Scribd
Upload
41 views

Lam Flow

Uploaded by

hoan.le
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
41 views

Lam Flow

Uploaded by

hoan.le
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 2

Laminar Flow Cleanrooms

Basic Design and Operating Considerations

The principle of laminar airflow or, to floor. This downward aiflow flushes usually 0.45 m/s, to counter the effects
be more precise, unidirectional airflow contaminated air particles out of the of upward thermal movement of
cleanrooms is based on air moving along room via the floor, thus preventing a particles. In work stations close to the
parallel streamlines at a uniform velocity build-up of contaminated particles. high efficiency filter wall, Class 100 or
of 0.3 to 0.45 m/s with as little Particles generated at one work station better is possible.
turbulence as possible between the place are therefore removed before they have
where the air enters and exits the room. the chance to migrate. The air velocity Since the flow of particles in this type of
The principle is based on expelling any in this type of cleanroom is usually 0.3 cleanroom is in the horizontal direction,
dust in the airflow by the shortest route. to 0.45 m/s. the particle contamination generated at
one work station can be transported to
Basically, there are two types of laminar Horizontal Crossflow work stations further downstream of the
airflow cleanroom: In a horizontal crossflow cleanroom, the filters. This, however, is dependent on
a) Vertical downflow direction of airflow is from left to right the type of work or the process(es) being
b) Horizontal crossflow or right to left across the room. Air carried out in the cleanroom. Horizontal
enters the room via filters in one wall crossflow is nevertheless a very practical
Vertical Downflow and is exhausted and/or recirculated via and cost effective system, particularly in
In a vertical downflow cleanroom, air a bank of filters and perforated panels in cleanrooms which have to be built in
enters the room via filters in the ceiling the opposite wall. The air velocity has to existing spaces with limited ceiling
surface and is exhausted via a perforated be established at a sufficiently high level, height.

®
B E T T E R A I R I S O U R B U S I N E S S
Laminar Flow Cleanrooms

Basic design and operating considerations

Achievable Class* 1 and 10 (M1.5 and M2.5) 100 (M3.5)

Area per occupant 40 m2 30 m2


Occupants properly attired Full gowns Full gowns
Occupant activity Minimum Minimum
Equipment in room Minimum Minimum
Housekeeping Meticulous Meticulous

Room pressurized 15 Pa 15 Pa
Air changes per hour 500-600 500
Air lock Yes Yes

Clean air inlets as % of ceiling area 90-100% 90%


Clean air inlet locations Ceiling Ceiling (wall)
Terminal velocity at clean air inlet 0.3 - 0.45 m/s 0.3 - 0.45 m/s
Return air location Perforated floor Low level or floor
(opposite wall, 0.45 m/s)

Prefilters:
- First stage** 30% dust spot efficiency 50% dust spot efficiency
F5 F5
- Second stage** 95% @ 0.3 µm 90% dust spot efficiency
H10 F9
Prefilter maintenance and inspection Monthly Monthly
Final filters** Min. 99.9995% on 0.12 µm (for Class 10) Min. 99.999% @ 0.3 um
U15 H14
Min. 99.99995% on 0.12 µm (for Class 1)
U16

Routine particle count interval Daily Weekly

* Class according to US Federal Standard 209E (between brackets in SI)


** G and F classification in accordance with EN779. H and U classification in accordance with draft EN1822.

AAF-International B.V. International AAF Offices: AAF Agents:


P.O. Box 7928 Vienna (A), Montreal (CDN), Dortmund (D), Copenhagen (DK), Bangalore (IND)
1008 AC Amsterdam Vitoria (E), Paris (F), Cramlington (GB), Oslo (N), Lisbon (P), Johannesburg (RSA),
The Netherlands Athens (GR), Milan (I), Riyadh (KSA), Dalsjöfors (S), Malmö (S), Helsinki (SF)
Tel.: + 31 20 549 44 11 Mexico (Mex), Amsterdam (NL), Singapore,
Fax: + 31 20 644 43 98 Istanbul (TR), Louisville, Ky (USA)

AAF has a policy of continuous product research and improvement and reserves the right to change design and
specifications without notice.

CR-2-740-IN-0896 © 1996 AAF International

You might also like