Monolithic Transformers For Silicon RF IC Design: John R. Long, Member, IEEE
Monolithic Transformers For Silicon RF IC Design: John R. Long, Member, IEEE
9, SEPTEMBER 2000
I. INTRODUCTION
II. MONOLITHIC TRANSFORMER
compared simulation and experimental measurement for terminals and , there is minimal phase shift of the signal
a monolithic spiral transformer and a transformer balun. at the secondary if the load is connected to terminal (with
Boulouard and Le Rouzic [7] proposed an alternate topology grounded). This is the noninverting connection. In the inverting
and analysis technique for monolithic microwave integrated connection, terminal is grounded and is connected to the
circuit (MMIC) spiral transformers, which was also verified load so that the secondary output is antiphase to the signal ap-
experimentally. Frlan and Rabjohn [8] demonstrated square plied to the primary. Aside from the phase shift between input
spiral transformers on alumina and GaAs substrates, and devel- and output ports, other aspects of the transformer’s electrical be-
oped circuit simulation tools based upon extraction of a lumped havior depend upon the choice of terminal configuration (this is
element model for the transformer from physical and geometric addressed in Section V).
parameters. This modeling technique was later extended to the
analysis of planar structures on conductive substrates, such as
A. Physical Layout
silicon [1], [9]. In the recent literature, there are many examples
of monolithic transformers fabricated in silicon IC technology A monolithic transformer is constructed using conductors
for use in RF circuits, such as preamplifiers [10], [11], oscil- interwound in the same plane or overlaid as stacked metal,
lators [12], [13], mixers [2], [14], [15], and power amplifiers as shown in Fig. 2. The mutual inductance (and capacitance)
[16]. However, there is little design information or analysis of of the transformer is proportional to the peripheral length of
different transformer topologies given in the majority of these each winding. Interleaving planar metal traces or overlaying
publications, which is the objective of this paper. (i.e., stacking) conductors maximizes the periphery between
windings and promotes mutual inductance at the expense of
III. ELECTRICAL CHARACTERISTICS AND CONSTRUCTION increased interwinding capacitance. The magnetic coupling
A planar monolithic transformer constructed from inter- coefficient is determined by the mutual and self-induc-
wound metal conductors is shown in Fig. 1. Magnetic flux tances, which depend primarily upon the width and spacing
produced by current flowing into the primary winding at of the metal traces and the substrate thickness [17], with
terminal induces a current in the secondary winding that for transformers fabricated using parameters
flows out of terminal . This produces a positive voltage typical for silicon VLSI technologies.
across a load connected between terminals and . The Many of the techniques that have been applied to optimization
main electrical parameters of interest to a circuit designer are of monolithic spiral inductors are also applicable to the trans-
the transformer turns ratio and the coefficient of magnetic former [18], [19]. For example, ohmic losses are reduced when
coupling . The current and voltage transformations between multiple layers of metal (available in a VLSI technology) are
windings in an ideal transformer are related to the turns ratio used to construct each winding. Although uniform width and
by the following equation: spacing of the metal traces is typically used, nonuniform width
and spacing may offer some performance advantages in specific
(2) applications [20].
The Shibata coupler [3] of Fig. 2(a) is constructed from
where the primary and secondary voltages ( , ) and currents
two parallel conductors that are interwound to promote edge
( , ) are defined in Fig. 1(b), and , are the self-induc-
tances of the primary and secondary windings, respectively. The coupling of the magnetic field between windings. The primary
strength of the magnetic coupling between windings is indicated and secondary terminals (labeled and in the figure) lie
by the -factor, as in the same plane, as illustrated in the cross-section at the
right of the figure. The conductors used to connect the inner
(3) terminals to other circuitry are not shown for clarity. The square
layout is defined by the outer and inner conductor lengths
where is the mutual inductance between the primary and (OD and ID in Fig. 2), the number of turns of metal on each
secondary windings. The self-inductance of a given winding winding ( for all designs shown in Fig. 2), and
is the inductance measured at the transformer terminals with by the width and spacing between the metal traces. One
all other windings open-circuited. If the magnetic coupling be- disadvantage of Shibata’s design is that the total (i.e., unwound)
tween windings is perfect (i.e., no leakage of the magnetic flux), length of primary and secondary windings (and hence the self-
is unity, while uncoupled coils have a -factor of zero. A inductances and ) are not equal because the windings
practical transformer will have a -factor somewhere between are asymmetric. Therefore, the transformer turns ratio
these two extremes. Since the materials used in the fabrication of [from (2)] although there are the same number of turns of metal
an IC chip have magnetic properties similar to air, there is poor on each winding.
confinement of the magnetic flux in a monolithic transformer This inherent asymmetry is eliminated through the use of
and . Thus, the -factor is always substantially identical interwound spirals, as in the Frlan-style transformer
less than one for a monolithic transformer, however, coupling [6] shown in Fig. 2(b). This ensures that electrical characteris-
coefficients as high as 0.9 are realizable on-chip. tics of primary and secondary are identical when they have the
The phase of the voltage induced at the secondary of the trans- same number of turns. Another advantage of this design is that
former depends upon the choice of the reference terminal. For the transformer terminals are on opposite sides of the physical
an ac signal source with the output and ground applied between layout, which facilitates connections to other circuitry.
1370 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 9, SEPTEMBER 2000
(a)
(a)
(a)
(b)
(b)
Fig. 5. CAD models for magnetic coupling in a 1 : n transformer. (a) Direct on the operational bandwidth of the transformer. This informa-
form model. (b) Dual-source model. (c) T-section model. tion is used to develop guidelines for monolithic transformer
design and explain experimental observations in terms of
controls the dependent voltage source on the secondary side. equivalent circuit parameters. The series and shunt inductive
Note that this results in an ideal 1 : transformation for elements define many characteristics of the frequency response,
voltage between the internal primary and secondary. The actual and a simplified equivalent circuit at low frequencies is shown
terminal voltage is modified by current flow through leakage in Fig. 6(a). The assignment of leakage inductance between
inductances and placed in series with the primary primary and secondary is arbitrary, as described previously,
and secondary windings. The model shown in Fig. 5(b) has the and here the secondary leakage has been shifted to the primary
leakage inductance partitioned equally between windings, as in order to simplify the equivalent circuit.
the mutual inductance is
It is clear from Fig. 6(a) that the shunt inductor in the pri-
(4) mary affects the low end of the frequency response by shunting
energy to ground, while the series element blocks transmission
This arbitrary assignment of leakage inductance is not unique
of the signal from primary to secondary as the operating fre-
[i.e., (4) cannot explicitly define two unknown leakage induc-
quency increases. The terms low, mid, and high frequency used
tances] and other combinations are possible. For example, if
in the following discussion are in the relative sense implied by
all the leakage inductance is moved to the primary winding,
then the effects of these two elements.
OD (8)
TABLE I
TECHNOLOLGY PARAMETERS [28]
of the power entering the transformer is dissipated by ohmic Fig. 10. Measurement versus simulation for 1 : 1 spiral transformers.
losses in the windings themselves as the -factor is reduced.
This is an important consideration because the ohmic losses of
the windings are relatively high due to the thin metallization conductor spacing improves the magnetic coupling between
used in fabrication. The effective load reflected from the sec- primary and secondary windings, and hence the closest line
ondary back to the primary is proportional to the square of the spacing ( 3 m) was chosen.
transformer -factor, as seen from the low-frequency model of The frequency response (both magnitude and phase) of the
Fig. 6(a). Hence, as the -factor drops, so does the load at the square spiral (Frlan) transformer in both the inverting and non-
internal node as seen from the primary side. Therefore, a high inverting connections is compared in Fig. 10. At low frequen-
-factor is still desirable in order to limit losses in the passband cies, the transmission of a signal from primary to secondary for
when resonant tuning is used to reduce the attenuation. a 50- source and load ( ) is low, because the input frequency
is well below the self-inductance of the primary and secondary
windings [note that is, by definition, 6 dB larger than the
VI. TRANSFORMER EXAMPLES
voltage gain , as defined in Fig. 6(a), with
The performance of both spiral and symmetric transformers 50 ]. As the frequency increases, the coupling between input
has been characterized in simulation and by fabricating and and output also improves, reaching a minimum in the operating
testing a number of different designs. The following square band, which for this transformer is in the 1–3-GHz range. There
spiral layouts have been fabricated and tested: 1 : 1 inverting is a substantial difference in the magnitude responses of the two
and noninverting, 1 : 3 and 1 : 5 inverting step-up designs, a connections, as seen from both the measured and simulated data
4 : 5 square symmetric balun, and a 2 : 1 : 1 symmetric trifilar shown in Fig. 10. This difference is mainly due to the effect
transformer. of interwinding capacitance, which introduces a zero in the re-
sponse of the noninverting transformer as previously outlined in
A. Inverting and Non-Inverting 1 : 1 Transformers Section V-C. The phase difference between inverting and non-
A 1 : 1 Frlan transformer consisting of four turns of inverting configurations is 180 degrees at low frequencies, as
10- m-wide top-level metal with a 3- m conductor spacing expected, but deviates significantly above 3 GHz, which defines
and measuring 400 m on each side (i.e., dimension OD in the upper edge of the transformer’s operating band. The simu-
Fig. 2) has been fabricated and tested. The interwinding capac- lated and measured responses agree well in both phase and mag-
itance introduced by closely spaced conductors is acceptable nitude up to the first self-resonant frequency of the two wind-
in most applications. A summary of the important parameters ings, where the assumption of lumped behavior in the simulation
of the fabrication process are listed in Table I [28]. A number model no longer applies. This occurs at approximately 5 GHz.
of features of this technology are worth noting. The top-metal
thickness is close to 2 m, which is double the metal thickness B. Comparison of Planar and Overlay Configurations
available in most silicon VLSI technologies. Thicker metal The winding configuration and technology used in fabrica-
reduces the ohmic losses in the primary and secondary wind- tion are other important factors that determine the frequency
ings of a planar transformer. Also, the 6- m-thick insulating response of a monolithic transformer. In order to investigate
oxide layer reduces parasitic coupling to the semiconducting this, two 1 : 1 transformers were designed given the technology
substrate, thereby improving the operating bandwidth and parameters listed in Table I. The first design is a four-turn
reducing in-band losses caused by shunt parasitic elements. Frlan transformer consisting of 10- m-wide conductors spaced
Losses due to the substrate are further reduced through the use 3 m apart, with an outer dimension (OD) of 400 m, as in
of a relatively high resistivity substrate (nominally 15 -cm). Section VI-A. The second design is a four-turn Finlay trans-
Previous experience with both simulation and measurement of former. The conductor width and conductor spacing is identical
microstrip spiral inductors [9] has shown that the minimum for both designs, but the dimensions of the Finlay transformer
1376 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 9, SEPTEMBER 2000
TABLE II
PARAMETERS FOR 1 : 1 PLANAR AND OVERLAY TRANSFORMERS (w = 9 m, s = 3 m)
(a)
TABLE III
COMPACT MODEL PARAMETERS FOR PLANAR TRANSFORMERS
(a) (b)
(c)
Fig. 16. Trifilar balun. (a) Square symmetric trifilar balun layout. (b) Func-
tional equivalent circuit. (c) Frequency response.
B. Design Procedure
Fig. 18. k -factor versus number of turns for a 1 : 1 Frlan transformer with As a first step, the inductance required for each winding must
L = 5 nH. be determined from consideration of the terminal impedances
and center frequency specification. For example, (12) can be
For a resonant RLC circuit, the 3-dB bandwidth (in Hertz) used to compute the winding self-inductance (of a 1 : 1 trans-
is given by former) for a given center frequency and loading . In a
narrowband system, the inductance of the transformer winding
(14) can often be made resonant with a parasitic capacitance, and
so the capacitance of the source and/or load must be consid-
where is the total resistance (including loading of the ered in the process of determining the winding self-inductance
source) and is the total capacitance shunting the circuit. If and turns ratio. Additional capacitance may be added in shunt
a large self-inductance is used (e.g., 10 nH), a relatively small at the ports of the transformer to tune the device to a given fre-
is needed to tune the transformer. A small self-inductance quency and reduce the transmission losses. Resonant tuning re-
(e.g., 2 nH) requires more tuning capacitance, and (14) predicts duces the bandwidth of the transformer [as per (14)] and hence
a narrower bandwidth for a given load, . Therefore, the selection of center frequency, bandwidth, and winding induc-
selection of winding inductance influences the bandwidth tance are closely related. For applications where bandwidth is a
when resonant tuning is applied. For relatively low terminal consideration, the inverting connection should be used.
impedances (on the order of the conductor ohmic losses), the It was shown previously (Fig. 18) that the transformer
series parasitics ( and in the transformer model) dominate -factor improves as the width of the winding decreases, and
the response and so wider conductors lines with relatively large therefore the smallest practical linewidth should be used in the
parasitic capacitances may be used. When terminal impedances design. However, the high ohmic losses in the windings of a
on the order of hundreds of ohms are used, shunt parasitics monolithic transformer must also be considered. These losses
play a more important role in the overall response and therefore modify the impedances seen at each port when the transformer
narrower conductor widths should be used. is impedance matched to the source and load, and also con-
tribute noise in the final circuit. Narrowly spaced conductors
A. Transformer -factor improve the magnetic and electric coupling between windings.
The relationship between -factor and the parameters that In most cases, line spacing close to the minimum allowable
influence the magnetic coupling between windings of a trans- for the technology results in the best overall performance (i.e.,
former fabricated on an IC is complex and it is best investigated additional interwinding capacitance is less important that the
using simulation tools. improvement in -factor).
To maximize magnetic coupling between windings (and Knowing the winding inductance, number of turns, and con-
hence -factor), adjacent conductors should belong to different ductor width and spacing, the physical dimensions of a trans-
windings. The mutual magnetic coupling between adjacent former can be estimated with a design aid such as the one shown
conductors that belong to the same winding contributes self-in- in Fig. 19. This graph (also generated from Greenhouses’ algo-
ductance but not mutual inductance to the transformer and rithm) illustrates the inductance per unit of length of a given
lowers the coupling coefficient. winding as a function of the OD for a four-turn 1 : 1 Frlan trans-
The plot shown in Fig. 18 illustrates the variation in -factor former. Points on the curves shown in the figure are all physi-
with the number of turns for a 1 : 1 turns ratio square spiral Frlan cally realizable.
transformer [layout as in Fig. 2(b)]. The curves plotted on the As an example, assume that a center frequency of 2 GHz in
figure were generated using the Greenhouse algorithm [17] for a 50- system is required. Equation (12) predicts a winding
LONG: MONOLITHIC TRANSFORMERS FOR SILICON RF IC DESIGN 1381