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MEMS

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6 views

MEMS

Uploaded by

cetinabdullah2003
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Micro-Electromechanical Systems:

Accelerometers
As the name implies, Micro-Electromechanical Systems (MEMS) combine mechanical and
electrical components at the microscale. They are combined by using the techniques of
microfabrication. The types of MEMS components can be very simple structures or extremely
complex with a lot of moving parts. One of the most widely used MEMS products is the
accelerometer. It measures the acceleration forces due to motion, vibration, or gravity.

Figure 1 MEMS Based Accelerometer


The working mechanism of MEMS based Accelerometer can be seen in Figure 1. A moving
plate mass is suspended within a fixed plate by springs. When acceleration happens, the
moving plate moves relative to the fixed plate. A capacitance is formed between two plates.
When the plate moves the gap C will change and hence the capacitance. The difference
between the two capacitances will give us the magnitude and direction of the acceleration.
This difference is then converted to electrical signals.

MEMS accelerometers have wide application areas. You can be even using them right now.
They are used in electronics like tablets and gaming devices to track motion and screen
orientation. So, when you play temple run on your phone, you rely on this little component.
Also, due to their rapid detection ability they are used in automative and healthcare industries.
For example, for airbag deployment or fall detection.

In conclusion, MEMS accelerometers show us how micro-scale engineering transforms


technology. With extremely compact design, low power consumption and scalable
manufacturing, they became an essential product across multiple industries.

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