Scribd
Upload
25 views

MEMS Question Bank

Uploaded by

Kabilan .s
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
25 views

MEMS Question Bank

Uploaded by

Kabilan .s
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 1

MEMS Question Bank

Unit I
1.Discuss in detail about the silicon and its compounds in microsystems.
2. Discuss in detail about the polymers as material for MEMS .
3. Describe the role of semiconductor materials in the design of MEMS and also calculate the
charge carrier concentration
4. Discuss in detail about the properties of silicon as a substrate material
Unit II
1. What is photolithography? Explain the principle of photolithography in detail with a neat
sketch.
2. Give a detailed description on E-Beam Lithography.
3. Give a detailed description on X-ray Lithography.
4. With a neat diagram explain in detail about Ion Implantation and Diffusion and thermal
oxidation.
Unit III
1. Describe about Surface micromachining technique?
2. Describe about Bulk micromachining technique?
3. Briefly explain the LIGA process?
4.Explain isotrophic and anisotrophic etching

Unit IV
1.Describe in detail about RF MEMS
2.Explain in detail about the Microfluidic system
3.Explain in detail about Pressure sensor and thermal sensor.
4. Explain MOEMS

Unit V
1.Describe in detail about the applications of MEMS in automobile safety systems.
2. Describe in detail about the micro reactor and microbot.
3.Discuss in detail about Lab on chip
4.Discuss about biomedical application

You might also like