\INSTRUC1'IONS I

dEDL

JSM-T200
SCANNING MICROSCOPE
No.ISM·T200-1
(EP165001)

~? JEOL LTD./ JEOL TECHNICS LTO .

Tokyo Japan

7912003KP

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 The Model T200 Scanning Microscope has been developed under the design
philosophy of combining simple operation, simple maintenance, and high
performance. Accordingly, quality micrographs comparable to those obtainable
by a large instrument can be readily obtained without any special skill.
These features together with the various advantages peculiar to the
scanning microscope, such as very large depth of focus, wide magnification
range, and minimal specimen preparation, make the T200 a most effective
instrument for research work, quality control, and as a visual education aid.

T200

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 01

CONTENTS

Page
l o INTRODUCTION · ....... . .................. . ....................... 1-1
1. 1 General ..................................•........•....... 1-1
1. 2 Specifications ...................•..•....•....•........... 1-3
1. 3 Layout , dimension s and weight ...........•..••..........•.. 1-6

2. DESCRIPTION OF MAIN UN ITS ...................................... 2-1

2.1 Column and specimen s t a ge •....................•.........•. 2-2
2. 2 Display panel .....................................•....... 2- 3
2. 3 Checker •.... .. ....... . .....................••..•........ ' .' 2- 5
2.4 Control panel ··········· · ··················· . . ............ 2-7

3. OPERATION · .. .... . .. .. .......................................... 3-1

·3. 1 Startup and shutdown ...................•...... . .. . ........ 3-1
3 . 1 . 1 Star t up '" ................•........................ 3-1
3 . 1 . 2 Shutdown ···· · · · ······· · ················· · ·· · ······· 3-1
3.1 . 3 Power failure .........•............................ 3-1
3 . 1 . 4 Water failure •................... . .......... . . . .... 3-1
3.2 Specimen mounting . . .... . ...................•.............. 3-2
3 . 2.1 Specimen preparation .... . ... . .................•.... 3-2
3 . 2.2 Eucentric specimen stage· ············ · ·· ... . ....... 3- 2
3 . 2 . 3 Large specimen stage . ... . ... . ...........•...... . . . . 3-3
3. 3 Image observation .... . ......................... . .. . ......• 3-5
3.3 . 1 Secondary electron image (SEI) . . ...... . ....... . .... 3-5
3.3 . 2 Backscattered electron image (BEl) . . ....•.......... 3-7
3.3 . 3 Adjusting the rapid e x posure marker . . .. . . . .. ..•. . . .. 3-8
3.3.4 Astigmatism correct i on ... . .... . ..... .. . . ...... .. .. . 3- 9
3 . 3 . 5 Automa tic foc us mode ............................... 3-10
3. 4 FULL AUTO SEM image ..................... . ......... . •...... 3-10
3. 5 Photography··.·· ...... . .................• . .. . ... . ... . ..... 3- 11
3 . 5 .1 Photographic recording s y stems ..................... 3-1 1
3 . 5 .2 Photogr aphing the scan ning image .... . ... . . . ........ 3-14
3 . 5 . 3 Film speed and f-numb er .. ...... . .... . .. . ... . .. . .... 3- 15
3 . 5 . 4 Use of ultrahigh speed Polaroid Land sheet film
(type 107 , 57 , etc .) .. .. .. . ........ . ............. . . 3- 15
3 . 5 . 5 Data readout on micro gr a ph ....... . ...... . .......... 3-16
3. 6 Aligning the mi c ros c ope ...... . ........... . ..... . . ... . .. ... 3-18

4. MAINTENANCE I (General Precautions) ...... . ....... . •....... . .. . . 4-1

5. MAINTENANCE II (Parts Replacement) . . ........... . ..... .. ...... .. . 5-1

5.1 Electron gun filament r eplacement .................•....... 5- 1
5.2 Removing the condense r l ens aper t ure ......... .. ... . ...... . 5- 4
5. 3 Removing the objective lens aperture ... ................... 5- 6
5.4 Disassembling the beam deflecto r . . ........ . ......... . .. . . . 5-8
5.5 Replacing the scintilla tor ........ . .. .. .............. . .... 5- 9
5.6 Replacing the oil diffusion pump heater . . .. .. . ........ . ... 5- 11
5.7 Oil rotary pump maintenance .... . .. . .. . ......... . ... ... . . .. 5-12
5.8 Fuse replacement .... . ... . . . ............. . . . ... . .. . .. .. .... 5- 13

7907001 T200

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6. MAINTENANCE III (Column Disassembly, Reassembly and cleaning) ... 6-1

6. 1 Column··· . . . . . . . . . . . . . . . . . . . . . . . . • . • . . • . . . • . • . . . . . . . . . . . . .. 6-1
6.1.1 Disassembly and reassembly·············· ··········· · 6-1
6.2 Cleaning·· . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .• 6-2
6.2.1 Cleaning materials, tools, etc. ................••... 6-2
6. 2.2 Cleaning frequency and procedures .....•......•...... 6-3
6.2. 3 Cleaning me thods .........................•.......... 6-3
APPENDICES
A.1 Specimen preparation ....... .............. .... .............. A-1
A. 2 Standard tools and acces sories ............................. A- 3

T200

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CHAPTER 1 INTRODUCTION

1.1 GENERAL
The scanning electron microscope is a comparatively recent addition to
the microscope family and is pr oving to be very popular along with the long
established light and transmission type electron microscopes .
In spite of their merits and demerits , each type of microscope has its
role to play depending on the field of application . For example , if a high
resolving power and large depth of focus is not called for, a light micro-
scope would be ideal. Where a very high resolving power is required , a
transmission electron microscope would be necessary . However, when using a
transmission electron microscope, the specimen must be very thin (less than
1 ~m (10,000 A) in thickness) , a factor which requires a great deal of skill
on the part of the user in order to prepare such specimens.
The scanning electron microscope, on the other hand, offers a fairly
high resolution and moreover, since it is possible to use bulk specimens
(specimen thickness being of no consequence), specimen preparation is easy .
In addition to which, the depth of focus is large, thereby enabling 3-D
observation.
The operational principle of the scanning electron microscope is
illustrated in Fig. 1.1. A finely focused electron probe is made to scan
the specimen, resultant upon which, secondary and backscattered electrons,
etc. (Fig . 1.2) are emitted from the surface of the specimen. These signals
are then detected by a detector and outputted via an amplifier to a synchro-
nously scanned CRT as an intensity variation signal . The CRT raster width
divided by the electron probe scanning width gives the image magnification.
By adding an appropriate detector (optional) to the standard T200,
transmitted electron images, cathodoluminescence images, etc. can be
observed in addition to secondary and backscattered electron images.
Further, by incorporating an X- ray detector, X-ray analysis becomes
possible.

E1ec tron gun -~__

Condenser

Objective
Beam deflector
coils ----~~
Amplifier
Incident electron
beam CRT
Secondary electrons,
Specimen other signals

Fig. 1. 1 Principle of scanning electron microscope

T200

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Specimen 1-------,

~
Electromotive force Absorbed electrons

Q)
~ ~ Transmitted electrons
Q)~
+.J
+.J ~
'g +.J2
CIJ
~ ()
CIlQ)
~..-I
H Q)

Fig. 1.2 Signals emitted by specimens

T200

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1.2 Specifications
1. Technical data
Performance
o
Resolution: 10 nm (100 A) at 25 kV and 20 rom working
distance.
Magnification: l5 x to 100,000x (15 x available at work-
ing distance 48 rom only).
Electron optical system
Accelerating voltage: 2, 5, 10, 15, 25 kV.
Electron gun filament: Precentered cartridge tungsten filament.
Lens system: 3-stage demagnifying system (2-stage
condenser lens and objective lens).
Alignment: Mechanical.
Stigma tor: 8-pole electromagnetic type.
Image fine shift: Up to ±10 ~m (25 kV) in any direction;
electromagnetic, joystick control •
• Specimen stage (twin stage)

Specimen stage I (Eucentric specimen stage) I I (Large specimen stage)

Specimen Up to 76 . 5 dia. x
Up to 10 dia. x 10 thick*(rom)
accomodation 25.5 thick** (rom)

Range of X: 10 rom X: 40 rom

movement Y: 20 mm Y: 40 rom

Tilt -40 0 to +900~h'o~ -

Rotation 360 0 -
Working
20 rom 48 rom
distance

Specimen
By drawing out the stage
ex change

Signal
Optional (max . 48 pins)
terminal

32 dia., 51 dia., 76 . 5 dia. (rom) optionally available.

Up to 127.5 dia. x 25.5 thick (rom) possible.
220 0 possible.

T200

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. Scanning system
Secondary and backscattered
electron detection*: By a detector (comprizing a
scintillator, a light pipe, a photo-
multiplier and a collector).
* Backscattered electron
detector, which is capable
of obtaining topographic
and composition images,
transmitted electron
detector, cathodolumines-
cence detector, specimen
current detector, X-ray
detector: Optionally available.
Scanning modes: Frame scan (including TV scan), line
scan and Y modulation.
Scanning speeds: Visual TV scan; 0.2, 0.33, 10 sec/
frame.
Line scan 0.2, 0.33, 10 sec/frame.
Record ..• 60 sec/frame.
Magnification: 35 x to 100,000x (23 steps; series of 35,
50, 75, 100, 150, 200, 350, •••••• ).
(15 x available at WD = 48 mm).
Viewing area: 135 mm x 180 mm.
Cathode ray tube: 230 mm, green phosphor CRT (used for
viewing and recording*).
* A CRT exclusively used for recording
is optionally available •
• TV signal output terminal: BNC-R connector; VTR available; compo-
site video signal output; positive
polarity; output voltage 1 Vp-p; use of
75 ohm coaxial cable; scanning
frequency horizontal: 15 . 75 kHz,
vertical: 60 Hz •
• Recording system (complete
with electromagnetic shutter
and shutter button)
CSI-l: Standard; Brownie roll film; 1 to 1/2
photographing ratio.
CSI-2: Polaroid pack film; 1 to 3/4 photo-
graphing ratio (optional).
CSI-3: 35 mm roll film; 1 to 1/4 photographing
ratio (optional).
CSI-4: Polaroid sheet film; 1 to 1 photograph-
ing ratio (optional).

T200

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. Vacuum system
Operation: Fully automatic.
Ultimate pressure: 7 x 10- 4 Pa (5 x 10- 6 Torr).
Vacuum gauge: Pirani gauge.
Pump-down time: About 30 minutes (from cold).
Specimen exchange: About 2.5 minutes.
Oil rotary pump: 100 .R. /min 1 unit.
Oil diffusion pump: 420 .R. /sec 1 unit.
. Safety devices: Devices for power failure, water
failure and vacuum deterioration:
built-in.
. Miscellaneous: Service outlet: built-in (100 V, 2 A;
used for operating optional attach-
ments) .
The instrument can be wheeled on its
own casters.
2. Installation requirements
. Power and water
Power: 100 V, 50/60 Hz, single phase, 2 kVA
(basic instrument: 1.2 kVA;
attachments: 0 . 8 kVA).
Starting current 60 A (0.2 sec.)
Fluctuation: less than ±10% (that also
includes initial operation).
Ground terminal: 1 terminal, less than 100 Q.
Cooling water: Flow rate ... 2 .R./min at 0.05 - 0.2 MPa
(0.5 - 2 kg/cm 2 ).
Temperature ..• 20 ±5 °c (water
temperature at the
outlet: not greater
than 35°C).
Faucet .. .•.. . 1, 12 mm O.D.
Drain .....•.• 1•
• Installation room
Room temperature: 20 ±5 °C.
Relative humidity: Less than 80%.
Floor vibration: Less than 2 ~m p-p (5 Hz) in the X, Y
and Z directions, less than 3 ~m p-p
(10 Hz) in the X, Y and Z directions,
and less than 8 ~m p-p (50 Hz) in the X,
Y and Z directions (with the instrument
installed).
T200

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Stray magnetic fields: Less than 0.3 ~T (3 mG).

Note: The above specifications are subject to change without notice.

1.3 Layout, dimmensions and weight

2,000

~- 600 - - - + - . . - - - - - 1,100 ------.I Distribution board

I~ I KS2P30A
/ GrOUnid terminal

c,...,
o
o
t
'"
Faucet

Water hose
Y~ Drain

Line cable
Line cable

terminal
I I
I I

o
o

~~
o
N '"

~ Table
(height: 750 mm)
r-----..., \
Specimen stage II I
\ J
,....... )( Operator
r---,
'---_.I
Column
(height: 1250 mm from floor) Unit: mm
I +
Doorway (800 wide x 1800 high)

Overall weight (basic instrument: about 280 kg)

T200

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CHAPTER 2 DESCRIPTION OF MAIN UNITS

Column Checker anel

Specimen stage Attachment housing

Control panel

Power switch

Vacuum control switch

Fig. 2.1 General view of T200

T200

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2.1 Column and specimen stage

Ali t screw Electron un

Photomult lier Evacuation e

Front cover f screw>'~

Lar

Eucentric specimen stage

fixin screw

Twin s

Eucentric

ecimen chamber

Front cover WD selection switch Vacuum control switch

Fig. 2.2 Column and specimen stage

* Used during transportation and when an attachment is attached.

T200

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2.2 Display panel

Fig. 2.3 Display panel

CD CRT

~ CSI photographic recording system mounting pin

Cl) Connector for CSI

~ Blank plate (to be removed when mounting an optional CRT for photo-
graphy )
The display panel lamps indicate the operating state, etc. of the
microscope as follows:

o PUMP DOWN Lights up and remains lit during column

evacuation.

® VENT Lights up when the specimen chamber is

exposed to the atmosphere.
AUTOMATIC The following lamps light up, indicating
that the related function is being auto-
matically controlled, when the respective
buttons are depressed as indicated.

(j) FULL Lights up when the IACCELERATING VOLTAGE I

ION/OFFI button is depressed.

® CONT Lights up when the ICONTRAST I AUTO /MAN!

button is depressed.

T200

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® BRT I
Lights up when the BRIGHTNESS I IAUTO/MAN I
button is depressed.

@ FOCUS I
Lights up when the FOCUS I IAUTO /MAN I
button is depressed.

@ EXPOSURE Lights up and remains lit during photo-

graphy.

~ MAGNIFICATION These LEDs (5), which do not function

unless the microscope is in vacuo , are
for digitally displaying the magnifica-
tion of the CRT image. If the displayed
magnification includes a decimal point ,
the displayed value is incorrect .

QJ ACCELERATING VOLTAGE The ON lamp lights up when an accelerat-

ing voltage is applied to the electron
gun, and the respective lamps light up in
accordance with the selected voltage .
The selected voltage is printed out on
the film.

@ WORKING DISTANCE The respective lamps light up in

accordance with the selected working
distance. The selected working distance
is printed out on the film .

~ FILM COUNTER In the IMAN I mode, all four digits of the

film identification number must be set
manually by means of the four thumbwheels
as provided.
I I
In the AUTO mode, however, the last two
digits (displayed by LEDs) of the film
identification number increase automa-
tically each time a film is exposed until
the displayed number reaches 99. However,
the first two digits must be set manually .

T200

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 2-5

2.3 Checker
This checker enables the operator to pinpoint a faulty circuit or unit
by monitoring 21 voltages and currents.
1. Auto checker
The auto checker automatically makes known a failure in any of the six
main power supplies (check points 6, 7, 8, 9, 10 and 15 in Fig. 2 . 4).
That is, if any of the voltages deviate by ±10% or more from the value
listed, the POWER lamp goes off to indicate an abnormality. The actual
power supply at fault is identified by positioning the POSITION selector
at the above check points and noting the meter reading at each position.
2. The POSITION selector enables the operator to monitor 21 voltages and
currents, including the above six main power supply voltages and various
other operational parameters such as 0 V, mains power voltage, vacuum,
load current, CRT and PMT high tensions, and CL and OL exciting currents.
Check points 22 to 24 have been allotted for attachments.
Note: Wh en calling in yo ur nearest JEOL Service Center in connection
with th e above, please indicat e the check point/points at fault
and the voltage or current reading/readings in question.

lamp selector

al select button
SEI: For observation of secondary electron images
BEl: For observation of backscattered electron images

Fig. 2.4 Checker panel

T200

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Check point table

No. FULL SCALE Measured value

1 ZERO CHECK
2 POWER AC 200 V
3 VACUUM 6 V
4 LOAD CURR 200 JlA
5 CRT HT 20 kV
6 78 V
7 -78 V
8 30 V
9 -30 V
10 10 V
11 60 V
12 -60 V
13 60 V
14 -60 V
15 48 V
16 1100 V
17 CL CURR 2 A
18 OL CURR 2 A
19 15 V
20 -15 V
21 PMT HT -2200 V
22
23
24
} For attachments

T200

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 2- 7

2.4 Control panel

CD IFILAMENT I control
Controls the electron gun filament heating current.
Caution: To prevent overhea tin g the filament which curtails the fila ment
service life, avoid turn ing th e control excessively.
When the filament burns out, the monitor lamp goes out.
o IIMAGEIIMODEI buttons
LSP For observation of signal waveforms (slow scan only).
YMD For observation of Y-modulated images (slow scan only).
PIC
For observation of slow-scan and TV-scan images.
TV
CD IIMAGEIISIZEI buttons
EXP: For image focusing, astigmatism correction and exposure determi-
nation (by Rapid Exposure Marker).
PHOTO : For checking the photographing area.
FULL: For selecting the field of view.
(0 ISTIGMATORI controls
Used to correct astigmatism (that is, to obtain a perfectly round electron
probe) • When the astigmatism is corrected, the defocused image does not
exhibi t directional blurring. It is recommended that correction be
carried out at a magnification of 10,000 x or higher.
G) IIMAGE SHIFTI joystick
The joystick allows the image to be shifted electromagnetically up to f lO
f.Jm.

T200

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G[) IACCELERATING VOLTAGE I control

Selects the accelerating voltage.
(]) ISPOT SIZEI control
Changes over the size of the electron probe. Normally, this control is
set at the 9 o'clock position. However, if the image appears grainy, turn
the control clockwise until the graininess disappears.

For magnifications of
less than 5000 x ~
r;0
SPOT SIZE

For backscattered
electron images

For magnifications of higher than 5000 x and

when observing biological specimens
To obtain high resolution images, turn the knob
fully counterclockwise (clicking position).
~ !CONTRAST! and IBRIGHTNESS! controls
These controls adjust the image contrast and brightness. When the IMAGE
!SIZEI !Expi button is depressed, a rapid exposure marker appears on the
CRT screen. By optimizing the exposure marker (as illustrated below) with
the ICONTRASTI and IBRIGHTNESSI controls, an optimum image is obtained
when the respective IAUTOI buttons are depressed.

- -+--,.-----_-1 Contrast
~----~ Brightness

® IFOCUS I controls
These controls are for focusing the image on the CRT screen. By depres-
sing the center and right IAUTO I buttons, the automatic focusing mode is
established.
@ IMAGNIFICATION ! cotnrol
. Selects the magnification of the CRT screen image. The magnification is
displayed on the display panel.

T200

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 3-1

CHAPTER 3 OPERATION

3.1 Startup and shutdown

3.1.1 Startup
1. Open the water faucet to supply cooling water to the microscope (water
flowrate: 1.5 to 2 ~/min).
Caution: If the f10wrate is increased beyond 2 ~/min, overcoo1ing of
the diffusion pump, for example, may take place.
2. After first turning on the mains power switch on the distribution board,
depress the IpOWERI[QID switch on the console front, left-side panel.
By so doing, the ICHECKERI panel IPOWER I lamp and display panel IPDrw
DOWN I lamp light up and the rotary pump comes into operation.
Note: Within 15 to 30 minutes, the IMAGNIFICATION I panel displays a
magnification reading, indicating that the column vacuum has
reached a degree sufficient for beam generation and specimen
observation.

3.1.2 Shutdown
1. Depress the IpOWERlloFFI switch.
Notes: 1. If the column is not under high vacuum, evacuate the column
by pushing the IpUMP DOWN I switch before depressing the
IPOWER II OFF I switch.
2. If the microscope is going to be out of use for a prolonged
period of time, be sure to evacuate the column to prevent
corrosion.
2. Turn off the mains power switch, wait 10 to 15 minutes for the diffu-
sion pump to cool down to room temperature, then close the water
faucet.
Note: Although it is preferable to wait 10 to 15 minutes for the
diffusion pump to cool down to room temperature, shutting off the
cooling water immediately after turning off the power switch has
no adverse effect on the microscope.

3.1.3 Power failure

The microscope stops automatically. When power is restored, however,
it is necessary to manually reactivate the microscope by depressing the
IpOWERlloNI switch.

3. 1 .4 Water failure
The microscope stops automatically. As in the case of power failure,
when water is restored, it is necessary to manually reactivate the micro-
scope by depressing the IpOWERlIoNI switch.
Note: Even when the cooling water is restored, depressing the IPOWER Ii ON I
switch 'will not reactivate the microscope unless the diffusion pump
thermostat has cooled down to its normal operating temperature.
T200

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 3-2

3.2 Specimen mounting

3. 2.1 Specimen preparation
Although specimen preparation for scanning microscopy is fairly
simple, satisfactory result will not be obtained unless the specimen are
prepared according to their types and the purpose of observation. Refer to
Appendix, Specimen preparation .

3.2.2 Eucentric specimen stage

1. Push the IVENTI switch to admit air into the column.
2. Wait about 40 seconds for the column to become fully exposed to the
atmosphere, then draw out the front cover after first setting the tilt
control to 0°.
3. Insert the specimen stub, complete with specimen, into the specimen
holder, adjust the specimen height adjust screw so as to make the
specimen flush with the holder rim, and secure the stub with the stub
fixing screw (Figs. 3.2 and 3.3).
Caution: If the specimen surface is not flush with the holder rim, the
actual and displayed magnifications will differ, difference
increasing as the working distance is reduced.
4. Return the specimen stage to the specimen chamber and push the !PUMP
DOWN! switch.
5 . Wait 2 to 3 minutes for the !MAGNIFICATIONi indicator to display a
reading . Almost immediately thereafter (10 20 seconds later), the
image can be observed.
~ Specimen

Tilt angle reference marker

e=J= Specimen stub
Specimen x
~
°R'-!) 0/~Y
/ stub mount
Tilt
I ~/~T
1. 5 mm hexagonal
holder /"~wrench
Y control

"
~ ';)1\ Front Specimen holder

Rotation control When both the X and Y

X control controls read 5 mm,
the electron beam is
incident to the center
of the specimen stub.
The directions of X, Y, T, and R
arrows correspond to the respective
rotated directions of the X, Y, T,
Fig. 3.1 Eucentric specimen stage and R controls (Fig . 3.1).
Fig. 3.2 Image movement on CRT screen

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To exchange the specimen

holder, unscrew these
three screws.

Specimen Make the specimen surface

flush with the holder rim.
2~ ' mm
rt-......Il{;;;;;;;J------L..-1WD
Specimen stub fixing screw
(use 1.5 mm hexagonal key wrench)
Specimen stub

Specimen height adjust screw

specimen (use 1 . 5 nun hexagonal key wrench)

Fig. 3.3 Specimen height adjustment

3.2.3 Large "specimen stage

1. Push the IVENTI switch.
2. Wait about 40 seconds for the column to be completely exposed to the
atmosphere, then draw out the front cover after first setting the tilt
control to 0°.
3. Set the eucentric stage Y control to 20 mm.
4. Insert the specimen in the holder, adjust the specimen height adjust
screw so as to make the specimen flush with the holder rim, and secure
the specimen with the specimen fixing screws (Figs. 3.4 and 3.5) .
5. Return the specimen stage to the specimen chamber and push the IpUMP
DOWN I switch.
6 . Wait 2 to 3 minutes for the IMAGNIFICATION I indicator to display a read-
ing. Almost immediately thereafter (10 - 20 seconds later), the image
can be observed.
Note : If the specimen is porous or prone to gas evolution, it will take
longer to evacuate the column .

T2.00

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 3-4
Eucentric specimen stage Y control
(set at 20 rom) ~speCimen

• Specimen holder

Y control ------ To remove the specimen

holder, unscrew these
two screws.

X control Front cover

When both the X and Y controls read
20 rom, the electron beam is incident
to the center of the specimen holder.

Specimen holder fixing screws

y
xC'..)
-~
~
~
.?:J Make the specimen surface
J~i , ~ flush with the holder rim.
~ r WD = 48 rom

~ J Specimen fixing screw

(use 1.5 rom hexagonal key wrench)
Front

Specimen height adjust screw

Fig. 3.4 Large specimen stage

x
CRT screen The directions of X and Y
About 15 ° arrows correspond to the
respective rotated directions
y of the X and Y controls
(Fig . 3.4).

Fig . 3.5 Image movement on CRT screen

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3.3 Image observation

3.3 . 1 Secondary electron image (SEI)
Initial setting

1. Set the following specimen stage controls and WD selector as indicated .

G Eucent ric specimen stage
X con trol 5 mID .

Y control 5 mID .

Tilt control················ ··· · · · · ··· · ···· · · Normally, about 30°

(varies according to
specimen topography) •
• WD selector ... . . • ..•.. . • ...•.. . .......•. • ••.... 20 .
2. Set the following checker panel and control panel controls as
indicated :
• Checker panel
ISEII switch ..•.. • ... • ........•.......•...... Depress.
• Control panel
\ FILAMENT I control .....•.......•.....•.•..... Fully counterclock-
wise.
IACCELERATING VOLTAGE I control.······ .•.•.... 25 (kV) .
(gOT SIZEI control ... . .....•. .• •........•... 7 0' clock position.
ICONTRAST I control ........................... Set so that the
checker meter reads
0.22 with the
IpOSITION\ selector
at 2l.
IBRIGHTNESS\ control .................•....... Midway position .
IFOCUS FINEI control ......................... Midway position .
IMAGNIFICATION I control.·.····.·············· 35 x - 500 x.
Center.
controls .. . ........... Midway position.
(If astigmatism
correction has
already been com-
pleted, leave these
controls set where
they are.)
ICONTRAST I , IBRIGHTNESS I and
IFOCusl panel IAUTO/MAN I buttons ... . .•.... • ... IMAN \ .

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 3-6

Observation

1. Depress (ON) the IACCELERATING VOLTAGE I button. The raster now appears
over the entire CRT screen.
2. Depress the IIMAGEllMODEllLSpl and IIMAGE II SIZEI IEXPI buttons.
A line should now appear on the lower part of the CRT screen. If not,
gradually turn the IBRIGHTNESSI control clockwise until the line
appears.

D
A line appears.

3. Turn the IFILAMENT I control to about the 11 o'clock position. The

monitor lamp should now light up. If not, a burnt-out filament is
indicated. In this event, replace it with a new one.
4. Gradually turn the IFILAMENT I control to about the 2 o'clock position.
By so doing, the line referred to in step 2 above changes into a wave~
form and moves up towards the center of the CRT screen.
Note: If the resul.tant waveform goes beyond the screen area, lower the
I I I I
waveform by turning the BRIGHTNESS and/or CONTRAST control(s)
counterclockwise.

D [ ~ !
J Note the height.
----.
No electron beam With electron beam

5. Turn the IFILAMENT I control beyond the 2 o'clock position until the
waveform remains stationary regardless of how much further the control
is turned.
Note: As the control is turned beyond the 2 o'clock position, it will
be noted that ~he waveform first moves down and then moves up
before reaching the stationary state.
6. Once the stationary position has been established, slowly turn the
IFILAMENT I control counterclockwise until the waveform starts to move
down abruptly. Stop turning the control counterclockwise at this point
and turn the control clockwise (just slightly) so as to position the
control at the point just prior to where the waveform starts to fall
(for details on the IFILAMENT I control setting procedure, see Sect.
3.6.1).
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 3-7

7. Depress the IIMAGE I MODEl IPlci button. The rapid exposure marker
together with a raster should now be visible on the CRT.
Note: If only the rapid exposure marker is visible, turn the IBRIGHT-
NESsi and/or CONTRAST controls clockwise until the raster
appears .

Rapid exposure marker

[i]
No raster

8. Increase the magnification with the IMAGNIFICATIONI control and focus

the image with the IFOCUS COARSEI control.
9. Adjust the IBRIGHTNESSI and ICONTRAST I controls so as to obtain the
rapid exposure marker pattern as shown below.
Note: Adjust the ICONTRAST I control first so as to obtain five bars
at the upper level. I I
Then adjust the BRIGHTNESS control so as
to make the center bar accord with the center of the rapid
exposure marker.

~----~~----~Contrast

Brightness

10. Increase the magnification to the desired value and focus the image
with the IMAGNIFICATION I and IFOCusl controls.
Note: When the magnification is considerably changed, the rapid
exposure marker changes. In this case, readjust the related
controls.

3.3.2 Backscattered electron image (BEl)

The initial settings and observation procedure in the case of IBEII
observation are the same as for ISEII observation. However, in the initial
settings, depress the IBEII button instead of the ISEII button and set the
ISPOT SIZEI control to between 12 and 3 o'clock.
Note: If it is desired to observe an SEI during IBEII observation, be
sure to set the ISPOT SIZE I control at the 7 o'clock position before
depressing the ISEII button.

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3.3.3 Adjusting the rapid exposure marker
This marker has been adjusted for optimum exposure, using ASA75 film
and with the lens opening set at fill, prior to factory dispatch.
Accordingly, under normal circumstances, so long as the film speed and lens
opening remain at ASA75 and fill, respectively, it is unnecessary to adjust
the rapid exposure marker. However, since optimum exposure varies somewhat
depending on the condition and nature of the specimen, occasional adjust-
ment may be necessary. Furthermore, adjustment will be necessary when it
is required to take high and low contrast micrographs .
1. High contrast images Gray level mark
In order to obtain a high contrast
image, turn the ICONTRAST I control Black level mark White level mark
clockwise until the exposure marker

--
I
bar appears beyond the standard I

white level bar as shown in Fig .

3.6. Since increasing the image
I
I
I
- - - -I I

contrast also increases the image a. Optimum contrast

brightness, it will be necessary
to decrease the brightness by turn- I
I
ing the IBRIGHTNESSI control b. Fairly high contrast
counterclockwise until the extreme
left bar (at the upper level)
~ .. - "':',---
I
I
aligns with the black level bar. I
c. High contrast I
2. Low contrast images
In order to' obtain a low contrast
image, turn the ICONTRAST I control
I
- - - -I I
\
counterclockwise. Adjust the
IBRIGHTNESS I control to compensate Fig. 3.6
for the loss of image brightness
(see Fig. 3.7). a. Fairly low contrast
_____ ___ __
3 . Automatic image brightness and
~~ ~ ~-4_~\~~_~~

contrast control
After first obtaining optimum (Dark)
image brightness and contrast at a
magnification of about 1000x, b. Low
contrast ~~-~~---~---\~--------~---
establish the automatic control (Bright)
mode by depressing the AUTO/MAN
buttons on the control panel . By • •
. ,. -
so doing, the ICONTI and IBRTllamps on c. Excessive brightness
the display panel light up.
To set the image contrast and/or
d.
- _ ---.-----~---....\ . .
Ir..

Insufficient brightness
brightness as you desire, release
the IAUTO/MAN I button on the
ICONTRASTland/o r IBRI GHTNESS lpanel(s)
• - - -
and adjust the related control(s).
Fig. 3.7

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3.3.4 Astigmatism correction

I f the image exhibits directional blurring when the IFOCusl1 COARSE\ (or
IFINEI) control is turned about the in-focus position and, if when turning
the control further the image exhibits blurring in a direction at right
angles to said directional blurring, it will be necessary to correct the
astigmatism as follows.
1. Depress the [1J button.
2. Set the two ISTIGMATORI controls to the 12 o'clock (Le. neutral)
position.
3. Turn the r.: IF""O:-: :C:"O":u; : s'lIr -: :-c-: : -OA-;-:R;: -CS;:;-;E""'1 (or IFINEI) control until the image blurring
direction is clearly identifiable.
4. Turn the ISTIGMATORI[K] control clockwise and counterclockwise and
ascertain the positions where the image blurring directions are
mutually perpendicular. Once ascertained, set the control to midway
between the two positions. That is, position the control so that the
new image blurring direction bisects the orthogonal blurring directions
(see Fig. 3.8 a, b, c).
5. Repeat the above procedure with the ISTIGMATORIITl control.
The above procedure completes asti matism correction (see Fig. 3.8 d).
6. Focus the image with the IFOCUS\COARSE and/or IFINE\ controls.
No tes: 1. If any directional image blurring remains, repeat Steps 4 to
6.
2. If the image is in-focus, the presence of directional image
blurring cannot be ascertained.
3. When checking for the presence of astigmatism, use a magnifi-
cation higher than lO,OOOx.
4. If the above procedure fails to correct the astigmatism, use
the [m button instead of []J button and repeat the same
procedure.

~o
a b c d

Fig. 3.8 Astigmatism correction

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3.3.5 Automatic focus mode

l.
2. roughly focus the image with the

3. Depress the button. The display panel FOCUS

lamp lights up.
4. When the magnification and/or field of view are/Cis) changed, depress
the right side IAUTOI button on the IFOCusl panel.
Notes: 1. The automatic focus control circuit operates each time the
IAUTol button is depressed and the image is automatically
brought into focus.
2. If the image does not come into focus, re-depress the IAUTOI
button or change the field of view. If the image still
remains out of focus, the field of view in question is out-
side the operating range of the automatic focus control
I I
circuit. In this case, use the IFOCUS II COARSE (or FINE I )
control to focus the image.
3. If the specimen surface is rough, only the high points or
crests are brought into focus.
4. For high magnifications, correct the astigmatism fully prior
to focus ing .

3.4 FULL AUTO SEM images

When the following controls are set as indicated, the image automati-
cally appears when the power switch is depressed.
• IFILAMENT I control: Optimum operating position (adjust the
control once a day).
• IACCELERATING VOLTAGE! button: Depressed.
• IMAGNIFICATION I control: Approx. SOOx.
• IBRIGHTNESS! and I CONTRAST!
controls: Optimum image positions.
• IAUTol buttons: Depressed.
Note: Each time a used specimen is replaced by a new one, it will be
necessary to push the IpUMP DOWN I switch.

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 3-11
3. 5 Photography
3.5 . 1 Photographic recording systems
The photographic recording system must be selected according to the
type of film intended for use . The various recording systems and available
film are listed below .

Photographic Photographing Available film and

recording system ratio number of exposures

Brownie roll film; J120 ASA50, 100,

CSI-l 200, etc. (negative); 10 exposures
, per roll.
1 : 0.5
(Fig . 3.9) Brownie roll film; 220 ASAlOO, 400,
etc. (negative); 20 exposures per
roll.

Polaroid Land film pack; Type 105 or

CSI-2 665 ASA75 (positive/negative); 8
sheets per pack.
1 : 0.75
(Fig. 3.10) Polaroid Land film pack; Type 107
ASA3000 (positive) ; 8 sheets per pack
-
CSI-3 35 rom roll film; J135 ASA50, 100,
1 : 0.25 200, 400, etc. (negative) ; 12, 20,
(Fig. 3.11) 24, or 36 exposures per roll

Polaroid Land sheet film

CSI- 4 Type 51 (high contrast), ASA200
Type 52 (wide latitude) ASA400
1 : 1
(Fig . 3 . 12) Type 55 (positive/negative) ASA50
Type 57 (ultrahigh speed) ASA3000
20 sheets per pack

Available film holders

CSI-l : Mamiya Roll Film Holder (Type 2)
CSI-2: Polaroid Film Holder (Type 2)
CSI- 3 : Yashica RF Reflex (ML macro-lens, f 55 rom; with viewfinder)
CSI-4 : Polaroid Film Holder (#545) .
Note: It is possibl e to use the Mamiya Roll Film Holder (Type 2) in
conjunction with the CSI-2 as well as the CSI-l. In this case ,
however, it will only be possible to photograph part of .the screen
image. It is also possible to use the Polaroid Film Holder (Type 2)
in conjunction with the CSI-l as well as the CSI-2. In this case,
however , the entire image will only occupy part of the film.

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Hinge pin

Focusing knob

Shutter button

Latch
Connector

Aperture adjust ring Roll film holder

Lens fixing screw (complete with adapter)
Manual shutter Dark slide

Fig. 3 . 9 CS1-1

Hinge pin

Aperture adjust knob

Shutter button

Latch

Lens fixing screw

Manual shutter button
pack film holder

Dark slide

Fig. 3. 1 0 CS I - 2

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Hinge pin
button

Focusing ring, lens, aperture

adj ust ring

Camera body

Viewfinder

Latch

Automatic take-up
device
~------Release cord

Fi g. 3.11 CSI-3

Hinge pin
Shutter button
Polaroid If 545
Aperture adjust sheet film holder

Latch

Lens

Manual shutter

Fig . 3.12 CSI-4

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3.5.2 Photographing the scanning image

Photographing procedure in the case of recording systems CSI-l, -2,
-3, and -4 is practically the same.
1. Mount the recording system (hereafter referred to as the CSI) on the
CRT and secure it with the hinge pin. Afterwhich, insert the CSI
connector in the socket on the display panel.
2. Obtain an image on the CRT, swing the CSI to the CRT and fasten it in
place with the latch lever.
Note: In order to enhance scanning line visibility, it is recommended
to use an LSP or TV image.
3. Open the camera shutter by depressing the manual shutter button.
Note: The CSI-3 is a single-lens reflex camera, so the shutter does
not open. In this case, the image is observed through the view-
finder.
4. Set the lens opening to 5.6 (max).
5. Attach the focus screen to the CSI.
Note: In the case of the CSI-3, the focus screen is not required.
6. Using a magnifying glass, focus the scanning lines with the focus knob
and then secure the lens with the fixing screw as provided.
7. Remove the focus screen and replace it with a loaded film holder.
Caution: Be sure not to forget to insert the dark slide in the film
holder.
Note: In the case of the CSI-3, the dark slide is not required.
8. Close the shutter by depressing the shutter button.
9. Set the lens opening appropriately in accordance with the film speed* •
10. In the case of the CSI-3, set the shutter control to B.
The above procedure completes preparation for photography.
lL Set the film number with the thumbwheel switches on the display panel.
In the IMAN I mode, the film number remains unchanged so long as the
thurnbwheel switches are not preset. On the otherhand, in the IAUTO I
mode, once the film number is set, the last two digits (displayed by
LEDs) of the film number automatically advance one by one as each film
is exposed.
12 . Select the desired field of view and adjust the image brightness and
contrast in conjunction with the exposure marker.
13. Remove the dark slide from the film holder.
14. After. checking the image focus, press the shutter button. After 3
seconds, the shutter opens ~ and exposure commences; 60 seconds later,
the shutter closes.
15. Advance the film.
Notes: 1 . In the case of the CSI-3, the film is automatically advanced.
2 . After each exposure, be sure to replace the dark slide
except in the case of the CSI-3.
3. In the case of the CSI-2 and -4, refer to the instructions
of Polaroid film holder.
4. In the case of the CSI-3, refer to the camera instructions.

* See Sect. 3.5.3.

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 3.5.3 Film speed and f-number
The exposure marker has been adjusted so as to match a film speed of
ASA75. For other film speeds, re-adjust the exposure marker and then set
the f-number as follows:

Film speed
f-number
ASA Dru

50 18 5.6 - 8
75, 100 21 8 - 11
200 24 11 - 16
400 27 16 - 22
C~

3.5.4 Use of ultrahigh speed Polaroid Land sheet film (type 107,57 , etc.)

c. Ultrahigh speed film (ASA3000) is normally unsuitable for image

recording due to its rather poor resolution and narrow latitude.
Accordingly, the use of this type of film should be restricted to special
purpose photography such as when recording dynamic behavior.
1. Attach a co~ercially available ND4 filter (dia. 52 mm) to the lens.
2. Set the lens opening to f22.
3. Adjust the rapid 2xposure marker so as to slightly reduce the image
contrast as shown below.

Gray level mark

Black level mark White level mark

( ,
_____________

-
~#I ~\ ~

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3.5.5 Data readout on micrograph

Calibrated length Accelerating Working Film identificati

Fig. 3.13 of micron bar voltage distance umber

c Calibrated length of micron bar

Example: 1000 D 1000 \Jm, SO D 50 ~m, 1 ... D 1 ~m,
01 D 0.1 ~m, 005 D 0.05 ~m

Accelerating voltage (up to 2 digits)

25 kV, 15 kV, 10 kV, 5 kV, 2 kV .
• Working distance
8 rum , 2 0 rum , 4 8 II1r.l •

• Film identification number (up to 4 digits)

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 3-17

• Hagnification

(Length of D (rum))
(Magnification)
(Calibrated length of micron bar (~m)

15 rum 15 rum
Ex. 15
1000 ~m 1 rum

Note: The central micron bar should be used to ascertain the length
of the mi cron bar.

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 3-18

.3.6 Aligning the microscope

Axis alignment is necessary in the following cases:
1) After replacing or cleaning the electron gun filament, condenser lens
aperture, or objective lens aperture.
2) After dismantling and reasembling the column.

Electron gun

~
\
Cathode (Wehnelt unit)
Electron beam----'

Anode

Fig. 3<14 Electron gun alignment

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1. Evacuate the column and

check that the lMAGNIFICA-
TIONi indicator displays a
reading .
2. Set the working distance
to 20 rom.
3. Bring the electron gun to Electron gun Bring electron gun
the mechanical center misaligned to mechnical center.
with the "":::':::..:::J===----=..::.
4 . Set the
VOLTAGE I switch at 25 kV
and turn on the accelerat-
ing voltage by depressing
ACCELERATING VO~TAGE
ON --- C
,
Depress

the button . OFF ---

5. Depress the lLspl and
lExpi buttons . A line now
appears on the CRT screen.
Note : If a line fails to
appear, adjust the
iBRIGHTNESSi control
KV
so as to bring the Depress Depress
line to the bottom
of the screen. t t10DE t SIZE
6. Set the IFILAMENT I control
to around the 11 o'clock
position. The IFILAMENT I
I~[J[]I I~[J[]I
monitor lamp will light up. LSP YMD PIC .EXP PHOTO FULL
Note : If the lamp fails to TV
light up, a burntdut
filament is
indicated. In this
event, replace the
filament .
7. While monitoring the CRT
waveform, slowly turn the
o A line appears
on CRT screen.

IFILAMENT I control to FILAMENT

about the 2 o'clock , I /
position; i . e ., so as to -~- Filament monitor
/ I '
maximally heighten the lamp lights up.
waveform. This is
referred to as the first
peak position (see Fig.
3.15) •
Note: If wh e n carrying out
Step 7 the waveform
shows little inclina-
ti on to move upward
or conversely moves FILAMENT

o
upward to such an
extent that the trace
disappears off the
screen, adjust the

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 3-20

ICONTRASTlorlBRIGHTNESsl Note the height.---

o
control so as to normal-
ize the situation.

8. Re-adjust the axis align-

T
ment screws so as to f
maximally heighte~ the No electron beam Set [FILAMENT] control to
waveform. maximally heighten the
9. Further turn the IFILAMENT I waveform .
control to about the 3
o'clock position; i.e., to
the point where saturation
commences. This is
referred to as the second
peak position (see Fig.
3.15).
Notes: 1. When ~rning the
--
FILAMENT I I
control from the
2 o'clock posi-
tion to the 3
o'clock position,
the waveform will Maximally heighten the
lose height and waveform with the
then regain its alignment screws.
lost height as it FILAMENT FILAMENT FILAMENT

0\-0\-0
approaches 3
o'clock.
2. If th e waveform
fails to saturate
and lose height
when the IFILA-

fE-G-fB
MENTI control is
turned beyond the
saturation posi-
tion, repeat
Steps 6 - 8. Set IFILAMENT I
control at
10. Re-adjust the axis align- ~he saturation position.
ment screws so as to
maximally heighten the
waveform.
11 . Check that the waveform ..
level follows the pattern
as shown in Fig. 3.15
by ret urning th e Ir::F:-:::I:=-L--;-A~ME:;::;N~T=1
control to the fully
counterclockwise position
and turning it clockwise
through the 11 o'clock, 2
o'clock and 3 o'clock
positions . Then, if all
---
is in order, turn the Maximally heighten the waveform with
the alignment screws

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 3-21
control slightly
counterclockwise and set
it at the position just
prior to where the wave-
form starts to fall
abruptly (point A in Fig . 3 . 15). FILAMENT FILAMENT

OJ 0
caution: Operating the gun
filament in the
over-sa tura ted ..
state may curtail
the service life
of the filament
or cause it to
warp.
Notes: 1 . The first and
second peak
heights vary
t
~

] •
[ "f'NWWV\

]
slightly from
filament to
filament .
2 . With some new
filaments, the
first peak is
higher than the
second peak. Oversaturated region
2nd
,-
I
e
0
4-i
<ll
:>
(Ij
I
~
I
4-i L-- l .
, _____ -.l I L ____ --,
0 I I
I I
+J I I I
,..c;
bl)
'M
<ll
:::c:

I I I
I L _____ , I I
I , ____ .J
L----------l I

•
I
I
Fully counter- 11 0 ' clock I 11 o'clock I 3 o'clock
clockwise
I 12 o'clock 2 o'clock ~Operating
position
FILAMENT monitor
lamp lights up .
IFILAMENTI control position - - - t....

Fig o 30 15 FILAMENT control setting

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 4-1

CHAPTER 4 MAINTENANCE I (General Precautions)

After prolonged operation, the column interior becomes contaminated by

electron beam bombardment, evaporated materials, and very fine dust
particles. If this contamination is allowed to remain, astigmatism may
increase, image resolution may deteriorate, the probe current may become un-
stable, or it may not be possible to obtain a normal image due to probe
skipping (Fig. 4.1).
Accordingly, the column should be disassembled at regular intervals and
the various contaminated parts cleaned or replaced.

Normal image Image resulting

from probe skipping

Fig. 4.1 Normal and abnormal images

Precautions to be taken during column disassembly (reassembly) and compo-

nent replacement
Handling the component parts
Since the component parts housed inside the column are precision-
machined, they must be handled with great care. Always wear clean
cotton or nylon gloves to avoid contamination by perspiration, etc.
(especially during reassembly), which could lead to corrosion.
Prior to removing any of the parts, prepare a stout work bench and
suitable mats and covers. Gauze or rayon paper, for example, is
suitable for those parts from which lint can be easily removed, while
plastic sheeting or saran film is appropriate for small complex
components. The plastic sheeting, however, should be insoluble in
organic solvents. Plastic sheeting, saran film or aluminum foil is
suitable as a cover. In the case of heavy components, cushioning
material (plastic foam, etc~) is recommended to act as a buffer.
When using wrenches~ screwdrivers,tweezers or other tools necessary for
removing the various parts, be extremely careful not to abrase or
scratch the parts being removed. Moreover, be careful not to bend or
force the parts when inserting or removing them. Do not cut any lead
wires.
Parts storage and placement
If the disassembled parts are not to be reassembled immediately after
cleaning, do not leave them on the table exposed to the atmosphere, but

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 4-2

store them in a desiccator. If a desiccator is not available, wrap the

component parts in rust-proof paper, then cover the rust-proof paper
with saran film, not forgetting to insert a desiccant between the rust-
proof paper and the saran film. Then cover the saran film with
aluminum foil and store in a suitable place where the humidity is low.
Arrange the removed parts in an orderly fashion, especially small parts,
.screw, etc., to make reassembly easier and to avoid misplacement or loss
of screws.
Proper usage of screwdrivers and tools
The proper tool must be employed for the particular job at hand. Also,
when ' using screwdrivers, wrenches, etc. to remove and reassemble ·the
various component parts, be sure not to apply undue stress or try to
force removal of the screws, etc., otherwise screw heads and screw
threads will be damaged.
When reinstalling a component part after cleaning, screw in the screws
in a diagonal rotary fashion to prevent imbalance, strain and/or
vibration.

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 5-1

CHAPTER 5 MAINTENANCE II (Parts Repl acement)

5.1 Electron gun filament replacement

If the filament monitor lamp remains unlit when the IFILAMENT I control
is turned beyond the 11 o'clock position, a burntout filament is indicated.
In this case, replace the filament as follows:
1. Admit air into the column by pushing the IVENTI switch.
2. Loosen the alignment screws (4 pes.), remove the electron gun by lifting
it straight up, turn it upside down and then place it on the column (see
Figs. 5.1 and 5.2).
Cautions: 1. Allow a few minutes for the Wehnelt unit to cool down
before handling it.
2. When carrying out the following steps, be sure to observe
the precautions described in Chap. 4. Furthermore, make it
a rule not to leave the column exposed to the atmosphere
for longer than necessary.

Fig. 5.1 Removing the electron gun

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3. Place the Wehnelt cap removing tool (hereafter re'f erred to as the
Wehnelt tool) over ' the Wehnelt cap, tighten the screws (see Figs. 5. 2
and 5.4), and remove the Wehnelt cap from the Wehnelt unit base by pull-
ing the tool.

Wehnelt cap Socket screw

a. Securing the electron gun b. Removing the Wehnelt cap

Fig. 5.2

4. Loosen the screws and remove the cap from the Wehnelt tool.
5. Remove the filament by loosening the filament fixing screws (3 pcs.)
with the hexagonal key wrench and the setscrew with the screwdriver
(Fig. 5.3).

Guide Filament
groove ~
1.5 mm hexagonal ""'~ Spacer
key wrench.~~ ~lt cap
, Socket

Wa tchmaker' s
screw!~
/8
...~ ~, .. ----

•
1
/

v.
?OCket screw
____

Wehnelt cap
removing tool
screwdriver
a b

Fig. 5.3

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6. Clean the Wehnelt cap.

7. If the high voltage insulator is discolored, clean it.
8. Align the new filament guide groove- wi,th the guide pin,- insert the
filament into the Wehnelt cap and secure the filament by tightening the
filament fixing screws.
Notes: 1. Usually use the 2 mm spacer and only when the instrument is
to be operated under the high resolution - work used the
1.9 mm spacer.
2. Do not let the tip of the electron gun filament protrude
outside the tip surface of the Wehnelt cap or indication of
the . CHECKER "4" meter does not exceed O. 7 (140 ]lA). I f the
indication exceeds 0.7, replace the spacer by the 2 mm one.
When the indication still exceeds 0.7 even i f the 2 mm spacer
is used, replace the filament by a new one.
3. If the indication of CHECKER" 4" fluctuates when the IFILAMENTI
knob is readjusted, clean the Wehnelt cap. If, at that time,
a whisker1ike substance is observed on the filament, replace
i t by a new filament. (This whisker like substance can be
seen when a magni fy ing gl ass is used.)

Wehnelt cap
removing tool 2.0 nun
(two lines)
Spacers
Socket screw

Socket screw 1.9 mm

Guide pin (single line)
Insulator ~~~=4~EEDJEL~t:=::;::~ Wehnel t uni t base

Fig. 5.4

9. Orientate the Wehnelt cap so as to align the cap guide groove with the
Wehnelt unit base guide pin and push the cap down onto the Wehnelt unit
base.
10. After applying the handblower to the Wehnelt unit and environs so as to
remove all traces of lint, dust, etc. , return the electron gun to the
column.
Caution: When returning the electron gu~, be sure not to twist the
electron gun cable.
11. Re-evacuate the column by pushing the !PUMP DOWN I switch.
12. Wait for the lMAGNIFICATIONI indicator to display a reading, then turn
!oNI the accelerating voltage by pressing the !ACCELERATING VOLTAGE!
button and carry out axis alignment (for details, see Sect. 3.6).

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5.2 Removing the condenser lens aperture

1. Admit air into the column by pushing the IVENTI switch.
2. Press the IpOWERlloFFI button.
3. After first removing the electron gun, unscrew the anode with the pole-
piece removing tool (see Fig. 5.5) and carefully remove the pole piece
assembly by lifting it straight up.
Cautions: 1. Be sure not to drop the pole pieces or to bump them
against adjacent parts.
2 . Cover the column with aluminum foil to prevent dust
entering therein.
4. Remove the anode fixing screws (3 pes.) (Fig. 5.6).
5. Detach the spacer [1J from the pole piece [IJ by turning the spacer
counterclockwise and remove the aperture holder [IJ with the pole-piece
assemb ling tool.
Caution: Do not attempt to remove the aperture holder, etc. while the
pole piece is still hot; otherwise the threaded portion of the
holder may be damaged.
6. Unscrew the aperture fixing screw [IJ with the pole-piece assembling
tool and remove the aperture [l] from the aperture holder [IJ.
7. Remove aperture [IJ as per aperture [}] removal.
8. Clean apertures [IJ and [I] in accordance with cleaning method C (Sect.
6.2.3) or if uncleanable, replace with new ones.
9. Reassemble the pole piece, aperture holders, etc. by following the
above steps in reverse order.
10 . Replace the condenser lens pole-piece assembly, anode, and electron gun
and re-evacuate the column.
Caution: Since the pole pieces and parts made of iron easily oxidize,
do not leave them exposed to the atmosphere for longer than
necessary.
Notes: 1. Aperture m
is held in aperture holder CD
by aperture fix-
ing screw [IJ .
2. Aperture
fixing screw [lJ.
rn
is held in aperture holder rn
by aperture

Fig. 5.5 Removing the condenser lens pole-piece assembly

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3 . Apertures 0
and ~ ,aperture holders []and ~and
aperture fixing screws Q] and [II are identical and
therefore interchangeable. However, be sure when assembling
the apertures that they are orientated ' correctly (see Fig. 5.
6) •
4 . Although spacer [II and pole pieces I]] and [] can be used
upside-down, IT IS RECOMMENDED to reassemble them as they
were before disassembly .

Pole piece m '~::::YJ _ _ -ea0

......"
a-rings
---""""-==0
Pole piece [l]

Though the top and bottom are

identical in shape, be sure
Spacer [IJ to reassemble as it was before
disassemb ly .

Pole piece

Pole piece [1J a-rings

Aperture fiXi~~e~~~;: ~ --------~~__~__. . . . .~~,~

., ~. 00': ~;: ~
Aperture holder III ----0
Fig . 5.6 Disassembling the condenser lens pole-piece assembly

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5. 3 Removing the objective lens aperture*

1. Admit air into the column by pushing the : IVENTI switch.
2 0 Remove the specimen stage. ,
3. Remove the objective lens aperture holder with' 't he aperture holder
removing tool (see Fig . 5 . 7) .
4 . Cover the aper t ure holder cap with aluminum foil and remove the cap by
turning it counterclockwise . Then remove the aperture and spacer (Fig .
5. ® .
Notes : 1 . If it proves difficult to remove the cap by hand, use tweezers
(see Fig. 5 . 8) .
2 . If it proves difficult to remove the aperture from the holder,
push the underside of the aperture with a toothpick or the
like .
Caution : Be careful not to scratch, nick, bend or lose the aperture and
spacer .
5. Clean the aperture in accordance with cleaning method C (see Sect.
6 . 2 . 3).
6. Check that there are no traces of polish, lint, etc. on the cap, spacer
and aperture holder . :
7. Carefully insert the aperture and spacer into the aperture holder using
tweezers and secure th~ with the cap.
Cautions : 1 . Do not handle the cleaned cap, spacer, aperture, etc. with
bare liands .
2. Clean the tweezers, aperture holder removing tool, etc.
with solvent before using them.
8. Return the aperture holder to the objective lens pole piece (Fig. 5.7,) .
9. Return the specimen stage to the specimen chamber and evacuate the column .

Specimen chamber

Fig . 5. 7 Removing the objective lens aperture

* Objective lens aperture diameter is 300 ~m .
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Aluminum foil------)

If it proves difficult to
remove the cap by hand,
use tweezers.
@- Cap

®-- Spacer
®-- Aperture (0 .D.: 2 nun)

Aperture holder

Aperture holder removing tool

Fig. 5.8 Exploded view of the objective lens aperture assembly

and means for removing it

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5. 4 Disassembling the beam deflector

When removing the beam deflector , take care not to knock the deflector
against the adjacent parts and not to break the deflector lead wir~s .
1. Screw screws (M4 x 25 , 2 pes.) into the threaded holes on the beam
deflector flange and using the screws as handles, lift the deflector
straight up .
2 . Remove the coil spring , the screw (pipe holder) securing the metal pipe, .
and the metal pipe itself (Fig . 5 . 9) .
3 . If the electrode is dirty , remove it and clean .
Caution: When reassembling the beam deflector , screw in the pipe holder
firmly so as to be sure of properly grounding the metal pipe
(Fig ~ 5 . 9) . If the pipe is not properly grounded, dark spots
may appear.

Coil spring

Pipe hOlder ~

Screw (M4 x 25) used as the handle for

lifting the beam deflector . ,Metal

Lead wires

Beam deflector coils Stigma tor coils

(scanning coils)

These lead wires are very thin ; .~ "''S;~?;~--:::.d

"" O-ring
take care not to break them . I
Teflon shee t J'F
~Electrode
Fig . 5. 9 Exploded view of the beam deflector

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5.5 Replacing the scintillator
The scintillator will require replacing when the image becomes noisy
(i.e., when thelCHECKERlmeter reads 0.32 or over at an optimum exposure with
thelCHECKERllpoSITIONI selector at 21), or when the aluminum foil has peeled
off. To replace the scintillator, proceed as follows:
1. Turn IOFFI the accelerating voltage by pressing the r-'=~~====
VOLTAGE I button and vent the column by pushing the switch.
2. Unscrew the detector securing screws (4 pcs.) and remove the detector
(Fig. 5.10).
3. Remove lead wire A from the collector by loosening off screw A. then
unscrew screws B (2 pcs.) and remove the shield pipe (Fig. 5.11).
4. Remove the corona ring and scintillator from the light pipe by loosening
off screws C (2 pcs.).

Fig. 5.10 Removing the detector

5. Apply a thin coat of silicone oil to the exposed end of the light pipe.
Caution: When cleaning the light pipe, use gauze lightly soaked in
alcohol. Do not use solvents other than alcohol because the
light pipe is extremely sensitive to nonalcoholic solvents.
6. Mount a new scintillator on the exposed end of the light pipe (excercis-
ing great care not to damage the scintillator), then attach the corona
ring and secure it with screws C.
Caution: Do not scratch or permit dust to settle on the scintillator or
light pipe. NEVER touch the surface of the scintillator.
7. Replace the collector and s e cure it with screws B.
8. Replace the detector and secure it with the four screws as provided.
9. Push the IpUMP DOWN I switch to re-evacuate the column.

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PMT cover

Flange
a-ring

Lead wire A .
Do not remove { a-ring
these parts. Light pipe
A
Lead wire B

Scintillator
Screw C

Collector

Fig. 5.11 Disassembling the detector

3 mm hexagonal key wrench

Fi g .5. 12 Detector and P~1T

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5.6 Replacing the oil diffusion pump heater

",
1. Turn off the power switch (Le . , push ther-Ip-O--WE-R""'I IOFFI button) and the
mains power switch on the distribution board .
2 . Remove the rear panel by loosening off the panel fixing screws (6 pes.) .
3 . Allow the heater assembly to cool down .
4 . Unscrew the heater assembly holding nut CD ~nd ~remove the h~ater
assembly (comprising cover ~ , adapter (j), heater ®, lead wires (j)
and socket ®).
5 . Remove heater ® from cover ~. •
6. Unscrew nuts (J), disconnect the lead wires from the heater and remove
the heater.
7 . Attach a new heater.
8 . Reassemble the heater assembly parts •

.....

(f) ® Q) 9).
, t"
"

<D ..Heater assembly holding nut

,~

~ Cove,r
Q) Adap't ·e.r ~
-;'"
..•.
® Heater
G) Lead w'ires ..
® Socket
'-.
Q) Nuts "

Fig . 5.13 . Diffusion pump he~ter assembly

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5.7 Oil rotary pump maintenance

Check the pump oil l evel from time to time and replenish as necessary.
caution: Prior to removing the rear panel , be sure to turn off the mains
power switch on the distribution board.
Notes: 1. If the oil level has fallen below the (.J mark on the oil level
indicator, replenish is necessary. To replenish , use the pump
exhaust po rt.
2. Only use the grade and type of oil as specified. If in doubt,
contact your nearest JEOL Service Center.

Exhaust port Oil level indicator

Rotary

Motor

Fig u 5.14

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5.8 Fuse replacement

1. Turn off the mains power switch on the distribution board .
2. Remove the rear panel by loo s ening off the panel fixing screws (6 pcs.).
3. Check for blown fuses and replace as ne cessary.
Note: The repl aceme nt fus e /fuses sho uld be the same t ype and have the
same rating as th e blown fuse/fuses.

Fuse No. Related cct. Rating (JIS)

FIA Not use d

FIB Service outle t 3 A, glass tube (MF03NM-3A)
FIC Tl transformer 8 A, glass tub e (MF03NM-8A)
F2A T2 transformer 2 A, glass tube (MF03NM-2A)
F2B Oil diffusion pump 8 A, glass tube (MF03NM-8A)
F2C Vacuum system 20 A, glass tube (MF03NM-20A)
F3A Master power supply 30 A, enclosed (CF2-30A)
F3C Master power supply 30 A, enclosed (CF2-30A)

FlA, FIB, FlC, F2A, F2B, F2C, F3A, F3B (from left to right)

Fig. 5.15 Location of fuses

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 6-1

CHAPTER 6 t~AINTENANCE lIT (Column Disassembly, Reassembly and Cleaning)

6. 1 Column

When disassembling or reassembling the column, be sure to observe the

precautions described in Chap. 4. Moreover, avoid unnecessary disassembly
(avoid removing parts not related to the disassembly procedure or parts
which do not require cleaning, as this not only complicates reassembly but
also leads to the possibility of such parts being damaged).
Use saran film or aluminum foil to cover exposed portions of the column
not requiring disassembly.

6.1.1 Disassembly and reassembly

1. Turn off the mains power supply switch on the distribution board and
wait at least 30 minutes for the instrument to cool down.
2. Remove the alignment screws and remove the electron gun from the
condenser lens by lifting the gun straight up.
Caution: When handling internal parts which are exposed to vacuum, be
sure to wear clean, thin gloves. However, exercise care so
that traces of lint, etc. from the gloves do not remain in the
column as this is a cause of image deterioration.
3. Remove and disassemble the condenser lens pole pieces, and remove the
apertures (see Sect.5.2).
4. Remove the evacuation pipe and column magnetic shield.
5. Loosen off the four condenser lens holding screws and remove the
condenser lens by lifting it straight up.
Caution: When lifting the condenser lens, be careful as i t is very
heavy.
6. Remove the metal pipe from the beam deflector (see Sect. 5.4).
Caution: Take care not to drop the metal pipe.
7. Remove the beam deflector from the objective lens (see Sect. 5.4) and
remove the electrode.
8. Clean the parts specified in Table under Sect. 6.2.2 and then reassem-
ble them.
Note: When reassembling the specified parts, observe the following
precautions.
• Dust removal
As each component part is being reassembled, use a hand blower to
remove any traces of dust or lint which may have readhered to the
part. Also, if the reassembly operation is temporarily suspended
prior to completion, be sure to cover the exposed parts with saran
film or aluminum foil to prevent contamination. If these precautions
are neglected, the entire cleanup procedure will have been to no
avail. In some cases, high voltage discharge or image quality
deterioration may occur.
• a-ring and mating surface check
Inspect the a-rings and their mating surfaces for scratches, lint,
etc.

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When applying vacuum grease, apply it sparingly so as to avoid column

and/or specimen contamination.
In the case of mating surface scratches, if these scracthes are
extremely shallow, no treatment is necessary. If necessary, rub the
surface with emery paper (tangentially with respect to the groove) .
If the scratches are deep, contact your nearest JEOL Service Center
for assistance. If these precautions are not observed, it may be
impossible to attain a good vacuum.
9 . Re-evacuate the column.

6.2 Cleaning
6.2.1 Cleaning materials, tools, etc .
• Cleaning liquid (organic solvent such as trichloroethylene and alcohol)
The cleaning liquid should be of high cleaning quality, high purity,
preferably non-inflammable and volatile, and should have a high safety
factor.
Ensure adequate ventilation when using the cleaning liquid and do not
allow prolonged contact with the skin.
• Fine grain metal polish
The polish should be paste-like and easy to remove with organic solvent.
It is used for removing persistent contamination.
• Gauze or rayon paper (crepe or gauze type)
Should be of high quality and not release impurities when moistened with
organic solvent.
• Absorbent cotton
Should be of high quality.
• Toothpicks, cotton swabs (about 5 mm dia.) or cotton buds.
• Brushes
Saran fiber brushes or brushes whose bristles are unaffected by organic
solvent.
• Tweezers (supplied as accessory)
Used to handle small parts. When using the tweezers, take care not to
scratch or bend the parts •
• Screwdrivers and standard tools (supplied as accessory)
• Beaker
This should be made of stainless steel or aluminum, or enamel-coated.
Glass beakers are not recommended as they are easily broken.
• Work gloves
Any commercially available cotton, nylon, or polyethylene gloves are
suitable. Work gloves should always be worn when handling internal
parts exposed to ,vacuum.
• Ultrasonic cleaner
• Mini-drill

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6.2.2 Cleaning frequency and procedures

Under normal circumstances, the cleaning frequency listed in the Table
below should be sufficient to keep the instrument in a reasonably
contamination-free condition at all times . If, however, contaminated parts
are noted, clean such parts irrespective of the cleaning frequency listed
in the Table .

Parts Cleaning frequency Cleaning method

Wehnelt cap When replacing the B

filament
Anode Every 12 months B
Condenser lens Every 6 months C
aperture
Pole piece Every 12 months A
Objective lens Every 6 months C
aperture
Objective lens
aperture holder, Every 6 months B
cap, and spacer
Metal pipe Every 24 months B

For details on the cleaning . method, see Sect. 6 . 2.3.

6. 2.3 Cleaning methods

o Cleaning method A
Application: Cleaning of lightly contaminated parts
For flat surfaces, wipe with gauze, rayon paper or absorbent cotton
soaked in cleaning liquid . In the case of parts which scratch easily,
use absorbent cotton only. For holes, the interior of cylindrical
parts, etc., use cotton swabs or toothpicks wrapped in absorbent
cotton . To remove oil, etc . from intricate or threaded parts, immerse
the parts in a beaker of solvent, or brush off the oil. If the parts
are easily scratched, avoid using a brush. An ultrasonic cleaner is
highly effective for cleaning small parts. After removing the parts
from the beaker, dry them with a hand blower so as to prevent residue
from accumulating.
When cleaning the pole piece, be extremely careful not to deform or
scratch the edge of the bore . Never use a brush except for threaded
.parts .
• Cleaning method B
Application: Cleaning of heavily contaminated parts (Wehnelt cap, anode,
objective lens aperture holder, metal pipes, etc.)

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For flat surfaces, wipe with gauze, rayon paper or absorbent cotton
lightly smeared with fine grain metal polish. For holes, the interior
of cylindrical parts, etc., use cotton swabs or toothpicks wrapped in
absorbent cotton. Avoid applying polish to intricate, threaded, or
synthetic resin parts. Also, when cleaning the parts, refrain from
applying excessive rubbing force.
Visual inspection is sufficient for determining the adequacy of
contamination removal. Remove any traces of polish with solvent. If
polish is allowed to remain, it will in itself become a contaminant,
completely defeating the object of the task in hand. Finally, keep
the cleaned parts covered until ready for reassembly.
• Cleaning method C
Application: Apertures (tantalum or molybdenum apertures, etc.)
Place the apertures in a vacuum evaporator employing a tungsten wire
(0.5 - 0.8 mm dia.) basket heater, helical heater or high-melting
point thin metal foil boat that has been cleaned by preheating under
high vacuum, and subject the apertures to a temperature of about
l500°C (white heat) for about 15 minutes. Avoid excessive heating as
this may cause the apertures to melt. At the same time, insufficient
heating will not provide adequate removal of the contamination. After
heating, allow the apertures in the evaporator to cool down to room
temperature before exposing them to the atmosphere (it takes about one
hour). This is to prevent oxidation. When handling the apertures,
take care not to nick or bend them.

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E.XPloded view of column
Electron gtm High tension cable

Condense:r. lens
pole piece
Wehnelt cap
grG40
(f) M 3 x 4
)
! -"',J (2
pcs.)
Column cylinder C>-G40

Magnetic shield
I pipe

Condenser

~-- O~jective

~ lens <!:>-G40
Objective lens • I

pcs. )

Cover

Eucentric
stage

~,~
~~O
.

\~f:so
.
\ M 4x12
(4 pcs.)
Specimen chamber
Base plate

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 A-I
APPENDICES

A.l Specimen preparation

Unfortunately, there is no one universally applicable specimen
preparation technique, since the preparation method varies according to the
type and nature of the specimen being examined.
The following, however, lists certain basic requirements, etc. common
to all specimens. For specific details regarding the various preparation
techniques, refer to the bibliographies given in books dealing with the
subject of scanning electron microscopy.
• Common basic requirements for all specimens
1 . The specimen must be shaped so as to fit the specimen holder and must
be secured firmly in the specimen holder.
2. The specimen must be conductive. Therefore, non-conductive specimens
require to be coated with a conductive agent. •
3. Since the specimen is examined in vacuo and is subject to electron
beam bombardment, the specimen must be treated before being introduced
into the microscope. Otherwise, satisfactory micrographs cannot be
ontained. Moreover, the microscope will be contaminated by the speci-
men itself or gases evolving from the specimen.
Note: The following specimens must be handled with great care:
Volatile specimens
Radioactive specimens
Wet specimens; that is, thick plant leaves, bulky soft
animal tissues, etc.
Fine particles
Magnetic materials
Porous specimens (especially gas-absorbed specimens).
• Securing the specimen
Use conductive paint to secure the specimen to the specimen stub.
Note: In addition to conductive paint, double-faced adhesive tape, vacuum
compound, me thyl cellulose solution, manicuring solution and
various other adhesives can also be used for securing the specimen
to the stub.

• Specimen coating
In the case of non-conductive specimens, coat the specimens by vacuum
evaporation or sputtering in order to avoid any buildup of surface charge
and reduce damage by thermal effects of the electron beam and further to
improve the secondary electron yield ratio.
• Vacuum evaporation
Coating materials: Carbon (continuous; not in aggregate form; uniform;
highly adhesive),
Gold (non-oxidization; extremely fine particles;
low melting point; high secondary electron
emission),
Platinum-palladium alloy, aluminum, etc.
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 A-2

Coating thickness: 100 - 200 A.

The double coating method (e . g., one thin coat ~f carbon topped by
one coating of gold) is widely used for various specimens.
• Sputtering
Materials: Gold, platinum-palladium alloy, chromium, silver,
copper, etc.

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A.2 Standard tools and accessories

Name App e arance Quantity

Container 1

Screwdriver, 1 set
Phillips-headed (3 pes.)

Screwdriver, 1 set
watchmaker's (6 keys)

Hexagonal key
wrench LLLLll 1 set
(6 pes.)

Tweezers 1 set (2)

Pole-piece 1
removing tool

Pole-piece 1
assembling tool

Wehnelt cap
removing tool 1

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Name Appearance Quantity

Hand blower 1

Objective aperture 1 set

Magnifying lens 1

Gun filament 1 case

(6 pcs.)

Fuse 1 set
(9 pcs.)

Lamp 1

. ,,' .
Specimen stub . - .,..J- r- 1-, t- .

......- ......
. . . ~ ~-,. t,. ",. +-;.f- ,~' 20
(10 dia.
~
x 5 thick rom)

Specimen stub r - t' ~' 1" ::- 1

.~.;.;'~,~
20
(10 dia.
x 10 thick rom)

Vacuum grease
Q 1 vial
(5 g)

Conductive paint 1 vial

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Name Appearance Quantity

Fine grain 1 vial

metal polish (10 g)

Fixed aperture holder 1

removing tool

Tef l on sheet (Be am

1
def l ec tor coi l spacer)

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