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2019-09

INSTALLATION MANUAL

Fully Automatic Dicing Saw

DFD6240

Copyright of this document is owned by DISCO Corporation

("DISCO"). No part of this document may be copied or reproduced in
any form or by any means, without the express written permission of
DISCO. Also, this document may not be disclosed or transferred to
third parties.

This document is printed on recyclable Lint-Free Paper.

・The blue paper is recyclable as used paper just like plain paper.
・The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
UKHSNE*000HA Recycle the blue paper only.)
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READ CAREFULLY BEFORE USING THIS

MANUAL
Introduction
This machine is a dicing saw for cutting silicon wafers and glass substrates (referred collectively as
"workpiece" hereafter).
The machine contains rotary sections with parts that rotate at high speed to cut workpieces; high-voltage
sections with danger of causing electric shock; drive sections where the workers' physical parts and/or
clothing may get caught.
If N2 gas is used in place of clean air, the machine also has a N2 gas ejection section that might have
adverse effect on the human body.
Failure to handle this machine properly may lead to serious injury or death.

Read before using the machine

Before using the machine, read this manual thoroughly and follow strictly all the instructions set forth in
this manual.
To assure safety during work associated to operation and maintenance of this machine, it is important for
every worker to know where the potential safety hazards lie in this machine. Although it is difficult for
DISCO to foresee each and every potential safety hazard, various precautionary notes and warnings have
been included in this manual and the separate Safety Manual to identify and provide preventive
knowledge against all foreseeable hazards. Strict observance of all these precautions and other relevant
instructions set forth in this manual and the separate Safety Manual is thus essential for increased safety
assurance.
The safety features of the machine may be seriously affected, in case this machine is modified without
gaining the prior consent from DISCO or repaired in a manner not stated in this manual.
Therefore, never attempt to modify or repair this machine in a manner not approved by DISCO.

Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・Any parts other than the genuine DISCO brand are mounted onto the machine.
・Any parts other than periodic replacement or consumable parts are replaced without prior consent
of DISCO.
・Any parts designed by the customer are mounted onto the machine without prior consent of
DISCO.
・Equipment of another manufacturer is added to the machine.
・The machine or part of the machine is transported, reused, resold or modified.
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our technical personnel.

Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office. If they are replaced without consulting DISCO, DISCO shall assume no
liability for the consequences arising therefrom.
・Operation Manual
・Maintenance Manual
・When specified in a separate document (e.g., Technical news letter, Operation guide)
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Hazard level
The safety precautions set forth in this document are classified into DANGER, WARNING and
CAUTION categories which represent three degree of hazards latent in the machine. These categories are
defined as detailed below in accordance with the seriousness and probability level of the hazard. In
addition to the above three safety precaution levels, CAUTION without the safety alert symbol ( )
and NOTICE are used to give safety usage instructions to the user.
Before using the machine, be sure to read and understand all the associated safety precautions set forth in
the manual.
Hazard levels are classified as follows:
If you cannot avoid the incident in question, a critical situation in which
either critical injury or death is very likely to result.
DANGER This symbol is used for the incident in which the injury is critical and there
is high probability of occurrence.
If you cannot avoid the incident in question, a serious situation in which
either critical injury or death may result.
WARNING This symbol is used for the incident in which the injury is serious but there is
not high probability of occurrence.
If you cannot avoid the incident in question, a medium or slight injury may
result.
CAUTION This symbol is used for the incident in which the injury is slight and there is
not high probability of occurrence.
If you cannot avoid the incident in question, an accident of property damage
may occur.
CAUTION

Indicates the safe way of using the machine as well as precautions to avoid
accidents resulting in damage to property.
NOTICE
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Safety label
Safety labels are affixed to the potentially hazardous sections of this machine.
Before using this machine, verify the label positions and thoroughly understand the hazard levels and
hazard descriptions.
・The language used for the safety labels affixed to the machine outer covers can be requested by
customers.
Label Hazard Level Hazard Descriptions
There is a danger that your fingers or
hands may be cut by the rotating blade.
WARNING
・Do not place your fingers or hands
near the blade or flange until the
spindle comes to a complete stop.
・Do not open the covers until the
spindle comes to a complete stop.
・It takes approximately 15 seconds
for the spindle to stop completely
after the stop process is executed
(including in case of EMO and a
power failure).
There is a possibility that your fingers
or hands may get caught and injured in
CAUTION the drive sections.
・Do not position your fingers or
hands in the drive sections.
・Before performing maintenance
work, make sure to shut off the
machine power and lock out the
breaker.
There is a possibility that your fingers
or hands may get caught and injured in
CAUTION
the drive sections.
・Do not position your fingers or
hands in the drive sections.
・Do not place tools or other irrelevant
items near them.
There is a possibility that yours fingers
or hands may be caught and injured by
CAUTION the drive sections.
・Do not position your fingers or
hands near the drive sections.
・The maintenance work of the
machine should be done only by
operators with the maintenance
qualification.
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Safety label (Continued)

Label Hazard Level Hazard Descriptions

The spinner section is a rotating
mechanism. There is a possibility that
CAUTION your fingers or hands may be cut by
the rotating spinner or that serious
injury may be caused by scattered
workpiece.
・Do not position your fingers or
hands near the spinner until it stops
completely
There is a possibility that you may
burn your fingers or hands by touching
CAUTION the hot parts of the machine.
・Turn off the machine, and then
perform maintenance work only
after the machine cools down
sufficiently.

MSAAA-00015-0
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Safety label (Continued)

Label Hazard Level Hazard Descriptions

There is a danger that you may die or
get seriously injured from electric
WARNING shocks.
・Do not touch the electrically charged
sections.
・Before performing maintenance
work, make sure to shut off the
machine power, and lock out the
breaker.

Even if you turn the power circuit

breaker of the machine to "OFF"
WARNING position, the primary side of the
breaker remains energized.
There is a danger that you may die or
get seriously injured from electric
shocks.
・Do not touch the energized sections.
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INTRODUCTION
About this manual
This manual describes the installation and adjustment procedures of the Fully Automatic Dicing Saw 6000
Series Models DFD6240.

To ensure safety
In order to ensure safety, be sure to thoroughly read and fully understand the important safety information
set forth in the separate Safety Manual, before performing any operation.
In installation or maintenance operation, be sure to follow the procedures set forth in this manual.
Be sure that the machine should be installed and adjusted by a qualified person who has completed a
machine maintenance education (hereinafter referred to as the maintenance personnel).
This manual is the 'Original instructions'.

Definition of manager and personnel

The definition of "manager" and "personnel" applied in this manual is as follows:
Category Applicable Personnel Job Description
Management Engages in overall management of the machine and its
Manager
representative operators.
Maintenance personnel Qualified person who has completed machine maintenance
education.
Data maintenance Qualified person to manage the software data of the
Personnel
personnel machine.
Operator Engages in operation of the machine for processing
workpieces.

Documentation for this machine

This manual is the Installation Manual indicated by the arrow.
Manual Who should read Contents
Safety Manual ・Management representative Information for ensuring safety during
・Data maintenance personnel machine operation, installation and
maintenance
・Maintenance personnel
Installation Manual Maintenance personnel Procedures for machine installation and
adjustment
Operation Manual Operator Operational procedures to be performed by
operators
Data Maintenance Data maintenance personnel Screen contents for data entry and data setting
Manual procedures
Maintenance Manual Maintenance personnel Servicing, inspection and adjustment
procedures to be performed by the customer
Technical Reference Maintenance personnel Machine specifications/
Circuit diagrams/Illustrations/Part list

Unit notation
International System of Unit is adopted to express any unit.
Also, all the pressure values are expressed in gauge pressure.

Introduction-1
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CONTENTS
CONTENTS

READ CAREFULLY BEFORE USING THIS MANUAL

INTRODUCTION ..............................................Introduction-1

CONTENTS .......................................................... Contents-1

A. INSTALLATION SPECIFICATIONS AND

ENVIRONMENT ........................................................... A-1
1. Specifications ............................................................................................................... A-2
2. Standard Packing Style on Delivery ............................................................................. A-6
3. Installation Environment............................................................................................... A-7
3-1. Installation Site .............................................................................................................................. A-8
3-2. Environment Requirements ......................................................................................................... A-11
3-3. Environment for Storage and Transport ...................................................................................... A-16

4. Piping and Wiring Connection .................................................................................... A-16

4-1. Rear Side Connecting Positions ................................................................................................. A-17
4-2. Piping and Wiring Connection ..................................................................................................... A-19

B. INSTALLATION AND TRANSFERRING

OPERATION................................................................. B-1
1. Installation Operation ................................................................................................... B-2
1-1. Hoisting and Lowering the Machine by a Crane ........................................................................... B-4
1-2. Transferring the Machine .............................................................................................................. B-8
1-2-1. Transferring the Machine by Hand Push ............................................................................ B-9
1-2-2. Transferring the Machine by Pallet Truck ......................................................................... B-11
1-3. Installing the Machine with the Leveling Mount .......................................................................... B-14
1-4. Removing the Drive Axis Metal Fixtures ..................................................................................... B-16
1-4-1. Removing the X-Axis Metal Fixture .................................................................................. B-17
1-4-2. Removing the Y-Axis Metal Fixtures ................................................................................ B-18
1-4-3. Removing the Z-Axis Metal Fixtures ................................................................................ B-19
1-4-4. Removing the Metal Fixtures of the Upper and Lower Arm ............................................. B-20
1-4-4-1. Removing the Transfer Axis Cover........................................................................ B-21
1-4-4-2. Removing the Upper Arm Metal Fixture ................................................................ B-22
1-4-4-3. Removing the Lower Arm Metal Fixture ................................................................ B-24

Contents-1
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CONTENTS
1-4-4-4. Mounting the Transfer Axis Cover ......................................................................... B-25
1-4-5. Removing the Metal Fixtures of the Spinner Axis ............................................................ B-26
1-5. Mounting the Status Indicator, Piping and Wiring Connection .................................................... B-27
1-5-1. Mounting the Status Indicator........................................................................................... B-28
1-5-2. Connecting Piping ............................................................................................................ B-29
1-5-3. Connecting Power Supply Wiring..................................................................................... B-33
1-5-3-1. Removing the Machine Outer Cover ..................................................................... B-36
1-5-3-2. Connecting the Power Supply Wiring.................................................................... B-37
1-5-3-3. Mounting the Machine Outer Cover ...................................................................... B-40
1-5-3-4. Completion of Connecting the Power Supply Wiring ............................................ B-41
1-6. Mounting the Machine Outer Cover ............................................................................................ B-42
1-7. Leveling the Machine with the Leveling Mount ........................................................................... B-45
1-7-1. Mounting the Spirit Level .................................................................................................. B-46
1-7-2. Removing the Machine Outer Cover ................................................................................ B-47
1-7-3. Leveling the Machine ....................................................................................................... B-48
1-8. Mounting the Machine Anchors [Optional Accessory] ................................................................. B-50
1-9. Completion of Installation Operation ........................................................................................... B-51

2. Transferring Operation ............................................................................................... B-54

2-1. Terminating the Machine ............................................................................................................. B-56
2-2. Removing the Machine Outer Cover and Status Indicator .......................................................... B-57
2-2-1. Turning OFF the Power .................................................................................................... B-58
2-2-2. Removing the Machine Outer Cover ................................................................................ B-59
2-2-3. Removing the Status Indicator ......................................................................................... B-62
2-3. Disconnecting Piping and Wiring ................................................................................................ B-63
2-4. Mounting the Drive Axis Metal Fixtures ....................................................................................... B-65
2-4-1. Mounting the X-Axis Metal Fixture ................................................................................... B-67
2-4-2. Mounting the Y-Axis Metal Fixtures .................................................................................. B-68
2-4-3. Mounting the Z-Axis Metal Fixtures.................................................................................. B-69
2-4-4. Mounting the Metal Fixtures of the Lower Arm and Upper Arm ....................................... B-70
2-4-4-1. Removing the Transfer Axis Cover........................................................................ B-71
2-4-4-2. Mounting the Upper Arm Metal Fixture ................................................................. B-72
2-4-4-3. Mounting the Lower Arm Metal Fixture ................................................................. B-74
2-4-4-4. Mounting the Transfer Axis Cover ......................................................................... B-75
2-4-5. Mounting the Metal Fixtures of the Spinner Axis .............................................................. B-76
2-5. Removing the Leveling Mount..................................................................................................... B-77

WHOM TO CONTACT IN AN EMERGENCY

IN THE EVENT OF AN ACCIDENT

Contents-2
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A. INSTALLATION SPECIFICATIONS
AND ENVIRONMENT
Contents of this chapter

Section No. Title Contents

1 Specifications ・Utilities requirements of the machine
2 Standard Packing Style on Delivery ・Standard dimensions and weights on delivery
3 Installation Environment ・Installation requirements
4 Piping and Wiring Connection ・Connection positions for piping and wiring

A-1
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1. Specifications
Power Requirements

Machine with 1.2 kW spindle

Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 1.5 kW
・During warm-up: 1.0 kW
・During standby: 0.3 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 4.9 kVA
Leakage current 20 mA or less
The rated sensitivity current of the circuit breaker is 30 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 20 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND
Machine with 1.8 kW spindle [optional accessory]
Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 1.6 kW
・During warm-up: 1.15 kW
・During standby: 0.3 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 6.2 kVA
Leakage current 20 mA or less
The rated sensitivity current of the circuit breaker is 30 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 20 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND

A-2
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Power Requirements (continued)

Machine with 2.2 kW spindle [optional accessory]
Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 1.4 kW
・During warm-up: 0.95 kW
・During standby: 0.3 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 5.8 kVA
Leakage current 20 mA or less
The rated sensitivity current of the circuit breaker is 30 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 20 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND

Air

Pressure ・Range: 0.5 to 0.8 MPa

・Fluctuation range: ± 0.01 MPa
Connection port Rc (PT) 1/4
Mean flow rate during running 110 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 250 L/min (ANR)

Clean air
Clean air is directly blown onto workpiece. Prepare clean air suitable for the customer's standards.
When using N2 in place of clean air, please consult DISCO sales representatives.
Pressure ・Range: 0.5 to 0.8 MPa
・Fluctuation range: ± 0.01 MPa
Connection port Rc (PT) 1/4
Mean flow rate during running 70 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 243 L/min (ANR) (excluding use of air blower)

A-3
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N2
N2 gas is used when a UV irradiation unit is incorporated as an optional accessory.
Pressure ・Range: 0.2 to 0.4 MPa
・Fluctuation range: ± 0.01 MPa
Connection port Rc (PT) 1/4
Maximum flow rate 30 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.

Water
Water is divided into two systems: for cutting water, water curtain, other and cooling water.

Cutting water, water curtain and other

Pressure ・0.2 to 0.4 MPa
To install spinner atomizing nozzle [optional accessory], the
required pressure is 0.25 MPa or above.
・Fluctuation range: ± 0.01 MPa
Connection port Rc (PT) 3/8
Maximum flow rate 8 L/min
Breakdown:
・Cutting water: 6 L/min
・Water curtain: 1 L/min
・Other: 1 L/min (spinner cleaning/protection water for non-contact
setup [optional accessory])

Cooling water
Pressure ・0.2 to 0.4 MPa
・Fluctuation range: ± 0.02 MPa
Connection port Rc (PT) 1/4
Maximum flow rate 1.5 L/min at 0.3 MPa
・When the 1.8 kW spindle [optional accessory] or 2.2 kW spindle
[optional accessory] is installed:
0.75 L/min (at 0.75 MPa)

Rinse Water [optional accessory]

Pressure ・0.2 to 0.4 MPa

・Fluctuation range: ± 0.01 MPa
Connection port Rc (PT) 1/4
Maximum flow rate 1.0 L/min

Duct

Capacity 5 to 8 m3/min
Connection port Duct hose
I.D.: 101.6 mm

A-4
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Water Drainage

Connection port Duct hose

I.D.: 50.6 mm

Main Dimensions

Main body 900 W × 1,190 D × 1,800 mm H

(without protrusion and status indicator (330 mm))
・For installation, it is necessary to secure the space for the maintenance work and mounting the status
indicator.

Machine Dry Mass

Approx. 1,200 kg (standard)
・When you select the transformer for overseas use or uninterruptible power supply unit as an optional
accessory, its mass is added to the machine mass.

80 kg (transformer for overseas use)

65 kg (uninterruptible power supply unit)

Paint Color
Cream (Munsell No. 2.5 GY 8.0/0.5)
Black (Munsell No. N2.4)

A-5
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2. Standard Packing Style on Delivery

Standard packing style on delivery

Main Body Dimensions (mm) 900 W × 1,190 D × 1,800 H

Mass (kg) Approx.1,200 kg (standard)
・When you select the transformer for overseas use or uninterruptible
power supply unit as an optional accessory, its mass is added to the
machine mass.
80 kg (transformer for overseas use)
65 kg (uninterruptible power supply unit)
When transferring the machine, secure enough space so that the machine will pass safely through the
selected route.
(Information: At least the space of 690 mm is necessary for a person to work sitting.)
The status indicator (330 mm) and other protrusions are not included in the above dimensions.

A-6
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3. Installation Environment
Summary of this section

Section No. Title Contents

3-1 Installation Site ・Illustration of the installation site
3-2 Environment Requirements ・Environment requirements to install the
machine
3-3 Environment for Storage and ・Storage environment
Transport ・Transport environment

A-7
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3-1. Installation Site

Installation precautions
・The mass of the machine differs by whether it has the transformer for use outside Japan.
・In installation site selection, ease of operation and maintenance must be taken into consideration.
・Avoid the place where temperature variations are great.
・In installation, secure 380 mm of maintenance space between the top face of the machine and the
ceiling of the room (2,180 mm high from the floor).
・The maintenance area is described with the recommended values that are based on SEMI S8.

Installation drawing [machines having NO transformer for use outside Japan, NO UPS]

A-8
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Installation drawing [machines having a transformer for use outside Japan, NO UPS]

Installation drawing [machines having NO transformer for use outside Japan, an UPS]

A-9
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Installation drawing [machines having a transformer for use outside Japan, an UPS]

A-10
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3-2. Environment Requirements

Do not use any utility that violates the required conditions
If you use any utility that violates the conditions required in this document, DISCO shall not be liable for
any damage arising from such use. The following adverse effects or troubles unexpected at DISCO may
occur:
・Impact on not only customer's products but also the final products
・Generation of hazardous gas due to chemical reaction
・Impact on your plant facilities
・Impact on your machines (including ones other than DISCO's)

Trouble examples caused by utilities that violate the conditions:

Utility Example Details
Workpiece breakage Impurities caused the air system to be clogged, which
made it impossible for the transfer arm to hold the
workpiece, causing the workpiece to drop.
Breakage of the air drive As a result of using air whose atmospheric dew point
Air section is high, dew condensation occurred in the pipe or air
cylinder, and rust occurred in the air drive section.
Spindle breakage Air was supplied with a pressure exceeding the upper
limit, the pipe came off the fitting, and the spindle
having the air bearing structure got broken.
Decrease in oxygen As a result of using gas such as N2 instead of
concentration compressed air, the gas permeated the room, and the
oxygen concentration decreased.
Clean air ・Inhaling air with a low oxygen concentration may
cause serious injury or death due to lack of oxygen.
Workpiece contamination Air including impurities directly hit the workpiece and
the workpiece was contaminated.
Cutting water Workpiece contamination Water including impurities directly hit the workpiece
/ spinner and the workpiece was contaminated.
cleaning
water
Occurrence of water Impurities caused a pipe to get corroded, and water
leakage leakage occurred.
・Touching leaked liquid or the machine may cause
serious injury or death due to an electric shock.
Spindle breakage As a result of using cooling water whose temperature
Cooling water does not meet the conditions, floating of the spindle
axis became unstable and the spindle having the air
bearing structure got broken.
Decrease in process Change in water temperature caused the spindle to
accuracy expand or shrink, which made it impossible to keep the
process accuracy.

A-11
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Environment requirements
This machine realizes highly accurate applications by employing highly precision axis units.
The installation environment, therefore, gives a great effect on the machine accuracy.

Installation Site
・Ease of operation and maintenance must be taken into account.
・If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality. If you need to use or keep the machine in the environment where dirt and
dust float around, please consult DISCO sales representatives.

Treatment for Waterproof and Drainage

If water leakage should occur, the floor surface and downstairs might be damaged.
Therefore, provide the floor surface with an appropriate treatment for waterproof and drainage.
The drain pan and water leakage detection unit are available as an optional accessory.

Ambient Temperature (room temperature)

20 to 25°C (variation: within ±1°C)

Ambient Relative Humidity

55 ±15% (non-condensing)

Cutting Water/Spinner Cleaning Water Temperature

Room temperature +2°C (variation: within ±1°C)

Cutting Water/Spinner Cleaning Water Quality

Deionized water is recommended. Please consult DISCO sales representative when using other than
deionized water.
・Water containing foreign matters or ions may cause corrosion, rust or breakage of the machine, or
clogging of the pipes.
・In order to protect the machine, install a filter to remove foreign matters of which particle size is over
100 μm in the location just before the cutting water connection port of the machine. If you use the water
temperature control unit or DI water recycling unit manufactured by DISCO, the filter is unnecessary.
The filter unit is available as an optional accessory provided by DISCO.
・If you will use separate piping for cutting water and cleaning water, please consult DISCO sales
representative in advance.
・Use of flammable cutting oil or cutting fluid may cause firing in the machine.
・If water which contains cutting oil or cutting fluid and whose volatility has been lower compared to
deionized water adheres to the water leakage sensor inside the machine, it will not dry. As a result, the
water leakage sensor will need to be replaced because otherwise, a water leakage error will continue to
be generated regardless of the presence or absence of water leakage. The replacement of water leakage
sensor is handled by DISCO customer engineer.
Never disable the water leakage sensor function in order to avoid errors, because it involves risk of an
electric shock due to water leakage or firing.

A-12
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Cooling Water Temperature

Same as the room temperature (variation: within ±1°C)
Fluctuation in water temperature may adversely affect cutting accuracy due to expansion or shrinkage of
spindle.

Cooling Water Quality

High content of chloride (Cl), iron (Fe), copper (Cu) and sodium (Na) or high ratio of conductivity may
cause corrosion of the mechanical parts or clogging of piping.

Rinse Water Quality [optional accessory]

Please consult DISCO sales representative when using other than deionized water.

Power Requirements
Standard: Within 200 to 240 VAC ±10%, 3-phase
With transformer: Within 380 to 415 VAC ±10%, 3-phase
・The leakage current is 20 mA or less.
The rated sensitivity current of the circuit breaker is 30 mA. If the earth leakage breaker is used for the
plant facilities for protection purpose, use a harmonic-measured breaker with an appropriate sensitivity
current.
・This machine belongs to overvoltage category II. Install an electrically insulated-type transformer in
between plant facility and the machine.
・Significant voltage vibrations must be avoided.
・Use the power supply without any momentary interruption.
・Do not use the machine in electrically noisy environments. The tests listed below are conducted for this
machine.
Standards
IEC: 61000-4-4 Electrical fast transient/burst immunity test
Outline of test
±2.0 kV (Charge voltage)

Power Cable
The power cable for this machine is prepared as an optional accessory.

Grounding
Facility-side ground connection must be made according to the local regulations.
If the grounding system is TT
Make the connection so that the resistance between the grounding electrode at the plant facility and the
machine's PE terminal is less than 100 Ω.

A-13
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Air
Filtration rating: 0.00001 mm/99.5% or more
Residual oil: 0.1 ppm
Atmospheric dew point: -10 to -20°C
・When the atmospheric dew point is higher than -10°C:
Dew condensation may occur at the spindle bearing and cause a malfunction of the spindle.
・When the atmospheric dew point is lower than -20°C:
It may cause abnormal wear of the spindle carbon brush.
・There is a proportional relationship between the concentration of ozone contained in compressed air
and gum deterioration speed. As the ozone concentration is higher, gum parts deteriorate earlier. Any
deterioration of parts clearly due to ozone and any breakage caused by the deterioration may not be
covered by warranty even when the machine is in the warranty period.
Reference: Ozone concentration varies depending on the environment or the type of the air compressor.

Duct
Exhaust capacity: 5 to 8 m3/min

Altitude
Altitude of 1,000 m or lower
When the altitude of the site is 1,000 m or higher, please consult DISCO sales representative.

Others
・Use the piping hose without any foreign matter adhered inside.
・Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans, and ventilation outlets.
・This machine discharges exhaust air and drain water containing silicon dust due to the cutting operation.
Control and dispose of the machine discharges in accordance with the environment criteria of the local
regulations.
・Do not use this machine at any place other than an industrial or commercial facility. This machine is
designed for industrial use and its EMC performance has been evaluated as EN55011, Group 1, Class A.
Therefore, there is a possibility that electromagnetic noise may exceed the limit defined by standards
for residential environments.
・Ensure that an air source, a water source, drain pipes and a power source are located near the machine.
・Install valves which can be locked out for both the air and water supplies at the facility-side.
These should be prepared by the customer.
・Be sure to install the machine on the floor that has adequate strength. And when the installation site
uses the raised floor, please consult your nearest DISCO about its strength.
(For the installation floor withstand load, see the section 3-1 of this chapter, [Installation Site].)
・Machine anchors are optionally available. They are designed to provide human/equipment protection in
the event of an earthquake or other disaster. It is recommended that the machine be secured with these
anchors.

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3-3. Environment for Storage and Transport

Environment for storage and transport
The environmental conditions for storage and transport would wield a profound influence on the
machine's accuracy when it is operated.
Ambient temperature 5 to 40 °C
(room temperature)
Ambient relative 35 to 70 % (no condensation)
humidity
Machine anchors are optionally available. They are designed to provide human/equipment protection in
the event of an earthquake or other disaster. It is recommended that the machine be secured with these
anchors.
Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans, and ventilation outlets.
Drain water from the machine before storage and transport.
Before starting operation of the machine after storage or transport, make sure to grease its driving axes.
If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality. If you need to use or keep the machine in the environment where dirt and dust
float around, please consult DISCO sales representatives.

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4. Piping and Wiring Connection

Summary of this section

Section No. Title Contents

4-1 Rear Side Connecting Positions ・Piping connection diagram on the rear side of
the machine
4-2 Piping and Wiring Connection ・Piping and wiring connection

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4-1. Rear Side Connecting Positions

Rear side connecting positions

[10] Main duct

[9] Main drain

Rear side

[8] Main air IN

[1] Clean air IN
[7] Spinner
cleaning water IN [2] Deionized
water IN
[6] Rinse water IN [3] N2 for UV IN
[Optional accessory] [Optional accessory]

[5] Cooling water IN [4] Cooling water OUT

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Rear side connecting positions (Continued)

No. Name Remarks

[1] Clean air IN Rc (PT) 1/4
[2] Deionized water IN Rc (PT) 3/8
[3] N2 for UV IN Rc (PT) 1/4 [optional accessory]
[4] Cooling water OUT Rc (PT) 1/4
[5] Cooling water IN Rc (PT) 1/4
[6] Rinse water IN Rc (PT) 1/4 [optional accessory]
[7] Spinner cleaning water IN Rc (PT) 1/4
[8] Main air IN Rc (PT) 1/4
[9] Main drain* 50.6 ID duct hose
[10] Main duct* 101.6 ID duct hose
* Discharges dirty water and mist containing cutting material particles.

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4-2. Piping and Wiring Connection

Range of Utility Connection Parts Prepared by DISCO
For the connections of utilities to the DFD6240, air piping, water piping, duct piping and electrical wiring
should be arranged. Among those, the customer is requested to arrange hoses and joints as well as
connection ports at the plant facility, except for ducts and drain hoses.

FULLY AUTOMATIC DICING SAW

DFD6240 Plant Facility Arrangement

Air piping Hoses and joints Air connection ports

Water piping Hoses and joints Water connection ports

Duct hoses /
Duct / drain piping Duct and drain connection ports
Drain hoses

Electrical wiring Power cables Electricity connection ports

Supplied from DISCO Arranged by the customer

Piping and Wiring Connection Parts

a) DISCO arranges the air piping to the connection ports of the DFD6240. The customer is requested to
arrange hoses and joints as well as plant facility connection ports.
b) DISCO arranges water piping to the connection ports of the DFD6240. The customer is requested to
arrange hoses and joints as well as plant facility connection ports.
c) DISCO arranges duct and drain piping to the hoses. The customer is requested to arrange the plant
facility connection ports.
d) DISCO arranges electrical wiring to the connection ports of the DFD6240. The customer is requested to
arrange power cables and plant facility connection port.

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Air Piping
DISCO arranges the air piping to the connection ports Rc 1/4 of the DFD6240. The customer is requested
to arrange hoses and joints as well as plant facility connection ports.
There are following two types of piping specification depending on whether clean air is used or not.
Arrange applicable hoses and joints suitable for your situation.

a) When clean air is used

DFD6240 Plant Facility Arrangement
Hoses /
Joints
Air
Air IN (Rc 1/4) Pressure: 0.5 to 0.8 MPa

Clean air IN (Rc 1/4) Clean air

Pressure: 0.5 to 0.8 MPa

N2 for UV IN(Rc 1/4) N2

Pressure: 0.2 to 0.4 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction : Air filter

b) When clean air is not used

DFD6240 Plant Facility Arrangement
Hose /
Joint
Air IN (Rc 1/4) Air
Air Air IN
Pressure: 0.5 to 0.8 MPa

Clean
air

N2
N2 for UV IN(Rc 1/4)
Pressure: 0.2 to 0.4 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction : Air filter

Air Piping Connection Parts

Note:
1. DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.
2. DISCO can provide two types of braided hose and three types of polyurethane tube as optional
accessories. If you need them, specify the quantity and length necessary to your DISCO representative.
3. DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection of above Note 2 and screw diameter. If you
need them, specify the quantity and type necessary to your DISCO representative.

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Water Piping
DISCO arranges the water piping to connection ports Rc 1/4 and Rc 3/8 of the DFD6240. The customer is
requested to arrange hoses and joints as well as plant facility connection ports.
There are following five types of piping specification depending on the difference of branching method of
deionized water. Arrange appropriate hoses and joints suitable for your situation.
Also, in order to protect the machine, install a filter to remove foreign matters of which particle size is
over 100 μm in the location just before the cutting water connection port of the machine (at the location
shown with in the figures below). If you use the water temperature control unit or DI water
recycling unit manufactured by DISCO, the filter is unnecessary.
The filter is available as an optional accessory provided by DISCO.

a) When deionized water is used after branching into cutting water and spinner cleaning water

DFD6240 Plant Facility Arrangement

Hoses /
Joints
Rinse water
Rinse water IN (Rc 1/4)
Pressure: 0.2 to 0.4 MPa

Deionized water IN (Rc 3/8) Deionized water

Cutting water Deionized Pressure: 0.2 to 0.4 MPa
water IN
Cleaning water
City water
Cooling water IN Pressure: 0.2 to 0.4 MPa
(Rc 1/4)

Drain
Cooling water OUT (Rc Drain not containing cutting dust
1/4)

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

b) When deionized water input is separated to cutting water, and spinner cleaning water systems

DFD6240 Plant Facility Arrangement

Hoses /
Joints
Rinse water
Rinse water IN (Rc 1/4)
Pressure: 0.2 to 0.4 MPa
Deionized water IN (Rc 3/8)
Deionized water
Cutting water Deionized Pressure: 0.2 to 0.4 MPa
water IN
Spinner cleaning water IN (Rc 1/4) Deionized water
Spinner Pressure: 0.2 to 0.4 MPa
Cleaning water cleaning
water IN City water
Cooling water IN Pressure: 0.2 to 0.4 MPa
(Rc 1/4)
Drain
Cooling water OUT Drain not containing cutting dust
(Rc 1/4)

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

Water Piping Connection Parts (No. 1)

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Water Piping (Continued)

c) When deionized water is used after branching into cutting water, spinner cleaning water and
cooling water

DFD6240 Plant Facility Arrangement

Hoses /
Joints

Rinse water
Rinse water IN (Rc 1/4) Pressure: 0.2 to 0.4 MPa

Deionized water IN (Rc 3/8)

Deionized water
Cutting watert Deionized Pressure: 0.2 to 0.4 MPa
water IN
Cleaning water
Cooling water
Drain
Cooling water OUT Drain not containing cutting dust
(Rc 1/4)

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

d) When deionized water is used after branching into cutting water, spinner cleaning water and
rinse water

DFD6240 Plant Facility Arrangement

Hoses /
Joints
Deionized water IN (Rc 3/8)
Deionized water
Cutting water Deionized Pressure: 0.2 to 0.4 MPa
water IN
Cleaning water
Rinse
City water
Cooling water IN Pressure: 0.2 to 0.4 MPa
(Rc 1/4)

Drain
Cooling water OUT Drain not containing cutting dust
(Rc 1/4)

Supplied from DISCO Arranged by the Customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

Water Piping Connection Parts (No. 2)

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Water Piping (Continued)

e) When deionized water is used after branching into cutting water, spinner cleaning water, rinse
water and cooling water

DFD6240 Plant Facility Arrangement

Hoses /
Joints

Deionized water IN (Rc 3/8) Deionized water

Pressure: 0.2 to 0.4 MPa
Cutting water Deionized
water IN
Cleaning water
Rinse
Cooling water

Cooling water OUT Drain

(Rc 1/4) Drain not containing cutting dust

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

Water Piping Connection Parts (No. 3)

Note:
1. DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.
2. DISCO can provide two types of braided hose and three types of polyurethane tube as optional
accessories. If you need them, specify the quantity and length necessary to your DISCO representative.
3. DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection of above Note 2 and screw diameter. If you
need them, specify the type and quantity necessary to your DISCO representative.
4. The hoses and joints to be arranged by the customer to install the filter unit [optional accessory] are the
same as indicated in the diagrams.
5. When deionized water is used as cutting water and the filter unit [optional accessory] is selected, the
machine incorporates the filter unit.

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B. INSTALLATION AND TRANSFERRING

OPERATION
Contents of this chapter

Section No. Title Contents

1 Installation Operation ・Procedures of installation
・Necessary adjustments for installation
2 Transferring Operation ・Procedures of machine transfer

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1. Installation Operation
Operation flow

1-1 Hoisting and Lowering the Machine by a Crane

1-2 Transferring the Machine

1-3 Installing the Machine With the Leveling Mount

1-4 Removing the Drive Axis Metal Fixtures

1-5 Mounting the Status Indicator, Piping and Wiring Connection

1-6 Mounting the Machine Outer Cover

1-7 Leveling the Machine With the Leveling Mount

1-8 Mounting the Machine Anchors [Optional Accessory]

1-9 Completion of Installation Operation

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Safety items for installation

WARNING

Air exhaust, water drainage, and cutting particles must be properly

managed/disposed of in compliance with applicable environmental regulations
Due to the nature of its processing characteristics, the machine may produce harmful
substances depending on the types of workpiece it processes.

It is recommended that the installed machine be secured with the "machine

fixation anchor metal"
Disco provides "machine fixation anchor metal" as an optional accessory for
human/equipment protection in the event of an earthquake or other disaster.

The floor on which the machine is installed should be provided with sufficient
waterproofing and drainage treatment
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

Periodically inspect the water pipe fittings to make sure that no water leaks from
them
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

NOTICE

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are furnished in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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1-1. Hoisting and Lowering the Machine by a Crane

Equipment you must have ready

WARNING

Before hoisting the machine, inspect the hoisting jigs and slings for abnormalities
Inspections should be performed by a person with expertise. Do not use the hoisting
jigs and slings when any abnormality is found as a result of inspections.
Otherwise the hoisting jigs and slings may be broken due to insufficient strength or
center-of-gravity may be displaced, causing the machine to fall down. This may result
in severe injury or death of any person underneath the machine.

Use the specified hoisting jigs when hoisting the machine

If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine.

Hoisting jigs
Item DISCO Part ID Qty
[1] Lifting plate HANGER 2
LPXJ-020004-0
[2] Hexagonal bolt for displacement HEXAGON SOCKET HEAD CAP SCREW 4
prevention MSS100025UN-0
[2] Hexagonal nut for displacement HEXAGON NUT 4
prevention M6N-100-1UN-0
[3] Rope SLING 4
LJKJ-911120-0
[4] Shackle SHACKLE 4
LCAJ-910006-0
[5] Shackle SHACKLE 4
LENJ-910035-0
[6] Hoisting rope SLING (1M) 2
LJEJ-910004-0
[7] Lifting bracket HANGER 1
LENJ-910003-0

Others
Safety shoes and protective gloves

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Procedures for hoisting and lowering the machine by a crane

DANGER

While the machine is hoisted or lowered, stay away from the area beneath and
around the machine
If the machine should fall while the machine is hoisted or lowered, persons in such
area may be crushed to death or severely injured. Or if the machine should swing like
a pendulum, they may be caught between the machine and wall or hit by the machine
to death or severely injured.

Ensure that the employed crane is rated for a hoisting load of 1,340 kg or
heavier and withstands the machine weight, boom length and hoisting angle
If the machine should fall while the machine is hosted or lowered, persons beneath or
near it may be crushed to death or severely injured. Note that the mass of the machine
including the hoisting jigs is approximately 1,340 kg.

WARNING

Use the specified hoisting jigs when hoisting the machine

If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine. Also, the machine may be damaged.

Be sure to firmly secure the displacement prevention bolts to the hoisting jigs
If the displacement prevention bolts come off from the hoisting jigs during hoisting,
the hoisted machine may lose balance and fall. If the machine falls, you could be
crushed to death or seriously injured.

Make sure to firmly secure the shackles

If the shackles are disengaged from the jigs during machine hoisting, the hoisted
machine may lose balance and drop. If the machine falls, you could be crushed to
death or seriously injured.

Make sure to wear safety shoes and protective gloves throughout the machine
hoisting/lowering process
Your feet or hands could be caught or cut off by the machine while the machine is
hoisted or lowered.

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Insert the [1] Lifting plate into the machine frame.
3 Attach the [2] Hexagonal bolt and nut for displacement prevention to the mounting holes
of the inserted [1] Lifting plate.
4 Draw the [3] Rope through the [4] Shackle.
5 Attach the [4] Shackle (with the [3] Rope) to the [1] Lifting plate.
6 Draw the [3] Ropes and [6] Hoisting ropes through the [5] shackles.
7 Attach the [5] Shackle (with the [3] Rope) and [5] Shackle (with the [6] Hoisting rope) to
the [7] Lifting bracket.
8 Engage the hoisting [6] Hoisting ropes with a crane.

[7]: Lifting bracket

[6]: Hoisting rope

Detailed drawing of
shackle attachment

[5]: Shackle

[3]: Rope

(Screw-in the fixing screw)

[4]: Shackle

[2]: Hexagonal bolt and nut for [1]: Lifting plate

displacement prevention
Front side

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure

8
(Continued)

Left side

9 Make sure that the ropes do not come into contact with any part of the machine, and then
start hoisting.
The mass of the machine including the hoisting jigs is approximately 1,340 kg.
Ensure that the employed crane rating is adequate for the machine weight. Also, be sure
that the employed wires and other hoisting accessories are appropriate for the machine
weight.
・Hoist the machine without shocking the machine.
・Do not tilt the machine.
・Do not apply any undue force to the covers.
10 Lower the machine.
・While lowering, exercise care not to shock the machine.

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1-2. Transferring the Machine

Summary of this section
You can move the machine by either hand push or using a pallet truck.
Each procedure is described in the sub-sections respectively.
Section No. Title Contents
1-2-1 Transferring the Machine by ・Procedures for transferring the machine by
Hand Push hand push
1-2-2 Transferring the Machine by ・Procedures for transferring the machine by
Pallet Truck pallet truck

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1-2-1. Transferring the Machine by Hand Push

Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for transferring the machine

WARNING

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

When transferring the machine, use a flat transfer route

When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine

If the covers and sub-frame are pushed or pulled while the machine is transferred, the
resin cover might be broken or sub-frame might be bent.

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Procedures for transferring the machine (Continued)

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)
3 Push the main body frame to move the machine.
・To move the machine, push only the main body frame.

Main body frame

Front side

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1-2-2. Transferring the Machine by Pallet Truck

Equipment you must have ready

Safety shoes and protective gloves

Pallet truck

Procedures for transferring the machine by pallet truck

DANGER

When transferring the machine by pallet truck, make sure that the gravity center
of the machine is on the pallet truck center
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The mass of
the machine including the hoisting jigs is approximately 1,340 kg.

The employed pallet truck must be capable of moving up and down and
transporting a load of 1,340 kg and be equipped with a fork of 1,100 mm or
longer
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The mass of
the machine including the hoisting jigs is approximately 1,340 kg.

Check the insertion position of the fork on the drawing before starting the
operation
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Make sure that the fork of the pallet truck is correctly inserted into the designated
position so that the gravity center of the machine is on the center of the pallet
truck
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Ensure that there is no person in the machine transfer route and the area around
it
If the machine should topple or fall off the pallet truck, persons in such area may be
severely injured or crushed to death.

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Procedures for transferring the machine by pallet truck (Continued)

WARNING

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

Before transferring the machine, make sure that the axes are secured with the
metal fixtures
If you transfer the machine without attaching the metal fixtures to the axes, it may
take a great deal of time later to readjust the machine's processing accuracy. For the
procedure to secure the metal fixtures, refer to Section 2-4 [Mounting the Drive Axis
Metal Fixtures] in this chapter.

When transferring the machine, use a flat transfer route

When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine

If the covers and sub-frame are pushed or pulled while the machine is transferred, the
resin cover might be broken or sub-frame might be bent.

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)

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Procedures for transferring the machine by pallet truck (Continued)

Step No. Procedure

3 From the front side of the machine, insert the fork of the pallet truck under the machine as
shown below, and lift the machine.

Top side

Machine Front

Left side

4 Transfer the machine to the installation site.

→For details of installation site; See Section 3-1 [Installation Site] of Chapter A.
5 Lower the fork and then pull it out of the machine.

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1-3. Installing the Machine with the Leveling Mount

Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for installing the machine with the leveling mount

The casters attached underneath the machine make the machine transferring easier.
When the machine arrives at the intended installation site, however, you have to secure the machine there
and take some measure to prevent the machine from moving easily. For this purpose, attach the leveling
mounts and jack the machine up in order to disable the casters.

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 59 and 77 mm
If the machine is jacked up higher than this, the leveling mount may come off. If the
leveling mount comes off during jacking operation, your feet or hands may be caught
or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

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Procedures for installing the machine with the leveling mount (Continued)

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Place the dowel pin of the leveling mount just under the positioning hole located
underneath the main body frame. Then rotate the leveling mount handle lightly
counterclockwise by hand.
・Perform the operation above for all 4 leveling mounts.
→For the positioning hole: See Section 3-1 [Installation Site] of Chapter A.
3 Verify that the dowel pin fits into the positioning hole and the leveling mount does not
move to-and-fro or side-to-side.
・Perform the operation above for all 4 leveling mounts.
4 With a wrench, rotate the leveling mount handle counterclockwise until all the casters are
lifted above the floor surface. Make necessary adjustments in the front-rear and left-right
directions so that the machine is roughly parallel to the floor surface.
・In jacking-up operation, ensure that the distance between the machine bottom end and
the floor surface becomes between 59 and 77 mm.
(When the machine is jacked up by 70 mm, the chuck table surface is positioned at a
height of 900 mm from the floor.)
Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

59 to 77 mm

5 Visually make sure that all the casters mounted on the bottom of the machine are lifted
above the floor.

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1-4. Removing the Drive Axis Metal Fixtures

About removing the drive axis metal fixtures
Before installing the machine, it is necessary to remove metal fixture retaining screws for each axis and
the drive axis metal fixture for some axes.
All removed metal fixtures and retaining screws must be stored in the case for drive axis metal fixtures
(LNLN-020001-0).
Store the metal fixtures and retaining screws so as not to lose them since they will be reused when
transferring the machine.

Operation flow

1-4-1 Removing the X-Axis Metal Fixture

1-4-2 Removing the Y-Axis Metal Fixtures

1-4-3 Removing the Z-Axis Metal Fixtures

1-4-4 Removing the Metal Fixtures of the Upper and Lower Arm

1-4-5 Removing the Metal Fixtures of the Spinner Axis

Equipment you must have ready

4 mm Allen wrench
5 mm Allen wrench
6 mm Allen wrench
10 mm wrench
Phillips screwdriver

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1-4-1. Removing the X-Axis Metal Fixture

Procedures for removing the X-axis metal fixture

Step No. Procedure

1 From the right side of the machine, loosen the metal fixture retaining screws (M6) of the
X-axis section and remove the metal fixture.

Retaining
screws (M6)

X-axis metal
fixture

Item DISCO Part ID

BRACKET (FIXTURE,X)
X-axis metal fixture
LKHN-912969-0

Continued in the next section.

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1-4-2. Removing the Y-Axis Metal Fixtures

Procedures for removing the Y-axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the rear side of the machine, loosen the metal fixture retaining screws and nut (M6)
located at the rear of the Y-axis section. Then remove the metal fixture.

Retaining screws（M6）

Y-axis metal fixture

Item DISCO Part ID

BRACKET (FIXTURE,Y)
Y-axis metal fixture
LKHN-912970-0

Continued in the next section.

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1-4-3. Removing the Z-Axis Metal Fixtures

Procedures for removing the Z-axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the rear side of the machine, loosen the metal fixture retaining screws (M6) located
at the upper of the Z-axis section. Then remove the metal fixture.

Retaining screws（M6）

Z-axis metal fixture

Item DISCO Part ID

BRACKET (FIXTURE,Z)
Z-axis metal fixture
LKHN-912971-0

Continued in the next section.

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1-4-4. Removing the Metal Fixtures of the Upper and Lower Arm
Operation flow

1-4-4-1 Removing the Transfer Axis Cover

1-4-4-2 Removing the Upper Arm Metal Fixture

1-4-4-3 Removing the Lower Arm Metal Fixture

1-4-4-4 Mounting the Transfer Axis Cover

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1-4-4-1. Removing the Transfer Axis Cover

Procedures for removing the transfer axis cover

CAUTION

The transfer axis covers removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Open the arm section cover.
2 Unscrew the cover retaining screws of the transfer axis cover (upper and lower).
Cover retaining
screw (upper)
Transfer axis cover (upper)
cover retaining
screw (upper)

Transfer axis cover

(lower)

Cover retaining screw

(lower)

Arm section cover

3 Remove the upper transfer axis cover. To disengage the transfer axis cover, pull the cover
toward you. Then place it sufficiently away from the working area.
4 Remove the lower transfer axis cover. To disengage the transfer axis cover, pull the cover
toward you. Then place it sufficiently away from the working area.

Continued in the next section.

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1-4-4-2. Removing the Upper Arm Metal Fixture

Procedures for removing the upper arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the upper arm and remove the metal
fixture.

Upper arm metal fixture (horizontal)

Retaining screws (M5)

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Procedures for removing the upper arm metal fixture (Continued)

Step No. Procedure

1
(Continued)

Upper arm metal fixture

(vertical)

Retaining screws (M5)

Item DISCO Part ID

BRACKET
Upper arm metal fixture (horizontal)
LJTT-910021-0
BRACKET (U/A,CLAMP)
Upper arm metal fixture (vertical)
LKHN-010016-0

Continued in the next section.

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1-4-4-3. Removing the Lower Arm Metal Fixture

Procedures for removing lower arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the lower arm and remove the metal
fixture.

Lower arm metal

fixture
Retaining
screw (M5)

Item DISCO Part ID

BRACKET (L/A,CLAMP)
Lower arm metal fixture
LKHT-912919-1

Continued in the next section.

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1-4-4-4. Mounting the Transfer Axis Cover

Procedures for mounting the transfer axis cover

Procedure
Step No.
(Continued from the previous section)
1 Push the upper arm toward the rear of the machine until it stops.
2 Install the lower transfer axis cover to its original position.
Cover retaining
screw (upper)
Transfer axis cover (upper)
cover retaining
screw (upper)

Transfer axis cover

(lower)

Cover retaining screw

(lower)

Arm section cover

3 Install the upper transfer axis cover to its original position.

4 Tighten the upper and lower cover retaining screws firmly.

Continued in the next section.

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1-4-5. Removing the Metal Fixtures of the Spinner Axis

Procedures for removing the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the spinner axis and remove the metal
fixture.

Spinner axis
metal fixture

Retaining screw (M5)

Item DISCO Part ID

FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Close the arm section cover.

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1-5. Mounting the Status Indicator, Piping and Wiring

Connection
Operation flow

1-5-1 Mounting the Status Indicator

1-5-2 Connecting Piping

1-5-3 Connecting Power Supply Wiring

Equipment you must have ready

3 mm Allen wrench
30 mm wrench
Torque driver
Joint [optional accessory]
Hose [optional accessory]
・The necessary quantity of the hose and joint is different depending on the piping arrangement of the
customer.
→For details: See Section 4 [Piping and Wiring Connection] of Chapter A.

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1-5-1. Mounting the Status Indicator

Procedures for mounting the status indicator

Procedure
Step No.
(Continued from the previous section)
1 Remove the upper cover [A] of the machine.

[A]
Retaining
screw

Status indicator
connector cable

2 Secure the status indicator at the position in the figure above by the retaining screws.
3 Connect the status indicator connector cable (JSTC) to the mating machine-side
connector.
4 Reinstall the cover [A].

Continued in the next section.

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1-5-2. Connecting Piping

Procedures for connecting piping

WARNING

When using N2 gas as a substitute for clean air, install a main valve which
satisfies all the requirements listed below for the N2 supply line at the facilities
・The main valve is located close to the machine.
・The main valve is used only for the machine.
・The main valve is located at the place to which operators can easily access to open
or close it.

When using N2 gas as a substitute for clean air, close the main valve of the N2
gas supply line at the facilities before performing maintenance of the machine
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

A hose and hard piping line between the machine drain port and the plant-side
drain inlet must be inclined
If the hose and hard piping line are positioned in parallel to or higher than the drain
port, water remains in the hose, which may cause water leakage from the hose joint. It
may also cause water leakage from the water case.

When the piping connection work for the cutting water and cooling water is
completed, check looseness of connections for the joints
If water leakage should occur, the floor surface and downstairs might be damaged.

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Procedures for connecting piping (Continued)

CAUTION

Ensure that air supply connection coupling is properly completed

Inadequate connection will cause the pipe to be disconnected. If the air pipe is
disconnected during spindle rotation, the spindle may fail.

Perform piping operation carefully so as not to mix up piping of the cutting and
cooling water hoses
Since water quality between cutting and cooling water is different, a mistake in piping
of cutting and cooling water may damage workpieces or adversely affect processing
accuracy.

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Procedures for connecting piping (Continued)

Procedure
Step No.
(Continued from the previous section)
1 As shown below, connect the hoses to the drain and duct exhaust ports at the rear of the
machine.
・Apply silicone sealant to the hose and cuff joints.

Rear side

Drain port connection Duct port connection

Apply silicone sealant Apply silicone sealant

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Procedures for connecting piping (Continued)

Step No. Procedure

2 Using joints, connect the hose to the supply port of the individual utility manifold.
The folowing figure shows an example of connecting pipimg with the braided hose and
braided hose joint.

Main air IN Clean air IN

Spinner cleaning water IN

Rinse water IN [Optional accessory] Deionized water IN

Cooling water IN
Cooling water OUT
N2 for UV IN [Optional accessory]

・It is recommended that the customer furnish braided hose joints as indicated in the
above figure. The braided hose joint is provided as an optional accessory.
3 Check looseness of connections for the joints.

Continued in the next section.

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1-5-3. Connecting Power Supply Wiring

Operation flow

1-5-3-1 Removing the Machine Outer Cover

1-5-3-2 Connecting the Power Supply Wiring

1-5-3-3 Mounting the Machine Outer Cover

1-5-3-4 Completion of Connecting the Power Supply Wiring

Safety items for connecting power supply wiring

WARNING

When you make power cable connection, make sure to connect the PE wire of
the cable first and confirm its connection
If you come into contact with the machine when its PE wire is not connected, you
may receive an electric shock that could result in severe injury or death.

When connecting the power cable terminal to the power circuit breaker, be sure
to use a calibrated torque driver and tighten the screws of the breaker terminal
block with the specified torque (3 N•m)
If the torque is not just enough, the connection between the power cable terminal and
breaker terminal block may heat up, which could cause a fire.

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

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Safety items for connecting power supply wiring (Continued)

WARNING

Before connecting the power cables, be sure to shut OFF the facility power
source
If you connect power cables while the electricity is flowing through the machine, you
may receive an electric shock that may lead to serious injury or death.

Connect the PE wire so that it is not strained even when a load is applied to the
cable
If the PE wire is disconnected, it could cause electric shock due to electric leakage.
To prevent the PE wire from disconnecting under the strain, make sure that the PE
wire of the power cable is at least 150 mm longer than the L1/L2/L3 lines.
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

CAUTION

Connect the power cable L1, L2, and L3 lines to the respective designated
positions on the breaker terminal block
If the L1/L2/L3 lines are connected in the wrong positions, the machine will not
operate properly and there is a risk that it will be damaged or processing accuracy will
be affected. Connect the power cable in the correct positions on both the plant facility
side and the machine side.

Breaker
L1 L2 L3 terminal block

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List of power cable

The following power cables are prepared for this machine as optional accessories.
Nominal cross -
Length sectional area Number Terminal Terminal
Specification Part No. of for power for PE
(m) mm2 terminals wire wire
AWG
equivalent
Standard 3 EKFJ-010355-0 12 4 4 M5 M5
(AC200 to 240 V) 5 EKFJ-010356-0 12 4 4 M5 M5
Transformer 20 A
specification 7 EKFJ-010357-0 12 4 4 M5 M5
(AC380 to 415 V)

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1-5-3-1. Removing the Machine Outer Cover

Procedures for removing the machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Turn the breaker lever to the "RESET" position and use the cover unlock key to release
the lock of the cover [I].

[I]

[J]

Rear side

Breaker lever

Circuit breaker

[I] cover

2 Remove the [I] cover.

・Store the removed outer cover sufficiently away from the working area.
・The [I] cover cannot be removed when the breaker lever is "ON" or "OFF".
・The breaker lever cannot be "ON" when the [I] cover is removed.
3 Remove the [J] cover.

Continued in the next section.

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1-5-3-2. Connecting the Power Supply Wiring

Procedures for connecting the power supply wiring

Procedure
Step No.
(Continued from the previous section)
1 Have on hand the cable, terminals and other items required for power cable connection.
・Make sure that the PE wire of the power cable is at least 150 mm longer than the
L1/L2/L3 lines.
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

2 Route the power cable to the inner side of the machine, as shown below. Keep the power
cable away from other cables.

Power Cable

Rear side

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Procedures for connecting the power supply wiring (Continued)

Step No. Procedure

3 Connect the power cable PE line (ground line) to the PE terminal block and tighten the
screws of the PE terminal block with the specified torque (3 N•m).
・In power cable connecting, be sure to connect the PE line first.
[Standard specification]
Earth leakage breaker
L1 L2 L3

PE Terminal bar
PE

PE=Ground (GND)

[Transformer version] (AC380 to 415 V)

Circuit breaker
L1 L2 L3

PE Terminal bar
PE

PE=Ground (GND)

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Procedures for connecting the power supply wiring (Continued)

Step No. Procedure

4 Connect the power cable L1/L2/L3 lines to the breaker terminal block and tighten the
screws of the breaker terminal block with the specified torque (3 N•m).
・When connecting the optional transformer or UPS (Uninterruptible Power Supply) unit,
they must be connected with the machine before connecting the machine to the facility
power source.
[Standard specification]
Earth leakage breaker
L1 L2 L3

PE Terminal bar
PE

[Transformer version] (AC380 to 415 V)

Circuit breaker
L1 L2 L3

PE Terminal bar
PE

5 Check to make sure that the PE wire terminal is not strained when you lightly pull down
the power cable by hand.
・If the PE wire terminal is strained, it means that the PE wire is not long enough. Use a
PE wire with enough length.

Continued in the next section.

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1-5-3-3. Mounting the Machine Outer Cover

Procedures for mounting the circuit machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Install the covers in order of [I] and [J].

[I]

[J]

Rear side

2 Lock up the circuit breaker lever with a padlock or the like.

Continued in the next section.

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1-5-3-4. Completion of Connecting the Power Supply Wiring

Procedures for completion of connecting power supply wiring

Procedure
Step No.
(Continued from the previous section)
1 Connect the power cable to the facility power source.
・When you make cable connection to the facility power source, be sure to connect the
PE wire first using an adequately long PE wire.
・If you connect the optional transformer or UPS (Uninterruptible Power Supply) unit,
first connect them with the machine before connecting the machine to the facility power
source.

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1-6. Mounting the Machine Outer Cover

Machine outer cover configuration

[B] [B]

[A] [A]

[G]

[E]

[F] [D] [H]

[C]
[D]

[C]

[I]

[J]

Rear side

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Procedures for mounting the machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Install the covers at the front side of the main body in order of [C] and [D].
Secure the cover [D] to the left side of the main body with screws.

[C]
[D]

2 Install the covers at the left side of the main body in order of [E] and [F].

[E]

[F]

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Procedures for mounting the machine outer cover (Continued)

Step No. Procedure

3 Install the covers at the right side of the main body in order of [G] and [H].

[G]

[H]

4 Install the covers at the rear side of the main body in order of [I] and [J].

[I]

[J]

背面図

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1-7. Leveling the Machine with the Leveling Mount

Operation flow

1-7-1 Mounting the Spirit Level

1-7-2 Removing the Machine Outer Cover

1-7-3 Leveling the Machine

Equipment you must have ready

Spirit level (Minimum tick: 20 μm/m)

22 mm wrench
Safety shoes and protective gloves

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1-7-1. Mounting the Spirit Level

Mounting the spirit level

WARNING

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Procedure
Step No.
(Continued from the previous section)
1 Wear the safety shoes and protective gloves.
2 Turn ON the facility power supply.
3 Unlock the lever of the circuit breaker, and then turn ON the circuit breaker.
4 Insert the key into the main switch.
5 Rotate the key to "START" position to turn ON the machine.
6 Press the <System Initial> button.
・System initialization will be effected.
7 Open the arm section cover.
8 Make sure that there is no dirt or other foreign matters on the upper surface of the table
base. Place a spirit level on the table base.

Continued in the next section.

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1-7-2. Removing the Machine Outer Cover

Procedures for removing the machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Turn OFF the main switch and then remove it.
2 Turn OFF the circuit breaker and then lock its lever with a padlock or the like.
3 Shut OFF the facility power supply.
4 Remove the covers in order of [C], [H], [F], [D], and [J]. The cover [D] is secured to the
left side of the main body with screws. After removing the cover [F], unscrew the
retaining screws of the cover [D] and then remove the cover [D].

[F] [H]
[D]
[C]

[J]

Rear side

Continued in the next section.

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1-7-3. Leveling the Machine

Procedures for leveling the machine

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down during jacking operation, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 59 and 77 mm
If the machine is jacked up higher than this, the leveling mount may come off. If the
leveling mount comes off during jacking operation, your feet or hands may be caught
or cut off by the machine.

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Procedures for leveling the machine (Continued)

Procedure
Step No.
(Continued from the previous section)
1 Adjust the level of the machine by alternately turning the handle of the leveling mount
(front, rear, left and right).
・In jacking-up operation, ensure that the distance between the machine bottom end and
the floor surface becomes between 59 and 77 mm.
(When the machine is jacked up by 70 mm, the chuck table surface is positioned at a
height of 900 mm from the floor.)
Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

59 to 77 mm

2 With a spirit level, level the machine until the spirit level reads 0.02 mm/1 m or lower for
both the X- and Y-direction.
Table base

Spirit level

Y-direction
X-direction

X-direction Y-direction

Front of the machine

3 Remove the spirit level from the table base surface.

4 Secure the machine to the floor with the machine anchors.
→For the anchoring procedure:
See Section 1-8 [Mounting the Machine Anchors [Optional Accessory]] of this chapter.

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1-8. Mounting the Machine Anchors [Optional Accessory]

Equipment you must have ready

13 mm wrench
19 mm wrench
Safety shoes and protective gloves

Procedures for mounting the machine anchors

WARNING

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure

1 Wear safety shoes and protective gloves.
2 As shown below, secure the machine to the floor surface using the machine anchors.

Metal fixture Anchor bolt

3 Install the covers in the order of [D], [F], [H], [C] and [J].
Secure the cover [D] to the left side of the main body with screws.

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1-9. Completion of Installation Operation

Procedures for completion of installation operation

WARNING

When the installation work is completed, check that there is no water leakage
from any tube while feeding the cutting water and cooling water
If water leakage should occur, the floor surface and downstairs might be damaged.

Ensure that no person other than the maintenance personnel touches the
machine during adjustment
The adjustment procedure set forth in this section is performed with the outer covers
removed while the machine is energized. There are drive sections near the section to
be adjusted. If a person other than the maintenance personnel touches machine, the
machine may operates unexpectedly, causing the injury of the personnel.

After you move the axes, be sure to open the splash cover (front) in order to
activate the interlock of the cover
If you keep the splash cover (front) closed after moving the axes, you have to perform
the adjustment operation with the interlock system released. Since there are drive
sections near the working space, if the interlock system is canceled, your hands or
arms may be caught or amputated due to unexpected machine operation.

NOTICE

When you rotate the regulator knob, first raise the knob to unlock it
Also, after you finish necessary work, press down the knob to properly lock it.

Unlock Regulator knob

Lock

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Procedures for completion of installation operation (Continued)

Step No. Procedure

1 Turn ON the facility power supply.
2 Unlock the lever of the circuit breaker and then turn ON the circuit breaker.
3 Insert the key into the main switch.
4 Turn ON the machine by rotating the key to the "START" position.
5 Press the <System Initial> button.
・System initialization will be effected.
6 Open the splash cover (front).
・The interlock system is actuated.
7 Remove the covers [F] and [J].

[F] [J]

Rear side

8 Pull up the regulator knobs of the main air, clean air and deionized water to unlock them.

Regulator knob for Regulator knob for

main air clean air
Unlock

Regulator knob for

deionized water
Lock
Lock

Air pressure sensor Unlock

Clean Air pressure Lock
sensor
Unlock
Deionized water
pressure sensor

9 Completely close the regulator knobs of the main air, clean air and deionized water by
turning them clockwise until they stop.
10 Press down the regulator knobs of the main air, clean air and deionized water to lock
them.

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Procedures for completion of installation operation (Continued)

Step No. Procedure

11 Open the factory's master valves of the main air, clean air and deionized water.
12 Pull up the regulator knob of the main air, clean air and deionized water to unlock them.
13 Turn the regulator knobs of the main air, clean air and deionized water so that their
pressure sensors read the following values:
Main air: 0.5 MPa
Clean air: 0.5 MPa
Deionized water: 0.2 to 0.3 MPa
14 Press down the regulator knobs of the main air, clean air and deionized water to lock
them.
15 Install the covers [F] and [J].
16 Close the splash cover (front).
17 Mount the chuck table.
→For the procedures to mount the chuck table:
See Section 1 [Chuck Table Replacement] of Chapter B in the Maintenance Manual.
18 Press the <Spindle> button.
19 Press the <Cutting Water> button.
20 When you rotate the regulator knob, first raise the knob to unlock it
Also, after you finish necessary work, press down the knob to properly lock it.

Spinner cleaning
water IN
Rinse water IN
[Optional accessory]
Drain port Deionized water IN
Cooling water IN

Cooling water N2 for UV IN

OUT [Optional accessory]
Rear side

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2. Transferring Operation
Operation flow

2-1 Terminating the Machine

2-2 Removing the Machine Outer Cover and Status Indicator

2-3 Disconnecting Piping and Wiring

2-4 Mounting the Drive Axis Metal Fixtures

2-5 Removing the Leveling Mount

Transferring the Machine

→See Section 1-2 of this chapter

Hoisting and Lowering the Machine

→See Section 1-1 of this chapter

Installing the Machine

→See Sections 1-3 to 1-9 of this chapter

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Safety items for transferring operation

NOTICE

When it is necessary to transfer or dispose of the machine, contact your nearest

DISCO office
Disco will provide you with detailed information and precautions required for
carrying out such work and manage the machine serial number file at the new
installation site.

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are available in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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2-1. Terminating the Machine

Operation flow

Checking that the spindle and cutting water stop

and system initialization has normally completed.

→See Section 10-1 [Verification of Stoppage of Spindle and Cutting Water and Initialization] of
Chapter B in the Operation Manual.

Cleaning operation

→See Section 10-2 [Cleaning Operation] of Chapter B in the Operation Manual.

For CE-marking specification machine:

Moving the spinner table
Before turning the power OFF, move the spinner table down to the lowest position.
Press the <System Initial> button to effect system initialization.

Press the <F3> button on the ENGINEERING MAINTENANCE screen [7.0].

・The I/O CHECK screen appears.
→See Section 4 [Sensor/Solenoid Valve Check] of Chapter C in the Maintenance Manual.

Using the I/O CHECK screen, move the spinner table down to the lowest position.
・Follow the procedure below to move the spinner table down to the lowest position.
1. Turn <2040: Move S/T up/down> OFF.
2. Turn <2063: Move S/T down> ON.

Turning the power OFF

→See Section 10-3 [Turning the Power OFF] of Chapter B in the Operation Manual.

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2-2. Removing the Machine Outer Cover and Status

Indicator
Safety items for the machine outer cover removal operation

CAUTION

The machine outer covers removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Operation flow

2-2-1 Turning OFF the Power

2-2-2 Removing the Machine Outer Cover

2-2-3 Removing the Status Indicator

Equipment you must have ready

Item DISCO Part ID

KEY (FASTENER)
Cover unlock key
LHLC-010010-0

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2-2-1. Turning OFF the Power

Procedures for turning OFF the power

Step No. Procedure

1
Press to display the axis control keyboard.
2 On the ENGINEERING MAINTENANCE screen [7.0], press <F2>.
・AXIS OPERATION screen [7.2] appears.

3 Press <Y>.
・Then the Y-axis has been selected.
4 Using <F2>, <F3>, <F4> and <F5>, move the Y-axis to its rear end.
5 Press <Z>.
・Then the Z-axis has been selected.
6 Using <F2>, <F3>, <F4> and <F5>, move the Z-axis to its upper end.
7 Press <Pushpull>.
・Then the lower arm has been selected.
8 Using <F7>, <F8>, <F9> and <F10>, move the lower arm above the chuck table.
9 Turn OFF the machine power.
→See Section 10 [Terminating the Machine] of Chapter B in the Operation Manual.
10 Turn OFF the facility power supply.

Continued in the next section.

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2-2-2. Removing the Machine Outer Cover

Machine outer cover configuration
→See Section 1-6 [Mounting the Machine Outer Cover] of this chapter.

How to unlock the outer cover

As shown below, insert the unlock key into the cover lock position in order to release the cover lock and
remove the cover.
Cover lock
Unlock key

Insert the key into lock position

and then lower it down.

Procedures for removing the machine outer cover

WARNING

Before the operation, turn OFF the machine power and facility power source
The machine has hazardous sections where your hands/fingers or other parts of your
body may be caught or cut off.

CAUTION

The covers removed when performing maintenance work on the machine should
be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

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Procedures for removing the machine outer cover (Continued)

Procedure
Step No.
(Continued from the previous section)
1 Remove the cover [I].

[I]

Rear side

2 Lock up the circuit breaker lever with a padlock or the like.

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Procedures for removing the machine outer cover (Continued)

Step No. Procedure

3 Remove the covers in order of [G], [C], [H], [E], [F], [D] and [J].
・The cover [D] is secured to the left side of the machine's body with screws. After
removing the cover [F], unscrew the retaining screws of the cover [D] and then remove
the cover [D].

[G]
[E]

[F]
[C] [H]
[D]

[J]

Rear side

4 Keep the removed outer covers sufficiently away from the working area.

Continued in the next section.

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2-2-3. Removing the Status Indicator

Procedures for removing the status indicator

Procedure
Step No.
(Continued from the previous section)
1 Remove the upper cover [A] of the machine.

[A]
Retaining
screw

Status indicator
connector cable

2 Unscrew the retaining screws of the status indicator and then remove the indicator.
3 Wrap the status indicator with packaging materials and secure it to an arbitrary outer cover
with the cellophane adhesive tape, etc.
4 Reinstall the upper cover of the machine.

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2-3. Disconnecting Piping and Wiring

Equipment you must have ready

30 mm wrench
Safety shoes and protective gloves

Procedures for disconnecting piping and wiring

WARNING

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

Be sure to disconnect the PE wire last after disconnecting power supply cables
If you come into contact with the machine that is not grounded, you may receive an
electric shock which could result in serious injury or death.

The wiring disconnection must be made after shutting OFF the machine power
and the facility power supply
If you make any wiring disconnection while power is supplied, you may receive an
electric shock which could result in serious injury or death.

Wear protective gloves and goggles to clean the inside of the machine and use
tweezers as well to remove broken workpieces
If you perform such work with bare hands, they may be cut or stabbed by the
workpiece.

Do not put your fingers or hands at the drive sections or in the operation space
while the drive sections are operating

Also, make sure that all axes have come to a complete stop before performing the
operation. Otherwise, they may be caught or cut off.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

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Procedures for disconnecting piping and wiring (Continued)

WARNING

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

Do not put your fingers or hands into any air-driven section or operation space
when the air supply is switched on/off
Even when the machine itself is turned off, the air-driven parts may move when the
air supply is switched on or off. In case your fingers or hands are placed in any of
these moving sections or operation space, they may be caught or cut off.

Lock out the water, air and clean air main valves
If any of the main valves (water, air or clean air) is opened by other persons during
machine installation or maintenance, it may cause an accident or machine failure.

Step No. Procedure

1 Disconnect the power cable from the facility power source.
・Be sure to disconnect the PE wire last.
2 Shut OFF the facility-side main valve completely and disconnect pipes.
3 Wear the safety shoes and protective gloves.
4 Drain water from the machine.
・When the floor or machine gets wet, wipe it dry with a cloth or the like.
5 →Remove the machine anchors.
See Section 1-8 [Mounting the Machine Anchors [Optional Accessory]] of this chapter.

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2-4. Mounting the Drive Axis Metal Fixtures

Operation flow

2-4-1 Mounting the X-Axis Metal Fixture

2-4-2 Mounting the Y-Axis Metal Fixtures

2-4-3 Mounting the Z-Axis Metal Fixtures

2-4-4 Mounting the Metal Fixtures of the Lower Arm and Upper Arm

2-4-5 Mounting the Metal Fixtures of the Spinner Axis

Safety items for mounting the drive axis metal fixtures

WARNING

Perform the operation after the machine power, facility power supply and air are
shut OFF
If your hands or fingers are placed in the drive section during axis metal fixture
installation, they may be caught or cut off.

CAUTION

The covers removed when performing maintenance work on the machine should
be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

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Equipment you must have ready

3 mm Allen wrench
4 mm Allen wrench
5 mm Allen wrench
10 mm wrench
Phillips screwdriver

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2-4-1. Mounting the X-Axis Metal Fixture

Procedures for mounting the X-axis metal fixture

Step No. Procedure

1 Push the chuck table base section by hand to move the X-axis to the place where its
locking metal fixture can be screwed down.
2 Secure the X-axis metal fixture from the right side of the machine.

Retaining screws (M6)

X-axis metal fixture

Item DISCO Part ID

BRACKET (FIXTURE,X)
X-axis metal fixture
LKHN-912969-0

Continued in the next section.

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2-4-2. Mounting the Y-Axis Metal Fixtures

Procedures for mounting the Y-axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Mount the Y-axis metal fixture from the rear side of the machine.

Retaining screws（M6）

Y-axis metal fixture

Item DISCO Part ID

BRACKET (FIXTURE,Y)
Y-axis metal fixture
LKHN-912970-0

Continued in the next section.

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2-4-3. Mounting the Z-Axis Metal Fixtures

Procedures for mounting the Z-axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Mount the Z-axis metal fixture from the rear side of the machine.

Retaining screws（M6）

Z-axis metal fixture

Item DISCO Part ID

BRACKET (FIXTURE,Z)
Z-axis metal fixture
LKHN-912971-0

Continued in the next section.

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2-4-4. Mounting the Metal Fixtures of the Lower Arm and Upper Arm
Operation flow

2-4-4-1 Removing the Transfer Axis Cover

2-4-4-2 Mounting the Upper Arm Metal Fixture

2-4-4-3 Mounting the Lower Arm Metal Fixture

2-4-4-4 Mounting the Transfer Axis Cover

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2-4-4-1. Removing the Transfer Axis Cover

Procedures for removing the transfer axis cover

CAUTION

The transfer axis covers removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Open the arm section cover.
2 Unscrew the cover retaining screws of the transfer axis cover (upper and lower).

Transfer axis cover (upper)

Cover retaining Cover retaining

screw (upper) screw (upper)

Transfer axis cover (lower)

Cover retaining screw (lower)

Arm section cover

3 Remove the upper transfer axis cover. To disengage the transfer axis cover, pull the cover
toward you. Then place it sufficiently away from the working area.
4 Remove the lower transfer axis cover. To disengage the transfer axis cover, pull the cover
toward you. Then place it sufficiently away from the working area.

Continued in the next section.

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2-4-4-2. Mounting the Upper Arm Metal Fixture

Procedures for mounting the upper arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Mount the upper arm metal fixture.

Upper arm metal fixture (horizontal)

Retaining screws (M5)

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Procedures for mounting the upper arm metal fixture (Continued)

Step No. Procedure

1
(Continued)

Upper arm metal fixture

(vertical)

Retaining screws (M5)

Item DISCO Part ID

BRACKET
Upper arm metal fixture (horizontal)
LJTT-910021-0
BRACKET (U/A,CLAMP)
Upper arm metal fixture (vertical)
LKHN-010016-0

Continued in the next section.

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2-4-4-3. Mounting the Lower Arm Metal Fixture

Procedures for mounting the lower arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Mount the lower arm metal fixture.

Lower arm metal

fixture
Retaining
screw (M5)

Item DISCO Part ID

BRACKET (L/A,CLAMP)
Lower arm metal fixture
LKHT-912919-1

Continued in the next section.

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2-4-4-4. Mounting the Transfer Axis Cover

Procedures for mounting the transfer axis cover

Procedure
Step No.
(Continued from the previous section)
1 Reinstall the lower transfer axis cover to its original position.

Transfer axis cover (upper)

Cover retaining
Cover retaining screw (upper)
screw (upper)

Transfer axis cover (lower)

Cover retaining
screw (lower)

2 Reinstall the upper transfer axis cover to its original position.

3 Tighten the upper and lower cover retaining screws securely.

Continued in the next section.

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2-4-5. Mounting the Metal Fixtures of the Spinner Axis

Procedures for mounting the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 Mount the spinner-axis metal fixture from the right side of the machine.

Spinner axis
metal fixture

Retaining screw (M5)

Item DISCO Part ID

FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Close the arm section cover.

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2-5. Removing the Leveling Mount

Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for removing the leveling mount

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure

1 Wear safety shoes and protective gloves.
2 With a wrench, rotate the handle of the four leveling mounts.
Loosen them equally until all the casters come into contact with the floor.

Clockwise handle rotation

lowers the machine.

Handle

3 Rotate the leveling mount handle clockwise until it stops moving. Then remove all the
leveling mounts.
4 Store the removed leveling mounts.
5 Transfer the machine:
→See Section 1-2 [Transferring the Machine] of this chapter.
6 To hoist or lower the machine:
→See Section 1-1 [Hoisting and Lowering the Machine by a Crane] of this chapter.
7 For the machine installation after transfer, see Sections 1-3 to 1-9 of this chapter.

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WHOM TO CONTACT IN AN EMERGENCY

DISCO Offices
The contact list is subject to change without notice. The latest list is available on the Internet.
DISCO home page http://www.disco.co.jp/
Japan Head Office Osaka Branch Office
13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan 3-12, Nishi-Nakajima 6-chome, Yodogawa-ku, Osaka-shi,
(Overseas Sales Department) Osaka 532-0011 Japan
Phone: 81-3-4590-1100 Fax: 81-3-4590-1075 (Sales Department) Phone: 81-6-6390-0388 Fax: 81-6-6302-0258
Kyushu Branch Office Sendai Branch Office
2170-4, Tabaru, Mashiki-machi, Kamimashiki-gun, Kumamoto Oku-sendai Bldg F-1, 5-1, Honcho 2-chome, Aoba-ku, Sendai-shi,
861-2202 Japan Miyagi 980-0014 Japan
(Sales Department) Phone: 81-96-289-1000 Fax: 81-96-289-1200 (Sales Department) Phone: 81-22-262-3345 Fax: 81-22-262-3346

DISCO HI-TEC AMERICA, INC. DISCO HI-TEC (CHINA) CO., LTD. Shanghai Head Office
USA Head Office Sales & Service Office 1F, Building 5, No.690 Bi-Bo Rd, ZhangJiang High-Tech Park, Shanghai
5921 Optical Ct., San Jose, CA 95138 USA 201203 P.R. China
Phone: 1-408-987-3776 Fax: 1-408-987-3785 Phone: 86-21-50278018 Fax: 86-21-50278178
DISCO HI-TEC TAIWAN CO., LTD. DISCO HI-TEC (SINGAPORE) PTE LTD Singapore Head Office
1F., No.188, Baoqiao Rd., Xindian Dist., New Taipei City, Taiwan 80 Ubi Avenue 4, #06-01
(R.O.C.) Singapore 408831
Phone: 886-2-2913-8877 Fax: 886-2-2913-2525 Phone: 65-6747-3737 Fax: 65-6745-0266
DISCO HI-TEC KOREA Corporation DISCO HI-TEC EUROPE. GmbH
3F, DHK Solution Bldg., 28, Pangyo-ro 255beon-gil, Bundang-gu, Europe Head Office
Seongnam-si, Gyeonggi-do, Korea 463-400 Liebigstrasse 8
Phone: 82-31-8038-8240 Fax: 82-31-8038-8241 D-85551 Kirchheim b. Muenchen, Germany
Phone: 49-89-90903-0 Fax: 49-89-90903-199

Agent Offices

AUROTECH CORPORATION DHK SOLUTION CORPORATION

2021 Buencamino Street, Alabang, Muntinlupa, Philippines 8F., DHK Solution Bldg., 28, Pangyo-ro 255beon-gil, Bundang-gu,
Phone: 63-2-809-0155 Fax: 63-2-807-7419 Seongnam-si, Gyeonggi-do, Korea 463-400
Phone: 82-31-8038-8111 Fax: 82-31-8038-8113
NEW TRONICS CO., LTD.
Flat F, 11th Floor, Valiant Ind. Bldg.
2-12 Au Pui Wan Street, Fotan, Shatin, N.T., Hong Kong
Phone: 852-26871431 Fax: 852-26874283

IN THE EVENT OF AN ACCIDENT

Be sure to contact us
Immediately get in touch with the nearest DISCO office if a situation arises where an accident has occurred or might
occur that involves injury or death during the operation of DISCO equipment.
Sales representative

Attach the business card of your

DISCO sales representative.
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