Surface Coatings Technology
Surface Coatings Technology
A R T I C L E I N F O A B S T R A C T
Keywords: Cathodic cage plasma nitriding (CCPN) is an efficient technique to improve the surface properties of metallic and
Electron temperature non-metallic materials, including steels. Usually, CCPN is powered by pulsed voltage sources due to additional
Hardness control of the nitrided layer's thickness and composition as well as the discharge transition to the arc region can
Wear
be controlled by varying the pulsed duty cycle. As the behavior of pulsed plasma varies with time, it is important
ICCD
to monitor variation in plasma parameters by using time-resolved plasma diagnostics. Unfortunately, the
Corrosion
fundamental time-resolved diagnostics of such discharges are still very limited. Here, we report time-resolved
measurements of current, voltage, plasma emission, space, and time-resolved emission from a single hole in
the cathode as a function of pulsed duty cycle (15–75 %) at constant total current. The results show that the
electron temperature is higher if a higher peak current and the shortest 15 % pulsed duty cycle are used. The
results obtained from plasma diagnostics are confirmed by treatment of plain carbon steel samples in identical
conditions and found that the best hardness, wear, and corrosion resistance is obtained at the lowest pulsed duty
cycle. The study suggests that plasma generated at a low pulsed duty cycle and a higher peak discharge current
exhibits higher electron temperature and less fluctuations in plasma emission which are more efficient in
attaining high surface hardness, better wear, and corrosion resistance to nitride plain carbon steel.
1. Introduction cathode. However, this arrangement limits the maximum current and
power beyond a specific level; the higher ion bombardment can damage
The surface properties of iron alloys can be modified by thermo the samples due to significant sputtering [3]. Further, the direct
chemical diffusion techniques, such as nitriding, in which nitrogen bombardment of ions on the samples can cause over-heating of samples,
atoms are diffused in the material at a suitable temperature [1]. Initially, non-uniform nitriding, and edge effect. These limitations of the CPN
conventional nitriding techniques, including salt-bath nitriding and gas restrict the extent of performance improvements for industrial
nitriding, were introduced, which are not eco-friendly, and thus their applications.
use is reduced in industrial sectors [2]. Later on, these conventional Almost two decades ago, a new plasma nitriding concept was
nitriding techniques were substituted by plasma nitriding technique, introduced where the samples are floating or separately biased while the
also known as ionitriding or conventional plasma nitriding (CPN), which discharge is ignited between the outer grounded chamber (anode) and a
remained active for surface modification of steels for several decades. concentric inner perforated cathode to break down the gas [4]. The
The CPN arrangement has a grounded chamber acting as an anode and concept is named in the literature as active screen plasma nitriding and
samples at the cathodic potential, generates ion bombardment at the cathodic cage plasma nitriding (CCPN) [5]. Intense plasma is generated
* Corresponding author.
E-mail address: [email protected] (M. Naeem).
https://doi.org/10.1016/j.surfcoat.2023.129542
Received 9 October 2022; Received in revised form 6 March 2023; Accepted 15 April 2023
Available online 25 April 2023
0257-8972/© 2023 Elsevier B.V. All rights reserved.
M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 1. Schematic representation of cathodic cage plasma nitriding reactor, magnelab current transformer, and plasma diagnostics.
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 2. Time-resolved variation of pulsed current and corresponding emission intensity at different pulsed duty cycles (15–75 %).
the nitriding performance of plain carbon steel [19]. compared for surface modification of plain carbon steel (St-37) in terms
Several power sources can generate plasma, depending upon the of hardness, wear resistance, and corrosion resistance.
required application, including DC discharges, pulsed DC discharges, RF
discharges, and microwave discharges [20,21]. As reported, the 2. Experimental details
nitriding system is commonly operated by DC power sources [21].
However, the pulsed DC discharges are preferred due to additional This work aims to investigate the effect of the pulsed duty cycle on
control on nitriding performance by changing the pulsed frequency or time-resolved plasma parameters and the nitriding performance of the
pulsed duty cycle [22,23]. In pulsed DC glow discharges, the sputtering cathodic cage plasma nitriding (CCPN) system. The CCPN system con
by ions bombardment is effective during the active pulse (on time of a sists of a grounded (anode) stainless steel reactor of 31.5 cm diameter
pulse TON ), whereas the active species of plasma is retained during the and 33.5 cm height, austenitic stainless steel perforated cage as a
whole cycle (T = TON + TOFF ) [24]. Thus, it is important to examine the counter electrode (cathode), as shown in Fig. 1(a). The cage was made
effect of the pulsed duty cycle (TON /(TON + TOFF ) ) on time-resolved up of a 2 mm thick AISI-304 steel sheet with uniformly punched holes of
plasma parameters and nitriding performance. 8 mm diameter on the sidewalls and 6 mm on the top lid. The samples of
Several authors reported the effect of the pulsed duty cycle on plain carbon steel (St-37 grade with a composition (Wt%) 0.11C, 0.56
various substrates in a conventional plasma nitriding system. It includes Mn, 0.03 Si, 0.005 S, 0.005 P, 0.03 Ni, 0.07 Cr, and balance Fe) were
Menthe and Rie [25] on nitriding of AISI-304 steel, Alves et al. [22] on treated at 400 ◦ C temperature for 4 h at a floating potential, and samples
AISI-409 steel, Díaz-Guillén on AISI-4340 steel [26], Taherkhani and were kept at a vertical distance of 55 mm from cage lid. The plasma was
Mahboubi [27] on AISI-H13 steel, and they reported a significant effect generated at an optimum pulsed frequency of 40 kHz, filling pressure
of pulsed duty cycle on nitriding performance. However, the effect of the 150 Pa, gases composition of N2/ H2 (3/ 2) with a total flow rate of 50
pulsed duty cycle on CCPN is limited in the literature. Previously we sccm, and a small amount of argon gas was added as an actinometer (4
reported the effect of the pulsed duty cycle on nitriding of austenitic %).
stainless steel AISI-304 and AISI-316 and observed that hardness, wear A self-assembled triple Langmuir probe (TLP), made up of tungsten
resistance, and corrosion resistance can be improved by tuning the wires and operated by a variable DC voltage source (0–500 V), was used
pulsed duty cycle [28,29]. As in the pulsed DC glow discharges, plasma's to measure the time-resolved electron temperature. The tungsten wires
behavior varies rapidly, depending upon the frequency of the power of 0.38 mm diameter, tip length of 5 mm, and wires separation of 1 mm.
source, the plasma is turned on and off in a few nano-second to micro- The time-resolved changes in electron temperature were measured by
seconds time, and for better understanding, time-resolved plasma di the differential probe and digital storage oscilloscope, as reported by
agnostics is required. Particularly, the time-resolved plasma diagnostics Qayyum et al. [30]. On a digital storage oscilloscope, the time-resolved
of such discharge are still limited. changes in peak discharge voltage and current were also monitored by
In this work, a combination of current and voltage, photomultiplier, high voltage probe Testec Hvp-15HF and Magnelab Current transformer
the triple Langmuir probe and ICCD camera are used for time-resolved CT-E1.0-BNC, respectively. The corresponding time-resolved changes in
plasma diagnostics to examine variations in plasma with a pulsed duty emission from the plasma were monitored by a photomultiplier tube.
cycle (15–75 %). The time-dependent variation in peak current is The space and time-resolved emission from the cathodic cage are
observed and compared with emission from plasma and electron tem measured using an Andor intensified charge-coupled device (ICCD)
perature. In addition, the effect of the pulsed duty cycle on nitrogen camera and an interference filter to image nitrogen 391 nm emission
atomic and molecular species density is monitored by optical emission line. The line is significantly excited from the ground state nitrogen
spectroscopy. Finally, the results obtained from plasma diagnostics are atoms with a threshold of 18.7 eV [31]. The camera is focused on the
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 3. Time-resolved variation of electron temperature measured by triple Langmuir probe at different pulsed duty cycles (15–75 %).
single hole of the hollow cathode with a lens and imaged using a Thorlab delay in the internal delay generator of the camera. The camera only
optical emission filter with 390 nm center wavelength and 10 nm images a single image at each time step. The emission from the center of
bandwidth, as shown in Fig. 1(b). The camera is externally triggered and the single image is horizontally binned and plotted as a function of time.
synchronized by the high voltage pulse from the voltage probe using a Further details about the PROES are discussed in the following papers
TTi pulse/signal generator. The images are acquired with a 0.1 μs time [32–34]. The space averaged optical emission spectroscopy (OES)
resolution during the whole voltage pulse and beyond by varying the analysis was conducted by a high-resolution spectrometer, and its
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 4. Time-resolved evaluation of plasma emission recorded by the ICCD camera at various pulsed duty cycle (a) 15 %, (b) 30 %, (c) 45 %, and (d) 60 %.
Fig. 5. Time-resolved evaluation of plasma emission recorded by the ICCD camera at various peak currents by keeping 15 % duty cycle (a) 4 A (b) 5 A (c) 6 A (d) 7 A
(e) 8A.
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
( [ ])
Fig. 8. Variation of nitrogen active species density [N], N+
2 as a function of
pulsed duty cycles (15–75 %).
Fig. 6. Emission spectra of nitrogen bands and argon line in the wavelength
range (365–430 nm) at various pulsed duty cycles (15–75 %).
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
sheath collapses; as a result, the hot electrons in the plasma are not
confined [38]. The loss of these hot electrons from plasma can cause an
increase in plasma potential during the pulse-off time. This increase in
plasma potential can cause a burst of energetic ions toward the substrate
and can also increase the electron temperature [38].
The space and time-resolved changes in the discharge structure can
be observed in PROES data in Fig. 4. It shows that discharge is intensely
luminous in the center, indicating the bulk, and less intense at the top
and bottom, indicating the sheath. All the measurements have been
normalized; therefore, they only provide the relative luminosity
changes. The sheath width shrinks with the increase in the plasma
density and vice versa. For all the results here, a similar peak current is
used. The peak current has been varied in Fig. 5, where the duty cycle
has been kept constant. The electron temperature results show an
intense electron temperature in the beginning pulse, which drops later
and usually saturate at lower values. During the whole pulse, the sheath
width and the electron density fluctuate. The origin of such change is not
understood and could be because of instability. This could be similar to
past measurements of kHz time scale instabilities [43]. The creation of
instabilities in discharge can be associated with the changes in electron
Fig. 10. X-ray diffraction pattern of nitrided plain carbon steel samples at temperature and electron number density as a source of the disturbance.
various pulsed duty cycles (15–75 %). When the electron temperature is decreased in the plasma, it can reduce
the ionization rate in the discharge and the resultant decrease in electron
attraction electric field for ions vanishes. Breilmann et al. [38] investi number density. In this case, the disturbance could be balanced, and no
gated the effect of pulse width on high-power impulse magnetron instability will exist in the plasma, referred to as negative feedback, as
sputtering of titanium. They observed that when the plasma is switched reported [44]. However, in the case of electronegative discharge, a
off in the pulse voltage, the target sheath collapses; therefore, the plasma decrease in electron temperature can cause an effective increase in
environment's hot electrons are not confined. Due to the loss of these hot electron density when the attachment rate is strongly reduced than the
electrons from plasma, the plasma-potential increases soon after the ionization rate. This increase in electron number density due to a
plasma is switched off. This increase in plasma potential can cause a decrease in electron temperature is referred to as positive feedback and
burst of energetic ions toward the substrate. is responsible for instability in plasma [44–46]. This aspect should be
Considering the above discussion, we investigated the effect of the investigated further in the future. The comparison of Figs. 3 and 4 shows
pulsed duty cycle by keeping the time average current as a fixed a discrepancy in behavior of plasma observed by PMT and ICCD camera,
parameter instead of pulsed power. The external heater is used beneath which can be attributed as: the ICCD shows the light from a single hole,
the sample holder to maintain the processing temperature. This through a filter, and thus it indicates energetic electrons. On the other
approach is also recently reported for plasma oxidation by varying the hand, PMT shows light from overall emission from plasma.
pulsed duty cycle at constant pulsed current density, and they found a The emission has been investigated further for only 15 % duty cycle
significant effect of the pulsed duty cycle on oxidation performance in Fig. 5 as a function of peak current. The measurements show that at
[39–41]. In this study, we kept the time average current at a constant 4A peak current, the discharge has one weak structure at the start and
value of 1.2 A (the maximum available current at which stable discharge two follow-up stronger emission structures during the pulse. With the
is obtained), and the pulsed duty cycle varied from 15 % to 75 %, and increase in peak current, the fluctuations decrease and the two strong
corresponding changes in peak current and peak voltage are observed as structures are merged together (at 8 and 9A). The lower fluctuations in
provided in Table 1. It shows that while changing the duty cycle, the emission at higher currents show that the discharge is more stable and
corresponding change in peak current is significant, while voltage is uniform in these conditions. Also, the increase in peak current increases
changed in the 400–600 V range. The time-resolved variation in emis the width of the emission structures and decrease in the sheath width,
sion from plasma and the corresponding peak current is shown in Fig. 2. which indicates a higher electron density at higher currents.
It shows that emission intensity from plasma, which indicates energetic Thus, the time-resolved ICCD imaging depicts that at a low duty
electrons in the plasma, is highest for the 15 % pulsed duty cycle and cycle and higher peak discharge current, an intense and more stable
lowest when plasma is generated at 75 % pulsed duty cycle. The emis discharge is generated in each hole of the cathode. These observations
sion intensity corresponds to the peak current rather than the total are qualitative in nature; however, they provide important information
current. During the pulsed-on time (as the negative cycle is used for regarding the time resolved characteristics of the discharge in each hole
plasma generation, thus the negative cycle is the active cycle), the of the cathode.
emission from plasma increases and achieves a maximum and stays
constant for the higher duty cycle after the maximum emission, which
decays linearly with the pulse off time and starts increasing with the next 3.2. Optical emission spectroscopy diagnostics
pulse. The emission corresponds with the measurement of flux and
sputtering in HIPIMS reported in the literature [38,42]. The space averaged optical emission spectroscopy qualitatively
Fig. 3 shows the measured time-resolved variation in electron tem measures the plasma active species density. The spectra recorded for the
perature using a triple Langmuir probe. It depicts that at a higher duty first negative system of nitrogen N2+ and second positive system of ni
cycle (45–75 %), the electron temperature has a sharp peak in the trogen N2 in the spectral range of 365–430 nm at various duty cycles are
beginning and later drops to lower values and is significantly lower presented in Fig. 6. The normalized emission intensities of various ni
during the passive time of pulsed current (pulse-off time). In contrast, at trogen lines, iron lines, and nitrogen bands as a function of the pulsed
a low duty cycle (15–30 %), the electron temperature does not drop from duty cycle are presented in Fig. 7. It depicts that emission intensities
the initial sharp peak, and electron temperature slowly drops during the drop with the increase in the pulsed duty cycle. Also, the nitrogen active
[ ]
pulse-off time. This dependence of electron temperature on the pulsed species density [N], N+2 presented in Fig. 8 shows a decrease with an
duty cycle can be ascribed as: when the plasma is switched off, the target increase in the pulsed duty cycle. These results are in agreement with a
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 11. Surface (along with corresponding EDS) and cross-sectional SEM images of nitrided plain carbon steel samples at different pulsed duty cycles (a, b) 15 %,
and (c, d) 30 %.
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Fig. 12. SEM images of wear tracks of plain carbon steel samples along with wear rates (a) untreated, (b) 15 %, and (c) 30 %.
time-resolved variation of electron temperature described in the above be achieved. In contrast with CPN, the CCPN involves the deposition of
section. Therefore, higher quantities of nitrogen-active species are cathodic cage sputtered material on the floating samples, and thus using
generated at a higher current where higher electron temperature is a cathodic cage of some specific material containing nitride-forming
observed. Furthermore, the iron line increases, indicating that the elements can be used to improve nitriding performance. Here, an
sputtering increases with the current. Thus, the nitrogen active species austenitic stainless steel cathodic cage is used, which contains sufficient
density and cathodic cage sputtering increase at a shorter pulse with a chromium contents, and thus significant improvement in hardness is
higher peak current. obtained. At the lowest duty cycle, the peak discharge current is
maximum, which can cause more sputtering from the cathodic cage, and
also nitrogen gets dissociated by electron impact dissociation, and thus
3.3. Surface modification of plain carbon steel iron nitride is deposited on the sample surface, which can be confirmed
by structural analysis. The higher sputtering at the low duty cycle can be
The plasma nitriding of plain carbon steel is performed in compa ascribed to the loss of hot electrons during the pulse-off time [38]. It
rable conditions to the plasma diagnostics. The surface hardness of plain increases plasma potential, and the sheath in front of the substrate ex
carbon steel is analyzed and presented in Fig. 9. The hardness of plain pands toward the bulk of the plasma. Thus, the ions experience an
carbon steel (~150 HV) is enhanced to ~500–900 HV, and a maximum electric field due to the plasma sheath expansion, and a burst of ions
hardness is obtained at the lowest duty cycle, which agrees with results reaches the cathode.
obtained from plasma diagnostics. The literature [15–18] reports that The incorporation of nitrogen atoms in the sample surface is higher
conventional plasma nitriding of plain carbon steel cannot achieve at the low-duty cycle; it can cause higher stresses on the sample surface
satisfactory hardness due to the absence of nitride-forming elements and increase strain levels [47]. This increase in strain level is responsible
(like chromium, aluminum, vanadium, and molybdenum). When for the highest surface hardness. The surface hardness reported here is
nitride-forming elements are absent, reasonable surface hardness cannot
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
Fig. 13. Anodic polarization corrosion curves of untreated and nitrided samples.
higher than reported literature on plain carbon steel, such as Ashrafi structure, in which iron atoms lie on the corner of the cubic structure
zadeh et al. [48] 470 HV, Nakata et al. [17] 400–800 HV by additional and the faces site, and nitrogen atoms lie at the octahedral site [50]. The
treatment for alloying elements deposition, and Madanipour et al. [16] higher surface hardness at low duty cycle can be ascribed to the domi
760 HV by additional aluminum deposition and long-processing time. It nant presence of Fe3 N having hcp structure, in which the number of slip
shows that the pulsed DC CCPN system can be used effectively for the planes is less than the number of slip planes in fcc structure, and thus
surface hardness of plain carbon steel, specifically if operated at a low- there is less probability of deformation under the normal loads.
pulsed duty cycle. The nitrided layer is examined by scanning electron microscopy
The structural composition of nitrided steel samples by X-ray (SEM), and surface and cross-sectional SEM images are presented in
diffraction is presented in Fig. 10. The XRD pattern of the base sample Fig. 11. The surface of nitrided samples (Fig. 11 a, c) depicts the pres
shows the presence of the α‑iron phase, whereas, after plasma nitriding, ence of uniformly distributed particles, which are agglomerated in
these peaks appear to diminish due to the formation of the iron nitride bunches. These particles are of iron nitrides, which are deposited due to
layer. The sample nitrided at low duty cycle shows that iron peaks are iron sputtering from the cathodic cage and its combination with nitro
suppressed due to better conversion of the skin layer to iron nitrides. The gen atoms, as presented in several models of CCPN [11,12]. This state
nitrided samples show the presence of added phase of iron-nitrides ment is supported by corresponding EDS spectrum, which shows the
(Fe4 N, Fe3 N) and iron nitride phases are intense for sample nitrided at presence of iron, chromium and nitrogen on the treated sample. The
low-duty cycle. It indicates the formation of a thick nitrided layer under additional presence of chromium depicts that it is deposited due to
this condition. The improvement in hardness can be ascribed to the sputtering from cathodic cage, as discussed in the introduction. The
formation of iron nitrides, which is harder than iron. However, the cross-sectional SEM images (Fig. 11 b, d) show the formation of 2.8 μm
difference in hardness with the duty cycle can be credited to the crystal and 1.38 μm thick layers by keeping a duty cycle of 15 % and 30 %,
structure of Fe4 N and Fe3 N nitride phases. As Fe3 N exhibits layers of iron respectively. This formation of a thick nitrided layer at a low duty cycle
and nitrogen as Fe − N − Fe − N − Fe, where nitrogen atoms play the role can be attributed to the higher peak current under this condition, as
of spaces along the c-axis of hexagonal closed pack (hcp) structure of described earlier.
iron sublattice [49]. In contrast, Fe4 N have a face-centered cubic (fcc) The wear performance of nitrided plain carbon steel samples is
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M. Naeem et al. Surface & Coatings Technology 464 (2023) 129542
References [29] M. Naeem, H.A. Raza, M. Shafiq, M. Zaka-ul-Islam, J. Iqbal, J.C. Díaz-Guilléne,
M. Zakaullah, Effect of pulsed duty cycle control on tribological and corrosion
properties of AISI-316 in cathodic cage plasma nitriding, Mater. Res. Express 4
[1] J. Yao, F. Yan, B. Chen, Y. Yang, Y. Xu, M. Yan, Y. Zhang, Dual-strengthening of
(2017), 116507.
steel surface and bulk via synergistic effect of plasma nitriding: a case study of M50
[30] A. Qayyum, N. Ahmad, S. Ahmad, F. Deeba, R. Ali, S. Hussain, Time-resolved
steel, Surf. Coat. Technol. 409 (2021), 126910.
measurement of plasma parameters by means of triple probe, Rev. Sci. Instrum. 84
[2] V.T. Bonow, D.S. Maciel, N.L. Fenner, A. Reguly, A. Zimmer, C.G. Zimmer,
(2013), 123502.
Nitriding in non-toxic salts bath: an approach to implement cleaner production in
[31] Y. Itikawa, Cross sections for electron collisions with nitrogen molecules, J. Phys.
the metallurgic industry, Clean. Eng. Technol. 4 (2021), 100169.
Chem. Ref. Data 35 (2006) 31–53.
[3] J. Musil, J. Vlček, M. Růžička, Recent progress in plasma nitriding, Vacuum 59
[32] Z.-U.-I. Mujahid, J. Schulze, Wave-like emission propagation and fine structures at
(2000) 940–951.
the contact points of adjacent dielectric pellets in packed bed plasma reactors
[4] C. Li, T. Bell, H. Dong, A study of active screen plasma nitriding, Surf. Eng. 18
(PBPRs) operated in helium, AIP Adv. 12 (2022) 015128.
(2002) 174–181.
[33] Z. Mujahid, A. Hala, Plasma dynamics in a packed bed dielectric barrier discharge
[5] A. Nishimoto, K. Nagatsuka, R. Narita, H. Nii, K. Akamatsu, Effect of the distance
(DBD) operated in helium, J. Phys. D. Appl. Phys. 51 (2018), 11LT02.
between screen and sample on active screen plasma nitriding properties, Surf. Coat.
[34] M. Zaka-ul-Islam, Dynamics of a pulsed inductively coupled oxygen plasma, Phys.
Technol. 205 (2010) S365–S368.
Plasmas 23 (2016).
[6] P. Hubbard, S. Dowey, E. Doyle, D. McCulloch, The influence of bias and in-situ
[35] M. Naeem, K. Hussain Khan, M. Shahid, J. Iqbal, M. Shafiq, M. Zaka-ul-Islam,
cleaning on through cage (TC) or active screen plasma nitrided (ASPN) steels, BHM
M. Zakaullah, Non-intrusive measurement of electron, vibrational, rotational
Berg- Huttenmann. Monatsh. 151 (2006) 118–122.
temperatures and active species concentration in N2–H2 cathodic cage plasma,
[7] P. Hubbard, D.G. McCulloch, E.D. Doyle, S.J. Dowey, J.N. Georges, A fundamental
Surf. Coat. Technol. 344 (2018) 233–243.
contribution to a study of the active screen plasma nitriding process, BHM Berg-
[36] M. Naeem, M. Zaka-ul-Islam, M. Shafiq, M. Bashir, J. Díaz-Guillén, M. Zakaullah,
Huttenmann. Monatsh. 151 (2006) 441–445.
Influence of cathodic cage diameter on mechanical properties of plasma nitrided
[8] P. Hubbard, J. Partridge, E. Doyle, D. McCulloch, M. Taylor, S. Dowey,
AISI 304 steel, Surf. Coat. Technol. 309 (2017) 738–748.
Investigation of nitrogen mass transfer within an industrial plasma nitriding system
[37] A. Butler, N. Brenning, M.A. Raadu, J.T. Gudmundsson, T. Minea, D. Lundin, On
I: the role of surface deposits, Surf. Coat. Technol. 204 (2010) 1145–1150.
three different ways to quantify the degree of ionization in sputtering magnetrons,
[9] C. Zhao, C.X. Li, H. Dong, T. Bell, Study on the active screen plasma nitriding and
Plasma Sources Sci. Technol. 27 (2018), 105005.
its nitriding mechanism, Surf. Coat. Technol. 201 (2006) 2320–2325.
[38] W. Breilmann, C. Maszl, J. Benedikt, A. Von Keudell, Dynamic of the growth flux at
[10] C. Li, T. Bell, Principles, mechanisms and applications of active screen plasma
the substrate during high-power pulsed magnetron sputtering (HiPIMS) of
nitriding, Heat Treat. Metals 30 (2003) 1–7.
titanium, J. Phys. D. Appl. Phys. 46 (2013), 485204.
[11] S.C. Gallo, H. Dong, On the fundamental mechanisms of active screen plasma
[39] T. Arunnellaiappan, N. Kishore Babu, L. Rama Krishna, N. Rameshbabu, Influence
nitriding, Vacuum 84 (2009) 321–325.
of frequency and duty cycle on microstructure of plasma electrolytic oxidized
[12] A. Saeed, A. Khan, F. Jan, M. Abrar, M. Khalid, M. Zakaullah, Validity of
AA7075 and the correlation to its corrosion behavior, Surf. Coat. Technol. 280
“sputtering and re-condensation” model in active screen cage plasma nitriding
(2015) 136–147.
process, Appl. Surf. Sci. 273 (2013) 173–178.
[40] M. Sandhyarani, M. Ashfaq, T. Arunnellaiappan, M.P. Selvan, S. Subramanian,
[13] T. Fraczek, M. Ogorek, Z. Skuza, R. Prusak, Mechanism of ion nitriding of 316L
N. Rameshbabu, Effect of electrical parameters on morphology and in-vitro
austenitic steel by active screen method in a hydrogen-nitrogen atmosphere, Int. J.
corrosion resistance of plasma electrolytic oxidized films formed on zirconium,
Adv. Manuf. Technol. 109 (2020) 1357–1368.
Surf. Coat. Technol. 269 (2015) 286–294.
[14] M. Zaka-ul-Islam, M. Naeem, M. Shafiq, A.J. Sitara, M.Zakaullah Al-Rajab, Active
[41] S.-F. Lu, B.-S. Lou, Y.-C. Yang, P.-S. Wu, R.-J. Chung, J.-W. Lee, Effects of duty cycle
screen cage pulsed dc discharge for implanting copper in polytetrafluoroethylene
and electrolyte concentration on the microstructure and biocompatibility of plasma
(PTFE), Mater. Res. Express 4 (2017).
electrolytic oxidation treatment on zirconium metal, Thin Solid Films 596 (2015)
[15] S. Ahangarani, A. Sabour, F. Mahboubi, T. Shahrabi, The influence of active screen
87–93.
plasma nitriding parameters on corrosion behavior of a low-alloy steel, J. Alloys
[42] M. Rudolph, N. Brenning, M.A. Raadu, H. Hajihoseini, J.T. Gudmundsson,
Compd. 484 (2009) 222–229.
A. Anders, D. Lundin, Optimizing the deposition rate and ionized flux fraction by
[16] H. Madanipour, M. Soltanieh, N. Nayebpashaee, Investigation of the formation of
tuning the pulse length in high power impulse magnetron sputtering, Plasma
Al, Fe, N intermetallic phases during Al pack cementation followed by plasma
Sources Sci. Technol. 29 (2020) 05LT01.
nitriding on plain carbon steel, Mater. Des. 51 (2013) 43–50.
[43] B.B. Sahu, S.H. Kim, J.S. Lee, J.G. Han, Comparison of plasma properties in normal
[17] K. Nakata, W. Yamauchi, K. Akamatsu, M. Ushio, Plasma nitriding behavior of low
and multiple holes hollow cathode RF PECVD and their utility in a-SiNx: H thin
carbon binary alloy steels, Surf. Coat. Technol. 174 (2003) 1206–1210.
film deposition, Vacuum 160 (2019) 316–324.
[18] P.N. Bindumadhavan, S. Makesh, N. Gowrishankar, H.K. Wah, O. Prabhakar,
[44] M.A. Lieberman, A.J. Lichtenberg, A.M. Marakhtanov, Instabilities in low-pressure
Aluminizing and subsequent nitriding of plain carbon low alloy steels for piston
inductive discharges with attaching gases, Appl. Phys. Lett. 75 (1999) 3617–3619.
ring applications, Surf. Coat. Technol. 127 (2000) 251–258.
[45] P. Chabert, A.J. Lichtenberg, M.A. Lieberman, A.M. Marakhtanov, Instabilities in
[19] M. Naeem, M. Shafiq, M. Zaka-ul-Islam, A. Ashiq, J.C. Díaz-Guillén, M. Shahzad,
low-pressure electronegative inductive discharges, Plasma Sources Sci. Technol. 10
M. Zakaullah, Enhanced surface properties of plain carbon steel using plasma
(2001) 478.
nitriding with austenitic steel cathodic cage, Mater. Des. 108 (2016) 745–753.
[46] I.S. Dmitriev, Y.A. Teplova, Y.A. Fainberg, Special features of the charge-exchange
[20] A. Anders, Fundamentals of pulsed plasmas for materials processing, Surf. Coat.
cross section of fast nitrogen ions with a K vacancy, J. Exp. Theor. Phys. 81 (1995)
Technol. 183 (2004) 301–311.
40–48.
[21] H. Conrads, M. Schmidt, Plasma generation and plasma sources, Plasma Sources
[47] J. Díaz-Guillén, E. Granda-Gutiérrez, G. Vargas-Gutiérrez, M. Díaz-Guillén,
Sci. Technol. 9 (2000) 441.
J. Aguilar-Martínez, L. Álvarez-Contreras, Effect of nitriding current density on the
[22] C. Alves, J. Rodrigues, A. Martinelli, The effect of pulse width on the
surface properties and crystallite size of pulsed plasma-nitrided AISI 316L,
microstructure of dc-plasma-nitrided layers, Surf. Coat. Technol. 122 (1999)
J. Mater. Sci. Chem. Eng. 3 (2015) 45.
112–117.
[48] F. Ashrafizadeh, Influence of plasma and gas nitriding on fatigue resistance of plain
[23] M. Sharma, B. Saikia, A. Phukan, B. Ganguli, Plasma nitriding of austenitic
carbon (Ck45) steel, Surf. Coat. Technol. 174 (2003) 1196–1200.
stainless steel in N2 and N2–H2 dc pulsed discharge, Surf. Coat. Technol. 201
[49] G.-K. Li, Y. Liu, D.-W. Zhao, P. Song, L. Ma, C.-M. Zhen, H. Liu, D.-L. Hou, ε-iron
(2006) 2407–2413.
nitrides: intrinsic anomalous Hall ferromagnets, APL Mater. 3 (2015), 026105.
[24] K.E. Cooke, J. Hamsphire, W. Southall, D.G. Teer, The industrial application of
[50] A.V. dos Santos, J.V. Santos, M.A. Costa, Pressure influence on the stability and
pulsed DC bias power supplies in closed field unbalanced magnetron sputter ion
formation of γ-Fe4N when transformed into Fe4O, Mater. Res. 16 (2013)
plating, Surf. Coat. Technol. 177–178 (2004) 789–794.
1260–1265.
[25] E. Menthe, A. Bulak, J. Olfe, A. Zimmermann, K.T. Rie, Improvement of the
[51] A.T. Tabrizi, H. Aghajani, H. Saghafian, F.F. Laleh, Correction of Archard equation
mechanical properties of austenitic stainless steel after plasma nitriding, Surf. Coat.
for wear behavior of modified pure titanium, Tribol. Int. 155 (2021), 106772.
Technol. 133–134 (2000) 259–263.
[52] N.E. Dan, S.N.S.M. Sabri, P. Hussain, H. Mohebbi, The influence of nitrogen on the
[26] J. Díaz-Guillén, A. Campa-Castilla, S. Pérez-Aguilar, E. Granda-Gutiérrez, A. Garza-
wear resistance of ferritic stainless steel, IOP Publishing, pp. 012109.
Gómez, J. Candelas-Ramírez, R. Méndez-Méndez, Effect of duty cycle on surface
[53] M. Yazıcı, O. Çomaklı, T. Yetim, Yetim, Çelik, the effect of plasma nitriding
properties of AISI 4340 using a pulsed plasma nitriding process, Superficies y vacío
temperature on the electrochemical and semiconducting properties of thin passive
22 (2009) 1–4.
films formed on 316L stainless steel implant material in SBF solution, Surf. Coat.
[27] K. Taherkhani, F. Mahboubi, Investigation nitride layers and properties surfaces on
Technol. 261 (2015) 181–188.
pulsed plasma nitrided hot working steel AISI H13, Iran. J. Mater. Sci. Eng. 10
[54] J. Díaz-Guillén, E. Granda-Gutiérrez, I. Guzman, J. Del Prado, J. Gasca, A. Garza,
(2013).
Increasing the surface properties of a vanadium microalloyed steel by current-
[28] M. Naeem, M. Waqas, I. Jan, M. Zaka-ul-Islam, J.C. Díaz-Guillén, N.U. Rehman,
controlled plasma nitriding, Int. J. Electrochem. Sci. 10 (2015) 1833–1842.
M. Shafiq, M. Zakaullah, Influence of pulsed power supply parameters on active
screen plasma nitriding, Surf. Coat. Technol. 300 (2016) 67–77.
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