(I) MANUALE DI ISTRUZIONI

(D) BEDIENUNGSHANDBUCH

(F) NOTICE DE MODE D’EMPLOI

Turbo-V70 (E) MANUAL DE INSTRUCCIONES

pumps (P) MANUAL DE INSTRUÇÕES

(NL) BEDRIJFSHANDLEIDING

(DK) INSTRUKSTIONSBOG

(S) BRUKSANVISNING

(N) INSTRUKSJON MANUAL

969-9357 series (FIN) OHJEKÄSIKIRJA
969-9358 series (GR) ODHGIES CRHSEWS
969-9359 series (H) FELHASZNÁLÓI KÉZIKÖNYV
969-9360 series (PL) PODRECZNIK INSTRUKCJI

(CZ) NÁVOD K POUŽITÍ

(SK) NÁVOD NA OBSLUHU

(SLO) PRIROČNIK ZA NAVODILA

(GB) INSTRUCTION MANUAL

87-900-860-01(G)
JULY 2006
Turbo-V 70
ISTRUZIONI PER L’USO ...................................................................................................................................1
GEBRAUCHSANLEITUNG ................................................................................................................................4
MODE D’EMPLOI ...............................................................................................................................................7
INSTRUCCIONES DE USO .............................................................................................................................10
INSTRUÇÕES PARA O USO...........................................................................................................................13
GEBRUIKSAANWIJZINGEN............................................................................................................................16
BRUGSANVISNING .........................................................................................................................................19
BRUKSANVISNING..........................................................................................................................................22
BRUKERVEILEDNING .....................................................................................................................................25
KÄYTTÖOHJEET .............................................................................................................................................28
PDHGIES CRHSEWS ...........................................................................................................................................31
HASZNÁLATI UTASÍTÁS .................................................................................................................................34
INSTRUKCJA UZYTKOWANIA........................................................................................................................37
PŘÍRUČKA K POUŽITÍ.....................................................................................................................................40
NÁVOD K POUŽITIU........................................................................................................................................43
NAVODILA ZA UPORABO...............................................................................................................................46
INSTRUCTIONS FOR USE..............................................................................................................................49
TECHNICAL INFORMATION ...........................................................................................................................52
DESCRIPTION OF THE TURBOPUMP ......................................................................................52
TECHNICAL SPECIFICATION ....................................................................................................53
INLET SCREEN INSTALLATION ................................................................................................55
HEATER BAND INSTALLATION.................................................................................................56
WATER COOLING KIT INSTALLATION .....................................................................................57
BASE FIXING KIT INSTALLATION .............................................................................................58
AIR COOLING KIT INSTALLATION ............................................................................................59
VENT VALVE INSTALLATION ....................................................................................................60
VENT DEVICE INSTALLATION ..................................................................................................60
VIBRATION ISOLATOR INSTALLATION....................................................................................61
TYPICAL LAYOUT DIAGRAM .....................................................................................................61
Connection A - HIGH VACUUM FLANGE.........................................................................62
Connection configurations .................................................................................................62
Connection B - FORE-VACUUM PUMP............................................................................63
Connection C - ELECTRICAL............................................................................................63
ACCESSORIES ...........................................................................................................................63
 TECHNICAL INFORMATION

DESCRIPTION OF THE TURBOPUMP The turbine is made of high-strength, light alumin-

The Turbo-V70 pump is available in four versions. ium alloy, and is machined from a single block of
The difference between the two versions lies aluminium. The turbine blades have five different
purely in the high vacuum connection. The four angles, from 42° to 12°.
versions are:
The turbine rotor is supported by permanently lu-
− Model 969-9357 with ISO 63 high vacuum bricated high precision ceramic ball bearings in-
flange stalled on the forevacuum side of the pump.

− Model 969-9358 with ConFlat 4.5” external di- The static blades of the stator are fabricated in
ameter high vacuum flange stainless steel. These are supported and accu-
rately positioned by spacer rings.
− Model 969-9359 with KF 40 NW high vacuum
flange During normal operation, the motor functions with
a power feed at 54 Vac three-phase at 1250 Hz.
− Model 969-9360 with ConFlat 2.75” external To reduce losses during start-up to a minimum,
diameter high vacuum flange the frequency increases according to a ramp with
a higher initial voltage/frequency ratio.

The external body of the pump is fitted with fins

which allow the pump itself to function with natural
convection air cooling. Kits are available for water
cooling or forced air cooling to cool the pump in
the cases where it is used under heavy load or
when natural convection is insufficient for cooling
purposes.

A thermistor sensor is mounted near the upper

bearing to prevent the pump from overheating.

The thermistor sensor, the motor stator windings

and the earth are connected to a Turbo-V control-
Model 969-9357 Model 969-9358 ler through a 6 pin socket on the side of the pump.

The pump is balanced after assembly with a resid-

ual vibration amplitude less than 0.01 μm.

The pump can operate in any position and can be

supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 16 NW flange.

Model 969-9359 Model 969-9360

The Turbo-V70 pump consists of a high frequency

motor driving a turbine fitted with 11 bladed
stages. The turbine rotates in an anticlockwise di-
rection when viewed from the high vacuum flange
end.

52 87-900-860-01(G)
 TECHNICAL INFORMATION

TECHNICAL SPECIFICATION

Pumping speed (l/s) With CF 4.5” or With CF 2.75” or Operating ambient + 5° C to + 35° C
ISO 63: KF 40 NW: temperature
N2: 68 l/s N2: 45 l/s
He: 60 l/s He: 50 l/s Coolant water flow: 10 l/h (0.05 GPM)
H2: 45 l/s H2: 41 l/s temperature: + 10° C to + 30° C
pressure: 2 to 4 bar (30 to 60 Psi)
7
Compression ratio N2: 5 x 10
He: 4 x 10
3 Bakeout 120° C at inlet flange max. (CF
H2: 4 x 10
2 temperature flange)
80° C at inlet flange max. (ISO
-9 -10
Base pressure* 1 x 10 mbar (8 x 10 Torr) flange)

Inlet flange CF 4.5" O.D. Vibration level < 0.01 μm at inlet flange
ISO63 (displacement)
CF 2.75" O.D.
KF 40 NW Noise level 45 dB (A) at 1 meter

Foreline flange KF 16 NW Input 54 Vac, three phase, 1250 Hz

Rotational speed 75000 RPM Lubricant permanent lubrication

Start-up time < 60 seconds Installation category II

Recommended mechanical: Varian DS102 Pollution degree 2

forepump
Storage temperature - 20° C to + 70° C
Operating position any
Weight kg (lbs) ISO: 1.6 (6)
Cooling Natural air convection CFF: 2.3 (4)
requirements Forced air or water optional
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.

53 87-900-860-01(G)
 TECHNICAL INFORMATION

Graph of nitrogen pumping speed against inlet pressure

Graph of compression ratio against foreline pressure

Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump

54 87-900-860-01(G)
 TECHNICAL INFORMATION

INLET SCREEN INSTALLATION The screen can be mounted on either pump series
and is supplied with a small tab for easy removal
(see figure).

The inlet screens mod. 969-9300 and 969-9309

prevent the blades of the pump from being dam-
aged by debris greater than 0.7 mm diameter.

The inlet screen, however, does reduce the pump-

ing speed by about 10%.

The inlet screen is fitted in the upper part of the

pump, as shown in the figure.

The following figure shows the overall flange di-

mensions with the protection screen fitted on
pump with ISO flange (on the left side) and pump
with 4.5” CFF flange (on the right side).

55 87-900-860-01(G)
 TECHNICAL INFORMATION

HEATER BAND INSTALLATION Switch on the heater while the turbopump is in op-
eration. If, for any reason, the turbopump body
overheats, it will be automatically cut out by the
thermistor sensor.

NOTE
The turbopump must be "baked" only when oper-
ating with an inlet pressure less than 10-4 mbar
and with water cooling.

 CAUTION
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 120° C.

The heater band model 969-9801 and 969-9802

can be used to heat the pump casing when a
bakeout is needed.

The heater band is applied to the upper part of the

pump envelope, as shown in the figure, and heats
it to a temperature of about 80° C.

The heater band must be mounted such that there

is perfect thermal contact with the pump wall to ob-
tain fast and efficient heating.

56 87-900-860-01(G)
 TECHNICAL INFORMATION

WATER COOLING KIT INSTALLATION

Two types of water cooling kits are available to be
mounted when the pump is used under heavy load
conditions or when air cooling is insufficient.

The two model part numbers are: 969-9337 (me-

tallic model), and 969-9347 (plastic model).

Two 6 mm (1/4") internal diameter rubber or plastic

hoses from the water supply must be fitted to the
two nozzles.
NOTE
Model 969-9337
These hoses must be held on the respective noz-
zles using hose clips to avoid that the tube do not
detach during operation.

The plastic model must be screwed into the suit-

able holes of the pump.
Cooling may be carried out either through an open
circuit with eventual discharge of the water, or us-
ing a closed circuit cooling system.
In both cases, the water temperature must be be-
tween +10°C and +30°C, with an inlet pressure
between 2 and 4 bar. This allows a flow of about
Model 969-9347 10 l/h.
NOTE
 CAUTION The water electrical conductance must be ≤ 500
μs/cm. When the conductance is higher, in closed
The items of the plastic model kit must be assem- water circuit, the use of up to 20% of Ethyl-Glycole
bled as shown in the following figure is suggested.
The overall dimensions with the water cooling kit
mounted are shown in the figure.

The assembled kit must be screwed into the suit-

able holes of the pump body with a recommended
closing torque of 5 Nm.

57 87-900-860-01(G)
 TECHNICAL INFORMATION

BASE FIXING KIT INSTALLATION Insert the three feed as shown in the figure, bear-
ing in mind that the position must be as indicated
in the figure.

The kit mod. 969-9326 enables the pump to be

fixed at the base.

Open the package containing the feet and respec-

tive screws.

Insert the three grub screws in the three feed from

the rear, as shown in the diagram, and screw them
in ensuring that they do not protrude from the
other end.
For the feet to the pump by tightening the previ-
ously inserted grub screws with the Allen key.
Use the Allen key supplied for this purpose.

Turn the pump upside down

 CAUTION
Before overturning the pump, remove the protec-
tion screen, if fitted.

Turn the pump the right way up. Fix the pump to a
base by using the three screws provided (M4
thread) in the holes in the three feet.

58 87-900-860-01(G)
 TECHNICAL INFORMATION

AIR COOLING KIT INSTALLATION

SIDE MOUNTING

A fan kit model 969-9310 is available for air cool-

ing the pump, when natural air convenction is in-
sufficient.

Fan specification:

− air flow: 9 l/s (10 CFM) The fan can also be mounted under the pump as
shown in the figure.
− input voltage: 24 Vdc

− maximum power:2.16 W

− dimensions: 60x60 mm (2.36x2.36 inches)

Open the package containing the feet and respec-

tive screws and install them as indicated in the in-
stallation of the base fixing kit. BOTTOM MOUNTING

Position the fan on the pump, ensuring that the

holes in the plate line up with those in the feet.

Insert the respective washers and screws and

tighten with a screwdriver.

Connect the fan to the controller.

59 87-900-860-01(G)
 TECHNICAL INFORMATION

VENT VALVE INSTALLATION

The vent valve mod. 969-9843 enables undesired

pump areation during a temporary power failure (5
sec maximum) to be avoided, and enables an
automatic vent operation.

Unscrew the threaded plug.

VENT DEVICE INSTALLATION

Screw the adapter (1) into the vent hole (2) of the
pump.
The vent device mod. 969-9831 allows to avoid
Fix the valve (3) to the adapter (1).
undesired pump aeration of the pump during a
temporary power failure (adjustable time up to 36
min.), and enables an automatic vent operation.

Unscrew and remove the threaded plug.

Tighten the valve using a 16 mm hexagonal span-

ner.

 CAUTION
Do not overtighten the valve as this may damage
the thread on the pump.

60 87-900-860-01(G)
 TECHNICAL INFORMATION

Screw the flange mod. 969-9109 on the pump, tak- TYPICAL LAYOUT DIAGRAM
ing care of the o-ring right position.

Assemble the seal ring and lock the vent device in

position using the KF klamp.

1. Turbo-V controller
2. Vent valve
VIBRATION ISOLATOR INSTALLATION 3. Vacuum pump shut-off valve (optional)
A vibration damper model 969-9340 for ISO 63
inlet flange version pump is available as accesso- 4. System vent valve (optional)
ries. 5. Vacuum chamber

It typically reduces the vibration transmitted from 6. Ionization gauge

the Turbo-V 70 pump to the system by a factor of 7. Fore-vacuum pump connecting flange
20.
8. Oil mist eliminator
Please refer to the relevant instruction manual. 9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump

61 87-900-860-01(G)
 TECHNICAL INFORMATION

Connection A - HIGH VACUUM FLANGE For ConFlat flange connections we recommend

To connect the Turbo-V70 pump to the ISO inlet using Varian hardware.
flange, remove the outer ring and position the cen-
tering ring as shown in the figure. To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange. Note that the 2.75” CF flange
has six blind holes.

Attach the units and tighten each one in turn. Re-

peat the sequential tightening until the flange faces
meet.

 CAUTION
Then fix the two flanges with the clamps or claws
Exercise care when tightening nuts and bolts to
as shown in the figure.
avoid creating dents in the envelope as this may
cause the pump rotor to lock.

Connection configurations

62 87-900-860-01(G)
 TECHNICAL INFORMATION

Connection B - FORE-VACUUM PUMP ACCESSORIES

A flange KF 16 NW is available to connect the DESCRIPTION PART NUMBER
Turbo-V 70 to the fore-vacuum pump. A hose or
vacuum approved pipe can be used. If a rigid pipe Inlet screen DN40 969-9309
is used, any vibration generated by the mechanical Inlet screen DN63 969-9300
pump must be eliminated through the use of bel-
Heather band, 120 V 969-9802
lows.
Heather band, 220 V 969-9801

Water cooling kit 969-9337

NOTE
The Turbo-V 70 is characterized by its high com- Plastic water cooling kit 969-9347
pression ratio also for oil vapors. When using a Air cooling kit 969-9310
mechanical oil-sealed pump, it is advisable to in-
Vibration damper, DN 63 ISO 969-9340
stall a suitable trap between the turbopump and
the fore-vacuum pump in order to prevent oil back- Vent flange NW 10 KF 969-9109
streaming. Vent valve with fixed delay time 969-9843

Vent valve with adjustable delay time 969-9831

Connection C - ELECTRICAL
Mechanical forepump Varian DS102 949-9315

Base fixing kit 969-9326

For a complete overview of Varian's extensive

product lines, please refer to the Varian catalog.

The turbopump is connected to the controller

through an 6-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the temperature sensor (NTC type,
30 KΩ resistance at 25° C) and pin E is connected
to the pump ground.

If the temperature sensor is disconnected, the

pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.

63 87-900-860-01(G)
 Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the Safety of workers at Varian: (a) Drain any oils or
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
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 Request for Return

FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start Noise Vertical Power: Rotational Speed:
Does not spin freely Vibrations Horizontal Current: Inlet Pressure:
Does not reach full speed Leak Upside-down Temp 1: Foreline Pressure:
Mechanical Contact Overtemperature Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

Bad feedthrough Poor vacuum Main seal leak Bellows leak
Vacuum leak High voltage problem Solenoid failure Damaged flange
Error code on display Other Damaged sealing area Other
Customer application: Customer application:

LEAK DETECTORS INSTRUMENTS

Cannot calibrate No zero/high backround Gauge tube not working Display problem
Vacuum system unstable Cannot reach test mode Communication failure Degas not working
Failed to start Other Error code on display Other
Customer application: Customer application:

PRIMARY PUMPS DIFFUSION PUMPS

Pump doesn’t start Noisy pump (describe) Heater failure Electrical problem
Doesn’t reach vacuum Over temperature Doesn’t reach vacuum Cooling coil damage
Pump seized Other Vacuum leak Other
Customer application: Customer application:

FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.

REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
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03/06