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Shanghai Cixi Instrument Co., Ltd

Manifold Gas Flow Controller/meter

Operating Instructions

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1. product description

1.1 Uses and features

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas.
They play an important role in scientific research and production in various fields such as
semiconductors and integrated circuit industries, special materials disciplines, chemical industry,
and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications
include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching,
sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction
devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other
analytical instruments

1.2 Main Specifications

1 Flow range: （0~5，10,20,30,50,100,200,300,500...）SCCM

（0~1,2,3,5,10,50,100,200,500...） SLM
2 Accuracy ±1.5%F.S
3 Linearity ±0.5~1.5%F.S
4 Repeatability ±0.2%F.S
5 Responding time Electrical characteristics:10sec gas characteristics ：
（1~4）sec
6 Differential pressure range 0.1~0.5MPa
7 Max pressure 3MPa
8 Working temperature 0~70℃
9 Digital value RS485 MODBUS
10 Analog value DC 0~5V
11 Power supply DC +15V，flow meter＜400mA，flow controller＜600mA
12 Electrical connection DB15
13 Leakage rate 1×10-8SCCSHe
14 Material of base 316L Stainless steel
15 Seal material FKM，nitrile butadiene rubber，chloroprene rubber
16 Glad hand Φ3，Φ6，Φ10，1/8〞,1/4〞，3/8〞
note:
The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2).
The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min)
Standard state stipulates: temperature -----273.15K (0℃);
Pressure -----101325 Pa(760mm Hg）
F.S (Full Scale); Full-scale value

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1.3 Working principle

The excellent accuracy, robustness and reliability of the CX series gas mass
flow controllers stem from our unique sensor probes. The sealed probe consists of
two sensing elements - speed sensor and temperature sensor, which can
automatically correct the influence caused by the change of temperature and pressure.
The meter circuit heats the speed sensor to a constant value higher than the gas
temperature, and then measures the cooling effect of the gas flow. The flow is
calculated under the principle that measuring electric power consumed which used to
maintain a constant temperature difference, which is proportional to the mass flow of
the gas. Both sensors are standard platinum resistance temperature detectors (RTD).
Platinum RTD wire is wrapped around a solid ceramic core, firm and reliable. The
entire sensor is sealed in a 316 stainless steel packing case.

Picture(3)Working principle diagram

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2. Quick installation guidance

2.1 Shape and installation dimensions

图三、CX Dimensions of mass flow controller

2.2 Form of gladhand

stack nut Back Ferrule Front ferrule splice

Picture(4)Installation diagram of double ferrule splice

As shown in picture 4, when installing the splice, after installing the front ferrule, back ferrule, and
nut, tighten the nut and the splice by hand, then tighten with a wrench (The imported Swagelok
splice requires a 1.25-turn wrench to tighten.) to ensure air tightness. Note that double wrench
should be used, with one wrench stuck in the joint and the other to turn the nut. Especially when
removing the nozzle, double wrench must be used, otherwise it will cause loosening of the joint
and affect the sealing.

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2.3 Cable connection plug

Picture(5) ±15VDC Power supply diagram

Picture(6) 24VDC Power supply diagram

3. Functional operation details

3.1 start-up operation
Check that there should be no leakage at the connection of each equipment, the
temperature and pressure of the gas source should be stable, and the circuit should
be connected correctly according to the product instructions.

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3.2 Connecting with Flow Display Instrument
After the start-up operation, the valve switch of the flow indicator is set to the "off"
position, the setting value is set to zero, then the air is turned on. After the zero is
stabilized, the valve control position is turned on, and then the setting value is
adjusted to the required flow value, then the actual flow value will change with the
setting value.

3.3 Shutdown Operation

First set the value to zero, then cut off the air circuit, and then power off.

4.Attention

4.1 Adding filter

The use of gas must be purified, avoid dust, liquids and oil. If necessary, install a
filter. If a liquid source bottle is connected to the outlet of the flowmeter, install a
one-way valve at the outlet of the flowmeter to prevent the liquid from flowing back
and damaging the flowmeter.

4.2 Use for corrosive gases

The materials used for the flowmeter channel are: SUS 316L (00Cr17Ni14Mo2),
SUS 417J1 (00Cr30Mo2), fluorine rubber and other corrosion resistant materials.
It can be used to control general corrosiveness when other users use corrosive
gas and organic solvent gas under the condition that the user's system has no
soda, low leakage, diligence, and good use. It should be stated at the time of
ordering. With special corrosive gases, all sealing materials must be changed
accordingly

4.3 Installation position

The controller is best installed to maintain the level of the installation surface,
but not particularly sensitive to the location, can be installed at any position, if
the zero offset is found when installing in non-horizontal position, you can
adjust the zero point after work.

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4.4 Valve sealing

The valve of the mass flow controller is a regulating valve, not a shut-off valve, and
cannot be used as a shut-off valve. The user should be equipped with a shut-off valve.
In particular, when users use corrosive gases, a shut-off valve should normally be
added to the inlet and outlet ports of the mass flow controller to ensure work safety.
After long-term work, if the leakage rate of the controller valve port is within 2%F.S, it
is normal. If the leak is greater than 2% of full scale, service should be performed.

4.5 Calibration and conversion of different gases

The flow meter is usually calibrated by nitrogen (N2). If other gas calibration is
required, special orders should be made with the salesperson when ordering.

When users of flow controllers calibrated with nitrogen use other gases, they
can be converted by the conversion factor of the appendix.

5.General anomaly judgment and treatment

Phenomenon Possible reasons treatment methods

The air source is not open Connect the gas source and open
and the air is not accessible the gas path
Didn’t set the target flow Reference detailed operation 3.4
No air flow after
Filter clogging Change the filter
power on
Control valve failure Check the valve
Circuit failure Repair circuit
Zero deviation Reference detailed operation 3.4
Sensor failure Change sensor
Circuit failure Repair circuit
Flow control
Valve pollution Clean the valve,change the seal
unstable
The pressure of the gas Improve gas source pressure and
source is too low or unstable. stabilize gas source pressure
When the valve is Control valve failure Check the valve
closed, there is High inlet pressure Reduce inlet pressure
still a larger flow. Channel clogging Clean MFC channel
Set target flow below full
Display can’t Check the set target flow
scale
reach full scale
Other circuit faults Repair circuit
Zero instability at Circuit faults Repair circuit
no flow Sensor failure Change sensor

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6.Guarantee, warranty and service

6.1 Product assurance and warranty

6.1.1 The MFC/MFM products produced by our company are within two years of
shipment. If the user is used according to the instructions, and the product has not
suffered physical damage, pollution, modification or refurbishment, we guarantee the
quality of the material, processing and performance of the product. If there is a
problem, the product will be repaired free of charge.
6.1.2 After receiving the goods, the user has the responsibility to check and check the
goods and to inform the Sales Department of the company in a timely manner by fax,
telephone or e-mail.
6.1.3 During the warranty period, the product must be repaired by the company or
authorized service center, otherwise, the warranty of the product is invalid.
6.1.4 The maintenance is free of charge within one year's warranty. If the warranty is
over, users will be informed of the components and maintenance costs that need to be
replaced before maintenance. After repair, the repair part is guaranteed within 90 days.
The warranty includes vulnerable parts (such as Teflon or seal ring).
6.1.5 Users who have used toxic, contaminated or corrosive gas products will not be
responsible for repair or warranty if they are not shown to clear the pollution and clean
the treatment.

6.2 Requirements for the use of warranty

6.2.1 The gas must be clean and free of particulate matter and liquid. This requires the
installation of <30 M filter in the upstream gas path of MFC/MFM.
6.2.2 The input gas pressure must conform to the product's withstand voltage standard
and should not exceed the maximum pressure required by the product.
6.2.3 The gas used in the product must be compatible with the sealing material
selected by the user. The user is responsible for using each gas according to the
applicable safety regulations. Incorrect use of the product will make the warranty
invalid. The damage caused by incorrect use can not be attributed to the company.
6.2.4 Requirements for electronic circuits: we must carefully connect the wiring of the
system according to the regulations. Incorrect wiring will cause permanent damage to
the internal circuit boards of the products. MFC power supply needs high voltage
interference less than 5mV voltage regulator.
6.2.5 Connection of gas path: the sealing fittings must be carefully installed to ensure
that all sealing pipes are inspected individually and without scratches.
6.2.6 It is forbidden to disassemble MFC/MFM on its own. If the damage is caused by
self dismantling, the warranty promised by the company is invalid.

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Appendix: Gas flow conversion factor

specific
Gas code Density（g/L0℃） Change rate
heat(Calorie /g℃）
Air 008 0.2400 1.2930 1.006
Ar 004 0.1250 1.7837 1.415
AsH3 035 0.1168 3.4780 0.673
BBr3 079 0.0647 11.1800 0.378
BCl3 070 0.1217 5.2270 0.430
BF3 048 0.1779 3.0250 0.508
B2H6 058 0.5020 1.2350 0.441
CCl4 101 0.1297 6.8600 0.307
CF4 063 0.1659 3.9636 0.420
CH4 028 0.5318 0.7150 0.719
C2H2 042 0.4049 1.1620 0.581
C2H4 038 0.3658 1.2510 0.598
C2H6 054 0.4241 1.3420 0.481
C3H4 068 0.3633 1.7870 0.421
C3H6 069 0.3659 1.8770 0.398
C3H8 089 0.3990 1.9670 0.348
C4H6 093 0.3515 2.4130 0.322
C4H8 104 0.3723 2.5030 0.294
C4H10 111 0.4130 2.5930 0.255
C5H12 240 0.3916 3.2190 0.217
CH3OH 176 0.3277 1.4300 0.584
C2H6O 136 0.3398 2.0550 0.392
C2H3Cl3 112 0.1654 5.9500 0.278
CO 009 0.2488 1.2500 1.000
CO2 025 0.2017 1.9640 0.737
C2N2 059 0.2608 2.3220 0.452
Cl2 019 0.1145 3.1630 0.858
D2 014 1.7325 0.1798 0.998
F2 018 0.1970 1.6950 0.931
GeCl4 113 0.1072 9.5650 0.267
GeH4 043 0.1405 3.4180 0.569
H2 007 3.4224 0.0899 1.010
HBr 010 0.0861 3.6100 1.000
HCl 011 0.1911 1.6270 1.000
HF 012 0.3482 0.8930 1.000
HI 017 0.0545 5.7070 0.999
H2S 022 0.2278 1.5200 0.844

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He 001 1.2418 0.1786 1.415
Kr 005 0.0593 3.7390 1.415
N2 013 0.2468 1.2500 1.000
Ne 002 0.2464 0.9000 1.415
NH3 029 0.5005 0.7600 0.719
NO 016 0.2378 1.3390 0.976
NO2 026 0.1923 2.0520 0.741
N2O 027 0.2098 1.9640 0.709
O2 015 0.2196 1.4270 0.992
PCl3 193 0.1247 6.1270 0.358
PH3 031 0.2610 1.5170 0.691
PF5 143 0.1611 5.6200 0.302
POCl3 102 0.1324 6.8450 0.302
SiCl4 108 0.1270 7.5847 0.284
SiF4 088 0.1692 4.6430 0.348
SiH4 039 0.3189 1.4330 0.599
SiH2Cl2 067 0.1472 4.5060 0.412
SiHCl3 147 0.1332 6.0430 0.340
SF6 110 0.1588 6.5160 0.264
SO2 032 0.1489 2.8580 0.687
TiCl4 114 0.1572 8.4650 0.206
WF6 121 0.0956 13.2900 0.215
Xe 006 0.0397 5.8580 1.415

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