Approved by AICTE, New Delhi and Affiliated to Anna University, Chennai

LESSON PLAN
Subject: CMR356 – Micro Electro Mechanical Systems
Department: Robotics and Automation
Year/ Sem: III/ VI

Sl. Reference Assigned no. Of

Topics Teaching Method
No Books Hours

UNIT I- INTRODUCTION

Intrinsic Characteristics of T1, R4

1 MEMS, Energy Domains and Chalk & Talk 1
Transducers

Sensors and Actuators, T1, R4

2 Introduction to micro- Chalk & Talk 1
fabrication
Silicon based MEMS
3 Chalk & Talk T1, R4 1
processes, New materials
Review of Electrical and
4 Chalk & Talk T1, R4 1
mechanical concepts in MEMS
Semiconductor devices, T1, R4
5 Polymers in MEMS, Chalk & Talk 1
Polyamide
SU-8, Liquid Crystal Polymer
6 Chalk & Talk T1, R4 2
(LCP)
7 PDMS, PMMA Chalk & Talk T1, R4 1

8 Parylene, Fluorocarbon Chalk & Talk T1, R4 1

UNIT II- SENSORS

Characteristics of Sensors, R2
1 PPT, BB 1
Electrostatic Sensors
Parallel Plate Sensor, Piezo- R2
2 PPT, BB 2
resistive Sensor and materials
Stress and strain analysis, R2
3 PPT, BB 2
Flexural beam bending
Torsional deflection, R2
4 Applications to Inertia, PPT, BB 1
Pressure
Course Pre-requisite: Basic Knowledge of Electronic devices and measurements.
Sl.
Topics Teaching Reference Assigned
N
no. Of
o Method Books Hours
Tactile and Flow Sensors- R2
5 PPT, BB 2
Piezoelectric sensors and actuators
Piezoelectric effects, Piezoelectric R2
6 PPT, BB 1
materials

UNIT III - ACTUATORS

Applications, Inter-digitated Finger R5
1 PPT, BB 1
Capacitor
Comb drive devices- Micro Grippers- R5
2 PPT, BB 1
Micro Motors
Thermal Sensing and Actuation- R5
3 PPT, BB 1
Thermal expansion
4 Thermal Couples- Thermal Resistors- Chalk & Talk R5 1
Thermal Biomorph- Applications- R5
5 Chalk & Talk 2
Magnetic Actuators
Micro-magnetic components- R5
6 PPT, BB 2
Actuation Using shape memory alloys
Case studies of MEMS in magnetic R5
7 Chalk & Talk 1
actuators

UNIT IV - MICROMACHINING
Silicon Anisotrophic Etching- R3
1 PPT, BB 1
Anisotrophic wet Etching
Dry etching of Silicon- Plasma R3
2 Etching- Deep reaction Ion Etching PPT, BB 2
(DRIE)
Isotrophic Wet Etching- Gas phase R3
3 PPT, BB 1
Etchents
Basic surface micro machining R3
4 processes- Structural and Sacrificial PPT, BB 1
materials
5 Acceleration of sacrificial Etch PPT, BB R3 1
6 Striction and Antirestriction methods PPT, BB R3 1

Approved by AICTE, New Delhi and Affiliated to Anna University, Chennai

 Approved by AICTE, New Delhi and Affiliated to Anna University, Chennai

Sl. Teaching Reference Assigned

No Topics no. Of
Method Books
Hours

7 LIGA Process PPT, BB R3 1

Assembly of 3D MEMS- Foundry 1

8 PPT, BB R3
process

UNIT V- APPLICATIONS OF MEMS INERTIAL SENSORS

1 Application to Acceleration, Inertia Chalk & Talk T2, R5 1

Application to Acoustic Sensors , 1

2 Chalk & Talk T2, R5
pressure sensors

3 Flow and Tactile Sensors Chalk & Talk T2, R5 1

4 Optical MEMS- Lens and Mirrors PPT, BB T2, R5 2

Actuators for Active Optical 2

5 PPT, BB T2, R5
MEMS

6 RF MEMS Chalk & Talk T2, R5 1

7 Microfluids Chalk & Talk T2, R5 1

TEXT BOOKS:

1. Chang Liu, "Foundations of MEMS", Pearson Education Inc., 2014, 2ndedition .

2. Stephen D Senturia, "Microsystem Design", Springer Publication, 2001.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill,
New Delhi, 2008.

REFERENCES:

1. James J.Allen, "Micro Electro Mechanical System Design", CRC Press Publisher, 2010
2. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, "Micro Sensors MEMS and
Smart Devices", John Wiley & Son LTD,2002
3. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
4. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech
House, 2000.
5.Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and
Application,” Springer 201