Rigourous Vector Theories of Diffraction Gratings
Rigourous Vector Theories of Diffraction Gratings
BY
D. MAYSTRE
Laboratoire d'Optique Electromagnktique, Equipe de Recherche Associke au C.N.R.S. no 597,
Facultk des Sciences et Techniques,
Centre de Sainr-Jkr6me, 13397 MARSEILLE CEDEX 13, France.
CONTENTS
PAGE
$ 1 . INTRODUCTION . . . . . . . . . . . . . . . . . . . . 3
APPENDIX A . . . . . . . . . . . . . . . . . . . . . . . . 58
APPENDIX B . . . . . . . . . . . . . . . . . . . . . . . . 59
REFERENCES . . . . . . . . . . . . . . . . . . . . . . . 64
8 1. Introduction
Diffraction grating was born almost two centuries ago. Its father, an
American astronomer, saw a spectrum produced by hairs placed in the threads
of two parallel screws (RITTENHOUSE [ 17861). However, it was not until 1821
that the first metallic grating was ruled by FRAUNHOFER who found the famous
grating formulagiving the directions of diffraction (FRAUNHOFER [ 18211). One
century after the discovery of RITTENHOUSE, ROWLAND [ 18821 initiated the
production of high quality ruled gratings. Recently there appeared a new type
of diffraction grating, constructed by recording on a photoresist interference
fringes produced by a laser source (RUDOLPHand SCHMAHL[1967],
LABEYRIE and FLAMAND [ 19691).
Indisputably, the diffraction grating is a valuable instrument for scientific
research. Mainly, it is used for spectroscopy and filtering. Even though the
holographic grating has not eliminated the classical, ruled grating which
remains the most suitable for important applications, it has permitted a
considerable extension of the use of gratings for industrial or scientific purposes :
wavelength selectors for tunable lasers, selective surfaces for solar energy,
masks for photolithography, beam sampling mirrors for high power lasers,
spectrometers in extreme UV or X-ray regions for Space Optics (MAYSTRE,
NEVIEREand PETIT[ 19801).
Before the second world war, the pitch of the standard gratings was large
with respect to the wavelengths of visible radiations, due to the difficulty of
manufacturing high quality gratings having high space frequency. Under these
circumstances, the properties of gratings do not depend, in practice, upon the
polarization of the incident light. This explains why by far the major part of the
theories dealing with these instruments are “scalar” and do not take the
polarization into account (see for example BORNand WOLF [ 19651). On the
other hand, there exists experimental evidence that the distribution of energy
among the various diffracted waves depends on polarization as soon as the
wavelength to pitch ratio exceeds a number of the order of 0.2 (MADDENand
STRONG[ 19581). Today, gratings having more than 1000 grooves per mm, i.e.
with groove spacings lower than 1 pm, are commonplace. When these gratings
are employed in the visible region, the wavelength of the light is of the order
4 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 1
T'
R
region
+
>
X
region R-
Fig. 2.1. The physical problem: OD = d, yM - ym = H, the angle of incidence 0 and the angle of
diffraction 0,, are both positive in this figure; n^ is the unit vector of the normal to 9 oriented
upward.
6 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 2
The incident magnetic field can be deduced easily from (2.1) and Maxwell's
equations :
H i= b exp(iax - ipy), (2.2)
with b = k x a/wp,.
The physical problem is to find the total fields E and Hi at any point.
The diffracted fields are defined in region R by E d = E - E' and Hd =
+
= H - Hi.
First, it is worth noting that the physical problem remains unchanged after
translation of the grating along the Oz axis; in other words, neither the grating
profile, nor the incident wave are dependent on z. As a consequence, if
E ( x , y , z) and H(x, y, z ) are the total fields corresponding to a given grating and
a given incident field, E(x, y , z + zo) and H(x, y , z + zo) will be solutions too,
regardless of the value of z,,. If, from the physical meaning, we believe that the
total field is unique, we derive that E and H are independent of z.
Now, the mathematical problem is stated using the harmonic Maxwell
equations for the diffracted fields in region R : +
V x Ed = iopoHd, V x Hd = - i o k E d ,
V Ed = 0,
0 V.Hd= 0.
We note that the last two equations, consequences of the first two
(V V x J = 0), can be eliminated, and introducing the components of the
diffracted fields on the three axes, we then have:
(2.3a)
1 9 8 21 PRESENTATION A N D PRELIMINARY RESULTS 7
Similarly, for the TM problem, (2.3c), (2.4a) and (2.4b) yield the Helmholtz
equation
Q2H,"+ k2H," = 0 in R , , (2.6b)
and the boundary condition on 9 is derived from (2.4a), (2.4b) and (2.5b):
dH,"/dn = - dHi/dn
= ib,(pn,, - an,) exp(iax - ipf(x)) on 9, (2.7b)
where d/dn denotes the normal derivative on 9 Now, the question which arises
is whether the two couples (2.6a), (2.7a) or (2.6b), (2.7b) are sufficient to
determine the transverse components of the fields. To this question, the
mathematician gives a negative answer since these equations do not include
conditions at y = co. Therefore, to complete these equations, we must add the
so-called radiation condition (or outgoing wave condition), which seems to be
obvious for the physicist: when y tends to infinity, E,d and H," must remain
bounded and can be described as a superposition of outgoing plane waves
propagating upward. Since (2.6a)-(2.7b) have been obtained using the
elementary laws of electromagnetism, the physicist is tempted to deduce that
the solution of these equations satisfying the radiation condition exists and is
unique. However, it appears that its existence has never been established by
mathematicians. Yet, this question cannot be called useless: physical evidence
is not a proof of mathematical existence! On the other hand, the uniqueness
of the TE problem ((2.6a), (2.7a) and the radiation condition) can be proved
assuming the local square integrability of the field (CADILHAC [ 1980]), but the
generalization of this theorem to the TM problem is not straighforward.
Perhaps, the specialist of Helmholtz equations and boundary value problems
will be surprised to read that existence and uniqueness theorems, which have
been demonstrated for diffracting structures apparently very close to the grating,
have not been generalized to gratings (WILCOX[ 19751). In fact, the difficulty
for the grating problem lies in the fact that both region R and boundary 9
+
.In this section, it is shown that F(x, y ) exp( - iax) is a periodic function. To
this aim, it is useful to consider the function G defined by:
G(x, y ) = F ( x + d, y ) exp( - iad).
10 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, 8 2
with
So, a pseudo-periodic function can be developed in a pseudo-Fourier series
of exp (i a, x).
Now, we have to find the form of tnO)). Introducing the Fourier expansion
of F in (2.8), then multiplying by exp( - iax) yields:
If y > y,, the above equation is valid for any value of x and each term of the
Fourier series must be null:
1, $21 PRESENTATION A N D PRELIMINARY RESULTS 11
Of course, the physicist is very well acquainted with the above equation. To
express t,(y), we denote by U the finite set of integers for which kZ - a: is
positive and we define:
p, = (k2- a:)'/' ifnE U
= i(a: - k2)'IZ i f n $ U. (2.12b)
So, the expression of t,(y) is given by:
tn(v) = An exp ( - ipny) + Bn exp (iflny) if y '
YM.
of Poynting’s vector of the incident wave and of the nth order diffracted wave
through a plane surface parallel to the x z plane at y > y,, of unit length on the
O z axis and of length d on the O x axis, to deduce:
e, = B , K cos B,/cos 8, (2.16)
-
B, denoting the conjugate of B,.
The validity of the RE above the top of the grooves, which is rigorous, should
not be confused with the so-called “Rayleigh hypothesis” (RH) which assumes
that the plane wave expansion remains valid inside the groove, and whose
theoretical validity will be studied further.
The above expansion differs slightly from the expansion of F (see (2.13)) since
it contains incident homogeneous plane waves of amplitudes A,, but it cannot
contain incident terms corresponding to n 4 U since it is bounded at infinity.
1, § 21 PRESENTATION A N D PRELIMINARY RESULTS 13
Considering a second function U(X,y ) of the same set, with amplitudes Al,
and Bl,, we will establish the following lemma:
By integrating the above equation in the hatched area of Fig. 2.2 and applying
the second Green identity, it can be deduced:
where %' is the boundary of the hatched area and I its curvilinear abscissa.
Since ud$dn and vduldn are periodic, the contributions of QR and SP are
opposite and cancel each other. Moreover the normal to RS is parallel to Oy,
thus the above equation yields:
d; -du di -du
0
. D X
Fig. 2.2. Demonstration of a lemma. %'isthe boundary PQRS ofthe hatched area and L denotes
the curvilinear abscissa on '6.
14 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 2
It is important to notice that the evanescent orders are not involved in this
relation, called the energy balance criterion, which expresses a result with an
obvious physical meaning: the diffracted energy is equal to the incident energy.
The lemma will enable us to establish another result, familiar to opticists: the
reciprocity relation. Here we take u = F + F', as before (case l), for a given
fundamental case of polarization. Now, we consider thepth order of diffraction
( p E U ) of diffraction angle 0,. Let us call 0:, a:, &' and B; the parameters
of the Rayleigh expansion of the field u" obtained for the same fundamental
case of polarization, but this time with the angle of incidence 0" = - 6, (case 2).
Bearing in mind our conventions for incident and diffracted angles, the incident
wave in this second case has a direction of propagation which is just the
opposite of that of the pth diffracted order in the first case. From the grating
formula, a straightforward calculation shows that 0; = - 0, a; = - a, and
P,,' = Po, which means that the pth diffracted order in case 2 and the incident
wave in case 1 have opposite directions, a fact which will probably seem
obvious to opticists familiar with the reversion theorem (Fig. 2.3). Function u
and u = u" wholly satisfy the conditions of the lemma since the grating formula
shows that they have the same pseudo-periodicity. On the other hand, u and
u are very different since u includes all the possible incident waves (n E U ) but
only one propagating diffracted wave, due to the conjugation which transforms
an incident wave into a diffracted wave propagating in the opposite direction,
and conversely. Proceeding carefully to calculate the right-hand member of
(2.18) and remarking that the left-hand member of this equation vanishes, it can
be found:
I. § 21 PRESENTATION A N D PRELIMINARY RESULTS 15
0
case 1
X
. case 2
Fig. 2.3. The reciprocity theorem: the efficiency of the pth order is the same in the two cases.
Multiplying each member by its conjugate, and dividing by &&’ yield, after
simplification:
B;qP;lP; = B,B,P,/Po, (2.21)
a result which can be easily outlined: The eficiency in the pth order is the same
in the two cases of Fig. 2.3.
After the famous reciprocity relation, let us obtain a last result, which generally
appears as the consequence of much more complicated considerations : the
coefficients B, may be given by a curvilinear integral on 9 Once more, the value
of u will be the function I: + F’, corresponding to a fundamental case of
polarization. The function v will be very simple:
u = @Jx, y) = exp(ia,x + iP,y), n E U.
In other words, u will be a single diffracted wave corresponding to the nth order.
So, the A,; and all the BA except BI, = 1 are nil. It follows that the right-hand
member of (2.18) will be equal to - &B,. Evaluating the left-hand member
requires the separation of FTE and FTM problems. Since either u, or duldn
s
vanishes on <%it follows immediately that:
sod
derived that
t s: (
for the FTE case,
Bn = p,, )
1 - 5 f’(x) exp(-ia,x - ifl,,f(x))ll/(x)dx (2.22b)
and ll/ are closely linked to the surface current density j , on the grating surface.
Indeed, j ’p = n^ x H and, from (2.3a) and (2.3b), we derive:
$(x) = - iopo(l + f’(x)2)’/2j,(x) for the FTE case, (2.23a)
=J&) for the FTM case, (2.23b)
the scalar*functionj, being the z component ofj, for the FTE case and the
projection j rp * t of j of the unit tangent vector f = n^ x 2 for the FTM case.
It is not surprising to see that the B, can be derived from the surface current
density since j rp actually generates the diffracted field. It is worth noting that
(2.22a) and (2.22b), demonstrated for n~ U, hold for n $ U, as we shall see
further. Similar formulae can be obtained for the incident amplitudes A,, by
setting u = exp(ia,,x - ip,,y). Since A , = 6, for FTE and FTM cases:
bn=’ 2d jod(l
+;/’(x))exp(-ia,x+ i&f(x))ll/(x)dx
for the FTM case, (2.24b)
and these relations hold when n $ U, as we shall see later.
For a long time, it has been difficult to convince some grating users of the
usefulness of rigorous grating theories and, from my own experience, it seems
1. § 21 PRESENTATION A N D PRELIMINARY RESULTS 17
that even today, some opticists are not aware of the troubles they may encounter
using approximate theories. So, we have chosen a theory, one of the most
familiar to opticists, based on the Kirchhoff approximation (BECKMANNand
SPIZZICHINO [ 19631, BECKMANN[ 1967]), in order to compare its numerical
results with exact values. Though the basic approximation is the same, the
demonstration developed here to obtain the approximate formula will be rather
different from the demonstration made by BECKMANN,and the resultant
formula will appear to be slightly different.
Let us consider the TE fundamental case of polarization where, according
to (2.22a), the B, are known as soon as the function $ (closely linked with the
normal derivative of the total field) is known. The approximate value h of $
will be obtained in the following manner: we shall assume that the normal
derivative of the field at a certain point of 9’is the same as the normal derivative
of the field which would be obtained by replacing 9 by a plane mirror tangent
to 9 at the same point. So the “local” value of F’ + F i n the vicinity of 9’ will
be the sum of the incident wave and the wave reflected by the fictitious mirror.
An effortless calculation shows that:
$ B ( ~=) - 2i(aJ’(x) + fl) exp(iax - iflf(x)). (2.25)
Introducing $I~(x)in (2.22a) and integrating by parts to remove the term f’(x)
gives the following formula:
1 1 + cos(e+ 0,)
B = --
d cos O,, (cos 6’ + cos 0,)
1; exp [ - inKx - i(fl + fl,)f(x)] dx,
(2.26)
a formula which differs from the BECKMANNformula by the presence of the
factor cos O,, (instead of cos 0) in the denominator, but we have to bear in mind
that the quantity given by BECKMANNis not B,. After calculation, the value
of B,, obtained in the FTM case is identical, except for the sign ( - ) in front
of the right-hand member, which must be eliminated. Though the expression
of B,, given by (2.26) obviously satisfies the reciprocity theorem stated in (2.20),
we must notice that it finally gives a scalar result, which does not predict any
polarization effect, at least for the efficiency of perfectly conducting gratings.
In the particular case of the sinusoidal grating:
H
J(X) = - cos Kx, (2.27)
2
the integral can be evaluated in closed form using classical formulae
18 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 2
and STEGUN[ 1970]), in such a way that, for the FTE case:
(ABRAMOWITZ
B , = -(-i),
1 + cos(e + en)
cos o,,(cOs 8 + cos 8,) 1
(cos8 + C O S ~ , ,.)
(2.28)
,
The corresponding efficiency e - has been drawn in Fig. 2.4 for H / d = 0.2 in
Littrow mount. In this mounting, very familiar to grating users, the - 1 order
diffracted wave and the incident wave are propagating in opposite directions,
so 0- = - 8, and from the grating formula we deduce that in this mounting,
the wavelength, groove spacing and incidence are linked by a very simple
relation:
I / d = 2 sin8. (2.29)
Furthermore, from (2.16) and (2.28) the efficiency e - is given by:
e- = J:(kH cos O)/cos48.
Figure 2.4 also shows the efficiency obtained from a computer code developed
by the present author, using a rigorous integral theory, which will be described
in Q 5. It will be shown further that the accuracy of the “rigorous” results is
better than 1 per cent and it is to be hoped that the reader will accept this
0 05 10 15 20
wavelength/ period
Fig. 2.4. Comparison ofthe numerical results obtained from a rigorous theory and a non-rigorous
one. Solid line: rigorous result from the integral theory; dashed line: result from the BECKMANN
theory.
T H E RAYLEIGH METHOD 19
assertion at this point. Obviously, the agreement between the two theories is
very good as long as I / d is lower than 0.4 approximately: the results are nearly
identical. Unfortunately, the agreement does not hold any longer in the comple-
mentary region since the efficiency predicted by BECKMANN’S formula tends
to infinity when I / d tends to 2 (this corresponds to a grazing incidence, as
shown by (2.29)). The limit of the region of validity of BECKMANN’S theory
varies with H , and decreases when H increases. Since many commercial
gratings have groove depth to groove spacing ratios higher than 0.2, we must
conclude that it is dangerous to trust in such a theory in the resonance region.
However, it must be emphasized that such a theory is very valuable when Ild is
low: it gives accurately the properties of gratings without the help of a big
computer and moreover, the rigorous computation becomes more and more
difficult and expansive when Aid decreases. So, there does not exist any
challenge between rigorous and non-rigorous theories, but rather a complemen-
tarity. We hope only to convince the reader that using non-rigorous theories has
a prerequisite: the thorough knowledge of its domain of validity, in order to
avoid disasters. Of course, this conclusion still holds for non-periodic rough
surfaces.
After Rayleigh, the Rayleigh hypothesis has been used by many authors
(FANO [ 19411, MEECHAM[ 19561, STROKE[ 19601, BOUSQUET[ 1963a,
1963b], PETIT [1963], DELEUIL[1963], JANOT and HADNI [1963],
YAKOVLEV [ 19651, PETITand CADILHAC [ 19661, WIRGIN[ 19671, JIRACEK
[ 19731). Some of them implemented this theory numerically when sufficiently
powerful computers became available. Here, we describe three ways of imple-
menting this method. They have in common the basic equation, obtained by
writing that the RE described by the series R ( x , y ) (see 2.13)), which obviously
satisfies the Helmholtz equation and radiation condition stated in (2.8) and
(2. lo), must also satisfy the boundary condition on the grating surface expressed
by (2.9a) or (2.9b). For example, in the FTE case, we obtain:
In this equation, the only unknown is the set of complex coefficients Bn which
appear to be the coefficients of the expansion of - F'(x, f ( x ) ) into a series of
functions Qn(x,f ( x ) ) . All the numerical methods described here reduce (3. la)
to a system of (2N+ 1) linear equations with (2N+ 1) unknowns: the
coefficients B, for - N Q n Q + N . So, these methods neglect all the B,
corresponding to la I > N and replace (3.la) by:
sN(X) = c
+ N
n= -N
BiN)@,l(x,f ( x ) ) + F'(x, f ( x ) ) = 0. (3. Ib)
c
+N
B',N)Qn(~,,f ( x , ) ) = - Fi(x,, f ( x , ) ) , Vm E (1,2N + 1). (3.2)
n= -N
n= -N
VmE(-N, +N), (3.3)
To justify this method, it suffices to notice that the left-hand member of (3.lb)
is the product of a periodic function and exp(iax). In practice, two cases are
observed: either the scalar products can be calculated in closed form or they
require a numerical integration.
In the last method, described in this section, the functional
Re {p(x)} denoting the real part of p(x). Therefore, this Fourier variational
method (FVM) leads to the following equations, obtained by equating to zero
all the coefficients of GBsr):
+ N
1
m= - N
B!” ( @Ax,f(x)), @m(x,f(x))> + ( @ h ,f(x)), F ’ h f ( x ) ) > = 0,
VnE(-N, +N). (3.4)
This time, (3. lb) is not projected on the Fourier basis but on the set of functions
@,f(x)>.
k
When they were implemented on a computer, between 1960 and 1970, these
methods were applied, in the first instance, to ruled echelette gratings, viz.
gratings having triangular grooves, and also to sinusoidal gratings. In these two
cases, the coefficients of the linear system can be evaluated in closed form for
22 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 3
the FSM and for the FVM: exponentials for echelette gratings and Bessel
functions for sinusoidal gratings. For shallow gratings the efficiencies obtained
from these methods satisfied the energy balance criterion and the reciprocity
theorem with very high accuracy. They also converged when N was increased.
On the other hand, the Rayleigh methods completely failed for deeper grooves.
The region of convergence of the FSM and the FVM was significantly larger
than that of the PMM. For instance, calculations using the FSM for sym-
metrical echelette gratings (Fig. 3.1) of groove spacing d = 1.25 pm used in
normal incidence with 1 = 0.546 pm gave very good results until tanb = 0.15.
These results were less precise but acceptable for deeper grooves until
tanb = 0.3, for which the energy balance criterion was satisfied to within 2%.
For greater values of tanb, the results were unprecise and for tanb = 1, a
divergence was observed (PETIT[ 19631). For the same grating, the numerical
domain of convergence is dependent on the wavelength to groove spacing ratio
(Mc PHEDRAN [ 19731). Due to this numerical failure, many authors questioned
the validity of the Rayleigh hypothesis and remembered the former warnings
of DERIUGIN and LIPPMANN. For these authors, the RE is not valid at a
point P inside the grooves since it does not contain waves propagating towards
y = - co, which are generated by the surface currents at the points of the
grating surface situated above the point of observation. We shall see that the
serious objections to the RH apparently have no connection with the remarks
of DERIUGIN and LIPPMANN.
T:
_ d_ 0 d X
2 +2
Fig. 3.1. The symmetrical echelette grating used in normal incidence.
1. I 31 THE RAYLEIGH METHOD 23
cannot be used a priori to describe the field. First, let us demonstrate that, if
the RE, which represents the diffracted field above the top of the grooves,
converges at any point inside the grooves, it actually represents the diffracted
field F at this point. To this end, let us study the asymptotic behavior of the
nth term R,(x, y ) of the RE when n -+ f 00. We denote byp the positive integer
p = In 1 and we call afp, b,,(x, y), i?&, y ) asymptotic expressions of P k p ,
@,..(x, y ) and R ,,,(x, y), respectively. From (2.12a), (2.12b) and (2.14), we
derive : a,,
= ipK icr, (3.5)
b” = u(x, Y)W(X,Y)”, (3.6a)
9-, = U(x, y)- ‘W(x,y)”, (3.6b)
with
u ( x , y ) = exp(iax - cry), (3.7)
w(x, y ) = exp(iKx - Ky). (3.8)
The first step of the demonstration is described in Appendix A. Let us state the
conclusion:
Ifthe RE converges at a certain point of ordinate yo, it converges absolutely and
uniformly to an analytic function of the two real variables x and y in the halfplane
y 2 y1, whatever the value y1> yo.
An obvious consequence of this fundamental property is that the RE diverges
in the half plane y < y3 if it diverges for a certain point of ordinate y 2 , whatever
the value y , < y,. So, we are led to define an “ordinate of convergence”y, such
that:
- the RE converge for y 2 y , , whatever y , > y,,
- the RE diverges for y 6 y,, whatever y , < y,.
Of course, since the RE represents the field F(x, y ) and converges for y 2 y,,
it can be inferred that y, 6 y , and that F(x, y ) is an analytic function of the
real variables x and y when y > y,. In fact, F(x, y ) is an analytic function of
x and y in the entire region R + ,because of the following mathematical property
of the Helmholtz equation:
Since the Helmholtz equation V2u + k2(x,y ) u = 0 is a linear ellqtic partial
differential equation, i f k is constant (or analytical in x and y ) in a certain domain
GI of R2, every continuous solution u(x, y ) is an analytic function of the two real
variables x andy in this domain (SOMMERFELD [ 19491, COURANT and HILBERT
[ 19621, MIRANDA [ 19701). We deduce that F(x, y ) is analytic in R . +
So, in the domain 62, of R situated above y , > y,, u(x, y ) = F(x, y ) - R ( x ,y )
+
does not hold any longer ify, > y,, since the RE, which diverges in a certain
part of R , cannot be used to express the field at any point of the profile .9,
+
in order to write the boundary conditions (2.9a) or (2.9b). Finally, the study
of the validity of the RH reduces to the study of the ordinate of convergence
y,, which will be compared with the ordinate of the bottom of the grooves y,.
In the following, the value of yc will be deduced from the asymptotic behavior
of R,(x, y ) when n + + co. It is worth noting that the value of R ( x , y ) in the
region of R - situated above y = yc is the analytic continuation of the diffracted
field F ( x , y ) below 9?
So, the general condition of validity of the RH, i.e. y, < y,,, = - H/2, becomes
h < h,, h, being given by the transcendental equation:
h, + ( 1 + h:)’” - arcsinh (l/hc) = 0, (3.10)
which finally gives:
h, = 0.447143, (3.11)
i.e. the value first given by PETITand CADILHAC
[ 19661from a counterexample
described in the next section.
3.2.3. A counterexample
= 0, V x .
n
(3.12)
It will be shown that the above equation cannot be satisfied, at least above the
critical value H, of H deduced from (3.11).
First, we must envisage mathematical considerations which perhaps will
appear strange to the physicist: the behavior of (3.12) for complex values of x.
In fact, we have already investigated in Appendix A some properties of the
Rayleigh expansion R ( x , y ) for complex values of x and y . These properties
apply as well to the first term of (3.12) which is simply R(x, 3H cos K x ) , a
function of a single complex variable x . If (3.12) is satisfied for any value of
x , it applies in particular to K x = - n,i.e. at the bottom of a groove. Of course,
this requires the convergence of R( - n / K , - H/2). A direct consequence of
Appendix A is that R(x, $H cos K x ) will converge to an analytic function of the
complex variable x in the region axE C defined by:
IF(., ~cosKx)<
( (~(x,,
26 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 3
Fig. 3.2. Contour lines of Iw(x,~HcosKx)I= exp( - M ) for H/d = KH/2n = 0.175, in the com-
<
plex plane of Kx = + iq. S and S' are the saddle points of w or I/w. The values ofM are given
on the curves.
1.8 31 THE RAYLEIGH METHOD 21
Fig.3.3. Had the Rayleigh expansion been convergent at the point A, it would have been
convergent throughout the finite hatched region ax.
Now, our aim is to investigate the validity of the RH for gratings whose
profiles are given by analytic functions f(x), for both the FTE and the FTM
28 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS s
[I, 3
cases. The asymptotic values HfP will be derived from (2.22a) and (2.22b). Let
us consider the FTE case. By using (3.5) and (3.6a), it can be shown that:
(3.16a)
l d
= -~ exp[p( -iKx + Kf(x))]$(x)u(x, f(x))-’ dx. (3.16b)
4np 0
The asymptotic behavior of this integral can be obtained using a saddle point
method (DENNERYand KRZYWICKI [1967]), as made by HILLand CELLI
[ 19781. Since f ( x ) is analytic and may be extended to complex values of x, and
assuming that $(x) satisfies the same property (cf. MILLAR[ 19691 in the case
of sinusoidal gratings), the integration path may be modified in the x complex
plane according to Cauchy’s theorem and the asymptotic behavior is deduced
from a path passing through the saddle point. For instance, for sinusoidal
gratings, the saddle point S of l / w is shown in Fig. 3.2. The initial path AE is
replaced by ABSCE, and finally by BSC since the contributions of AB and CE
-
cancel each other. It turns out finally:
Bp = T+pP3/’exp[pKf(x,) - ipKx,], (3.17)
T , being a complex coefficient.
For the FTM case, though the coefficient in 1/& is removed in (2.22b), (3.17)
still holds if we notice that (1 - f’(x)ocp/fiP)asymptotically tends to 0 at the
saddle point. From (3.6a) and (3.17), we derive an asymptotic value Rpof the
RE :
RP(xyy)= T + u(x,y)~-~/’exp{i~K[(x - x,) + i(y - f(x,))l}. (3.18)
So, for real or complex values of x and y, a necessary condition for the
convergence of the RE is:
Im{x - x, + i(y - f(x,))} > 0. (3.19a)
A similar calculation for the terms R --p leads to a second necessary condition:
Im{x - x, + i(7 - f ( x , ) ) } > 0. (3.19b)
It emerges that the domain of convergence R E C2of the RE is the intersection
of the two regions defined by (3.19a) and (3.19b).
For real values of x andy, (3.19a) and (3.19b) show that the RE converges
above the horizontal line passing through the point J of real coordinates (xJ,yJ)
such that:
xJ + iyJ = x, + if(x,), (3.20)
THE RAYLEIGH METHOD 29
1
f (x)= arcsinh (a cosKx),
K
which is close to the sinusoidal grating for low values of a. For this grating, there
is no saddle -point since (3.13) has no solution and yJ = - co. However, a
branch point limits the domain of convergence of the RE, and yc is finite.
From another remark of Cadilhac, let us state an original result which could
permit the opticists to find a physical meaning for the point J. The equation of
the tangent to 9 at a point (xo, f ( x o ) ) is:
Y - f ( x J - f’(x,)(x - X d = 0 9
(2.22a) and (2.22b) can be used as well to investigate the asymptotic behavior
of B,,, using the saddle point method in the t complex plane. The result is the
same: the singularity of the RE is the focus of the curve. It will be found by
writing that the tangent to B at the point to,
-y’(to)(x - xo) + X’(tO)(Y - Y o ) = 0 , (3.22)
is an isotropic line which satisfies
Y’(t0)= iX’(lO), (3.23)
and by looking for the real coordinates X , and x,, such that
x, + iy, = x(to) + iy(to).
The same remark applies to a grating for which B is given by ~ ( xy)
, = 0 where
the focus will be found by solving:
(3.24)
X(X09Yo) = 0, (3.25)
and by writing that X , + iy, = xo + iy,.
For the opticist, it is not surprising to find a singularity of the diffracted field
at a focus. Unfortunately, this is not the optical focus of geometrical optics,
which cannot be defined for an arbitrary profile 9 It is the mathematical focus,
which may be considered as the “asymptotic optical focus of the evanescent
waves” and which is independent of the wavelength and of the incidence. This
author verified an interesting property in the case of sinusoidal gratings: the
mathematical focus J is always close to the optical focus obtained from
geometrical optics by replacing the top of 9 by circles having the same radius
of curvature at this point. Thanks to the definition of the focus, all the above
conclusions can be generalized to any two-dimensional diffracting subject: the
focus is a singularity of the solution of the Dirichlet and Neumann problems of
diffraction.
The reader interested in calculating the, limit of validity of the RH for a
particular grating can use the above equations. Many examples of calculation
of y , have been given by NEVIERE and CADILHAC [ 19701, HILLand CELL]
1, I 31 THE RAYLEIGH METHOD 31
[ 19781, VAN DEN BERG and FOKKEMA [ 19791, DE SANTO[ 19811. For non-
analytic profiles, it has been shown by MILLAR [1969], NEVIEREand
CADILHAC [ 19701, that in general, the RH fails as soon as the upper point of
B is an edge. This phenomenon can be easily explained by the fact that the field
Fis singular on the edge (a singularity is a point where the field is not analytic),
a fact which implies the divergence of the RE on the edge. This rule is not
general since counterexamples have been given for echelette gratings in the
FTM case (MARECHAL and STROKE[ 1959]), echelette and lamellar gratings
for the FTE and FTM cases (MAYSTRE [ l974,1980b]), in which the diffracted
field is described by a small number of plane waves and has no singularities.
It is amazing to notice that one of the main results of this section was
implicitly stated by SOMMERFELD [ 19491 in his theory of “characteristics”. He
showed that the necessary condition for finding the analytic continuation of the
field at the vicinity of the profile was that the characteristic lines (which are
nothing but the isotropic lines for the Helmholtz equations) must not be tangent
to the profile. A simple generalization of this remark to complex values of x
and y shows that singularities of F(x, y ) may be expected in the vicinity of the
point (x, ,f ( x s )).
Apparently, the theoretical results about the validity of the RH are the
explanation for the numerical difficulties observed in its first implementations.
This explains why rigorous theories have been developed further. Nevertheless,
since 1971, a series of theoretical and numerical studies have raised a new
interest in the Rayleigh method. Exploiting an analysis of VEKUA[ 19531 for
other diffracting structures, some authors (YASUURA and IKUNO[ 19711,
IKUNOand YASUURA[1973]) claimed the completeness of the set of
@,,(x, f ( x ) ) in the Hilbert space of square integrable functions (cf. MILLAR
[ 19731 or CADILHAC[1980]). Let us outline this demonstration for the
interested reader. Assuming that the pseudo-periodic, locally square integrable
function T(x) is orthogonal to the @,,(x, f ( x ) ) , i.e. that
( T ( x ) ,@,,(x, f ( x ) ) ) = 0, Vn, we must prove that T ( x ) 3 0. With this aim we
use some results established in Appendix B. The functions f ( x ) and T ( x )being
given, we consider the profile 8’ given by y = f( - x ) , separating R and R
and a continuous function U(x,y ) satisfying (B.8) and (B.9), i.e. Helmholtz
equations in both R ‘+ and R’- ,and radiation conditions for y .+ & 00. If we give
32 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, I 3
(3.26)
with
IN = I s N ( x ) + F’(x, f 1 * dx*
Equation (3.26) only means that I N - + 0 when N -+ a,and does not mean that
the two members are equal for any value of x. The second fundamental remark
is that the BLN)of(3.27) depend on N . So, the convergence of S,(x) when N -+ 00
does not imply the convergence of the RE, even though BLN)-+B,. To cast light
on this rather subtle fact, let us give a simple numerical example of such an
apparent paradox. S, is now, in this simple example, defined by:
2
N
S, = riN) with rLN)= 1 - 2n/N.
n=O
diverges. This is exactly what happens in our case: the convergence of the S,(x)
does not imply the convergence of the RE, R ( x , f (x)), since in this series, the
BLN) are replaced by their asymptotic values B,.
Of course, these new theoretical considerations have raised a new interest
in the RVM described previously, which appears to be justified from a
theoretical point of view. However, recent numerical experiments have proved
that, even though the RVM can be used for some non-shallow gratings, it
converges slowly and does not converge for groove depths higher than
H, = 0.54d in the case of sinusoidal gratings (WIRGIN[ 1979a1, HUGONIN,
PETITand CADILHAC [ 19811).
It has been shown (see for instance the paper by MILLAR[ 19731) that the
set of S,(x) uniformly converges to the diffracted field F i n any closed subset
above % assuming the existence of a certain Green function vanishing on the
grating surface 9 Here, we use a more general demonstration to show that S,
uniformly converges to F on 9provided the profile is analytic.
Let us define, for a given profile 3 a second periodic curve 9*, given by
y = f *(x) 6 f ( x ) . We denote by R*, the region y > f *(x). We assume that the
analytic continuation of F (also denoted by F ) has no singularities in R*, and
is locally square integrable on 9*, properties always satisfied if P = 9
34 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 3
F(x, y ) = 1 iF
F(x, f * ( x ) ) dC,( x , y, x ' , f * ( x ' )) ds *,
dn'
(3.29)
s* being the curvilinear abscissa of the point of abscissa x' on ?*, and x , y the
coordinates of a point P of R*, (cf., for example, MORSEand FESHBACH
[ 19531, for the definition and properties of a similar Green's function obtained
when 9*is replaced by a closed surface). Now, let us call S$(x) the set given
by the sum described in (3.27), the B r being chosen, this time, in order to
minimize 1%:
in (3.29), we derive:
Since the first term of the right-hand member tends to zero and the second is
finite:
lim 1 F(x, y ) - T$(x, y ) 1 = 0
N - cc,
(3.30)
particular for y > y,, where F is given by the RE, it is easy to deduce that
B::) 4 Bn when N -,CQ.If we notice that the B‘,” so defined are nothing but
the coefficients determined by using the RVM (cf. $ 3.1), we are led to the
conclusion, stated above without a complete demonstration, that this method
is theoretically valid for any kind of grating, even when the RH fails. Of course,
all these conclusions hold when B is analytic, but in addition, we can conjecture
that 9*can have no point in common with because of the absence of
singularity of F on 9 So, R*, includes B and from (3.30) we derive that:
+N
lim
N-CC
n = -N
BLN)4 ( x , f (x)) + F i ( x ,f (x)) = 0, (3.3 1)
in the sense of uniform convergence. The existence of such B‘,” is the proof
of the theoretical validity of the PMM and FSM (cf. $ 3.1) for such profiles.
In this case, the FSM seems to be better and simpler than the FVM, as shown
numerically by WIRGIN[ 1979bJ: for sinusoidal gratings, the first method
converges below H / d = 0.7, agroove depth five times greater than the theoretical
limit of the RH. This success of the FSM probably has to be qualified for
non-sinusoidal analytic profiles, where the coefficients of the linear system of
equations are not analytic. This remark is not without substance: it can be
conjectured that the progress of the numerical implementation of the FSM in
the last fifteen years is also linked to the progress in the computation of the
Bessel functions on computers.
So, we are led to an unexpected conclusion: the numerical limits of the
Rayleigh methods are not directly linked to the theoretical failure of the RH, but
to purely numerical reasons at least for analytic profiles. For instance, in the
PMM, these reasons are obvious. According to (3.2), (3.6a), (3.6b) and (3.8),
the n, m coefficients Qn(x,, f ( x , ) ) of the linear system of equations to be
solved are very different in magnitude. If, for simplicity, we assume that the
ordinate of the top of the grooves y M = 0, the coefficient at the corresponding
abscissa will tend to 1 in the modulus, while at the other points x,, it will tend
to 0 in the modulus when n -,CQ. So, it suffices to adopt a sufficiently large
value of N to obtain identical lines for high values of n, at least for computer
purposes, and the matrix becomes singular. This phenomenon arises for any
value of H, including those inferior to H,, and this proves that the PMM is
ill-conditioned. The same kind of limitation appears for FSM and for FVM but
for higher groove depths. The interested reader can find theoretical investi-
gations, thorough comparisons of these methods and comparison with other
rigorous methods in the papers by BATES[ 19751, KALHOR[ 19761, NAMIOKA,
HARADA and YASUURA [ 19791, WIRGIN[ 1979a, 1979b, 1979c, 1980a, 1980b,
36 RIGOROUS VECTOR THEORIES O F DIFFRACTION GRATINGS [I, J 4
The basic idea of the WATERMAN method, for the FTE case, is to use the
completeness of the set of functions @,(x, -f(x)) to deduce the function $(x)
from (2.24a), then to calculate the amplitudes B, by introducing $(x) in (2.22a).
As regards the FTM case, the same procedure may be applied using (2.24b)
and (2.22b). It is worth noting that the fundamental equations (2.24a) and
(2.24b) are sometimes presented as consequences of the so-called “extinction
theorem”, well known in Optics and Electromagnetism. As for Rayleigh’s
method, there exist various ways of implementing (2.24a). For instance, a point
matching method can be used by representing $(x) by its values at 2N + 1
points x, of the interval (0, d ) and by writing (2.24a) for n E ( - N, + N ) . If a
trapezoidal rule is used, the coefficients of the linear system of equations to be
inverted are proportional to @,(x,, f(x,)). Obviously, the remarks of Q 3.3
about the ill-conditioning of the system for the PMM in the Rayleigh theory
apply to the PMM in the WATERMAN theory as well. Therefore, the numerical
limitations may be expected to be close to each other. A similar remark can be
made about the FSM where $(x) is represented as a series of exp(ia,x). The
coefficients,proportional to (exp - ia,x, @,(x, -f(x))) ,will be closely linked
with those obtained in the Rayleigh method, according to (3.3), and the
numerical limitation may be expected to be of the same order (cf. for instance
WIRGIN[ 1979a, 1979b1).
This method, or methods relying on the same basic ideas, has been used by
various authors (WATERMAN [ 19751, URETSKY[ 19651, DE SANTO [ 19751,
WHITMAN and SCHWERING [ 1977],WIRGIN[ l978,1979a, 1979b],WHITMAN,
LESKIVand SCHWERING [ 19801. An interesting feature of the DE SANTO
method, which has been numerically implemented (JORDANand LANG[ 19791,
LANGand JORDAN[ 19801) lies in the representation of $(x) by the product
of a Fourier series by the physical optics approximation (viz. the function $B
THE INTEGRAL METHOD 31
given in (2.25)). As may be expected from Fig. 2.4, this feature enhances the
accuracy of the numerical results (at least when I / d is low), as announced by
WHITMAN,LESKIVand SCHWERING[ 19801 who developed the same
formalism independently. In conclusion, the main quality of the Waterman
methods rests on its simplicity, equivalent to that of the Rayleigh method.
Unfortunately, the numerical limitations of these two methods are also very
close to each other.
To our knowledge, the integral method has been the most widely used of the
rigorous theories of gratings. Until now, it has been the most versatile and the
most accurate tool for investigating grating properties. On the other hand, its
main shortcoming lies in its mathematical complexity and in the toughness of
numerical implementation.
After the pioneering studies of PETITand CADILHAC [ 19641, WIRGIN[ 1964,
19671, URETSKY[ 19651, PETIT [ 1965, 1966a1, PAVAGEAU,EIDO and
KOBEISSE [ 19671, the various ways of implementing this theory have been
widely investigated, at least for perfectly conducting gratings. Thus, many
integral treatments of the grating problem are now available (GREEN[ 19701,
DUMERY and FILIPPI [ 19701, MAYSTRE and PETIT[ 1970a, 1970b1,MAYSTRE
[ 1974, 1980a1, VAN DEN BERG[ 1971a, 1971b1, KALHORand NEUREUTHER
[ 19711, M c PHEDRAN[ 19731, BOTTEN [ 1978a, 1978b], GARCIAand
CABRERA [ 19781). Many of these methods have been inspired by the ideas of
MAUE[ 19491. M c CLELLAN and STROKE[ 19661 also published an integral
equation for the FTM case but no numerical application supported the theory,
which seems to be questionable since it requires the continuity of the tangential
component of the magnetic field on the grating surface.
In spite of its complexity, the integral formalism lies on a very simple and
intuitive background as we shall briefly describe.
Due to the incident field, there exists on 9 a surface current density j9(x).
Unfortunately, finding j,(x) is not straightforward: the existence of j , ( x ) at
a given point M of 9is not only the effect of the reflection of the incident wave
at this point, as assumed in the BECKMANN theory; in fact, the surface current
densitiesj,(x') at the other points M ' of 9 act like secondary sources which
radiate a field in all directions, and in particular toward M. So, j,(x) depends
38 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 5
not only on the characteristics of the incident jield at M, but also on the value of
j y ( x ‘ ) at the otherpoints M ’ of 9
Now, it is felt intuitively that the diffracted field is nothing but the field
generated by this surface current; therefore it may be expected that the
knowledge of the function j,(x) will enable us to express the diffracted field
F at any point of region R . This intuitive fact is fully confirmed by mathe-
+
matics: after defining the field generated at the point P of region R by a single
+
conditionsfor y -+ & 00, it can be expressed by (B. 10) at anypoint of space in terms
of thejumps of U and d Uldn on 9 Furthermore, the limits U * of U on both sides
of 9 are given in terms of these jumps by (B.21) (or (B.24) in an operatorform)
and (B.25) provides the values d U It ldn of the normal derivative in the particular
case where U is continuous on 9? Outside the grooves, U(x,y ) can be represented
as series ofplane waves (B. 15) and (B. 16) whose coeficients are given by (B. 17),
(B. 18) and (B. 19).
It is worth noting that Appendix B uses “Dirac functions” 6(x), easy to
handle for the physicist but incorrect for the mathematician. The interested
1, B 51 THE INTEGRAL METHOD 39
reader may find rigorous demonstrations of the above theorem using the
[ 1966a, 1966bI) in a paper by the
Schwartz theory of distributions (SCHWARTZ
present author (MAYSTRE [ 1980al).
The FTE case is described by the Dirichlet boundary value problem stated
by (2.8), (2.9a), (2.10). According to 0 5.1, the first step is to express the
diffracted field I: in terms of the surface current density. We define the
“generalized diffracted field” U(x, y ) at any point of space by the difference
between the total field (which vanishes in region R - ) and the incident field:
UX, .Y) = F(X, v) in R , ,
= -F’(x,y) in R - . (5.1)
Obviously, U(x,y) fulfills the conditions of the FTIM and can be expres-
sed in terms of q = (1 + f’(~)~)’/’(dU+/dn(x) - dU-/dn(x)) and
z = U+(x) - U-(x). Bearing in mind the definition of U stated in (5.1), the
boundary condition (2.9a) clearly shows that z = 0, while (2.22~)and (2.23a)
indicate that q = $, i.e. a function closely linked with the surface current density
j,?. So, the FTIM enables us to show that the intuitive remark stated above
is true: the diffracted field can be expressed in terms ofj,. From (B.lO) we
deduce:
W ,Y)= jod@’b, y , x’ 1 $ 4 ~) dx’
’ , (5.2)
s,’ being given by (B.18). This formula is identical to (2.22a) but has been
demonstrated in Appendix B for any value of n. Equation (2.24a) may be
derived from (B. 17) as well, by writing that Uidentifies with - E’ in region R - .
To find $(x), we remember that the right-hand member of (5.2) satisfies both
(2.8) and (2. lo), even though an arbitrary function is introduced in the integral
instead of $(XI). To fulfill the last condition (2.9a), we write:
U+(x) = u- (x) = - F’(x, f(x)). (5.4)
40 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I. I 5
with
which is an integral equation of the first kind (PETITand CADILHAC[ 19641)
since the unknown function $ is not present outside the integral contained in
the left-hand member. The kernel G(x, x’) is given by (B.22) and (B.11). It is
straightforward to see that introducing the solution of (5.5) in the right-hand
member of (5.2) provides an expression for U (thus an expression of F in R ) +
which satisfies all the conditions of the FTE case boundary value problem.
Another equivalent way to write the boundary condition for F is:
In the FTM case, we have to solve the Neumann boundary value problem
stated by (2.8), (2.9b) and (2.10). After using (5.1) to define a “generalized
diffracted field” which satisfies the conditions of the FTIM, U(x,y) can be
expressed by (B.10) as a function of its jump, owing to the continuity of its
normal derivative stated in (2.9b):
u(x, Y ) = jod
B(x, Y , x’ 1 $(x’ 1 dx‘ , (5.10)
1, J 51 THE INTEGRAL METHOD 41
B(x, y , x’ )being defined by (B. 11) and $(XI)being the surface current density,
according to (2.22d) and (2.23b). As in the preceding section, U(x, y ) has been
expressed as a function of the surface current density, which satisfies (2.8) and
(2. lo), whatever the function introduced in (5.10) instead of $(x’ ).
Due to the limitation of the FTIM for non-continuous functions U(x, y), it
is not possible to express directly the boundary condition (2.9b). Let us show
that the very simple condition:
W ( X ) = - F’(x, f ( x ) ) (5.11)
is equivalent to this boundary condition.
Indeed, the uniqueness of the solution of the Dirichlet boundary value
problem allows us to assert that Ugiven by (5. lo), which satisfiesthe Helmholtz
equation in region R - and the radiation condition for y -,coy is equal to the
obvious solution - F’(x,y) in region R - if (5.11) is satisfied. So
dU-/dn(x) = - dF’/dn(x, f(x)) and since the expression (5.10) has a con-
tinuous normal derivative on 9 d U + / d n = -dF‘/dn and (2.9b) is satisfied.
Using (B.24) to express the left-hand member of (5.11) yields:
*/2 = $0 + N’ { $1, (5.12)
N’ being given by (B.23) and (B.12).
After solving this integral equation of the second kind, the amplitudes En of
the Rayleigh expansion of F above the grooves are deduced from (B.17):
(5.13)
t,‘ being given by (B.19). This formula extends (2.22b) to any value of F,,.
It is interesting to notice that other integral equations may be obtained for
FTE and for FTM cases, using the FTIM (MAYSTRE [ 1980al).
In the first attemps at solving the above integral equations, a Fourier Series
Method was used: the unknown function was represented as a series of
exp(ia,x). Truncating this series from m = - N to m = + Nleads to a system
of 2N + 1linear equations with 2N + 1unknowns: the coefficients of the series.
This method is interesting for echelette or trapezoidal gratings since the
coefficients of the linear system can be calculated in closed form (PETITand
CADILHAC [ 19641, MAYSTREand PETIT[ 1970a, 1970bl). Unfortunately, it
does not supply great precision and is difficult to generalize to other profiles.
42 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, § 5
This explains why, to our knowledge, this method has been abandoned and
replaced by a point matching method.
In ( 5 . 9 , (5.8) and (5.12), we have to solve an equation of the form:
5 6. Other methods
6.1. DIFFERENTIAL METHODS
Modal methods are of great interest and have in common three fundamental
features: they are based on very simple mathematics; they are very eflective and
can deal with highly modulated gratings with low computer time; they are restricted
to special groove geometries. More precisely, they can apply as soon as the field
inside the grooves can be expressed in the form of a modal expansion, similar
to the modal expansions encountered in the problems of wave-guides. In this
case, the grating problem may be solved by matching the modal expansion to
the Rayleigh expansion on the line y = y,. This leads to the inversion of a linear
system of equations whose unknowns are the coefficients of the modal
expansion. This method is particularly useful for lamellar gratings, i.e. gratings
whose grooves are rectangles, the sides of which are parallel to O x and O y
(MAYSTREand PETIT [1972b], HESSEL,SCHMOYSand TSENG[1975],
ANDREWARTHA, Fox and WILSON[1979a, 1979b1). Though the theory is
presented in quite a different manner, we can class in this group also the
methods used for lamellar gratings by WIRGIN[ 1967, 19691 and WIRGINand
DELEUIL [ 19691. The modal theory has been generalized by ROUMIGUIERES,
MAYSTRE and PETIT[ 1974, 19751 to perfectly conducting rectangular rods
lying on a dielectric stack. Recently, a new modal theory has been applied by
BOTTEN,CRAIG,M c PHEDRAN, ADAMSand ANDREWARTHA [ 1981a, 1981bl
to rectangular groove dielectric or metallic gratings.
JOVICEVIC and SESNIC[1972] used a modal theory to investigate the
1, § 61 OTHER METHODS 45
6.3. MISCELLANEOUS
our laboratory, where practically all these methods have been numerically
implemented, allows the statement that the results of the rigorous methods
agree to within 1% in the resonance region, provided the numerical implemen-
tation is carefully carried out. As far as the integral, differential and modal
methods are concerned, an agreement better than 10 - in relative value on the
efficienciesis reached in general. Perhaps, the reader will judge such a precision
to be quite impractical. This opinion was justified until recent years but at
present, this precision is sometimes needed for important investigations, for
example the use of gratings as beam samplers for high power lasers (MAYSTRE,
NEVIERE and PETIT[ 19801).
Nowadays, the computer codes devoted to real metallic gratings are in most
widespread use, even though they are more complicated and time-consuming
than those devoted to perfectly conducting gratings. This is due to theoretical
(PETIT,MAYSTRE and NEWERE[ 19721, MAYSTRE [ 1973, 19741) and experi-
mental (HUTLEYand BIRD [ 19731, LOEWEN,MAYSTRE,M c PHEDRAN and
WILSON [ 19741) evidence that the model of perfectly conducting gratings fails
in the visible and near infrared regions, at least for the FTM case. This
phenomenon is not intuitive since the reflectivity of metals like aluminium,
silver or gold employed for the construction of commercial gratings exceeds
90% in these regions.
remains TE (or TM) polarized when the incident field is TE (or TM). So, for
both polarizations, we shall deal with the projections of the field on Oz. The
diffracted field F(x, y ) is defined as the difference between the total field and
the incident field in R and identifies with the total field in R - . So, it is possible
+
to define the FTE (or FTM) cases, where the incident electric (or magnetic)
field F' is given by (2.11). In these fundamental cases, the diffracted field F
obeys the following boundary value problem:
V2F + k2F = 0 in R +,
1, Q 71 METALLIC AND DIELECTRIC GRATINGS 47
V2F + k2v2F= 0 in R -,
F (x) + F'(x, f(x))
+ = F - (XI,
dF-
d F +/dn(x) + dF'/dn(x, f(x)) = C, - (x), (7.4)
dn
F satisfies a radiation condition for y-, k 00, (7.5)
with C, = 1 for FTE, (7.6)
C, = l/v2 for FTM.
It is worth noting that, for the FTE case, (7.3), (7.4) and (7.6) mean that the
total field and its normal derivative are continuous on 9?This continuity holds
for the total field but not for its normal derivative for the FTM case since
C, # 1. The uniqueness of the solution of the FTE problem has been shown
by CADILHAC [ 19801, at least when v is real. As in 5 2.4 and 2.5, it can be
established from the above equation that F is pseudo-periodic in x, and is
described above the top of the grooves by the Rayleigh expansion (2.13) and
below the bottom of the grooves by another Rayleigh expansion:
F(x,y) = EnB P ) exp(ia,x - i/?(ny)y) ify <y,, (7.7)
By definition, the expression for u will be derived from the above expressions
for u by replacing A,,B,, A',") and B',") by A:, B,!,,A',")' and B',")', p'," being
replaced by flp)= by),U(') being equal to U(").Proceeding as in $ 2.6 for R , +
then R - yields:
dv' -du+
u+
dn
-) ds = x
nE U
p,,(A,K - B,K), (7.12)
and from the boundary conditions (7.3) and (7.4),we can eliminate the left-hand
members of the above equations:
p,,(A,K - B , K ) = C, 1 p',")(BP)BT- A',")AT). (7.14)
ns U nE U'"'
Using the same functions u and u as in $ 2.6 for the reciprocity theorem, the
"reciprocity by reflection" stated in (2.20) remains unchanged, whatever the
index v of R - (MAYSTRE and M c PHEDRAN [ 19741).
For the "reciprocity by transmission" (NEVIERE and VINCENT [ 1976]), the
function u is defined as the conjugate of the total field v" of Rayleigh coefficients
B,: above 2 which exists when an incident wave exp(ia"x + i v y ) propagates
upward in R - , with 01" = - 01, and pl, = p!,'". The result is that, when n E U :
BB," = CP p(")B',").
" (7.15)
When v is real, the energy balance criterion can be derived from (7.14) by
1,s 71 METALLIC AND DIELECTRIC GRATINGS 49
(7.16)
Here, also, the use of Poynting's theorem shows that the quantities in (7.16)
are no other than the flux of energy of incident waves in R + (first term), or
in R - (second term), and the flux of energy of diffracted waves in R (third
+
term) or R - (last term). So, the physical meaning is very simple: the incident
energy is equal to the diffracted energy. It is interesting to note that, when v is
real, (7.15) reveals that the efficiency is the same in the two cases: there exists
a "reciprocity by transmission".
The first rigorous theoretical studies on this topic proposed the solving of two
coupled integral equations (WIRGIN[ 19681, NEUREUTHER and ZAKI[ 19691,
VAN DEN BERG [ 1971a, 1971bl). Indeed, contrary to what happens with
perfectIy conducting gratings, where j , is a relevant function to express the
diffracted fieid, here the physical meaning cannot suggest a comparable
function defined on the profile 9 However, it turns out that the field F ( x ) on
+
9 and its normal derivative d F /dn(x) are sufficient to express the diffracted
+
field in R and R - using (B. 10). Indeed, (B. 10) may be used in the first
+
two integral equations are necessary to find the two unknown functions: they
are obtained by using the boundary conditions (7.3) and (7.4). Unfortunately,
these two integral equations are coupled, a fact which leads to serious numerical
limitations.
Now, we shall present the theory developed by the present author, which
leads to a single integral equation (MAYSTRE [ 1972, 1973, 1974, 1980al). From
an intuitive point of view, this formalism relies upon the following idea: a
fictitious su$ace current density j,(x) exists which, placed on would generate
in free space (the materialfilling region R - being replaced by air) a di@actedjield
F - identical in R to the actual dfracted jield F. Of course, the field F'
+
it enables us to express F’ at any point in space and thus, to express Fin region
R + . So, Appendix B can be used to express the limits F and d F /dn above
+ +
9 and then the limits F - and dF-/dn will be deduced from (7.3) and (7.4).
Now, the field in R - may be derived from F- and dF-/dn using (B.lO) for
a material of index v. Finally, we have expressed the field at any point of space
in terms ofj,v(x) and obviously, a single integral equation is enough to determine
this single unknown function. It is worth noting that, from this point of view,
the theory leading to a pair of integral equations is redundant: in fact, the two
unknown functions F and d F /dn may be deduced from a single relevant
+ +
function j:p(x).
More precisely, the mathematical steps of this method are outlined in
Fig. 7.1. We first define a function U(x, y ) by:
U=F inR+, (7.17)
V2U+ k2U= 0 inR-, (7.18)
u-(x) = U+(X), (7.19)
U satisfies a radiation condition for y + - co. (7.20)
The function U,which is defined simply by (7.17) in R , is also well defined
+
(7.21)
It is interesting to notice that the above formula, quite similar to (5.2), gives the
expression of the field U generated in free space by a surface current density
j.(x) = i$(x)(l + f ' ( ~ ) ~ ) - ~ / So, ~ / we
~ pnow
~ . have the expression of F in
R (arrow a of Fig. 7.1) and (B.17) allows us to express the coefficients B, of
+
(arrow b):
F+ = G { $ } , (7.23)
(1 + S ' ( X ) ~ ) d' /F~+ / d n = $/2 + N { $}. (7.24)
The limits F- and dF-/dn can be easily deduced from (7.23) and (7.24) by
adding the incident field to F (arrow c) and using the boundary conditions (7.3)
and (7.4) (arrow a):
F- = G{$} + $0, (7.25)
(1 + f ' ( ~ ) ~ )dF-/dn
'/~ = [$/2 + N { $ } + $o]/C,,, (7.26)
$, and q0 being given by (5.6) and (5.9).
Now, to express the total field Fin R - in terms of $, it suffices to use (B. 10)
for a function U'(x, y ) satisfying the conditions of the FTIM (but this time with
a Helmholtz equation of wave-number k v ) :
U'(x,y) = 0 inR+,
U'(x, y ) = F(x, y ) in R - ,
and (B.lO) yields (arrow e):
dn
(x')(l + f'(x')2)'/2 dx'
(7.27)
1
B Y ) = _ _ [&"'-, $42 + N { $ } + $01 - [t',"'-, G{$} + $01, (7.28)
CP
s2)- and t2)- being obtained from s; and t,- by replacing b,, by fir).Similarly,
52 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, 8 7
putting (7.25) and (7.26) in (B.24) and bearing in mind that U' = 0 above 9
allows us to express the limit F - of U' below 9 (arrow f):
F- = (G{$} + $OY2 - G'"'{$/2 + N{$l + $ O W P - N(")'{G{$1 + $01.
(7.29)
The integral equation is obtained by writing that the above value is linked to
F + + F', by (7.3). Using F' given by (7.23) yields:
periodic in x, for which domains R and R - cannot be defined. For the sake
+
Helmholtz equation obtained by putting (7.1) and (7.2) together and bearing
in mind that F' satisfies (7.1) in R : +
x(x, A = c x , b ) exp(inKx),
n
(7.33)
and we derive easily:
c (Fi
n
- a:F, + c4 xn_,F4) exp(ia,x) = 0. (7.34)
Since (7.34) is valid at any point of space, including 9 (7.34) is satisfied for
any value of x and y, and so any term of the series must vanish:
(7.35)
54 RIGOROUS VECTOR THEORIES OF DIFFRACtlON GRATINGS [I, § 7
Furthermore, (7.31) and the continuity of F' and dF'/dn (and thus of grad F')
on 9 imply the continuity of F,(y) and FA(y) for any vahe ofy. Above y , and
below y,, J,,(y) is constant since x remains constant; thus, we find again that
F' is described by plane wave expansions which can be deduced from (2.13)
and (7.7) by adding the incident field to F i n R . From (7.32), we derive the
+
Obviously, the values of the Rayleigh coefficients B, and B '," may be deduced
fromF,(y,) andF,(y,). Now, to determine the two sets ofF,(yM) andF,(y,)
we must recall that F,(y) satisfies between y,,, and y, a system of coupled
differential equations (7.35). From a mathematical point of view, this is not
sufficient since boundary conditions for F,(y) at y , and y , are necessary.
These boundary conditions may be inferred from the special form of F,(y) at
the limits y , and y,, given by (7.37) and (7.38). Indeed, it is easy to verify on
these equations that:
FA(ym) + iP',"'Fn(yrn) = 0, (7.39)
F A ( h ) - iPnFn(.YM) = -2iP exp(-iPyM)Gn. (7.40)
So, the grating problem has been reduced to the solvingof the system of coupled
differential equations (7.35) with boundary conditions (7.39) and (7.40) on the
boundaries y , and y,.
The numerical implementation is based on the "shooting method". First, we
have to truncate the infinite differential system. A system of 2N + 1 coupled
differential equations with 2N + 1 unknowns F,(y) is obtained by eliminating
the F, having a number n outside ( - N, + N). The first step of the "shooting
method" is to construct a computer code numerically able to provide the
F,(y,) as soon as the F,(y,) are known from - Nto + N. Let us show briefly
that this is not a difficult problem. Indeed, as soon as the F,(y,) are known,
the Fi(y,,J can be derived from (7.39) in a linear manner. Now, standard
algorithmslike Numerov, Runge-Kutta or Adams-Moulton algorithms, enable
the calculation of F,(y) and FA(y) up to y , (VINCENT[ 1980bl). Intuitively, it
is easy to see that as soon as the F,(y) and FA(y) are known all the derivatives
FLm)(y)may be deduced from (7.35) or by differentiating (7.35). So, we can
1, I 71 METALLIC AND DIELECTRIC GRATINGS 55
compute with the desired precision the values F,(y + dy) and FA(y + dy) at a
slightly higher ordinate using, for instance, a Taylor expansion for F,(y).
Proceeding in like manner at M points between y , and y , finally gives F,(y,)
and FA(y,). In fact, the numerical algorithms used in practice are much simpler
and very efficient. From F,(y,) and F:(JJ,), we may compute the set of
un = FA(yM) - iflnFn(yM)* (7.41)
Of course, if the exact values of F,(y,) corresponding to the physical
problem have been employed at the starting point of the integration, U, must
be equal to - 2iB exp ( - iBy,)S,, according to (7.40), ifthe integration has been
done with infinite precision. But the exact F,(y,) are unknown. To understand
the “shooting method”, it must be envisaged that the F,(y,) are replaced by
arbitrary values c, in (7.39), and it must be noted that the corresponding U,
numerically obtained by using (7.39), (7.35) and (7.41) are linearly linked to
these c, arbitrarily chosen at the starting point of integration:
(7.42)
q= -N
(7.43)
The field between y , and y , and the Rayleigh coefficients B, and B‘,“)may be
deduced easily from F,(y,), as seen before.
The FTM case of polarization may be treated by the differential method but
is more complicated because (7.31) is not true in the sense of distributions.
One of the origins of the instabilities observed using the differential formalism
for highly conducting metals may be understood from an intuitive point of view.
When the conductivity increases, the skin depth decreases. So, for a given
grating of groove depth H,the function F‘(x, y,) tends to a “delta function”
when the skin depth to groove depth ratio becomes very weak. So, the
truncation of (7.35) will entail a large error, whatever the value of N . It seems
that problems of stability of algorithms have at least the same importance in
this failure.
56 RIGOROUS VECTOR THEORIES O F DIFFRACTION GRATINGS [I, B 8
8.1. DEFINITIONS
difracted order is equal to the efJiciency in the nth difracted orderfor the equivalent
classical mounting, in the same fundamental case of polarization.
So, the directions of diffraction k , lie on a cone containing k (this is the origin
of the name “conical diffraction”) and the projections of the directions of
diffraction on the x O y plane are deduced from Py by the classical grating
formula, using a fictitious wavelength ,Ixy.The computer codes devoted to the
usual mounting can be used to determine the efficiencies from the parameters
B” and AxY. It is worth noting that the invariance theorem enables the
realization of a mounting with a constant efficiency (MAYSTREand PETIT
[ 1972a1): it suffices to keep Pyconstant and to vary ,Iand A in order to keep
A/cos ( A ) constant.
The part of the theorem devoted to the directions of diffraction still holds for
metallic and dielectric gratings. On the other hand, the efficiency of such
gratings does not obey the theorem since the vector boundary value problem
cannot be separated into two scalar boundary value problems: a TE (or TM)
incident wave in general does not generate a TE (or TM) diffracted wave.
However, rigorous integral (MAYSTREand PETIT[ 19741) and differential
(VINCENT, NEVIERE and MAYSTRE [ 19781)methods show that the invariance
theorem can be a good empirical rule for metallic gratings, even in the extreme
UV region, provided the variation of reflectivity of the metal with angle A is
taken into account (MAYSTRE, NEVIERE and PETIT[ 19801).
8 9. Conclusion
Some recent developments in the field of rigorous grating theories are not
described in this chapter. The reader interested in the very complicated problem
of diffraction by “crossed gratings” (viz. gratings which are not invariant in z
but periodic in x and z with groove spacings d and d ’ ) may refer to the review
of Mc PHEDRAN, DERRICK and BOTTEN [ 19801. Though the present computer
codes devoted to these crossed gratings are time-consuming and do not yield
exceptional performance, they have the merit of showing the high interest, as
filters in infrared or solar selective elements, of these new gratings which can
be constructed holographically.
The fascinating field of inverse scattering for gratings has been investigated
in the last few years. Here, the unknown is the profile of the grating, which must
be deduced from an efficiency curve of the grating, for instance, in Littrow
mount. Though the mathematical problems encountered in the first investiga-
tions are tremendously difficult to handle, computer codes have been con-
58 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, A m . A
Appendix A
Let us examine the four terrns of the right-hand member of (AS) when
n - i +co:
- the first term tends to 0, according to (A.1);
- the second and third terms tend to 1, according to (3.6a);
- the last term is bounded by q", according to (A.2) and (A.4).
So, I R, I is bounded, for sufficiently large values of n, by the nth term q" of a
convergent geometrical series independent of x and y. The same conclusion
may be drawn, for n -i - 00, by replacing w(x, y) by E(x, y) in (AS). This shows
that R(x, y ) converges absolutely and uniformly in 62. Since each term R,(x, y )
is an analytic function of the two complex variables x and y , the series R(x, y)
uniformly converges in 62 to an analytic function of 6'. Of course, the restriction
of R(x, y ) to real values of x and y is an analytic function of the two real
variables x and y in the part of D which belongs to R2, i.e. the half plane y 2 yl.
Appendix B
d2 Bn
-+ 3
/: Bn = S(y)/d.
dY2
Remarking that the right-hand member vanishes for y # 0, it turns out that ’3”
can be expressed in the following form:
%(x,y) = - C -exp(ia,x
1 1
+ iP,IyI).
2id n p,,
This elementary solution of the Helmholtz equation is no other than the field
diffracted at the point P of coordinates x and y by an infinite set of elementary
currentsj, = exp(inad) in wires placed at the points x = nd of the Ox axis.
To express U(x,y), we consider Green’s function, so called,
$(x - x’,y - y ’ ) which satisfies:
dU’ d l ‘ -
dn
1 ?!
Y dn’
(x - xf,y - y ‘ ) U +dl’
= U(x,y ) in R ,
+
=o ipR-,
d Bldn’ being the normal derivative of B(x - x’,y - y ’ ) considered as a
function of x’ and y ‘ , U and d U /dn the limit values of U and d U/dn on
+ +
and I‘ the curvilinear abscissa on % It is worth noting that the signs in the
left-hand member of (B.6), unusual in the Green theorem, are imposed by the
sense of the normal 8, which is oriented toward the interior of R + . Since the
integrand of (B.6) is periodic in x’, the contributions of QR and SP cancel each
other. The contribution of SR vanishes, as shown by the lemma of 3 2.6, by
setting u = U(x’,y’), u = B(x - x’,y - y ‘ ) , and remarking that u only
contains outgoing waves whereas u is incoming. So,
1*
=
dn
- (x - x ’ , y - f(xf)) U+(x‘)ds‘,
!P dn’ (B.7a)
the right-hand member vanishing in R - .
An equation similar to (B.7a) can be written for a function U(x, y ) satisfying
a Helmholtz equation in R - and a radiation condition for y + - co :
- 1, dU-
B(x - x’, y - f ( x ’ ) )-(x’) d d ,
dn (B.7b)
This time, the sign of the right-hand member is the usual one since the normal
is oriented toward the exterior of R - , to keep 8 unchanged on 9
Finally, let us generalize (B.7a) and (B.7b) by considering a function U
satisfying:
V2U+k2U=0 inR+ andR-, (B.8)
a radiation condition for y + f co. (B.9)
62 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I, A m . B
Such a function can be considered as the sum of two functions U1and U,,U,
being identical to U in R and null in R - , U, being null in R and equal to
+ +
U in R - . Using (B.7a) and (B.7b) to express U,and U, in all the space, then
adding the two expressions to derive U = U,+ U, and finally replacing ds‘ by
(1 + f ( ~ ’ ” ) ’ ’dx‘
~ yield:
with:
1 1
d(x,y,x’) =
21d
Cn -exp[ia,(x
8,
- x’) + i&ly - f ( x ’ ) l ] , (B.ll)
~ ( x ’=) (1 + f ’ ( ~ ’ ” ) ’ ’[dU+/dn(x’)
~ - dU-/dn(x’)], (B.13)
with
(B.18)
APPENDIX B 63
1 an
t,’ = -(* 1 - -f ’ ( x ) ) exp( - ianx T i&f(x)), (B.19)
2d Pn
[u,U ] = (ii, U ) =
Ld U ( X ) U ( X )dx
d U - /dn, and two supplementary equations must be found for this purpose. To
this end, it can be noticed that, for given y , the right-hand member of (B. 10)
is the product of a continuous function and a Fourier series of x. Hence, the
value U ( x , f ( x ) ) of the right-hand member of (B. 10) on 9 is the mean value
of the two limits on both sides:
G ( x , x ’ ) ~ ( x ’dx’
) + ” ( x , x ’ ) z ( x ’ ) dx’,(B.21)
2
with (B.22)
” ( x , x ‘ ) = a ( x ,f ( x ) ,x’). (B.23)
64 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS [I
U* = 5: + G { q } + N’{T}. (B.24)
2
The same considerations about discontinuities of Fourier series, applied to
grad U,allow us to write, in the particular case where ~ ( x =) 0:
dU+ q
[ 1 + f’(X’)2]’’* -- - ?-+N{?}, (B.25)
dn 2
with
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66 RIGOROUS VECTOR THEORIES OF DIFFRACTION GRATINGS