values
that have a grid line correspond to where the y-axis is labeled. This in turn
will depend on the resolution of the screen and the size of the graph.

Minor Ticks:
Enables fine horizontal lines to be displayed. The values that have a grid line
will depend on the resolution of the screen and the size of the graph.

4.4.12. Peak Jump Display Settings


Used in recipes: Peak Jump
At this point the data that will be acquired during the scan has been defined.
None of these settings may be changed “on the fly”. The display however is
allowed to be changed at any time. Step ten allows you to define how the
data will initially be displayed when the recipe runs and when it is recalled
from disk.

Display
Live Data:
As each partial pressure is scanned it is updated on the graph. If data is being
recalled from disk then the Live Data option will be grayed out.

Fixed Scan:
Any scan in the range from 1 to Maximum Scans (as defined in step one)
may be viewed. If a scan number is selected that has not yet been scanned,
then, when it is scanned, the display will be updated. If the mouse is clicked
on a Trend display of data then Fixed Scan will be selected with the scan
number at or just before the point of the cursor. Double clicking on the x-
axis of the Peak Jump display is a short cut to switching from Fixed Scan to
Live Data.
Scan:
If Fixed Scan is selected the Scan: box will be displayed. Click on the up or
down arrow to select the scan you wish to display or type in the scan
number.

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Show Total Pressure
If Show Total Pressure is checked the Total Pressure reading will be
displayed otherwise, it will not be displayed and the screen space will be
used by increasing the length of the y-axis. The Total Pressure will always
be measured at the end of each scan whether it is displayed or not.
Remember that the total pressure is the sum of the measured partials. If one
or more significant peaks are not measured as part of the scan the total
pressure may be inaccurate.

Modify display
Backgrounds and Baselines (standard deviation) of the measured signals
(partial pressure, total pressure, analog inputs and, for Backgrounds only,
digital inputs) permiot data to be displayed not in their “raw” format but
modified in one of the following ways.

None:

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No modifications (other than any calibration settings) are applied to the data.

Background Subtract:
The appropriate background value is subtracted from the data. This option
will be grayed out if a background has not been selected. Usually a linear Y-
Axis display with a decade setting close to the decade the data is at is the
most appropriate way to view Background Subtracted data as a negative
minimum can be selected.

Background Ratio:
The Data is divided by the selected background data. This option will be
grayed out if a background has not been selected. Usually a linear Y-Axis
display with a decade setting of E+00 is the most appropriate way to view
Background Ratioed data as the results will be 1.0 or close to 1.0 if the data
tracks the background.

Standard Deviation:
The mean (or average) value at a corresponding point of a baseline file is
subtracted from the data and the result is divided by the standard deviation at
that point. Usually a linear Y-Axis display with a decade setting of E+00 is
the most appropriate way to view Standard Deviation data as a negative
minimum can be selected.

X-Axis (peak jump)


Cursor:
When enabled the Cursor feature allows Channel identification and precise
readout of the partial pressure. Once enabled, to set the cursor to a particular
Channel click on the graph area and drag the cursor until the desired Channel
is shown in the area at the top of the graph. Once selected the cursor value
will be updated as new data arrives.

Show Time:
Check the Show Time check box to display the time as part of the x-axis
label. Click on the Real radio button to show the actual time or click on the
Elapsed radio button to show the time elapsed since the start of the recipe.

Y-Axis
Logarithmic:
Sets the Y-axis to be a logarithmic scale. The maximum and minimum
values that can be displayed are set using Max and Min. The largest and
smallest decades permitted are set in Utilities | Preferences by selecting the

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desired Max Displayed Decade and Min Displayed Decade.

Linear:
Sets the Y-Axis to be a linear scale. The maximum and minimum values that
can be displayed are set using Max, Min and Decade. The maximum and
minimum values can be positive or negative and the decade can be anywhere
in the range Max Displayed Decade to Min Displayed Decade.

Min:
Sets the smallest value that can be displayed. If Logarithmic Y-Axis has
been selected it will be a pick list of decades (in the range Max Displayed
Decade to Min Displayed Decade). If Linear Y-Axis has been selected it will
be a text box where the value must be typed. Any value positive or negative
is allowed. This setting is multiplied by the Decade setting to give the actual
minimum. In linear Y-axis, Min must be 1 less than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01
(Decade).

Max:
Sets the largest value that can be displayed. If Logarithmic Y-Axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade
to Min Displayed Decade). If Linear Y-Axis has been selected it will be a
text box where the value must be typed, any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
maximum. In linear Y-axis, Max must be 1 greater than Min. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01
(Decade).

Decade:
This is only visible when Linear is selected. It sets the scaling factor applied
to Min and Max, e.g. to display -5.00E-07 to +5.00E-07 set -5 as Min, 5 as
Max and 1E-07 as Decade.

Grid:
Switches on a horizontal grid to assist in visually reading peaks. The values
that have a grid line correspond to where the y-axis is labeled. This in turn
will depend on the resolution of the screen and the size of the graph.

Minor Ticks:

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Enables fine horizontal lines to be displayed. The values that have a grid line
will depend on the resolution of the screen and the size of the graph.

4.4.13. Faraday Calibrate Settings


Used in recipes: Faraday Calibrate

This recipe is used to calibrate the partial pressure readings made using the
instrument's Faraday detector.
Selecting Faraday Calibrate in the Enter Recipe Details dialog box will
bring up the Faraday Calibrate dialog box which contains a number of
sections. Set (or leave at the default setting) the following items.

Mass of Calibration Peak


This defines the mass to be used for the calibration. Click on the dropdown
list box and select one of the standard gases from the list or, if the required
mass is not available simply type in the mass number. Generally, this should
be the major peak of the predominant gas present.

Largest Peak . . .
Largest Peak Height Measurable with Faraday is not used and will

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always be grayed out. It should correspond to the highest pressure your
system is designed to sample. If it is not correct please contact your local
Spectra facility.

Actual (Total) Pressure . . .


In the Actual (Total) Pressure During Calibration box enter the desired
value for the total pressure during the calibration routine. This should be the
pressure the operator aims to achieve by regulating the flow of calibration
gas. When running this calibration recipe you can enter the actual value
measured on the total pressure gauge.

Calibration Peak Percentage . . .


In the Calibration Peak Percentage of Actual Pressure box enter the
percentage the gas you are calibrating with makes to whole of the calibration
gas mixture. e.g. if you are calibrating at mass 40 using a gas mixture of
50% Argon and 50% Nitrogen enter 50%.

Start Calibration Instructions


When you run the calibration recipe the calibration window will be
displayed which incorporate an area for a message for the user. In the Start
Calibration Instructions box enter the message you want to appear in the
calibration window. The default message is, “Inlet the calibration gas to the
level indicated. If this value cannot be exactly achieved enter the actual
value as indicated on your gauge. You should minimize the difference
between the requested and actual pressure for the best calibration results.”
The maximum length for the message is 255 characters.

4.4.14. Multiplier Calibrate Settings


Used in recipes: Multiplier Calibrate

This recipe is used to set the sensitivity of the multiplier detector and then
calibrate the partial pressure peak heights of your instrument using the
multiplier detector.
Selecting Multiplier Calibrate in the Enter Recipe Details dialog box will
bring up the Multiplier Calibrate dialog box which contains a number of
sections. If you have a Microvision Plus that is not fitted with a dual detector
or if you have an HPQ-2, Multiplier Calibrate will be grayed out in the
Enter RecipeDetails dialog box. Set (or leave at the default setting) the
following items.

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Mass of Calibration Peak
This defines the mass to be used for the calibration. Click on the dropdown
list box and select one of the standard gases from the list or, if the required
mass is not available simply type in the mass number.
This peak should be as large and stable as possible but still less than the
value set in the Largest Peak Height Measurable with Multiplier box.

Largest Peak . . .
In the Largest Peak Height Measurable with Multiplier box enter the
value for the largest peak that can be measured with the currently selected
multiplier gain. Generally, this should be from 0.001 to 0.01 times the
maximum pressure your system is designed to sample.

Actual (Total) Pressure . . .


In the Actual (Total) Pressure During Calibration box enter the desired
value for the total pressure during the calibration routine. This should be the
pressure the operator aims to achieve by regulating the flow of calibration
gas. When running this calibration recipe, you can enter the actual value
measured on the total pressure gauge.

Calibration Peak Percentage . . .

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In the Calibration Peak Percentage of Actual Pressure box enter the
percentage of the total pressure that is represented by the mass of calibration
peak of the gas you are calibrating with.
e.g. If you are calibrating at mass 36 in a 100% argon gas, this value is .34,
the isotopic abundance of mass 36 in argon.

Start Calibration Instructions


When you run the calibration recipe the calibration window will be
displayed which incorporate an area for a message for the user. In the Start
Calibration Instructions box enter the message you want to appear in the
calibration window. The default message is, “Inlet the calibration gas to the
level indicated. If this value cannot be exactly achieved enter the actual
value as indicated on your gauge. You should minimize the difference
between the requested and actual pressure for the best calibration results.”
The maximum length for the message is 255 characters.

4.4.15. Leak Check Settings


Used in recipes: Leak Check

Creating a Leak Check recipe consists of configuring the parameters in two


dialog boxes. The first is the Leak Check Settings dialog box.

Scan settings
The scan settings define what is being measured and how.

Probe Mass:
This setting is used to define which gas is being used to look for the leak. By
default helium (mass 4) is used but any mass in the range 1 to the maximum
mass of the instrument can be used.

Mass Offset:
The leak check mode reads at a single point. To ensure the largest part of a
mass peak is being used the mass offset (in fractions of an amu) can be
selected until the largest point on the peak is found. Under normal
circumstances this should be left set to 0.00.

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Full Scale:
This sets the amplifiers to allow the given largest reading to be measured. If
the largest reading is set to 1.00E-04 for example then the y-axis will show 0
to 10E-05. Increase or decrease as necessary to see the noise level on the
screen.

Accuracy:
In any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512
readings per point). Accuracy 3 is a good starting point.

Detector:
To use the Faraday detector click on the Faraday radio button. To use the
Multiplier detector click on the Multiplier radio button. The multiplier is
best for small peaks.

Display settings
Three display settings exist for leak check.

Display Cursor:
Enables the cursor function that allows the instant pressure being measured
to be displayed. If the left mouse button is clicked on the graph area it is

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possible to read off the value of partial pressure anywhere in the graph.

Display Grid:
Draws a grid on the graph to assist in the visual reading of peak heights.

PC Speaker:
Check the PC Speaker check box to switch on the audio tone on the PC
when leak check is run. The frequency (pitch) of the tone will increase as the
partial pressure increases (a leak is detected). Using the audio tone means
that you do not have to watch the screen to be able to trace leaks.

Control Unit:
Check the Control Unit check box to switch on the head-phone audio tone
on the control unit when leak check is running. The frequency (pitch) of the
tone will increase as the partial pressure increases (a leak is detected). Using
the audio tone means that you do not have to watch the screen to be able to
trace leaks.

When all the settings are correct click on the Next> button to display the Set
Access dialog box.

4.4.16. Analog Settings


Used in recipes: Analog Peaks

You create an Analog recipe by setting the parameters in two dialog boxes,
the first is the Analog Settings dialog box.
The Analog Settings dialog box is also displayed when you click on the Edit
Settings button in the Analog window when an analog recipe is running.

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Scan settings
The scan settings define what is being measured and how.

First Mass:
This setting is used to define where the analog scan starts. It can be
anywhere in the range 1 to the maximum mass of the instrument minus the
current Mass Span.

Mass Span:
This sets the number of AMUs that will be scanned. It can only take values
of 8; 16; 32 or 64. As the Mass Span is increased the points per AMU is
decreased. The Mass Span must be set to 8 to enable the calibration of the
Mass Alignment and Resolution using the QDAC Setting dialog box.

Full Scale:
This sets the amplifiers to allow the given largest reading to be measured. If
the largest reading is set to 1.00E-04 for example then the y-axis will show 0
to 10E-05.

Accuracy:
In any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512

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readings per point). Accuracy 3 is a good starting point.

Detector:
To use the Faraday detector click on the Faraday radio button. To use the
Multiplier detector click on the Multiplier radio button. The multiplier is
most appropriate for small peaks.

Display settings
Display Cursor:
Enables the cursor function that allows the partial pressure of any point in
the scan to be measured. Click and drag the cursor to the desired location on
the graph. The display at the top of the graph shows the mass position of the
cursor and the corresponding partial pressure.

Display Grid:
Draws a grid on the graph to assist in the visual reading of peak heights.

When all the parameters are set click on the Next> button to display the Set
Access dialog box.

4.4.17. Set Access


Used in recipes: Bar Graph, Peak Jump, Faraday Calibrate, Multiplier
Calibrate, Leak Check, Analog Peaks

The last step in creating any type of recipe is to define the which access level
will be able to run the recipe. The recipe button will only be shown in the
mode select window when the selected access level matches the settings in
this step of the recipe set up.

Select to which of the three Access Levels the recipe will be available by
checking the appropriate check boxes. One, two or all three access levels
may be selected.

By default, recipe settings such as display parameters and aborting the recipe
may be changed while the recipe is running. If you do not want recipe
settings altered while the recipe is running clear the Allow changes to
recipe settings when running check box.

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When you have complete the configuration of the recipe click on the Finish
button. You may go back to make changes to previous recipe steps by
clicking on the <Back button.

4.5. Edit Display


The Display Edit window is only displayed when you are creating or editing
Bar Graph or Peak Jump recipes. When you click on the Finish button, once
the configuration of the recipe has been completed, the Display Edit window
will be shown. Here you can see what the display will look like when you
run the recipe and you can add Trends. The display settings can be modified
by clicking on the Edit Bar Graph or Edit Peak Jump button
or by
selecting Configure Recipe | Edit Bar Graph or Configure Recipe | Edit Peak
Jump
or by
right clicking on the Bar Graph or Peak Jump Display.

The Bar Graph or Peak Jump Display dialog box will be displayed, all the
settings are explained in sections Bar Graph Display Settings and Peak Jump
Display Settings .

The display settings can be modified at any time when the recipe is running
by clicking on the Edit Bar Graph or Edit Peak Jump button. However, only

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the values in use when the recipe is saved after creation or editing are stored
in the data files and set how recalled data are initially displayed.
When all required Trends (if any) have been added the Recipe may be saved
by clicking Save and Exit.

If Cancel is selected and the following warning is ignored ALL settings


entered for this recipe will be lost.

Selecting Save and Exit or Cancel will return you to the Recipes page.

4.6. Add Trend

A Bar Graph or Peak Jump display represents a single scan. Trends are
views of the scanned data versus time. Using the spreadsheet metaphor a
channel in a Trend display will be a column in a spreadsheet where each row
corresponds to a scan. Each Trend display may have up to fifteen channels
displayed and a maximum of sixteen trends may be added. There are no
restrictions on how many times a partial pressure, total pressure, digital or
analog input may be displayed in one or more trends. This allows, for
example, one trend to show partial pressures, another trend to show those
same partial pressures with a background subtracted and yet another trend to
show digital inputs.

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To add a trend click on the Add Trend button or select Configure Recipe |
Add Trend from the menu bar. The Edit New Trend dialog box will be
displayed.

Channels
The channels section defines what is to be trended. Up to fifteen channels
may be used, the actual number is set in Trend Max Channels in Utilities |
Preferences. By default fifteen channels are set to Trend Maximum
Channels.

Type:
This is a dropdown list box which specifies the source of data for this trend
line. It may be one of the following:

Off
will switch the channel off.

Mass
will display as a trend the mass whose value is entered in the Input box. The
mass must be within the mass range being scanned for a bar graph recipe.
For a peak jump recipe the mass must be one for which a channel is set.

Action
will display as a trend one of the action channels defined in the recipe. If the
recipe does not define any action channels then Action will not be available.
Selecting Action in the Type box will cause the Input box to display all the
available action channels as a dropdown list. Click on the required one to
select it.

Total
will display a trend of the sum of all the partials in this scan.

Analog
where xxx is the (optional) analog input channel number, will show that
analog input.

Digital
where xxx is the (optional) digital input channel number, will show that
digital input.

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Generally you would choose Analog and Digital inputs to be displayed on a
different trend as they have widely varying values compared to partial and
total pressure signals.

Modify display
As described in the sections on Background and Baseline (standard
deviation), the measured signals (partial pressure, total pressure, analog
inputs and, for Backgrounds only, digital inputs) may be displayed not only
in their “raw” format but modified in one of the following ways.

None:
No modifications (other than any calibration settings) are applied to the data

Background Subtract:
The appropriate background value is subtracted from the data. This option
will be grayed out if a background has not been selected. Usually a linear Y-
Axis display with a decade setting close to the decade the data is at is the
most appropriate way to view Background Subtracted data as a negative
minimum can be selected.

Background Ratio:
The Data is divided by the selected background data. This option will be
grayed out if a background has not been selected. Usually a linear Y-Axis
display with a decade setting of E+00 is the most appropriate way to view
Background Ratioed data as the results will be 1.0 or close to 1.0 if the data
tracks the background.

Standard Deviation:
The mean value at a corresponding point of a baseline file is subtracted from
the data and the result is divided by the standard deviation at that point.
Usually a linear Y-Axis display with a decade setting of E+00 is the most
appropriate way to view Standard Deviation data as a negative minimum can
be selected.

Y-Axis
Label:
Defines the label to be displayed next to the y-axis. Type in the label you
require or leave it set to the default of Torr. If you delete the label and leave
the Label: box empty the trend’s x-axis will extend to utilize the extra space
saved by having no y-axis label.

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Logarithmic:
Sets the Y-axis to be a logarithmic scale. The maximum and minimum
values that can be displayed are set using Max and Min. The largest and
smallest decades that can ever be displayed are set in Utilities | Preferences
by selecting the desired Max Displayed Decade and Min Displayed Decade.

Linear:
Sets the Y-Axis to be a linear scale. The maximum and minimum values that
can be displayed are set using Max, Min and Decade. The maximum and
minimum values can be positive or negative and the decade can be anywhere
in the range Max Displayed Decade to Min Displayed Decade.

Min:
Sets the smallest value that can be displayed. If Logarithmic Y-Axis has
been selected it will be a pick list of decades (in the range Max Displayed
Decade to Min Displayed Decade). If Linear Y-Axis has been selected it will
be a text box where the value must be typed. Any value positive or negative
is allowed. This setting is multiplied by the Decade setting to give the actual
minimum. In linear Y-axis, Min must be 1 less than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01
Decade.

Max:
Sets the largest value that can be displayed. If Logarithmic Y-Axis has been
selected it will be a pick list of decades (in the range Max Displayed Decade
to Min Displayed Decade). If Linear Y-Axis has been selected it will be a
text box where the value must be typed. Any value positive or negative is
allowed. This setting is multiplied by the Decade setting to give the actual
maximum. In linear Y-axis, Max must be 1 greater than Max. If you want to
display less than 1 on a given decade e.g. 0 (Min) to 0.5 (Max) E+00
(Decade) then simply select a lower decade i.e. 0 (Min) to 5 (Max) E-01
Decade.

Decade:
This is only visible when Linear is selected. It sets the scaling factor applied
to Min and Max, e.g. to display -5.00E-07 to +5.00E-07 set -5 as Min, 5 as
Max and 1E-07 as Decade.

Grid:
Switches on a horizontal grid to assist in visually reading peaks. The values

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that have a grid line correspond to where the y-axis is labeled. This in turn
will depend on the resolution of the screen and the size of the graph.

Minor Ticks:
Enables fine horizontal lines to be displayed. The values that have a grid line
will depend on the resolution of the screen and the size of the graph.

X-Axis
The X-axis is the time axis. There are a number of options not usually
available with RGA software packages that allow, for example, the data to
be displayed as a log time plot enabling pump down times to be predicted,
time windows as short as seconds or as long as days, etc.

Start Time:
The beginning time at which to start displaying data. This is in hours (hh),
minutes (mm), seconds (ss) and, if the Display Days option is checked, days
(dd). The hours minutes and seconds will show in terms of an elapsed time
from when this recipe (data run) was started if the Elapsed Time option is
enabled or as a real 24 hour time if the Real Time option is enabled. The
days, if displayed, are always shown as elapsed days from the recipe start
regardless of which time mode is selected. This is not available if Scroll
Display is enabled.

Span:
This is the period of time to be displayed starting at the Start Time. If Scroll
Display is enabled it is the period of time displayed. It is defined in hours
(hh), minutes (mm), seconds (ss) and, if the Display Days option is checked,
days (dd). It should always be a positive number.

Elapsed Time:
When this option is checked the Start Time is defined in terms of time since
the recipe began and the graph will be labeled in the same way. On the
graph, if Display Days is enabled, the days will be displayed as elapsed days
starting at zero.

Real Time:
When this option is checked the Start Time is defined in terms of a real (24
hour) time and the graph will be labeled in the same way. On the graph if
Display Days is enabled the days will be displayed as a true date (e.g.
mm/dd/yy in the USA). The actual format will be that defined in Windows
Date settings found in the Control Panel. Real Time cannot be selected when

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a recipe is being defined, only when the recipe is running or when recalling
data from disk.

Scroll Display:
If the Scroll Display box is checked the last scan will always be shown with
the previous scans based on the Time Span setting. Earlier scans will scroll
off the screen. When Scroll Display is checked the Start Time setting is not
available.

Display Days:
If a run is going to last more than 24 hours or, when recalling data, you need
to see the date when the data was stored Display Days may be used to show
either elapsed days since the start of the recipe or the date. On the graph if
Display Days is enabled and the Real Time option is selected then days will
be displayed as a true date (e.g. mm/dd/yy in the USA). The actual format
will be that defined in Windows Date settings found in the Control Panel. If
the Elapsed Time option is selected the days on the graph will be days
elapsed from the start of the recipe. When Display Days is enabled the Start
Time and Time Span have an additional text box for days (dd).

Log Time Axis:


A pumpdown is essentially exponential in nature. Selecting the Log Time
Axis option at the same time as the Log Y-Axis option allows an exponential
function to be shown as a straight line which allows much easier prediction
of when a desired pressure will be achieved. The position of a point on the
Log Time Axis is calculated by taking the Log to base 10 of the elapsed time
in seconds. If the Gradient function is enabled the gradient will become
dP/dLog10t or dLog10P/dLog10t instead of dP/dt.

Minor Ticks:
The software labels the X-axis at intervals that are round numbers and far
enough apart so that the labels do not overlap. The Minor Ticks option
places ticks between the time labels to assist in visually identifying a time.

Key
The Key function allows identification of the various channels, and a direct
readout of either the signal or of the slope of the signal.

On:
Displays the Key either at the Top of the graph or at the right of it. The
pressures or gradients for all channels will show ?.??E??? until the cursor is

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placed on the graph and the left mouse button pressed down, the cursor will
change to a vertical line. As the cursor is dragged the key is updated. Note
that if the left mouse button is released while the cursor is in the active graph
area then the Bar Graph or Peak Jump will be set into Fixed Scan display
with the scan number being the scan that the cursor was on when the left
mouse button was released.

Top:
Causes the Key to be displayed at the top of the graph. It will have no effect
if the Key On is not enabled.

Right:
Causes the Key to be displayed at the right of the graph. It will have no
effect if the Key On is not enabled.

Reading:
The cursor can read either signal intensity or the gradient (slope) of the
graph. To read pressure (or analog or digital signal) select Value. To read the
slope of the graph select Gradient. It is important to note that the gradient
will use the displayed axis value to determine the slope, that is if log X and
log Y-axis have been selected the slope will be based on the Log10 of the
signals. For more details on gradient calculation see Span.

Span:
The gradient is calculated by taking all data points that fall within a user
specified time window. A least squares algorithm is then used to calculate
the best straight line that fits these data points and the slope of that line is the
gradient that is displayed. The time window is the time defined as the Span.
The Span window will be centered about the cursor position. As at least two
points are required for the slope to be measured if only one point falls within
the Span window the gradient will show as ?.??E???.

Clicking the OK button will save all changes made to the Trend.

4.6.1. Edit Trend


To edit a Trend it must be the currently active window when Edit Trend is
selected (its title bar indicates it is active). Click on the Edit Trend button or
select Configure Recipe | Edit Trend from the menu bar or more simply
right click anywhere on the graph.
The Edit Trend dialog box will be displayed which is the same as the Edit

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New Trend dialog box described in Add Trend .

4.6.2. Delete Trend


To delete a Trend it must be the currently active window (its title bar
indicates it is active). Click on the Delete Trend button or select Configure
Recipe | Delete Trend from the menu bar.

4.7. Delete Recipe


Any currently defined Recipe may be deleted by clicking on the Delete
Recipe button, selecting a recipe from the list displayed and clicking OK
followed by confirming the deletion.

Once a recipe is deleted there is no simple way to retrieve it.

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This page is left blank so that the next section starts on a facing page.

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Section 5.
RGA Operations
5.1. Filaments
When the program begins the user is given the option of switching on the
filament by confirming that the pressure the RGA can see is below the
maximum pressure allowed. Generally to get the most accurate readings the
filaments should have been switched on long enough to allow them to outgas
and to allow any outgassing caused by the heat generated by the filaments to
occur. In addition when a recipe is run if the filament is still off the user will
be prompted that it will be switched on again if the user confirms the
pressure is OK. In situations where the filament has not been switched on it
may be switched on by selecting RGA | Filament On from the menu bar or
clicking on the Filament button. The filament switched on will be the one
selected in the Filament section of the Utilities | Preferences | Miscellaneous
dialog box, see Preferences . Care should be taken in selecting the other
filament as calibrations may be different for each filament. If a filament is
already on selecting RGA | Filament On from the menu bar or clicking on
the Filament button will switch the filament off.
To provide the best protection to the filament it is recommended that the
External Trip input on the control unit be driven from a reliable total
pressure gauge set to give either a TTL signal or the opening of a relay
contact when the pressure exceeds 1x10-04 Torr.

5.2. Degas
DEGAS is strictly a UHV operation. Only use this feature when the analyzer
is under vacuum of less than 1x10-7Torr and will be used at total pressures of
less than 1x10-8Torr. Do not use Degas to remove contaminants from the
analyzer. That should be done by cleaning and/or baking.

Degas is the method by which absorbed atoms and molecules are removed
from the analyzer ion source by means of high energy electron
bombardment.

In order to limit stress on the filaments and to minimize gas load, a ramped
degas method is used which allows the power to be increased over the degas
period. It allows you to set a start power level (in the range 15% to 100%
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full power), and the power ramp rate in power steps/second as well as the
total degas period.

To enter the Degas Setup dialog box select RGA | Degas from the menu bar
or click on the Degas button in the Mode Select screen. Before the dialog
box is displayed, if the filaments are off, you will be given the option of
turning on a filament before you proceed.

The Time/Power Step: (ss)


is the time, in the range 1 to 59 seconds, spent at each power level. There are
256 power levels within the range of 15% to 100% of full power. Thus, at a
setting of 1 ramp-up from 15% to 100% will take approximately 2.25
minutes.

The Total Degas Time: (mm:ss)


period (regardless of Time/Power Step time) can be set in the range 1 to 59
minutes.

The Starting Degas Power: (%)


level may be set between 15% and 100% of full power in 1% steps.

To proceed to degas the ion source click on the Start button.

While degassing is in progress the Degas Ion Source window will be


displayed as shown below. Click on the Abort button to stop the degas
procedure.

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5.3. Leak Check
One of the major uses of RGAs is to troubleshoot for leaks. In Process Eye
leak checking is done by first creating a leak check recipe and then running
it. One of the eleven factory recipes is a leak check recipe which avoids
having to create a recipe before being able to leak check.

Creating a leak check recipe is fully described in Recipe Setup

5.3.1. Running a leak check recipe


Leak check recipes are designed to allow leaks to be located using any probe
gas, typically helium. The parameters such as probe gas and accuracy are
defined in the recipe but you may be able to change them while the recipe is
running. Click on the button for the leak check recipe you wish to run. The
leak check recipe will first zero the amplifier and then start scanning using
the settings defined in the recipe. A typical leak check window is shown in
below.

The Leak Check mode displays its data both as a thermometer to show the
instant value and as a trend to show how the pressure is changing with time.
The following sections describe the various settings which may be adjusted
while the recipe is running only if it is configured to allow this.

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5.3.2. Edit settings
The scan settings define what is being measured and how. They can be
changed in the Leak Check Settings dialog box which is displayed by
clicking on the Edit Settings button or by right clicking anywhere on the
graph. If the recipe has been configured not to allow changing the settings
while the recipe is running this button will be grayed out.

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Scan settings
Probe Mass:
This setting is used to define which gas is being used to look for the leak. By
default helium (mass 4 ) is used but any mass in the range 1 to the maximum
mass of the instrument can be used.

Mass Offset:
The leak check mode reads at a single point. To ensure the largest part of a
mass peak is being used the mass offset (in fractions of an amu) can be
selected until the largest point on the peak is found. Under normal
circumstances this should be left set to 0.00.

Full Scale:
This sets the amplifiers to allow the given largest reading to be measured. If
the largest reading is set to 1.00E-05 for example then the y-axis will show 0
to 10E-05

Accuracy:
In any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512
readings per point). Accuracy 3 is a good starting point.

Detector:

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To use the Faraday detector click on Faraday radio button to us the
multiplier detector click on the Multiplier radio button.

Display settings
Three display settings exist for leak check.
Display Cursor:
Enables the cursor function that allows the instant pressure being measured
to be displayed. To read the pressure at any point on the graph, position the
cursor at that point and click.

Display Grid:
Draws a grid on the graph to assist in the visual reading of peak heights.

Audio Enable:
Check the Audio Enable check box to switch the audio tone on when leak
check is run. The frequency (pitch) of the tone will increase as the partial
pressure increases (a leak is detected). Using the audio tone means that you
do not have to watch the screen to be able to trace leaks.

When all settings are correct click Ok to make the changes or Cancel to
return without any changes.

Leak check buttons


In the leak check display window there are a series of buttons and controls
which are explained below. Note that these will only be displayed if the
recipe has been configured to allow changes while it is running.

Exit Leak Check Button


Unlike some other recipes leak check recipes are open ended in that they do
not stop after a certain number of scans. The leak check recipe will continue
to run until you exit by clicking on the Exit button.

Leak Check Settings Button


Click on the Leak Check Settings button to display the Leak check Settings
dialog box see Leak Check Settings .

Increase Leak Check Accuracy Button


This will cause the instrument to scan more slowly but the readings will tend
to be more stable. This button has the same effect as increasing the Accuracy
in the Leak Check Settings dialog box.

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Decrease Leak Check Accuracy Button
This will cause the instrument to scan more quickly but the readings will
tend to be less stable. This button has the same effect as decreasing the
Accuracy in the Leak Check Settings dialog box.

Multiplier Detector Button


Click on this button to switch to the multiplier detector. When the button is
depressed the multiplier detector is switched on. This has the same effect as
selecting the Multiplier radio button in the Leak Check Settings dialog box.
This is most commonly used for the higher sensitivity it provides.

Audio Button
When this button is depressed the audio tone will be enabled. This button
has the same effect as the Enable Audio check box in the Leak Check
Settings dialog box.

Peak Height Scroll Bar Button


Click on this button to display the Peak Height Scroll Bar.

Probe Mass Scroll Bar Button


Click on this button to display the Probe Mass Scroll bar.

Cursor Button
Click on this button to enable the cursor function. This has the same effect as
checking Enable Cursor in the Leak Check Settings dialog box.

Grid Button
Click on this button to switch on the Grid. This is the same as enabling
Display Grid in the Leak Check Settifgs dialog box.

Peak Height Scroll Bar


The Peak Height Scroll Bar may be displayed next to the Y-axis and allows
the full scale measurement to be chafged. Either drag the scroll bar or click
on the up or down arrow to make the change. This has the same effect as
changing the Full Scale: setting in the Leak Check Settings dialog box.

Probe Mass Scroll Bar


The Probe Mass Scroll Bar may be displayed below the X-axis and allows
the probe mass (usually set to 4 for Helium) to be changed quickly. Either
drag the scroll bar or click on the up or down arrow to make the change.

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This has the same effect as changing the Probe Mass: setting in the Leak
Check Settings dialog box.

5.4. Analog

One of the common features of virtually all RGAs is an analog mode where
the "true peak shape" can be studied. Process Eye's analog capability is
achieved first by creating then running an analog recipe. One of the eleven
factory recipes is an analog recipe so you do not have to create one before
you can run in analog. You are likely to run an analog recipe for two
purposes:

To allow the Mass Alignment and Resolution of the instrument to be


measured and set.
To allow the health of the quadrupole analyzer to be assessed by viewing the
peak shape.

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Creating an analog recipe is described in Recipe Setup .

There are a series of buttons and controls in the Analog window which allow
rapid changes to the settings to be made. Note that these will only available
if the recipe is configured to allow changes to be made while it is running.

Exit Analog Button


Analog recipes are open ended in that they do not finish after a number of
scans. The user must exit from the analog recipe by clicking on the Exit
button to return to the Select Mode window.

Analog Settings Button


Click on the Analog Settings Button to display the Analog Settings dialog
box explained in Analog Settings Dialog Box .

Enable Tuning Button


Click on this button to display the Tune Instrument dialog box in which
changes to the mass alignment, resolution and ion source settings can be
made. This is described in section Instrument Tuning .

Increase Mass Span Button


This will cause the mass span to increase and more AMU values will be
displayed. The mass span can only take one of the following values: 8, 16,
32 and 64 amu.

Decrease Mass Span Button


This will cause the mass span to decrease and fewer AMU values will be
displayed. The mass span can only take one of the following values: 8, 16,
32 and 64 amu.

Increase Analog Accuracy button


This will cause the instrument to scan more slowly but the readings will tend
to be more stable. This button has the same effect as increasing the Accuracy
in the Analog Settings dialog box.

Decrease Analog Accuracy Button


This will cause the instrument to scan more quickly but the readings will
tend to be less stable. This button has the same effect as decreasing the
Accuracy in the Analog Settings dialog box.

Use Multiplier Detector Button

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When the button is depressed the multiplier detector will be used otherwise,
the Faraday detector will be used.

Peak Height Scroll Bar Button Analog


Click on this button to display the Peak Height Scroll bar.

Mass Scroll Bar Button


Click on this button to display the Mass Scroll Bar.

Cursor Button
Click on this button to enable the cursor function. This has the same effect as
checking Enable Cursor in the Analog Settings dialog box.

Grid Button
Click on this button to switch on the Grid. This is the same as enabling
Display Grid in the Analog Settings dialog box.

Peak Height Scroll Bar


The Peak Height Scroll Bar may be displayed next to the Y-axis and allows
the full scale measurement to be changed. Either drag the scroll bar or click
on the up or down arrow to make the change. This has the same effect as
changing the Full Scale: setting in the Analog Settings dialog box.

Mass Scroll Bar


The Mass Scroll Bar may be displayed below the X-axis and allows the first
mass to be altered. Either drag the scroll bar or click on the left or right
arrow to make the change. This has the same effect as changing the First
Mass setting in the Analog Settings dialog box.

5.5. Analog Settings Dialog Box


If configured to do so in the recipe set up, the analog parameters may be
changed by clicking on the Edit Settings button or by right clicking
anywhere on the graph. This will result in the Analog Settings dialog box
being displayed.

Scan settings
The scan settings define what is being measured and how.

First Mass:

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This setting is used to define where the analog scan starts. It can be
anywhere in the range 1 to the maximum mass of the instrument minus the
current Mass Span.

Mass Span:
This sets the number of AMU that will be scanned. It can only take values of
8; 16; 32 or 64. As the Mass Span is increased the points per AMU is
decreased. The Mass Span must be set to 8 to enable the calibration of the
Mass Alignment and Resolution using the QDAC Setting dialog box.

Full Scale:
This sets the amplifiers to allow the given largest reading to be measured. If
the largest reading is set to 1.00E-05 for example then the Y-axis will show
0 to 10E-05.

Accuracy:
In any measurement there is a trade-off between speed and precision. The
Accuracy defines the time that is spent taking each reading. Increasing
Accuracy causes the scan to slow down and readings to become more
precise. Accuracy is always in the range 0 (one reading per point) to 9 (512
readings per point). Accuracy 3 is a good starting point.

Detector:
To use the Faraday detector click on the Faraday radio button. To use the
multiplier detector click on the Multiplier radio button.

Display settings
Two display settings exist for the Analog mode.

Display Cursor:
Enables the cursor function that allows the partial pressure of any point in
the scan to be measured. Drag the cursor to the desired location on the
graph. The display at the top of the graph shows the mass position of the
cursor and the corresponding partial pressure.

Display Grid:
Draws a grid on the graph to assist in the visual reading of peak heights.

Mode setting (HPQ-2)


This is only available if you are using an HPQ-2 instrument.

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The HPQ-2 supports three modes of operation to provide optimum
performance for various applications:
RGA mode for total pressures below 1x10-4Torr
HP mode for pressures greater than 1x10-4Torr
Leak mode for Leak Checking (especially at mass 4).
Select the mode to run.

When all settings are correct click on the Ok to make the changes or Cancel
to return without any changes.

5.6. Instrument Tuning


The mass span must be set to 8amu before any of the QDAC settings can be
adjusted. Click on the Enable Tuning button to display the Tune Instrument
dialog box below. If the mass span is not set to 8 amu a warning box will be
displayed to tell you to adjust the mass span setting.

Low Mass Alignment:


High Mass Alignment:
Low Mass Resolution:
High Mass Resolution:

The Mass Alignment and Resolution of the instrument are controlled from
the QDAC (Quad Digital to Analogue Converter.)
Separate settings for high and low mass alignment, high and low mass
resolution are maintained for each of the two filaments. For HPQ-2 separate
settings are also maintained for each of the three operating modes (RGA, HP
and Leak). The settings for the currently selected filament and mode are
displayed and may be adjusted.
If they have moved for any reason or if this instrument is being upgraded to
run Process Eye then it may be necessary to configure the QDAC settings.
To assist in setting the values, the point that the maximum occurs and the
peak width at 50% of the peak height and 10% of the peak height are
displayed. Note that the values are updated at the end of each scan and only
the values for the central 6 peaks are calculated. If the Max At, 50% Peak
Width or 10% Peak Width cannot successfully make a measurement one of
the following fail codes will be displayed:

Fail Code 1 (FC 1) Peak less than 5% of full scale.


By forcing peaks to be larger than 5% before displaying the values any

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errors due to noise will be minimized and greater precision ensured.

Fail Code 2 (FC 2) Peak Maximum greater than ± 0.33 AMU from center.
If the value of the largest reading in the peak is greater than ± 0.33 AMU
from the nominal mass center position it needs adjusting. It is recommended
that it be brought to within ± 0.15 AMU from the nominal center.

Fail Code 3 (FC 3) No value small enough found.


For the 10% peak width measurement a peak height value of less than or
equal to 10 % of the maximum cannot be found within 0.75 AMU of the
maximum on both sides of the peak.
For the 50% peak width measurement a peak height value of less than or
equal to 50% of the maximum cannot be found within 0.75 AMU of the
maximum on both sides of the peak.

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Fail Code 4 (FC 4) Unexpected error in calculation.
The calculations involved in determining the peak width have failed due to a
divide by zero. This should never occur under normal operation.

5.6.1. Setting the resolution


A number of ways of setting the resolution exist, the most commonly used
are:
0.5 AMU peak width at 50% peak height.
This is generally the easiest to set.

1.0 AMU peak width at 10% peak height.


This is in line with the recommendations of the AVS on calibrating partial
pressure gauges. It does however require isolated peaks at the upper and
lower masses to be measured.

10% valley between peaks of equal height.


A definition commonly used by many vendors of RGAs but the need for
peaks of equal height at low and high mass make it difficult to set an
instrument accurately to this specification.

The method to set Mass Alignment and Resolution is to:


1. Set the Mass Alignment and Resolution at a low mass (typically Mass
2 or 4) using the Low Mass Alignment and Low Mass Resolution
settings.
2. Set the Mass Alignment and Resolution at the highest mass that will
be measured (or as close as possible to it) using the High Mass
Alignment and High Mass Resolution settings.
3. Repeat the last two steps to iterate to a conclusion. It should converge
after one or two iterations.

Emission:
Electron Energy:
Ion Energy:
Extractor:

The center panel in the Tune Instrument dialog box contains four controls
to set ion source parameters.
Separate settings for high and low mass alignment, high and low mass
resolution are maintained for each of the two filaments. For HPQ-2 separate
settings are also maintained for each of the three operating modes (RGA, HP

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and Leak). The settings for the currently selected filament and mode are
displayed and may be adjusted.
Under normal circumstances none of these four settings should be altered.

Emission:
The emission current is the flow of electrons from the filament to the ion
source cage. It is variable in the range 0 to 5mA and the default settings are:

1mA open ion source Microvision Plus


1mA PVD ion source Microvision Plus
0.7mA HPQ-2, RGA mode
0.1mA HPQ-2, HP mode
1.0mA HPQ-2, Leak mode

Electron Energy:
The electron energy is the energy of the electrons emitted by the filament
and is controlled by varying the filament potential. Electron energy is
variable in the range 0 to 100eV and the default settings are:

70eV open ion source Microvision Plus


40eV PVD ion source Microvision Plus
70eV HPQ-2, RGA mode
35eV HPQ-2, HP mode
88eV HPQ-2, Leak mode

Ion Energy:
Ion energy is the energy of the ions produced in the ion source and is
governed by the potential applied to the ion source cage. Ion energy is
variable in the range 0 to 10eV and the default settings are:

5.5eV open ion source Microvision Plus


7.0eV PVD ion source Microvision Plus
7.0eV HPQ-2, RGA mode
5.0eV HPQ-2, HP mode
10eV HPQ-2, Leak mode

Extractor:
The potential applied to the extractor/focus plate may be varied in the range
0 to -130V and the default settings are:

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-112V open ion source Microvision Plus
-20V PVD ion source Microvision Plus
-110V HPQ-2, RGA mode
-58V HPQ-2, HP mode
-130V HPQ-2, Leak mode

Multiplier Voltage:
Although it is generally recommended that the Multiplier Voltage be
adjusted automatically in the Run Calibration | Calibrate Multiplier it is
possible to set the Multiplier Voltage manually using the scroll bar. The
scroll bar is only active when Use Multiplier: in the Analog Settings
dialog box has been checked.

When all settings are correct click on the Ok to make the changes or Cancel
to return without any changes. As these changes will fundamentally change
all future pressure measurements made by the RGA you will be asked to
confirm the changes.

5.7. Utilities
5.7.1. Build baseline
A Baseline is a reduction of multiple data files into two files; a mean (or
average) and standard deviation. To create a baseline select Utilities |
Baseline from the menu bar or click on the Create Baseline button. The
Create Baseline dialog box will be displayed. Click on the Create Baseline
button to open a standard windows open file dialog box.

Selecting Create Baseline runs the Create Baseline program. When run you
will be prompted to select all the files that will be analyzed. To select
multiple files in a contiguous list, click the file name of the first file then
hold the SHIFT key and click on the last file. To select many individual
files, click on individual file names with the CONTROL key pressed. You

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must select between two and two hundred fifty three file names. These files
must have been stored with the same number of Action channels, masses,
the same number (if any) of Analogue and Digital inputs and a comparable
number of scans. Failure to meet these criteria will prevent the Baseline files
being created. When complete click OK. You will then be prompted for a
name of the Baseline file. By default the extension will be .BL and it is
recommended that you leave it as this. The standard deviations will be stored
in a file with the same file name but with an .SD extension. The means and
standard deviations will be calculated and the percentage done will be
displayed. If the files are large and there are many of them it may take a long
time to calculate all the data.

5.8. Preferences
A number of settings may be defined in preferences. Select Utilities |
Preferences from the menu bar or click on the Preferences button to open a
multiple page dialog box.

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5.8.1. Miscellaneous
If it is not already visible click on the Miscellaneous tab to switch to the
Miscellaneous page of the dialog box.

Display Range
This defines the largest and smallest values that can ever be displayed.

Min Displayed Decade:


The smallest value that can be displayed. It is in the range E-20 to E+20 and
should be smaller than the Max Displayed Decade.

Max Displayed Decade:


The largest value that can be displayed. It is in the range E-20 to E+20 and
should be larger than the Min Displayed Decade.

Read Calibration Data


There are a number of settings which define the calibration of the instrument
such as; the QDAC settings, multiplier voltage, multiplier and Faraday gain
etc.. These settings (one for each filament in case they are different) are
stored in an .INI file and in the control unit’s memory.

From .INI File:


Click on the From .INI File radio button to use the calibration settings
stored in the .INI file each time Process Eye is started.

From Control Unit:


Click on the From Control Unit radio button to use the calibration settings
stored in the control unit’s memory each time Process Eye is started.

Trend
Max Channels:
The maximum number of channels that may be displayed in a Trend can be
set from one to fifteen.

Filament
The quadrupole analyzer is fitted with two identical filaments one of which
needs to be switched on for readings to be taken. Two filaments are
available to avoid having to remove the analyzer from the chamber if a
filament blows. Only one filament is ever on at one time.

Use Fil # 1

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Click on the Use Fil # 1 radio button to use filament 1 when switch filament
on is selected.

Use Fil # 2
Click on the Use Fil # 2 radio button to use filament 2 when switch filament
on is selected.

Confirm Fil On
If the Confirm Fil On box is checked a warning box will be displayed
before the filament is automatically switched on at the start of a recipe.

Auto Switch Fil On


If the Auto Switch Fil On box is checked the Filament will automatically be
switched on when the recipe is run. The user may be asked for confirmation
depending on the setting of the Confirm Fil On check box.

Recipe Buttons
Width:
This controls the width of the recipe buttons displayed in the Select Mode
window. Enter a value between 100 and 600 for the width of the buttons
measured in pixels. The default setting is 200. The new value will not be
used until the Select Mode window is re-drawn.

Heads Share Recipes:


In multi headed systems the user can decide if all RGAs share the same
recipes (registered in the proc.ini file) or if each RGA uses recipes unique to
it (registered in the procNNN.ini files where NNN is 1 to 999, the system
number referred to in the start-up dialog (001 to 999) and the /S switch).
Check the Heads Share Recipes check box to allow different heads to use
the same recipes.

5.8.2. Disk header


User Disk Header:
The User Disk Header feature is designed to allow additional fields in the
disk file header section of data files stored to disk. These fields can be given
a title, a default value and they can be either numeric or text. Typically they
are used to store parameters specific to each process run. Once a number of
user fields have been defined the User Disk Header feature must be enabled
in the Disk Store section of each recipe in which you wish to use it.

Number of Entries:

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The number of User defined fields in the range 1 to 15.

Title:
This defines the text that will be used as a title in the disk file.

Default Value:
To save on typing it is possible to define a default value that will be entered
for this field. If no default value is required simply leave this item blank.

Type:
The contents of a field may be either text or a number. The difference is that
text will be delimited by quotation marks in the disk file and numbers will
not.

Analog inputs
Click on the Analog Inputs tab to switch to the analog inputs page of the
dialog box.
There are four analog inputs available on the control unit Aux. I/O port, see
your control unit manual for further details. Each input may be configured
for a number of pre-defined types of signal. Click on the Type dropdown list

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box then, click on the appropriate type in the list. When the settings are
correct click on the Ok button.

Click on OK to save the changes and return to the Select Mode window.

To add a custom analog input type the PROC.INI must be edited. In the
section [ANALOG INPUT TYPE] change the line:
Number Of Types=n
to the new number.
e.g. if there are five types and you are adding one more type change the line
from Number Of Types=5 to Number Of Types=6.
Then add the line to define the input in the form:

Type n=Label in dropdown;A;B;C;D;E;F

Look at the existing types as examples.

The six parameters A to F are defined below:

A= Linear offset
B= Linear scale factor
C= Log or Lin flag
D= Log base - used if C=1
E= Log offset
F= Log scale factor

If C = 0 then
LinResult = (ADC Reading - A) * B

If C = 1 then
LogResult = D^((ADC Reading-E)*F)

The new type you have defined will appear in the Type dropdown list.

5.8.3. Software switches


There are a number of “software switches” used to control the way in which
Process Eye starts up. Normally the user does not have to concern himself
with these as they are automatically inserted during the installation and
configuration process.

We will assume you have used the default directory and head names for

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Process Eye.
Click on the Start button and from the Start menu select Settings | Taskbar .
. . click on the Start Menu Programs tab then click on the Advanced . . .
button. The Exploring window will be displayed click on the + sign next to
the programs folder then, click on the Process Eye folder then, right click on
RGA Process in the contents list on the right of the window. From the menu
now displayed click on Properties then click on the Shortcut tab. Any
software switches should be added to the line in the Target: box.

Software switches

/X This forces Process Eye to run in the Recall mode.

/AL Run Leak Check when Process Eye is started

/C Add to the Configure Microvisions shortcut to enable the Configure


button and the Configure window.

/M Enable the macro language.

5.8.4. RVC settings


In the Set RVC section of the End of Scan Actions the six Remote Vacuum
Controller outputs may be switched off or on as a result of an action. The six
outputs are by default:

Output 0 = Main Pumps (Bit0 = 1) RVC Skt 1 contacts 4 & 12


Output 1 = Valve 1 (Bit1 = 2) RVC Skt 1 contacts 1 & 9
Output 2 = Valve 2 (Bit2= 4) RVC Skt 1 contacts 2 &10
Output 3 = Alarm (Bit3 = 8) RVC Skt 1 contacts 3 & 11
Output 4 = Turbo Standby
(Bit 4= 16) RVC Skt 1 contacts 6 &14
Output 5 = Heater Jacket (Bit5 = 32) RVC Skt 1 contacts 5 & 13

However, the RVC output Bits can be used for other purposes. You must not
reassign bits that are currently used in your configuration. Typically, only bit
2 will be available for custom functions. Process Eye gives the user the
ability to change the names of the outputs. To do this in the RVC section of
the Procxxx.Ini file add the following items:

Number of Outputs = n
Line Name 0 = OutputName0

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True Text 0 = TrueText0
False Text 0 = False Text0
Bit 0 = Bit0
Line Name 1 = OutputName1
True Text 1 = TrueText1
False Text 1 = FalseText1
Bit 1 = Bit1
.
.
.
Line Name n = OutputNamen
True Text n = TrueTextn
False Text n = FalseTextn
Bit n = Bitn

All a little confusing, hopefully the following example will help.

Suppose we have two of the RVC outputs under End of Scan Actions
control. Valve 1 will be used as the Process valve and the Heater Jacket
output will be used to signal an alarm via a lamp. You would add the
following to the RVC section of the Procnnn.Ini file:

Number of Outputs = 2
Line Name 0 = Process Valve
True Text 0 = Open
False Text 0 = Closed
Bit 0 = 2
Line Name 1 = Alarm
True Text 1 = On
False Text 1 = Off
Bit 1 = 32

5.9. Copying Recipes Between PCs


One of the things you are likely to want to do is copy a recipe created on one
PC to another PC. This will ensure you have exactly the same recipe and
will save time by avoiding a lengthy creation process. Let's assume you have
written a bar chart recipe called Monitor on the PC called Line 1 and you
want to copy this to a PC called Line 2. The button name for the Monitor
recipe is Normal Process Monitor. You have installed Process Eye on both

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PCs using the default directory, folder and head names.

On the Line 1 PC, using Windows Explorer, open the Process Eye directory
and copy the file monitor.rcp to a floppy disk. Make a note of the button
name for the recipe Monitor.
On the Line 2 PC run up Process Eye and from the select mode window add
a recipe. Give the recipe the name Monitor and the button the name Normal
Process Monitor. Click on the Ok button, note that it does not matter which
type of recipe you have created only the recipe name and button name are
important. In the first set up dialog box, click on the Finish button then click
on the Save and Exit button in the Display window (if it is a Bar Graph or
Peak Jump recipe).
You should now be back to the Select Mode window and have a new recipe
button called Normal Process Monitor. Exit from Process Eye.
Now, on the Line 2 PC open Windows Explorer and copy the monitor.rcp
file from the floppy disk to the Process Eye directory. You will be told the
file already exists (because you have just created it) and do you want to
overwrite it, respond Yes.
When you run Process Eye and click on the Normal Process Monitor button
it will run the recipe Monitor which you originally created on the Line 1 PC.

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Section 6.
DDE Links
6.1. Introducing DDE
Dynamic Data Exchange (DDE) is a mechanism by which Windows
programs running on the same computer may exchange information. Process
Eye uses DDE in two ways: firstly it acts as a data server providing, for
example, Peak heights, scan number etc., secondly it accepts commands e.g.
Start recipe, Read Filament status etc.

When Process Eye is acting either as a DDE server or when it is accepting


"Execute" commands it must be referred to using the Application/Topic/Item
notation. The exact detail of how they are put together depends on the client
application being used.

For example Microsoft Excel uses the form:-


{=Application|'Topic'!'Item'}

Quattro Pro for Windows uses:


@DDELINK([Application|Topic]"Item")

Visual Basic uses:


Control.LinkTopic = "Application|Topic"
Control.LinkItem = "Item"

Application
The application name used by Process Eye is :- PROCESS
It does not matter if uppercase or lowercase is used.

Topics
Topic Names
The following topics are supported:

SYSTEM for single headed systems


SYSTEMn where n is a number from 1 to 9 when Process is started
with the /Sn command switch

All responses and errors are placed in the item: DDEData

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All errors are reported by putting Err nnnn in the DDEData item where nnnn
is the four digit error code. All the error codes are explained below.

All commands are case insensitive.

Error:
1000 Invalid command

6.2. DDE Commands


Read Peak Command
READ, scannumber, channel
e.g. READ1,1
Channels are: Partials, Total, Analogs, Digitals, Actions

Errors:
1100 Not scanning or recalling data
1101 Invalid scan number (less than 1)
1102 Invalid scan number (too large)
1103 Invalid peak number (less than 1)
1104 Invalid peak number (too large)
1105 Invalid peak number (scan OK but peak not read yet)

Write Port Command


PORT,portbyte
e.g. PORT,4

1=bit0, 2=bit2, 3=bit3, . . . 128=bit7

Errors:
1200 Invalid setting (outside range 0 - 255)

Run Recipe Command


RUN RECIPE, recipenumber [, filename]
e.g. RUN RECIPE, 1, DATA01
See the PROC.INI file or PROCx.INI file for the recipe number. In the
recipe step 2 use Defined by DDE as the filename.

Errors:
1300 Invalid Recipe number

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End Recipe Command
END RECIPE
e.g. END RECIPE

Errors:
1400 Not running recipe

Press Recipe Button Command


PRESS, recipeindex
e.g. PRESS, 2
The first listed recipe is recipeindex = 1, the second is 2 and so on. The
recipeindex is NOT the same as the recipe number which is defined in the
PROC.INI/PROCn.INI file.

Errors:
1500 Invalid Recipe Button number (less than 1)
1501 Invalid Recipe Button number (too large)

Read Live Data Command

Errors:
1600 Not running recipe
1601 Invalid peak Number (less than 1)
1602 Invalid peak Number (too large)

Get Parameter Command


GET, parameternumber
e.g. GET, 1
1 = Number of partials
Returns 0 - 300 in DDEData

2 = Number of analog inputs


Returns 0 to 32000 in DDEData

3 = Number of digital inputs


Returns 0 to 32000 in DDEData

4 = Number of action channels


Returns 0 to 64 in DDEData

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5 = Filament state
Returns currentfilament, filamentstate e.g. 1, off or 2, on

6 = Current channel being measured


Returns 1 - maximum channel, maximum channel = Number of
partials + Number of analogs + Number of digitals + Number of action
channels + 1 (for total pressure)

7 = Current scan being measured


Returns 1 - maximum scan (defined in recipe step 1)

Errors
1700 Invalid parameter number

Move Command
MOVE, Top, Left, Height, Width
e.g. MOVE, 0, 0, 800, 600

All parameters are in pixels. It is possible to move the window off the
screen. All parameters must be in the range -32767 to 32767

Errors:
1800 All positions (Top, Left, Height, Width) not sent.

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Section 7.
Macros
7.1. Introducing Macros
The macro language feature is designed to do the things you need the RGA
software to do but that we as RGA vendors forgot to put in. The macro
language is fully Visual Basic for Applications VBA® compatible.

What to do if you are not proficient at Visual Basic or its cousin VBA?
Well, basically you have two options a) give up now and get on with
something more important, or b) grab a book on VB or VBA for beginners.

7.1.1. Macro Types


There are a number of different types of macros. Recipe Macros are linked
to recipes, recipes may have no associated macro, a unique macro or a
shared macro. The Reminder Macro is run each time the Select Mode screen
is displayed. The Startup Macro is run once when the program begins and
the Shutdown Macro is run once when Process Eye ends. In addition you
can place common functions, subroutines and variables in a Hidden Macro
that will be available to all other macros at all times.

7.1.2. Recipe Macros


Each recipe can have a macro associated with it. By default the recipe loader
will look for a macro with the same name as the recipe file and an extension
of .Bas. For example if a recipe has a filename Spectra1.Rcp it will run a
macro called Spectra1.bas in the same directory. It is possible to change the
macro name if, for example, you want to have a single macro for multiple
recipes. To change the macro associated with a recipe edit the recipe
(RecipeName.rcp) file with a text editor such as Notepad and add the
following line to the [SYSTEM] section

Macro = your_macro_name Note: The macro should be stored (like the


recipe) in the applications directory.

7.1.3. Reminder Macro


The usual purpose of this macro is to test if certain time dependent actions -
such as changing a filament, performing a calibration etc. need to be

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performed and if so notify the user. By default the name is Reminder.Bas
and it must be stored in the applications directory. To change the macro run
when the program starts edit the heads .INI file (e.g. Proc1.ini for head 1
with V1.4x or SerialNumber.Ini for V1.6x) file with a text editor such as
Notepad and add the following line to the [SYSTEM] section:

Reminder Macro = your_remindermacro_name

7.1.4. Startup Macro


The usual purpose is to configure certain hard-coded variables (e.g. User
Access Levels) and to put user defined dialog boxes up for your own
nefarious purposes. The macros name is Process.Bas by default and it must
be stored in the applications directory (usually c:\proceye\). To change the
macro run when the program starts edit the heads .INI file (e.g. Proc1.ini for
head 1 with V1.4x or SerialNumber.Ini for V1.6x) with a text editor such as
Notepad.exe and add the following line to the [SYSTEM] section:

Startup Macro = your_startupmacro_name

7.1.5. Shutdown Macro


The usual purpose is to save information to disk to allow passing data from
one run of Process Eye to the next. The macros name is Process.Bas by
default and it must be stored in the applications directory (usually
c:\proceye\). To change the macro run when the program starts edit the
heads .INI file (e.g. Proc1.ini for head 1 with V1.4x or SerialNumber.Ini for
V1.6x) with a text editor such as Notepad.exe and add the following line to
the [SYSTEM] section:

Shutdown Macro = your_ shutdownmacro_name

7.1.6. Hidden Macro


To share functions, subroutines and variables across all macros create a file
called ProcEye.Bas and save it in the application directory. Variables that
are to be shared should be declared either Public or Global. Do not call any
of the routines Main. To change the macro loaded (and hidden) when the
program starts edit the heads .INI file (e.g. Proc1.ini for head 1 with V1.4x
or SerialNumber.Ini for V1.6x) with a text editor such as Notepad.exe and
add the following line to the [SYSTEM] section:

Hidden Macro = your_ hiddenmacro_name

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7.2. Anatomy of a Recipe Macro
A Bar Chart or Peak Jump recipe macro has five distinct parts. Four of these
are executed once in a recipe the other part is executed at the end of each
scan. The five parts are:

PreTrigger
This is the first thing that is executed after the recipes settings have been
read in. It may be used, for example, to open a valve if that is required for
the trigger measurement to be made correctly.

Post Trigger
This is executed immediately after the trigger has been done (or pretty much
straight after the PreTrigger if there is no Trigger defined in the recipe!)

PreRun
This is run just before the first scan starts but after all the displays have been
setup. It gives an opportunity to configure the display to your taste.

End Of Scan
This is run when the end of scan is reached. It is where most of the real work
will be done, for example calculating complex alarms, interacting with other
programs etc.

PostRun
As the recipe closes down this is executed and it is a place where, for
example, valves can be shut, summary data calculated and saved etc.

Each of these parts are written as a separate subroutine and called from the
Main subroutine. Always use the MTMacro.Bas macro as the starting point
for writing a recipe macro.

Anatomy of Calibration and Analog Recipe Macros


A calibration or Analog recipe macro has two parts. Code after Sub Main()
and before PauseMacro executes before the recipe starts. Code after
PauseMacro executes when the recipe is complete. The basic format is:

Sub Main()
‘ Your code that runs before the recipe.
PauseMacro
‘ Your code that runs as the recipe terminates

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End Sub

Anatomy of the Startup, Shupdown and Reminder Macros


These macros are called once and are in the form:

Sub Main()
‘ Your code
End Sub

7.3. Writing a Macro


There are two ways of writing a macro for Process Eye - the hard way and
the easy way.

The Hard Way


The hot shot programmers among you should just load the MTMacro.Bas
file into your favorite text editor, add the stuff you need, save it as
Recipe_name.Bas and it will run first time with no problems (but then if you
are a hot shot you would never admit to knowing VBA in the first place so
do it...)

The Easy Way


Those nice people as Sax Software who did most of the hard work in
providing a macro language kindly provided an integrated development
environment (IDE). Although it is usually hidden away, adding a /M switch
on the command line for Process Eye (i.e. make it read
C:\PROCEYE\PROCESS>EXE /Sx /M where x is the system (or head)
number) will cause it to appear. Use the File open icon or right click
anywhere on the Macro Code window to read in the MTMacro.Bas macro.
Generally, most of the interesting things happen when a recipe is running.
To write test code create a recipe that scans at an appropriate rate for what
you are testing (DO NOT create a Recipe_name.Bas file yet as it will
automatically be loaded at the start of a recipe run) and write some test code
in Sub Main. Start up the recipe then the test code can be run, stepped
through line by line, etc. See the Saxbasic help by pressing F1 when the
Macro Code window has the focus or right click and select help. This help
file has a full list, broken down into groups, of the available VBA commands
available to you.

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7.4. Macro Function Extensions
A macro will consist of regular VBA commands mixed liberally with
extensions, provided by us, which are specific to the RGA. The following
gives a list of the RGA specific extensions to the VBA language. Extensions
fall into three types: Functions – these return a value, Subroutines – these
usually perform an action and Variables that allow settings of the RGA to be
read and or written.

7.4.1. Functions
Functions always return a result and have zero or more parameters that are
passed in parenthesis. The general syntax is:

Result = FunctionName (param1, param2....)

Read Data Functions


The two data functions are used to read channel data (i.e. partial pressures,
total pressure, analog and digital inputs and action channels)

Function Returns Parameter Description


ReadCurrent Single iType as iType
Data Integer 0 = Raw data
1 = Standard deviations from mean
2 = Mean
3 = Standard Deviation
4 = Background
iChannel as iChannel
Integer The channel for which data is
required. Always in the range 1 to
MaxChannel. See below for details
of how to calculate a channel
number.

Provides the capability of reading


data from the current scan. There are
four types of data available for each
channel. If multiple types or
multiple channels are required they
must be requested separately. If
either parameter is out of range a
Zero will be returned

FindScanAt Long vScanTime vScanTime


As Variant Returns the scan number of the scan

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vArray as at or first scan before
Integer vArray (Optional: default = 1)
1 = Raw data
2 = Mean
3 = Standard Deviation
4 = Background
ReadHuge Single iArray as iArray
ArrayData Integer 1 = Raw data
lScan as Long 2 = Mean
iChannel as 3 = Standard Deviation
Integer 4 = Background
lScan
Scan number. Always in the range 1
to MaxScan.
iChannel: Integer
The channel for which data is
required. Always in the range 1 to
MaxChannel. See below for details
of how to calculate a channel
number. See note 2.

Note 1
Provides the capability of reading data from the current scan. There are four
types of data available for each channel. If multiple types or multiple
channels are required they must be requested separately. If either parameter
is out of range a Zero will be returned

Note 2
Provides the capability of reading any data from the RGA currently has
stored in Huge Arrays. There are four types of data available for each
channel. If multiple types or multiple channels are required they must be
requested separately. Notice that no “Standard Deviations from Mean” is
available, this is because it is a calculated number and provided for
convenience in GetCurrentData only. If any parameter is out of range, or a
Huge Array that is invalid is selected a Zero will be returned

Channel Functions
The data functions require a Channel number as a parameter. The Channels
are always in the following order starting at 1.

Channel 1 to n: partial pressures


Channel n+1: Total Pressure (sum of partials or Ion Gauge for HPQ2S)
Next Channels are Analog Inputs (if enabled for this recipe)

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Next Channels are Digital Inputs (if enabled for this recipe)
Next Channels are Action Channels (if enabled for this recipe)

If, for example, there are no Analog Channels defined for the current recipe
then any Digital Channels will follow the Total Pressure Channel. The
following functions convert a partial, total, analog, digital or action channel
to a channel number suitable for using in the above functions. Selecting a
channel out of the valid range or a channel for a channel type that is not used
in the current recipe will cause a zero to be returned.

Function Returns Parameter Description


MassTo Integer iMass as iMass
Channel Integer The Mass. It must be in the range First
Mass to Last Mass for a Bar Chart
Recipe or one of the defined masses for
a Peak Jump Recipe. If it is out of this
range then 0 (an invalid channel
number) will be returned.
Total Integer Simply returns the Total Pressure
Channel Channel.
Analog Integer iAnalogChan iAnalogChannel
Channel nel as Integer The required Analog Channel in the
range 1 to MaxAnalogChannel.
Digital Integer iDigitalChann iDigitalChannel
Channel el as Integer The required Digital channel in the
range 1 to MaxDigitalChannel.
Action Integer iActionChann iActionChannel
Channel el as Integer The required Action Channel in the
range 1 to MaxActionChannel.

Disk Functions
Function Returns Parameters Description
RemoveExt String sFilename as SFilename
ension String Returns sFilename with the extension
removed.
OpenFile Integer sOpenPath As SOpenPath
String The path of the existing data file to
sOpenFileNa open.
me As String
SOpenFileName
The FileName of the existing data file to
open
A return value of 0 indicates a pass, non

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zero values are fail codes.

NT I/O Functions
Function Returns Parameters Description
NTPeek Integer iBaseAdress IBaseAdress
PortByte as Integer Offset from I/O Port address (0 to
vPortCount –1)

Returns a value in the range 0 – 255


NTPeek Integer iBaseAdress IBaseAdress
PortWord as Integer Offset from I/O Port address (0 to
vPortCount –1)

Returns a value in the range 0 – 65535.


Note values greater than 32767 are
returned as negative numbers – e.g.
65535 is returned as –1, 65534 as –2
etc.

7.5. Subroutines
Subroutines do not have a return value and may have zero or more
parameters that are passed with no parenthesis. The general syntax for using
a subroutine is:

SubRoutineName param1, param2....

7.5.1. Data Subroutines

Subroutine Parameters Description


WriteHugeArray iArray as Integer iArray
Data lScan as Long 1=Raw data
iChannel as Integer 2=Mean
sData as Single 3=Standard Deviation
4=Background

lScan
Scan number. A Long number always in
the range 1 to MaxScan.

iChannel
The channel for which data is required.
Always in the range 1 to MaxChannel. See
below for details of how to calculate a

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channel number.

sData
The data to write.

It provides the capability of writing any


data to the Huge Arrays. Although there are
four types of huge arrays usually only the
Raw Data Array will be used. Since you get
a chance to write data at the end of a scan,
if you change a partial pressures value it
will be displayed on any trends with the
modified reading but not on the Bar Chart
or Peak Jump as that data will have already
been displayed. The modified data will be
written to disk.

7.5.2. Alarm Subroutines


Subroutine Parameters Description
AddAlarm iWarning as Boolean IWarning
Event iStep as Integer A flag set true if this Alarm event is to be
strMessage as String treated as a warning

IStep
This is used as a pointer to the type of
alarm event. It is an arbitrary number
defined by you. It is recommended that
you call your first event 1 and continue
up in steps of 1.

StrMessage
The text to be displayed to a user in the
Alarm Event viewer window. This text
will be written into the .INF file so it is
available when the data is recalled.

AddAlarmEvent adds a user defined


event to the alarm log. It does not take
any actions, these must be programmed
separately.
ShowAlarmWin iVisible as Boolean IVisible
dow iBeep as Boolean Used to set the Alarm viewer window
visible or hidden.

IBeep
Used to start and stop the PC beeping.

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7.5.3. RVC Control Subroutines
Also See RVCStatus read only variable

Subroutine Parameters Description


SetRVC iRVCBits as Integer iRVCBits
The logical OR of the bits that should be
set to the state defined in iState.
1,2,4,8,16 corresponding to the 5 RVC
control line.

iState as Integer iState


True to turn the lines defined in
iRVCBits on (open), false to turn them
off (closed).

7.5.4. Input/Output Subroutines


Subroutine Parameters Description
SetDigital iDigitalChannel as iDigitalChannel
Output Integer The channel to set true or false.

iState as Integer iState


True (non zero) if digital output is to be
set on (TTL high), False (zero) to set it
off (TTL Low).

7.5.5. Recipe control Subroutines


Subroutine Parameters Description
RunRecipe iRecipeIndex as iRecipeIndex
Integer The recipe number defined in the
vInRecipe as variant Proc.INI for shared recipes or in
vDelay as variant Procxxx.Ini for head specific recipes.
This should be the last thing that happens
in you macro as running a new recipe
will involve loading up a new recipe with
its associated macro and running the “Pre
Trigger” code.
vInRecipe (Optional: default = 1)
Flag that should be set to 0 if you are
attempting to run a recipe outside of a
recipe.
vDelay (Optional: default = 2)

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A delay in seconds that allow previous
recipe to complete termination before
starting the next. When vDelay is not
defined a default of 2 seconds is used.
RunRecipe sRecipeName as sRecipeName
Name Integer The recipe name as displayed on the
vInRecipe as variant Recipe button.
vDelay as variant vInRecipe (Optional: default = 1)
Flag that should be set to 0 if you are
attempting to run a recipe outside of a
recipe.
vDelay (Optional: default = 2)
A delay in seconds that allow previous
recipe to complete termination before
starting the next. When vDelay is not
defined a default of 2 seconds is used.
EndRecipe Terminates the currently running recipe.
AbortRecipe Aborts the currently running recipe.

7.5.6. Display control


Subroutine Parameters Description
SetAppWindow iWindowState as iWindowState
State Integer 0 = Normal
1 = Minimized
2 = Maximized
Sets the state of the applications main
(outer) window.

SetApp iLeftFraction as iLeftFraction


Window Single The position of the Process Eye’s
Position iTopFraction as windows left-hand side relative to the
Single whole screen, i.e. to start one third across
iWidthFraction as the screen set to 0.333.
Single iTopFraction
iHeightFraction as The position of the Process Eye’s
Single windows top relative to the whole screen,
i.e. to start one quarter down the screen
set to 0.25.
iWidthFraction
The width of Process Eye’s windows
relative to the whole screen, i.e. to be half
of the screens width set to 0.5.
iHeightFraction
The height of Process Eye’s windows
relative to the whole screen, i.e. to be
three quarters of the screens height set to

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0.75
Only valid if the applications
WindowState has been previously set to
Normal

SetDisplay iWindow as Integer iWindow


WindowState The window to set. 1 = Bar Chart or Peak
Jump, 2 = first Trend window, 3 = second
Trend window ...

iWindowState as iWindowState
Integer 0 = Normal
1 = Minimized
2 = Maximized
Sets the state of the specified window
when a Bar Chart or Peak Jump recipe is
running.

SetDisplayWind iWindow as Integer iWindow


ow The window to set. 1 = Bar Chart or Peak
Position Jump, 2 = first Trend window, 3 = second
Trend window ...

iLeftFraction as iLeftFraction
Single The position of the Process Eye’s
windows left-hand side relative to the
whole screen, i.e. to start one third across
the screen set to 0.333.

iTopFraction as iTopFraction
Single The position of the Process Eye’s
windows top relative to the whole screen,
i.e. to start one quarter down the screen
set to 0.25

iWidthFraction as iWidthFraction
Single The width of Process Eye’s windows
relative to the whole screen, i.e. to be half
of the screens width set to 0.5

iHeightFraction as iHeightFraction
Single The height of Process Eye’s windows
relative to the whole screen, i.e. to be
three quarters of the screens height set to
0.75.
Only valid if the display WindowState
has been previously set to Normal.

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7.5.7. Disk Subroutines
Subroutine Parameters Description
WriteCurrentScan sFileName as String Appends the contents of the current scan
lScanNumber as to specified file using the defined scan
Long number.
WriteUserScan sFileName as String Same as WriteCurrentScan but uses the
lScanNumber as data defined in the parameters.
Long
vScanDateTime as
Variant
sScanData() As
Single

7.5.8. NT I/O Subroutines


Subroutine Parameters Description
NTConfigIO vDeviceNumber as All parameters are optional and should
Variant not be used if the I/O device is the
vPortAddress as standard Analog/Digital I/O card.
Variant
vPortCount as
Variant
NTPokePortByt iBaseAdress as iBaseAdress
e Integer Offset from I/O Port address (0 to
iValue as Integer vPortCount –1)

iValue
Number in the range 0 to 255 to output to
port
NTPokePortWor iBaseAdress as iBaseAdress
d Integer Offset from I/O Port address (0 to
iValue as Integer vPortCount –1)

iValue
Number in the range 0 to 65535 to output
to port. Not Numbers greater than 32676
must be sent as negative (2’s
complement) numbers – e.g. to send
65535 set iValue = -1

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7.5.9. Miscellaneous
Subroutine Parameters Description
Ask the factory iFeatureIndex as A sneaky way to change the Access
Integer levels defined by us.
iAccess as Integer
PauseMacro The mechanism to pass control back to
the RGA program. Use it at your peril, it
will almost certainly cause major
problems.
EnableTriggerL Enables the macro to be called each time
oop around the Trigger loop. The variable
Triggering should be tested and looped
on in the same way that End Of Scan
uses the Scanning variable

7.6. Macro Variables


7.6.1. Read Only Variables
A number of RGA parameters may be read as variables.

Name Type Description


ScanNumber Long The current Scan number
FirstMass Integer First Mass, only valid in a Bar Chart
Recipe
LastMass Integer Last Mass, only valid in a Bar Chart
Recipe
MaxPartials Integer LastMass + 1 - FirstMass in Bar Chart
Number of partial pressure channels in
Peak Jump
MaxAnalogCha Integer The number of Analog input channels in
nnels the current recipe
MaxDigitalChan Integer The number of Digital input channels in
nels the current recipe
MaxActionChan Integer The number of Action channels in the
nels current recipe
MaxChannels Integer The sum of MaxPartials,
MaxAnalogChannels,
MaxDigitalChannels,
MaxDigitalChannels and
MaxActionChannels plus one for total
pressure.
TrendCount Integer The number of Trend displays (0 - 16)
Scanning Boolean Flag set true when scans are progressing.
Its main use is as a mechanism to stop the
End of Scan Macro loop repeating.
ApplicationPath String The directory the application is running

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from
DataFileName String The name of the datafile being stored to
disk
UserSettingsCou Integer The number of user settings
nt
UserSettingsTex String Text label of user setting i
t
(iIndex)
UserSettingsVal Variant Value of user setting i
ue
(iIndex)
ScanStartTime Variant Time Scan lScanNum occurred
(lScanNum)
RunStartTime Variant Time run started
CurrentRecipeFi String The filename of the running recipe
leName
CurrentRecipeN String The name, as displayed on the button, of
ame the running recipe
AlarmWindow Boolean True when the Alarm Viewer window is
visible
RVCStatus Integer Current RVC Status
Triggering Boolean When True the RGA is in a Trigger mode
(only occurs if EnableLoopTrigger has
been called first)
MaxScans Long Maximum number of scans for the
current recipe.
AlarmCount Integer The number of Alarms generated during
the current recipe
WarningCount Integer The number of Warnings generated
during the current recipe
InSelectMode Boolean True if the Select Mode screen is active
(i.e. not running a recipe or recalling
data)

7.6.2. Read/Write Variables


The following variables may be read and written to.
Name Type Description
FilamentState Integer 0 = Filament off
-1 = Filament on
FilamentNumbe Integer 1 = Filament 1
r 2 = Filament 2
Make sure it is safe to switch a filament
on or use the external filament protect
mechanism.
Locked Boolean True = head cannot be accessed by
mouse/keyboard
False = unlocked

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TriggerData Single The value the current pass around the
trigger has read. The value measured may
be replaced by writing a new value to it.
This is useful where more than one
source of data is required for a trigger or
where the trigger parameter cannot be
measured by the standard routine. (See
also the EnableTriggerLoop sub and the
Triggering variable)

There are a large number of functions, sub routines and parameters that are
not currently exposed to the macro language. If there is something you need
please contact your local Spectra facility as a newer version of Process Eye
may include the item you need.

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Appendix A.
Glossary of Vacuum Terms
Atomic mass unit (amu)
Exactly one twelfth the mass of a neutral atom of the most abundant isotope
of carbon, 12C. 1 amu. = 1.660x10-27 kg.

Abundance sensitivity (Partial pressure analyser)


The smallest concentration of one gas that can be detected in the presence of
another gas with a partial pressure analyser of a given design.

Active gas
A gas which reacts readily with some substances to form chemical
compounds.

Background spectrum (Partial pressure analyser)


A mass spectrum of residual gas species in a system. It is usually obtained
before a sample of interest is introduced and analysed in order to deduce, by
subtraction of spectra, the true mass spectrum of the sample.

Backstreaming
The movement of gases or vapours under molecular flow conditions in the
opposite direction to the intended gas flow or pumping.

Bakeout
The term used to describe the process of heating a vacuum system to reduce
or eliminate condensable gaseous contaminants.

Base peak
The largest peak in the spectrum of a pure compound.

Cold trap
A vacuum vessel containing an inner vessel which may be filled with liquid
nitrogen. Vapours in the vacuum system are condensed onto the cold
surfaces reducing contamination. They also prevent backstreaming of
diffusion pump oil into the vacuum system. Well designed cold traps will
serve as an optical baffle to oil vapours so that liquid nitrogen is not required
except to achieve very low temperatures.

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Cracking pattern
Tabulation of the peaks in the mass spectrum of a pure compound. Usually
the heights are normalized to the height of the base peak which is assigned a
value of 100 (or 1000). For a particular type of mass spectrometer operated
under a fixed set of conditions, the cracking pattern remains more or less
constant.

Cryopump
Method for vacuum pumping by freezing out onto cold surfaces below 30K.
This is a similar principle to that used for the pumping of water vapour on a
liquid nitrogen trap at 77 deg.K.

Detector
A device which produces an output signal, usually an electrical signal, in
response to an input signal.

Electron multiplier
A detector which consists of cascaded stages, each intensifying the current
from the preceding stage. Electrons released from the first electrode, cascade
through the device to provide a charge or a current amplification. Electrons
are released from the first electrode by the impingement of photons and/or
by sufficiently high velocity heavier particles, charged or neutral.

Electron emission (From Surfaces)


The release of electrons from a solid or liquid surface as a result of:-

i) atom and/or molecule impact (secondary electron emission)


ii) electron impact (secondary electron emission)
iii) electric fields (field emission)
iv) photon impact (photoelectric emission)
v) previous mechanical and/or radiative chemical disturbance of the
surface (exoemission)
vi) thermal energy (thermionic emission)

Note: Thermionic emission is the method used to generate electrons in the


source which in turn create ions.

Faraday cage
A charged particle detector consisting of a metal electrode, cup shaped, for
the collection and detection of charged particles. This geometry is used to
prevent reduction of signal by suppression of secondary emission current.

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Fingerprint spectrum
A mass spectrum characteristic of a vacuum system, associated leak or
processing environment.

Foreline trap
A vessel filled with molecular sieve (or activated alumina or metal wool) to
trap backstreaming oil vapours. It is normally fitted between the high
vacuum pump and rotary pump to prevent oil vapour backstreaming into the
vacuum system.

Inert gas
A gas which does not normally react chemically with other substances.

Ion
Any atom or molecule which has resultant electric charge due to loss or gain
of valence electrons.

Ion current
The rate of ion flow.

Ion repeller
The electrode in an ion source to which a potential is applied to provide an
electric field which contributes to the initial acceleration of newly formed
ions (See ion source).

Ion source
A combination of electrodes to which potentials are applied to generate ions
and to accelerate them as a beam.

Isotope
One of a set of chemically identical species of atom which have the same
atomic number but different mass numbers.

Leak rate
Designated as the quantity of gas passing through a leak in a given time,
divided by that time. Leak-rate is a general concept whereas rate of pressure
change is specific to the vacuum system volume. Leak-rate has therefore the
advantage that component, or part leak-rates, can be added together to find
an overall figure for a complete plant. A unit for leak-rate is the Millibar
Litre per Second.

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Mass range (Mass Spectrometer)
The interval between the smallest and largest masses which can be detected
with a mass spectrometer.

Mass analyser
That portion of a mass spectrometer which separates the ion beam into its
various mass to charge ratio components.

Mass spectrum
i) A recording of the ion current amplitude as a function of mass
number obtained by scanning through all or part of the mass range.
ii) A tabulation or chart of peak ion current as a function of mass
number.

Mass to charge ratio


The ratio of the mass to the charge of an ionised particle. (See Ion).

Millibar
Unit or pressure which approximates to 1/1000 of an atmosphere. The most
widely used unit of pressure measurement in Europe.

Minimum detectable partial pressure


The smallest partial pressure the mass spectrometer can detect.

Molecular flow
The state of gas flow where the mean free path of the molecule is greater
than the characteristic dimensions of the vacuum vessel so that molecules
collide with the vessel wall more often than with other molecules. Typically
occurs below 7.5x10-5 torr.

Partial pressure
The contribution that a gas component makes towards the total pressure.

Pressure (gas)
The average normal force per unit area exerted by gas molecules impacting
on a surface.

Real leak
Ingress of gas (usually air) into the vacuum system from the atmosphere
outside the vacuum system.

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Relative sensitivity
The relative height of the base peak of a component compared to the
nitrogen 28 peak measured at the same partial pressure. This difference is
due to differences in ionisation efficiency for different gases and several
instrument specific factors. The indicated partial pressure on a mass
spectrometer should be divided by the relative sensitivity factor to obtain the
true partial pressure.

Resolving power
The ability of a mass spectrometer to separate adjacent mass peaks.

Torr
Unit of pressure equal to 1mm column of mercury. 760 torr equals one
atmosphere.

Total pressure
The sum of all the partial pressures present within the vacuum chamber.

Transition or knudsen flow


The flow of low pressure gas through a tube several mean free paths wide.
The flow is neither viscous nor molecular. Under these conditions, the
microscopic concept of viscosity needs to be modified since the resistance to
motion is due primarily to molecular collisions with the passage walls.

Vacuum
"A space entirely devoid of matter"
In reality this cannot be achieved, hence one normally talks in terms of the
degree of vacuum attained within the following pressure ranges.

Rough vacuum 1000 - 1.3 mbar.


Medium vacuum 1.3 - 1.3x10-3 mbar.
High vacuum 1.3x10-3 - 1.3x10-8 mbar.
Ultra-high vacuum 1.3x10-8 and higher vacuum.

Vacuum leak
Any fault on a vacuum chamber wall through which material can pass from
higher to lower pressure regions.

Virtual leak
The effect caused by the outgassing of contaminants or residual atmosphere

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relating to the contents within an otherwise leak-tight vacuum chamber.

Viscous flow
The state of gas flow where the mean free path is less than the characteristic
dimensions of the vacuum vessel so that molecules collide with other
molecules rather than with the vessel walls. Typically occurs above 1x10-2
mbar. There exists a region between 1x10-2 and 1x10-4 mbar where a
mixture of viscous and molecular flow occurs.

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Appendix B.
Interpretation of Data
When the mass spectrum of a vacuum system has been taken, the first
question is probably "What do all those peaks mean?" Although at first sight
they may appear complex, interpretation in fact is a relatively simple matter.

Major Peak
The first task is to identify the mass numbers of the major peaks in the
spectrum (ignore all the smaller ones to start with). Search through a
reference library for spectra with the same major peak.

Secondary Peaks
At some mass numbers there is the possibility of more than one component
being present when using the base peak reference method of identification.
With the exception of mass 28, identification is usually possible with the
knowledge of which gases have been introduced into the vacuum system.
For example, at mass 43 unless acetone or n-butane have been used in the
system or the cleaning of vacuum components, it is unlikely that a peak at
mass 43 is due to these compounds.

Comparing the secondary peaks from the reference library confirms the
match and would show that the peak had most likely originated from rotary
pump oil which can be confirmed by checking the presence of other peaks
typical of this oil.

At mass 28, unless ethylene or ethane have been used in the vacuum system,
the most likely source will be nitrogen or carbon monoxide, or a mixture of
the two. Nitrogen is identified by checking mass 14, which is approximately
5% of the base peak intensity. The mass 28 contribution due to nitrogen can
therefore be calculated. The remainder of mass 28 will be due to carbon
monoxide, confirmed by the presence of a mass 12 peak of approximate
intensity of 5% of the base peak. In practice, mass 28 is always present as it
originates from chemical reactions of oxygen and carbon containing
materials at the filaments of mass spectrometers, ion gauges, etc.

Typical Fingerprint Spectra


The fingerprint spectrum is a mass spectrum which is characteristic of the

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vacuum system from which it is taken. The term is extended to include
spectra which are characteristic of problems or faults commonly encountered
in vacuum systems. The following fingerprints typify some of these
problems and it should be remembered that the fingerprint of a vacuum
system could show a combination of two or more of these conditions.

Air Leak
Characteristic spectrum of an air leak, masses 28 and 14 from nitrogen, 32
and 16 from oxygen, 40 from argon.

To locate the leak, tune the quadrupole to mass 4 (helium) and probe all
joints, welds and feedthroughs etc., with helium. An increase in the helium
peak on the mass spectrometer indicates the source of the leak. It is usually
worth checking freshly made joints or newly added components first as these
are the more likely sources of leaks on a previously leak-tight vacuum
system.

Water Vapour
Characteristic spectrum of water vapour in the vacuum system. The problem
is solved by pumping for longer and, optionally, baking the system at an
elevated temperature (e.g. between 100 and 250 deg. C) for some hours,
preferably with an oven to ensure a uniform baking temperature. Remember

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to avoid sudden large temperature changes on ceramic and glass components
to prevent damage.

Rotary Pump Oil


Characteristic spectrum of rotary pump oil contamination, due to foreline
trap not fitted or in need of reactivation. Solve by fitting or reactivating trap
as appropriate and bake vacuum system.

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Polyphenylether diffusion pump oil

Characteristic of spectrum of polyphenylether diffusion pump oil. Solve by


fitting efficient baffle or cold trap and bake.

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Carbon Monoxide and Carbon Dioxide

Characteristic spectrum of carbon monoxide and carbon dioxide outgassed


by filaments and ion source. Solve by switching quadrupole into degas
remembering to degas filaments of other equipment such as ion gauges.

Clean high vacuum


Characteristic spectrum of a clean high vacuum. Note the relatively high
level of hydrogen which is desorbed from the metal walls of the vacuum
system. Mass 28 due to carbon monoxide will always be present, the extent
depending on how many filaments, and their types, are in operation.

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Appendix C.
Cracking Pattern Table
The following table lists some of the more common gases encountered in
residual gas analysis along with their cracking patterns. The minor peaks are
shown with their approximate intensity (Height) relative to the base peak
which it is assumed equals 100.

COMPONENT Base Peak MINOR PEAKS (Height)


1 2 3
Hydrogen 2 1 (3) - -
Helium 4 - - -
Methane 16 15 (86) 14 (16) 13 (9)
Ammonia 17 16 (80) 15 (7) 14 (2)
Water 18 17 (21) 16 (1) -
Neon 20 22 (10) - -
Ethylene 28 27 (64) 26 (63) 25 (12)
Carbon Monoxide 28 12 (5) 16 (2) 29 (1)
Nitrogen 28 14 (5) 29 (1) -
Ethane 28 27 (34) 30 (24) 26 (23)
Methanol 31 32 (67) 29 (65) 28 (6)
Ethanol 31 45 (34) 27 (24) 29 (23)
Oxygen 32 16 (11) - -
Hydrogen Chloride 36 38 (32) 35 (17) -
Argon 40 20 (13) - -
N-Butane 43 29 (38) 27 (28) 41 (28)
Acetone 43 58 (27) 27 (8) 42 (7)
Carbon Dioxide 44 16 (9) 28 (8) 12 (7)
Iso-Propyl Alcohol 45 43 (17) 27 (16) 29 (10)
Diffusion Pump Oil 45 59 (94) 43 (68) 41 (39)
Rotary Pump Oil 57 43 (73) 55 (73) 41 (33)
Sulphur Dioxide 64 48 (49) 32 (10) 16 (5)
Benzene 78 52 (19) 51 (19) 50 (16)
Trichloroethylene 95 130 (90) 32 (85) 60 (65)
Polyphenylether 446 77 (79) 51 (28) 39 (10)
Diffusion Pump Oil

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Appendix D.
Software Versions

V1.65a
The latest release of Process Eye 1.6 is version 1.65a. This replaces V1.64
for Windows NT and V1.61 for Windows 95/98 so that V1.65a will operate
on all Windows platforms. For this reason the Windows NT Supplement
manual has been included into this Help Manual.

Process Eye V1.65a will operate with Microvision Plus, HPQ-2 and HPQ-2S
control units fitted with the fllowing firmware:

Microvision Plus Core: V2.30e


and HPQ-2 Application: D2.26d

HPQ-2S Core: V2.51a


Application: V2.50a

If you need to upgrade the firmware refer to 2.11. Download.

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Appendix E.
Version 1.64
This help topic was previously released as
Process Eye V1.64 Manual Addendum
PN 02095 (LP502095) Rev 1.00
30 June 2000

E.1 Overview
Process Eye V1.64 adds the following main features:

• E-mail generation option when an alarm is generated.


• E-mail generation at any time using the macro language
• Separate calibrations for low pressure, high pressure and leak check
operation
• Support of the HPQ2S product – this is described separately in the
document titled ‘HPQ 2S User Manual Addendum’
• Optional millisecond timing resolution for disk data

It also includes a number of minor features (see the Miscellaneous Features


section below) and fixes a number of bugs.

E.2 E-mail
Process Eye can be configured to send an E-mail message when running a
recipe when an alarm is generated or at any time using the macro language.
There are no facilities to receive E-mail within Process Eye. If you wish to
receive E-mail Spectra recommends using the e-mail client that comes as
part of Microsoft’s Internet Explorer or Netscape’s Navigator packages.

To send E-mail the Process Eye PC must be connected to an SMTP host. In


addition most hosts will expect the client sending E-mail to have an account
on that host. Your network administrator will provide the SMTP host name
and account name if you do not know what they are.

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E.2.1 Configuration

Before E-mail can be sent the E-mail configuration program CfgEmail must
be run. Use it to set:

SMTP Server (required)


The E-mail server. It can be defined either as a name, for example

mail.yourdomain.com
or in dotted notation
208.123.123.1

From (required by many servers)


The E-mail address of the sender. It may also include the “friendly” name,
for example

Your Name<[email protected]>

or just the senders address, for example

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<[email protected]>

Note the < and > are required for this and other address entries. Typically
the ‘Your Name’ and yourname values would reflect the tool and / or
chamber that the RGA is mounted on, for example
<[email protected]>

Reply To (optional)
If return mail is expected this is the address it should be sent to, for example

<[email protected]>

if no return mail is expected it may be left blank. Note that reading of e-mail
is not supported within Process Eye but may easily be accomplished by
configuring your companies choice of e-mail client, for example Outlook,
Outlook Express, Navigator, Eudora etc.

To (required)
The e-mail address or addresses that the E-mail should be sent to. Multiple
addresses should be separated by a comma, for example

<[email protected]>

or

<[email protected]>,<[email protected]>

CC (optional)
Addition E-mail address or addresses that the E-mail should be copied to.
The syntax is the same as the To setting.

BCC (optional)
Addition E-mail address or addresses that the E-mail should be blind copied
to. The syntax is the same as the To setting.

Subject (optional)
The text to place in the E-mail subject. Typically this would identify either
the RGA or the tool the RGA was monitoring, for example

Alarm from RGA 3 on SPT06

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E.3 Sending E-mail from a Recipe

Within a recipe an E-mail can be generated when a condition becomes True


or False. Simply check the Send Email checkbox. The text of the E-mail will
be the Alarm message and it will be sent to the address(es) defined in the E-
mail configuration.

E.3.1 Sending E-mail using the Macro Language

E-mail may be sent using the SendEmail function:

SendEmail (EmailMessage)

SendEmail is a function that takes a string parameter containing the text of


the message and returns a string that will be null (“”) if the e-mail was
successfully sent or contain a text string describing the error that occurred.

Dim Result as String


Result = SendEmail(“Test message from RGA1”)
If Result <> “” Then ‘ If Result is not blank an error occured
MsgBox Result, vbExclamation, “Email Send Error”

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End If

Usually the To, CC, BCC, Subject, Attachments, SMTP Host, Senders
Address and Reply address are defined in the Email.Ini file (see the
Configuration section above) but if required they may be set at the time the
message is sent by the macro using the following optional syntax:

Debug.Print SendEmail(sEmailMessage As String, Optional EmailTo,


Optional EmailCC, Optional EmailBCC, Optional EmailSubject, Optional
EmailAttach, Optional SmtpHostName, Optional MyEmailAddr, Optional
ReplyTo)

Notes
Calling SendEmail uses these parameters for the current E-mail message
only.
All parameters are Variants of type string.
If some settings are to be taken from the Email.Ini file and others defined
then parameters may be omitted from the end of the parameter list. I.e. if you
wish to define one or more people to be BCC’d you must define the
EmailTo and EmailCC.

E.4 Multiple Calibrations

Note that this applies only to configurations using HPQ 2 instruments i.e.
HPQ 2, HPQ 2R and HPQ 2S. In the description below all HPQ 2
instruments will be generically referred to as an HPQ.

Overview
HPQ systems run in one of three states:
High Pressure (HP)
Residual Gas Analysis (RGA)
Leak Check (LC)

Not all scanning modes can be in all states.

Mode HP RGA LC
Bar Chart √ √
Peak Jump √ √

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Leak Check √
Analog √ √ √
Faraday Calibration √ √

Notes.
To achieve the best results calibrations should be performed at or near the
expected operating pressures.

The settings for the analyser (Emission, Electron Energy, Ion Energy and
Extractor) are factory configured and unless you fully understand the
implications they should not be changed from the Analog mode.

The Leak Check calibration is the same as the RGA calibration with a factor
of 3.5 to account for the increased sensitivity obtained by the analyser
settings for Leak Check mode. It may be adjusted by the ‘LC Faraday
Factor’ Item in the [FIL X CAL DATA] section of the SerialNumber.Ini file.

E.5 High resolution timing

In situations where data is being scanned at high rates the standard 1 second
resolution of data stored to disk is insufficient. By setting ‘Save Disk
Hundredths = 1’ in the [SYSTEM] section of the Proc.Ini file two things will
happen. Firstly a high resolution timer will be used to measure time. On
Windows NT the time resolution is around 10mS. Secondly data stored to
disk will have the scan time saved with fractional seconds.

E.6 Miscellaneous additions

1. Units other than Torr may be used by:


a. Entering a ‘Type = x” item in the [UNITS] section of the
SerialNumber.Ini file where valid values for x are: 0 = Amps, 1 =
Torr (default), 2 = mBar, 3 = Pascal, 4 = microns, 5 = PSI
b. Setting ‘Largest Faraday Peak’ in the [SYSTEM] section to the
appropriate value in the desired units, for example in Pascal an HPQ
2 would be 0.133, an open ion source would be 0.0133, a 1000P

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with no orifice would be 1.33 etc.

Note that any recipes defined in different units will become invalid
and will need editing.

2. A number of Macro language commands and variables have been


added – see the Macro manual for details.

3. The default Emission, Electron Energy, Ion Energy, Extractor and Leak
Hunt Low Resolution for HPQ and HPQ2S in RGA, HP and Leak Hunt
modes have been optimized.

4. By default HPQ heads are now prevented from running a recipe if the
filament is off and any running recipe will be stopped if the filament
turns off.
HPQ heads may be allowed to run without filament or non HPQ heads
may be prevented from running without a filament being on by
manually setting the ‘Run Without Filament’ item in the [SYSTEM]
section of the SerialNumber.Ini file. It defaults to 0 for HPQ systems
and 1 for all others.
Bar Chart & Peak Jump run as far as the Post Trigger Actions and then
abort the recipe if the Filament is still off.
Calibrations will not terminate immediately but at their normal end.
A message will be displayed when the running of a recipe has been
prevented due to the filament being off but only when SECS and
GEMSECS are disabled.

5. The way “Largest Peak” in Bar Chart and Peak Jump recipes are
calculated has changed to make them reflect the true values that can be
measured more closely.
If no head is present just “Large” and “Small” will be displayed.
If HPQ 2S in HP mode “Large” will be 18mT (or appropriate units) and
“Small” will be based on HP calibration and the relative values of the
feedback resistors in the pre-amp.
For all others in Faraday Peak and “Small” will be based on RGA
calibration and the relative values of the feedback resistors in the pre-
amp.

6. Startup splash screen displays RGA, HPQ2 or HPQ2S in messages to


give visual confirmation of the configuration found in the
SerialNumber.Ini file

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7. The writing of Log files when Bar Chart or Peak Jump recipes
terminates is now performed before the ‘Post Run’ Macro executes.

8. A new Shutdown macro, default name Shutdown.Bas that executes just


before Process Eye terminates can be defined. It may be renamed by
setting the ‘Shutdown Macro’ item in the SerialNumber.Ini file
[SYSTEM] section.

9. A new Hidden macro, default name ProcEye.Bas that allows common


subs, functions and variables to be shared by all macros can be defined.
It may be renamed by setting the ‘Hidden Macro’ item in the
SerialNumber.Ini file [SYSTEM] section.

10. Calibrations have an AutoRun feature that can be enable when a


calibration recipe is written. If enabled then when the recipe runs a
calibration will be performed with no user input. If the calibration fails
for any reason the user will have to acknowledge the failure.

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Document Data
Title: Process Eye 1.6 Help Manual
Source: DellIt D:\HelpMans\Proc16
Original: Revision 1.00 31 May 2000
Current: Revision 2.00 1 June 2000
Original Based On: Process Eye 1.6 Manual, LP101012 Rev 1.10 August
1998

Paper Manual
Title: Process Eye 1.6
Source: DellIt: D:\LedaPub\Process 1.6\LP101012.200
Current: Rev 2.00 7 June 2000
Based On: LP105004 Rev 2.00

History
7 June 2000
LP101012 Rev 2.00 Process Eye 1.6 Paper Manual generated from the Rev
2.00 Help Manual LP105004.

Rev 2.00
Macro section updated based on Process Eye Macro Manual PN02097 Rev
1.2 27 May 2000
The Process Eye 1.61 for Windows NT Manual Supplement incorporated as
the Windows NT Topic.

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Index
A
Abort ............................................................................................................ 71
Abort Process............................................................................................... 71
Access Levels .............................................................................. 5, 66, 67, 68
Access Levels Button................................................................................... 65
Action Channel Settings ............................................................................ 110
Add Recipe Button....................................................................................... 64
Add Trend.................................................................................................. 141
Add Trend Button ........................................................................................ 71
Adding Recipes............................................................................................ 92
Air Leak ..................................................................................................... 200
Analog................................................................................................ 156, 157
Analog inputs............................................................................................. 164
Analog Settings.......................................................................................... 136
Analog Settings Button.............................................................................. 157
Analog Settings Dialog Box ...................................................................... 158
Analyser......................................................................................................... 8
Anatomy of a Recipe Macro ...................................................................... 179
Audio Button ............................................................................................. 155
B
Background Settings .......................................................................... 107, 108
Bar Graph....................................................................................................... 4
Bar Graph Display Settings ....................................................................... 123
Bar Graph Scan Configure........................................................................... 94
Baseline Settings........................................................................................ 109
Build baseline ............................................................................................ 164
C
Carbon Dioxide.......................................................................................... 203
Carbon monoxide............................................................................... 199, 203
Clean high vacuum .................................................................................... 203
Comment Button.......................................................................................... 72
Comms Card ................................................................................................ 15
Control Unit ............................................................................................... 8, 9
Copy Recipe Button..................................................................................... 64

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Copying Recipes .......................................................................................... 93
Copying Recipes Between PCs .................................................................. 171
Cracking Pattern......................................................................................... 205
Cracking Pattern Table............................................................................... 205
Create Baseline Button................................................................................. 64
Cursor Button............................................................................... 73, 155, 158
D
DDE Commands ........................................................................................ 174
Decrease Analog Accuracy Button ......................................................... 157
Decrease Leak Check Accuracy Button..................................................... 155
Decrease Mass Span Button....................................................................... 157
Degas.................................................................................................. 149, 150
Degas Button................................................................................................ 64
Delete Recipe ............................................................................................. 147
Delete Recipe Button ................................................................................... 64
Delete Trend............................................................................................... 147
Delete Trend Button..................................................................................... 72
Diffusion Pump Oil .................................................................................... 202
Disk header ................................................................................................ 164
Disk Store Settings..................................................................................... 100
Display Parameters ........................................................................................ 5
Document Data .......................................................................................... 209
E
Edit Display................................................................................................ 139
Edit Display Button...................................................................................... 71
Edit Recipe Button ....................................................................................... 64
Edit Trend .................................................................................................. 146
Edit Trend Button......................................................................................... 71
Enable Actions ........................................................................................... 117
Enable Tuning Button ............................................................................. 157
End of Scan Actions........................................................................... 112, 113
Exit Analog Button................................................................................... 157
Exit Button ................................................................................................... 64
Exit Leak Check Button ............................................................................. 154
F
Faraday Calibrate Settings ......................................................................... 131
Filament Button............................................................................................ 64
Filament Warning ........................................................................................ 62

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Filaments.................................................................................................... 149
File Name..................................................................................................... 69
Fingerprint ................................................................................................. 199
G
Glossary of Vacuum Terms ....................................................................... 193
Grid Button .................................................................................. 73, 155, 158
H
Help Button.................................................................................................. 65
Hold Settings ............................................................................................. 106
I
Increase Analog Accuracy button.............................................................. 157
Increase Leak Check Accuracy Button...................................................... 154
Increase Mass Span Button........................................................................ 157
Installation 95 .............................................................................................. 24
Installation NT ............................................................................................. 29
Instrument Tuning...................................................................................... 160
Interpretation of Data................................................................................. 199
Introducing DDE........................................................................................ 173
Introducing Macros.................................................................................... 177
L
Leak Check ........................................................................ 151, 152, 153, 154
Leak Check Settings .................................................................................. 134
Leak Check Settings Button ...................................................................... 154
Log peak height button ................................................................................ 72
M
Macro Function Extensions ....................................................................... 181
Macro Types .............................................................................................. 177
Macro Variables......................................................................................... 190
Major Peak................................................................................................. 199
Mass Scroll Bar.................................................................................... 73, 158
Mass Scroll Bar Button........................................................................ 73, 158
Menu Bar ..................................................................................................... 65
Multiplier Calibrate Settings...................................................................... 132
Multiplier Detector Button......................................................................... 155

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P
Passwords............................................................................................... 67, 68
Peak Height Scroll Bar................................................................. 73, 155, 158
Peak Height Scroll Bar Button ............................................................. 72, 155
Peak Height Scroll Bar Button Analog ...................................................... 158
Peak Jump ...................................................................................................... 4
Peak Jump Display Settings ....................................................................... 127
Peak Jump Scan Configure .......................................................................... 97
Permissions .................................................................................................. 69
Preferences ................................................................................................. 165
Preferences button........................................................................................ 64
Print Button .................................................................................................. 72
Probe Mass Scroll Bar................................................................................ 155
Probe Mass Scroll Bar Button.................................................................... 155
R
Read Only Variables .................................................................................. 190
Read/Write Variables ................................................................................. 191
Recall Data Button ....................................................................................... 65
Recipe ...................................................................................... 4, 5, 65, 91, 93
Recipe Buttons ............................................................................................. 65
Recipe Setup ................................................................................................ 93
Recipe Types................................................................................................ 91
Reminder macro................................................................................. 177, 178
Rotary pump oil ................................................................................. 199, 201
RS232................................................................................................. 9, 10, 11
RS422................................................................................................. 9, 10, 11
RS485....................................................................................................... 9, 11
Running a Recipe ......................................................................................... 69
RVC settings .............................................................................................. 164
S
Scan Parameters ......................................................................................... 4, 5
Secondary Peaks ........................................................................................ 199
Serial Card.................................................................................. 11, 12, 13, 15
Set Access .................................................................................................. 138
Software switches ...................................................................................... 164
source potentials......................................................................................... 160
Start and End of Recipe.............................................................................. 121
Start-up Options ......................................................................................... 4, 5

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Status Bar..................................................................................................... 65
Subroutines ........................................................................ 184, 185, 186, 189
T
Title Bar ....................................................................................................... 65
Trend.......................................................................................................... 4, 5
Trigger Settings ......................................................................................... 104
U
Use Multiplier Detector Button ................................................................. 157
User Disk Header......................................................................................... 69
Utilities ...................................................................................................... 164
V
Vacuum leak .............................................................................................. 197
View Alarms Button .............................................................................. 64, 65
Virtual leak ................................................................................................ 197
Viscous flow .............................................................................................. 198
W
Water Vapour............................................................................................. 200
Welcome ........................................................................................................ 1
Writing a Macro......................................................................................... 180

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