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Installation Manual (English)

DFD6340 INSTALLATION MANUAL
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0% found this document useful (0 votes)
115 views

Installation Manual (English)

DFD6340 INSTALLATION MANUAL
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 116

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2022-03

INSTALLATION MANUAL

Fully Automatic Dicing Saw

DFD6340

Copyright of this document is owned by DISCO CORPORATION


("DISCO"). No part of this document may be copied or reproduced in
any form or by any means, without the express written permission of
DISCO. Also, this document may not be disclosed or transferred to
third parties.

This document is printed on recyclable Lint-Free Paper.


・The blue paper is recyclable as used paper just like plain paper.
・The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
UJTSNE*000HE Recycle the blue paper only.)
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READ CAREFULLY BEFORE USING THIS


MANUAL
Introduction
This machine is a dicing saw for cutting silicon wafers and glass substrates (referred collectively as
"workpiece" hereafter).
The machine contains rotary sections with parts that operate at high speed; high-voltage sections with
danger of causing electric shock; drive sections where the workers' physical parts and/or clothing may get
caught.
If N2 gas is used in placed of clean air, the machine also has a N2 gas ejection section that might have
adverse effect on the human body.
Failure to handle this machine properly may lead to serious injury or death.

Read before using the machine


Before using the machine, thoroughly read this manual and follow the instructions set forth in it.
To assure safety in operating and maintaining the machine, it is important that you know the locations of
potential safety hazards. It is difficult for DISCO to predict each and every potential hazard. However, this
manual and the separate Safety Manual carries various precautionary notes and warnings wherever the
presence of any safety hazard is foreseeable. For increased safety assurance, therefore, it is essential that
you observe all the precautions and other relevant instructions set forth in this manual and the separate
Safety Manual.
If you modify the machine without prior consent of DISCO or repair it in a manner not stated in this
manual, the safety assurance features of the machine may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by DISCO.

Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・Any parts other than the genuine DISCO brand are mounted onto the machine
・Any parts other than periodic replacement or consumable parts are replaced without prior consent
of DISCO
・Any parts designed by the customer are mounted onto the machine without prior consent of
DISCO
・Equipment of another manufacturer is added to the machine
・The machine or part of the machine is transported, reused, resold or modified
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our technical personnel.

Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office. If they are replaced without consulting DISCO, DISCO shall assume no
liability for the consequences arising therefrom.
・Operation Manual
・Maintenance Manual
・When specified in a separate document (e.g., Technical news letter, Operation guide)
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Hazard level
The safety precautions set forth in this document are classified into DANGER, WARNING and
CAUTION categories which represent three degree of hazards latent in the machine. These categories are
defined as detailed below in accordance with the seriousness and probability level of the hazard. In
addition to the above three safety precaution levels, CAUTION without the safety alert symbol ( )
and NOTICE are used to give safety usage instructions to the user.
Before using the machine, be sure to read and understand all the associated safety precautions set forth in
the manual.
The hazard levels defined for the machine are detailed as follows:
If you cannot avoid the incident in question, a critical situation in which
either critical injury or death is very likely to result.
DANGER This symbol is used for the incident in which the injury is critical and there
is high probability of occurrence.
If you cannot avoid the incident in question, a serious situation in which
either critical injury or death may result.
WARNING This symbol is used for the incident in which the injury is serious but there
is not high probability of occurrence.
If you cannot avoid the incident in question, a medium or slight injury may
result.
CAUTION This symbol is used for the incident in which the injury is slight and there
is not high probability of occurrence.
If you cannot avoid the incident in question, an accident of property
damage may occur.
CAUTION

Indicates the safe way of using the machine as well as precautions to avoid
accidents resulting in damage to property.
NOTICE
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Safety label
Safety labels are affixed to the potentially hazardous sections of this machine. Before using this machine,
verify the label positions and thoroughly understand the hazard levels and hazard descriptions.
・The language used for the safety labels affixed to the machine outer covers can be requested by
customers.
The language used for the safety labels affixed to the machine interior is only either Japanese or
English.
Label Hazard Level Hazard Descriptions
There is a danger that your fingers or
hands may be cut by the rotating blade.
WARNING
・Do not place your fingers or hands
near the blade or flange until the
spindle comes to a complete stop.
・Do not open the covers until the
spindle comes to a complete stop.
・It takes approximately 15 seconds
for the spindle to stop completely
after the stop process is executed
(including in case of EMO and a
power failure).
There is a danger that your fingers or
hands may be cut by the rotating blade.
WARNING
・Do not place your fingers or hands
near the rotating blade or flange.
・Before performing maintenance
work, make sure to shut off the
machine power and lock out the
breaker.
There is a possibility that your fingers
or hands may get caught and injured in
CAUTION the drive sections.
・Do not position your fingers or
hands in the drive sections.
・Before performing maintenance
work, make sure to shut off the
machine power and lock out the
breaker.
There is a possibility that your fingers
or hands may get caught and injured in
CAUTION
the drive sections.
・Do not position your fingers or
hands in the drive sections.
・Do not place tools or other irrelevant
items near them.
There is a possibility that yours fingers
or hands may be caught and injured by
CAUTION the drive sections.
・Do not position your fingers or
hands near the drive sections.
・The maintenance work of the
machine should be done only by
operators with the maintenance
qualification.
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Safety label (Continued)

Label Hazard Level Hazard Descriptions


The spinner section is a rotating
mechanism. There is a possibility that
CAUTION your fingers or hands may be cut by
the rotating spinner or that serious
injury may be caused by scattered
workpiece.
・Do not position your fingers or
hands near the spinner until it stops
completely.
There is a possibility that you may
burn your fingers or hands by touching
CAUTION the hot parts of the machine.
・Turn off the machine, and then
perform maintenance work only
after the machine cools down
sufficiently.

MSAAA-00015-0

There is a danger that you may die or


get seriously injured from electric
WARNING shocks.
・Do not touch the electrically charged
sections.
・Before performing maintenance
work, make sure to shut off the
machine power, and lock out the
breaker.
Even if you turn the power circuit
breaker of the machine to "OFF"
WARNING position, the primary side of the
breaker remains energized.
There is a danger that you may die or
get seriously injured from electric
shocks.
・Do not touch the energized sections.
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INTRODUCTION
About this manual
This manual describes the installation and adjustment procedures of Fully Automatic Dicing Saw 6000
Series Models DFD6340.

To ensure safety
In order to ensure safety, be sure to thoroughly read and fully understand the important safety information
set forth in the separate Safety Manual, before performing any operation.
In installation or maintenance operation, be sure to follow the procedures set forth in this manual.
Be sure that the machine should be installed and adjusted by a qualified person who has completed a
machine maintenance education (hereinafter referred to as the maintenance personnel).
This manual is the 'Original instructions'.
Definition of a manager and an operator
This manual defines a manager and an operator of the machine as follows:
Category Applicable Personnel Job and Responsibility
Management Engages in overall management of the machine and its
Manager
representative operators.
Maintenance personnel Qualified person who has completed a machine
maintenance education.
Data maintenance Qualified person to manage the software data of the
Operator
personnel machine.
Machine operator Engages in operation of the machine for processing
workpieces.

Documentation for this machine


This manual is the Installation Manual in the list below indicated by an arrow.
Manual Who should read Contents
Safety Manual ・Management representative Information for ensuring safety during machine
・Data maintenance personnel operation, installation and maintenance
・Maintenance personnel
Installation Manual Maintenance personnel Machine installation and adjustment
procedures
Operation Manual Machine operator Operational procedures to be performed by the
machine operator
Data Maintenance Data maintenance personnel Screen contents for data entry and machine
Manual operation data setting procedures
Maintenance Manual Maintenance personnel Servicing, inspection and adjustment
procedures to be performed by the customer
Technical Reference Maintenance personnel Machine specifications/
Circuit diagrams/Illustrations/Part list

Unit notation
International System of Unit is adopted to express any unit.
Also, all the pressure values are expressed in gauge pressure.

Introduction-1
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CONTENTS
CONTENT S

READ CAREFULLY BEFORE USING THIS MANUAL

INTRODUCTION ..............................................Introduction-1

CONTENTS.......................................................... Contents-1

A. INSTALLATION SPECIFICATIONS AND


ENVIRONMENT .......................................................... A-1
1. Specifications ............................................................................................................... A-2
2. Standard Packing Style on Delivery ............................................................................. A-6
3. Installation Environment............................................................................................... A-7
3-1. Installation Site .............................................................................................................................. A-8
3-2. Environment Requirements ......................................................................................................... A-11
3-3. Environment for Storage and Transport ...................................................................................... A-14

4. Piping and Wiring Connection.................................................................................... A-15


4-1. Rear Side Connecting Positions ................................................................................................. A-16
4-2. Piping and Wiring Connection ..................................................................................................... A-18

B. INSTALLATION AND
TRANSFERRING OPERATION ................................... B-1
1. Installation Operation ................................................................................................... B-2
1-1. Hoisting and Lowering the Machine by a Crane ........................................................................... B-4
1-2. Transferring the Machine .............................................................................................................. B-8
1-2-1. Transferring the Machine by Hand Push ............................................................................ B-9
1-2-2. Transferring the Machine by Pallet Truck ......................................................................... B-11
1-3. Installing the Machine with the Leveling Mount .......................................................................... B-14
1-4. Removing the Drive Axis Metal Fixtures ..................................................................................... B-17
1-4-1. Removing the Retaining Screw of X-Axis Metal Fixture .................................................. B-19
1-4-2. Removing the Y1 and Y2-Axes Metal Fixtures ................................................................ B-20
1-4-3. Removing the Retaining Screws of Z1 and Z2 -Axes Metal Fixtures............................... B-21
1-4-4. Removing the Metal Fixtures of the Upper and Lower Arm ............................................. B-22
1-4-4-1. Removing the Transfer Axis Cover ........................................................................ B-23
1-4-4-2. Removing the Upper Arm Metal Fixture ................................................................ B-24
1-4-4-3. Removing the Lower Arm Metal Fixture ................................................................ B-25

Contents-1
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CONTENTS
1-4-4-4. Mounting the Transfer Axis Cover ......................................................................... B-26
1-4-5. Removing the Metal Fixtures of the Spinner Axis ............................................................ B-27
1-4-6. Removing the arm section slide cover Metal Fixtures ..................................................... B-28
1-5. Mounting the Status Indicator, Piping and Wiring Connection .................................................... B-29
1-5-1. Mounting the Status Indicator ........................................................................................... B-30
1-5-2. Connecting Piping ............................................................................................................ B-32
1-5-3. Connecting Power Supply Wiring..................................................................................... B-35
1-5-3-1. Removing the Machine Outer Cover ..................................................................... B-37
1-5-3-2. Connecting the Power Supply Wiring.................................................................... B-38
1-5-3-3. Mounting the Breaker Section Cover .................................................................... B-42
1-5-3-4. Completion of Connecting the Power Supply Wiring ............................................ B-43
1-6. Mounting the Machine Outer Cover ............................................................................................ B-44
1-7. Leveling the Machine with the Leveling Mount ........................................................................... B-47
1-7-1. Mounting the Spirit Level .................................................................................................. B-48
1-7-2. Removing the Machine Outer Cover ................................................................................ B-49
1-7-3. Leveling the Machine ....................................................................................................... B-51
1-8. Mounting the Machine Anchoring Brackets [Optional Accessory] ............................................ B-53
1-9. Completion of Installation Operation ........................................................................................... B-55

2. Transferring Operation ............................................................................................... B-58


2-1. Terminating the Machine ............................................................................................................. B-60
2-2. Removing the Machine Outer Cover and Status Indicator .......................................................... B-61
2-2-1. Turning OFF the Power .................................................................................................... B-61
2-2-2. Removing the Machine Outer Cover ................................................................................ B-62
2-2-3. Removing Status Indicator ............................................................................................... B-66
2-3. Disconnecting Piping and Wiring ................................................................................................ B-68
2-4. Mounting the Drive Axis Metal Fixtures ....................................................................................... B-70
2-4-1. Mounting the X-Axis Metal Fixture ................................................................................... B-72
2-4-2. Mounting the Y1 and Y2-Axes Metal Fixtures .................................................................. B-73
2-4-3. Mounting the Z1 and Z2-Axes Metal Fixtures .................................................................. B-74
2-4-4. Mounting the Metal Fixtures of the Lower Arm and Upper Arm ....................................... B-75
2-4-4-1. Removing the Transfer Axis Cover ........................................................................ B-76
2-4-4-2. Mounting the Upper Arm Metal Fixture ................................................................. B-77
2-4-4-3. Mounting the Lower Arm Metal Fixture ................................................................. B-78
2-4-4-4. Mounting the Transfer Axis Cover ......................................................................... B-79
2-4-5. Mounting the Metal Fixtures of the Spinner Axis .............................................................. B-80
2-4-6. Mounting the arm section slide cover Metal Fixtures ....................................................... B-81
2-5. Removing the Leveling Mount..................................................................................................... B-82

Contact Information

Contents-2
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A. INSTALLATION SPECIFICATIONS
AND ENVIRONMENT
Contents of this chapter

Section No. Title Contents


1 Specifications ・Utilities requirements of the machine
2 Standard Packing Style on ・Standard dimensions and weights on delivery
Delivery
3 Installation Environment ・Installation requirements
4 Piping and Wiring Connection ・Connection positions for piping and wiring

A-1
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1. Specifications
Power Requirements

Machine with 1.2 kW spindle


Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 2.1 kW
・During warm-up: 1.8 kW
・During standby: 0.4 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 6.9 kVA
Leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 20 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND
Machine with 1.8 kW spindle [optional accessory]
Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 2.1 kW
・During warm-up: 2.0 kW
・During standby: 0.45 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 10.4 kVA
Leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 30 A
breaker rating With transformer 30 A
Wiring configuration 3WIRE+GROUND

A-2
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Power Requirements (continued)


Machine with 2.2 kW spindle [optional accessory]
Voltage 200 to 240 VAC ± 10%, 3-phase
Frequency 50/60 Hz
Power consumption ・When processing: 1.7 kW
・During warm-up: 1.6 kW
・During standby: 0.45 kW
The above values are just for reference and differ depending on
various conditions.
Maximum power 10.4 kVA
Leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 30 A
breaker rating With transformer 30 A
Wiring configuration 3WIRE+GROUND

Air

Pressure ・Range: 0.5 to 0.8 MPa


・Fluctuation range: ± 0.01 MPa
Connection port Rc1/4
Mean flow rate during running 189 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 378 L/min (ANR)

Clean air
Clean air is directly blown onto workpiece. Prepare clean air suitable for the customer's standards.
When using N2 in place of clean air, please consult DISCO sales representatives.
Pressure ・Range: 0.5 to 0.8 MPa
・Fluctuation range: ± 0.01 MPa
Connection port Rc1/4
Mean flow rate during running 65 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 216 L/min (ANR) (excluding use of air blower)

A-3
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N2
N2 gas is used when a UV irradiation unit is incorporated as an optional accessory.
Pressure ・Range: 0.2 to 0.4 MPa
・Fluctuation range: ± 0.01 MPa
Connection port Rc1/4
Maximum flow rate 30 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.

Water
Water is divided into two systems: for cutting water, water curtain, other and cooling water.

Cutting water, water curtain and other


Pressure ・0.2 to 0.4 MPa
To install spinner atomizing nozzle [optional accessory], the
required pressure is 0.25 MPa or above.
・Fluctuation range: ± 0.01 MPa
Connection port Rc3/8
Maximum flow rate 14 L/min
Breakdown:
・Cutting water: 12 L/min
・Water curtain: 1 L/min
・Other: 1 L/min (spinner cleaning/protection water for non-contact
setup [optional accessory])

Cooling water
Pressure ・0.2 to 0.4 MPa
・Fluctuation range: ± 0.02 MPa
Connection port Rc1/4
Maximum flow rate 3.0 L/min at 0.3 MPa
・When the 1.8 kW spindle [optional accessory] or 2.2 kW spindle
[optional accessory] is installed:
1.5 L/min (at 0.2 MPa)

Rinse Water [optional accessory]

Pressure ・0.2 to 0.4 MPa


・Fluctuation range: ± 0.01 MPa
Connection port Rc1/4
Maximum flow rate 1.0 L/min

A-4
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Duct

Capacity 5 to 8 m3/min
Connection port Duct hose
I.D.: 101.6 mm

Water Drainage

Connection port Duct hose


I.D.: 50.6 mm

Main Dimensions

Main body 1,180 W × 1,110 D × 1,850 mm H


(without protrusion and status indicator (336 mm))
・For installation, it is necessary to secure the space for the maintenance work and mounting the status
indicator.

Machine Dry Mass


Approx. 1,600 kg (standard)
・When you select the transformer for overseas use or uninterruptible power supply unit as an optional
accessory, its mass is added to the machine mass.

70 kg (transformer for overseas use)


60 kg (uninterruptible power supply unit)

Paint Color
Cream (Munsell No. 2.5 GY 8.0/0.5)
Black (Munsell No. N2.4)

A-5
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2. Standard Packing Style on Delivery


Standard packing style on delivery

Main Body Dimensions Machine WITH a transformer for use outside Japan
(mm) 1,180 (W)  1,110 (D)  1,850 (H)
Mass (kg) Approx. 1,600 kg (standard)
・When you select the transformer for overseas use or uninterruptible
power supply unit as an optional accessory, its mass is added to the
machine mass.
70 kg (transformer for overseas use)
60 kg (uninterruptible power supply unit)
・In transferring, secure enough space so that the machine will pass safely through the selected route.
(Information: At least the space of 690 mm is necessary for a person to work sitting.)
・The status indicator (336 mm) and other protrusions are not included in the above dimensions.

A-6
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3. Installation Environment
Summary of this section

Section No. Title Contents


3-1 Installation Site ・Illustration of the installation site
3-2 Environment Requirements ・Environment requirements to install the
machine
3-3 Environment for Storage and ・Storage environment
Transport ・Transport environment

A-7
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3-1. Installation Site


Installation precautions
・The mass of the machine differs by whether it has the transformer for use outside Japan.
・In installation site selection, ease of operation and maintenance must be taken into consideration.
・Avoid the place where temperature variations are great.
・In installation, secure 380 mm of maintenance space between the top face of the machine and the
ceiling of the room (2,230 mm high from the floor).
・The maintenance area is described with the recommended values that are based on SEMI S8.

Installation drawing [standard]

Installation drawing [machines having a transformer for use outside Japan]

A-8
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Machine Anchoring Bracket [optional accessory]


The customer is requested to arrange taps on the floor and bolts (M12).
・For the bolts (M12), please prepare property class 10.9 bolts classified under ISO 898.

Elongated hole

Top side

Metal fixture

Anchor bolt

(Unit: mm)

A-9
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Machine Anchoring Bracket [optional accessory] (Continued)

If the water leakage detection unit is mounted:

Elongated hole

Top side

(Unit: mm)

A-10
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3-2. Environment Requirements


Use the DFD6340 within the following conditions:

Environment requirements
This machine realizes highly accurate applications by employing highly precision axis units.
The installation environment, therefore, gives a great effect on the machine accuracy.

Installation Site
・Ease of operation and maintenance must be taken into account.
・If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality. If you need to use or keep the machine in the environment where dirt and
dust float around, please consult DISCO sales representatives.

Treatment for Waterproof and Drainage


If water leakage should occur, the floor surface and downstairs might be damaged.
Therefore, provide the floor surface with an appropriate treatment for waterproof and drainage.
The drain pan and water leakage detection unit are available as an optional accessory.

Ambient Temperature (room temperature)


20 to 25°C (variation: within ±1°C)

Ambient Relative Humidity


55 ±15% (non-condensing)

Cutting Water/Spinner Cleaning Water Temperature


Room temperature +2°C (variation: within ±1°C)

Cutting Water/Spinner Cleaning Water Quality


Deionized water is recommended. Please consult DISCO sales representative when using other than
deionized water.
・Water containing foreign matters or ions may cause corrosion, rust or breakage of the machine, or
clogging of the pipes.
・In order to protect the machine, install a filter to remove foreign matters of which particle size is over
100 μm in the location just before the cutting water connection port of the machine. If you use the water
temperature control unit or DI water recycling unit manufactured by DISCO, the filter is unnecessary.
The filter unit is available as an optional accessory provided by DISCO.
・If you will use separate piping for cutting water and cleaning water, please consult DISCO sales
representative in advance.
・Use of flammable cutting oil or cutting fluid may cause firing in the machine.
・If water which contains cutting oil or cutting fluid and whose volatility has been lower compared to
deionized water adheres to the water leakage sensor inside the machine, it will not dry. As a result, the
water leakage sensor will need to be replaced because otherwise, a water leakage error will continue to
be generated regardless of the presence or absence of water leakage. The replacement of water leakage
sensor is handled by DISCO customer engineer.
Never disable the water leakage sensor function in order to avoid errors, because it involves risk of an
electric shock due to water leakage or firing.

A-11
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Cooling Water Temperature


Same as the room temperature (variation: within ±1°C)
Fluctuation in water temperature may adversely affect cutting accuracy due to expansion or shrinkage of
spindle.

Cooling Water Quality


High content of chloride (Cl), iron (Fe), copper (Cu) and sodium (Na) or high ratio of conductivity may
cause corrosion of the mechanical parts or clogging of piping.

Rinse Water Quality [optional accessory]


Please consult DISCO sales representative when using other than deionized water.

Power Requirements
Standard: Within 200 to 240 VAC ±10, 3-phase
With transformer: Within 380 to 415 VAC ±10%, 3-phase
・The leakage current is 25 mA or less.
The rated sensitivity current of the circuit breaker is 50 mA. If the earth leakage breaker is used for the
plant facilities for protection purpose, use a harmonic-measured breaker with an appropriate sensitivity
current.
・This machine belongs to overvoltage category II. Install an electrically insulated-type transformer in
between plant facility and the machine.
・Significant voltage vibrations must be avoided.
・Use the power supply without any momentary interruption.
・Do not use the machine in electrically noisy environments. The tests listed below are conducted for this
machine.
Standards
IEC: 61000-4-4 Electrical fast transient/burst immunity test
Outline of test
±2.0 kV (Charge voltage)

Power Cable
The power cable for this machine is prepared as an optional accessory.

Grounding
Facility-side ground connection must be made according to the local regulations.
If the grounding system is TT
Make the connection so that the resistance between the grounding electrode at the plant facility and the
machine's PE terminal is less than 100 .

A-12
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Air
Filtration rating: 0.00001 mm/99.5% or more
Residual oil: 0.1 mg/m3 or less
Atmospheric dew point: -10 to -20°C
・When the atmospheric dew point is higher than -10°C:
Dew condensation may occur at the spindle bearing and cause a malfunction of the spindle.
・When the atmospheric dew point is lower than -20°C:
It may cause abnormal wear of the spindle carbon brush.
・There is a proportional relationship between the concentration of ozone contained in compressed air
and gum deterioration speed. As the ozone concentration is higher, gum parts deteriorate earlier. Any
deterioration of parts clearly due to ozone and any breakage caused by the deterioration may not be
covered by warranty even when the machine is in the warranty period.
Reference: Ozone concentration varies depending on the environment or the type of the air compressor.

Duct
Exhaust capacity: 5 to 8 m3/min

Altitude
Altitude of 1,000 m or lower
When the altitude of the site is 1,000 m or higher, please consult DISCO sales representative.

Others
・Use the piping hose without any foreign matter adhered inside.
・Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans, and ventilation outlets.
・This machine discharges exhaust air and drain water containing silicon dust due to the cutting operation.
Control and dispose of the machine discharges in accordance with the environment criteria of the local
regulations.
・Do not use this machine at any place other than an industrial or commercial facility. This machine is
designed for industrial use and its EMC performance has been evaluated as EN55011, Group 1, Class A.
Therefore, there is a possibility that electromagnetic noise may exceed the limit defined by standards
for residential environments.
・Ensure that an air source, a water source, drain pipes and a power source are located near the machine.
・Install valves which can be locked out for both the air and water supplies at the facility-side.
These should be prepared by the customer.
・Be sure to install the machine on the floor that has adequate strength. And when the installation site
uses the raised floor, please consult your nearest DISCO about its strength.
(For the installation floor withstand load, see the section 3-1 of this chapter, [Installation Site].)
・Machine anchoring brackets are optionally available. They are designed to provide human/equipment
protection in the event of an earthquake or other disaster. It is recommended that the machine be
secured with these anchors.

A-13
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3-3. Environment for Storage and Transport


Environment for storage and transport
The environmental conditions for storage and transport would wield a profound influence on the
machine's accuracy when it is operated.
Ambient temperature 5 to 40 C
(room temperature)
Ambient relative humidity 35 to 70 % (no condensation)
Machine anchoring brackets are optionally available. They are designed to provide human/equipment
protection in the event of an earthquake or other disaster. It is recommended that the machine be secured
with these anchors.
Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans, and ventilation outlets.
Drain water from the machine before storage and transport.
Before starting operation of the machine after storage or transport, make sure to grease its driving axes.
If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality.
If you need to use or keep the machine in the environment where dirt and dust float around, please
consult DISCO sales representatives.

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4. Piping and Wiring Connection


Summary of this section

Section No. Title Contents


4-1 Rear Side Connecting Positions ・Piping connection diagram on the rear side of
the machine
4-2 Piping and Wiring Connection ・Piping and wiring connection

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4-1. Rear Side Connecting Positions


Rear side connecting positions

[2] Main duct

[1] Main drain

Rear side

[8] Rinse water IN


[optional accessory]

[3] Clean air IN

[7] Cooling water IN

[6] Cooling water OUT [4] Deionized water IN

[5] Main air IN

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Rear side connecting positions (Continued)

No. Name Remarks


1 Main drain * 50.6 I.D. Duct hose
2 Main duct * 101.6 I.D. Duct hose
3 Clean air IN Rc1/4
4 Deionized water IN Rc3/8
5 Main air IN Rc1/4
6 Cooling water OUT Rc1/4
7 Cooling water IN Rc1/4
8 Rinse water IN Rc1/4 [optional accessory]
* Discharges dirty water and mist containing cutting material particles.

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4-2. Piping and Wiring Connection


Range of Utility Connection Parts Prepared by DISCO
For the connections of utilities to the DFD6340, air piping, water piping, duct/drain piping and electrical
wiring should be arranged. Among those, the customer is requested to arrange hoses and joints as well as
connection ports at the plant facility, except for ducts and drain hoses.

FULLY AUTOMATIC DICING SAW


DFD6340 Plant Facility

Air piping Hoses and joints Air connection ports

Water piping Hoses and joints Water connection ports

Duct / drain piping Duct hoses / Drain hoses Duct and drain connection ports

Electrical wiring Power cables Electricity connection ports

Supplied from DISCO Arranged by the customer

・DISCO arranges the air piping to the connection ports of the DFD6340. The customer is requested to
arrange hoses and joints as well plant facility connection ports.
・DISCO arranges water piping to the connection ports of the DFD6340. The customer is requested to
arrange hoses and joints as well as plant facility connection ports.
・DISCO arranges duct and drain piping to the hoses (both-end duct cuffs with pipe band). The customer
is requested to arrange the plant facility connection ports.
・DISCO arranges electrical wiring to the connection ports of the DFD6340. The customer is requested to
arrange power cables and plant facility connection port.

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Air Piping
DISCO arranges the air piping to the connection ports Rc1/4 of the DFD6340. The customer is requested
to arrange hoses and joints as well as plant facility connection ports.
There are following 2 types of piping specification whether clean air is used or not. Arrange applicable
hoses and joints suitable for your situation.

a) When clean air is used


DFD6340 Plant Facility
Hoses and Joints

Air
Air IN (Rc1/4)
Pressure: 0.5 to 0.8 MPa

Clean air IN (Rc1/4) Clean air


Pressure: 0.5 to 0.8 MPa

Supplied from DISCO Arranged by the customer


: Air filter
Utility flow direction

b) When clean air is not used


DFD6340 Plant Facility
Hose and Joint

Air
Air IN (Rc1/4)
Pressure: 0.5 to 0.8 MPa
Air Air IN
Clean air

Supplied from DISCO Arranged by the customer


: Air filter
Utility flow direction

・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.
・DISCO can provide 2 types of braided hose and three types of polyurethane tubes as optional
accessories. If you need them, specify the amount and length necessary to DISCO sales representative.
・DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection and screw diameter. If you need them, specify
the amount and length necessary to DISCO sales representative.

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Water Piping
DISCO arranges the water piping to connection ports Rc1/4 and Rc3/8 of the DFD6340. The customer is
requested to arrange hoses and joints as well as plant facility connection ports.
There are following 5 types of piping specification depending on the difference of branching method of
deionized water. Arrange appropriate hoses and joints suitable for your situation.
Also, in order to protect the machine, install a filter unit to remove foreign matters of which particle size
is over 100 μm in the location just before the cutting water connection port of the machine (at the location
shown with in the figures below). If you use the water temperature control unit or DI water
recycling unit manufactured by DISCO, the filter is unnecessary.
The filter unit is available as an optional accessory provided by DISCO.

a) When deionized water is used after branching into cutting water and spinner cleaning water
DFD6340 Plant Facility
Cutting water IN
Deionized water
Spinner cleaning water IN
Pressure: 0.2 to 0.4 MPa
(Rc3/8)

Cooling water IN City water


(Rc1/4) Pressure: 0.2 to 0.4 MPa

Cooling water OUT Drain


(Rc1/4) Drain not containing cutting dust

Rinse water IN (Rc1/4) Rinse water

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

b) When deionized water input is separated to cutting water and spinner cleaning water systems
DFD6340 Plant Facility

Cutting water IN Deionized water


(Rc3/8) Pressure: 0.2 to 0.4 MPa

Spinner cleaning water Deionized water


IN (Rc1/4) Pressure: 0.2 to 0.4 MPa

Cooling water IN City water


(Rc1/4) Pressure: 0.2 to 0.4 MPa

Cooling water OUT Drain


(Rc1/4) Drain not containing cutting dust

Rinse water IN (Rc1/4) Rinse water

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

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Water Piping (Continued)

c) When deionized water is used after branching into cutting water, spinner cleaning water and
cooling water
DFD6340 Plant Facility

Cutting water IN Deionized water


Spinner cleaning water IN Pressure: 0.2 to 0.4 MPa
Cooling water IN
(Rc3/8)

Cooling water OUT Drain


(Rc1/4) Drain not containing cutting dust

Rinse water IN (Rc1/4) Rinse water

Supplied from DISCO Arranged by the customer


Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

d) When deionized water is used after branching into cutting water, spinner cleaning water and
rinse water
DFD6340 Plant Facility

Cutting water IN Deionized water


Spinner cleaning water IN Pressure: 0.2 to 0.4 MPa
Rinse water IN
(Rc3/8)
Cooling water IN City water
(Rc1/4) Pressure: 0.2 to 0.4 MPa

Cooling water OUT Drain


(Rc1/4) Drain not containing cutting dust

Supplied from DISCO Arranged by the Customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign
matters of which particle size is over 100 μm.

e) When deionized water is used after branching into cutting water, spinner cleaning water, rinse
water and cooling water
DFD6340 Plant Facility

Cutting water IN
Spinner cleaning water IN Deionized water
Cooling water IN Pressure: 0.2 to 0.4 MPa
Rinse water IN
(Rc3/8)

Cooling water OUT Drain


(Rc1/4) Drain not containing cutting dust

Supplied from DISCO Arranged by the customer


Pipe which requires the filter unit [optional
Utility flow direction accessory] or a filter to remove foreign matters of
which particle size is over 100 μm.

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Water Piping (Continued)


・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.
・DISCO can provide 2 types of braided hose and 3 types of polyurethane tubes as optional accessories.
If you need them, specify the amount and length necessary to DISCO sales representative.
・DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection and screw diameter. If you need them, specify
the amount and length necessary to DISCO sales representative.
・The hoses and joints to be arranged by the customer to install the filter unit [optional accessory] are the
same as indicated in the diagrams.
・When deionized water is used as cutting water and the filter unit [optional accessory] is selected, the
machine incorporates the filter unit.

Duct and Drain Piping


For duct and drain piping, 2 types (exhaust and drain) are required.
DISCO arranges to the hose (both-end duct cuffs with pipe band) and the customer is requested to arrange
the plant facility connection ports.
DFD6340 Plant Facility

Main duct Duct hose 100


(including spindle and (length 3 m)
Both-end duct cuffs Exhaust port (100)
spinner exhaust) with pipe band

Duct hose 50


Main drain (length 1 m) Duct port (50)
(Spinner exhaust/drain) Both-end duct cuffs
with pipe band

Supplied from DISCO Arranged by the customer

: Air : Liquid : Discharge contains cutting material

・Drainage and exhaust include contaminated water and mist including cutting particles.
・When the machine is equipped with the mist collector [optional accessory], the 125 mm air outlet,
50 mm discharge port, and power connection port (terminal M5) for the mist collector should be
separately arranged at the plant facilities.

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Electrical Wiring
DISCO arranges connection of electrical wiring to the ports of the DFD6340. The customer is requested
to arrange power cable and connection to the plant facility port.
DFD6340 Plant Facility
Power cables

Terminal block Terminal block

Supplied from
Arranged by the customer
DISCO

・DISCO can provide power cable to be arranged by the customer (Power Cables with both-end round
terminal of Optional Accessories). If you need them, ask your DISCO sales representative.
・The table below shows the specification of the power cable.
・The cable length is approximate estimate of the distance from the machine outer cover. Prepare a power
cable which length is long enough considering the distance to the primary connection section.
Nominal cross -
Terminal Terminal
Length sectional area Number of
Specification (m) terminals
for power for PE
mm2 wire wire
AWG
equivalent
3 12 4 4 M5 M5*
for
5 12 4 4 M5 M5*
20 A
Standard 7 12 4 4 M5 M5*
(200 to 240 VAC) 3 8 10 4 M5 M5*
for
5 8 10 4 M5 M5*
30 A
7 8 10 4 M5 M5*
3 12 4 4 M5 M5*
for
5 12 4 4 M5 M5*
Transformer 20 A
7 12 4 4 M5 M5*
specification
(380 to 415 VAC) 3 8 10 4 M5 M5*
for
5 8 10 4 M5 M5*
30 A
7 8 10 4 M5 M5*
* From June 2016 onward, M5 connection ports will be added sequentially to the PE terminal bar.
For details of the PE terminal bar connection port, please contact a DISCO sales representative.
For the machine with M5 connection ports added
The PE terminal bar incorporates M4 and M5 connection ports.
Use of a power cable with M5 PE wire terminal is recommended.
For the machine without M5 connection ports added
The PE terminal bar incorporates only M4 connection ports.
Please use a power cable with M4 PE wire terminal.

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B. INSTALLATION AND TRANSFERRING


OPERATION
Summary of this chapter

Section No. Title Contents


1 Installation Operation ・Procedures of installation
・Necessary adjustments for installation
2 Transferring Operation ・Procedures of machine transfer

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1. Installation Operation
Operation flow

1-1 Hoisting and Lowering the Machine by a Crane

1-2 Transferring the Machine

1-3 Installing the Machine with the Leveling Mount

1-4 Removing the Drive Axis Metal Fixtures

1-5 Mounting the Status Indicator, Piping and Wiring Connection

1-6 Mounting the Machine Outer Cover

1-7 Leveling the Machine with the Leveling Mount

1-8 Mounting the Machine Anchoring Brackets [Optional Accessory]

1-9 Completion of Installation Operation

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Safety items for installation

WARNING

Air exhaust, water drainage, and cutting particles must be properly


managed/disposed of in compliance with applicable environmental regulations
Due to the nature of its processing characteristics, the machine may produce harmful
substances depending on the types of workpiece it processes.

It is recommended that the installed machine be secured with the "machine


anchoring bracket"
DISCO provides "machine anchoring bracket" as an optional accessory for
human/equipment protection in the event of an earthquake or other disaster.

The floor on which the machine is installed should be provided with sufficient
waterproofing and drainage treatment
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

Periodically inspect the water pipe fittings to make sure that no water leaks from
them
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

NOTICE

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are available in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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1-1. Hoisting and Lowering the Machine by a Crane


Equipment you must have ready

WARNING

Use the specified hoisting jigs when hoisting the machine


If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine.

Before hoisting the machine, inspect the hoisting jigs and slings for abnormalities
Inspections should be performed by a person with expertise. Do not use the hoisting
jigs and slings when any abnormality is found as a result of inspections.
Otherwise the hoisting jigs and slings may be broken due to insufficient strength or
center-of-gravity may be displaced, causing the machine to fall down. This may result
in severe injury or death of any person underneath the machine.

Hoisting jigs
Item DISCO Part ID Qty
[1] Lifting plate HANGER 2
LPXJ-020004-2
[2] Hexagonal bolt for HEXAGON SOCKET HEAD CAP SCREW 4
displacement prevention MSS100025UN-0 (MGSSM10025U)
[2] Hexagonal nut for HEXAGON NUT 4
displacement prevention M6N-100-1UN-0 (MG6N-M10-1U)
[3] Rope SLING 4
LJKJ-911120-0 (MOJKJA20--A)
[4] Shackle SHACKLE 4
LENJ-910035-0 (MOENJ035)
[5] Lifting bracket HANGER 1
LENJ-910003-0 (MOENJ003)
[6] Rope SLING (1M) 2
LJEJ-910004-0 (MOJEJ004--A)
[7] Shackle SHACKLE 4
LCAJ-910006-0 (MOCAJ006--A)

Others
Safety shoes and protective gloves

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Procedures for hoisting and lowering the machine by a crane

DANGER

While the machine is hoisted or lowered, stay away from the area beneath and
around the machine
If the machine should fall while the machine is hoisted or lowered, persons in such
area may be crushed to death or severely injured. Or if the machine should swing like
a pendulum, they may be caught between the machine and wall or hit by the machine
to death or severely injured.

Ensure that the employed crane is rated for a hoisting load of 1,740 kg or
heavier and withstands the machine weight, boom length and hoisting angle
If the machine should fall while the machine is hosted or lowered, persons beneath or
near it may be crushed to death or severely injured. Note that the mass of the machine
including the hoisting jigs is approximately 1,740 kg.

WARNING

Use the specified hoisting jigs when hoisting the machine


If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine. Also, the machine may be damaged.

Be sure to firmly secure the displacement prevention bolts to the hoisting jigs
If the displacement prevention bolts come off from the hoisting jigs during hoisting,
the hoisted machine may lose balance and fall. If the machine falls, you could be
crushed to death or seriously injured.

Make sure to firmly secure the shackles


If the shackles are disengaged from the jigs during machine hoisting, the hoisted
machine may lose balance and drop. If the machine falls, you could be crushed to
death or seriously injured.

Make sure to wear safety shoes and protective gloves throughout the machine
hoisting/lowering process
Your feet or hands could be caught or cut off by the machine while the machine is
hoisted or lowered.

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure


1 Wear the safety shoes and protective gloves.
2 Insert the [1] Lifting plate into the machine frame.
3 Attach the [2] Hexagonal bolt and nut for displacement prevention to the mounting holes
of the inserted [1] Lifting plate.
4 Draw the [3] Rope through the [7] Shackle.
5 Attach the [7] Shackle (with the [3] Rope) to the [1] Lifting plate.
6 Draw the [3] Ropes and [6] Rope through the [4] shackles.
7 Attach the [4] Shackle (with the [3] Rope) and [4] Shackle (with the [6] Rope) to the [5]
Lifting bracket.
8 Engage the hoisting [6] Ropes with a crane.

Detailed drawing of
shackle attachment

(Screw-in the fixing screw)

[5] Lifting bracket

[6] Rope

[4] Shackle

[3] Rope

[7] Shackle

[1] Lifting plate


[2] Hexagonal Right side
bolt/nut

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure


8
(Continued)

Front side
(Unit: mm)

9 Make sure that the ropes do not come into contact with any part of the machine, and then
start hoisting.
The mass of the machine including the hoisting jigs is approximately 1,740 kg.
Ensure that the employed crane rating is adequate for the machine weight. Also, be sure
that the employed wires and other hoisting accessories are appropriate for the machine
weight.
・Hoist the machine without shocking the machine.
・Do not tilt the machine.
・Do not apply any undue force to the covers.
10 Lower the machine.
・While lowering, exercise care not to shock the machine.

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1-2. Transferring the Machine


Summary of this section
You can move the machine by either hand push or using a pallet truck.
Each procedure is described in the sub-sections respectively.
Section No. Title Contents
1-2-1 Transferring the Machine by ・Procedures for transferring the machine by
Hand Push hand push
1-2-2 Transferring the Machine by ・Procedures for transferring the machine by
Pallet Truck pallet truck

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1-2-1. Transferring the Machine by Hand Push


Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for transferring the machine

WARNING

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

When transferring the machine, use a flat transfer route


When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine


If the covers and sub-frame are pushed or pulled while the machine is transferred, the
resin cover might be broken or sub-frame might be bent.

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Procedures for transferring the machine (Continued)

Step No. Procedure


1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)
3 Push the main body frame to move the machine.
・To move the machine, push only the main body frame.

Right side
Main body frame

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1-2-2. Transferring the Machine by Pallet Truck


Equipment you must have ready

Safety shoes and protective gloves


Pallet truck

Procedures for transferring the machine by pallet truck

DANGER

When transferring the machine by pallet truck, make sure that the gravity center
of the machine is on the pallet truck center
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The mass of
the machine including the hoisting jigs is approximately 1,740 kg.

The employed pallet truck must be capable of moving up and down and
transporting a load of 1,740 kg and be equipped with a fork of 1,100 mm or
longer
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The mass of
the machine including the hoisting jigs is approximately 1,740 kg.

Check the insertion position of the fork on the drawing before starting the
operation
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Make sure that the fork of the pallet truck is correctly inserted into the designated
position so that the gravity center of the machine is on the center of the pallet
truck
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Ensure that there is no person in the machine transfer route and the area around
it
If the machine should topple or fall off the pallet truck, persons in such area may be
severely injured or crushed to death.

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Procedures for transferring the machine by pallet truck (Continued)

WARNING

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

Before transferring the machine, make sure that the axes are secured with the
metal fixtures
If you transfer the machine without attaching the metal fixtures to the axes, it may
take a great deal of time later to readjust the machine's processing accuracy. For the
procedure to secure the metal fixtures, refer to section 2-4, [Mounting the Drive Axis
Metal Fixtures] in this chapter.

When transferring the machine, use a flat transfer route


When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine


If the covers and sub-frame are pushed or pulled while the machine is transferred, the
resin cover might be broken or sub-frame might be bent.

Step No. Procedure


1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)

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Procedures for transferring the machine by pallet truck (Continued)

Step No. Procedure


3 From the front side of the machine, insert the fork of the pallet truck under the machine as
shown below, and lift the machine.

106 or less

Front side
Fork height

690 or less
Fork width

(Unit: mm)

4 Transfer the machine to the installation site.


→For details of installation site, See the section A-3-1, [Installation Site].
5 Lower the fork and then pull it out of the machine.

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1-3. Installing the Machine with the Leveling Mount


Equipment you must have ready

4 mm Allen wrench
22 mm wrench
Safety shoes and protective gloves

Procedures for installing the machine with the leveling mount


The casters attached underneath the machine make the machine transferring easier.
When the machine arrives at the intended installation site, however, you have to secure the machine there
and take some measure to prevent the machine from moving easily. For this purpose, attach the leveling
mounts and jack the machine up in order to disable the casters.

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 59 and 77 mm
If the machine is jacked up higher than this, the leveling mount may come off. If the
leveling mount comes off during jacking operation, your feet or hands may be caught
or cut off by the machine.

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

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Procedures for installing the machine with the leveling mount (Continued)

Step No. Procedure


1 Wear the safety shoes and protective gloves.
2 Place the dowel pin of the leveling mount just under the positioning hole located
underneath the main body frame. Then rotate the leveling mount handle lightly
counterclockwise.
・Perform the operation above for all 4 leveling mounts.

Dowel pin

Positioning
hole

3 Verify that the dowel pin fits into the positioning hole and the leveling mount does not
move to-and-fro or side-to-side.
・Perform the operation above for all 4 leveling mounts.
4 Attach the cover, and secure it with the retaining screws (M5) so that the positioning pin
does not come loose.
・Perform the operation above for all 4 leveling mounts.

Retaining screws (M5)

Dowel pin

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Procedures for installing the machine with the leveling mount (Continued)

Step No. Procedure


5 With a wrench, rotate the leveling mount handle counterclockwise until all the casters are
lifted above the floor surface. Make necessary adjustments in the front-rear and left-right
directions so that the machine is roughly parallel to the floor surface.
・In jacking-up operation, ensure that the distance between the machine bottom end and
the floor surface becomes between 59 and 77 mm.
(When the machine is jacked up by 70 mm, the chuck table surface is positioned at a
height of 900 mm from the floor.)
Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

59 to 77 mm

6 Visually make sure that all the casters mounted on the bottom of the machine are lifted
above the floor.

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1-4. Removing the Drive Axis Metal Fixtures


About removing the drive axis metal fixtures
Before installing the machine, it is necessary to remove metal fixture retaining screws for each axis and
the drive axis metal fixture for some axes.
Store all the removed metal fixtures and retaining screws in the storage space for drive axis metal fixtures
inside the machine.Store the metal fixtures and retaining screws so as not to lose them since they will be
reused when transferring the machine.

Front side Axis metal fixtures storage space

Operation flow

1-4-1 Removing the Retaining Screw of X-Axis Metal Fixture

1-4-2 Removing the Y1 and Y2 –Axes Metal Fixtures

1-4-3 Removing the Retaining Screw of Z1 and Z2 -Axes Metal Fixtures

1-4-4 Removing the Metal Fixtures of the Upper and Lower Arm

1-4-5 Removing the Metal Fixtures of the Spinner Axis

1-4-6 Removing the arm section slide cover Metal Fixtures

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Equipment you must have ready

4 mm Allen wrench
5 mm Allen wrench
6 mm Allen wrench
10 mm wrench
Phillips screwdriver

B-18
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1-4-1. Removing the Retaining Screw of X-Axis Metal Fixture


Procedures for removing the retaining screw of X-axis metal fixture

Step No. Procedure


1 From the front side of the machine, remove the metal fixture retaining screw (M6, 1 place
on the upper side) of the X-axis metal fixture.
Retaining screw (M6)
Remove only 1 screw on the
upper side

X-axis metal fixture

Do NOT remove the 2


retaining screws on the
lower side and the axis
metal fixture

Item DISCO Part ID


BRACKET (FIXTURE, X)
X-axis metal fixture
LJTN-910061-0

Continued in the next section.

B-19
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1-4-2. Removing the Y1 and Y2-Axes Metal Fixtures


Procedures for removing the Y1 and Y2-axes metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the right side of the machine, loosen the metal fixture retaining screws and nuts
(M6) located at the rear of the Y1-axis section. Then remove the metal fixture.

Y1 and Y2-axes
metal fixtures

Retaining screws (M6)

Item DISCO Part ID


BRACKET (FIXTURE, Y)
Y1 and Y2-axes metal fixtures
LJTN-910062-0

2 From the left side of the machine, loosen the metal fixture retaining screws and nuts (M6),
which are located at the rear of the Y2-axis section. Then remove the metal fixture.

Continued in the next section.

B-20
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1-4-3. Removing the Retaining Screws of Z1 and Z2 -Axes Metal


Fixtures
Procedures for removing the retaining screws of Z1 and Z2-axes metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the upper side of the machine, remove the metal fixture retaining screws and nuts
(M6, 2 places as shown in the illustration below) located at the upper of the Z1-axis
section.

Remove these 2 retaining


screws and nuts (M6) only

Do NOT remove these 2


retaining screws and the
axis metal fixture

Z1 and Z2-axes
metal fixtures

Item DISCO Part ID


BRACKET (FIXTURE, Z)
Z1 and Z2-axes metal fixtures
LJTN-910063-0

2 From the upper side of the machine, remove the metal fixture retaining screws and nuts
(M6, 2 places as shown in the illustration above) located at the upper of the Z2-axis
section.

Continued in the next section.

B-21
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1-4-4. Removing the Metal Fixtures of the Upper and Lower Arm
Operation flow

1-4-4-1 Removing the Transfer Axis Cover

1-4-4-2 Removing the Upper Arm Metal Fixture

1-4-4-3 Removing the Lower Arm Metal Fixture

1-4-4-4 Mounting the Transfer Axis Cover

B-22
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1-4-4-1. Removing the Transfer Axis Cover


Procedures for removing the transfer axis cover

CAUTION

The transfer axis cover removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Open the arm section slide cover.
2 Unscrew the cover retaining screws (upper and lower).
Cover retaining screw (upper)
Cover retaining screw (lower)

Transfer axis cover (upper)

Transfer axis cover (lower)

3 Remove the upper transfer axis cover. Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover, pull the lower part of the cover toward you and lift
it up.
4 Remove the lower transfer axis cover. Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover, pull the lower part of the cover toward you and lift
it up.

Continued in the next section.

B-23
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1-4-4-2. Removing the Upper Arm Metal Fixture


Procedures for removing the upper arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the upper arm and remove the metal
fixture.

Upper arm metal fixture

Retaining screws (M5)

Item DISCO Part ID


BRACKET
Upper arm metal fixture
LJTT-910021-0

Continued in the next section.

B-24
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1-4-4-3. Removing the Lower Arm Metal Fixture


Procedures for removing lower arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the lower arm and remove the metal
fixture.

Lower arm metal fixture


Retaining screws
(M5)

Retaining screws (M5)

Item DISCO Part ID


BRACKET
Lower arm metal fixture
LJTT-913248-0

Continued in the next section.

B-25
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1-4-4-4. Mounting the Transfer Axis Cover


Procedures for mounting the transfer axis cover

Procedure
Step No.
(Continued from the previous section)
1 Reinstall the lower transfer axis cover to its original position.
Cover retaining screw (upper)
Cover retaining screw (lower)

Transfer axis cover (upper)

Transfer axis cover (lower)

2 Reinstall the upper transfer axis cover to its original position.


3 Tighten the upper and lower cover retaining screws securely.

Continued in the next section.

B-26
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1-4-5. Removing the Metal Fixtures of the Spinner Axis


Procedures for removing the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 Loosen the metal fixture retaining screws (M5) of the spinner axis and remove the metal
fixture.

Spinner axis metal fixture

Retaining screws (M5)

Item DISCO Part ID


FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Close the arm section slide cover.

B-27
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1-4-6. Removing the arm section slide cover Metal Fixtures


Procedures for removing the arm section slide cover metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the left side of the machine, loosen the screws of the arm section slide cover to
remove the metal fixtures.

The arm section slide cover


metal fixture

2 retaining screws (M5)


Left side

Item DISCO Part ID


The arm section slide cover metal BRACKET(FIXTURE, COVER)
fixture LJTC-910093-0

B-28
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1-5. Mounting the Status Indicator, Piping and Wiring


Connection
Operation flow

1-5-1 Mounting the Status Indicator

1-5-2 Connecting Piping

1-5-3 Connecting Power Supply Wiring

Equipment you must have ready

3 mm Allen wrench
30 mm wrench
Torque driver
Joint [optional accessory]
Hose [optional accessory]
・The necessary quantity of the hose and joint is different depending on the piping arrangement of the
customer.
→For details, see the section A-4 of this chapter, [Piping and Wiring Connection].

B-29
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1-5-1. Mounting the Status Indicator


Procedures for mounting the status indicator

CAUTION

When you carry out maintenance with the partition board removed, observe the
following precaution. If you stand the removed board against the machine, you
may receive injury by the board if it is toppled by the earthquake or like that.
When you take off the partition board for maintenance purposes, be sure to keep it at a
place that is far enough from the maintenance work area.

Step No. Procedure


1 Open the door of the touch panel.
2 Unscrew 4 retaining screws. Then remove the partition board.

Retaining screws
Partition board

Front side

B-30
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Procedures for mounting the status indicator (Continued)

Step No. Procedure


3 Run the status indicator connector cable into the machine via hole of the main body frame.
Then secure the status indicator by the lock nut.

Lock nut

Status indicator
connector cable

4 Connect the status indicator connector cable to the mating machine-side connector.
5 Reinstall the partition board to its original position.

Continued in the next section.

B-31
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1-5-2. Connecting Piping


Procedures for connecting piping

WARNING

When using N2 gas as a substitute for clean air, install a main valve which
satisfies all the requirements listed below for the N2 supply line at the facilities
・The main valve is located close to the machine.
・The main valve is used only for the machine.
・The main valve is located at the place to which operators can easily access to open
or close it.

When using N2 gas as a substitute for clean air, close the main valve of the N2
gas supply line at the facilities before performing maintenance of the machine
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

A hose and hard piping line between the machine drain port and the plant-side
drain inlet must be inclined
If the hose and hard piping line are positioned in parallel to or higher than the drain
port, water remains in the hose, which may cause water leakage from the hose joint. It
may also cause water leakage from the water case.

When the piping connection work for the cutting and cooling water is completed,
check looseness of connections for the joints
If water leakage should occur, the floor surface and downstairs might be damaged.

B-32
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Procedures for connecting piping (Continued)

CAUTION

Ensure that air supply connection coupling is properly completed


Inadequate connection will cause the pipe to be disconnected. If the air pipe is
disconnected during spindle rotation, the spindle may fail.

Perform piping operation carefully so as not to mix up piping of the cutting and
cooling water hoses
Since water quality between cutting and cooling water is different, a mistake in piping
of cutting and cooling water may damage workpieces or adversely affect processing
accuracy.

Procedure
Step No.
(Continued from the previous section)
1 As shown below, connect the hoses to the drain and duct exhaust ports at the rear of the
machine.
・Apply silicone sealant to the hose and cuff joints.

Rear side

Drain port connection Duct port connection

Apply silicone sealant Apply silicone sealant

B-33
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Procedures for connecting piping (Continued)

Step No. Procedure


2 Using joints, connect the braided hoses to the supply ports of the individual utility
manifold, as indicated below.
・It is recommended that the customer furnish braided hose joints as indicated in the
above figure. The braided hose joint is provided as an optional accessory.

Rinse IN [optional accessory]

Cooling water IN
Clean air IN
Cooling water OUT

Deionnized water IN

Air IN

3 Check looseness of connections for the joints.

Continued in the next section.

B-34
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1-5-3. Connecting Power Supply Wiring


Operation flow

1-5-3-1 Removing the Machine Outer Cover

1-5-3-2 Connecting the Power Supply Wiring

1-5-3-3 Mounting the Machine Outer Cover

1-5-3-4 Completion of Connecting the Power Supply Wiring

Safety items for connecting power supply wiring

WARNING

When you make power cable connection, make sure to connect the PE wire of
the cable first and confirm its connection
If you come into contact with the machine when its PE wire is not connected, you
may receive an electric shock that could result in severe injury or death.

When connecting the power cable terminal to the power circuit breaker, be sure
to use a calibrated torque driver and tighten the screws of the breaker terminal
block with the specified torque (3 N•m)
If the torque is not just enough, the connection between the power cable terminal and
breaker terminal block may heat up, which could cause a fire.

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

B-35
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Safety items for connecting power supply wiring (Continued)

WARNING

Before connecting the power cables, be sure to shut OFF the facility power
source
If you connect power cables while the electricity is flowing through the machine, you
may receive an electric shock that may lead to serious injury or death.

Connect the PE wire so that it is not strained even when a load is applied to the
cable
If the PE wire is disconnected, it could cause electric shock due to electric leakage.
To prevent the PE wire from disconnecting under the strain, make sure that the PE
wire of the power cable is at least 150 mm longer than the L1/L2/L3 lines
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

CAUTION

Connect the power cable L1, L2, and L3 lines to the respective designated
positions on the breaker terminal block
If the L1/L2/L3 lines are connected in the wrong positions, the machine will not
operate properly and there is a risk that it will be damaged or processing accuracy will
be affected. Connect the power cable in the correct positions on both the plant facility
side and the machine side.

Breaker
L1 L2 L3 terminal block

B-36
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1-5-3-1. Removing the Machine Outer Cover


Procedures for removing the machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Turn the breaker lever to the "RESET" position and use the cover unlock key to release
the lock of the cover [I].

[I]

[J]

Rear side

Breaker lever

Circuit breaker

[I] cover

2 Remove the [I] cover.


・Store the removed outer cover sufficiently away from the working area.
・The [I] cover cannot be removed when the breaker lever is "ON" or "OFF".
・The breaker lever cannot be "ON" when the [I] cover is removed.
3 Remove the [J] cover.

Continued in the next section.

B-37
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1-5-3-2. Connecting the Power Supply Wiring


Procedures for connecting the power supply wiring

Procedure
Step No.
(Continued from the previous section)
1 Have on hand the cable, terminals and other items required for power cable connection.
・Make sure that the PE wire of the power cable is at least 150 mm longer than the
L1/L2/L3 lines.
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

2 Route the power cable to the inner side of the machine, as shown below.

Power cable

Clamp the power


cable firmly with a
cable clamp

Rear side

3 Remove the retaining screws (2 places) of the terminal block cover.


Terminal block cover

Retaining screws

B-38
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure


4 Remove the terminal block cover.
5 Connect the power cable PE line (ground line) to the PE terminal block and tighten the
screws of the PE terminal block with the specified torque (3 N•m).
・In power cable connecting, be sure to connect the PE line first.
[Standard specification]
Terminal board

L1 L2 L3

Earth leakage
PE terminal bar breaker

PE

Firmly clamp the


power cable with
a cable clamp

PE=Ground (GND)

[Transformer specification]
PE
Earth leakage
breaker
L1 L2 L3

PE Terminal
bar

Firmly clamp the Terminal board


power cable with Circuit breaker
a cable clamp

PE=Ground (GND)

B-39
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure


6 Connect the power cable L1/L2/L3 lines to the breaker terminal block and tighten the
screws of the breaker terminal block with the specified torque (3 N•m).
・When connecting the optional transformer or UPS (Uninterruptible Power Supply) unit,
they must be connected with the machine before connecting the machine to the facility
power source.
[Standard specification]
Terminal board

L1 L2L2 L3 L3

Earth leakage
PE terminal bar breaker

PE

PE=Ground (GND)

[Transformer specification]
PE
Earth leakage
breaker
L1 L2 L3

PE Terminal
bar

Terminal board
Circuit breaker

PE=Ground (GND)

7 Check to make sure that the PE wire terminal is not strained when you lightly pull down
the power cable by hand.
・If the PE wire terminal is strained, it means that the PE wire is not long enough. Use a
PE wire with enough length.

B-40
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure


8 Replace the terminal block cover back into the initial position.
Terminal block cover

Retaining screws

Continued in the next section.

B-41
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1-5-3-3. Mounting the Breaker Section Cover


Procedures for mounting the circuit breaker section cover

Procedure
Step No.
(Continued from the previous section)
1 Install the covers in order of [I] and [J].

[I]

[J]

Rear side

2 Lock up the circuit breaker lever with a padlock or the like.

Continued in the next section.

B-42
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1-5-3-4. Completion of Connecting the Power Supply Wiring


Procedures for completion of connecting power supply wiring

Procedure
Step No.
(Continued from the previous section)
1 Connect the power cable to the facility power source.
・When you make cable connection to the facility power source,
be sure to connect the PE wire first using an adequately long PE wire.
・If you connect the optional transformer or UPS (Uninterruptible Power Supply) unit,
first connect them with the machine before connecting the machine to the facility
power source.

B-43
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1-6. Mounting the Machine Outer Cover


Machine outer cover configuration

[E]

[A]
[F]

[B] [C] [D]

Front side Right side

[I]

[G]

[J]

[K]
[H]

Rear side Left side

B-44
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Procedures for mounting the machine outer cover

Step No. Procedure


1 Open the arm section slide cover and install the covers in order of [B], [C] and [A].

[A]

[B] [C]

Front side

2 Install the covers in order of [D], [E] and [F].

[E]

[F]

[D]

Right side

B-45
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Procedures for mounting the machine outer cover (Continued)

Step No. Procedure


3 Install the covers in order of [G] and [H].

[G]

[H]

Left side

4 Install the [K] cover.

[K]

Rear side

B-46
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1-7. Leveling the Machine with the Leveling Mount


Operation flow

1-7-1 Mounting the Spirit Level

1-7-2 Removing the Machine Outer Cover

1-7-3 Leveling the Machine

Equipment you must have ready

Spirit level (Minimum tick: 20 m/m)


22 mm wrench
Safety shoes and protective gloves

B-47
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1-7-1. Mounting the Spirit Level


Mounting the spirit level

WARNING

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure


1 Wear the safety shoes and protective gloves.
2 Turn ON the facility power supply.
3 Unlock the lever of the circuit breaker, and then turn ON the circuit breaker.
4 Insert the key into the main switch.
5 Rotate the key to "START" position to turn ON the machine.
6 Press the <System Initial> button.
・System initialization will be effected.
7

With the button on the software keyboard, move the table base to a location
under the spindle section.
8 Open the arm section slide cover.
9 Make sure that there is no dirt or other foreign matters on the upper surface of the table
base. Place a spirit level on the table base.

Continued in the next section.

B-48
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1-7-2. Removing the Machine Outer Cover


Procedures for removing the machine outer cover

CAUTION

The covers removed when performing maintenance work on the machine should
be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Turn OFF the main switch and then remove it.
2 Turn OFF the circuit breaker and lock up the circuit breaker lever with a padlock or the
like.

3 Shut OFF the facility power supply.


4 Open the arm section slide cover.

B-49
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Procedures for removing the machine outer cover (Continued)

Step No. Procedure


5 Remove the covers in order of [A], [B], [C], [F], [D], [H] and [K].

[A]

[B] [C] [F]


[D]

Front side Right side

[K]

[H]

Rear side Left side

6 Store the removed outer covers sufficiently away from the working area.

Continued in the next section.

B-50
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1-7-3. Leveling the Machine


Procedures for leveling the machine

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down during jacking operation, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 59 and 77 mm
If the machine is jacked up higher than this, the leveling mount may come off. If the
leveling mount comes off during jacking operation, your feet or hands may be caught
or cut off by the machine.

Procedure
Step No.
(Continued from the previous section)
1 Adjust the level of the machine by alternately turning the handle of the leveling mount
(front, rear, left and right).
・In jacking-up operation, ensure that the distance between the machine bottom end and
the floor surface becomes between 59 and 77 mm.
(When the machine is jacked up by 70 mm, the chuck table surface is positioned at a
height of 900 mm from the floor.)
Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

59 to 77 mm

2 With a spirit level, level the machine until the spirit level reads 0.02 mm/1 m or lower for
both the X- and Y-direction.
Table base

Spirit level

Y-direction
X-direction

X-direction Y-direction

Front of the machine

B-51
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Procedures for leveling the machine (Continued)

Step No. Procedure


3 Remove the spirit level from the table base surface.
4 Secure the machine to the floor with the machine anchoring brackets.
→For the anchoring procedure,
see Section 1-8 [Mounting the Machine Anchoring Brackets [Optional Accessory]] of
this chapter.

B-52
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1-8. Mounting the Machine Anchoring Brackets


[Optional Accessory]
Equipment you must have ready

13 mm wrench
19 mm wrench
Safety shoes and protective gloves

Procedures for mounting the machine anchoring brackets

WARNING

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

B-53
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Procedures for mounting the machine anchoring brackets (Continued)

Step No. Procedure


1 Wear safety shoes and protective gloves.
2 As shown below, secure the machine to the floor surface with the machine anchoring
brackets.
・The installing positions of the machine anchoring brackets are indicated with arrows on
the main frame.
・The customer is requested to arrange taps on the floor and anchor bolts (M12:
equivalent to strength classification 10.9).

Elongated hole
Top side

Machine
anchoring bracket

2-Anchor bolt M12

Machine anchoring bracket

(Unit: mm)

B-54
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1-9. Completion of Installation Operation


Procedures for completion of installation operation

WARNING

When the installation work is completed, check that there is no water leakage
from any tube while feeding the cutting and cooling water
If water leakage should occur, the floor surface and downstairs might be damaged.

Step No. Procedure


1 Install the covers in order of [B], [C], [A], [D], [F], [K] and [H].
2 Turn ON the facility power supply.
3 Unlock the lever of the circuit breaker and then turn ON the circuit breaker.
4 Insert the key into the main switch.
5 Turn ON the machine by rotating the key to the "START" position.
6 Press the <System Initial> button.
・System initialization will be effected.
7 Verify that the pressure gauge of air, clean air and deionized water read as follows:
Air : 0.5 MPa
Clean air : 0.5 MPa
Deionized water : 0.3 MPa

→For the pressure adjustment procedures,


see the section B-4, [Sensor Adjustment] of the Maintenance Manual.
8 Mount the chuck table.
→For the procedures to mount the chuck table;
See the section B-1, [Chuck Table Replacement] of the Maintenance Manual.
9 Press the <Spindle> button.
10 Press the <Cutting Water> button.

B-55
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Procedures for completion of installation operation (Continued)

Step No. Procedure


11 Check that no water leaks from the drain port of the machine.

Drain port

Rear side

12 Turn OFF the main switch and then pull out the key.
13 Turn OFF the circuit breaker at the rear of the machine. Lock out the circuit breaker lever
with a padlock or the like.

14 Shut off the facility power supply.


15 Close the facility main valve of air.

B-56
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Procedures for completion of installation operation (Continued)

Step No. Procedure


16 Remove the [K] cover.

[K]

Rear side

17 Check that no water leaks from the piping system of the cooling and cutting water at the
rear of the machine.

Rinse IN [optional accessory]

Cooling water IN

Cooling water OUT

Deionnized water IN

18 Install the cover [K].

B-57
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2. Transferring Operation
Operation flow

2-1 Terminating the Machine

2-2 Removing the Machine Outer Cover and Status Indicator

2-3 Disconnecting Piping and Wiring

2-4 Mounting the Drive Axis Metal Fixtures

2-5 Removing the Leveling Mount

Transferring the Machine


→See the section 1-2 of this chapter

Hoisting and Lowering the Machine


→See the section 1-1 of this chapter

Installing the Machine


→See the sections 1-3 to 1-9 of this chapter

B-58
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Safety items for transferring operation

NOTICE

When it is necessary to transfer or dispose of the machine, contact your nearest


DISCO office
DISCO will provide you with detailed information and precautions required for
carrying out such work and manage the machine serial number file at the new
installation site.

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are available in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

B-59
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2-1. Terminating the Machine


Operation flow

Checking that the spindle and cutting water stop and system
initialization has normally completed.

→See the section B-10-1,


[Verification of Stoppage of Spindle and Cutting Water and Initialization] of the Operation Manual.

Cleaning operation

→See the section B-10-2, [Cleaning Operation] of the Operation Manual.

For CE-marking specification machine:


Moving the spinner table
Before turning the power OFF, move the spinner table down to the lowest position.
Press the <System Initial> button to effect system initialization.

Press the <F3> button on the ENGINEERING MAINTENANCE screen [7.0].


・The I/O CHECK screen appears.
→See Section 4 [Sensor/Solenoid Valve Check] of Chapter C in the Maintenance Manual.

Using the I/O CHECK screen, move the spinner table down to the lowest position.
・Follow the procedure below to move the spinner table down to the lowest position.
1. Turn <2040: Move S/T up/down> OFF.
2. Turn <2063: Move S/T down> ON.

Turning the power OFF


→See the section B-10-3, [Turning the Power OFF] of the Operation Manual.

B-60
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2-2. Removing the Machine Outer Cover and Status


Indicator
Safety items for operation with the machine outer cover removed

CAUTION

The machine outer covers removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Operation flow

2-2-1 Turning OFF the Power

2-2-2 Removing the Machine Outer Cover

2-2-3 Removing the Status Indicator

Equipment you must have ready

Item DISCO Part ID


Unlock key KEY (FASTENER)
LHLC-010010-0

2-2-1. Turning OFF the Power


Procedures for turning OFF the power

Step No. Procedure


1 Turn OFF the machine power.
2 Turn OFF the facility power supply.

Continued in the next section.

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2-2-2. Removing the Machine Outer Cover


Machine outer cover configuration
→See the section 1-6 of this chapter, [Mounting the Machine Outer Cover].

How to unlock the outer cover


As shown below, insert the unlock key into the cover lock position in order to release the cover lock and
remove the cover.
Cover lock
Unlock key

Insert the key into lock position


and then lower it down.

Procedures for removing the machine outer cover

WARNING

Before the operation, turn OFF the machine power and facility power source
The machine has hazardous sections where your fingers/hands or other parts of your
body may be caught or cut off.

CAUTION

The covers removed when performing maintenance work on the machine should
be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

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Procedures for removing the machine outer cover (Continued)

Procedure
Step No.
(Continued from the previous section)
1 Lock up the circuit breaker lever with a padlock or the like.

2 Open the arm section slide cover and remove the covers in order of [A], [B], [C].

Arm section slide cover

[A]

[B] [C]

Front side

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Procedures for removing the machine outer cover (Continued)

Step No. Procedure


3 Remove the covers in order of [E], [F] and [D].

[E]

[F]

[D]

Right side

4 Remove the covers in order of [G] and [H].

[G]

[H]

Left side

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Procedures for removing the machine outer cover (Continued)

Step No. Procedure


5 Remove the cover [K].

[K]

Rear side

6 Keep the removed outer covers sufficiently away from the working area.

Continued in the next section.

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2-2-3. Removing Status Indicator


Procedures for removing the status indicator

Procedure
Step No.
(Continued from the previous section)
1 Open the door of the touch panel.
2 Unscrew four retaining screws. Then remove the partition board.

Partition board

Retaining screws

Front side

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Procedures for removing the status indicator (Continued)

Step No. Procedure


3 Disconnect the status indicator connector cable located inside the machine.

Lock nut

Status indicator
connector cable

4 Release the lock nut of the status indicator.


5 Wrap the status indicator with packaging materials and secure it to an arbitrary cover with
the cellophane adhesive tape, etc.
6 Reinstall the partition board to its original position.

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2-3. Disconnecting Piping and Wiring


Equipment you must have ready

30 mm wrench
Safety shoes and protective gloves

Procedures for disconnecting piping and wiring

WARNING

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

Be sure to disconnect the PE wire last after disconnecting power supply cables
If you come into contact with the machine that is not grounded, you may receive an
electric shock which could result in serious injury or death.

The wiring disconnection must be made after shutting OFF the machine power
and the facility power supply
If you make any wiring disconnection while power is supplied, you may receive an
electric shock which could result in serious injury or death.

Wear protective gloves and goggles to clean the inside of the machine and use
tweezers as well to remove broken workpieces
If you perform such work with bare hands, they may be cut or stabbed by the
workpiece.

Do not put your fingers or hands at the drive sections or in the operation space
while the drive sections are operating
Also, make sure that all axes have come to a complete stop before performing the
operation. Otherwise, they may be caught or cut off.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

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Procedures for disconnecting piping and wiring (Continued)

WARNING

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

Do not put your fingers or hands into any air-driven section or operation space
when the air supply is switched ON/OFF
Even when the machine itself is turned off, the air-driven parts may move when the
air supply is switched on or off. In case your fingers or hands are placed in any of
these moving sections or operation space, they may be caught or cut off.

Lock out the water, air and clean air main valves
If any of the main valves (water, air or clean air) is opened by other persons during
machine installation or maintenance, it may cause an accident or machine failure.

Step No. Procedure


1 Disconnect the power cable from the facility power source.
・Be sure to disconnect the PE wire last.
2 Shut OFF the facility-side main valve completely and disconnect pipes.
3 Wear the safety shoes and protective gloves.
4 Drain water from the machine.
・When the floor or machine gets wet, wipe it dry with a cloth or the like.
5 Remove the machine anchoring brackets.
→See the section 1-8 of this chapter,
[Mounting the Machine Anchoring Brackets [Optional Accessory]]

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2-4. Mounting the Drive Axis Metal Fixtures


Operation flow

2-4-1 Mounting the X-Axis Metal Fixture

2-4-2 Mounting the Y1 and Y2-Axes Metal Fixtures

2-4-3 Mounting the Z1 and Z2-Axes Metal Fixtures

2-4-4 Mounting the Metal Fixtures of the Lower and Upper Arm

2-4-5 Mounting the Metal Fixtures of the Spinner Axis

2-4-6 Mounting the arm section slide cover Metal Fixtures

Safety items for mounting the drive axis metal fixtures

WARNING

Perform the operation after the machine power, facility power supply and air are
shut OFF
If your fingers or hands are placed in the drive section during axis metal fixture
installation, they may be caught or cut off.

CAUTION

The covers removed when performing maintenance work on the machine should
be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

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Equipment you must have ready

3 mm Allen wrench
4 mm Allen wrench
5 mm Allen wrench
10 mm wrench
Phillips screwdriver

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2-4-1. Mounting the X-Axis Metal Fixture


Procedures for mounting the X-axis metal fixture

Step No. Procedure


1 Remove all the metal fixtures and retaining screws from the axis metal fixtures storage
space on the front side of the machine.

Front side Axis metal fixtures storage space

2 From the front side of the machine, tighten the metal fixture retaining screw (M6, 1 place
on the upper side) of the X-axis metal fixture.

Tighten the retaining screw


(M6) on the upper side

X-axis metal fixture

Item DISCO Part ID


BRACKET (FIXTURE, X)
X-axis metal fixture
LJTN-910061-0

Continued in the next section.

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2-4-2. Mounting the Y1 and Y2-Axes Metal Fixtures


Procedures for mounting the Y1 and Y2-axes metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Mount the Y1-axis metal fixture.

Y1 and Y2-axes
metal fixtures

Retaining screws (M6)

Item DISCO Part ID


BRACKET (FIXTURE, Y)
Y1 and Y2-axes metal fixture
LJTN-910062-0

2 Mount the Y2-axis metal fixture.

Continued in the next section.

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2-4-3. Mounting the Z1 and Z2-Axes Metal Fixtures


Procedures for mounting the Z1 and Z2-axes metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Tighten the metal fixture retaining screws and nuts (M6, 2 places as shown in the
illustration below) located at the upper of the Z1-axis section.

Tighten these 2 retaining


screws and nuts (M6)

Z1 and Z2-axes
metal fixtures

Item DISCO Part ID


BRACKET (FIXTURE, Z)
Z1 and Z2-axes metal fixture
LJTN-910063-0

2 Tighten the metal fixture retaining screws and nuts (M6, 2 places as shown in the
illustration above) located at the upper of the Z2-axis section.

Continued in the next section.

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2-4-4. Mounting the Metal Fixtures of the Lower Arm and Upper Arm
Operation flow

2-4-4-1 Removing the Transfer Axis Cover

2-4-4-2 Mounting the Upper Arm Metal Fixture

2-4-4-3 Mounting the Lower Arm Metal Fixture

2-4-4-4 Mounting the Transfer Axis Cover

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2-4-4-1. Removing the Transfer Axis Cover


Procedures for removing the transfer axis cover

CAUTION

The transfer axis cover removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Open the arm section slide cover.
2 Unscrew the cover retaining screws (upper and lower).
Cover retaining screw (upper)
Cover retaining screw (lower)

Transfer axis cover (upper)

Transfer axis cover (lower)

3 Remove the upper transfer axis cover. Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover, pull the lower part of the cover toward you and lift
it up.
4 Remove the lower transfer axis cover. Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover, pull the lower part of the cover toward you and lift
it up.

Continued in the next section.

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2-4-4-2. Mounting the Upper Arm Metal Fixture


Procedures for mounting the upper arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Mount the upper arm metal fixture.

Upper arm metal fixture

Retaining screws (M5)

Item DISCO Part ID


BRACKET
Upper arm metal fixture
LJTT-910021-0

Continued in the next section.

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2-4-4-3. Mounting the Lower Arm Metal Fixture


Procedures for mounting the lower arm metal fixture

Procedure
Step No.
(Continued from the previous section)
1 Mount the lower arm metal fixture.

Lower arm metal fixture


Retaining screws
(M5)

Retaining screws (M5)

Item DISCO Part ID


BRACKET
Lower arm metal fixture
LJTT-913248-0

Continued in the next section.

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2-4-4-4. Mounting the Transfer Axis Cover


Procedures for mounting the transfer axis cover

Procedure
Step No.
(Continued from the previous section)
1 Reinstall the lower transfer axis cover to its original position.
Cover retaining screw (upper)
Cover retaining screw (lower)

Transfer axis cover (upper)

Transfer axis cover (lower)

2 Reinstall the upper transfer axis cover to its original position.


3 Tighten the upper and lower cover retaining screws securely.

Continued in the next section.

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2-4-5. Mounting the Metal Fixtures of the Spinner Axis


Procedures for mounting the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 From the front side of the machine, mount the spinner axis metal fixture.

Spinner axis metal fixture

Retaining screws (M5)

Item DISCO Part ID


FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Close the arm section slide cover.

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2-4-6. Mounting the arm section slide cover Metal Fixtures


Procedures for mounting the arm section slide cover metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 From the left side of the machine, attach the metal fixtures for the arm section slide cover.

The arm section slide cover


metal fixture

2 retaining screws (M5)


Left side

Item DISCO Part ID


The arm section slide cover metal BRACKET(FIXTURE, COVER)
fixture LJTC-910093-0

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2-5. Removing the Leveling Mount


Equipment you must have ready

4 mm Allen wrench
22 mm wrench
Safety shoes and protective gloves

Procedures for removing the leveling mount

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

Wear safety shoes and protective gloves during the operation


Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure


1 Wear safety shoes and protective gloves.
2 With a wrench, rotate the handle of the four leveling mounts.
Loosen them equally until all the casters come into contact with the floor.

Clockwise handle rotation


lowers the machine.

Handle

3 Remove the retaining screws (M5) and the cover.


・Perform the operation above for all 4 leveling mounts.

Retaining screws (M5)

Dowel pin

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Procedures for removing the leveling mount (Continued)

Step No. Procedure


4 Rotate the leveling mount handle clockwise until it does not move. Then remove all the
leveling mounts.
5 Store the removed leveling mounts.
6 Transfer the machine.
→See the section 1-2 of this chapter, [Transferring the Machine].
7 To hoist or lower the machine:
→See the section 1-1 of this chapter, [Hoisting and Lowering the Machine by a Crane].
8 For the machine installation after transfer, see the sections 1-3 to 1-9 of this chapter.

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Contact Information
Immediately get in touch with DISCO if any of the following situation arises:
・where an accident that involves injury or death, or an environment-related accident has occurred or
might occur during the operation of DISCO machine
・where it is necessary to transfer or dispose of DISCO machine

13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan


[Overseas Sales Department]
Phone: 81-3-4590-1100 Fax: 81-3-4590-1075

For your nearest DISCO office, visit our website at:


http://www.disco.co.jp
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