Enabling Smart Vision Uisng Metasurface
Enabling Smart Vision Uisng Metasurface
Light carries an enormous amount of information that enables by engineering—with unprecedented spatial resolution—the light
humans and autonomous machines to see and understand the world. wavefront, emission and absorption.
However, this information is often hidden from our eyes, which only The field of meta-optics has emerged from pioneering works on
react to light intensity and colours in the visible spectral range. The wavefront and polarization control1,2. The name ‘meta-optics’ was
hidden attributes of light, including phase, polarization or angular coined by Ross McPhedran and colleagues in 20113 and has found wide
momentum, can be extracted by smart optical devices that enable acceptance worldwide. Over the past decade, the field has grown expo-
machine vision to surpass conventional vision. Novel smart optical nentially, with over 160 groups working in the field, including major
systems can also allow us to see such hidden information through research centres worldwide. We are witnessing thousands of research
human–machine interfaces, such as virtual and augmented reality publications and industrial patents every year. Although this growth
(VR/AR) displays, wearable sensors and artificial intelligence in the reflects the importance of meta-optical development, it also presents
photonic domain. But what is under the hood of a robotic system challenges where novel and disruptive ideas cannot easily be noticed4.
that can enable superior vision across multiple spectral bands? This Review aims to map the active research areas in the field over the
Conventional optical technologies are too bulky to allow advanced past five years, identify key concepts, discuss the existing challenges
functionalities in a small device. For example, how many more lenses and provide a vision for the impact of the technology.
can one fit on a mobile phone? Such miniaturized advanced-vision By mapping the activities in the field, we have identified three main
technologies require radically new approaches for smart optical stages of importance. These are presented as an artist-impression map
systems. The concept of meta-optics might provide the awaited in Fig. 1. At the focal spot of this map is the fundamental research on
solution. Meta-optics is based on subwavelength-patterned sur- understanding the physics of metasurface elements. Their response
faces, called metasurfaces, which acquire optical functionalities is driven by optical resonance (localized or lattice-type5) and can be
through the scattering of nanoparticles rather than by refraction. tailored by their geometry for efficient light manipulation, generation
Metasurfaces offer extreme miniaturization of optical components, and detection. A composition of metasurface elements forms a metade-
together with smart functionalities beyond what is possible with vice that can deliver enhanced optical functionalities. The research on
conventional optics. The name stems from the Greek word μετά metadevices represents an increasingly large set of activities. It focuses
(meta), meaning ‘after’ or ‘beyond’, referring to optics beyond the on metasurface functionalities that cannot be achieved conventionally
three-millennia-old conventional optics. The meta-optics concept or exhibit improved performance with a miniaturized footprint. Exam-
provides a viable pathway for developing advanced machine vision ples include (Fig. 1, middle) flat metalenses6–9, polarization routers10,
ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), Research School of Physics, The Australian National University, Canberra,
1
Australian Capital Territory, Australia. 2School of Engineering and Information Technology, University of New South Wales Canberra, Canberra, Australian
Capital Territory, Australia. e-mail: [email protected]
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Fig. 1 | Metasurfaces are dramatically enhancing the vision of robotic Images adapted with permission from: flat lenses, ref. 7 under a Creative
and autonomous systems. Schematic representation of the meta-optics Commons licence CC BY 4.0; polarization routers, ref. 10, AAAS; microscopy
research field. Left: metasurface elements. Middle: metadevices. Right: optical coverslips, ref. 11, Springer Nature Ltd; biosensors, ref. 111, Wiley; 3D imaging
system applications. Metadevices (from top to bottom) include metalenses7, (right), ref. 112, American Chemical Society; LIDAR, ref. 18, Springer Nature Ltd;
polarization routers10, microscopy coverslips11 and biosensors111. Applications image classification, ref. 19, AAAS. Holographic display image reproduced from
include 3D imaging for face identification112, AR and VR, holographic displays17, ref. 17 under a Creative Commons licence CC BY 4.0.
LIDAR beam steering18, image processing and classification19 and light sails.
specialty microscopy coverslips11,12 and biosensors13,14. The product seeking new applications. One can conclude that a strong industry drive
development of such metadevices has been the focus of several start-up currently defines the progress in the field. Namely, the new industrial
companies, such as Metalenz (www.metalenz.com), NILT Technologies applications define the research problems the field needs to solve. Sev-
(www.nilt.com) and Meta Materials Inc. (www.metamaterial.com), to eral other inspiring applications beyond vision can be identified. These
mention a few. In the search for markets, this industrial uptake also include using metasurfaces in light sail technologies20,21, light-fidelity
sets new challenges and seeks solutions from the research community. (LiFi) communications22 and thermal management23.
However, the biggest driver for the meta-optics field comes from To understand how such applications can benefit from the integra-
integrating metadevices into optical systems to offer new consumer tion of optical metasurfaces, we next review their basic functionalities.
optoelectronics applications. Importantly, meta-optical systems ena- We then describe how these functionalities can be achieved and outline
ble novel applications not conceivable before, adding to so-called the challenges in recent research.
Industry 4.015. Such applications include the Internet of Things (IoT),
vision for autonomous cars, wearable devices, AR and remote sensing. Metasurface functionalities
For example, an autonomously driving car requires three-dimensional Metasurfaces have gained a great deal of attention for their ability
(3D) vision enabled by light detection and ranging (LIDAR) devices in to control the spatial wavefront of light1,2, linking the fields of dif-
the infrared. Wearable sensors must see under the skin tissue, and AR fractive and nano-optics. Subsequently, metasurface functionalities
systems must display objects in conjunction with eye movements. have greatly increased, as summarized in Fig. 2 and described in the
Several examples of current industrial applications of metasurfaces following.
are listed in Fig. 1 (right), and many more system-level applications
are likely to emerge. Without a doubt, vision applications dominate, Spectral and dispersion control
including (from top to bottom) 3D imaging by point-cloud illumina- The frequency selectivity of metasurfaces stems directly from their res-
tion, AR vision16, holographic displays17, 3D LIDAR vision18, and image onant behaviour and, to a large extent, borrows ideas from the field of
processing and classification19. Over recent years, big industry players frequency-selective surfaces in radio waves. It is one of the oldest appli-
such as Apple, Google, Samsung, Meta (Facebook), Huawei, Sony and cations of optical metasurfaces, aiming at realizing notch or bandpass
STMicroelectronics have explored such meta-optical applications. filters in a single nanostructured layer. Application examples include
These and other companies have been actively investing in integrating eye protection from harmful lasers, such as in existing commercial
meta-optical systems in their products, hiring graduates in the field and products by Meta Materials Inc. (www.metamaterial.com). Over recent
a b c g
500 nm 1 µm
500 nm
d e f
UV
500 nm SHG SHG
θ = 30°
5 µm 500 nm 300 nm
Fig. 3 | Novel metasurface geometries and materials. a–c, Novel metasurface Top: scanning electron microscopy (SEM) image of the TiO2 nanostructures.
geometries: topology-optimized metasurfaces for large-angle beam deflection71 Bottom: photograph of the fabricated 1-cm-diameter metalens79. Panels
(a); aberration-corrected metasurface spectrometer65 (b); three-dimensionally reproduced with permission from: a, ref. 71, Optica Publishing Group; e, ref. 74,
printed metasurfaces for independent amplitude and phase manipulation70 (c). American Chemical Society; f, ref. 77 under a Creative Commons licence CC BY
d,e, Novel materials for metasurfaces: lithium niobate metasurface for SHG73 4.0. Panels adapted with permission from: b, ref. 65, Wiley; c, ref. 70, Springer
(d); gallium phosphide metasurface for continuous-wave SHG74 (e). f, High- Nature Ltd; d, ref. 73, American Chemical Society; g(bottom), ref. 79 under a
performance hafnium oxide metasurface operating at ultraviolet wavelengths77. Creative Commons licence CC BY 4.0.
g, Large-area TiO2 metalens fabrication suitable for virtual-reality applications.
Fig. 4 | Metasurface challenges. a–c, Tunability by altering the resonator f, Multi-physics metasurfaces enabled by coupling to the materials’ degrees of
materials (a), the surrounding environment (b) and mechanically modifying the freedom, such as excitons98, polaritons and phonons. Panel d reproduced with
metasurface geometry (c). d, Engineering the spectral and spatial dispersion permission from ref. 90, APS. Panels adapted with permission from: e, ref. 95,
properties90. e, Large-area inverse design of the metasurface properties95. American Chemical Society; f, ref. 98, APS.
Materials and fabrication challenges off-diagonal nonlinear susceptibility tensor, and metasurfaces from
Metasurfaces are fabricated by planar fabrication technology, effec- other transparent crystals, have been sought. An enhanced SHG has
tively merging optics and chip-making. This planar fabrication presents been demonstrated in lithium niobate73 (Fig. 3d) and in GaP metas-
a tremendous advantage for translation to industrial applications. In urfaces74 (Fig. 3e). Beyond nonlinear applications, other dielectric
comparison, nanostructuring of bulk 3D materials remains a considera- materials, such as TiO232, GaN40, SiN75 and SiC76, have also been tested.
ble challenge. Although techniques such as 3D laser writing70 are getting Although many of these semiconductor metasurfaces can operate from
closer to sub-100-nm resolution, volumetric metamaterials operating the visible to the infrared spectral regions, the extension of their opera-
in the visible and near-infrared remain out of reach. As a result, planar tion to the ultraviolet (UV) range has been a challenge. This challenge
metasurfaces dominate research and applications. However, many lies in the transparency of the materials in the UV range and the required
materials used in the research laboratories for metasurface fabrica- small feature sizes. Nevertheless, the first demonstrations of functional
tion are incompatible with the industry standards of semiconductor UV metasurfaces using hafnium oxide have been presented77. Vacuum
fabrication foundries. It is therefore often challenging to translate the ultraviolet nonlinear metalenses based on ZnO meta-atoms have also
technology to scalable manufacturing and industry-ready standards. been demonstrated recently78.
For example, common plasmonic metals like gold and silver are incom- Finally, the fabrication of large-area metasurfaces that can
patible with complementary metal–oxide–semiconductor (CMOS) fab- replace existing optical elements is not without challenges. Most
rication. Dielectric metasurfaces, often made of silicon, have bridged electron-beam lithography tools used in the laboratory cannot pat-
that gap. However, although conventional CMOS chip-making uses tern large areas, and advanced photomasks are required for deep-UV
silicon-on-insulator wafers, silicon on transparent substrates is required lithography. Nevertheless, large-area meta-optical elements have
for optical metasurfaces. The technology of amorphous silicon (a-Si) on recently been demonstrated79 (Fig. 3g), and this is expected to increase
glass wafers has recently been demonstrated by Metalenz together with industry interest further.
STMicroelectronics, using extreme ultraviolet (XUV) lithography (www.
metalenz.com). However, this fabrication is not without challenges, Physics and engineering challenges
including the reproducibility of the a-Si-layer deposition, its robustness It is impossible to identify all the challenges in a field with so many
to environmental changes, and process challenges when using glass diverse applications, so we focus here on some of the global ones. As
wafers. Implementing other materials for operation in the visible and the major challenge, we identify the tunability of the optical response
UV spectral ranges will further challenge the fabrication processes. of metasurfaces, including the tunability of transmission amplitude,
In terms of the design aspect, metasurfaces have made enormous phase and polarization. Such tunability can enable the realization of
progress over recent years, figuratively named by Federico Capasso as programmable meta-optical elements, which can perform arbitrary
a transition from realism to surrealism. Indeed, the initial ‘work-horse’ operations depending on an external stimulus. For example, spatially
nano-cylinder meta-atoms have been replaced by high-performing variant tuning of the transmitted phase can allow a single metasurface
inverse design structures. Figure 3a shows one example used for to become a length lens, a beam shaper or a hologram. Because the
large-angle beam deflection71. Complex dispersion-engineered meta-atoms have nanoscale volumes, it should be easier to tune their
meta-atoms65 have also been explored (Fig. 3b), and full 3D designs properties. However, so far, no unified approach exists, and most works
achieved by laser printing (Fig. 3c) have been employed for moving consider only amplitude modulation. To our knowledge, no continu-
holographic images70. ous 2π phase modulation (with unity efficiency) nor full polarization
With the expansion of meta-optics applications, the community control has been reported. The difficulty is that for both phase and
is actively exploring the fabrication of different high-index dielectric polarization tuning, simultaneous control of the spectral positions of
materials. For example, crystalline materials with second-order non- two optical modes is needed, and this requires two control parameters.
linearity are required in nonlinear applications52, such as SHG. One of The tunability of metasurfaces can be enabled by three generic
the most used materials in this regard is GaAs and its Al compounds72. principles: (1) altering the resonator material (Fig. 4a) through a mate-
However, challenges due to the limited transparency of GaAs and its rial phase change80,81, thermo-optics82, electro-optics83 or carrier
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Fig. 5 | Research frontiers in the metasurface field. a, Inverse photonics a, ref. 101, Optica Publishing Group; b, ref. 81 under a Creative Commons licence
design101. b, Tunable metasurfaces81. c, Nonlocal metasurfaces103. d, Quantum CC BY 4.0; d, ref. 104, APS; e, ref. 105, Electromagnetics Academy; f, ref. 113, Wiley;
metasurfaces104. e, Non-Hermitian metasurfaces105. f, 2D materials metasurfaces g, ref. 106 under a Creative Commons licence CC BY 4.0. Panel c adapted with
(coupling to materials’ degree of freedom)113. PL, photoluminescence. g, Space– permission from ref. 103, AAAS.
time-variant metasurfaces106. Panels reproduced with permission from:
injections37,84; (2) modifying the surrounding environment (Fig. 4b) Finally, the coupling of optical metasurfaces to other material
by liquid crystals85,86 or optofluidics87; (3) changing the geometry degrees of freedom, including atomic96, excitonic97, phononic88 and
(Fig. 4c) by mechanical actuations88 or stretching89. Which of these polaritonic excitations98, is facilitating completely unknown opportu-
tuning mechanisms will meet the industry standards remains to be nities for multi-physics metasurfaces (Fig. 4f). In the strong coupling
seen, but is likely to be defined by the specific application constraints. regime, the optical and materials properties are hybridized, leading
Another major challenge in the field is the complete control of to novel polaritonic regimes and phenomena. The modification of
angular and spectral dispersion90 (Fig. 4d). Such control is expected to chemical reactions, discussed in Fig. 2h, is an important example of
have a powerful impact on applications of dispersive31 and achromatic such a novel phenomenon.
meta-optics91,92. The angular dispersion also plays a vital role in optical
image processing, including edge detection by image differentiation11,93 Frontiers in metasurface research
(Fig. 4d). To meet the above challenges, research frontiers have focused on sev-
As meta-optical elements are becoming integral to various optical eral fundamental and applied directions. On the fundamental side,
systems, it is becoming increasingly important to have tools for a full these include the implementation of deep learning and inverse design
system design. This need has triggered strong activity regarding inverse approaches99,100 for obtaining the desired spectral, phase, polarization
design, including end-to-end designs94, large-scale meta-optics79 and and transverse momentum responses. For example, Fig. 5a shows a
3D inverse designs95 (Fig. 4e). neural network technique for tailoring the metasurface transmission
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Fig. 6 | Metasurfaces enabling smart vision. a, Multicolour imaging with multi- and eye-tracking by guided-wave metasurfaces110. Figure reproduced with
layer metasurfaces108. Scale bars, 35 μm (middle row); 10 μm (bottom-left image); permission from: a, ref. 108 under a Creative Commons licence CC BY 4.0; b,
and 20 μm (bottom-right inset). b, Image differentiation and edge detection as ref. 11, Springer Nature Ltd; c, ref. 110, Springer Nature Ltd.
examples of image processing11. c, Spectrally decoupled wavefront manipulation
spectrum101. The next frontier is focused on achieving metasurface quantum light direction promises important applications. Metas-
tunability on a pixel level. Here, challenges associated with pixel cross- urfaces with gain and loss can also be considered as an upcoming
talk, tuning speed and electrical control need to be solved to enable frontier. Such metasurfaces can be designed to exhibit unconventional
electrically programmable mega-pixel metasurfaces. Figure 5b shows non-Hermitian properties, supporting exceptional points for unidirec-
one promising approach based on phase-change materials81. Another tional propagation and adiabatic mode conversion. Figure 5e presents
important frontier is spatial dispersion engineering through the design an example of non-Hermitian metasurfaces, which allow for ultrasensi-
of nonlocal metasurfaces102. Figure 5c shows the use of a spatially dis- tive measurements105. The integration of 2D materials47 also opens new
persive metasurface in biosensing103. opportunities for frontier optoelectronic applications, enabled, for
Arguably, one of the most exciting research frontiers is the appli- example, by precision control of excitonic excitations97 (Fig. 5f). Finally,
cation of optical metasurfaces for quantum light generation56,57, the concept of space–time metasurfaces is important for complete
detection104 (Fig. 5d) and classification60. Although still in its infancy, spatiotemporal wavefront control. This has been demonstrated in
the microwave spectral range106 (Fig. 5g), and it is highly desirable to References
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