SMART Sensor Series

Laser Displacement Sensor CMOS Type

Model ZX2 Series

Stable, Easy & Affordable

New Regular-reflective Sensor Head
Designed for Optimal Wafer Measurement

Black coating

White coating

Rough machined
metal surface Metallic luster
 One Solution for Any Application

Height/Length Level detection Warpage

Thin connector assembly Shape validation for molded parts Tray warpage measurement

Positioning Double feed Thickness

Robot hand positioning PCB double feed detection Wafer thickness measurement

New
Laser Displacement Sensor CMOS Type
ZX2 Series
Realize stable measurements Realize stable measurements at 10µm
*1 *2 *3
Resolution 1.5µm Linearity 0.05% F.S.
Reliable measurement of moving objects Unaffected by environmental changes
Measurement cycle Temperature characteristic*4
30µs S./ C*5
0.02% F.S./°C
Stable Wafer Measurement
Regular-reflective
Sensor Head
*1 When employing Models ZX2-LD50/LD50L (50mm type)
*2 Linearity : Maximum error produced when measuring within measurement range
*3 A linearity of ±0.05% F.S. indicates that the maximum error is 10 µm when the
ZX2-LD50L is used with a 40 to 50-mm measurement range, or 35 µm when the
ZX2-LD100L is used with a 65 to 100-mm measurement range.
*4 Temperature characteristic : Error produced when the ambient temperature varies by 1°C
*5 Linearity ±0.02% F.S./°C indicates the maximum error is 4µm when the ambient
temperature varies by 1°C in the case of using Models ZX2-LD50/LD50L with a
measurement range ±10mm.

2
Stable Measurement and Easy to Use

Stability Stable measurements in case of color/material

and moving objects
PAT.P
Dynamic range of two million times Step-less adjustment of laser power
For high reflectance, For low reflectance,
Stable measurements are CMOS Image Sensor brightly colored workpiece darkly colored workpiece
Emitter element
enabled for any color or Receiver element Use a low Use a high
surface condition, including CMOS power laser power laser
Image beam! beam!
metals, substrates,
Sensor
elastomers, and transparent
materials, through OMRON’s
unique HSDR-CMOS (High
Speed and Dynamic Range)
image sensor and a step-less Stable measurements on objects with changing color/material
laser power adjustment Linearity characteristic of Linearity characteristic of
existing product according to material the ZX2 according to material
algorithm. 1 1
0.8 0.8
0.6 0.6
Linearity (%FS)

Linearity (%FS)
0.4 0.4
0.2 0.2
0 0
White ceramic
A line beam is used in addition -0.2 -0.2
SUS304, mirror finishing
-0.4 -0.4
to an emitter beam when -0.6 -0.6 SUS304, hairline (orthogonal)
SUS304, hairline (parallel)
-0.6 -0.6
dealing with rough surfaces to -1
-10 -8 -6 -4 -2 0 2 4 6 8 10
-1
-10 -8 -6 -4 -2 0 2 4 6 8 10
Black rubber

average out the amount of Distance (mm) Distance (mm)

reflected light and to offset the Stable measurements on moving objects

Limit of resolution of Limit of resolution of
amount of light received at a existing product when workpiece is moving the ZX2 when workpiece is moving
400 40
high-speed measurement 300 Max error: 30
Measurement error (µm)
Measurement error (µm)

period of 30 µs in order to 200 approx. 400µm 20

Max error:
100 10
reduce variations in received approx. 7µm
0 0
light and to enable stable -100 -10
-200 -20
measurements for moving -300 -30 Workpiece:SUS304,
objects. -400 -40 hairline (parallel)
Rest state Moving condition Rest state Moving condition
workpiece workpiece

Easy
Easy and User-friendly Configuration
PAT.P
Smart tuning Sensor configuration by just a pushing
the SMART button
The ideal configuration for stable measurements is
realized by a single button through the new feature
“smart tuning”, and no longer depends on the skill
of the user. A reliable configuration is achieved by
three tuning methods, which can be selected to
match the type of object and surface conditions to
be measured.

Three selectable tunings

One type of workpiece Several types of workpiece Surface conditions

of the workpiece are variable

Single smart tuning Multi-smart tuning Active smart tuning

Best configuration for stable detection in Ideal configuration for stable detection Continuous configuration improvement
case of objects do not change by pushing of changing objects by pushing the for the stable detection of all locations by
the button for one second button for three seconds pushing the button for five seconds

3
 Sensor head

Sensor Heads for Various Applications-select

the Range and Type of Beam
New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement

ZX2-LD50L Line beam type ZX2-LD50V Spot beam type

ZX2-LD50 Spot beam type (regular-reflective)

•Measurement range 50mm±10mm •Measurement range 48mm±5mm

•Resolution 1.5µm •Resolution 1.5µm
•Linearity Line beam ±0.05%F.S.*1 •Linearity Spot beam ±0.3%F.S.
*1
Spot beam ±0.10%F.S. •Beam size Spot beam Approx.60µm dia.

•Beam size Line beam Approx.60µm×2.6mm

Spot beam Approx.60µm dia.

Spot beam Regular-reflective

Precise measurement on Stable wafer
micro-scale objects measurement

ZX2-LD100L Line beam type

ZX2-LD100 Spot beam type

•Measurement range 100mm±35mm

•Resolution 5µm
•Linearity Line beam ±0.05%F.S.*2
*2
Spot beam ±0.10%F.S.
•Beam size Line beam Approx.110µm×2.7mm
Spot beam Approx.110µm dia.

Line beam
Stable measurement on
rough-surfaced objects

*1 Using 40 to 50mm
*2 Using 65 to 100mm

4
Support for Various
Environments/Space-Saving The Smart Sensor Head

Reliable measurements in harsh environments

IP67, robot cable
& temperature characteristic 0.02% F.S./°C

IP67 protection class enables to use the sensor in harsh

environments. A robot cable is used as standard between the head
and amplifier, that the unit can be used reliably on moving parts. In
addition, as 3D UV bond is used to fix the optical components rather
than screws, stress can be controlled and a temperature
characteristic 0.02% F.S./°C* is realized.
* If the room temperature varies 1°C, the measured value varies 0.02% F.S.
(corresponding to 4µm for the Model ZX2-LD50)

Compact sensor for easy mounting

World smallest*
The world’s smallest CMOS laser displacement sensor
head is realized in a resin case. Enables to mount the
sensor in smallest spaces and to minimize
measurement errors arising from temperature 35.5mm
fluctuations.
Cable can be
* According to OMRON investigation of CMOS laser displacement sensors
performed in September 2010.
fed through
from the back
47. mm
47.5mm
22.6mm

10µm precision measurements

Linearity to meet the application
Measurements to an even higher Model ZX2-LD50L
accuracy are realized for 50 40 60 40
applications that do not require 50 50
the entire measurement range. If Linearity ±0.05%F.S. Linearity ±0.1%F.S.
the range of the field is less than
the length of the measurement
center, linearity accuracy improves
by 50% compared with that for
the full range.*
* For the ZX2-LD50L/LD100L. Example of an application Example of an application
that does not require the entire measurement range that requires the entire measurement range
Low-profile connector assembly Robot hand registration
height measurement

Visualization to prevent from stopping the production-line

Laser life display function LED gives
a flashing notification
The end of the laser diode lifespan is automatically
detected and displayed so maintenance can be
performed systematically. On the main digital display
of the amplifier, this is indicated by an LED on the Deterioration
back of the head. Accordingly, in case of amplifier is over time
within the control panel, the lifetime can be confirmed
by the head and the indications are not missed.

5
 Amplifier unit + Calculating unit

Ease of Use by “LED Display” and “Calculating Unit”

11-segment LED display for intuitive configuration

Determination output indicators

High (orange)/Pass (green)/Low (orange), Intuitive operation through
two color display cross buttons

11 Segment LED Display

Easy calculations of measurements

6
 A thorough pursuit
of user-friendliness The Smart Amplifier Unit

No need for a manual

11 Segment LED Display
Comparison of the existing 7 segment LED display
and the 11 segment LED display
An 11 segment LED display is integrated in the
compact housing. Alphanumeric characters The 7 segment display The 11 segment display
on existing models on model ZX2
can be read with ease and there is no need to
refer to a manual.

30mm 30mm

31mm 38mm

64mm 72mm

The compact housing stays just as it is

Perform two calculations with ease

Thickness + subtraction mode

The calculated results of two sensor heads are displayed on the amplifier unit by just connecting
the calculating unit between the two amplifier units. The calculation function can be chosen from
the two modes of thickness and subtraction. It is also po possible to prevent mutual interference by
units can be connected.)
coupling via the calculating units. (Up to five amplifier un

Thickness mode Subtraction mode

Sensor 1

A
Sensor 1 0 criterion S
Sensor 2 0 criterion K T
A
B
Sensor 2
B

Thickness T=K+(A+B) Level difference S=B- A

Easy change of setup

Equipped with 4 banks
The amplifier unit is equipped Existing models ZX2
with four bank functions.
Easy change of setup B
B ANK 3
B ANK 2
between four modes is BANAKNK 1
0
supported by just switching
between the bank functions. Amplifier unit
+ Built into the unit
Bank unit

7
 One Sensor for Any Measurement Application

Height/ Height measurements prior Level Shape validation

Length to IC package sealing detection for molded parts

Stable measurements can be performed by the Calculation of the measured values can be carried out
HSDR-CMOS image sensor and Omron’s proprietary and the difference in level can be easily measured by just
algorithm, even for measurements on moving IC connecting the calculating unit between two amplifiers.
packages. Even if the surface conditions of a molded part varies,
application of a line beam and HSDR-CMOS image
sensor results in almost no fluctuation in measured value.

Tray warping measurement

Robot hand Positioning
Warpage before chip baking Positioning

Even if there is temperature variation due to the Stable measurements can be performed by the
ambient temperature, a die-cast is used for the optical HSDR-CMOS image sensor and Omron’ s proprietary
base and so there is almost no fluctuation in algorithm even for robot hand registration.
measured value.

Wafer thickness
PCB double feed detection
Double feed Thickness measurement

Even if the color of the substrate changes, application You can easily measure thicknesses by using
of the HSDR-CMOS image sensor and Omron’ s Regular-reflective Sensor Heads and connecting a
proprietary algorithm results in almost no fluctuation in Calculating Unit between the two Amplifier Units to
measured value. perform calculations.

8
Ordering Information
Units
Sensor Heads [Dimensions ➜ page 14]
Appearance Optical system Beam shape Sensing distance Resolution Model
Line beam 50±10mm ZX2-LD50L 0.5M
1.5µm
40 60
Spot beam ZX2-LD50 0.5M
Diffuse reflective
Line beam 100±35mm ZX2-LD100L 0.5M
5µm
65 135
Spot beam ZX2-LD100 0.5M
48±5mm
Regular reflective Spot beam 43 53
1.5µm ZX2-LD50V 0.5M

Amplifier Units [Dimensions ➜ page 14]

Appearance Power supply Output type Model

NPN ZX2-LDA11 2M
DC
PNP ZX2-LDA41 2M

Accessories (sold separately) These are not included with the Sensor Head or Amplifier Unit. Please order as necessary.
Calculating Unit [Dimensions ➜ page 14]
Appearance Model

ZX2-CAL

Communications Interface Unit [Dimensions ➜ page 14]

Appearance Type Model

RS-232C ZX2-SF11

Sensor Head Extension Cables [Dimensions ➜ page 14]

Cable Length Model

1m ZX2-XC1R

4m ZX2-XC4R

9m ZX2-XC9R

20m ZX2-XC20R
* Extension cables cannot be coupled and used together.

Mounting Brackets [Dimensions ➜ page 15]

Applicable Sensor Heads Appearance Model Contents

ZX2-LD50V
ZX2-LD50L E39-L178
ZX2-LD50
Mounting Bracket: 1
Nut plate: 1
Phillips screws (M3×30): 2
ZX2-LD100L
ZX2-LD100 E39-L179

9
 Specifications
Diffuse-reflective Sensor Heads
Item Model ZX2-LD50L ZX2-LD50 ZX2-LD100L ZX2-LD100
Optical system Diffuse reflective
Light source Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max.
(wave length) EN class 2,FDA class 2*5
Measurement center point 50mm 100mm
Measurement range ±10mm ±35mm
Beam shape Line Spot Line Spot
Beam size *1 Approx. 60µm×2.6mm Approx. 60µm dia. Approx.110µm×2.7mm Approx.110µm dia.
Resolution *2 1.5µm 5µm
±0.05%F.S. (40 to 50mm) ±0.1%F.S. (40 to 50mm) ±0.05%F.S. (65 to 100mm) ±0.1%F.S. (65 to 100mm)
Linearity *3
±0.1%F.S. (entire range) ±0.15%F.S. (entire range) ±0.1%F.S. (entire range) ±0.15%F.S. (entire range)
Temperature characteristic *4 0.02%F.S./°C
Ambient illumination Incandescent lamp: 10,000lx max. (on light receiving side)
Ambient temperature Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute
Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
Degree of protection IEC60529, IP67
Connection method Connector connection (standard cable length: 500 mm)
Weight (packed state) Approx.160g (Sensor Head only: Approx.75g)
Materials Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC
Accessories Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA certification label

Regular-reflective Sensor Head

Item Model ZX2-LD50V
Optical system Regular reflective
Light source (wave length) Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class 1*5
Measurement center point 48mm
Measurement range ±5mm
Beam shape Spot
Beam size *1 Approx. 60µm dia.
Resolution *2 1.5µm
Linearity *3 ±0.3%F.S. (entire range)
Temperature characteristic *4 0.06%F.S./°C
Ambient illumination Incandescent lamp: 10,000lx max. (on light receiving side)
Ambient temperature Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute
Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
Degree of protection IEC 60529, IP67
Connection method Connector connection (standard cable length: 500 mm)
Weight (packed state) Approx.160g (Sensor Head only: Approx.75g)
Materials Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Internal thread: Brass, Cable: PVC
Accessories Instruction sheet, Ferrite core ×1 (made by TDK Corp. ZCAT1730-0730A), Laser warning label (English), FDA certification label
Note) False detection outside the measurement range can occur in the case of an object with high reflectance.
*1. Beam size: Defined as 1/e2 (13.5%) of the central intensity at the smallest value of diameter for the measurement range (typical value)
False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high reflectance in
comparison to the target object.
*2. Resolution: indicates the degree of fluctuation (±3σ) of analog output when connected to the ZX2-LDA.
(The measured value is given for the center distance for OMRON’ s standard target object (diffuse-reflective models: white ceramic object, regular-reflective models:
1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.)
Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy.
Resolution performance may not be satisfied in a strong electromagnetic field.
*3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target object. Linearity and
measured value may vary depending on target object.
F.S. indicates the full scope of the measurement range. (ZX2-LD50 (L): 20mm)
*4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an aluminum jig. (Measured at
the measurement center distance)
*5. These Sensors are classified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under IEC 60825-1 and the regulations of
Laser Notice No. 50 for FDA certification. CDRH registration has been completed.

10
Amplifier Units
Item Model ZX2-LDA11 ZX2-LDA41
Measurement period *1 Min. 30µs
Response time 60µs, 120µs, 240µs, 500µs, 1ms, 2ms, 4ms, 8ms, 12ms, 20ms, 36ms, 66ms, 128ms, 250ms, 500ms
Analog output *2 4 to 20 mA, Max. load resistance: 300Ω, ±5VDC or 1 to 5 VDC, Output impedance: 100Ω
Judgement outputs NPN open-collector outputs, 30 VDC, 50 mA max. PNP open-collector outputs, 30 VDC, 50 mA max.
(HIGH/PASS/LOW: (residual voltage: 1V max. for load current 10mA max., (residual voltage: 1V max. for load current 10mA max.,
3 outputs), error output 2V max. for load current above 10mA) 2V max. for load current above 10mA)
Laser OFF input,
ON: Supply voltage short-circuited
zero reset input, ON: Short-circuited with 0-V terminal or 1.2V or less
or supply voltage within -1.2V
timing input, reset input, OFF: Open (leakage current: 0.1 mA max.)
OFF: Open (leakage current: 0.1 mA max.)
bank input
Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold,
self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch,
Functions
(A-B)calculations *3, thickness calculation *3, mutual interference prevention *3,
laser deterioration detection, bank function(4 banks), differential function
Judgement indicators: HIGH(orange),PASS(green),LOW(orange),11-segment main display(red),11-segment
Indications sub-display(orange),laser ON(green),zero reset(green),enable(green),menu(green),
HIGH threshold(orange),LOW threshold(orange)
Power supply voltage 10 to 30 VDC, including 10% ripple(p-p)
Power consumption 3,000 mW max. (at 24 VDC: 125 mA max., at 12 VDC: 250 mA max.)
Ambient temperature Operating: 0 to +50°C, Storage: -15 to +70°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute
Vibration resistance
(destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
Shock resistance
(destruction) 300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
Degree of protection IEC60529, IP40
Connection method Prewired (standard cable length: 2 m)
Weight (packed state) Approx.200g (Amplifier Unit only: Approx.135g)
Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin,
Materials
Button: Polyacetal, Cable: PVC
Accessories Instruction sheet
*1. In the case of Omron’s standard target object (white ceramic)
*2. Configure current output (4 to 20mA) and voltage output (±5V or 1 to 5V) by MENU mode.
*3. Calculating unit (ZX2-CAL) is necessary. Calculations are possible for two amplifier units. Mutual interference prevention is possible for up to five amplifier units.

Calculating Unit ZX2-series Communications Interface Unit

Item Model ZX2-CAL Item Model ZX2-SF11
Applicable Amplifier Units ZX2-LDA11, ZX2-LDA41 10 to 30 V DC ±10% (including 10% ripple (p-p))
Power supply voltage
(Supplied from Sensor Amplifier.)
12 mA max. (supplied from the Smart
Current consumption 720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.)
Sensor Amplifier Unit)
Power consumption (Not including Sensor Amplifier current consumption or
Operating: 0 to +50°C, storage: -15 to output current.)
Ambient temperature
+70°C (with no icing or condensation)
Applicable Amplifier Units ZX2-LDA@@ (Production after November 2013)
Operating and storage: 35% to 85%
Ambient humidity Sensor Amplifier Unit version: V1.330 or higher
(with no condensation) Applicable Amplifier Unit (The Sensor Amplifier version is shown on the sub-digital
Connection method Connector versions display when the power of the Sensor Amplifier is turned ON.)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 minute Max. No. of Amplifier Units 5
Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude, Port RS-232C (9-pin, D-Sub connector)
(destructive) 80 minutes, each in X,Y,and Z directions
Communications method Full duplex
Shock resistance 300 m/s2 3 times each in six directions
(destructive) (up/down, left/right, forward/backward) Synchronization method Start/stop synchronization
Materials Case: ABS, Display: Methacrylic resin Transmission code ASCII
Commu- Baud rate 38,400 (at shipping)/9,600 bps switchable
Approx. 50g nications
Weight (packed state)
(Calculating Unit only: Approx. 15g) functions Data bit length 8 bits
Accessories Instruction sheet Parity check None
Stop bit length 1 bit
Data Receiving CR or CR + LF is automatically recognized.
delimiter Sending CR + LF fixed
Power supply: green, Sensor communications: green, Sensor
Indicators communications error: red, External terminal communications:
green, External terminal communications error: red
Protective circuits Power supply reverse polarity protection
Operating: 0 to 50ºC, storage: -15 to 60ºC
Ambient temperature
(with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Insulation resistance 20 MΩ min. (at 500 VDC)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min, Leakage current: 10 mA max.
Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate
Accessories Instruction sheet, 2 clamps

11
 Engineering Data (Reference Value)
Angle Characteristic
ZX2-LD50 ZX2-LD50L
Side-to-side Inclination Front-to-back Inclination Side-to-side Inclination Front-to-back Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

Error (%F.S.)
1.0 1.0 1.0 1.0
White ceramic White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber + Inclination Black rubber
0.6 + Inclination 0.6 + Inclination 0.6 + Inclination 0.6

0.4 - Inclination 0.4 0.4 - Inclination 0.4 - Inclination

- Inclination
0.2 0.2 0.2 0.2

0 0 0 0

-0.2 -0.2 -0.2 -0.2

-0.4 -0.4 -0.4 -0.4

-0.6 -0.6 -0.6 -0.6

-0.8 -0.8 -0.8 -0.8

-1.0 -1.0 -1.0 -1.0

-50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50
Angle of inclination (°) Angle of inclination (°) Angle of inclination (°) Angle of inclination (°)
ZX2-LD100 ZX2-LD100L
Side-to-side Inclination Front-to-back Inclination Side-to-side Inclination Front-to-back Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

Error (%F.S.)
1.0 1.0 1.0 1.0
White ceramic White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber Black rubber
0.6 + Inclination 0.6 + Inclination 0.6 + Inclination 0.6 + Inclination

0.4 0.4 0.4 0.4 - Inclination

- Inclination - Inclination - Inclination
0.2 0.2 0.2 0.2

0 0 0 0

-0.2 -0.2 -0.2 -0.2

-0.4 -0.4 -0.4 -0.4

-0.6 -0.6 -0.6 -0.6

-0.8 -0.8 -0.8 -0.8

-1.0 -1.0 -1.0 -1.0

-50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50 -50 -40 -30 -20 -10 0 10 20 30 40 50
Angle of inclination (°) Angle of inclination (°) Angle of inclination (°) Angle of inclination (°)

Linearity Characteristic for Different Materials

ZX2-LD50
0° Inclination -50° Inclination Front-to-back +50° Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

1.0 1.0 1.0

White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber
0.6 0.6 0.6

0.4 0° Inclination 0.4 0.4

-50° Inclination +50° Inclination
0.2 0.2 0.2

0 0 0

-0.2 -0.2 -0.2

-0.4 -0.4 -0.4

-0.6 -0.6 -0.6

-0.8 -0.8 -0.8

-1.0 -1.0 -1.0

-10 -8 -6 -4 -2 0 2 4 6 8 10 -10 -8 -6 -4 -2 0 2 4 6 8 10 -10 -8 -6 -4 -2 0 2 4 6 8 10
FAR side NEAR side FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance Measurement center distance
Displacement (mm) Displacement (mm) Displacement (mm)

ZX2-LD50L
0° Inclination -50° Inclination Front-to-back +50° Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

1.0 1.0 1.0

White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber
0.6 0.6 0.6

0.4 0° Inclination 0.4 0.4

-50° Inclination +50° Inclination
0.2 0.2 0.2

0 0 0

-0.2 -0.2 -0.2

-0.4 -0.4 -0.4

-0.6 -0.6 -0.6

-0.8 -0.8 -0.8

-1.0 -1.0 -1.0

-10 -8 -6 -4 -2 0 2 4 6 8 10 -10 -8 -6 -4 -2 0 2 4 6 8 10 -10 -8 -6 -4 -2 0 2 4 6 8 10
FAR side NEAR side FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance Measurement center distance
Displacement (mm) Displacement (mm) Displacement (mm)

ZX2-LD100
0° Inclination -50° Inclination Front-to-back +50° Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

1.0 1.0 1.0

White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber
0.6 0.6 0.6

0.4 0° Inclination 0.4 0.4

-50° Inclination +50° Inclination
0.2 0.2 0.2

0 0 0

-0.2 -0.2 -0.2

-0.4 -0.4 -0.4

-0.6 -0.6 -0.6

-0.8 -0.8 -0.8

-1.0 -1.0 -1.0

-35 -25 -15 -5 0 5 15 25 35 -35 -25 -15 -5 0 5 15 25 35 -35 -25 -15 -5 0 5 15 25 35
FAR side NEAR side FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance Measurement center distance
Displacement (mm) Displacement (mm) Displacement (mm)

ZX2-LD100L
0° Inclination -50° Inclination Front-to-back +50° Inclination
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)

1.0 1.0 1.0

White ceramic White ceramic White ceramic
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
0.8 SUS304,mirror finish
Black rubber Black rubber Black rubber
0.6 0.6 0.6

0.4 0° Inclination 0.4 0.4

+50° Inclination
-50° Inclination
0.2 0.2 0.2

0 0 0

-0.2 -0.2 -0.2

-0.4 -0.4 -0.4

-0.6 -0.6 -0.6 * The x-axis displacement indicates the measurement

-0.8 -0.8 -0.8 distance displayed by the amplifier unit. The
-1.0 -1.0 -1.0 measurement distance displayed by the amplifier
-35 -25 -15 -5 0 5 15 25 35 -35 -25 -15 -5 0 5 15 25 35 -35 -25 -15 -5 0 5 15 25 35
unit takes the measurement center distance as 0 and
FAR side NEAR side FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance Measurement center distance displays the near-side from the sensor as plus and
12 Displacement (mm) Displacement (mm) Displacement (mm) the far-side as minus.
Angle Characteristic
ZX2-LD50V
Side-to-side Inclination for Flat Mirror Front-to-back Inclination for Flat Mirror Side-to-side Inclination for Silicon Wafer Front-to-back Inclination for Silicon Wafer
Error (%F.S.)

Error (%F.S.)

Error (%F.S.)
3.0 3.0 3.0

Error (%F.S.)
3.0
2.5 -1.0° 0.5° 2.5 -1.0° 0.5° 2.5 -1.0° 0.5° 2.5 -1.0° 0.5°
-0.5° 1.0° -0.5° 1.0° -0.5° 1.0° -0.5° 1.0°
2.0 2.0 10.5° 2.0 10.5°
0° 0° 0° 2.0 0°
+ Inclination + Inclination
1.5 1.5 + Inclination 1.5 1.5 + Inclination
- Inclination - Inclination - Inclination - Inclination
1.0 1.0 1.0 1.0
0.5 0.5 0.5 0.5
0 0 0 0
-0.5 -0.5 -0.5 -0.5
-1.0 -1.0 -1.0 -1.0
-1.5 -1.5 -1.5 -1.5
-2.0 -2.0 -2.0 -2.0
-2.5 -2.5 -2.5 -2.5
-3.0 -3.0 -3.0 -3.0
-5 -4 -3 -2 -1 0 1 2 3 4 5 -5 -4 -3 -2 -1 0 1 2 3 4 5 -5 -4 -3 -2 -1 0 1 2 3 4 5 -5 -4 -3 -2 -1 0 1 2 3 4 5
FAR side NEAR side FAR side NEAR side FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance Measurement center distance Measurement center distance
Displacement (mm) Displacement (mm) Displacement (mm) Displacement (mm)

Side-to-side Inclination for Glass Front-to-back Inclination for Glass

Error (%F.S.)

Error (%F.S.)

3.0 3.0
2.5 -1.0° 0.5° 2.5 -1.0° 0.5°
-0.5° 1.0° -0.5° 1.0°
10.5°
2.0 0° 2.0 0°
+ Inclination
1.5 1.5 + Inclination
- Inclination - Inclination
1.0 1.0
0.5 0.5
0 0
-0.5 -0.5
-1.0 -1.0
-1.5 -1.5
-2.0 -2.0
-2.5 -2.5
-3.0 -3.0
-5 -4 -3 -2 -1 0 1 2 3 4 5 -5 -4 -3 -2 -1 0 1 2 3 4 5
FAR side NEAR side FAR side NEAR side
Measurement center distance Measurement center distance
Displacement (mm) Displacement (mm)

Linearity Characteristic for Different Materials

ZX2-LD50V
0° Inclination
Error (%F.S.)

1.0
Flat Mirror
0.8
Silicon Wafer
Glass
0.6 10.5°
0.4 0° Inclination
0.2

-0.2

-0.4

-0.6

-0.8

-1.0
-5 -4 -3 -2 -1 0 1 2 3 4 5
FAR side NEAR side
Measurement center distance
Displacement (mm)

* The x-axis displacement indicates the measurement

distance displayed by the amplifier unit. The
measurement distance displayed by the amplifier
unit takes the measurement center distance as 0 and
displays the near-side from the sensor as plus and
the far-side as minus.

13
 Dimensions (Unit: mm)

Units
Sensor Heads Reference surface
ZX2-LD50/ZX2-LD50L
ZX2-LD100/ZX2-LD100L (9.7)
ZX2-LD50V
Emitter axis

Mounting Dimensions
Reference surface Two, 3.2-dia.
(Mounting holes)
L* 2-M3
Measurement Reference
9.7 center distance 4 Range Mounting reference
27.5 surface indicator surface
10.1 Emitter 6 4±0.05
axis
10.5 7 4
7 4.8
20.9
Mounting
35.3 A* reference
39.5 surface 43.5±0.05
16.7 Receiver
axis 4.8
Emitter center
Range
15.1 Laser indicator 4±0.05
28.43 warning 31.5±0.05
light
12.6 dia.

29.8 Vinyl insulated round cable, 4.7 dia., 4 conductors

(Conductor cross-section: 0.086 mm2/ Insulator diameter: 0.9 mm)
Standard length: 0.5 m, Minimum bending radius: 30 mm
* In the case of ZX2-LD50 (L), L=50, A=21° Note: Attach the enclosed ferrite core (16.5 dia., length: 30 mm) to
In the case of ZX2-LD100 (L), L=100, A=11.5°
the cable within 100 mm from the Sensor Head.

Amplifier Units
ZX2-LDA11/ZX2-LDA41 11.7 18

Vinyl insulated round cable, 5.2 dia., 11 conductors

(Conductor cross-section: 0.09 mm2/ Insulator diameter: 0.7 mm)
Note: The analog output line (black) has double shielding and
6.2*2 the diameter of the insulator is 2.3 mm.
*1 Maximum height when cover open: 56 (when cover open 84.6)
Standard length: 2 m, Minimum bending radius: 30 mm
*2 Minimum length when connected: 50 47.6 4.2
50
9.6
34.2
16.6
16.9

20.7 36.8 10.9 15.4 6.1

Accessories (sold separately)

Calculating Unit ZX2-series Communications Interface Unit
ZX2-CAL ZX2-SF11 Coupling
Sensor communications indicator (communications operation) connector
Sensor communications indicator (communications error)

24.9

Power supply indicator External terminal

Coupled indicators External terminal communications indicator (communications error) communications indicator
(communications operation)
Coupling connectors
4.2 64.3 4.2
30 3
(336)
12 44.05 (46)
8 9.5
15 31.5

15
3.4 13.2 Vinyl -insulated round cable, 13 36.8
14.4
5.23 dia. Standard length 100 mm 29
2.2
5 36.7 11.7 4.3

(33.1) 11.7

Connector
3 5 6.55

Sensor Head Extension Cables 29.8 L* 28.9 * Length L is as follows.

ZX2-XC1R 12 dia. ZX2-XC1R:1 m, ZX2-XC4R:4 m,
ZX2-XC4R ZX2-XC9R:9 m, ZX2-XC20R:20 m
12.6 dia.
ZX2-XC9R Minimum bending radius: 30 mm
Note: Attach the enclosed ferrite
ZX2-XC20R Amplifier Unit Sensor Head cores (16.5 dia., length: 30 mm)
attachment connector attachment connector within 100 mm of each end of
(female, 6 poles) Vinyl insulated round cable, 4.7 dia. (male, 6 poles)
(ZX2-XC20R, 5.1 dia.) the extension cable.

14
 (Unit: mm)

Mounting Bracket Mounting Bracket

E39-L178 E39-L179
Mounting Bracket Nut plate
Mounting Bracket Nut plate
(36.6) 6
(36.4) 6 31.6 5 2-M3
31.4 5 2-M3 P=0.5
P=0.5 2-R3
2-R3
5
5
3.2 dia.
3.2 dia.
56 54.1 48.1

R48.1
R48

58 54.1 48.1
.1

3.5
3.5
23
23 29.2°(Regular-reflective
Sensor mounting) Material: Stainless steel
24.5°(Regular-reflective Material: Stainless steel (SUS304)
Sensor mounting) (SUS304) 34.7°(Diffuse-reflective
Sensor mounting) Thickness: 2.0 mm
34.7°(Diffuse-reflective Thickness: 2.0 mm
Sensor mounting)
8.8 3.2 14
8.8 3.2 14 12
12 Material: Stainless steel (SUS304)
2 ✕ R3 Thickness: 3.0 mm
3.2
Material: Stainless steel (SUS304)
2 ✕ R3 5.2 16.8 Accessories: Phillips screws (M3×30): 2
3.2 Thickness: 3.0 mm 9.6 Nut plate: 1
5.2 16.8 Accessories: Phillips screws (M3×30): 2 (26.4)
9.6 Nut plate: 1
(26.4)
* Use this Mounting Bracket when installing the ZX2-LD100 (L) as a normal
Diffuse-reflective or Regular-reflective Sensor Head.

Installation Method for Regular-reflective Installation Method for Regular-reflective

Sensor Head Sensor Heads (Installing a Diffuse-reflective
Using a E39-L178 Mounting Bracket: Sensor Head as a Regular-reflective Sensor Head)
(32) Using a E39-L179 Mounting Bracket:
*1 Phillips screws 22.6
(32)
*1 Phillips screws 22.6

Nut plate
Nut plate

10.5° Mounting Bracket

5.75° Mounting Bracket
*2 *2

*1 The measurement distance reference *1 The measurement distance reference

position is the end of the Mounting Bracket.
position is the end of the Mounting Bracket.
*2 For the Regulalr-reflective Sensor Heads, *2 For the IInstalling a Diffuse-reflective Sensor
rotate the Sensor Head counterclockwise, as a Regular-reflective Sensor, rotate the
secure it in place, and then perform any Sensor Head counterclockwise, secure it in
necessary fine adjustments. place, and then perform any necessary fine
adjustments.

Note: When securing the Sensor Head in the Mounting Note: When securing the Sensor Head in the Mounting
Bracket, insert the screws into the side of the Bracket, insert the screws into the side of the
Sensor Head where the warning label is located Sensor Head where the warning label is located
and secure the Sensor Head into place. and secure the Sensor Head into place.

Not Using a Mounting Bracket:

Tilt the Sensor Head towards the workpiece as shown below.

ZX2-LD50V
79.4±0.05
Measurement
center distance

(43.85)

workpiece
(19.85) Adjust the installation so that the angle
is 10.5° ±0.1°.
* The mounting hole dimensions in
10.5°±0.1° parentheses (reference values) are for
when the Sensor is installed at 10.5°.

15
 (Unit: mm)

Installation Method for Diffuse-reflective Sensor Heads

Using a E39-L178, E39-L179 Mounting Bracket: Not Using a Mounting Bracket:

Mount the Sensor Head in relation to the workpiece as shown below.

(32)
*1 Phillips screws 22.6

L* 31.5
Nut plate ±0.05
Measurement
center distance

39.5±0.05
Mounting Bracket

4.0
workpiece ±0.05

*1 The measurement distance reference position is

the Sensor’s sensing surface.

Note: When securing the Sensor Head in the Mounting

Bracket, insert the screws into the side of the * ZX2-LD50 (L): 50
Sensor Head where the warning label is located ZX2-LD100 (L): 100
and secure the Sensor Head into place.

OMRON Corporation Industrial Automation Company Authorized Distributor:

Tokyo, JAPAN
Contact : www.ia.omron.com

Regional Headquarters
OMRON EUROPE B.V. OMRON ELECTRONICS LLC
Sensor Business Unit One Commerce Drive Schaumburg,
Carl-Benz-Str. 4, D-71154 Nufringen, Germany IL 60173-5302 U.S.A.
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199 Tel: (1) 847-843-7900/Fax: (1) 847-843-7787

OMRON (CHINA) CO., LTD. © OMRON Corporation 2010 All Rights Reserved.
OMRON ASIA PACIFIC PTE. LTD.
Room 2211, Bank of China Tower, In the interest of product improvement,
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
200 Yin Cheng Zhong Road, specifications are subject to change without notice.
Alexandra Technopark,
Singapore 119967 PuDong New Area, Shanghai, 200120, China CSM_11_1_0315 Printed in Japan
Tel: (65) 6835-3011/Fax: (65) 6835-2711 Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200 Cat. No. E406-E1-03 1013(0711)