Outline

• What is a Cleanroom
• Understand how to achieve the Level of
Cleanliness
• Cleanroom Procedures
• Operational concerns

2
 What is a Cleanroom?

A Cleanroom is a specially designed &

constructed room in which the air supply, air
distribution, filtration of air supply, materials
of construction, and operating procedures,
are regulated to control airborne particle
concentrations to meet appropriate
cleanliness levels.

3
 What is a “Particle”?

• A Particle is a very small discrete mass of

solid or liquid matter, usually measured in
microns.
• A micron is 1/1,000,000 of a metre.
• A human hair is 60 - 90 Microns.

4
 Particle Size Comparison •

In an ISO Class 8
•Largest Particle
Measured in
Cleanroom Testing
Cleanroom, the Particles that
•Human Hair
5 Microns
are in the Airstream of your
Cleanroom will have < 70
60-90
Microns

particles of larger than 5.0

•Human Red Blood Cell 7
Microns

Micron Size and < 10,000 @

0.5 Microns or Larger

5
Cleanroom Classification
Particles per Cubic Metre

6
Sources of Contamination

7
How do we Control Particles
•

• Isolation - Particles may be isolated by

containing them at the source of generation.
• This is difficult as the Processes and
Associates in the Cleanroom are the Largest
Source of Contamination

8
How do we Control Particles
•

Dilution – Particles
are captured by
filtration, and the
total space volume is
diluted by clean air

9
 HEPA Filter

• This is a Ceiling
Mounted HEPA
Filter.
• A High Efficiency
Particulate Air Filter,
is from 99.99% to
99.9999% Efficient

10
Return Air Grille

This is a
Common method
of Returning Air to
the Negative
Pressure Plenum

11
Typical Air Change Rates
•

12
Particle Settling Velocities
•

13
Where does Contamination
Come From?

14
Associate Contamination

15
Before Entering the
Cleanroom •

No one or any tool or test instrument enters a

Cleanroom area without first obtaining
permission of the Cleanroom Supervisor, and
must read all rules, regulations, and safety
procedures for the Cleanroom.

16
Gowning Procedures •

Gowning should be
done from the head
down. Donning the
hood first, prevents
particles from the
head, from falling on
the garments.

17
Gowning Procedures •

• If wearing a
jumpsuit, roll up
the legs to prevent
their touching the
floor while being
pulled on.
• Boots should fasten
over the legging

18
Gowning Procedures •

• Hair Covers must

cover ALL exposed hair,
and not just be left
sitting on top of your
head.
• Bouffant type hear
covers should not be
reused.

19
Gowning Procedures

• Proper Size Garments must be used.

• Garment users must never allow the
garment to touch or drag on the floor. If the
garment drags on the floor it picks up dirt
and particles that will be carried into the
Cleanroom.

20
 Gowning Procedures

• Gowns must be completely on prior to

Cleanroom entry, and should not be removed,
until you have reached the designated change
area.
• Remember it is the particle contamination
you are carrying that we are most concerned
about.

21
 Gowning Procedures

• The outside surface of the garment should

be kept as clean as possible.
• The outside of the garment should not be
touched by the inside of the garment, to
eliminate the possibility of particles being
transferred from the inside to the outside.

22
 Gowning Procedures

• You MUST NOT Leave the Cleanroom with

your Garment and Head Cover On and
Return.
• This will again only heighten the problem as
the areas you may travel through are not
even close to being designated Cleanrooms.

23
 Gown Storage
•4'-0' •1'-6'

Hanger rack for garment, •Garment Storage

footwear and supply •Headgear Storage

storage.
•Gown Hangers

•Cleanroom Footwear Storage

•Plant Footware Storage

•Metro Wire Gown Rack

24
 Cleanroom Conduct

• Clean your hands & face before entering

clean areas.
• Use lotions and soap to reduce skin flaking.
• Avoid skin contacts with solvents.
• Wearing cosmetics and skin medications is not
permitted.

25
Cleanroom Conduct

• Restricted activities and products in a

cleanroom are:
• Food, drink, gum and Tobacco product
• Lubricants, petroleum Product,
• Aerosols
• Duct Tape, Cardboard, Leather
• Cutting or Grinding

26
Cleanroom Conduct

• Required gowning, masks, gloves & shoe

covers to be worn at all times.
• Equipment, tools, instruments & materials
must be cleaned before entry.
• Use containers to transfer and/or store
materials.

27
Cleanroom Conduct

• Non-shedding paper and pens are to be used.

Pencils and erasers are not permitted.
• Work parts are to be handled only with
gloved hands, tweezers, or other methods to
avoid transfer of skin particles and oils.

28
 Cleanroom Conduct

• Restricted Entry Area.

• The flow of Associates and Material in a
Cleanroom must be carefully controlled.
• Cleanzones within a Cleanroom are operated
at different pressures to control airflow and
particle control.

29
Cleanroom Conduct

• It is for this reason that all doors must be

kept closed, if we did not require them for
this pressure control we would have saved
the installation cost.
• Emergency Exits are just as important, they
are there for Life Safety Only

30
Cleanroom Conduct

• Upon Entering the

Cleanroom, use the tacky
mat to capture any loose
dust. Step on the mat a
minimum of 5 times per foot.
• Preferable to use one pair of
footwear for Cleanroom use
only.

31
Connections

• How does all this connect to you?

• We can build a Cleanroom, but only the
Associates working there can keep it
operating as one.

32
Cleanroom Cleaning

Procedures

33
Cleanroom Cleaning

Proper Cleanroom maintenance is good

science. Whether you are operating one small
Class 10,000 Cleanroom facility or a billion
dollar-plus state-of-the-art sub-micron
semiconductor manufacturing fab.

34
Cleanroom Cleaning •

• Your Cleanroom is an integral part of

your manufacturing process.
• Proper Cleanroom maintenance is your
best and most cost effective method of
ensuring against the failure of your
Cleanroom to perform it’s manufacturing
function.

35
Vacuums

Most Cleanroom facilities have built-in central

vacuuming systems that allow ease of cleaning
and remote disposal of the waste products.
These systems can be either dry vacuums or
wet/dry vacuums. The beauty of central
vacuum systems is the absence of exhaust
airflow in the Cleanroom itself.

36
 Portable Vacuums •

A Cleanroom vacuum
on which the exhaust
airflow is equipped with
a HEPA filter.

37
Vacuums

Even on a Cleanroom vacuum equipped with

the proper HEPA filtration systems, the returning
airflow’s can create damaging particle storms if
the filters become clogged or damaged. These
particle storms, which can be invisible to the
naked eye, can result in a Cleanroom being
thrown "out of spec."

38
Mops
Mops and related floor cleaning equipment
are perhaps the next most important item
used in a Cleanroom maintenance program.

39
 Mops

Mop handles are available in a variety of non-

contaminating materials such as fibreglass or
stainless steel. Selection is usually based on
need; lighter products are best for cleaning
ceilings and walls while the heavier and more
durable handles are better suited for floor
cleaning applications.

40
Mops
The proper selection of a mop head for
specific applications is even more important,
however. Mop heads also are available in a
wide variety of materials and configurations.

41
Mops
Typical examples
include sponge
mops, which can
be self-wringing

42
Mops

String mops,
which typically are
made of PVA or
polyester fibres.

43
 Mops
• Never take a mop head that was used to
clean a non-critical area to a critical area.
• Mop heads are expensive, to be sure, but
not as much as the damage cross
contamination can cause, and should be
disposed after use.

44
Mops

Our suggestion is a
double bucket
system for clean &
dirty water

45
Wipes

46
Wipes

You will probably use more wipes than any

other single cleaning product or tool. The most
important thing to remember is that selection
should NEVER be based on cost.

47
Wipes

Selection criteria should be on intended

usage, cleanliness, particle shedding
properties, chemical residue of the wiper
content, static properties, absorbency and size.

48
Wiper Selection
• Cleaning Efficiency
• Absorptive Capacity
• Absorptive Rate
• Chemical Resistance
• Abrasion Resistance
• Sterility
• ESD

49
Wipes

• Generally speaking, woven or knit wipers

hold up extremely well.
• Another quick rule of thumb is that the more
absorbent the wiper, the more contaminating
it may be.

50
 Wipes
• Cleanroom wipes are available in a huge
assortment of styles; materials and
configurations, including wet or dry.
• It is important to remember that each specific
Cleanroom cleaning application may require a
specific type of wiper.

51
Wipes
Find one that works for the application and
then stick with it, even if it means maintaining
a large inventory of a number of different types
and brands.

52
Cleaning Materials
The two most commonly used cleaning
materials are DI water and isopropyl alcohol
(IPA). They are followed by a variety of
commercially available floor, wall, ceiling, glass
and multipurpose cleaning products.

53
Cleaning Materials
Some of the major concerns when selecting
cleaning materials include:
• Product compatibility. Let's not kill the product.
• Process compatibility. Let's not damage the
equipment.

54
Cleaning Materials
Cleanroom compatibility. Make sure the
product can do its intended job while at the
same time ensure that it doesn't cause
unwanted results. Take for example IPA that
tends to remove moisture from whatever
surface it comes in contact with.

55
Cleaning Materials

On unsealed vinyl floors, IPA reacts with the

plastercizers and produces a fine, white powdery
film that sheds or flakes when walked on,
creating small particle storms that can throw a
Cleanroom out of spec quickly.

56
Cleaning Materials

IPA also tends to remove paint and can etch

glass. Despite these examples, IPA is a very
popular cleaning material. However, care
should be given to its use and applications.

57
Cleaning Materials

Environmental compatibility. Check

ingredients. Some cleaning detergents have
unacceptable levels of sodium, which can
damage product and equipment

58
Cleaning Materials

One final note on cleaning products. The

method of dispensing is very important.
Squeeze bottles are preferred over spray
bottles or aerosol cans.

59
Cleaning Materials

• Cleaning
Solutions
• Wipers
• Tacky Roller
• Mops
• Tacky Mats

60
Cleaning Materials

Our suggestion is a
cart which would
contain all of your
cleaning materials
ready to clean as
time is available.

61
Establish Cleaning Protocols
•

Cleaning protocol can be summed up in

three words:
Vacuum, Wipe, Vacuum.

62
 Establish Cleaning Protocols
•

Vacuuming or tack rolling should be used to

pull loose particles from surfaces. Wiping
provides mechanical energy to remove more
tightly bound particles and cleaning solutions
break the surface tensions and reduce
adhesion forces.

63
 Establish Cleaning Protocols
•

• The second vacuuming removes loosened

particles and cleaner residues.
• It is a method tested over time to be most
reliable and can be applied to most general
Cleanroom cleaning applications.

64
Recommended Protocols

The following are recommended protocols

for specific cleaning applications:

65
 Ceiling Panels •

• Vacuum with a soft brush attachment. Wipe

gently in a single direction using slightly
overlapping strokes.
• Tack roll in a single direction, again using
slightly overlapping strokes.
• Remove spots with a commercial cleaner, DI
water and a polyester wiper.
• Vacuum with a soft brush attachment.

66
 Light Fixtures
• Vacuum horizontal surfaces with a soft brush
attachment.
• Wipe surfaces of egg crate light diffusers with a
woven polyester wipe dampened with DI water.
• Open unit. Wipe bulbs. Vacuum horizontal
surfaces with soft brush attachment.
• Close unit. Wipe trim pieces.

67
 HEPA Filters •

• Use extreme caution not to contact HEPA filter.

• Vacuum with a soft brush attachment.
• Wipe horizontal surfaces of egg crate diffusers
with a woven polyester wipe dampened with DI
water.
• Vacuum with a soft brush attachment. Wipe
trim pieces.

68
 Sprinkler Heads

• Gently wipe exposed surfaces only with a

woven polyester wipe dampened with DI
water.
• Use extreme caution not to activate.

69
Walls

• Vacuum with a soft brush attachment.

• Wipe with a woven polyester wipe
dampened in a 16:1 solution of DI water and
a commercial cleaning detergent.
• Wipe in one direction only using slight
overlapping strokes.

70
 Walls

Using a “Tacky
Roller” to Lift Dust
from a wall surface

71
Walls
Using a “Wall Mop”
to Lift Dust from a
wall surface

72
Walls

• Mop entire surface with a commercial wall

cleaning system.
• Mop from top to bottom using slightly
overlapping strokes.
• Use a minimum of liquid to avoid splashing or
dripping.

73
Walls
• Tack roll from top to bottom.
• Remove spots with a commercial cleaner and
woven polyester wipe.
• Vacuum with a soft brush attachment

74
 Glass Surfaces
• Squirt commercial glass cleaner on woven
polyester wipe.
• Apply to surface with a dampened wipe.
Squeegee (from top to bottom if on a vertical
surface) to remove excess liquid.
• Wipe with a dry woven polyester wipe.

75
 Piping Systems
• Use woven polyester wipe damped with a 16:1
solution of DI water and a commercial cleanser.
• Wipe in one direction only using slightly
overlapping strokes.
• Wipe top to bottom whenever possible.
• Use a minimum of liquid on wipes.

76
Piping Systems
• Vacuum with a curved pipe attachment.
• Rewipe with a woven polyester wipe and
the diluted cleansing solution to remove
spots and stubborn grime.
• Re-vacuum with a curved pipe attachment.

77
Process Equipment

• Consult with a process engineer; group

leader or equipment operator prior to
cleaning any process equipment.
• Clean only exterior surfaces. Do not
clean in or near processing areas.
• Use wipes damped with solution of IPA
and commercial cleansers.

78
Process Equipment
• First vacuum with a soft brush attachment
and then wipe surfaces in one direction only,
using slightly overlapping strokes.
• Wipe from top to bottom and avoid any
splashing or dripping of cleaning solution.
• Vacuum with a soft brush attachment.

79
 Floors
• There are a few general rules to remember
when cleaning a Cleanroom floor, regardless
of its composition.
• The three secrets to the proper cleaning of
a Cleanroom floor are: clean water, clean
water and clean water!

80
 Floors
• Vacuum surface.
• Wash floor with a 16:1 solution of DI water
and a floor cleanser using a clean, non-
contaminating mop head.
• Rinse with DI water and a new, clean non-
particulating mop head.

81
 Floors
The rinse water should be left on the floor long
enough too completely saturate any film build-
up. Then the rinse water should be mopped
up, making sure to change the water after
mopping every 10 to 15 square feet of floor
surface.

82
 Floors

• The water change is critical to the operation.

• Failure to change the water on a regular basis
can lead to cross contamination, dragging
potentially damaging contamination from one
area to the next.

83
Floors

After the floor

is dry, it should
be vacuumed.

84
Floors
Regardless of what type of flooring your
Cleanroom has, it is without question the
dirtiest and most highly contaminated part of
your Cleanroom.

85
 Floors
• After all, more than 80 percent of all
Cleanroom contamination winds up on the
floor at one time or another and is then stirred
up by foot traffic and put back into the
ambient atmosphere.
• A clean Cleanroom starts with a clean
Cleanroom floor.

86
Tacky Floor

After every shift, clean

•

the tacky floor, using

approved cleaner and
mop.

87
 Tacky Peelable Mat
After every
shift, or as
required, peel
a new layer
on the mat.

88
 Verification Procedures
The verification process used to determine if the
cleaning crew has done a good job in
decontaminating the Cleanroom can be as simple
as a visual inspection or as sophisticated as
present day science allows.

89
 Verification Procedures
The visual inspection is, by and far, the most
widely used method. However, it is not nearly as
reliable as more scientific methods. The visual
method includes naked-eye inspections and the
wiping of surfaces with white or black wipes.

90
Verification Procedures •

Black Inspection Wiper

91
 Verification Procedures
During naked-eye inspections, the areas being
scrutinised should appear as bright as practical.
Close attention to hard-to-clean areas must be
maintained and the viewer should utilise oblique
angles and oblique lighting whenever possible.

92
Verification Procedures

Wiping surfaces with clean wipes (wet or dry)

can be augmented with the use of ultra violet
lighting, particularly on darker coloured wipes
and surfaces.

93
 Conclusion
• Proper Cleanroom maintenance is the
cheapest and best insurance to protect
investment required for today's Cleanroom.
• It requires a commitment from the CEO all
the way down to the most recently hired
Cleanroom Associate.

94