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Non-Contact Displacement Sensors

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0% found this document useful (0 votes)
65 views36 pages

Non-Contact Displacement Sensors

Na

Uploaded by

Vishal Raj Giri
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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1D Displacement Sensors

General Catalogue
CL / LK-G Series

Non-contact Displacement Sensors

1D
Displacement
Sensors

CL-3000 Series
1.02

1.01

-0.99

-0.98
-8 -6 -4 -2 0 2 4 6 8

LK-G5000 Series
1.5
0.75
0
-0.75
-1.5
-8 -6 -4 -2 0 2 4 6 8

1D Laser Displacement Sensors General Catalogue


Select from a wide range of sensors designed
to meet any application requirements

High-Accuracy Model
CL-L(P)030
Ultra High-Accuracy Model
CL-L(P)015
Compact ø8 Model
CL-L(P)007

5.5 - 8.5 mm

13.7 - 16.3 mm

26.3 - 33.7 mm

Range
0 (mm)

Thickness Width Height and Gap and


Height Difference Clearance

2
Displacement
Sensors

Extremely
Long-Range Model
LK-G502/507

Long-Range Model
LK-H152/157
Mid-Range Model
CL-L(P)070

60 - 80 mm

110 - 190 mm

250 - 1000 mm

Warpage and Runout and Stroke Positioning


Flatness Vibration

3
1D Displacement Sensor and
Measurement System Advanced Lineup
Capable of any kind of measurement

CCD Laser Surface Scanning Laser


Displacement Sensor Confocal Displacement Meter
LK-G3000 Series LT-9000 Series

KEYENCE is recognised as an important industry partner around the world

Global Network Direct Sales Network


in Your Sales Local

230 Offices 46 Countries Engineer Specialized Product Expert


KEYENCE Direct

DIRECT SUPPORT

Quick Response!

Customer

4
Displacement
Sensors

Laser
Displacement Sensor
LK-G5000 Series

Confocal
Displacement Sensor
CL-3000 Series

Direct Support Same Day Shipping


All From On-Site Product Demonstrations With most items in stock, received orders can ship the
KEYENCE Application Sample Testing same day, reducing your overhead costs and losses due
Direct Phone & On-Site Support to work stoppage.

Comprehensive
Support

After-Sales Direct
Selection Adoption Support
Customer

5
Confocal Displacement Sensors
CL-3000 Series

Compact and Stable


Displacement Sensor

Measurement principle
To spectrometer
Multi-colour confocal method To sensor head
Sensor Head
Large area, high-accuracy measurement Receiving

using an ultra-high brightness multi-colour Wavelengths of light that


pass through the pinhole

transmitter light source vary by refraction point.


Only the light at
wavelengths that best

Multi-colour light is generated by using a blue laser to irradiate match the focal point
passes through the
a fluorescent element that emits red and green light pinhole.

simultaneously. The emitted light is more stable and of higher


Short
brightness over a wider range of wavelength bands compared Transmitting Range
Red

to typical white LEDs. This ensures there are sufficient light Transmits light at Medium
Green
Range
varying focal
levels at all points in the measurement range, allowing for
distances for each
higher accuracy. Long
wavelength. Blue
Range

6
Displacement
Sensors

Ultra-compact and lightweight head


1 makes installation easy

Stable detection without any laser


2 dead angles

High-precision measurement on any


3 material or surface

❚ Typical white LED transmitter light source ❚ Multi-colour transmitter light source

Narrow wavelength Wide wavelength


band for high- band for high-
brightness light brightness light
emission emission

Low received light


Received light is
intensity at range
sufficient at any
edges
position

7
Confocal Displacement Sensors
CL-3000 Series

Ultra-compact and lightweight head makes


installation easy
Measurement of HDD vibration and step measurement

Multiple heads are lined up for use in measurement and calculation. Multiple heads can be installed in small spaces, thanks to the head size
of just ø8 mm.

Small form factor, at just 1/50th of the conventional size


Designed with only the lens inside the head, the sensor is reduced to
1/50th the size of conventional systems. To meet the increasing need
for miniaturisation of manufacturing equipment, the CL Series offers
easy installation while eliminating space restrictions. Conventional laser ø8 mm
displacement sensor Compact Head

Size versus
conventional
units

1/50th

8
Displacement
Sensors

Coaxial measurement that enables stable detection


without any laser dead angles
Profile measurement of metallic parts Thickness measurement of plastic bottles

Measurement is possible even if dead angles cause only a portion Measurement of the thickness at several points of plastic bottles
of the reflected light to be returned. Mounting direction of the head after blow moulding.
has no effect.

No dead angles on step heights or Accurate measurement even on


uneven surfaces transparent and mirrored surfaces
Measurements are not impacted by head installation direction or Measurement without positional misalignment even when
travel direction thanks to the coaxial multi-colour confocal method. measurement height varies on transparent or mirrored items,
thanks to the coaxial multi-colour confocal method.

❚ Conventional laser displacement sensor ❚ CL Series ❚C


 onventional laser displacement sensor ❚ CL Series

Misalignment of position for No measurement misalignment


measurement due to height

9
Confocal Displacement Sensors
CL-3000 Series

High-precision in any environment

Brake-disc runout measurement

Previously, a dial gauge was used to measure surface runout.


The use of a non-contact laser displacement sensor enables a 100% inspection to be performed.

Meets IP67 dust and water resistance standards


Can be used without worries even in processing areas with frequent
water spray, thanks to its high water-resistant performance.

*Measurement may become unstable due to light refraction if lens is fully covered by
water or oil.
*CL-PT010 meets IP64 standard.

10
Displacement
Sensors

Measuring sealant coating height Measurement of BGA ball profile

Measure the height of sealant coating. Maintaining a uniform By using a head with a wide aperture angle, reflected light from
coating height enables the coating amount to be similarly uniform. angled surfaces can also be picked up, allowing for stable
measurement.

A cable enclosure that can withstand Real-time trend graph


harsh manufacturing conditions
The flexible metal tubing around the cable protects the fragile Fluctuations in measurement values are displayed in real time.
fibres from tensile loads and bending. Measurement values and wave forms can be displayed easily with
a simple USB connection.

* Can be extended to a maximum of 30 m.

11
Confocal Displacement Sensors
CL-3000 Series

High-precision measurement on any material

Electrode thickness measurement

After the electrodes have been coated, measure the thickness while the coating is still wet.
Installing multiple units crosswise enables thickness to be controlled at shorter intervals.

Quad processing system for


accurate measurement, even on
rough surfaces Stable measured values

Light is focused into four points within the measurement spot and Unique calculation processing

the reflected light from each point is received onto its own CMOS.
The reliability of measured values is quantified from the reflected Reliability ▶ High Low High Low
light, and stable, accurate measurements are calculated using
unique processing that eliminates influence from extremely small
CMOS CMOS CMOS CMOS
bumps and divots.

Spectrometer

12
Displacement
Sensors

Roll crown measurement ECU marking accuracy measurement

Perform non-contact measurement of the polished roller's crown Check parallelism and lifting when ECUs are assembled.
amount. Can provide stable measurement even when the mirror This prevents connection faults and cracking of components.
surface conditions are different.

High-precision measurement on High accuracy on translucent targets


curved, transparent, or mirrored targets
The wide angle aperture of the confocal sensor allows the Capable of high-accuracy measurement even on PCBs,
CL Series to accurately measure curved or angled targets where translucent liquids and other targets that absorb light.
only small amounts of light are reflected back from the target.

Pinhole
Exceptional
angle Displacement (mm) Only the light
characteristics reflected off of the
even on glossy 1.5
target's top surface
0.75
surfaces is measured
0
-0.75
-1.5
-8 -6 -4 -2 0 2 4 6 8
Position (mm)

Measurement is possible even with


partially received light

13
Confocal Displacement Sensors
CL-3000 Series

High-precision measurement of any profile

Gear profile measurement

Measurements that previously used a contactor to slowly rotate the gear can now be performed without any contact.
Inspection takt time is greatly reduced.

Improved compatibility with equipment


❚ Encoder Unit ❚ Communication Unit

Enables measurement by synchronising with the target's position. The product lineup covers a wide variety of communication
Uses a unitary design with a direct connection to the controller for formats, and includes dedicated units.
simple synchronisation.

Encoder unit

Encoder

* EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

14
Displacement
Sensors

Connector lead inspection Inside pipe diameter measurement

Stable measurement is possible thanks to a unique algorithm, Measure the inner diameter of pipes without contact. Utilisation of
even when faced with differences in reflectance and profile a jig with an angled mirror allows for measurement even in
resulting from multiple connections. locations with no space for installation.

Resistant against multiple Optical axis curve technique using


reflections a mirror
Because it is not impacted by irregular or multi-reflection light, If there is no space above the sensor head, or measurement of
high accuracy measurements are possible for reflective or angled the inner surface of a hole is desired, an angled mirror jig can be
surfaces such as those on the connector pins of IC chips. used.

Typical Example : No quad processing


Example jig Measurement Image Charts
: With quad processing
0.2
Measured values (mm)

0.1

-0.1

-0.2
-2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5

Position (mm)

15
Confocal Displacement Sensors
CL-3000 Series

A new proposal for measurement of thickness


Thickness measurement from both sides

Measurement of film thickness of a transparent object CL-PT010


Accurately differentiates reflected light from different surfaces to measure transparent films and coatings as thin as 15 µm.

Spot diameter Transparent


Received light waveform
3.5 µm object thickness
15 µm ~
Angle
Received light

characteristics ±45°

Surface
-50 -40 -30 -20 -10 0 10 20 30 40 50

Back surface Height (µm)

16
Displacement
Sensors

Synchronised measurement between all sensor heads allows


for measurement without positional misalignment
Synchronised measurement is possible since one controller
operates all sensor heads. Accuracy of sheet thickness
measurement is improved without the need for difficult PLC
programming.

The sensor head's design avoids heat generation, enabling


high-accuracy measurement
The heat generated by conventional laser displacement sensors causes thermal distortion of the jig, making them susceptible to
measurement errors resulting from optical axis misalignment. The CL Series is designed with a structure that places the lens as
the only part inside the scanner head. Since there are no electronic parts generating heat, there is no distortion of the jig on
which the sensor head is mounted. This is the ideal for high-accuracy measurement.

❚ Conventional laser displacement sensor (Image) ❚ Sensor head 10 minutes after powering on (Image Figure)

Before scanner head heat generation After scanner head heat generation Conventional laser displacement sensor CL Series

+8 °C +0 °C

Easy installation with adjustable fixture and an optical-axis


alignment function
With conventional laser measurement sensors, optical axis alignment, which is critical for achieving high-accuracy thickness
measurement, is challenging to configure. With the CL Series, anyone can manage the precise optical-axis alignment easily by
using the optical-axis alignment function included in the PC software combined with the adjustable fixture for thickness
measurement.

17
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000/3000 Series

Capability for every application and


abundant reliability

Measurement principle
Triangulation method
RS-CMOS

Technology to achieve With a new optical design that doubles the

even greater accuracy number and width of the pixels on the CMOS,
high accuracy measurement is achieved.

When the target position is changed,


the light receiving position on the Conventional Pixel width is doubled
product
RS-CMOS moves, and by detecting Designed to maximise
RS-CMOS spot diameter (width)
this, the displacement of the target on the pixel.
can be measured. LK-H085
Number of pixels is
Target Measurement
doubled
range
Conventional
product

18
Displacement
Sensors

World's Fastest Sampling and


1 Stable Detection

Measurement of large targets is


2 possible at long range

HDE lens ABLE II

The newly developed HDE lens with spot The amount of light received, which is directly
binding on the photodetector minimises the related to measurement accuracy, is optimised
effect of aberrations. through the control of laser emission time, laser
power and CMOS gain.

No delta cut With delta cut


Compared to Compared to Compared to
RS-CMOS RS-CMOS
Focal Focal conventional conventional conventional
point is point is product product product
misaligned sharp

The inbound light filter


disrupts the alignment
of the light to the
photoreceptor
High-accuracy HDE lens
Inbound light filter
3times 4times 8times
Not aligned with RS-CMOS Aligned with RS-CMOS Dynamic range Laser emission time High-speed tracking
Resolution capability

19
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000/3000 Series

World's Fastest Sampling and Stable Detection

Measurement of green tire run out

Measurement via 392 kHz high-speed sampling.


Stable measurement is possible even when the target is black and rotating at high speed.

High-speed processing system


The processing system features a circuit design that
allows for multiple separate processes such as wave
form processing and measurement value
calculations to be performed in parallel

When high speed sampling is used, the light receiving time per
sample is shortened, so it is necessary to amplify the signal.
High speed sampling is achieved by performing parallel
processing within the sensor head from received light wave form
processing to measurement value calculation.

20
Displacement
Sensors

Engine vibration testing

Suited to measurement of targets that are light, high temperature or which pose challenges to the attachment of accelerometers.
Because high speed sampling of up to 392 kHz is possible, measurement of high amplitude vibration is also possible.

Multi-head connections
Supports 12 head connection & field network
Main Controller Head expansion unit
Connecting a head expansion unit to the main controller allows for
simultaneous measurement with a maximum of 12 heads.
EtherNet/IPTM, PLC Link, CC-Link and DeviceNetTM field networks
are also supported. Programless PLC communication is possible.

*
PLC Link
Maximum of 12 head connections

*Cannot use EtherNet/IP™ or PLC Link interfaces when a CC-Link unit or DeviceNet™
unit has been installed.

21
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000/3000 Series

Measurement of large targets is possible at long range

Measurement of vehicle body height during running tests

This is a unique laser displacement sensor that combines measurement of distance from the ground and high speed sampling.
Calculation is performed within the controller, and left/right balance is also confirmed.

Long range measurement


up to a maximum 1 m LK-G3000 Series
The model lineup also includes long range types which can Representative example when using LK-G long range head
provide stable measurement of various aspects, including colour,
: White ceramic
materials and surface conditions and they are compatible with a : Metallic hairline
: Black rubber
variety of applications. 0.5

0.4

0.3
Linearity error (mm)

0.2

0.1

-0.1

-0.2

-0.3

-0.4
-0.5
-250 mm 0 250 mm

22
Displacement
Sensors

Height measurement during the forging process Catenary measurement of steel plate

Because it can be isolated from the equipment, it is possible to The catenary angle can be measured immediately before entry
measure the height of the steel immediately after extrusion. into the furnace, allowing for control of variations in the
characteristics of the steel plate.

Measurement in high temperature Aluminium die cast body


environments
Because it is possible to measure through glass, measurement By combining the lens and laser affixing holder with the case,
when carrying out air supply-based anti-heat measures is thermal fluctuations and deterioration due to aging can be
possible. minimised.

Air supply

Air exhaust Heat-resistant case


(Ceramic is the most
appropriate material)
Heat-resistant transparent glass

* There are cases where this may be insufficient in environments of several hundred °C.

23
Confocal Displacement Sensors
CL-3000 Series
Product Line-Up & Options

Head Compact ø8 Model Ultra High-Accuracy Model High-Accuracy Model Mid-Range Model Profile Measurement Model
Types CL-L007/CL-P007 CL-L015/CL-P015 CL-L030/CL-P030 CL-L070/CL-P070 CL-PT010

Measurement
range
70 ±10 mm
Measurement Measurement
range range
30 ±3.7 mm 10 ±0.3 mm
[mm] Measurement
100
range
15 ±1.3 mm
Measurement
range
80
7 ±1.5 mm

60

40

60 mm
20
26.3 mm
5.5 mm 13.7 mm 70 mm 9.7 mm
7 mm 15 mm 30 mm
0 10 mm
8.5 mm 16.3 mm 33.7 mm 80 mm 10.3 mm

Quad type Spot type Quad/Spot type Quad/Spot type Quad/Spot type Spot type
Linearity
±2.1 μm ±0.96 μm ±0.49 μm ±0.94 μm ±2.2 μm ±0.22 μm
(Standard)
Linearity
±0.91 μm ±0.55 μm ±0.41 μm ±0.72 μm ±2.0 μm ±0.2 μm
(High precision)

Quad type Spot type


Eliminates the influence of extremely Reliably detects fine targets using an
small bumps and divots with a quad ultra-small beam spot of ø3.5 µm at
processing system. Allows for stable minimum. Ideal for profile measurement.
measurement.
Spot size Spot size
Position Thickness Appearance Height difference

Height Run-out Warpage Ultra small

CL-L007 CL-L015 CL-L030 CL-L070 CL-P007 CL-P015 CL-P030 CL-P070 CL-PT010


Spot diameter ø750 µm ø300 µm ø500 µm ø600 µm Spot diameter ø50 µm ø25 µm ø38 µm ø50 µm ø3.5 µm

Device Configuration List

■ Controllers

Controller Expansion Relay unit Encoder EtherCAT®


CL-3000 unit CL-H200 unit unit
CL-H100 CL-E100 CL-EC100

■ Units ■ Cables

Optical units Head extension Expansion Display panel USB cable for RS-232C
CL-L(P)007N cable cable cable PC connection cable
CL-L(P)015N CL-C5 (5 m) CL-AC1 (1 m) OP-88281 (3 m) OP-51580 OP-96368
CL-L(P)030N CL-C10 (10 m) CL-AC2 (2 m) OP-88282 (10 m)
Ethernet Dsub 9-pin
CL-L(P)070N CL-C30 (30 m)
cable connector
CL-PT010N
OP-66843 OP-26401

■ Display ■ Optional Parts


Head fixtures Adjustable fixture for
Display
For CL-L(P)015/030/070: OP-88283 thickness measurement
panel
for CL-L(P)015/030/070:
CL-D500 For CL-L(P)007: OP-88353/OP-88354/OP-88355
For CL-PT010: OP-88289 OP-88284/OP-88285/
OP-88286

24
Displacement
Sensors

System Configuration

Sensor Head Connections: With Two Units

PC

Ethernet, USB

Optical unit Optical unit


EtherCAT® Encoder
I/O,
unit unit Controller
CL-L(P)xxxN CL-L(P)xxxN
EtherNet/IPTM,
PROFINET, CL-EC100* CL-E100* CL-3000
PLC-Link,
Ethernet,
RS-232C
PLC
Sensor head

EtherCAT®

Programmable Encoder

Sensors, Other
Display Panel
CL-D500
Head extension cable (5, 10, 30 m) (max 30 m)
Display Panel Cable (3 m, 10 m)

* CL-E100 and CL-EC100 units cannot be connected simultaneously.

Sensor Head Connections: With Six Units

Optical unit Optical unit Head extension cable (5, 10, 30 m)


Expansion Relay unit CL-L(P)xxxN CL-L(P)xxxN (max 30 m)
cable CL-H200
CL-AC1/
CL-AC2

PC Sensor head

Ethernet, USB

PLC Optical unit Optical unit


Relay unit CL-L(P)xxxN CL-L(P)xxxN
CL-H200
I/O, EtherNet/IPTM,
PROFINET, PLC-Link,
Ethernet, RS-232C
Sensor head
EtherCAT®
Programmable
Encoder Sensors, Other

Optical unit Optical unit


EtherCAT® Encoder Expansion
unit unit Controller unit CL-L(P)xxxN CL-L(P)xxxN
CL-EC100* CL-E100* CL-3000 CL-H100

Sensor head
Display Panel
CL-D500

Expansion cable
Display Panel Cable (3 m, 10 m) CL-AC1/CL-AC2

* CL-E100 and CL-EC100 units cannot be connected simultaneously.

25
Confocal Displacement Sensors
CL-3000 Series
Specifications
Sensor Heads and Optical Units
Quad type
Head CL-L007 CL-L015 CL-L030 CL-L070
Model*1
Optical unit CL-L007N CL-L015N CL-L030N CL-L070N
Reference distance 7 mm 15 mm 30 mm 70 mm
Reference Measurement range ±1.5 mm ±1.3 mm ±3.7 mm ±10 mm
measurement range Linearity*2*3 ±2.1 µm (±1.95 µm) ±0.49 µm (±0.36 µm) ±0.94 µm (±0.81 µm) ±2.2 µm (±2.0 µm)
High precision Measurement range ±0.5 mm ±0.5 mm ±1.0 mm ±3.0 mm
measurement range Linearity*2*3 ±0.91 µm (±0.78 µm) ±0.41 µm (±0.28 µm) ±0.72 µm (±0.59 µm) ±2.0 µm (±1.9 µm)
Resolution*3*4 0.25 µm (0.015 µm) 0.25 µm (0.003 µm) 0.25 µm (0.015 µm) 0.25 µm (0.025 µm)
Spot diameter ø750 µm ø300 µm ø500 µm ø600 µm
Laser class Optical unit Class 1
Sampling cycle 100/200/500/1000 µs (Adjustable 4-stage)
Enclosure
Head IP67 (IEC60529)
rating

Ambient operating illuminance Target surface illuminance 30,000 lux (Incandescent lamp)

Operating ambient
0 to 50°C
Environmental temperature
resistance
Operating ambient
20% RH to 85% RH (no condensation)
humidity
Vibration Head 10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
resistance Optical unit 10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
Shock resistance 15G 6 ms
Temperature Head 0.005% of F.S. / °C
characteristic Optical unit 0.015% of F.S. / °C
Head SUS Front: SUS Rear: Aluminium
Material
Optical unit Polycarbonate
Head Approx. 140 g Approx. 180 g Approx. 200 g Approx. 280 g
Weight
Optical unit Approx. 1600 g
*1 Sensor head and optical unit are a matched pair. Not cross compatible. *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Values in parentheses are for models subject to export control. Model designations end with (G), not (N).
*4 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

Focused spot type


Head CL-P007 CL-P015 CL-P030 CL-P070 CL-PT010
Model*1
Optical unit CL-P007N CL-P015N CL-P030N CL-P070N CL-PT010N
Reference distance 7 mm 15 mm 30 mm 70 mm 10 mm
Reference Measurement range ±1.5 mm ±1.3 mm ±3.7 mm ±10 mm ±0.3 mm
measurement range Linearity*2*3 ±0.96 µm (±0.83 µm) ±0.49 µm (±0.36 µm) ±0.94 µm (±0.81 µm) ±2.2 µm (±2.0 µm) ±0.22 µm (±0.11 µm)
High precision Measurement range ±0.5 mm ±0.5 mm ±1.0 mm ±3.0 mm ±0.15 mm
measurement range Linearity*2*3 ±0.55 µm (±0.43 µm) ±0.41 µm (±0.28 µm) ±0.72 µm (±0.59 µm) ±2.0 µm (±1.9 µm) ±0.2 µm (±0.09 µm)
Resolution*3*4 0.25 µm (0.015 µm) 0.25 µm (0.003 µm) 0.25 µm (0.015 µm) 0.25 µm (0.025 µm) 0.25 µm (0.001 µm)
Spot diameter ø50 µm ø25 µm ø38 µm ø50 µm ø3.5 µm
Laser class Optical unit Class 1
Sampling cycle 100/200/500/1000 µs (Adjustable 4-stage)
Enclosure
Head IP67 (IEC60529) IP64 (IEC60529)
rating

Ambient operating illuminance Target surface illuminance 30,000 lux (Incandescent lamp)

Operating ambient
0 to 50°C
temperature
Environmental Operating ambient
20% RH to 85% RH (no condensation)
resistance humidity
10 to 57 Hz, double
amplitude 0.45 mm
Vibration Head 10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes
2 hours each for X, Y,
resistance and Z axes
Optical unit 10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
Shock resistance 15G 6 ms
Temperature Head 0.005% of F.S. / °C 0.1% of F.S. / °C
characteristic Optical unit 0.015% of F.S. / °C 0.015% of F.S. / °C
Head SUS Front: SUS Rear: Aluminium
Material
Optical unit Polycarbonate
Head Approx. 140 g Approx. 180 g Approx. 200 g Approx. 280 g Approx. 1100 g
Weight
Optical unit Approx. 1600 g
*1 Sensor head and optical unit are a matched pair. Not cross compatible. *2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Values in parentheses are for models subject to export control. Model designations end with (G), not (N).
*4 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface). (Value measured with 4096 average cycles on CL-PT010/CL-PT010G only.)

Expansion cable Sensor head extension cable


Model CL-AC1 CL-AC2 Model CL-C5 CL-C10 CL-C30
Length 1m 2m Length 5m 10 m 30 m
Weight 200 g 400 g Weight 450 g 850 g 2500 g

26
Displacement
Sensors

Controller
Model CL-3000*1*3
Number of optical unit connections Controller only: 2 units; using expansion units/relay units: 6 units
Supports cyclic communication and message communication; RPI: 1 to 10,000 ms (0.5 ms units)
EtherNet/IPTM Maximum number of connections: 8, complies with Version.CT14 conformance test
Cannot be used when using PROFINET, PLC link or EtherCAT®
PROFINET Compatible with conformance class A. Cannot be used when using EtherNet/IPTM, PLC link or EtherCAT®
The following PLCs are supported:
PLC-Link Mitsubishi Electric: MELSEC iQ-R Series, iQ-F Series, Q Series, L Series, FX Series
Cannot be used when using EtherNet/IPTM, PROFINET or EtherCAT®
Interface Allows for measurement data output and control I/O via no-protocol command communication with PCs and PLCs
Ethernet*4
100Base-TX, capable of communication with CL-NavigatorN
USB*4 Conforms to USB 2.0 HighSpeed, capable of communication with CL-NavigatorN
Allows for measurement data output and control I/O via no-protocol command communication with PCs and PLCs
RS-232C
Baud rate: 9600 to 115,200 bps, data length: 8 bit, stop bit: 1 bit, parity: none/even numbers/odd numbers
Terminal (IN) 13 (supports function switching via software)
Terminal (OUT) 11*2 (supports function switching via software)
Power voltage 24 VDC ±10%
Ratings Maximum current
With 1 optical unit connected: 0.86 A, with 4 optical units connected: 3.3 A, with 6 optical units connected: 4.5 A
consumption
Operating ambient
0 to 50°C
temperature
Environmental
resistance Operating ambient humidity 20% RH to 85% RH (no condensation)
Vibration resistance 10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes
Monitor/Setting support software CL-NavigatorN*3
Weight Approx. 600 g
*1 For optical units with model names ending in (N). *2 Positive common connection is supported for NPN input devices, and negative common connection for PNP input devices.
*3 Models subject to export control: CL-3050/CL-NavigatorG. *4 Sample DLL and LabVIEW programs are available. Contact your local sales office for details.

Expansion Unit and Relay Unit


Model CL-H100 CL-H200
Number of optical unit connections Supports two CL-H200 expansion units Supports two optical unit connections
Operating ambient
0 to 50°C
Environmental temperature
resistance Operating ambient
20% RH to 85% RH (no condensation)
humidity
Weight Approx. 300 g

Encoder Unit
Model CL-E100
Number of encoder axes Incremental method (A/B/Z phase)
Minimum encoder input time 100 ns to 20 µs
Maximum current consumption 0.18 A
Service power supply 5 VDC ±10%, maximum power supply 200 mA
Input terminal Compatible with NPN/PNP open collector output (5 V/12 V/24 V). Compatible with line driver output
Environmental Operating ambient temperature 0 to 50°C
resistance Operating ambient humidity 20% RH to 85% RH (no condensation)
Weight Approx. 300 g

EtherCAT® Unit CL-NavigatorN OS environment


Model CL-EC100 Item Required Environment
Conforming standard IEEE802.3u (100BASE-TX) Supported OS Windows® 10*1 / Windows® 7*2
Communication speed 100 Mbps (100BASE-TX) CPU Celeron Dualcore 1.7 GHz or higher
Communication period Shortest 125 µs Memory capacity 4 GB or more
Connection cable STP/UTP cable, category 5e or above Required free space on hard disk 1 GB or more
Inter-node distance 100 m Display resolution XGA (1024×768 pixels) or higher
EtherCAT® Communications port RJ45 × 2 *1 Home, Pro and Enterprise Editions are supported.
communication Process Data Object (PDO) communication *2 Home Premium, Professional and Ultimate Editions are supported.
specifications* (Cyclic communication: Process data • Windows® and Excel are either registered trademarks or trademarks of Microsoft
communication) Corporation in the United States and/or other countries.
Service Data Object (SDO) communication • Model subject to export control: CL-NavigatorG.
Supported functions (Non-cyclic communication: Mailbox
communication)
CoE Display panel
Distributed Clock
Explicit Device Identification Model CL-D500
Ambient temperature 0 to 50°C Minimum display unit 0.001 µm
Environmental
resistance Operating ambient humidity 20% RH to 85% RH (no condensation) Display range ±999.999 µm to ±9999.99 mm

Weight Approx. 330 g Display cycle Approximately 10 times/second


TM Environmental Operating ambient temperature 0 to 50°C
* Cannot be used when using EtherNet/IP , PROFINET or PLC Link.
• Cannot be used simultaneously with an encoder unit. resistance Operating ambient humidity 20% RH to 85% RH (no condensation)
Weight Approx. 100 g

27
Confocal Displacement Sensors
CL-3000 Series
Dimensions Units: mm

Sensor heads
-0.01
ø14.8 82.5 85 ±5 40
ø8 Compact Model ø8 -0.07 ø7

CL-L007/P007
3
7.5
13.5
19.2
48.7 1750 ±30

Head Fixture A 12 12 Mounting hole Head Fixture B 10.5 6.5 Head Fixture C Mounting hole
R6.5
OP-88353 ø0.025 A OP-88354 R8
4-C2 OP-88355 9.8
ø4.4
M4×0.7
32
ø8 +0.1 (0.2)
ø10 12.1 ø8 8.5
23.4 8.5
+0.005
ø10 ø4.2 +0.200
ø8 +0.005
C1.5 6.3 11.1
6 16.3 16.3 11
7.8 45°±1°
t = 5 mm or more
5 R3.8 15 3.5 13.9 12
6
0.5 to 1.0* A M4×0.7
5.5 to 11.3*
*Processing Material: SUS303
ø8
accuracy: ±0.05

0
ø15 -0.05 ø14.8 82.5 85 ±5 40
ø8 ø7
Ultra High-Accuracy 0 Head Fixture
ø26
Model -0.05

OP-88283
CL-L015/P015 6.5
20
14.9

31
54
83.3 1750 ±30

0
ø15 -0.05 ø14.8 82.5 85±5 40
ø8 ø7
High-Accuracy ø29
0
-0.05
Model 22.5 +0.05
14.9
CL-L030/P030 8
24.2 2×M4
15 0

43.8
Effective
67
96.3 1750 ±30 screw
Depth: 6
2×ø4.5 20
ø46
ø45 ø8 30
ø28.95 Counterbore
0
ø15 -0.05 ø14.8 82.5 85±5 40 Depth: 4 12
ø8 ø7
Mid-Range 0
ø46 -0.05
Model 37
CL-L070/P070 10.5
14.9 25

26.6
30.9 8 17
36.7 22
48.5
53.5
84.5
107.7
137 1750 ±30

0
ø61 -0.05 ø58
ø36
ø12 ø14.8 82.5 85±5 40
ø7
Profile Measurement ø53.8
Model ø43.3
CL-PT010 14.9
2×ø5.5
2.5
6
15 27.5
25
51.8 Head Fixture
52.8
102.5 OP-88289 70
128.6 4
148.7 7.5
C25
178.4 1750 ±30 C25

78
72.5
39
Units ø61.05
+0.05
0
78 15
Optical unit Controller 40

CL-L(P)007N/L(P)015N/L(P)030N/
Controller Display Panel
L(P)070N/PT010N
CL-3000 CL-D500
15 Panel
142 137.9 Thickness Panel
62 mounting
13.1 0.5 to 5 13
65 115.4 46 ring

DIN-rail DIN-rail
mounting mounting
position position
91 80 74.5
143
124
36.1 36.1

8.5
62.2 62.2
25
6 6 Minimum
62
Panel Cutting
Dimensions
+0.6
75 0

Minimum
100 +0.6
45 0

28
Displacement
Sensors

Controller

26.3 26.3
Expansion unit 85 115 Relay unit 90 115

CL-H100 DIN-rail
CL-H200 DIN-rail
mounting mounting
position position

124 124
36.1 36.1

62.2 62.2

6 6

26.3 14.2 26.3


Encoder unit 115.3 EtherCAT® 115

CL-E100 DIN-rail
unit DIN-rail
mounting CL-EC100 mounting
position
position

124 124
36.1 36.1

62.2 62.2

6 6

Optional Parts Cables


28×ø4.5
98
70
Adjustable Head extension cable
Fixture for CL-C5/C10/C30
10×6=60
Thickness
Measurement 80 *A=5 m, 10 m, 30 m
10
OP-88284 80±20 A 155±20
5 70
For CL-L(P)015 70 5
(32)
90
ø8
ø10.5
30
25

Light source unit side Sensor head side 14


32
73

13 8
100 (79) 100

28×ø4.5 98
70 Expansion cable
Adjustable CL-AC1/AC2
Fixture for 10×6=60

Thickness 80
11.5
Measurement 10

OP-88285 5 70 70 5
ø7.2
Cable length (CL-AC1: 1 m, CL-AC2: 2 m)
For CL-L(P)030 90
ø12.5

29.6
60
41 32
42

73

13 8

100 (134) 100

28×ø4.5 98
70

Adjustable
Fixture for 10×6=60

Thickness 80

Measurement 10

OP-88286 5 70 70 5
For CL-L(P)070 90

140
73

13 8

100 (296) 100

29
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000/3000 Series
Head Lineup
Spot type Spot Wide Spot Wide Spot Wide Spot Wide
Head Types LK-H022 LK-H027 LK-H052 LK-H057 LK-H082 LK-H087 LK-H152 LK-H157

Measurement
range
150 ±40 mm

[mm]
250 Measurement
range
80 ±18 mm
200
Measurement
range
50 ±10 mm
150 Measurement
range
20 ±3 mm
100
110 mm

50 62 mm
40 mm 150 mm
17 mm 80 mm
50 mm
0 20 mm
23 mm 60 mm 98 mm 190 mm

Repeatability 0.02 μm 0.025 μm 0.1 μm 0.25 μm


Linearity ±0.02% of F.S. (F.S. = 6 mm) ±0.02% of F.S. (F.S. = 20 mm) ±0.02% of F.S. (F.S. = 36 mm) ±0.02% of F.S. (F.S. = 80 mm)
Beam spot dimensions ø25 μm 25 × 1400 μm ø50 μm 50 × 2000 μm ø70 μm 70 × 2500 μm ø120 μm 120 × 4200 μm
*Please contact KEYENCE for more information on products with reference distance ranges of 150 mm or more.

Head Lineup / Transparent/mirror target measurement

Spot type Spot Wide Spot Wide Spot Wide Spot Wide Spot Wide

Head Types LK-H008 LK-H008W LK-H022K LK-H027K LK-H052K LK-H057K LK-H082 LK-H087 LK-H152 LK-H157
+ LK-F3 + LK-F3 + LK-F2 + LK-F2

Measurement
range
Measurement 147.5 mm
range +24.4 mm
Measurement −39.5 mm
[mm] Measurement range 76.7 mm
Measurement +14.5 mm
250 range
range 46.3 mm −17.6 mm
8 ±0.5 mm 16.1 mm ±5.2 mm
200
±2.8 mm
150

100
108 mm
50 59.1 mm
7.5 mm 13.3 mm 41.1 mm
147.5 mm
8 mm 16.1 mm 46.3 mm 76.7 mm
0
8.5 mm 18.9 mm 51.5 mm 91.2 mm 171.9 mm
Repeatability 0.005 μm 0.02 μm 0.025 μm 0.1 μm 0.25 μm
Linearity ±0.05% of F.S. (F.S. = 1 mm) ±0.02% of F.S (F.S. = 6 mm) ±0.02% of F.S. (F.S. = 20 mm) ±0.02% of F.S. (F.S. = 36 mm) ±0.02% of F.S. (F.S. = 80 mm)
Beam spot dimensions ø20 μm 20 × 550 μm ø25 μm 25 × 1400 μm ø50 μm 50 × 2000 μm ø70 μm 70 × 2500 μm ø120 μm 120 × 4200 μm
*Please contact KEYENCE for more information on products with reference distance ranges of 150 mm or more.

30
Displacement
Sensors

Head Lineup
Spot type Spot Wide Spot Wide Spot Wide Spot Wide Spot Wide Spot Wide Spot Wide
Head Types LK-G08 – LK-G10 LK-G15 LK-G32 LK-G37 LK-G82 LK-G87 LK-G152 LK-G157 LK-G402 LK-G407 LK-G502 LK-G507

Measurement
range
500 mm
+500 mm
–250 mm

[mm]
1200

Measurement
1000 range
Measurement 400 ±100 mm
range
800 150 ±40 mm 250 mm

Measurement
Measurement Measurement Measurement range
600
range range range
80 ±15 mm 500 mm
8 ±0.8 mm 10 ±1 mm 30 ±5 mm
400

300 mm
200
110 mm
7.2 mm 9 mm 25 mm 65 mm 400 mm
8 mm 10 mm 30 mm 80 mm 150 mm
0
8.8 mm 11 mm 35 mm 95 mm 190 mm 500 mm 1000 mm

Repeatability 0.01 μm 0.01 μm 0.05 μm 0.2 μm 0.5 μm 2 μm 2 μm


±0.05% of F.S.
(–250 mm to +250 mm)
Long Distance
±0.05% of F.S. ±0.03% of F.S. ±0.05% of F.S. ±0.05% of F.S. ±0.05% of F.S. ±0.05% of F.S. ±0.1% of F.S.
Linearity (–250 mm to +500 mm)
(F.S.=1.6 mm) (F.S.=2 mm) (F.S.=10 mm) (F.S.=30 mm) (F.S.=80 mm) (F.S.=200 mm) High-precision range
±0.02% of F.S.
(–250 mm to –50 mm)
(F.S.=500 mm)
Beam spot 20 × 30 × 70 × 120 × 290 × 300 ×
ø20 μm – ø20 μm ø30 μm ø70 μm ø120 μm ø290 μm ø300 μm
dimensions 500 μm 850 μm 1100 μm 1700 μm 8300 μm 9500 μm

Product Lineup & Options


■ Controllers ■ Display

Built-in type Separate display type Additional head unit CC-Link unit DeviceNetTM unit Touch panel Compact
LK-G5001(P)V LK-G5001(P) LK-HA100 LK-CC100 LK-DN100 display display
LK-HD1001 LK-HD500

■ Cables ■ Configuration Software


Sensor head-to- Sensor head-to- Controller-to-display I/O Cable and
controller cable controller connection cable Connector
(0.7, 2, 5, 10, 20, 30 m) extension cable LK-Navigator2
0.33 m : OP-84427 OP-51657
(5, 10 m) LK-H2
CB-Axx 3 m: OP-51655
CB-AxxE Ethernet cable
10 m: OP-51656
OP-66843

Controllers Dimming filter ■ Neutral density filter


OUTPUT For the LK-G3x/LK-G8x Neutral density filter for the
Type LK-H08x
NPN PNP LK-F1 LK-F3
ALL-in-one LK-G3001V LK-G3001PV For the LK-G15x/LK-G40x/LK-G50x Neutral density filter for the
Separate Display LK-G3001 LK-G3001P LK-F2 LK-H15x
LK-F2

31
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000 Series
Sensor heads
Coarse target measurement (wide spot type)
Model LK-H008W LK-H025 LK-H027 LK-H055 LK-H057 LK-H085 LK-H087 LK-H155 LK-H157
Mounting mode Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
Reference distance 8 mm 20 mm 20 mm 50 mm 50 mm 80 mm 80 mm 150 mm 150 mm
Measurement range*1 ±0.5 mm ±3 mm ±3 mm ±10 mm ±10 mm ±18 mm ±18 mm ±40 mm ±40 mm
Red semiconductor laser
Light source

Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2
class FDA (CDRH) Part 1040.10 Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II
Output 0.3 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW
Spot diameter (at reference distance) 20 μm × 550 μm 25 μm × 1400 μm 50 μm × 2000 μm 70 μm × 2500 μm 120 μm × 4200 μm
±0.05% of F.S. ±0.02%of F.S. ±0.02% of F.S. ±0.02% of F.S. ±0.02% of F.S.
Linearity*2
(F.S. = 1 mm) (F.S. = 6 mm) (F.S. = 20 mm) (F.S. = 36 mm) (F.S. = 80 mm)
Repeatability* 3
0.005 μm (0.001 μm) 0.02 μm (0.01 μm) 0.025 μm 0.1 μm 0.25 μm
Sampling cycle 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable)
0.02% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C
Temperature fluctuation
(F.S. = 1 mm) (F.S. = 6 mm) (F.S. = 20 mm) (F.S. = 36 mm) (F.S. = 80 mm)
Enclosure rating IP67
Environment resistance

Incandescent lamp or
Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max. fluorescent lamp:
5000 lux max.
Ambient temperature 0 to +50°C*4 0 to +50°C 0 to +50°C*4
Relative humidity 35 to 85%RH (No condensation)
Vibration resistance 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Material Aluminium die-cast
Weight Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g

*1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W)
is measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured at
the reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the
sampling cycle to 200 µs. *4 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. • Please contact KEYENCE for more information on Class 3B model sensor heads.

Fine target measurement (focused spot type)


Model LK-H008 LK-H020 LK-H022 LK-H050 LK-H052 LK-H080 LK-H082 LK-H150 LK-H152
Mounting mode Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
Reference distance 8 mm 20 mm 20 mm 50 mm 50 mm 80 mm 80 mm 150 mm 150 mm
Measurement range*1 ±0.5 mm ±3 mm ±3 mm ±10 mm ±10 mm ±18 mm ±18 mm ±40 mm ±40 mm
Red semiconductor laser
Light source

Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2
class FDA (CDRH) Part 1040.10 Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II Class IIIa Class II
Output 0.3 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW 4.8 mW 0.95 mW
Spot diameter (at reference distance) ø20 μm ø25 μm ø50 μm ø70 μm ø120 μm
±0.05% of F.S. ±0.02% of F.S. ±0.02% of F.S. ±0.02% of F.S. ±0.02% of F.S.
Linearity*2
(F.S. = 1 mm) (F.S. = 6 mm) (F.S. = 20 mm) (F.S. = 36 mm) (F.S. = 80 mm)
Repeatability*3 0.005 μm (0.001 μm) 0.02 μm (0.01 μm) 0.025 μm 0.1 μm 0.25 μm
Sampling cycle 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable)
0.02% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C
Temperature fluctuation
(F.S. = 1 mm) (F.S. = 6 mm) (F.S. = 20 mm) (F.S. = 36 mm) (F.S. = 80 mm)
Enclosure rating IP67
Environment resistance

Incandescent lamp or
Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max. fluorescent lamp:
5000 lux max.
Ambient temperature 0 to +50°C*4 0 to +50°C 0 to +50°C*4
Relative humidity 35 to 85%RH (No condensation)
Vibration resistance 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Material Aluminium die-cast
Weight Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g

*1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is
measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured at the
reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling
cycle to 200 µs. *4 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. • Please contact KEYENCE for more information on Class 3B model sensor heads.

Transparent/mirror target measurement (specular reflection type)


Model LK-H008 LK-H008W LK-H022K LK-H027K LK-H052K LK-H057K LK-H082 LK-H087 LK-H152 LK-H157
Mounting mode Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection*4 Specular reflection*4
Reference distance 8 mm 8 mm 16.1 mm 16.1 mm 46.3 mm 46.3 mm 76.7 mm 147.5 mm
Measurement range*1 ±0.5 mm ±0.5 mm ±2.8 mm ±2.8 mm ±5.2 mm ±5.2 mm −17.6 mm to +14.5 mm −39.5 mm to +24.4 mm
Red semiconductor laser
Light source

Wavelength 655 nm
Laser IEC 60825-1 Class 1 Class 2
class FDA (CDRH) Part 1040.10 Class II
Output 0.3 mW 0.95 mW
Spot diameter (at reference distance) ø20μm 20 μm × 550 μm ø25 μm 25 μm × 1400 μm ø50 μm 50 μm × 2000 μm ø70 μm 70 μm × 2500 μm ø120 μm 120 μm × 4200 μm
Linearity* 2
±0.05% of F.S. (F.S. = 1 mm) ±0.02% of F.S. (F.S. = 6 mm) ±0.02% of F.S. (F.S. = 20 mm) ±0.02% of F.S. (F.S. = 36 mm) ±0.02% of F.S. (F.S. = 80 mm)
Repeatability* 3
0.005 μm (0.001 μm) 0.02 μm (0.01 μm) 0.025 μm 0.1 μm 0.25 μm
Sampling cycle 2.55/5/10/20/50/100/200/500/1000 μs (9 steps selectable)
Temperature fluctuation 0.02% of F.S./°C (F.S. = 1 mm) 0.01% of F.S./°C (F.S. = 6 mm) 0.01% of F.S. (F.S. = 20 mm) 0.01% of F.S. (F.S. = 36 mm)*6 0.01% of F.S. (F.S. = 80 mm)*6
Enclosure rating IP67
Environment resistance

Incandescent lamp or
Ambient light Incandescent lamp or fluorescent lamp: 10000 lux max.
fluorescent lamp: 5000 lux max.
Ambient temperature 0 to +50°C* 5
0 to +50°C 0 to +50°C*5
Relative humidity 35 to 85% RH (No condensation)
Vibration resistance 10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Material Aluminium die-cast
Weight Approx. 240 g Approx. 230 g Approx. 260 g Approx. 280 g Approx. 300 g

*1 Measurement range when the sampling cycle is 20 μs or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/
LK-H008W) is measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/
LK-H008W) is measured at the reference distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging
measurements set to 65536 and the sampling cycle to 200 μs. *4 Use one of the following dark filters when measuring a transparent or mirror surface object: LK-H082/LK-H087: LK-F3, LK-H152/LK-H157: LK-F2
*5 When the ambient temperature rises to 40°C or more, mount this on a metal plate before use. *6 Value measured at the event of diffuse reflection installation. Please contact us for the case of regular reflection
installation.

32
Displacement
Sensors

Controller / Head expansion unit


Single unit type LK-G5001V LK-G5001PV
Model LK-HA100
Separate type LK-G5001/LK-HD500 LK-G5001P/LK-HD500
Designation Controller Head expansion unit
Sensor head compatibility Compatible
No. of connectable sensor heads 2 1
Minimum display unit 0.001 µm
Display
Display range ±999.999 μm to ±9999.99 mm (7 settings selectable) N/A
(LK-HD500)
Display cycle Approx. 10 times/sec.
Either the display unit (LK-HD500) or
Display Display port N/A
dedicated touch panel (LK-HD1001) can be connected
interface
LED indicator LASER ON POWER ON, STABILITY, BRIGHT, DARK
Analogue voltage output ±10 V output, Output impedance: 100 Ω
Analogue current output 4 to 20 mA, Maximum load resistance: 350 Ω
No. of analogue outputs 2 1
TIMING1 input*1 Non-voltage input Voltage input
Terminal RESET1 input*1
block Auto-zero1 input*1 Non-voltage input Voltage input
Laser control input*2 N/A
Laser remote input Non-voltage input
Alarm output
NPN open-collector output PNP open-collector output
Pass/Fail Output
TIMING input Non-voltage input Voltage input
RESET input
Auto-zero input
Non-voltage input Voltage input
Expansion Program switch input
N/A
connector Binary selection input
Alarm output
Comparator output NPN open-collector output PNP open-collector output
Binary output
Baud rate: 9600 to 115200 bps
RS-232C interface
Data length: 8 bits Stop bit length: 1 bit Parity: None/even/odd
N/A
USB interface USB 2.0 Hi-Speed compliant*3
Ethernet interface*4 100Base-TX/10Base-T
Cyclic communication (Implicit messaging)
Message communication (Explicit messaging), UCMM and Class3
EtherNet/IPTM interface*5 N/A
Number of connections: 32
Conformance test: conforms to Version.CT14
The following PLCs are supported:
PLC-Link Mitsubishi Electric: MELSEC iQ-R Series, iQ-F Series, Q Series, L Series, FX Series
EtherNet/IP™, CC-Link, and DeviceNet™ cannot be used in conjunction with PLC-Link
Head expansion unit connector Up to 10 head expansion units can be connected to one controller
Either of the CC-Link unit (LK-CC100) or
Expansion unit connector N/A
DeviceNetTM unit (LK-DN100) can be connected
Power supply voltage 24 VDC±10% 24 VDC±10% (Supplied from the controller)
Power supply Maximum current
0.6 A or less with 1 head/3.5 A or less with 12 heads
consumption
When one or less head expansion unit is connected: 0 to 50°C
Environment Ambient temperature
When two or more head expansion units are connected: 0 to 40°C
resistance
Relative humidity 35 to 85%RH (No condensation)
Weight Approx. 600 g Approx. 300 g
*1 This input is applied to all of the synchronised OUT.
*2 When the laser class 3B head is connected, a key-operated switch must be used for the input to this terminal. The laser is emitted only when the key-operated switch is set to the ON position.
(Select a key which can be removed only when it is set to the OFF position.) When the laser class 2/3R head is connected, the laser turns on when this terminal is opened and turns off when it is
short-circuited.
*3 When a PC supporting USB 1.1 or USB 2.0 full speed is connected, the data refresh cycle and other operations may slow down.
*4 Use the Ethernet interface only for direct connections with a PC or for local network connections with a PC or LK-G5000 Series units.
• NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• PNP open-collector output rating: 50 mA max. (30 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Voltage input rating: Maximum input rating: 26.4 V, ON voltage: 10.2 V, OFF current: 0.6 mA
• Part of the input/output circuit of the LK-G5000 Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential
difference between the cables/external devices.
For details, refer to "Precautions on wiring" in the User's Manual.
*5 Cannot use EtherNet/IPTM interface when mounting a CC-Link or DeviceNetTM unit.
Controllers shipped from 03/23/2018 onward are compatible with EtherNet/IPTM.

Head-to-controller cable
Model CB-A07 CB-A2 CB-A5 CB-A10 CB-A20 CB-A30
Cable length 0.7 m 2m 5m 10 m 20 m 30 m
Weight Approx. 100 g Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g

Extension cable between the head and controller cable


Model CB-A5E CB-A10E
Cable length 5m 10 m
Weight Approx. 400 g Approx. 750 g

33
Ultra-High-Speed/High-Accuracy Laser Displacement Sensor
LK-G3000 Series
Head
Model LK-G08 LK-G10/G15 LK-G32/G37 LK-G82/G87
Mounting mode – – Diffused reflection Specular reflection Diffuse reflection Specular reflection
Reference distance 8 mm 10 mm 30 mm 23.5 mm 80 mm 75.2 mm
Measuring range*1 ±0.8 mm ±1 mm ±5 mm ±4.5 mm ±15 mm ±14 mm
Red semiconductor laser
Wavelength 655 nm (visible light)
Class II (FDA (CDRH) Part 1040.10), Class II (FDA (CDRH) Part 1040.10),
Light source Laser Class
Class 1 (IEC 60825-1) Class 2 (IEC 60825-1)
Output 0.3 mW 0.95 mW
Spot diameter (at reference Approx. 20 × 500 µm (G15), Approx. 30 × 850 µm (G37), Approx. 70 × 1100 µm (G87),
Approx. ø20 µm
distance) Approx. ø20 µm (G10) Approx. ø30 µm (G32) Approx. ø70 µm (G82)
±0.05% of F.S. ±0.03% of F.S. ±0.05% of F.S. ±0.05% of F.S.
Linearity*2
(F.S.= ±0.8 mm) (F.S. = ±1 mm) (F.S. = ±5 mm) (F.S. = ±15 mm)
Repeatability*3 0.02 µm (0.01 µm) 0.05 µm*4 0.2 µm*4
Sampling time 20/50/100/200/500/1000 µs (Selectable from 6 levels)
Near the centre of the measurement: Green lights, Within the measurement area: Orange lights,
LED display
Outside the measurement area: Orange flashing
0.02% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C 0.01% of F.S./°C
Temperature characteristics
(F.S. = ±0.8 mm ) (F.S. = ±1 mm ) (F.S. = ±5 mm) (F.S. = ±15 mm)
Enclosure rating – IP67 (IEC60529)
Ambient luminance Incandescent lamp or fluorescent lamp: 10000 lux max.
Ambient temperature +10 to 40°C 0 to 50°C
Relative humidity 35 to 85%, No condensation
Vibration resistance 10 to 55 Hz, double amplitude 1.5 mm (0.75 mm for LK-G08); two hours in each direction of X, Y, and Z
Material Aluminium Aluminium die-cast
Weight (including the cable) Approx. 245 g Approx. 190 g Approx. 280 g Approx. 380 g

Model LK-G152/G157 LK-G402/G407 LK-G502/G507


Mounting mode Diffuse reflection Specular reflection Diffused reflection Specular reflection Diffused reflection Specular reflection
Reference distance 150 mm 147.5 mm 400 mm 398 mm 500 mm 497.5 mm
Measuring range*1 ±40 mm ±39 mm ±100 mm ±99 mm -250 to +500 mm -249 to +498 mm
Red semiconductor laser
Wavelength 655 nm (visible light)
Light source Laser Class Class II (FDA (CDRH) Part 1040.10), Class 2 (IEC 60825-1)
Output 0.95 mW
Spot diameter (at reference Approx. 120 × 1700 µm (G157), Approx. 290 × 8300 µm (G407) Approx. 300 × 9500 µm (G507)
distance) Approx. ø120 µm (G152) Approx. ø290 µm (G402) Approx. ø300 µm (G502)
±0.05% of F.S. ( ±250 µm)*5*6 -250 to +250 mm
<high-accuracy range> ±0.02% of F.S. ( ±100 µm)
Linearity*2 ±0.05% of F.S. (F.S. = ±40 mm) ±0.05% of F.S.(F.S. = ±100 mm) -250 to -50 mm
<long range> ±0.1% of F.S. ( ±500 µm)
-250 to +500 mm (F.S. = ±250 mm)
Repeatability*3 0.5 µm*4 2 µm
Sampling time 20/50/100/200/500/1000 µs (Selectable from 6 levels)
Near the centre of the measurement: Green lights, Within the measurement area: Orange lights,
LED display
Outside the measurement area: Orange flashing
0.01% of F.S./°C 0.01% of F.S./˚C 0.01% of F.S./˚C
Temperature characteristics
(F.S. = ±40 mm) (F.S. = ±100 mm) (F.S. = ±250 mm)
Enclosure rating IP67 (IEC60529)
Ambient light Incandescent lamp or fluorescent lamp: 5000 lux max.
Ambient temperature 0 to 50°C
Relative humidity 35 to 85%, No condensation
10 to 55 Hz, double amplitude
10 to 55 Hz, double amplitude 1.5 mm;
Vibrations resistance 1.5 mm (0.75 mm for LK-G08);
two hours in each direction of X, Y, and Z
two hours in each direction of X, Y, and Z
Material Aluminium die-cast
Weight (including the cable) Approx. 290 g Approx. 380 g
*1 The value is obtained by measuring KEYENCE’s standard target (ceramic).
LK-G08: When the sampling rate is 20 µs, the value becomes +0.37 (FAR side) to -0.8 mm (NEAR side).
LK-G10/G15: When the sampling rate is 20 µs, the value becomes +0.37 (FAR side) to -1 mm (NEAR side).
LK-G32/G37: When the sampling rate is 20 µs, the value becomes +1.8 (FAR side) to -5 mm (NEAR side) for diffuse reflection, and +1.6 (FAR side) to -4.5 mm (NEAR side) for specular reflection.
LK-G82/G87: When the sampling rate is 20 µs, the value becomes -9 (NEAR side) to -15 mm (NEAR side) for diffuse reflection, and -8.7 (NEAR side) to -14 mm (NEAR side) for specular reflection.
LK-G152/G157: When the sampling rate is 20 µs, the value becomes -22 (NEAR side) to -40 mm (NEAR side) for diffuse reflection, and -22 (NEAR side) to -39 mm (NEAR side) for specular
reflection.
<LK-G407/G402>
When the sampling rate is 20 µs, the value becomes -70 mm (NEAR side) to -100 mm (NEAR side) for diffuse reflection.
When the sampling rate is 20 µs, the value becomes -70 mm (NEAR side) to -99 mm (NEAR side) for specular reflection.
<LK-G507/G502>
When the sampling rate is 20 µs, the value becomes -230 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection.
When the sampling rate is 20 µs, the value becomes -230 mm (NEAR side) to -249 mm (NEAR side) for specular reflection.
When the sampling rate is 50 µs, the value becomes -125 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection.
When the sampling rate is 50 µs, the value becomes -125 mm (NEAR side) to -249 mm (NEAR side) for specular reflection.
*2 The value is obtained by measuring KEYENCE’s standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCE’s standard(SUS) with 4096 times of averaging at the reference distance. The value in parenthesis is the typical repeatability obtained by measuring
the target with 16384.
*4 Consult your nearest KEYENCE representative for the Class IIIa type with increased repeatability.
*5 All are calculated at F.S. = (±250 mm).
*6 “High accuracy range” and “long range” refer to the linearity when those ranges are used.

34
Displacement
Sensors
Controller
Type All-in-one model Separate monitor model*1
NPN LK-G3001V LK-G3001/LK-GD500
Model
PNP LK-G3001PV LK-G3001P/LK-GD500
Head compatibility All LK-G sensor heads are compatible
Number of connectable sensors Maximum of 2 units
Display

Minimum display unit 0.01 µm


Display range ±9999.99 mm to ±9999.99 µm (Selectable from six levels)
Refresh rate 10 times/sec
Analogue voltage output ±10 V × 2 outputs, output impedance: 100 Ω
Terminal block

Analogue current output 4 to 20 mA × 2 outputs, maximum load resistance: 350 Ω


Timing/Reset/Auto-zero input For OUT1, non-voltage or voltage input*3
Laser remote interlock input Non-voltage input*3
Comparator output For OUT1, NPN or PNP open-collector output*2
Alarm output For OUT1, NPN or PNP open-collector output*3 (N.C.)
Timing/Reset/Auto-zero input For OUT2, non-voltage or voltage input*3
Program switching input Non-voltage or voltage input*3 × 3 inputs
Expansion connector

Laser-Off input For Head A/Head B, non-voltage or voltage input*3


Comparator output For OUT2, NPN or PNP open-collector output*2
Alarm output For OUT2, NPN or PNP open-collector output*2 (N.C.)
Binary output Measured data output (21 bits), OUT1/OUT2 selectable, NPN or PNP open-collector output*2
Strobe output NPN or PNP open-collector output*2
Binary
Binary selector output NPN or PNP open-collector output*2
Binary selector input Non-voltage or voltage input*3
RS-232C interface Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
USB interface In conformity with USB Revision 2.0 Full speed (USB1.1 compatible)
2 OUT simultaneous measurement, Operation, Averaging, Filter, Calibration, Measurement, AUTO ZERO,
Sampling frequency setting, Mutual interference prevention, Data storage, 8-program memory, ECO mode,
Major functions
ABLE setting, Target setting, ABLE tuning, Selection of measurement surface of transparent target,
Statistics processing, Connection of setting support software, Selectable head-mounting, etc.
Power supply voltage 24 VDC±10%, Ripple: 10% (P to P) or less
Current consumption 500 mA or less with 1 head/600 mA or less with 2 heads
Ambient temperature 0 to 50°C
Relative humidity 35 to 85%, No condensation
Weight Approx. 480 g (LK-G3001V/G3001PV), Approx. 370 g (LK-G3001/G3001P), Approx. 60 g (LK-GD500)
*1 LK-G3001(P) can be operated singly. The measured value display and setting modifications can be performed on the display panel (LK-GD500) or via the setting support software (LK-H1W).
*2 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 1 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 1 V max.
*3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less
OFF current.

Controller variation
PNP output type
Type Standard PNP output type English version
English version
All-in-one model LK-G3000V LK-G3000PV LK-G3001V LK-G3001PV
Separate monitor model LK-G3000 LK-G3000P LK-G3001 LK-G3001P
• For specifications of each variation, please contact KEYENCE.

Sensor-head-to-controller cable
Model LK-GC2 LK-GC5 LK-GC10 LK-GC20 LK-GC30
Cable length 2m 5m 10 m 20 m 30 m
Weight Approx. 200 g Approx. 400 g Approx. 750 g Approx. 1400 g Approx. 2000 g

Display panel cable


Model OP-51654 OP-51655 OP-51656
Cable length 0.3 m 3m 10 m

35
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.

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The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW1-2090
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies. Unauthorised reproduction of this catalogue is strictly prohibited.
Copyright © 2020 KEYENCE CORPORATION. All rights reserved. 1DLineupcatalog-WW-C-GB 2091-3 600V90

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