Cmos and Scintillator
Cmos and Scintillator
1. Introduction acceptable levels of image quality [3,11]. Some of the weakest points
of CMOS sensors are the limited radiation hardness and the size of the
In recent years, wafer scale Complementary Metal Oxide Semi- single imager tile [6]. However, stitching and tiling methods can be
conductor (CMOS) active pixel sensors (APSs) based X-ray imagers applied to create sensors with areas sufficiently large to be suitable for
have been widely used in bio-medical applications and beyond [1–8]. medical X-ray imaging applications [3,12].
These sensors have emerged as an alternative to amorphous silicon or This paper reports on X-ray characterisation studies performed on
selenium flat panel imagers (FPIs) and charge-coupled devices (CCDs) CMOS based indirect conversion detectors manufactured at ISDI [13],
[2,3]. a CMOS image sensor manufacturer based in London. The studied
The main advantages of CMOS sensors are low read noise detectors were mainly aimed at dental, Non Destructive Testing (NDT),
(60–150e− ), high frame rate, high spatial resolution, low power con- Industrial CT, and fluoroscopy applications. In particular, we studied
sumption, and low-cost mass production capability [2–4,6,7,9]. Their the effects that certain changes in configuration have on the overall
competitors such as amorphous Si suffer from higher read noise X-ray performance of the detector, namely (i) using a fibre optic plate
(>1000e− ), lower frame rate and reduced spatial resolution due to a (FOP) versus not using it, (ii) having different substrate coatings for the
typically larger pixel pitch [2,10], whereas CCDs have high production scintillators, (iii) using sensors with different pixel pitches, and finally
cost and are physically small (e.g., 2–4 cm 2 ), hence demagnification (iv) using scintillators of different thicknesses.
is needed to access larger fields of view. Nevertheless, the demagnifi- The performance evaluation was based on the extraction of X-ray
cation raises the possibility of a secondary quantum sink to maintain characterisation metrics such as sensitivity, presampling modulation
∗ Corresponding author.
E-mail address: [email protected] (R.P. Alikunju).
https://doi.org/10.1016/j.nima.2023.168136
Received 12 December 2022; Received in revised form 10 February 2023; Accepted 10 February 2023
Available online 13 February 2023
0168-9002/© 2023 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license
(http://creativecommons.org/licenses/by/4.0/).
R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 1. (a) pMTF comparison for the FOP and no FOP cases. (b) STP curves of the sensors with displayed fitting equations for the FOP and no FOP cases.
Fig. 2. 1D NNPS at different values of 𝐾a for a sensor without (a) and with (b) an FOP. (c) comparison between the FOP and no FOP cases at similar Air Kerma value.
3. Results and discussions protects the sensors by blocking the X-rays from reaching its surface,
thereby preventing radiation damage, as well as from direct X-ray
The pMTF, STP, NPS and DQE evaluation as per the methodology photon interaction, which would increase noise.
described in Section 2 was performed on a series of X-ray detector Fig. 1(b) shows the STP curves for the detector with and without
configurations while varying a specific parameter each time (specified FOP. The Air Kerma ranges from 0.59 μGy to 1.92 μGy for the no-
in the titles of the following sub-sections), to allow for a direct com- FOP case, and from 0.83 μGy to 2.64 μGy for FOP case. An increase in
parison and therefore for an assessment of its effect. The analysis was the mean signal is observed in the no FOP case when compared with
performed by using software written in MATLAB R2021a. the FOP case. This is primarily due to the loss of visible photons as
they travel through the FOP. Both sensitivity curves are linear, with
3.1. X-ray detectors with and without FOP coefficients of determination R2 of approximately 0.999.
Fig. 2(a), (b) show the NNPS curves for identical detectors using
Firstly, the pMTF of a 100 μm pixel pitch(pp) sensor with and the same scintillator with and without an FOP. The detector without
without an FOP was studied. A 600 μm CsI scintillator was used in FOP shows higher noise levels compared to detector with FOP for the
both cases. As can be seen from Fig. 1(a), the detector without the FOP same Air Kerma values; this can be better appreciated in the direct
shows a slightly higher pMTF than that with the FOP (with increases comparison at the same Air Kerma shown in Fig. 2(c), although with
of 3.2%, 6% and 12% at 1.5, 2 and 4 lp/mm, respectively). This is the caveat that the introduction of the FOP causes the detectors to
likely due to the additional interface (scintillator/FOP and FOP/sensor reach quantum limited behaviour at slightly different Air Kerma levels.
as opposed to scintillator/sensor only) which can lead to additional air The increased noise levels at high spatial frequencies could be caused,
gaps allowing more light to diffuse laterally. Uneven contacts between among other things, by direct X-ray interactions in the sensor material.
different surfaces would also contribute to air gaps. An additional Fig. 3(a) and (b) show DQE curves for X-ray detectors with and
factor could be visible photons hitting the walls of the fibre optics without FOP. The DQE (0.1) (i.e., DQE at 0.1 lp/mm) ranges from
in the FOPs at an angle smaller than the critical angle, thus possibly 0.57 to 0.68 (in the 0.59–1.92 μGy Air Kerma range) and from 0.60
penetrating sideways into the neighbouring ones. The FOP, however, to 0.67 (0.83–2.64 μGy Air Kerma range) without and with the FOP,
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 3. DQE at 70 kV (RQA5) for a sensor without (a) and with (b) an FOP. (c) comparison between the FOP and no FOP cases at similar Air Kerma value.
Fig. 4. (a) pMTF comparison for white and black coated scintillator substrates. (b) STP curves of the sensors with displayed fitting equations for white and black coated scintillator
substrates.
respectively. Fig. 3(c) shows the direct comparison between DQE curves Fig. 4(b) shows that, thanks to its reflection property, the scintillator
at a specific Air Kerma value for the sensors with and without the with the WCAl coating is more sensitive than the one using BCAl, with
FOP. Overall, the sensor with the FOP has a better DQE performance the former providing an approximately 71% increase in light output
compared to that without it, which is explained by its better noise compared to the latter at the same Air Kerma of 2.16 μGy.
performance, especially at mid and higher frequencies. The NNPS curves for the different substrate coatings are shown in
Fig. 5(a) and (b), and an NNPS comparison at the same Air Kerma is
3.2. X-ray detectors using scintillators with different substrate coatings provided in Fig. 5(c). The direct comparison at the same Air Kerma
of 2.16 μGy shows that the detector with black coated scintillator
In this case, sensor 1 (with a 2 mm FOP) was coupled to 784 μm CsI substrate has a higher noise compared to that with the white coated
scintillators with different substrate coatings. Two substrate coatings substrate.
were used: 0.5 mm white coated aluminium (WCAl), which primarily Fig. 6(a) and (b) shows the DQE curves corresponding to white and
reflects the backward-transmitted scintillation light that hits it, and black substrate coating, with the comparison at the same Air Kerma
0.3 mm black coated aluminium (BCAl), which largely absorbs it. Re- shown in Fig. 6(c). The DQE (0.1) ranges from 0.62 to 0.73 (0.43–
flective coatings, such as the WCAl, maximise the amount of light at the 3.02 μGy Air Kerma range) and from 0.55 to 0.68 (2.16–8.63 μGy Air
sensors by reducing losses of optical signal from the scintillator [21]. Kerma range) with white and black substrate coatings, respectively. The
Since the increased light collection of the WCAl arises from increased direct comparison shows that the DQE is higher for the white coated
internal reflection, this is also accompanied by a larger spread of substrate scintillator, due to the reduced noise levels compared to the
the scintillation light created by individual X-ray photons, and indeed black coated substrate scintillator.
Fig. 4(a) shows a decreased pMTF for the WCAl compared to the BCAl A difference in DQE (0.1) in the two cases can be observed in
case. At 1 lp/mm, the pMTF of WCAl and BCAl are 41.8% and 52.2% Fig. 6(c). It should be noted that the X-ray exposure at which the two
respectively. curves are compared is below the quantum limited regime; at that
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 5. 1D NNPS at different values of 𝐾a for (a) white-coated substrate scintillator (b) black-coated substrate scintillator (c) comparison between NNPS values for white and
black-coated scintillator substrates at similar Air Kerma value.
Fig. 6. DQE at 70 kV (RQA5) for (a) white coated Al substrate (b) black coated Al substrate. (c) comparison between white and black coated substrates at a similar Air Kerma
value.
exposure, the use of the white coated scintillator results in more visible demonstrate that, when a scintillator thickness sufficiently larger than
photons reaching the sensor, effectively corresponding to a ‘‘higher the pixel size is employed, the pMTF is not affected by the latter.
X-ray exposure’’ case for the black coated scintillator as far as the Fig. 7(b) shows the STP curves for the two sensors. The Air Kerma
underlying sensor is concerned. ranges between 0.43 and 3.02 μGy for the 50 μm pixel detector, and
between 0.43 and 1.08 μGy for 100 μm pixel one. When comparing
3.3. X-ray detectors with different pixel pitch and same scintillator mean signal values at the identical Air Kerma of 0.43 μGy, the 100 μm
pixel detector shows an approximately four times higher sensitivity
In this case, sensors 1 and 2 with a different pixel pitch of 50 μm compared to the 50 μm pixel one (6727 DN versus 1844 DN), as
and 100 μm, with the same FOP and the same scintillator (784 μm CsI expected due to the ratio between pixel areas. The small deviation is
with WCAl substrate) were compared. The results shown in Fig. 7(a) likely due to the different fill factor in the two cases.
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 7. (a) pMTF comparison for the 50 μm and 100 μm pp sensors. (b) STP curves with displayed fitting equations for the 50 μm and 100 μm pp sensor.
Fig. 8. 1D NNPS at different values of Ka for (a) 50 μm pp sensor and (b) 100 μm pp sensor (c) comparison between the NNPS of the 50 μm and 100 μm pp sensors for similar
Air Kerma values.
Fig. 8(a) and (b) shows the NNPS curves for the two pixel sizes. to the correspondingly increased lateral spread of visible light. At 1
Fig. 8(c) shows a direct NNPS comparison for the two sensors at similar lp/mm, pMTF values were 68.6%, 57.7% and 49.2% for the 250 μm,
Air Kerma values, showing a better performance for the 100 μm pixel 290 μm and 800 μm scintillators, respectively.
sensor. Fig. 10(b) shows the STP curves of the detector for the same
Fig. 9(a) and (b) show the DQE as a function of spatial frequency sensor/scintillator combinations as in Fig. 10(a), highlighting the trade-
for the two sensors. The DQE (0.1) ranges from 0.62 to 0.73 (0.43– off between sensitivity and resolution as the scintillator thickness in-
3.02 μGy Air Kerma range) and from 0.76 to 0.86 (0.43–1.01 μGy Air creases. The graph clearly shows that the mean signal increases with the
Kerma range) for the 50 μm and 100 μm pixel pitch sensors, respectively. thickness of the scintillator at the same Air Kerma, in correspondence to
Fig. 9(c) shows that the DQE of the 100 μm pixel pitch sensor is higher its increased X-ray stopping power; for example, the 800 μm scintillator
than the 50 μm pixel pitch one, since the former has a better NNPS and provides the highest sensitivity but also the lowest pMTF values. While
approximately the same pMTF. in principle one would expect the STP values of the 290 μm scintillator
(provided by a different manufacturer) to be closer to the 250 μm than
3.4. X-ray detectors with different thickness scintillator the 800 μm one, this was not observed here, most likely because of the
290 μm scintillator using a white reflective scintillator coating, which
Finally, we studied CMOS Sensor 3 equipped with CsI scintillators was shown above (Fig. 4(b)) to result in a much higher amount of
of different thicknesses (250 μm, 290 μm and 800 μm) using the same visible photons reaching the sensor surface. Since this also causes more
FOP (3 mm thickness, N.A of 1.00 and includes EMA fibres) in all light dispersion, it also explains why the MTF of the 290 μm scintillator
the cases. The 250 μm one used a flexible substrate CsI scintillator is closer to that of the 800 μm rather than the 250 μm one.
whereas the 290 μm and 800 μm were supported on an Al substrate. Fig. 11(a), (b) and (c) show the average NNPS curves for the three
Importantly, unlike the other two, the 290 μm scintillator used a white scintillator thicknesses and how these different combinations result in
coated substrate. The pMTF results are shown in Fig. 10(a). The general the sensor reaching quantum-limited behaviour at different Air Kerma
trend is a decrease in pMTF as the scintillator thickness increases, due levels. A comparison of the NNPS curves for the three scintillators at
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 9. DQE at 70 kV (RQA5) for (a) 50 μm pp sensor (b) 100 μm pp sensor. (c) comparison between the DQE of the 50 μm and 100 μm pp sensors at similar Air Kerma values.
Fig. 10. (a) pMTF comparison for different scintillator thicknesses. (b) STP curves of the sensors with displayed fitting equations for the different scintillator thicknesses.
closest matching Air Kerma values is shown in Fig. 11(d), which shows when drawing conclusions of this type it should be borne in mind
that the highest and lowest noise levels are observed for the 250 μm and that the detectors obtained through coupling with different scintillators
800 μm scintillators, respectively. Two Air Kerma values are reported reach quantum-limited behaviour at different Air Kerma values. A
for the 800 μm thick scintillator which ‘‘bracket’’ those used in the thicker scintillator also leads to an improved blocking of direct X-ray
250 μm and 290 μm cases, since a closer match was not available. hits in the sensor, which can also contribute to reducing noise.
Fig. 12(a), (b) and (c) show the DQE curves for the sensor coupled
to the 250 μm, 290 μm and 800 μm thick CsI scintillators (respectively). 4. Conclusion
The DQE at 0.1 lp/mm ranges from 0.48 to 0.54 (1.09–4.37 μGy Air
Kerma range), 0.53 to 0.61 (0.84–2.66 μGy Air Kerma range) and 0.64 The X-ray characterisation studies presented were aimed at under-
to 0.80 (0.29–2.33 μGy Air Kerma range) for the 250 μm, 290 μm and standing the trade-offs in terms of resolution, sensitivity, noise perfor-
800 μm thick scintillators, respectively. The 800 μm scintillator shows mance and detection efficiency obtained by varying specific detector
the highest DQE at low frequency due to its higher X-ray stopping parameters such as FOP, scintillator substrate coatings, pixel pitch, and
power and therefore higher conversion efficiency. scintillator thickness. A direct comparison among the evaluated pMTF,
Fig. 12(d) shows the DQE comparison for the 3 different CsI scin- STP, NPS, and DQE showed that:
tillators at the most similar Air Kerma values that were available (with
two values – 2.04 μGy and 2.33 μGy – for the 800 μm thick scintillator (i) The sensor without FOP had greater pMTF and sensitivity but a
for the reasons mentioned above). The 800 μm thick scintillator shows lower DQE compared to the ‘with FOP’ case.
the highest DQE at all spatial frequency for both the 2.04 μGy and 2.33 (ii) For scintillator coatings, the BCAl substrate had better pMTF
μGy, indicating that its better noise performance due to higher detec- performance, but the WCAl substrate yielded better sensitivity,
tion efficiency overcomes the reduction in spatial resolution. Again, noise performance, and detection efficiency.
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Fig. 11. 1D NNPS at different values of 𝐾a for the 250 μm (a), 290 μm (b) and 800 μm (c) thick CsI scintillators. (d) comparison between NNPS of different scintillators for similar
Air Kerma values.
Fig. 12. DQE at 70 kV (RQA5) for the 250 μm (a), 290 μm (b) and 800 μm (c) CsI scintillators. (d) comparison between the DQE of different scintillators for similar Air Kerma
values.
(iii) Detectors with 50 μm and 100 μm pixel pitches and a thick Based on these characterisation studies, specific X-ray applications
(784 μm) scintillator showed identical pMTF, but the 100 μm can be matched with different detector combinations. For instance,
case demonstrated higher sensitivity, noise performance, and computed tomography (CT) and dental applications demand low Air
DQE. Kerma, hence detector configurations with high DQE values are pre-
(iv) In terms of scintillator thicknesses, the thinnest scintillator ferred. High-resolution detectors with greater pMTFs are preferred for
(250 μm) had the highest pMTF, whereas the thickest (800 μm) industrial X-ray applications. Thus, this study can help researchers
had the highest sensitivity, noise performance, and DQE when and practitioners choose a detector configuration based on the specific
compared to other thin scintillators (250 μm and 290 μm). demands of their application.
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R.P. Alikunju, S. Kearney, R. Moss et al. Nuclear Inst. and Methods in Physics Research, A 1050 (2023) 168136
Declaration of competing interest [7] M. Bigas, E. Cabruja, J. Forest, J. Salvi, Review of CMOS image sensors,
Microelectron. J. 37 (5) (2006) 433–451.
[8] M. Shakeri, M. Ariannejad, M. NasimaSedaghati, M. Mamun, S. Amin, Advanced
The authors declare that they have no known competing finan-
cmos based image sensors, Austr. J. Basic Appl. Sci. 6 (7) (2012) 62–72.
cial interests or personal relationships that could have appeared to [9] A. El Gamal, H. Eltoukhy, CMOS image sensors, IEEE Circuits Devices Mag. 21
influence the work reported in this paper. (3) (2005) 6–20.
[10] R.L. Weisfield, N.R. Bennett, Electronic noise analysis of a 127-um pixel
Data availability TFT/photodiode array, in: Medical Imaging 2001: Physics of Medical Imaging,
vol. 4320, SPIE, 2001, pp. 209–218.
[11] M.B. Williams, et al., Analysis of the detective quantum efficiency of a
Data will be made available on request. developmental detector for digital mammography, Med. Phys. 26 (1999)
2273–2285.
Acknowledgements [12] R. Reshef, T. Leitner, S. Alfassi, E. Sarig, N. Golan, O. Berman, A. Fenigstein, H.
Wolf, G. Hevel, S. Vilan, A. Lahav, Large-format medical X-ray CMOS image
This study is supported by EPSRC (EP/R513143/1 and sensor for high resolution high frame rate applications, in: Proc. Int. Image
Sensor Workshop, 2009, pp. 1–4.
EP/T005408/1), UK. AO is supported by the Royal Academy of En-
[13] ISDI - CMOS image sensor manufacturer, Available at: https://www.isdicmos.
gineering, UK under their Chair in Emerging Technologies scheme com/company. (Accessed 1 December 2022).
(CiET1819/2/78). The authors would like to thank Dr Anastasios Kon- [14] International Electrotechnical Commission Publication (IEC62220-1-1), Med-
stantinidis (Image Quality Specialist at Philips) for useful discussions. ical Electrical—Characteristics of Digital X-ray Imaging Devices—Part 1:
Determination of the Detective Quantum Efficiency, IEC, 2015.
[15] Samei Ehsan, Performance of digital radiographic detectors: quantification and
References
assessment methods, Adv. Digit. Radiogr.: RSNA 27710 (2003) 37–47.
[16] M.J. Flynn, S.M. Hames, S.J. Wilderman, J.J. Ciarelli, Quantum noise in digital
[1] B.K. Cha, C.R. Kim, S. Jeon, R.K. Kim, C.W. Seo, K. Yang, D. Heo, T.B. Lee, M.S. x-ray image detectors with optically coupled scintillators, IEEE Trans. Nucl. Sci.
Shin, J.B. Kim, O.K. Kwon, X-ray characterization of CMOS imaging detector 43 (4) (1996) 2320–2325.
with high resolution for fluoroscopic imaging application, Nucl. Instrum. Methods
[17] A.C. Konstantinidis, M.B. Szafraniec, L. Rigon, G. Tromba, D. Dreossi, N. Sodini,
Phys. Res. A 731 (2013) 315–319.
P.F. Liaparinos, S. Naday, S. Gunn, A. McArthur, R.D. Speller, A. Olivo, X-
[2] M. Esposito, T. Anaxagoras, A.C. Konstantinidis, Y. Zheng, R.D. Speller, P.M.
ray performance evaluation of the dexela CMOS APS x-ray detector using
Evans, N.M. Allinson, K. Wells, Performance of a novel wafer scale CMOS active
monochromatic synchrotron radiation in the mammographic energy range, IEEE
pixel sensor for bio-medical imaging, Phys. Med. Biol. 59 (13) (2014) 3533.
Trans. Nucl. Sci. 60 (5) (2013) 3969–3980.
[3] A.C. Konstantinidis, M.B. Szafraniec, R.D. Speller, A. Olivo, The Dexela 2923
[18] E. Buhr, S. Günther-Kohfahl, U. Neitzel, Accuracy of a simple method for deriving
CMOS X-ray detector: A flat panel detector based on CMOS active pixel sensors
the presampled modulation transfer function of a digital radiographic system
for medical imaging applications, Nucl. Instrum. Methods Phys. Res. A 689
from an edge image, Med. Phys. 30 (9) (2003) 2323–2331.
(2012) 12–21.
[19] A.C. Konstantinidis, A. Olivo, R.D. Speller, Modification of the standard gain
[4] A. Konstantinidis, Evaluation of Digital X-Ray Detectors for Medical Imaging
correction algorithm to compensate for the number of used reference flat frames
Applications (Doctoral dissertation), UCL (University College London), 2011.
in detector performance studies, Med. Phys. 38 (12) (2011) 6683–6687.
[5] C.D. Arvanitis, S.E. Bohndiek, G. Royle, A. Blue, H.X. Liang, A. Clark, M. Pryd-
derch, R. Turchetta, R. Speller, Empirical electro-optical and x-ray performance [20] C. Lawinski, Mackenzie.8 Alistair, Cole Helen, Blake Patricia, Honey Ian, Digital
evaluation of CMOS active pixels sensor for low dose, high resolution x-ray Detectors for General Radiography. A Comparative Technical Report, 2005.
medical imaging, Med. Phys. 34 (12) (2007) 4612–4625. [21] A. Tarancón, E. Marin, J. Tent, G. Rauret, J.F. Garcia, Evaluation of a reflective
[6] G. Zentai, R. Colbeth, Pros and cons of CMOS X-ray imagers, in: 2012 IEEE In- coating for an organic scintillation detector, Nucl. Instrum. Methods Phys. Res.
ternational Symposium on Medical Measurements and Applications Proceedings, A 674 (2012) 92–98.
IEEE, 2012, pp. 1–5.