Nitesh - Assignment 2 MM505
Nitesh - Assignment 2 MM505
P43
Electron
Beam Phosphorus
Screen
Camera
Sample
Tilted
70°
Working Principle:
1. Electron Beam Interaction:
• The process begins with an electron beam generated by an electron gun within
the scanning electron microscope (SEM).
• The electron beam interacts with the sample's surface, resulting in several
phenomena, including elastic and inelastic scattering.
2. Backscattered Electrons:
• Backscattered electrons are high-energy electrons that scatter backward after
interacting with the sample's crystal lattice.
• The intensity and direction of backscattered electrons depend on the local
crystallographic orientation and atomic structure of the material.
3. Crystallographic Information:
• When the backscattered electrons are detected by a detector positioned above
the sample, the signal provides crystallographic information about the
material.
4. Kikuchi Patterns:
• The backscattered electrons create patterns known as Kikuchi patterns, which
are formed due to elastic scattering events within the crystal lattice.
• Each Kikuchi pattern corresponds to a specific crystallographic orientation.
5. Pattern Collection and Analysis:
• The EBSD system collects a series of Kikuchi patterns by scanning the
electron beam across the sample's surface.
• The patterns are then analyzed to determine the crystal orientation, grain
boundaries, and other microstructural features.
Metals processing
Intermetallics Phase Identification
& Production
Government &
Superconductors Strain Analysis
Defence
Deformation &
Petrochemical Ceramics
recrystallisation
CSL boundary
Chemical Biomaterials
distribution
[1] https://www.ebsd.com/ebsd-for-beginners/ebsd-applications
[2] https://serc.carleton.edu/research_education/geochemsheets/ebsd.html
[3] https://nano.oxinst.com/products/ebsd/